CN113019957A - Full-automatic separation device for LED chip crystal grain disc - Google Patents
Full-automatic separation device for LED chip crystal grain disc Download PDFInfo
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- CN113019957A CN113019957A CN202110573276.9A CN202110573276A CN113019957A CN 113019957 A CN113019957 A CN 113019957A CN 202110573276 A CN202110573276 A CN 202110573276A CN 113019957 A CN113019957 A CN 113019957A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/361—Processing or control devices therefor, e.g. escort memory
- B07C5/362—Separating or distributor mechanisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/38—Collecting or arranging articles in groups
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C2501/00—Sorting according to a characteristic or feature of the articles or material to be sorted
- B07C2501/0063—Using robots
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Abstract
The invention discloses a full-automatic separation device for an LED chip crystal grain disc, which relates to the technical field of chip crystal grains and comprises a crystal grain separation table, a crystal grain separation area, a crystal grain separation assembly, a crystal grain placing port and a crystal grain storage assembly, wherein one side of the upper surface of the crystal grain separation table is provided with the crystal grain separation area, the crystal grain separation area is provided with a plurality of negative pressure adsorption holes, the middle part of the upper surface of the crystal grain separation table is provided with the crystal grain separation assembly, the position of the upper surface of the crystal grain separation table, which corresponds to the crystal grain separation area, is provided with the crystal grain placing port, and the lower surface of the crystal grain separation table is provided with the crystal grain storage; the separation device is scientific and reasonable, is safe and convenient to use, can separate qualified crystal grains from unqualified crystal grains on the whole wafer at one time through the separation suction head corresponding to the crystal grains on the wafer and the arrangement of the electromagnet, and greatly improves the separation efficiency.
Description
Technical Field
The invention relates to the technical field of chip crystal grain production, in particular to a full-automatic separation device for an LED chip crystal grain disc.
Background
The production and manufacture of the LED chip need to go through several stages of wafer production, photoetching, doping and packaging test, in the production process of the LED chip, the doped wafer is sliced to form crystal grains, functional test is needed to be carried out on the crystal grains subsequently, for the crystal grains after the test is finished, the separation device is utilized to separate the crystal grains which are qualified and unqualified, and the separated crystal grains which are qualified in the test are packaged;
when the existing separation device is used for separating crystal grains, the crystal grains are usually extracted and separated one by one in a mode of a mechanical clamping jaw or a single suction nozzle, so that the problems of low separation efficiency and easy damage to the crystal grains which are qualified in test exist, and in addition, in the prior art, the crystal discs which are separated in the test are stored irregularly, so that the crystal grains which are unqualified in test are difficult to uniformly recover and treat;
therefore, there is a need for a full-automatic separation device for LED chip die disc to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to provide a full-automatic separation device for an LED chip crystal grain disc, which aims to solve the problems in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme: a full-automatic separation device for an LED chip crystal grain disk comprises a crystal grain separation table, a crystal grain separation area, a crystal grain separation assembly, a crystal grain feeding port and a crystal grain storage assembly;
the crystal grain separation platform comprises a crystal grain separation platform, a crystal grain separation area, a negative pressure adsorption hole, a photoelectric tester and a separation device, wherein the crystal grain separation area is arranged on one side of the upper surface of the crystal grain separation platform and is used for storing a crystal grain disc after the test is finished so as to be convenient for the subsequent separation of qualified crystal grains and unqualified crystal grains;
the crystal grain separation assembly comprises a manipulator, a separation sucker, a vacuum tank, a negative pressure pipe and a vacuum pumping pump;
the manipulator is fixedly arranged on the surface of the crystal grain separating table, a separating sucker is arranged at one end of the manipulator and used for sucking and separating qualified crystal grains on the tested crystal grain tray, a vacuum tank is arranged on one side of the manipulator and used for providing negative pressure for the separating sucker, so that the situation that the vacuum pump is directly utilized to provide the negative pressure is avoided, because the negative pressure adsorption is frequently realized in the process of separating qualified crystal grains, the vacuum tank is utilized to realize quick response, meanwhile, the damage to the vacuum pump caused by frequent starting and stopping of the vacuum pump can be avoided, the service life of the vacuum pump can be prolonged, the separating sucker is connected with the vacuum tank through a negative pressure pipe, the electromagnetic valve is arranged on the negative pressure pipe, the vacuumizing inside the separating sucker can be conveniently and quickly realized, and the response speed of the separating sucker for adsorbing the crystal grains is improved, the manipulator opposite side is provided with the evacuation pump, pass through the pipe connection between vacuum tank and the evacuation pump for when the inside vacuum of vacuum tank is lower, carry out the evacuation to the vacuum tank, make the vacuum tank can keep at quick response's state, crystalline grain separating stage upper surface and crystalline grain separation zone correspond position department have seted up the crystal dish and have put in the mouth, the crystal dish is put in the mouth and is used for putting in the crystal dish after the separation of qualified crystalline grain, crystalline grain separating stage lower surface is provided with the crystal dish and deposits the subassembly, the crystal dish is deposited the subassembly and is used for unifying depositing the crystal dish after the separation of qualified crystalline grain, makes things convenient for the unified processing in later stage.
According to the technical scheme, the separation sucker comprises a suction plate, a cavity, a separation sucker, an electromagnet, a grabbing suction nozzle, a limiting groove and a limiting block;
the bottom end of the separation sucker is provided with a suction plate, a cavity is formed in the suction plate, a plurality of separation suckers are arranged in the cavity corresponding to the positions of crystal grains on the crystal disc, the number of the separation suckers is equal to that of the crystal grains on the crystal disc, electromagnets are arranged at the top end of the cavity corresponding to the positions of the separation suckers and used for lifting the positions of the separation suckers, so that when the separation suckers are used for extracting and separating qualified crystal grains, the extraction of the qualified crystal grains on all the crystal discs can be finished at one time, the efficiency of separating the qualified crystal grains from the unqualified crystal grains is greatly improved, and when the crystal grains on the crystal discs are extracted, the PLC control system is used for controlling the electromagnets to lift the separation suckers corresponding to the unqualified crystal grains according to the detection marking result of the photoelectric detector, so that the separation suckers cannot be in contact with, the extraction of unqualified crystal grains can not be finished, namely, the separation of the crystal grains on the crystal plate can be finished at one time, the efficiency is high, the accuracy is high, the crystal grains are grabbed by the bottom end of the separation sucker through the grabbing suction nozzle, the position of the connection part of the separation sucker and the suction plate is limited through the limiting groove and the limiting block, and the separation sucker is prevented from being separated from the suction plate.
According to the technical scheme, a fastening disc is arranged on the inner side of the grabbing suction nozzle and used for grabbing crystal grains, an air cavity is formed in the fastening disc and used for controlling the fastening disc to deform so as to grab the crystal grains, one end, in contact with the grabbing suction nozzle, of the fastening disc is a fixed end, the other end of the fastening disc is a movable end, the movable end is arranged so as to conveniently grab the crystal grains, a suction hole is formed in the fixed end, close to the inner side of the grabbing suction nozzle, and arranged so as to suck air in the air cavity away when the grabbing suction nozzle carries out negative pressure adsorption, so that the air in the air cavity is reduced, the fastening disc deforms, the crystal grains are grabbed by using the movable end, corrugated rubber is arranged at the movable end, close to the inner side of the grabbing suction nozzle, and the corrugated rubber is arranged, on the one hand, when the inside gas of air cavity reduces and takes place to deform, the expansion end can take place to remove to crystalline grain one side, on the other hand, the setting of ripple rubber for when the expansion end contacts with the crystalline grain, increased the area of contact between expansion end and the crystalline grain, make the fastening dish more firm to the absorption of crystalline grain, can not take place to drop, kill many birds with one stone.
According to the technical scheme, the other side of the movable end, corresponding to the corrugated rubber, is provided with the memory metal sheet, so that the movable end has a certain memory function, when the gas in the movable end is deformed due to extraction, the movable end can restore the original shape again when the gas cavity enters the gas, and the release of the sucked crystal grains can be completed.
According to the technical scheme, the cross section of the fastening disc is in a finger shape, so that the fastening disc can be attached to crystal grains when the crystal grains are adsorbed and grabbed, and the grabbing of the crystal grains is firmer.
According to the technical scheme, the position, close to the movable end, of the grabbing suction nozzle is provided with the air inlet hole, when the gas inside the grabbing suction nozzle is extracted, the gas in the space where the movable end is located is extracted continuously, at the moment, the external gas enters the space where the movable end is located through the air inlet hole, at the moment, the entering gas can act on the movable end, and the adsorption between the movable end and the crystal grains is firmer.
According to the technical scheme, the edge of the lower surface of the suction plate is provided with the containing groove, the containing groove is internally provided with the sealing air bag, the sealing air bag is arranged to form a large sucking disc between the sealing air bag and the suction plate, so that the whole crystal wafer can be grabbed, after qualified crystal grains are separated, the sucking disc formed between the suction plate and the sealing air bag can be reused for adsorbing and transferring the crystal wafer, multiple purposes are achieved, the length of the sealing air bag extending out of the containing groove in a normal state is longer than the length of the separation sucking head extending out of the suction plate, because the sealing air bag is controlled to be in a normal state when the whole crystal wafer needs to be adsorbed, at the moment, the large sucking disc can be formed between the sealing air bag and the suction plate, because the separation sucking head cannot be adsorbed normally, the sealing air bag is connected with the vacuum tank through the air conveying hose, and the air conveying hose is provided with the electromagnetic, the state of the sealed air bag can be controlled by controlling the electromagnetic valve.
According to the technical scheme, the wafer storage assembly comprises a fixed seat, a rotating seat, a connecting rod, a fixed ring and a storage barrel;
the crystal grain separating table is characterized in that a fixing seat is arranged in the middle of the lower surface of the crystal grain separating table, a rotating seat is rotatably mounted on the outer side of the fixing seat, the rotating seat is arranged to replace a storage barrel filled with the crystal grains, a plurality of connecting rods are arranged on the outer side of the rotating seat, a fixing ring is arranged at one end of each connecting rod, the storage barrel is fixed inside the fixing ring and used for corresponding to a crystal disc putting port, and then the crystal discs after the crystal grains are separated are stored.
According to the technical scheme, the middle part of the fixed seat is provided with a rotating groove, the top end of the rotating groove is provided with first limiting bulges with the same number as that of the fixed rings, the inside of the rotating groove is also provided with a fastening spring which is used for realizing the stability of the rotating seat, meanwhile, when the fixed ring rotates to the position of the wafer feeding port, the fixed ring can move downwards, so that the upper surface of the fixing ring can not generate sliding friction with the lower surface of the crystal grain separating table, the abrasion of the fixing ring is avoided, the fixing ring is more stable and firm after being positioned and moved, the upper surface of the rotating seat is provided with a second limiting bulge at the position corresponding to the first limiting bulge, and the first limiting bulge and the second limiting bulge are arranged so that when the rotating seat rotates, can realize the location rotation to solid fixed ring position, and then make and deposit bucket and the alignment of putting in the mouth with the brilliant dish.
According to the technical scheme, the cross section of the first limiting protrusion and the cross section of the second limiting protrusion are isosceles triangles, and the bottom angles of the two adjacent first limiting protrusions or the bottom angles of the second limiting protrusions are in mutual contact, so that the first limiting protrusion and the second limiting protrusion form an annular hill fluctuating up and down, and when the protruding part of the first limiting protrusion moves to the recessed part of the second limiting protrusion, the positioning can be realized, and the position of the fixing ring is more accurately positioned.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, through the arrangement of the separation suction head corresponding to the crystal grains on the crystal disc and the electromagnet, the separation of qualified crystal grains and unqualified crystal grains on the whole crystal disc can be completed at one time, and the separation efficiency is greatly improved.
2. According to the invention, through the arrangement of the accommodating groove and the sealing air bag, when the crystal disc needs to be transferred, the crystal disc can be adsorbed and transferred through the sucking disc formed between the sealing air bag and the sucking plate, and when the crystal disc does not need to be transferred, the sealing air bag is accommodated in the accommodating groove, so that the sucking plate and the separating sucking head can be used for separating qualified crystal grains from unqualified crystal grains, thereby achieving multiple purposes.
3. The invention is provided with the fastening disc, so that when the qualified crystal grains are adsorbed and extracted, the gas in the grabbing suction nozzle can be extracted, the gas in the air cavity can be extracted through the air suction holes in the extraction process, the whole fastening disc is deformed through the arrangement of the corrugated rubber, the crystal grains are grabbed by the movable end, and the gas is continuously introduced into the grabbing suction nozzle through the air inlet holes, so that the entered gas can act on the movable end, the grabbing effect of the movable end on the crystal grains is further improved, and the grabbing of the crystal grains is firmer.
4. According to the invention, the crystal discs after the qualified crystal grains are separated can be uniformly stored and treated through the arrangement of the crystal disc storage assembly, the position of the fixing ring is more accurately positioned through the arrangement of the first limiting bulge, the second limiting bulge and the fastening spring, the storage barrel fixed on the fixing ring corresponds to the crystal disc putting-in opening, and the fixing ring is not contacted with the crystal grain separating table when being aligned with the crystal disc putting-in opening through the arrangement of the fastening spring, so that the abrasion is reduced, and the alignment result of the storage barrel and the crystal disc putting-in opening is more accurate.
Drawings
Fig. 1 is a schematic structural diagram of a full-automatic separation device for an LED chip die disc according to the present invention;
FIG. 2 is a schematic structural diagram of a separating chuck of a full-automatic separating device for LED chip die disks according to the present invention;
FIG. 3 is a schematic structural diagram of a separating suction head of a full-automatic separating device for LED chip die discs according to the present invention;
FIG. 4 is a schematic structural diagram of a grabbing suction nozzle of the full-automatic separating device for LED chip die discs of the present invention;
FIG. 5 is a schematic structural view of an area A in FIG. 4 of a full-automatic separating apparatus for LED chip die disks according to the present invention;
FIG. 6 is a first view angle of a wafer storage assembly of the full-automatic separation apparatus for LED chip wafer disks according to the present invention;
FIG. 7 is a schematic structural diagram of a second view angle of a wafer storage assembly of the full-automatic LED chip wafer separation apparatus according to the present invention;
fig. 8 is a schematic structural diagram of a die disc and dies of a full-automatic separation device for LED chip die discs according to the present invention.
Reference numbers in the figures: 1. a crystal grain separating table;
2. a grain separation region; 21. a negative pressure adsorption hole;
31. a manipulator;
32. separating the sucking discs; 321. sucking a plate; 322. a cavity;
323. separating the suction heads; 3231. fastening a disc; 3232. an air cavity; 3233. a fixed end; 3234. a movable end; 3235. a suction hole; 3236. corrugated rubber; 3237. an air inlet;
324. an electromagnet; 325. grabbing a suction nozzle; 326. a limiting groove; 327. a limiting block; 328. a receiving groove; 329. sealing the air bag; 3210. a gas hose;
33. a vacuum tank; 34. a negative pressure tube; 36. a vacuum pump is pumped;
4. a wafer placing port;
5. a disk storage assembly;
501. a fixed seat; 5011. a rotating tank; 5012. a first limit protrusion; 5013. a fastening spring; 5014. a second limit bulge;
502. a rotating base; 503. a connecting rod; 504. a fixing ring; 505. and storing the barrel.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b): as shown in fig. 1 to 8, the present invention provides a full-automatic separation device for a LED chip die disc, which includes a die separation table 1, a die separation area 2, a die separation assembly, a die placing port 4 and a die storage assembly 5;
a crystal grain separation area 2 is arranged on one side of the upper surface of the crystal grain separation table 1, the crystal grain separation area 2 is used for storing a crystal grain disc after the test is completed, so that qualified crystal grains and unqualified crystal grains can be conveniently separated subsequently, a plurality of negative pressure adsorption holes 21 are formed in the crystal grain separation area 2, the negative pressure adsorption holes 21 are used for carrying out negative pressure adsorption and fixation on the crystal grain disc after the test, so that the crystal grain disc cannot be separated when the crystal grains are separated, a crystal grain separation assembly is arranged in the middle of the upper surface of the crystal grain separation table 1 and used for separating the qualified crystal grains after the test, the crystal grains are subjected to functional test by using a photoelectric tester, the qualified crystal grains after the test are marked by using the photoelectric tester, and the accurate positioning and separation of the crystal grains by using a separation device subsequently are facilitated;
the crystal grain separation assembly comprises a manipulator 31, a separation sucker 32, a vacuum tank 33, a negative pressure pipe 34 and a vacuum pumping pump 36;
the manipulator 31 is fixedly installed on the surface of the crystal grain separating table 1, a separating sucker 32 is arranged at one end of the manipulator 31, the separating sucker 32 is used for sucking and separating qualified crystal grains on a crystal disc after testing, a vacuum tank 33 is arranged on one side of the manipulator 31, the vacuum tank 33 is used for providing negative pressure for the separating sucker 32, the situation that the vacuum pump is directly utilized to provide the negative pressure is avoided, because the negative pressure adsorption is frequently realized in the process of separating qualified crystal grains, the vacuum tank 33 is utilized to realize quick response, and meanwhile, the damage to the vacuum pump caused by frequently starting and stopping the vacuum pump can be avoided, so that the service life of the vacuum pump can be prolonged, the separating sucker 32 is connected with the vacuum tank 33 through a negative pressure pipe 34, and the electromagnetic valve is arranged on the negative pressure pipe 34, so that the vacuum pumping of the inside of the separating sucker 32, the response speed of crystal grains adsorbed by the separation sucker 32 is improved, the other side of the manipulator 31 is provided with the vacuum pump 36, the vacuum tank 33 is connected with the vacuum pump 36 through a pipeline, so that when the vacuum degree in the vacuum tank 33 is low, the vacuum tank 33 is vacuumized, the vacuum tank 33 can be kept in a quick response state, the upper surface of the crystal grain separation table 1 and the position corresponding to the crystal grain separation area 2 are provided with a crystal disc putting port 4, the crystal disc putting port 4 is used for putting in a crystal disc after the separation of qualified crystal grains, the lower surface of the crystal grain separation table 1 is provided with a crystal disc storage assembly 5, and the crystal disc storage assembly 5 is used for uniformly storing the crystal discs after the separation of the qualified crystal grains, so that the later-stage uniform processing is facilitated.
The separation sucker 32 comprises a suction plate 321, a cavity 322, a separation sucker 323, an electromagnet 324, a grabbing suction nozzle 325, a limiting groove 326 and a limiting block 327;
the bottom end of the separation sucker 32 is provided with a suction plate 321, a cavity 322 is arranged in the suction plate 321, a plurality of separation suckers 323 are arranged in the cavity 322 corresponding to the positions of crystal grains on the wafer, the number of the separation suckers 323 is equal to the number of the crystal grains on the wafer, an electromagnet 324 is arranged at the top end in the cavity 322 corresponding to the position of the separation sucker 323, and the electromagnet 324 is used for lifting the position of the separation sucker 323, so that when the separation sucker 32 is used for extracting and separating qualified crystal grains, the extraction of the qualified crystal grains on all the wafers can be completed at one time, the efficiency of separating the qualified crystal grains from the unqualified crystal grains is greatly improved, and when the crystal grains on the wafer are extracted, the separation suckers 323 corresponding to the unqualified crystal grains are lifted by using the electromagnet 324 controlled by the PLC control system according to the detection, when the separation sucker 32 is used for adsorption, the separation sucker 323 cannot be in contact with unqualified crystal grains, namely the unqualified crystal grains cannot be extracted, namely the crystal grains on the crystal disc are separated at one time, the efficiency is high, the accuracy is high, the crystal grains are grabbed by the grabbing suction nozzle 325 at the bottom end of the separation sucker 323, the position of the connection part of the separation sucker 323 and the suction plate 321 is limited by the limiting groove 326 and the limiting block 327, and the separation sucker 323 is prevented from being separated from the suction plate 321.
The inner side of the grabbing suction nozzle 325 is provided with a fastening disc 3231, the fastening disc 3231 is used for grabbing crystal grains, an air cavity 3232 is formed in the fastening disc 3231, the air cavity 3232 is used for controlling the fastening disc 3231 to deform so as to grab the crystal grains, one end of the fastening disc 3231, which is in contact with the grabbing suction nozzle 325, is a fixed end 3233, the other end of the fastening disc 3231 is a movable end 3234, the movable end 3234 is arranged so as to conveniently grab the crystal grains, the fixed end 3233 is provided with a suction hole 3235 close to the inner side of the grabbing suction nozzle 325, the suction hole 3235 is arranged so as to draw air in the air cavity 3232 when the grabbing suction nozzle 325 performs negative pressure adsorption, so that the air in the air cavity is reduced, the fastening disc 3231 deforms, the crystal grains are grabbed by using the movable end 3234, and corrugated rubber 3236 is arranged on the movable end 3234 close to the inner side of the grabbing suction nozzle, the arrangement of the corrugated rubber 3236, on one hand, when the gas in the air cavity 3232 is reduced and the deformation occurs, the movable end 3234 moves towards one side of the crystal grain, and on the other hand, the arrangement of the corrugated rubber 3236 increases the contact area between the movable end 3234 and the crystal grain when the movable end 3234 contacts with the crystal grain, so that the fastening disc 3231 can absorb the crystal grain more firmly without falling off, thereby achieving multiple purposes.
The other side of the movable end 3234 corresponding to the corrugated rubber 3236 is provided with a memory metal sheet, so that the movable end 3234 has a certain memory function, and when the gas inside the movable end 3234 is deformed due to being extracted, the movable end 3234 can return to the original shape again when the gas cavity 3232 enters the gas, so that the release of the absorbed crystal grains can be completed.
The cross section of the fastening disc 3231 is finger-shaped, so that the fastening disc 3231 can be attached to crystal grains when the crystal grains are sucked and grabbed, and the grabbing of the crystal grains is firmer.
An air inlet hole 3237 is formed in the position, close to the movable end 3234, of the grabbing suction nozzle 325, and due to the arrangement of the air inlet hole 3237, when air inside the grabbing suction nozzle 325 is extracted, the air in the space where the movable end 3234 is located is also extracted continuously, at this time, the external air enters the space where the movable end 3234 is located through the air inlet hole 3237, and at this time, the entered air acts on the movable end 3234, so that the adsorption between the movable end 3234 and the crystal grain is firmer.
The edge of the lower surface of the suction plate 321 is provided with a containing groove 328, the containing groove 328 is internally provided with a sealing air bag 329, the sealing air bag 329 is arranged to form a large sucking disc with the suction plate 321 so as to realize the grabbing of the whole crystal disc, after qualified crystal grains are separated, the sucking disc formed between the suction plate 321 and the sealing air bag 329 can be used again to adsorb and transfer the crystal disc, the sealing air bag 329 has multiple purposes, the length of the sealing air bag 329 extending out of the containing groove 328 in a normal state is longer than the length of the separation sucking head 323 extending out of the suction plate 321, because the sealing air bag 329 is controlled to be in a normal state when the whole crystal disc needs to be adsorbed, at the moment, a large sucking disc can be formed between the sealing air bag 329 and the suction plate 321, because the separation sucking head 323 cannot normally adsorb, the sealing air bag 329 is connected with the vacuum tank 33 through an air conveying hose 3210, the gas transmission hose 3210 is provided with an electromagnetic valve, the state of the sealed air bag 329 can be controlled by controlling the electromagnetic valve, the sealed air bag 329 is further provided with an air inlet pipe, and the air inlet pipe is provided with the electromagnetic valve.
The wafer storage assembly 5 comprises a fixed seat 501, a rotating seat 502, a connecting rod 503, a fixed ring 504 and a storage barrel 505;
the middle part of the lower surface of the crystalline grain separating table 1 is provided with a fixed seat 501, a rotating seat 502 can be rotatably installed on the outer side of the fixed seat 501, the rotating seat 502 is arranged to replace a full storage barrel 505, a plurality of connecting rods 503 are arranged on the outer side of the rotating seat 502, one end of each connecting rod 503 is provided with a fixing ring 504, the storage barrel 505 is fixed inside the fixing ring 504, the storage barrel 505 is used for corresponding to the crystalline disc putting port 4, and then the crystalline discs after qualified crystalline grains are separated are stored.
The middle of the fixed seat 501 is provided with a rotating groove 5011, the top end of the rotating groove 5011 is provided with first limit protrusions 5012 the number of which is consistent with that of the fixed rings 504, the inside of the rotating groove 5011 is further provided with a fastening spring 5013, the fastening spring 5013 is used for realizing the stability of the rotating seat 502, and simultaneously, when the fixed rings 504 rotate to the position of the wafer putting-in opening 4, the fixed rings 504 can move downwards, so that the upper surface of the fixed rings 504 can not generate sliding friction with the lower surface of the die separating table 1, the abrasion of the fixed rings is avoided, the fixed rings 504 are more stable and firm after being positioned and moved, the positions of the upper surface of the rotating seat 502 corresponding to the first limit protrusions 5012 are provided with second limit protrusions 5014, and the first limit protrusions 5012 and the second limit protrusions 5014 are arranged, so that when the rotating seat 502 is rotated, the positioning rotation of the position of the fixed rings 504 can be, thereby aligning the storage tub 505 with the wafer input port 4.
The cross sections of the first limiting bulges 5012 and the second limiting bulges 5014 are isosceles triangles, and the base angles of the two adjacent first limiting bulges 5012 or the second limiting bulges 5014 are in contact with each other, so that the first limiting bulges 5012 and the second limiting bulges 5014 form an annular hump fluctuating up and down, and when the bulges of the first limiting bulges 5012 move to the depressions of the second limiting bulges 5014, the positioning can be realized, and the position of the fixing ring 504 is positioned more accurately.
The working principle of the invention is as follows: when the device is used, the photoelectric detector is used for carrying out functional detection on crystal grains on the crystal disc, the positions of the qualified crystal grains after detection are marked, the crystal disc after the test is placed in the crystal grain separation area 2, and the negative pressure adsorption holes 21 are used for adsorbing the crystal disc to avoid separation;
at this time, the PLC control system is used for controlling the electromagnet 324 corresponding to the unqualified crystal grain to be electrified, the separation sucker 323 corresponding to the unqualified crystal grain is lifted, so that the separation sucker 323 corresponding to the unqualified crystal grain cannot be contacted with the unqualified crystal grain, the manipulator 31 is used for controlling the separation sucker 32 to be close to the crystal disc of the crystal grain separation area 2 and to be contacted with the crystal disc, the electromagnetic valve on the negative pressure pipe 34 is opened, because the inside of the vacuum tank 33 is in a vacuum state, the gas inside the separation sucker 323 continuously flows into the vacuum tank 33, at this time, the gas inside the gas cavity 3232 also flows out through the suction hole 3235, the inner space inside the gas cavity 3232 is continuously reduced, so that the movable end 3234 is deformed under the action of the corrugated rubber 3236, at this time, the movable end 3234 of the fastening disc 3231 can grab the qualified crystal grain, and at, the entering gas acts on the movable end 3234, so that the movable end 3234 can more firmly grab qualified crystal grains;
after the qualified crystal grains are separated, the crystal disc of the crystal grain separation area 2 needs to be transferred, so that the qualified crystal grains on the next crystal disc can be conveniently separated, at the moment, the electromagnetic valve on the air inlet pipe connected with the sealing air bag 329 is opened, external gas enters the sealing air bag 329 through the air inlet pipe, so that the sealing air bag 329 is expanded, at the moment, a large sucking disc is formed between the sealing air bag 329 and the sucking plate 321, the crystal disc is adsorbed by utilizing the contact between the sealing air bag 329 and the crystal disc, the crystal disc after the crystal grains are separated is transferred to the crystal disc putting-in opening 4, and the crystal disc after the qualified crystal grains are separated is uniformly stored in the storage barrel 505;
after the storage barrel 505 is filled with the wafers, the storage barrel 505 needs to be replaced, at this time, the fixing ring 504 is rotated, so that the rotating base 502 rotates outside the fixing base 501, at this time, the first limit projection 5012 and the second limit projection 5014 are displaced, the projection position of the second limit projection 5014 is transferred from the recessed position of the first limit projection 5012 to the next adjacent recessed position, at this time, the other storage barrel 505 accurately corresponds to the wafer input port 4, and in the transferring process, when the projection position of the first limit projection 5012 and the projection position of the second limit projection 5014 contact with each other, the fastening spring 5013 is squeezed, at this time, the fixing ring 504 sinks, that is, the contact and abrasion between the fixing ring 504 and the die separating table 1 are avoided, and the service life of the fixing ring 504 is prolonged.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (10)
1. A full autosegregation device of LED chip crystalline grain disk, its characterized in that: the full-automatic separation device comprises a crystal grain separation table (1), a crystal grain separation area (2), a crystal grain separation assembly, a crystal disc putting port (4) and a crystal disc storage assembly (5);
a crystal grain separation area (2) is arranged on one side of the upper surface of the crystal grain separation table (1), a plurality of negative pressure adsorption holes (21) are formed in the crystal grain separation area (2), and a crystal grain separation assembly is arranged in the middle of the upper surface of the crystal grain separation table (1);
the crystal grain separation assembly comprises a manipulator (31), a separation sucker (32), a vacuum tank (33), a negative pressure pipe (34) and a vacuum pumping pump (36);
manipulator (31) fixed mounting is on crystalline grain separating table (1) surface, manipulator (31) one end is provided with separation sucking disc (32), manipulator (31) one side is provided with vacuum tank (33), be connected through negative pressure pipe (34) between separation sucking disc (32) and vacuum tank (33), be provided with the solenoid valve on negative pressure pipe (34), manipulator (31) opposite side is provided with evacuation pump (36), pass through the pipe connection between vacuum tank (33) and evacuation pump (36), crystalline grain separating table (1) upper surface and crystalline grain separating zone (2) correspond position department and have seted up crystalline grain input mouth (4), crystalline grain separating table (1) lower surface is provided with the crystalline grain and deposits subassembly (5).
2. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 1, wherein: the separation sucker (32) comprises a suction plate (321), a cavity (322), a separation sucker (323), an electromagnet (324), a grabbing suction nozzle (325), a limiting groove (326) and a limiting block (327);
the bottom of the separation sucker (32) is provided with a suction plate (321), a cavity (322) is formed in the suction plate (321), a plurality of separation suckers (323) are installed at positions, corresponding to crystal grains on a crystal disc, of the cavity (322), electromagnets (324) are installed at positions, corresponding to the separation suckers (323), of the top end of the cavity (322), the bottom of each separation sucker (323) grabs the crystal grains through a grabbing suction nozzle (325), and the connection positions of the separation suckers (323) and the suction plate (321) are limited by limiting grooves (326) and limiting blocks (327).
3. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 2, wherein: the inside fastening disc (3231) that is provided with of grabbing suction nozzle (325), air cavity (3232) have been seted up to fastening disc (3231), fastening disc (3231) is stiff end (3233) with the one end of grabbing suction nozzle (325) contact, the other end of fastening disc (3231) is loose end (3234), be close to on stiff end (3233) and snatch suction nozzle (325) inboard and seted up suction hole (3235), loose end (3234) are close to and snatch suction nozzle (325) inboard and are provided with ripple rubber (3236).
4. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 3, wherein: and a memory metal sheet is arranged on the other side of the movable end (3234) corresponding to the corrugated rubber (3236).
5. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 4, wherein: the cross section of the fastening disc (3231) is finger-shaped.
6. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 5, wherein: an air inlet hole (3237) is formed in the position, close to the movable end (3234), of the grabbing suction nozzle (325).
7. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 6, wherein: the vacuum suction device is characterized in that an accommodating groove (328) is formed in the edge of the lower surface of the suction plate (321), a sealing air bag (329) is arranged in the accommodating groove (328), the length of the sealing air bag (329) extending out of the accommodating groove (328) in a normal state is greater than the length of the separation suction head (323) extending out of the suction plate (321), the sealing air bag (329) is connected with the vacuum tank (33) through an air conveying hose (3210), and an electromagnetic valve is arranged on the air conveying hose (3210).
8. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 7, wherein: the wafer storage assembly (5) comprises a fixed seat (501), a rotating seat (502), a connecting rod (503), a fixed ring (504) and a storage barrel (505);
the lower surface middle part of the crystal grain separating table (1) is provided with a fixed seat (501), a rotating seat (502) can be rotatably installed on the outer side of the fixed seat (501), a plurality of connecting rods (503) are arranged on the outer side of the rotating seat (502), one end of each connecting rod (503) is provided with a fixed ring (504), and a storage barrel (505) is fixed inside the fixed ring (504).
9. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 8, wherein: fixing base (501) middle part has been seted up swivelling chute (5011), swivelling chute (5011) top is provided with the first spacing arch (5012) unanimous with solid fixed ring (504) quantity, swivelling chute (5011) inside still is provided with fastening spring (5013), swivel base (502) upper surface and first spacing arch (5012) correspond the position department and are provided with the spacing arch of second (5014).
10. The full-automatic separating device for the LED chip crystal grain disc as claimed in claim 9, wherein: the cross sections of the first limiting bulges (5012) and the second limiting bulges (5014) are isosceles triangles, and the bottom angles of the two adjacent first limiting bulges (5012) or the second limiting bulges (5014) are in contact with each other.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115036213A (en) * | 2022-08-11 | 2022-09-09 | 四川洪芯微科技有限公司 | Wafer cracking device and wafer cracking method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3720309A (en) * | 1971-12-07 | 1973-03-13 | Teledyne Inc | Method and apparatus for sorting semiconductor dice |
| JPH01268040A (en) * | 1988-04-19 | 1989-10-25 | Nec Corp | Apparatus for selecting semiconductor element |
| CN101673695A (en) * | 2008-09-08 | 2010-03-17 | 京元电子股份有限公司 | Double-side detection equipment for bare crystalline grains |
| CN106981437A (en) * | 2017-03-09 | 2017-07-25 | 铜陵三佳山田科技股份有限公司 | Sorting characterization processes and its equipment for QFN BGA semiconductor chips |
| CN110816954A (en) * | 2020-01-13 | 2020-02-21 | 常州莫森智能科技有限公司 | Online weight detection device with spider mobile phone mechanical arm |
| CN112317339A (en) * | 2020-09-10 | 2021-02-05 | 中国石油大学(华东) | LED wafer sorting system and sorting method thereof |
-
2021
- 2021-05-25 CN CN202110573276.9A patent/CN113019957B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3720309A (en) * | 1971-12-07 | 1973-03-13 | Teledyne Inc | Method and apparatus for sorting semiconductor dice |
| JPH01268040A (en) * | 1988-04-19 | 1989-10-25 | Nec Corp | Apparatus for selecting semiconductor element |
| CN101673695A (en) * | 2008-09-08 | 2010-03-17 | 京元电子股份有限公司 | Double-side detection equipment for bare crystalline grains |
| CN106981437A (en) * | 2017-03-09 | 2017-07-25 | 铜陵三佳山田科技股份有限公司 | Sorting characterization processes and its equipment for QFN BGA semiconductor chips |
| CN110816954A (en) * | 2020-01-13 | 2020-02-21 | 常州莫森智能科技有限公司 | Online weight detection device with spider mobile phone mechanical arm |
| CN112317339A (en) * | 2020-09-10 | 2021-02-05 | 中国石油大学(华东) | LED wafer sorting system and sorting method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115036213A (en) * | 2022-08-11 | 2022-09-09 | 四川洪芯微科技有限公司 | Wafer cracking device and wafer cracking method |
| CN115036213B (en) * | 2022-08-11 | 2023-01-10 | 四川洪芯微科技有限公司 | Wafer cracking device and wafer cracking method |
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