CN113025956B - Mask plate assembly - Google Patents

Mask plate assembly Download PDF

Info

Publication number
CN113025956B
CN113025956B CN202110216696.1A CN202110216696A CN113025956B CN 113025956 B CN113025956 B CN 113025956B CN 202110216696 A CN202110216696 A CN 202110216696A CN 113025956 B CN113025956 B CN 113025956B
Authority
CN
China
Prior art keywords
mask
layer
shielding
strips
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110216696.1A
Other languages
Chinese (zh)
Other versions
CN113025956A (en
Inventor
刘佳宁
白珊珊
毕娜
刘华猛
关新兴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN202110216696.1A priority Critical patent/CN113025956B/en
Publication of CN113025956A publication Critical patent/CN113025956A/en
Application granted granted Critical
Publication of CN113025956B publication Critical patent/CN113025956B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to the technical field of display, and discloses a mask plate assembly, which comprises: the mask layer comprises a plurality of mask strips which are distributed at intervals; the support frame includes: the shielding strip comprises an outer frame and a plurality of shielding strips which are arranged on the outer frame at intervals; the extending direction of the shielding strips is the same as that of the mask strips, the arrangement direction of the shielding strips is the same as that of the mask strips, and each mask strip is lapped on two adjacent shielding strips; the shielding strip comprises a shielding layer and a first supporting layer positioned on one side of the shielding layer, which is far away from the mask layer; the orthographic projection of the first supporting layer on the mask layer is positioned in the orthographic projection of the shielding layer on the mask layer; the magnetic property of the material of the first support layer is smaller than that of the material of the shielding layer. In this mask plate subassembly, the pressure differential distance that the mask strip receives near overlap joint area and overlap joint area is less, makes the mask strip adsorb more level and smooth, improves the homogeneity of coating by vaporization, reduces the colour mixture risk among the coating by vaporization process.

Description

Mask plate assembly
Technical Field
The invention relates to the technical field of display, in particular to a mask plate assembly.
Background
OLED is one of display device research hot door field at present, the range of application is also more and more extensive, at the in-process of preparation OLED display panel, need adopt vacuum evaporation technology preparation organic luminescent material layer, the coating by vaporization process sets up permanent magnet component and mask plate, the mask plate sets up on the frame, wherein a plurality of mask strips in the mask plate, be provided with the shielding strip between the adjacent mask strip, the shielding strip both can shelter from also can play the supporting role, but, in the present mask plate, the magnetic force between shielding strip and the permanent magnet component is great, make shielding strip and mask strip overlap joint area's magnetic force and mask strip evaporation regional magnetic force differ great, the mask strip adsorbs the unevenness with the overlap joint area's of shielding strip part, produce the coating by vaporization badly easily when the coating by vaporization.
Disclosure of Invention
The invention discloses a mask plate component, wherein shielding strips are provided with shielding layers and first supporting layers, so that a gap between two adjacent mask strips can be well shielded, the mask strips can be well supported, the pressure difference distance between a lap joint area and the vicinity of the lap joint area of the mask strips is effectively reduced, the mask strips are more smoothly adsorbed, the uniformity of an evaporation pattern is improved, the color mixing risk in the evaporation process is reduced, the evaporation quality is improved, and the damage of a spacer layer on a display panel can be effectively reduced.
In order to achieve the purpose, the invention provides the following technical scheme:
a mask plate assembly, comprising: the mask layer comprises a plurality of mask strips which are distributed at intervals;
the support frame includes: the shielding device comprises an outer frame and a plurality of shielding strips which are arranged on the outer frame at intervals; the extending direction of the shielding strips is the same as that of the mask strips, the arrangement direction of the shielding strips is the same as that of the mask strips, each mask strip is lapped on two adjacent shielding strips, and the shielding strips are used for shielding gaps between the two adjacent mask strips;
the shielding strip comprises a shielding layer and a first supporting layer positioned on one side of the shielding layer far away from the mask layer; the orthographic projection of the first supporting layer on the mask layer is positioned in the orthographic projection of the shielding layer on the mask layer; the magnetism of the material of the first supporting layer is smaller than that of the material of the shielding layer.
The mask plate assembly is provided with a support frame, and a mask layer is arranged on the support frame and covers the support frame, wherein the mask layer comprises a plurality of mask strips which are distributed at intervals, the mask strips are fine metal mask plates, and the mask strips are arranged at intervals in turn; the supporting frame comprises an outer frame, a plurality of shielding strips distributed at intervals are arranged on the outer frame, the shielding strips are arranged at intervals in sequence, the extending direction of each shielding strip is the same as that of each mask strip, the arranging direction of each shielding strip is the same as that of each mask strip, each mask strip is lapped on two adjacent shielding strips, each mask strip is positioned between the two shielding strips, the evaporation area of each mask strip corresponds to the interval between the two corresponding adjacent shielding strips, the edge parts of the two side edges of each mask strip are respectively lapped on the edge parts of the two adjacent shielding strips, and as the plurality of mask strips are sequentially arranged, two adjacent mask strips can be lapped on the same shielding strip, and each shielding strip can shield the gap between the two adjacent mask strips so as to facilitate evaporation operation, wherein the shielding strips can also play a supporting role for the mask strips, the shielding strip comprises a shielding layer and a first supporting layer, the first supporting layer is positioned on one side of the shielding layer far away from the mask layer, the shielding layer can completely shield a gap between two corresponding adjacent mask strips, the edge part of each mask strip is overlapped with the edge part of the shielding layer, an overlapping area is formed between each mask strip and the shielding layer, the first supporting layer is positioned on one side of the shielding layer far away from the mask strips, along the arrangement direction of the shielding strips, the size of the first supporting layer is smaller than that of the shielding layer, the orthographic projection of the first supporting layer on the mask layer is positioned in the orthographic projection of the shielding layer on the mask layer, evaporation cannot be influenced, and a better supporting effect can be achieved, the shielding strip can play a good shielding effect on the whole and can have a good supporting effect, wherein the magnetism of the material of the first supporting layer is smaller than that of the material of the shielding layer, and the material of the first supporting layer can be selected from weak magnetic materials, when mask plate subassembly and display panel and magnetic component equipment are together, for prior art, on the basis of not changing the thickness design of blocking strip, can effectually reduce the pressure of blocking strip to the mask strip, make the pressure of blocking strip to the mask strip not too big, to the overlap joint region of blocking strip and mask strip, can effectively reduce the pressure differential distance that the mask strip received near overlap joint region and overlap joint region, can make the mask plate adsorb more smoothly, improve the homogeneity of coating by vaporization pattern, reduce the colour mixture risk among the coating by vaporization process, effectively improve the coating by vaporization quality, and make the pressure of blocking strip to the mask strip suitably reduce, during the coating by vaporization, can also effectively avoid the spacer layer damage on the display panel.
The magnetic property of the material of the first support layer is smaller than the magnetic property of the material of the shielding layer, and the magnetic property refers to the property of the material to be magnetically attracted, and the magnetic property of the material of the first support layer is smaller than the magnetic property of the material of the shielding layer.
Therefore, among the above-mentioned mask plate subassembly, it has shielding layer and first supporting layer to shelter from the strip, both can play fine shielding effect to the clearance between two adjacent mask strips, can also play good supporting role to the mask strip, effectively reduce the pressure differential distance that the mask strip receives near overlap joint area and overlap joint area, it is that the mask strip adsorbs more level and more smooth, improve the homogeneity of coating by vaporization pattern, reduce the colour mixture risk among the coating by vaporization process, improve the coating by vaporization quality, and can also effectively alleviate the spacer layer damage on the display panel.
Optionally, the material of the masking layer is the same as the material of the mask stripes.
Optionally, the size of the shielding layer is the same as the size of the mask stripes in a direction perpendicular to the mask layer.
Optionally, in a gap between each corresponding shielding bar and two adjacent mask bars, an orthographic projection of the first support layer on the mask layer is located in the gap.
Optionally, in a gap between a shielding strip and two adjacent mask strips corresponding to each other, a size of the first support layer is smaller than a size of the gap in a direction perpendicular to an arrangement direction of the shielding strips.
Optionally, the first support layer is an electroformed layer formed on the shielding layer to form an integral structure with the shielding layer.
Optionally, the first supporting layer and the shielding layer are of a split structure.
Optionally, the support frame further includes a plurality of support bars disposed on the outer frame at intervals, and the plurality of support bars and the plurality of shielding bars are disposed in an intersecting manner.
Optionally, the supporting bar comprises a second supporting layer and a third supporting layer located on one side of the second supporting layer far away from the mask layer; along the arrangement direction of the supporting bars, the size of the third supporting layer is smaller than that of the second supporting layer; the material of the third support layer has a magnetic property less than that of the material of the second support layer.
Optionally, the material of the second support layer is the same as the material of the mask stripes.
Optionally, the dimension of the second support layer is the same as the dimension of the mask stripes in a direction perpendicular to the mask layer.
Drawings
Fig. 1 is a top view of a mask plate assembly according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a mask plate assembly according to an embodiment of the present invention;
fig. 3 is a schematic diagram illustrating a distribution structure of the shielding bars and the supporting bars according to an embodiment of the present invention;
fig. 4 is a schematic structural view of the mask strip, the shielding strip and the supporting strip in cooperation according to an embodiment of the present invention;
FIG. 5 is a schematic view of a portion A of FIG. 4;
FIG. 6 is a schematic cross-sectional view taken along line B-B of FIG. 5;
icon: 1-a support frame; 2-a mask layer; 11-an outer frame; 12-a masking strip; 13-supporting strips; 21-mask stripes; 121-a shielding layer; 122-first support layer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
As shown in fig. 1, 2 and 6, an embodiment of the present invention provides a mask plate assembly, including: the mask layer 2 comprises a support frame 1 and a mask layer 2 covering the support frame 1, wherein the mask layer 2 comprises a plurality of mask strips 21 distributed at intervals; the support frame 1 includes: the device comprises an outer frame 11 and a plurality of shielding strips 12 which are arranged on the outer frame 11 at intervals; the extending direction of the shielding strips 12 is the same as the extending direction of the mask strips 21, the arrangement direction of the shielding strips 12 is the same as the arrangement direction of the mask strips 21, each mask strip 21 is lapped on two adjacent shielding strips 12, and the shielding strips 12 are used for shielding gaps between two adjacent mask strips 21; the shielding strip 12 includes a shielding layer 121 and a first supporting layer 122 located on a side of the shielding layer 121 far from the mask layer 2; the orthographic projection of the first supporting layer 122 on the mask layer 2 is positioned in the orthographic projection of the shielding layer 121 on the mask layer 2; the magnetic property of the material of the first support layer 122 is smaller than that of the material of the shielding layer 121.
The mask plate assembly is provided with a support frame, and a mask layer is arranged on the support frame and covers the support frame, wherein the mask layer comprises a plurality of mask strips which are distributed at intervals, the mask strips are fine metal mask plates, and the mask strips are arranged at intervals in turn; the supporting frame comprises an outer frame, a plurality of shielding strips distributed at intervals are arranged on the outer frame, the shielding strips are arranged at intervals in sequence, the extending direction of each shielding strip is the same as that of each mask strip, the arranging direction of each shielding strip is the same as that of each mask strip, each mask strip is lapped on two adjacent shielding strips, each mask strip is positioned between the two shielding strips, the evaporation area of each mask strip corresponds to the interval between the two corresponding adjacent shielding strips, the edge parts of the two side edges of each mask strip are respectively lapped on the edge parts of the two adjacent shielding strips, and as the plurality of mask strips are sequentially arranged, two adjacent mask strips can be lapped on the same shielding strip, and each shielding strip can shield the gap between the two adjacent mask strips so as to facilitate evaporation operation, wherein the shielding strips can also play a supporting role for the mask strips, specifically, the shielding strip comprises a shielding layer and a first supporting layer, the first supporting layer is positioned on one side of the shielding layer far away from the mask layer, the shielding layer can completely shield a gap between two corresponding adjacent mask strips, the edge parts of the mask strips are overlapped on the edge parts of the shielding layer, an overlapping area is formed between the mask strips and the shielding layer, the first supporting layer is positioned on one side of the shielding layer far away from the mask strips, along the arrangement direction of the shielding strips, the size L3 of the first supporting layer is smaller than the size L2 of the shielding layer, the orthographic projection of the first supporting layer on the mask layer is positioned in the orthographic projection of the shielding layer on the mask layer, evaporation is not influenced, and a better supporting effect can be achieved, the whole shielding strip can achieve a good shielding effect and has a good supporting effect, wherein the magnetism of the material of the first supporting layer is smaller than that of the material of the shielding layer, weak magnetic material can be selected to the material of first supporting layer, when mask plate subassembly and display panel and magnetic component equipment are together, compared with the prior art, on the basis of the thickness design that does not change the shielding strip, can effectually reduce the pressure of shielding strip to the mask strip, make the pressure of shielding strip to the mask strip not too big, to shielding strip and the overlap joint region of mask strip, can effectively reduce the pressure difference distance that the part of mask strip near overlap joint region and overlap joint region received, the pressure difference distance that the part of mask strip near overlap joint region and overlap joint region received is less, can make the mask plate adsorb more smoothly, improve the homogeneity of coating by vaporization pattern, reduce the colour mixture risk among the coating by vaporization process, effectively improve the coating by vaporization quality, and make the pressure of shielding strip to the mask strip suitably reduce, during the coating by vaporization, can also effectively avoid the dottle pin layer damage on the display panel.
The magnetic property of the material of the first support layer is smaller than the magnetic property of the material of the shielding layer, and the magnetic property refers to the property of the material to be magnetically attracted, and the magnetic property of the material of the first support layer is smaller than the magnetic property of the material of the shielding layer.
Therefore, among the above-mentioned mask plate subassembly, it has shielding layer and first supporting layer to shelter from the strip, both can play fine shielding effect to the clearance between two adjacent mask strips, can also play good supporting role to the mask strip, effectively reduce the pressure differential distance that the mask strip received near overlap joint area and overlap joint area, it is that the mask strip adsorbs more level and smooth, improve the homogeneity of coating by vaporization pattern, reduce the colour mixture risk among the coating by vaporization process, improve the coating by vaporization quality, and can also effectively alleviate the spacer layer damage on the display panel.
Because the coating by vaporization is the operation under high temperature environment, the overlap joint of mask strip is on sheltering from the strip, the mask strip with shelter from the shielding layer direct contact of strip, for avoiding the shielding layer to producing the influence to the mask strip, generally need select the coefficient of expansion and the coefficient of expansion of mask strip to be close or than the material that the coefficient of expansion of mask strip is low and form the shielding layer, specifically, the material that sets up the shielding layer is the same with the material of mask strip, can effectively avoid the shielding layer because the inflation leads to mask strip fold, guarantee the planarization of mask strip, guarantee the coating by vaporization quality.
Specifically, the material of the mask stripes may be invar, and the thickness dimension D1 of the mask stripes is set to 90 μm or more and 110 μm or less in a direction perpendicular to the mask layer, and specifically, the thickness of the mask stripes may be set to 100 μm.
Specifically, as shown in fig. 6, in the mask plate assembly, along a direction perpendicular to the mask layer, a sum of a thickness D2 of the shielding layer 121 and a thickness D3 of the first supporting layer 122 may be set to be greater than a thickness of the mask layer, where the thickness D2 of the shielding layer 121 may be set to be the same as a thickness D1 of the mask strips 21, so that the shielding layer and the mask strips are kept consistent during evaporation, and the flatness of the mask strips can be effectively ensured.
Specifically, with reference to fig. 4, as shown in fig. 5 and fig. 6, in the above mask plate assembly, in the gap between the shielding bar 12 and the two adjacent mask bars 21 corresponding to each other, the orthographic projection of the first supporting layer 121 on the mask layer is located in the gap, so as to better support the shielding layer, and ensure that the first supporting layer does not extend to the evaporation area of the mask bar due to expansion, thereby avoiding affecting the evaporation and ensuring the evaporation quality. Specifically, in the clearance between the shielding strip that corresponds each other and two adjacent mask strips, along the array orientation that the perpendicular to sheltered from the strip, the size L3 of first supporting layer is less than the size L1 in clearance, and the orthographic projection of first supporting layer on the mask layer is located the clearance, plays better supporting role, and the more effectual first supporting layer of avoiding expands and influence the coating by vaporization, guarantees good coating by vaporization.
Specifically, for the structural arrangement of the first supporting layer and the shielding layer, there may be a plurality of optional arrangement modes, such as:
the first method is as follows:
first supporting layer can set up to the electroforming layer of formation on sheltering from the layer for first supporting layer constitutes the integral type structure with sheltering from the layer, sets up first supporting layer on sheltering from the layer through the mode of electroforming, earlier with sheltering from the formation holistic supporting frame structure of layer, follow-up rewelding on the frame, easy to assemble welding.
The second method comprises the following steps:
first supporting layer and shielding layer are split type structure, and when installing on the frame, weld first supporting layer earlier and frame, then weld the shielding layer in the frame, and successive twice welding process makes first supporting layer and shielding layer form a holistic support frame structure, and the structuredness is good.
Specifically, as shown in fig. 3, among the above-mentioned mask plate subassembly, braced frame is still including locating a plurality of interval distribution's on the frame support strip 13, and a plurality of support strips 13 and a plurality of crossing setting that shelters from strip 12, specifically, the support strip can with shelter from a mutually perpendicular setting, and the support strip can play fine supporting role to the mask strip, avoids mask strip middle part to sink, makes better and the display panel laminating of mask strip, is favorable to guaranteeing the coating by vaporization quality.
Specifically, in the mask plate assembly, the supporting bar comprises a second supporting layer and a third supporting layer positioned on one side of the second supporting layer far away from the mask layer; the size of the third supporting layer is smaller than that of the second supporting layer along the arrangement direction of the supporting bars; the magnetism of the material of third supporting layer is less than the magnetism of the material of second supporting layer, second supporting layer and mask strip direct contact, the appropriate pressure that reduces the support bar to the mask strip can reduce the position that corresponds with the edge of second supporting layer in the mask strip and the difference of the pressure that the coating by vaporization district of mask strip received, be favorable to improving the planarization of mask board, make the support bar suitably reduce the pressure of mask strip, during the coating by vaporization, can also effectively avoid the spacer layer damage on the display panel.
It should be noted that the magnetism of the material of the third support layer is smaller than that of the material of the second support layer, where the magnetism refers to the property of the material being magnetically attracted, and the magnetism of the material of the third support layer is smaller than that of the material of the second support layer, that is, under the same condition, under the attraction of the same magnetic component, the attraction between the third support layer and the magnetic component is smaller than that between the second support layer and the magnetic component.
Specifically, in the mask plate assembly, the material of the second supporting layer is the same as that of the mask strips, so that the second supporting layer can be effectively prevented from causing wrinkles of the mask strips due to expansion, the flatness of the mask strips is ensured, and the evaporation quality is ensured.
Specifically, in the mask plate assembly, the dimension of the second support layer is the same as the dimension of the mask stripes in a direction perpendicular to the mask layer. The thickness of the second supporting layer is the same as that of the mask strips, so that the second supporting layer and the mask strips are kept consistent during evaporation, and the flatness of the mask strips can be effectively guaranteed.
It will be apparent to those skilled in the art that various changes and modifications may be made in the embodiments of the invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (11)

1. A mask plate assembly, comprising: the mask layer comprises a plurality of mask strips distributed at intervals;
the support frame includes: the shielding device comprises an outer frame and a plurality of shielding strips which are arranged on the outer frame at intervals; the extending direction of the shielding strips is the same as that of the mask strips, the arrangement direction of the shielding strips is the same as that of the mask strips, each mask strip is lapped on two adjacent shielding strips, and the shielding strips are used for shielding gaps between the two adjacent mask strips;
the shielding strip comprises a shielding layer and a first supporting layer positioned on one side, far away from the mask layer, of the shielding layer; the orthographic projection of the first supporting layer on the mask layer is positioned in the orthographic projection of the shielding layer on the mask layer; the magnetism of the material of the first supporting layer is smaller than that of the material of the shielding layer.
2. The mask plate assembly of claim 1, wherein the material of said masking layer is the same as the material of said mask strips.
3. The mask plate assembly of claim 2, wherein the size of said masking layer is the same as the size of said mask stripes in a direction perpendicular to said masking layer.
4. The mask plate assembly of claim 1, wherein in a gap between a shield strip and two adjacent mask strips corresponding to each other, an orthographic projection of the first support layer on the mask layer is located within the gap.
5. The mask plate assembly of claim 4, wherein in a gap between a shield strip and two adjacent mask strips corresponding to each other, a dimension of the first support layer is smaller than a dimension of the gap in a direction perpendicular to an arrangement direction of the shield strips.
6. The mask plate assembly according to any one of claims 1-5, wherein the first support layer is an electroformed layer formed on the blocking layer to form an integral structure with the blocking layer.
7. The mask plate assembly according to any one of claims 1-5, wherein the first support layer and the shielding layer are of a split structure.
8. The mask plate assembly of claim 1, wherein the support frame further comprises a plurality of support bars disposed on the outer frame at intervals, and the plurality of support bars and the plurality of shielding bars are disposed in an intersecting manner.
9. The mask plate assembly of claim 8, wherein the support bars comprise a second support layer and a third support layer on a side of the second support layer away from the mask layer; along the arrangement direction of the supporting strips, the size of the third supporting layer is smaller than that of the second supporting layer; the material of the third support layer has a magnetic property less than that of the material of the second support layer.
10. The mask plate assembly of claim 9, wherein the material of the second support layer is the same as the material of the mask strips.
11. The mask plate assembly of claim 10, wherein a dimension of the second support layer is the same as a dimension of the mask stripes in a direction perpendicular to the mask layer.
CN202110216696.1A 2021-02-26 2021-02-26 Mask plate assembly Active CN113025956B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110216696.1A CN113025956B (en) 2021-02-26 2021-02-26 Mask plate assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110216696.1A CN113025956B (en) 2021-02-26 2021-02-26 Mask plate assembly

Publications (2)

Publication Number Publication Date
CN113025956A CN113025956A (en) 2021-06-25
CN113025956B true CN113025956B (en) 2022-12-20

Family

ID=76462343

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110216696.1A Active CN113025956B (en) 2021-02-26 2021-02-26 Mask plate assembly

Country Status (1)

Country Link
CN (1) CN113025956B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114613930B (en) * 2022-03-17 2023-11-10 京东方科技集团股份有限公司 Mask assembly and display panel

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206692714U (en) * 2017-04-14 2017-12-01 信利（惠州）智能显示有限公司 A kind of accurate mask plate framework
CN206692716U (en) * 2017-05-02 2017-12-01 京东方科技集团股份有限公司 Masking bar, mask plate component and evaporation coating device in a kind of mask plate component
CN107815642A (en) * 2017-12-13 2018-03-20 唐军 High-accuracy mask plate
CN108251792B (en) * 2018-01-10 2019-12-31 京东方科技集团股份有限公司 Mask integrated frame and manufacturing method thereof
CN108441814B (en) * 2018-03-22 2020-03-13 京东方科技集团股份有限公司 Mask device, manufacturing method thereof and evaporation system
CN108624842B (en) * 2018-05-23 2020-03-24 京东方科技集团股份有限公司 Mask member, mask device, and vapor deposition device
CN110029307B (en) * 2019-04-25 2021-01-22 京东方科技集团股份有限公司 Evaporation mask plate
CN110541144B (en) * 2019-09-29 2022-05-17 昆山国显光电有限公司 Mask frame, mask plate and mask structure
CN110846614B (en) * 2019-11-21 2022-03-25 昆山国显光电有限公司 Mask and evaporation system
CN110863176B (en) * 2019-12-26 2022-02-22 武汉天马微电子有限公司 Mask, manufacturing method thereof and display panel
CN111676445A (en) * 2020-06-22 2020-09-18 京东方科技集团股份有限公司 Supporting mask and mask assembly
CN112080720A (en) * 2020-08-12 2020-12-15 福建华佳彩有限公司 Support bar, OLED evaporation mask plate and manufacturing method thereof

Also Published As

Publication number Publication date
CN113025956A (en) 2021-06-25

Similar Documents

Publication Publication Date Title
CN110029307B (en) Evaporation mask plate
CN113025956B (en) Mask plate assembly
US9909204B2 (en) Frame for mask plate and mask plate
US20190203337A1 (en) Apparatus and method for adsorbing a mask, evaporation device, and evaporation method
CN210856314U (en) Mask plate
KR101565736B1 (en) Mask unit and deposition device
US9915841B2 (en) Curved display device
CN105586568B (en) A kind of mask plate framework module, evaporation coating method, array base palte
US20170343842A1 (en) Liquid crystal display panel
CN106873230A (en) Display device and its manufacture method
CN110863176B (en) Mask, manufacturing method thereof and display panel
CN111443566B (en) Mask plate
CN111850467B (en) Metal mask plate assembly, OLED display panel and display device
JP2007058155A (en) Multi-domain vertical alignment liquid crystal display panel, thin film transistor array, and method of fabricating the same
CN110618564B (en) Electrode structure, array substrate and display device
CN111676445A (en) Supporting mask and mask assembly
CN115110029A (en) Mask and manufacturing method thereof
CN215628244U (en) Mask plate
US20220308269A1 (en) Color Filter Substrate, Manufacturing Method Thereof, Display Panel and Display Device
WO2022155895A1 (en) Full mask sheet, mask sheet assembly and vapor deposition device
US20140335688A1 (en) Mask assembly and thin film deposition method using the same
CN112838184A (en) Two-stage adsorption photomask and adsorption method thereof
CN217839099U (en) Mask plate support frame and mask plate
CN110846614B (en) Mask and evaporation system
CN103777395A (en) Array substrate as well as production method thereof and display device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant