CN113029421A - Array type pressure measuring device - Google Patents
Array type pressure measuring device Download PDFInfo
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- CN113029421A CN113029421A CN202110443147.8A CN202110443147A CN113029421A CN 113029421 A CN113029421 A CN 113029421A CN 202110443147 A CN202110443147 A CN 202110443147A CN 113029421 A CN113029421 A CN 113029421A
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- alloy substrate
- sensitive chip
- pressure
- piezoresistive sensitive
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention relates to the technical field of multichannel pressure measurement, in particular to an array type pressure measurement device, which comprises: the gas path system is formed by sequentially and hermetically connecting a first alloy substrate with gas guide holes, a second alloy substrate, a third alloy substrate and a fourth alloy substrate; the circuit system mainly comprises a piezoresistive sensitive chip and a first circuit board; applying reference pressure on the front surface of the piezoresistive sensitive chip and applying external gas pressure on the back surface of the piezoresistive sensitive chip to generate pressure difference; the first circuit board is used for converting the generated pressure difference into an electric signal which is in direct proportion to the pressure change, outputting the electric signal, and processing and calculating the electric signal. The internal integrated gas circuit system is favorable for miniaturization of the whole pressure measuring device assembly based on the array type piezoresistive sensitive chip and the circuit system.
Description
Technical Field
The invention relates to the technical field of multichannel pressure measurement, in particular to an array type pressure measurement device.
Background
According to the conventional multi-channel pressure measuring device, piezoresistive MEMS sensor chips are arranged on a circuit board in an array mode, the circuit board is assembled on an alloy base and modularized, and the piezoresistive MEMS sensor chips and a gas valve circuit system are assembled and integrated on the basis, so that the problems of complex material system, complex assembly, miniaturization and the like exist.
Disclosure of Invention
The present invention is directed to an array pressure measuring device to solve the above problems.
In order to achieve the purpose, the invention provides the following technical scheme:
an array pressure measurement device comprising:
the gas path system is formed by sequentially and hermetically connecting a first alloy substrate with gas guide holes, a second alloy substrate, a third alloy substrate and a fourth alloy substrate;
the first alloy substrate is provided with an air guide hole and is used for mounting a piezoresistive sensitive chip;
the second alloy substrate is used for mounting the first alloy substrate;
the third alloy substrate is provided with air guide holes penetrating through the front surface and the back surface and a reference pressure air path for setting reference pressure, and the conversion of different functional passages can be realized by moving the third alloy substrate;
the fourth alloy substrate is used for realizing the connection of the internal structure and an external element to be tested or an operating device;
the circuit system mainly comprises a piezoresistive sensitive chip and a first circuit board;
applying reference pressure on the front surface of the piezoresistive sensitive chip and applying external gas pressure on the back surface of the piezoresistive sensitive chip to generate pressure difference;
the first circuit board is used for converting the generated pressure difference into an electric signal which is in direct proportion to the pressure change, outputting the electric signal, and processing and calculating the electric signal.
Furthermore, a piezoresistive strip, a passivation layer and a Pad are formed on the front surface of the piezoresistive sensitive chip, and an open cavity is formed on the back surface of the piezoresistive sensitive chip;
the Pad at least comprises 1 power supply Pad, 1 grounding Pad and 2 signal pads;
the aluminum alloy shell is provided with a cavity for accommodating the PCB and the sealing gasket.
Further, the front surfaces of the first alloy substrate and the second alloy substrate are provided with open cavities, wherein: the open cavity of the first alloy substrate is used for mounting the piezoresistive sensitive chip, and the open cavity of the second alloy substrate is used for mounting the first alloy substrate.
Furthermore, a circuit connector corresponding to the open cavity is arranged on the upper end face of the open cavity on the first alloy substrate, the piezoresistive sensitive chip is electrically connected with the circuit connector through wire bonding, and the circuit connector is vertically arranged and electrically connected with the first circuit chip.
Furthermore, a boss is arranged in a cavity on the front face of the second alloy substrate and used for containing and installing a first circuit board, the first circuit board comprises an instrument amplifying circuit, an ADC and an MCU, the first circuit board is arranged on the first circuit board in a routing or mounting mode, signals generated by the pressure difference of the piezoresistive sensitive chip are amplified by the instrument amplifying circuit, enter the ADC module, then enter the MCU processing unit and finally enter a visual interface for processing and calculation.
Further, the first alloy substrate can be connected to the second alloy substrate by gluing or screwing.
Further, the air vent of the third alloy substrate is divided into a calibration passage, a test passage and a temperature control passage, the calibration passage and the temperature control passage are combined into a first passage, and the third alloy substrate has mobility and can be switched between the calibration passage or the temperature control passage and the test passage by moving.
Furthermore, the second alloy substrate is provided with a top cover and a sealing ring to ensure the air tightness of a cavity formed between the top cover and the sealing ring, and the cavity is provided with an air pipeline and an electric interface to realize connection with an external reference air pressure source and an external electric signal.
Furthermore, the lateral wall of third alloy base plate is equipped with slidingtype guide rail, through the thread tightening to realize third alloy base plate direction of height's location and removal, realize calibration or accuse temperature and the conversion between the test mode, the fourth alloy base plate outside is provided with the stainless steel pipe gas port that corresponds with air guide hole or functional module respectively, still can be in the stainless steel pipe overcoat hose, is convenient for link to each other with external await measuring component or operating device.
Furthermore, a certain piezoresistive sensitive chip in the first alloy substrate can be replaced by a temperature sensor.
Compared with the prior art, the invention has the beneficial effects that:
(1) the aluminum alloy substrate and the piezoresistive sensitive chip are directly bonded by adopting packaging glue, and the first circuit board is electrically interconnected on the side surface of the piezoresistive sensitive chip, so that the assembly stress can be reduced; meanwhile, the aluminum alloy substrate is used as a heat sink and is directly connected with the piezoresistive sensitive chip, the thermodynamic property between the aluminum alloy substrate and the piezoresistive sensitive chip is simple, the temperature distribution of the pressure chip in a working state can be accurately calculated only by a temperature sensor assembled on the circuit board, the thermal stress is easy to accurately control, and the heat dissipation management is facilitated; in addition, a cooling channel is arranged in the aluminum alloy to control the temperature of the array type piezoresistive sensitive chip, so that long-term stability and comprehensive precision are maintained, and performance drift of the device is avoided.
(2) The pressure measuring device has chip-level maintainability, multiple circuit chips are stacked and integrated, the pressure measuring device is convenient to disassemble and can replace a piezoresistive sensitive chip or related circuit system components independently, and the gas circuit system can be disassembled to be cleaned and maintained.
(3) The array type piezoresistive sensitive chip and the circuit system are integrated with the gas circuit system, so that the miniaturization of the whole pressure measuring device assembly body is facilitated.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
FIG. 2 is a schematic diagram of a differential pressure type piezoresistive sensitive chip according to the present invention.
FIG. 3 is a schematic diagram of a piezoresistive sensitive chip for temperature compensation according to the present invention.
FIG. 4 is a schematic front view of a first alloy substrate according to the present invention.
FIG. 5 is a schematic side view of a first alloy substrate according to the present invention.
FIG. 6 is a schematic view of the back side of a first alloy substrate according to the present invention.
FIG. 7 is a schematic front view of a second alloy substrate according to the present invention.
FIG. 8 is a schematic side view of a second alloy substrate according to the present invention.
FIG. 9 is a schematic view of the back side of a second alloy substrate according to the present invention.
FIG. 10 is a schematic front view of a third alloy substrate according to the present invention.
FIG. 11 is a schematic side view of a third alloy substrate according to the present invention.
FIG. 12 is a schematic view of the back side of a third alloy substrate according to the present invention.
FIG. 13 is a schematic front view of a fourth alloy substrate according to the present invention.
FIG. 14 is a schematic side view of a fourth alloy substrate according to the present invention.
FIG. 15 is a schematic view of the back surface of a fourth alloy substrate according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper/lower end", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be configured in a specific orientation, and operate, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed/sleeved," "connected," and the like are to be construed broadly, e.g., "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1-15, the present invention provides a technical solution:
as shown in fig. 1, the pressure measurement device based on an array design and assembly method mainly includes a circuit system 100 composed of a piezoresistive sensitive chip 110 and a first circuit board 130, and an air path system 200 composed of a first alloy substrate 210, a second alloy substrate 220, a third alloy substrate 230, a fourth alloy substrate 240, and the like.
The circuit system 100 comprises a piezoresistive sensitive chip 110, a first circuit board 130, an instrument amplifying circuit 140, an ADC 150, an MCU 160 and the like, wherein signals generated by the piezoresistive sensitive chip 110 due to pressure difference are amplified by the instrument amplifying circuit, enter an ADC module, enter an MCU processing unit and finally enter a visual interface for processing and calculation. The piezoresistive sensitive chip 110 is a silicon substrate, and a piezoresistive strip 111, a passivation layer 112 and a Pad 113 are formed on the front surface of the piezoresistive sensitive chip 110 through processes of epitaxy, oxidation, diffusion, sputtering and the like; an etching process is used to form an open cavity 114 on the back side of the piezoresistive sensitive chip 110. Wherein Pad 113 includes at least 1 power Pad, 1 ground Pad, and 2 signal pads.
The air path system 200 is formed by sequentially and hermetically connecting a first alloy substrate 210 with air vents, a second alloy substrate 220, a third alloy substrate 230 and a fourth alloy substrate 240. Wherein:
the front surface of the first alloy substrate 210 is provided with 8 independent open cavities 212, 8 piezoresistive sensitive chips 110 can be mounted side by side, and the bottom surface of the open cavity 212 is provided with an air vent 211 led out from the closed end surface of the open cavity 212.
The second alloy substrate 220 has an open cavity on its front surface, and 8 groups of first alloy substrates 210 can be mounted side by side, and the first alloy substrates 210 can be bonded on the second alloy substrate 220 by using glue or screw threads, so that 64(8 × 8 array) piezoresistive sensitive chips 110 can be mounted in total.
The front surface of the second alloy substrate 220 is provided with an open cavity, and a boss is arranged in the cavity for accommodating and mounting the first circuit board 130, including the instrument amplification circuit 140, the ADC 150, the MCU 160 and the like, arranged thereon in a wire bonding or surface mounting manner.
The upper end face of the open cavity of the first alloy substrate 210 is provided with circuit connectors 120 corresponding to 8 independent open cavities, the piezoresistive sensitive chips 110 are electrically connected with the circuit connectors 120 through wire bonding, and the circuit connectors 120 are vertically arranged and electrically connected with the first circuit piece 130.
The second alloy substrate 220 is provided with a top cover 250 and a sealing ring to ensure the air tightness of a chamber formed between the top cover and the sealing ring, and the chamber has an air pipeline and an electrical interface to realize connection with an external reference air pressure source and an external electrical signal.
An air vent 211 is arranged in each open cavity 212 of the first alloy substrate 210 and is communicated with the back cavity of the piezoresistive sensitive chip, and the lower end face of the air vent is led out.
The second alloy substrate 220 is provided with an air guide hole 221 penetrating through the front surface and the back surface and a reference pressure air path 222 for setting reference pressure; the third alloy substrate 230 has an air guide hole 231 penetrating the front and back surfaces and a reference pressure air passage 232 for setting a reference pressure; wherein the air vent hole 233 is divided into a calibration passage 233a, a test passage 233b, and a temperature control passage 233c, and the calibration passage 233a and the temperature control passage 233c are merged into a first passage; the fourth alloy substrate 240 is provided with an air guide hole 241 penetrating through the front surface and the back surface and a reference pressure air path 242 for setting reference pressure; the third alloy substrate 230 has mobility, and can be switched between the calibration via 231a or the temperature control via 231c and the test via 231b by the movement; and the air guide pipe between the alloy substrates is provided with a sealing ring to ensure the sealing performance of the air path system.
The second alloy substrate 220 and the fourth alloy substrate 240 are fixedly connected by screws.
The side wall of the third alloy substrate 230 is provided with a sliding guide 234 fixed by a screw 235 to realize the positioning and moving in the height direction of the third alloy substrate, and realize the conversion between calibration or temperature control and test mode.
The outer side of the fourth alloy substrate 240 is provided with a stainless steel pipe air port 245 corresponding to the air guiding hole or the functional module, and a hose 246 may be further sleeved outside the stainless steel pipe 245 for facilitating connection with an external device to be tested or an operating device.
Preferably, a certain piezoresistive sensitive chip in the first alloy substrate of the device is replaced by a temperature sensitive signal, the field temperature is obtained through processing of a circuit system, and the device can be set in a calibration mode and a working mode.
In the calibration mode, a chamber reference pressure formed by the first alloy substrate and the second alloy substrate is set, and an external calibration standard gas source enters from the gas vent 243 of the fourth alloy substrate 240, passes through the calibration gas path 233a of the third alloy substrate 230, enters the gas vent 221 of the second alloy substrate 220, and finally enters the back cavity 114 of the piezoresistive sensitive chip 110 attached to the upper part of the first alloy substrate 210. Each piezoresistive sensitive chip senses a signal generated by pressure difference and a signal generated by the temperature sensitive chip is transmitted to the operational amplifier, the signals are amplified, enter the analog-to-digital conversion unit for analog-to-digital conversion processing, finally enter the processor, record the temperature T and the relation between the input pressure and the generated electrical signal, establish the relation between the input pressure and the generated electrical signal under different environmental temperature conditions, and store the relation to the MCU.
In the working mode, the external air enters from the plurality of air guide holes 241 of the fourth alloy substrate 240, passes through the test passage 231 of the third alloy substrate 230, enters the air guide holes 221 of the second alloy substrate 220, passes through the air guide holes 211 of the first alloy substrate 210, and finally enters the piezoresistive sensitive chips 110 attached to the upper part of the first alloy substrate 210, each piezoresistive sensitive chip 110 can be independently measured, and the relational expressions of the input pressure and the generated electrical signals under different environmental temperature conditions established in the calibration mode are called to realize fitting compensation.
Under the reference pressure setting mode, external air enters from the reference pressure air path 242 of the fourth alloy substrate 240, passes through the reference pressure air path 232 of the third alloy substrate 230, enters the reference pressure air path of the second alloy substrate 220, and finally enters the back cavity 114 of the piezoresistive sensitive chip 110 attached to the upper part of the first alloy substrate 210, so that the reference pressure setting of the piezoresistive sensitive chip is completed.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. An array pressure measurement device, comprising:
the gas path system is formed by sequentially and hermetically connecting a first alloy substrate with gas guide holes, a second alloy substrate, a third alloy substrate and a fourth alloy substrate;
the first alloy substrate is provided with an air guide hole and is used for mounting a piezoresistive sensitive chip;
the second alloy substrate is used for mounting the first alloy substrate;
the third alloy substrate is provided with air guide holes penetrating through the front surface and the back surface and a reference pressure air path for setting reference pressure, and the conversion of different functional passages can be realized by moving the third alloy substrate;
the fourth alloy substrate is used for realizing the connection of the internal structure and an external element to be tested or an operating device;
the circuit system mainly comprises a piezoresistive sensitive chip and a first circuit board;
applying reference pressure on the front surface of the piezoresistive sensitive chip and applying external gas pressure on the back surface of the piezoresistive sensitive chip to generate pressure difference;
the first circuit board is used for converting the generated pressure difference into an electric signal which is in direct proportion to the pressure change, outputting the electric signal, and processing and calculating the electric signal.
2. The array pressure measuring device of claim 1, wherein the piezoresistive sensitive chip has a front surface formed with piezoresistive strips, a passivation layer and a Pad, and a back surface formed with an open cavity;
the Pad at least comprises 1 power supply Pad, 1 grounding Pad and 2 signal pads;
the aluminum alloy shell is provided with a cavity for accommodating the PCB and the sealing gasket.
3. The array pressure measuring device of claim 1, wherein the first alloy substrate and the second alloy substrate have open cavities on their front surfaces, wherein: the open cavity of the first alloy substrate is used for mounting the piezoresistive sensitive chip, and the open cavity of the second alloy substrate is used for mounting the first alloy substrate.
4. The array type pressure measuring device of claim 1 or 3, wherein the first alloy substrate has a circuit connector corresponding to the open cavity on the upper end surface of the open cavity, the piezoresistive sensitive chip is electrically connected to the circuit connector by wire bonding, and the circuit connector is vertically arranged and electrically connected to the first circuit chip.
5. The array pressure measuring device of claim 1 or 3, wherein a boss is disposed in the cavity on the front surface of the second alloy substrate for receiving and mounting a first circuit board, the first circuit board comprises an instrument amplifier circuit, an ADC and an MCU, the first circuit board is disposed thereon in a wire bonding or surface mounting manner, and a signal generated by the piezoresistive sensitive chip due to pressure difference is amplified by the instrument amplifier circuit, enters the ADC module, enters the MCU processing unit, and finally enters the visual interface for processing and calculation.
6. The array pressure measurement device of claim 1, wherein the first alloy substrate is attached to the second alloy substrate by gluing or screwing.
7. The array pressure measuring device of claim 6, wherein the air vent holes of the third alloy substrate are divided into a calibration channel, a test channel and a temperature control channel, and the calibration channel and the temperature control channel are combined into a first channel.
8. The array pressure measuring device of claim 1, wherein the second alloy substrate is provided with a top cap and a sealing ring to ensure the air tightness of a chamber formed therebetween, and the chamber has an air pipeline and an electrical interface for connecting with an external reference air pressure source and an external electrical signal.
9. The array pressure measuring device of claim 7, wherein the side wall of the third alloy substrate is provided with a sliding guide rail, the sliding guide rail is fixed by a screw thread to position and move the third alloy substrate in the height direction, and to switch between the calibration or temperature control and the test mode, the outer side of the fourth alloy substrate is respectively provided with a stainless steel pipe air port corresponding to the air guide hole or the functional module, and a hose can be sleeved outside the stainless steel pipe for connecting with an external device to be tested or an external operating device.
10. The array pressure measuring device of claim 1, wherein one of the piezoresistive sensitive dies in the first alloy substrate is replaced with a temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110443147.8A CN113029421A (en) | 2021-04-23 | 2021-04-23 | Array type pressure measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110443147.8A CN113029421A (en) | 2021-04-23 | 2021-04-23 | Array type pressure measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113029421A true CN113029421A (en) | 2021-06-25 |
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ID=76457844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110443147.8A Pending CN113029421A (en) | 2021-04-23 | 2021-04-23 | Array type pressure measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113029421A (en) |
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2021
- 2021-04-23 CN CN202110443147.8A patent/CN113029421A/en active Pending
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