CN114613930B - Mask assembly and display panel - Google Patents
Mask assembly and display panel Download PDFInfo
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- CN114613930B CN114613930B CN202210266234.5A CN202210266234A CN114613930B CN 114613930 B CN114613930 B CN 114613930B CN 202210266234 A CN202210266234 A CN 202210266234A CN 114613930 B CN114613930 B CN 114613930B
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- 238000007740 vapor deposition Methods 0.000 claims description 14
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 11
- 239000011521 glass Substances 0.000 abstract description 20
- 239000000758 substrate Substances 0.000 abstract description 19
- 238000005096 rolling process Methods 0.000 description 16
- 238000007665 sagging Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000004680 force modulation microscopy Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
Abstract
The mask assembly comprises a frame and a first mask plate arranged on the frame, wherein the first mask plate comprises a plurality of second mask structures which extend along the column direction and are distributed at intervals in the row direction, the second mask structures comprise third mask strips, fourth mask strips and fifth mask strips, the third mask strips have a first width in the row direction, the fourth mask strips have a second width in the row direction, the fifth mask strips have a third width in the row direction, and the second width is larger than the first width and smaller than the third width; the third mask strip is not provided with pins, and pins are arranged at the fourth mask strip and the fifth mask strip. Therefore, the width of the third mask strip can be sufficiently reduced, limiting arrangement of the glass substrate is realized, and the mask structure can improve the utilization rate of the glass substrate. And the position of the third mask strip is not provided with pins, so that the problem of pin breakage caused by narrowing the width of the mask strip can be solved.
Description
Technical Field
The disclosure relates to the technical field of display, in particular to a mask assembly and a display panel.
Background
The vapor deposition Mask assembly for vapor deposition of RGB light-emitting materials is generally assembled from a Mask Frame (Frame), a metal Mask for shielding (Full Mask Sheet), and a Fine Metal Mask (FMM).
In recent years, with the rapid development of the display industry, requirements of consumers on display frames are more and more strict, and narrow frames and even zero frames gradually become trend. Along with the narrowing of the display frame, the glass substrate glass utilization rate is higher, but the interval of the FMM is reduced to a certain degree, so that the interval cannot be reduced continuously, the maximization of Panel typesetting is affected, and the economic effect cannot be improved continuously.
It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the present disclosure and thus may include information that does not constitute prior art known to those of ordinary skill in the art.
Disclosure of Invention
The present disclosure is directed to overcoming the shortcomings of the prior art and providing a mask assembly and a display panel.
According to one aspect of the present disclosure, there is provided a mask assembly, comprising: a frame; the first mask plate, set up in on the frame, first mask plate includes: the first mask structures extend along the row direction and are distributed at intervals in the column direction; a plurality of second mask structures extending in a column direction and being spaced apart in a row direction, the second mask structures intersecting the first mask structures; the first mask structures comprise a first mask bar and a second mask bar with the largest spacing distance in the column direction, the second mask structures comprise a third mask bar, a fourth mask bar and a fifth mask bar, the third mask bar has a first width in the row direction, the fourth mask bar has a second width in the row direction, and the fifth mask bar has a third width in the row direction, and the second width is larger than the first width and smaller than the third width; the third mask strip is connected between the first mask strip and the second mask strip, a first extending part is arranged at the joint of the fourth mask strip and the first mask strip and the joint of the fourth mask strip and the second mask strip, a second extending part is arranged at the joint of the fifth mask strip and the joint of the fifth mask strip, the first extending part extends along the column direction to form a first pin, and the second extending part extends along the column direction to form a second pin.
In an exemplary embodiment of the present disclosure, the first mask further includes: and the supporting parts extend along the column direction, are arranged in one-to-one correspondence with the fourth mask strips, and are positioned on one side of the fourth mask strips, which faces the frame.
In an exemplary embodiment of the present disclosure, the frame includes a plurality of grooves, the first pins, the second pins and the grooves are disposed in one-to-one correspondence and located in the grooves, the grooves include: a first recess for accommodating the fourth mask bar, the first recess having a fourth width in the row direction; the second concave part is positioned at one side of the first concave part, which is away from the fourth mask strip, and is used for accommodating the supporting part and has a fifth width in the row direction; wherein the fifth width is smaller than the fourth width.
In an exemplary embodiment of the present disclosure, the plurality of second mask structures further includes: and a sixth mask bar positioned between the fourth mask bar and the fifth mask bar, wherein the sixth mask bar has a sixth width in the row direction, the sixth width is larger than the first width and smaller than the second width, a fourth extension part is arranged at the joint of the sixth mask bar and the first mask bar and the second mask bar, and the fourth extension part extends along the column direction to form a third pin.
In an exemplary embodiment of the present disclosure, the first mask structure and/or the second mask structure has a pattern structure.
In an exemplary embodiment of the disclosure, an evaporation area is distributed between adjacent third mask strips, between the third mask strips and adjacent fourth mask strips, and between the third mask strips and adjacent fifth mask strips.
In an exemplary embodiment of the present disclosure, the mask plate further includes: the second mask plates are positioned on one side, away from the frame, of the first mask plate, extend along the column direction and are distributed at intervals in the row direction; one of the second mask plates corresponds to one or at least two rows of evaporation areas.
In an exemplary embodiment of the present disclosure, the evaporation region has a seventh width in the row direction, a ratio of the first width to the seventh width is 1/200 or more and 1/3 or less, and a ratio of the second width to the seventh width is 1/100 or more and 1/2 or less.
In an exemplary embodiment of the present disclosure, the number of third mask stripes is greater than the number of fourth mask stripes.
According to another aspect of the present disclosure, there is also provided a display panel manufactured using the mask assembly according to any of the embodiments of the present disclosure.
The mask assembly comprises a mask assembly, the mask assembly comprises a first mask structure extending along the row direction and a second mask structure extending along the column direction, the first mask structure comprises a third mask strip, a fourth mask strip and a fifth mask strip, the width of the third mask strip is minimum, pins are not arranged in the extending direction of the third mask strip, and are only arranged in the extending direction of the fourth mask strip and the extending direction of the fifth mask strip, so that when more display panels are required to be arranged on a glass substrate, the pins are not arranged in the third mask strip, the limit of the width of the pins to the third mask strip is eliminated, the width of the third mask strip can be reduced sufficiently, the limit arrangement of the glass substrate is realized, the mask structure can be used for preparing display products with narrower frames, and the utilization rate of the glass substrate is improved. And the position of the third mask strip is not provided with pins, so that the problem of pin breakage caused by narrowing the width of the mask strip can be solved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description, serve to explain the principles of the disclosure. It will be apparent to those of ordinary skill in the art that the drawings in the following description are merely examples of the disclosure and that other drawings may be derived from them without undue effort.
FIG. 1 is a schematic diagram of a mask assembly according to one embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a lamination of the frame and the first mask in FIG. 1;
FIG. 3 is an enlarged view of a portion of region C of FIG. 2;
FIG. 4 is a cross-sectional view taken along the direction AA in FIG. 2;
FIG. 5 is a schematic diagram of a structure of a pin in the related art;
FIG. 6 is a schematic structural view of a mask assembly according to another embodiment of the present disclosure;
fig. 7 is a partial enlarged view of the broken line box M in fig. 6;
fig. 8 is a cross-sectional view taken along the broken line BB in fig. 7;
fig. 9 is a partial enlarged view of the D area in fig. 3.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted. Furthermore, the drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale.
Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another component, these terms are used in this specification for convenience only, such as in terms of the orientation of the examples described in the figures. It will be appreciated that if the device of the icon is flipped upside down, the recited "up" component will become the "down" component. When a structure is "on" another structure, it may mean that the structure is integrally formed with the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through another structure.
The terms "a," "an," "the," "said" and "at least one" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. in addition to the listed elements/components/etc.; the terms "first," "second," and "third," etc. are used merely as labels, and do not limit the number of their objects.
Fig. 1 is a schematic structural view of a mask assembly according to an embodiment of the present disclosure, fig. 2 is a schematic stacked view of the frame and the first mask plate in fig. 1, fig. 3 is a partially enlarged view of a region C in fig. 2, fig. 4 is a cross-sectional view along AA direction in fig. 2, and as shown in fig. 1-3, the mask assembly may include a frame and a first mask plate disposed on the frame, the first mask plate may include a plurality of first mask structures Howling and a plurality of second mask structures Cover, the plurality of first mask structures Howling extend along a row direction X and are spaced apart in a column direction Y, the plurality of second mask structures Cover extend along the column direction Y and are spaced apart in the row direction X, and the second mask structures Cover intersect the first mask structures Howling; the first mask structures Howling include a first mask bar Side Howling1 and a second mask bar Side Howling2 with the largest spacing distance in the column direction Y, the second mask structures Cover include a third mask bar Cover1, a fourth mask bar Cover2 and a fifth mask bar Side Cover, the third mask bar Cover1 has a first width in the row direction X, the fourth mask bar Cover2 has a second width in the row direction X, the fifth mask bar Side Cover has a third width in the row direction X, and the second width is larger than the first width and smaller than the third width; the third mask bar Cover1 is connected between the first mask bar Side rolling 1 and the second mask bar Side rolling 2, a first extension part is arranged at the joint of the fourth mask bar Cover2 and the first mask bar Side rolling 1 and the second mask bar Side rolling 2, a second extension part is arranged at the joint of the fifth mask bar Cover and the first mask bar Side rolling 1 and the second mask bar Side rolling 2, the first extension part extends along the column direction Y to form a first pin Grp_Y1, and the second extension part extends along the column direction Y to form a second pin Grp_Y2.
The mask assembly provided in this exemplary embodiment includes a mask assembly including a first mask structure Howling extending along a row direction X and a second mask structure Cover extending along a column direction Y, where the first mask structure Howling includes a third mask bar Cover1, a fourth mask bar Cover2, and a fifth mask bar Side Cover, the width of the third mask bar Cover1 is the smallest, and pins are only provided in the extending direction of the fourth mask bar Cover2 and the fifth mask bar Side Cover by not providing pins in the extending direction of the third mask bar Cover1, so that when more display panels need to be arranged on a glass substrate, since the third mask bar Cover1 does not provide pins, the width limitation of the third mask bar Cover1 by the pin width is eliminated, the width of the third mask bar Cover1 can be sufficiently reduced, thereby realizing the limit of the glass substrate. In addition, pins are not arranged at the position of the third mask bar Cover1, so that the problem of pin breakage caused by narrowing of the width of the mask bar can be solved.
As shown in fig. 1, in this exemplary embodiment, the mask assembly may further include a plurality of second mask plates, where the second mask plates are located on a side of the first mask plate F-mask facing away from the Frame, and the plurality of second mask plates may extend along the column direction Y and be spaced apart in the row direction X. The second mask plate can be a precision metal mask plate FMM, and a plurality of second mask plate FMMs are welded on a Frame with the first mask plate F-mask one by one. After the first mask plate F-mask sheet and the Frame are assembled into the F-mask, the F-mask and the FMM are welded respectively, and the FMM is welded and fixed with the Frame surface at a specific welding line position to form the evaporation Frame MFA.
As shown in fig. 1 and 2, in this exemplary embodiment, the first mask may be a metal mask F-mask sheet (Full mask sheet) for shielding, and the first mask F-mask may be welded on a Frame. The first mask stripe Side rolling 1 and the second mask stripe Side rolling 2 can be understood as mask stripes located at two sides of the first mask plate F-mask in the column direction Y, and the first mask structure rolling can further include a plurality of mask stripes located between the first mask stripe Side rolling 1 and the second mask stripe Side rolling 2. The third mask bar Cover1 is connected between the first mask bar Side rolling 1 and the second mask bar Side rolling 2, namely, the third mask bar Cover1 does not exceed the extending parts of the first mask bar Side rolling 1 and the second mask bar Side rolling 2 in the column direction Y, in other words, pins are not arranged at the position of the third mask bar Cover1, so that the width of the third mask bar Cover1 is not limited by the width of the pins, the width of the third mask bar Cover1 can be further reduced, more display panels can be arranged on the glass substrate conveniently, and the utilization rate of the glass substrate is improved.
For example, fig. 5 is a schematic structural diagram of a lead in the related art, in which the upper half is a cross-sectional view of the lead, and the lower half is a top view of the lead, as shown in fig. 5, the second mask FMM has a dummy solder area 110 when the corresponding lead area of the third mask strip is soldered, in order to ensure soldering quality, the width of the dummy solder area 110 must be less than or equal to a fixed value a, the soldered lead width b of the first mask F-mask is determined by the width a of the second mask FMM dummy solder area 110 and the second mask FMM spacing C, and in order to prevent the second mask FMM from interfering with each other, the second mask FMM spacing has a minimum value C min . Neglecting the formulas between other processes Margin, a, b, c approximates:
b=2×a+c (a is constant, C has a minimum value of C min )
It can be seen that if the pins are disposed at the positions of the third mask strips Cover1, the width of the third mask strip Cover1 is affected by the dummy solder width, and the width of the third mask strip Cover1 cannot be reduced after reaching the minimum value, but in this exemplary embodiment, the pins are not disposed at the positions of the third mask strip Cover1 any more, which is equivalent to canceling the dummy solder area, so that the third mask strip Cover1 can have a smaller width, thereby improving the utilization rate of the glass substrate, and performing the polarized typesetting and improving the economic effect.
In this exemplary embodiment, it is understood that a structure a extends in the direction B, and a may include a main portion and a sub portion connected to the main portion, the main portion being a line, a line segment, or a bar-like body, the main portion extending in the direction B, and the length of the main portion extending in the direction B being greater than the length of the sub portion extending in other directions.
As shown in fig. 3, in the present exemplary embodiment, the fifth mask bar Side Cover refers to mask bars located at both sides of the first mask plate F-mask in the row direction X, and the third mask bar Cover1 and the fourth mask bar Cover2 are located between the two fifth mask bar Side covers. The width of the third mask stripes Cover1 is the smallest, and the number of the third mask stripes Cover1 is the largest, so that by compressing the width of the third mask stripes Cover1, the present exemplary embodiment can save more space for the glass substrate, thereby forming more display panels on the glass substrate, and improving the utilization rate of the glass substrate.
As shown in fig. 2, in the present exemplary embodiment, a column of vapor deposition areas is formed between two adjacent third mask stripes Cover1, or between the third mask stripe Cover1 and an adjacent fourth mask stripe Cover2, or between the third mask stripe Cover1 and an adjacent fifth mask stripe Side Cover, and the vapor deposition areas in the same column are divided into a plurality of sub vapor deposition areas by the first mask structure extending in the row direction X, and it can be understood that one sub vapor deposition area is used to form one display panel. In general, in a mask assembly for producing a Mobile product, one FMM corresponds to one column of evaporation areas in the column direction Y, in this exemplary embodiment, since there is no pin at the position of the first mask strip Side rolling 1, when the Frame, the first mask F-mask, and the second mask FMM form the mask Frame MFA, one second mask FMM may correspond to multiple columns of evaporation areas. For example, one second mask FMM may correspond to 2 columns, 3 columns, or even multiple columns of vapor deposition areas, which not only improves the utilization rate of the glass substrate, but also improves the utilization rate of the second mask FMM.
In this exemplary embodiment, the fact that one second mask FMM corresponds to one row of vapor deposition areas may be understood that the width of one second mask FMM in the row direction is equal to the width of one row of vapor deposition areas in the row direction, and the orthographic projection of the second mask FMM on the plane where the frame is located in the orthographic projection of the vapor deposition area on the plane where the frame is located. Similarly, the fact that one second mask FMM corresponds to a plurality of rows of vapor deposition areas can be understood that the width of one second mask FMM in the row direction is equal to the width of the plurality of rows of vapor deposition areas in the row direction, and the orthographic projection of the second mask FMM on the plane where the frame is located in the orthographic projection of the plurality of vapor deposition areas on the plane where the frame is located.
As shown in fig. 4, in the present exemplary embodiment, a groove 10 is provided at a position corresponding to the pin on the Frame, and the groove 10 may be used to accommodate the first pin grp_y1 and the second pin grp_y2. That is, when the first mask plate F-mask is assembled with the Frame, the first pins and the second pins are fixed in the corresponding grooves 10, each pin corresponds to one groove 10, and the welding and fixing process is to fix the first pins Grip_y1 and the second pins Grip_y2 in the grooves 10 on the Frame.
In this exemplary embodiment, because the width of the third mask bar Cover1 is reduced, more space is saved on the glass substrate, and on the basis of not affecting the arrangement of the glass substrate, the width of the fourth mask bar Cover2 can be increased, so that the connection stability of the first mask plate F-mask and the Frame is improved. For example, in some embodiments, the width of the fourth mask bar Cover2 is greater than or equal to 6 mm. In addition, as shown in fig. 3, in the present exemplary embodiment, according to the exposure design of the glass substrate, on the premise of improving the utilization rate of the glass substrate, a sixth mask bar Cover3 may be disposed on the first mask plate F-mask, and the width of the sixth mask bar Cover3 in the row direction X may be set to be greater than the width of the third mask bar Cover1 in the row direction X, so as to further improve the connection stability between the first mask plate F-mask and the Frame.
Fig. 6 is a schematic structural view of a mask assembly according to another embodiment of the present disclosure, fig. 7 is a partial enlarged view of a dashed line Frame M in fig. 6, fig. 8 is a cross-sectional view along a dashed line BB in fig. 7, and as shown in fig. 6-8, in this exemplary embodiment, the first mask plate F-mask may further include a support portion Cover4, the support portion Cover4 may be disposed in one-to-one correspondence with the fourth mask bar Cover2, the support portion Cover4 is located on a side of the fourth mask bar Cover2 facing the Frame, and an extending direction of the support portion Cover4 is consistent with an extending direction of the fourth mask bar Cover 2. Through setting up supporting part Cover4, can reduce the sagging volume of first mask plate F-mask under the action of gravity, promptly supporting part Cover4 can apply the effort opposite to the gravity direction to fourth mask strip Cover2 to offset the gravity influence of first mask plate F-mask to a certain extent, reduce the sagging volume of first mask plate F-mask, and then improve the coating by vaporization precision. It will be appreciated that the tension of the support portion Cover4 may be adjusted so that the support portion Cover4 can form a necessary supporting force for the first mask plate F-mask.
List one
| Sagging amount | No support (mum) | With support (mum) |
| Maximum value | -243 | -196 |
For example, as shown in table one, after the supporting portion Cover4 is set, the sagging amount of the first mask plate F-mask is obviously smaller than that of the first mask plate F-mask when the supporting portion Cover4 is not set, and the sagging amount of the first mask plate F-mask is smaller than or equal to 200um, so that the set process control value is reached. It will be appreciated that the mask strips at the positions where the supporting portions Cover4 are provided need to have a certain width, for example, in this exemplary embodiment, it is not preferable to provide the supporting portions Cover4 at the positions of the third mask strips Cover1, or, when the sixth mask strip Cover3 is present in the first mask plate F-mask, it is also possible to provide the supporting portions Cover4 at the side of the sixth mask strip Cover3 facing the Frame.
In addition, as shown in fig. 8, in the case of adding the supporting portion Cover4, in the present exemplary embodiment, the groove 10 provided on the Frame may include a first recess 101 and a second recess 102, the first recess 101 is used for accommodating the fourth mask bar Cover2, the second recess 102 is located at a side of the first recess 101 facing away from the fourth mask bar Cover2, and the second recess 102 is used for accommodating the supporting portion Cover4. The width d1 of the first recess 101 in the row direction X is greater than the width d2 of the second recess 102 in the row direction X, so that the support portion Cover4 is provided without affecting the formation of the outline of the display panel. Further, it should be understood that the widths of the first and second recesses 101 and 102 in the groove 10 should be correspondingly matched with the widths of the fourth mask bar Cover2 and the support portion Cover4.
In addition, in the present exemplary embodiment, patterning may be performed on the first mask structure Howling and/or the second mask structure Cover, for example, each mask stripe in the first mask structure Howling and/or each mask stripe in the second mask structure Cover may be half-etched or a through hole is provided to form a patterned structure, and the patterned structure may be, for example, circular, square, triangular, or the like, which is not limited in this disclosure. By forming the pattern structure on the first mask structure Howling and/or the second mask structure Cover, edge color mixing at the position of the mask stripes can be improved.
Fig. 9 is a partial enlarged view of the D area in fig. 3, and in this exemplary embodiment, as shown in fig. 9, the width of one evaporation area in the row direction X is L1, and the ratio of the width L3 of the third mask stripe Cover1 in the row direction X to the width L1 of one evaporation area may be 1/200 to 1/3, for example, 1/200,1/100,1/50,1/40,1/30,1/20,1/10,1/9,1/8,1/7,1/6,1/5,1/4,1/3, etc. Similarly, the ratio of the width L4 of the fourth mask bar Cover2 in the row direction X to the width L1 of one evaporation region may be 1/100 to 1/2, for example, may be 1/100,1/50,1/40,1/30,1/20,1/10,1/9,1/8,1/7,1/6,1/5,1/4,1/3,1/2, or the like.
In addition, the disclosure also provides a display panel, which is manufactured by adopting the mask assembly according to any embodiment of the disclosure, so that the display panel also has the beneficial effects described in any embodiment.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
Claims (10)
1. A mask assembly, comprising:
a frame;
the first mask plate, set up in on the frame, first mask plate includes:
the first mask structures extend along the row direction and are distributed at intervals in the column direction;
a plurality of second mask structures extending in a column direction and being spaced apart in a row direction, the second mask structures intersecting the first mask structures;
the first mask structures comprise a first mask bar and a second mask bar with the largest spacing distance in the column direction, the second mask structures comprise a third mask bar, a fourth mask bar and a fifth mask bar, the third mask bar has a first width in the row direction, the fourth mask bar has a second width in the row direction, and the fifth mask bar has a third width in the row direction, and the second width is larger than the first width and smaller than the third width;
the connection part of the fourth mask strip, the first mask strip and the second mask strip is provided with a first extension part, the connection part of the fifth mask strip, the first mask strip and the second mask strip is provided with a second extension part, the first extension part extends along the column direction to form a first pin, and the second extension part extends along the column direction to form a second pin; the third mask strips are connected between the first mask strips and the second mask strips, and the connection parts of the third mask strips and the first mask strips do not have extension parts exceeding the first mask strips and the connection parts of the third mask strips and the second mask strips do not have extension parts exceeding the second mask strips.
2. The mask assembly of claim 1, wherein the first mask plate further comprises:
and the supporting parts extend along the column direction, are arranged in one-to-one correspondence with the fourth mask strips, and are positioned on one side of the fourth mask strips, which faces the frame.
3. The mask assembly of claim 2, wherein the frame includes a plurality of recesses, the first pins, the second pins being disposed in one-to-one correspondence with the recesses and being located within the recesses, the recesses comprising:
a first recess for accommodating the fourth mask bar, the first recess having a fourth width in the row direction;
the second concave part is positioned at one side of the first concave part, which is away from the fourth mask strip, and is used for accommodating the supporting part and has a fifth width in the row direction;
wherein the fifth width is smaller than the fourth width.
4. The mask assembly of claim 1, wherein the plurality of second mask structures further comprises:
and a sixth mask bar positioned between the fourth mask bar and the fifth mask bar, wherein the sixth mask bar has a sixth width in the row direction, the sixth width is larger than the first width and smaller than the second width, a fourth extension part is arranged at the joint of the sixth mask bar and the first mask bar and the second mask bar, and the fourth extension part extends along the column direction to form a third pin.
5. The mask assembly according to claim 1, wherein the first mask structure and/or the second mask structure has a pattern structure.
6. The mask assembly of claim 1, wherein an evaporation area is distributed between adjacent third mask strips, between the third mask strips and adjacent fourth mask strips, and between the third mask strips and adjacent fifth mask strips.
7. The mask assembly of claim 6, wherein the mask plate further comprises:
the second mask plates are positioned on one side, away from the frame, of the first mask plate, extend along the column direction and are distributed at intervals in the row direction;
one of the second mask plates corresponds to one or at least two rows of evaporation areas.
8. The mask assembly according to claim 6, wherein the vapor deposition region has a seventh width in the row direction, a ratio of the first width to the seventh width is 1/200 or more and 1/3 or less, and a ratio of the second width to the seventh width is 1/100 or more and 1/2 or less.
9. The mask assembly of claim 1, wherein the number of third mask stripes is greater than the number of fourth mask stripes.
10. A display panel, wherein the display panel is manufactured using the mask assembly of any one of claims 1-9.
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| CN202210266234.5A CN114613930B (en) | 2022-03-17 | 2022-03-17 | Mask assembly and display panel |
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| CN202210266234.5A CN114613930B (en) | 2022-03-17 | 2022-03-17 | Mask assembly and display panel |
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| CN114613930B true CN114613930B (en) | 2023-11-10 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735802A (en) * | 2019-03-11 | 2019-05-10 | 南京高光半导体材料有限公司 | A kind of support metal mask version and mask plate component and photomask manufacturing method |
| CN112501558A (en) * | 2019-08-28 | 2021-03-16 | 京东方科技集团股份有限公司 | Mask, mask device and design optimization method of mask |
| CN113025956A (en) * | 2021-02-26 | 2021-06-25 | 京东方科技集团股份有限公司 | Mask plate assembly |
| CN113690396A (en) * | 2021-08-25 | 2021-11-23 | 京东方科技集团股份有限公司 | Mask assembly and manufacturing method thereof, target structure manufacturing method and display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104651778B (en) * | 2015-03-13 | 2016-04-27 | 京东方科技集团股份有限公司 | A kind of metal mask plate and the organic elctroluminescent device produced thereof |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109735802A (en) * | 2019-03-11 | 2019-05-10 | 南京高光半导体材料有限公司 | A kind of support metal mask version and mask plate component and photomask manufacturing method |
| CN112501558A (en) * | 2019-08-28 | 2021-03-16 | 京东方科技集团股份有限公司 | Mask, mask device and design optimization method of mask |
| CN113025956A (en) * | 2021-02-26 | 2021-06-25 | 京东方科技集团股份有限公司 | Mask plate assembly |
| CN113690396A (en) * | 2021-08-25 | 2021-11-23 | 京东方科技集团股份有限公司 | Mask assembly and manufacturing method thereof, target structure manufacturing method and display device |
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