CN113014221A - Inductor and tunable filter - Google Patents
Inductor and tunable filter Download PDFInfo
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- CN113014221A CN113014221A CN202110335564.0A CN202110335564A CN113014221A CN 113014221 A CN113014221 A CN 113014221A CN 202110335564 A CN202110335564 A CN 202110335564A CN 113014221 A CN113014221 A CN 113014221A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/01—Frequency selective two-port networks
Abstract
The invention discloses an inductor and an adjustable filter. The MEMS multi-contact switch comprises an MEMS multi-contact switch and a coplanar waveguide transmission structure; the coplanar waveguide transmission structure comprises a central signal line and a plurality of support arms arranged at two sides of the central signal line; at least one pair of support arms is arranged on at least two straight lines along the extending direction of the central signal line; the center signal line and the support arm in the pair are connected through the MEMS multi-contact switch when the MEMS multi-contact switch is closed. The invention integrates the MEMS multi-contact switch and the coplanar waveguide transmission structure, and the circuit connection of the coplanar waveguide transmission structure is changed by closing the MEMS multi-contact switch to connect the central signal line and the pair of support arms, thereby reducing the total number of the connected switches among the support arms, reducing the overall size of the inductor and forming the small-size planar structure inductor meeting the requirements of the millimeter wave filter.
Description
Technical Field
The embodiment of the invention relates to the technical field of wireless communication, in particular to an inductor and an adjustable filter.
Background
The high-performance micro filter can play important roles of channel selection, double-work and image elimination parasitic filtering and the like in a multi-band wireless communication system and a wireless transceiver. However, the single-frequency filter employed in the multiband receiver cannot simultaneously meet the requirement of selecting multiple frequency bands, and thus multiple single-frequency filters are usually added in the multiband receiver to select different frequency bands, thereby increasing the design size of the filter circuit of the wireless communication system of the multiband receiver.
With the development of multi-frequency wireless communication systems in microwave and millimeter wave bands in recent years, tunable filters based on MEMS technology have attracted much attention. The existing filter is formed by variable reactance elements, the variable reactance elements adopt MEMS varistors as tuning elements, and the tunable range is 10% -15%. However, for discrete frequencies with a wider tuning range, capacitive MEMS switches are typically employed to achieve a higher tunable range. In addition, another filter for realizing wide-range discrete frequency tuning adopts a quasi-fractal structure and an MEMS contact switch, and as the inductance element of the filter adopts a distributed circuit design, the stop band suppression function of the filter is influenced.
The design principle of the filter is to adjust the values of L and C to achieve the up-shift or down-shift of the frequency response of the filter, so an ideal tunable filter design requires not only a variable capacitor but also a variable inductor. However, due to the non-planarity of the variable capacitor transition, it cannot be integrated with other circuits, and thus cannot meet the requirement of the millimeter wave filter for a small-sized planar structure.
Disclosure of Invention
The invention provides an inductor and an adjustable filter, which are used for solving the defect that a filter circuit formed by the inductor and a capacitor in the prior art is large in size, so that the requirement of a millimeter wave filter on a small-size planar structure inductor can be met.
In a first aspect, an embodiment of the present invention provides an inductor, including a MEMS multi-contact switch and a coplanar waveguide transmission structure;
the coplanar waveguide transmission structure comprises a central signal line and a plurality of support arms arranged at two sides of the central signal line; at least one pair of support arms is arranged on at least two straight lines along the extending direction of the central signal line; the center signal line and the support arm in the pair are connected through the MEMS multi-contact switch when the MEMS multi-contact switch is closed.
Further, the MEMS multi-contact switch comprises a contact piece, a first driving plate and a second driving plate;
the contact piece, the first driving plate and the second driving plate are all provided with holes which are arranged in an array manner; the contact piece comprises a first end and a second end along a first direction, and the first driving plate and the second driving plate are respectively arranged on two sides of the contact piece and are respectively connected with the first end and the second end; the first drive plate and the second drive plate are movable toward the contact piece in a first direction;
the first direction is a row direction of the holes arrayed on the contact sheet.
Further, the MEMS multi-contact switch also comprises a first supporting beam and a second supporting beam;
along a second direction, the contact piece comprises a third end and a fourth end, and the first supporting beam and the second supporting beam are respectively arranged on two sides of the contact piece; the first end of the first supporting beam and the first end of the second supporting beam are respectively connected with the first driving plate, and the second end of the first supporting beam and the second end of the second supporting beam are respectively connected with the second driving plate; the second direction is a row direction of the holes arrayed on the contact sheet.
Furthermore, one side of the central signal line is provided with a first support arm and a second support arm, and the other side of the central signal line is provided with a third support arm and a fourth support arm;
along the extending direction of the central signal line, the first support arm and the second support arm are positioned on the same straight line, and the third support arm and the fourth support arm are positioned on the same straight line; one end of the first support arm, which is far away from the second support arm, is connected with the central signal line, one end of the second support arm, which is far away from the first support arm, is connected with the central signal line, one end of the third support arm, which is far away from the fourth support arm, is connected with the central signal line, and one end of the fourth support arm, which is far away from the third support arm, is connected with the central signal line.
Further, the inductor further comprises a substrate;
the MEMS multi-contact switch is arranged on one side of the coplanar waveguide transmission structure, which is far away from the substrate; the orthographic projection of the contact piece is partially overlapped with the central signal line and the support arm of the coplanar waveguide transmission structure along the thickness direction of the substrate.
Further, the spacing between the arms of a pair is less than the length of the contact in the first direction.
In a second aspect, an embodiment of the present invention further provides a tunable filter, including an inductor and a MEMS capacitive switch implementing any one of the first aspects;
the inductor is connected with the MEMS capacitive switch.
Further, the tunable filter further includes a capacitor;
the first end of the capacitor is connected with the MEMS capacitive switch, and the second end of the capacitor is grounded.
Furthermore, the tunable filter comprises an input end, an output end, two inductors and three MEMS capacitive switches;
the two inductors are connected in series between the input end and the output end, and the three MEMS capacitive switches are respectively connected with the input end, the output end and the connection points of the two inductors.
Further, the MEMS switch capacitor comprises a tunable membrane bridge capacitor.
The invention integrates the MEMS multi-contact switch and the coplanar waveguide transmission structure, when the MEMS multi-contact switch is closed, the MEMS multi-contact switch can be bent downwards to contact the central signal line and the pair of support arms, so that the central signal line is communicated with the pair of support arms, the line connection of the coplanar waveguide transmission structure is changed, the inductance value of the coplanar waveguide transmission structure is changed, and the independent change of the inductance value is realized. Therefore, when the MEMS multi-contact switch is closed, the MEMS multi-contact switch is adopted to replace a switch between the support arms of the coplanar waveguide transmission structure, the total number of the communicated switches between the support arms is reduced, the insertion loss is effectively reduced, the overall size of the inductor is reduced, and the small-size planar structure inductor meeting the requirements of a millimeter wave filter is formed.
Drawings
Fig. 1 is a schematic structural diagram of an inductor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a MEMS multi-contact switch according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another inductor according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a tunable filter according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of another tunable filter according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of another tunable filter according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of an equivalent circuit of a tunable filter according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An embodiment of the present invention provides a schematic structural diagram of an inductor, and fig. 1 is a schematic structural diagram of an inductor according to an embodiment of the present invention. As shown in fig. 1, the inductor includes a MEMS multi-contact switch 110 and a coplanar waveguide transmission structure 120; the coplanar waveguide transmission structure 120 includes a central signal line 121 and a plurality of support arms 122 disposed at two sides of the central signal line 121; at least one pair of support arms 122 are arranged on at least two straight lines along the direction X1 extending from the central signal line 121; when the MEMS multi-contact switch 110 is closed, the center signal line 121 and the arm 122 of a pair are connected through the MEMS multi-contact switch 110.
The MEMS multi-contact switch 110 has the characteristics of easy use, small size, and low loss, and can stably transmit signals of 0 to several hundred GHz. The coplanar waveguide transmission structure 120 has the characteristics of small volume, light weight and convenient integration with other circuits. Specifically, the coplanar waveguide transmission structure 120 is composed of a central signal line 121 and a plurality of arms 122 disposed on both sides of the central signal line 121, and at least one pair of arms 122 is disposed on at least two straight lines in a direction X1 along which the central signal line 121 extends. Illustratively, one side of the central signal line 121 is provided with a first arm 123 and a second arm 124, and the other side of the central signal line 121 is provided with a third arm 125 and a fourth arm 126; along the extending direction X1 of the central signal line 121, the first arm 123 and the second arm 124 are located on a straight line, and the third arm 125 and the fourth arm 126 are located on a straight line; the end of the first arm 123 far from the second arm 124 is connected to the central signal line 121, the end of the second arm 124 far from the first arm 123 is connected to the central signal line 121, the end of the third arm 125 far from the fourth arm 126 is connected to the central signal line 121, and the end of the fourth arm 126 far from the third arm 125 is connected to the central signal line 121. In addition, the coplanar waveguide transmission structure 120 further includes a ground line 127. According to the invention, by integrating the MEMS multi-contact switch 110 with the coplanar waveguide transmission structure 120, when the MEMS multi-contact switch 110 is closed, the MEMS multi-contact switch 110 can be bent downwards to contact the central signal line 121 and the support arm 122 in one pair, so that the central signal line 121 is communicated with the support arm 122 in one pair, the line connection of the coplanar waveguide transmission structure 120 is changed, the inductance value of the coplanar waveguide transmission structure 120 is changed, and the independent change of the inductance value is realized. Therefore, when the MEMS multi-contact switch 110 is closed, the MEMS multi-contact switch 110 is adopted to replace a switch between support arms of the coplanar waveguide transmission structure 120, the total number of communicated switches between the support arms 122 is reduced, the insertion loss is effectively reduced, the overall size of the inductor is reduced, and the small-size planar structure inductor meeting the requirements of a millimeter wave filter is formed.
Fig. 2 is a schematic structural diagram of a MEMS multi-contact switch according to an embodiment of the present invention, as shown in fig. 2, optionally, the MEMS multi-contact switch includes a contact plate 111, a first driving plate 112, and a second driving plate 113; the contact piece 111, the first driving plate 112 and the second driving plate 113 are all provided with holes arranged in an array; the contact piece 111 includes a first end and a second end along the first direction X2, and the first driving plate 112 and the second driving plate 113 are respectively disposed at both sides of the contact piece 111 and are respectively connected to the first end and the second end; the first driving plate 112 and the second driving plate 113 are movable toward the contact piece 111 in the first direction X2; the first direction X2 is a row direction of the holes arranged in an array on the contact sheet 111.
Specifically, a first direction X2 is set as a row direction of holes arrayed on the contact piece 111, two ends of the contact piece 111 in the first direction X2 are respectively a first end and a second end, and the first drive plate 112 is located on a first end side of the contact piece 111, the second drive plate 113 is located on a second end side of the contact piece 111, the first drive plate 112 is connected with the first end of the contact piece 111, and the second drive plate 113 is connected with the second end of the contact piece 111. The first driving plate 112 and the second driving plate 113 can move towards the contact piece 111 along the first direction X2, and when the first driving plate 112 and the second driving plate 113 simultaneously approach towards the contact piece 111 along the first direction X2, the contact piece 111 receives a pressing force simultaneously applied by the first driving plate 112 connected with the first end and the second driving plate 113 connected with the second end, and further the contact piece 111, the first driving plate 112 and the second driving plate 113 are mechanically deformed to different degrees at the moment. Since the contact piece 111, the first driving board 112 and the second driving board 113 are provided with the holes arranged in an array, the flexibility of the contact piece 111, the first driving board 112 and the second driving board 113 can be increased, and the contact piece 111, the first driving board 112 and the second driving board 113 can be prevented from being damaged due to mechanical deformation in the process of extrusion movement. In addition, when the MEMS multi-contact switch is closed, the first driving board 112 and the second driving board 113 approach the contact piece 111 along the first direction X2 at the same time, and the contact piece 111 bends toward the coplanar waveguide transmission structure when being pressed by the first driving board 112 connected to the first end and the second driving board 113 connected to the second end, so that the contact piece 111 contacts the center signal line and the arm in one pair, and the center signal line and the arm in one pair are connected through the contact piece 111. Because the contact sheet 111 is provided with the holes arranged in an array, a plurality of switches can be formed, and further the number of the connecting paths of the contact sheet 111 for connecting the central signal line and the support arms in one pair can be increased, namely the contact sheet 111 replaces the switches among the support arms, the insertion loss of the device can be effectively reduced, and the whole size of the inductor can be reduced.
Illustratively, with continued reference to fig. 2, the MEMS multi-contact switch further includes a first support beam 114 and a second support beam 115; along the second direction Y, the contact piece 111 includes a third end and a fourth end, and the first support beam 114 and the second support beam 115 are respectively disposed on two sides of the contact piece 111; a first end of the first support beam 114 and a first end of the second support beam 115 are connected to the first drive plate 112, respectively, and a second end of the first support beam 114 and a second end of the second support beam 115 are connected to the second drive plate 113, respectively; the second direction Y is a row direction of the holes arranged in an array on the contact sheet 111.
Wherein the MEMS multi-contact switch further comprises a first support beam 114 and a second support beam 115. Specifically, the second direction Y is set as the row direction of the holes arrayed on the contact sheet 111, and the two ends of the contact sheet 111 in the second direction Y are respectively a third end and a fourth end, and in this direction, the first support beam 114 is located at the third end side of the contact piece 111, the second support beam 115 is located at the fourth end side of the contact piece 111, and a first end of the first support beam 114 and a first end of the second support beam 115 are connected to the first driving plate 112, respectively, a second end of the first support beam 114 and a second end of the second support beam 115 are connected to the second driving plate 113, respectively, furthermore, the first support beam 114 and the second support beam 115 can better provide a support effect for the first driving plate 112 and the second driving plate 113, and prevent the first driving plate 112 and the second driving plate 113 from moving to the contact piece 111 along the first direction X2 for too long a distance at the same time, which causes the contact piece 111, the first driving plate 112 and the second driving plate 113 to deform too much and break during the moving and pressing movement.
Fig. 3 is a schematic structural diagram of another inductor according to an embodiment of the present invention, and as shown in fig. 3, the inductor further includes a substrate 130; the coplanar waveguide transmission structure 120 is disposed on the substrate 130, and the MEMS multi-contact switch 110 is disposed on a side of the coplanar waveguide transmission structure 120 away from the substrate 130; the orthographic projection 140 of the contact pad 111 overlaps the central signal line and the arm portion of the coplanar waveguide transmission structure 120 along the thickness direction of the substrate 130.
The substrate 130 may be 520 μm thick quartz, the coplanar waveguide transmission structure 120 may be 3 μm thick metal layer, the coplanar waveguide transmission structure 120 is disposed on the substrate 130, and the MEMS multi-contact switch 110 is disposed on a side of the coplanar waveguide transmission structure 120 away from the substrate 130. Along the thickness direction of the substrate 130, the orthographic projection 140 of the contact piece 111 of the MEMS multi-contact switch 110 is partially overlapped with the central signal line and the arm of the coplanar waveguide transmission structure 120, so that it can be known that the area of the contact piece 111 is larger than the gap area of the pairs of arms, if the first driving board 112 and the second driving board 113 are close to the contact piece 111 along the first direction at the same time, the contact piece 111 is pressed to the side close to the substrate 130 to generate convex deformation, and then the protruding portion of the contact piece 111 can be contacted with the central signal line and the pair of arms, so as to reconstruct the connection relation of the coplanar waveguide transmission structure 120, and further change the inductance value of the inductor.
In particular, the spacing between the arms in a pair with continued reference to fig. 3 is less than the length of the contact tab 111 in the first direction X2.
Illustratively, the spacing between the arms of a pair of coplanar waveguide transmission structures 120 is less than the length of the contact pad 111 along the first direction X2, the spacing between the arms of a pair is 20 microns, and the length of the contact pad 111 along the first direction is 100 microns. When the first driving board 112 and the second driving board 113 approach the contact 111 along the first direction at the same time, the contact 111 receives the pressing force applied by the first driving board 112 connected to the first end and the second driving board 113 connected to the second end at the same time, and the contact 111 protrudes toward the substrate 130, so that the contact 111 communicates with the pair of arms. Therefore, the distance between the support arms in one pair is smaller than the length of the contact piece 111 along the first direction, so that the contact piece can be conveniently communicated with the pair of support arms after being subjected to convex deformation.
In addition, the following table shows the detailed dimensions of the coplanar waveguide transmission structure of fig. 3.
| Parameter(s) | W1 | W2 | G | S | L1 | L2 | L3 |
| Size um | 20 | 30 | 20 | 40 | 20 | 220 | 20 |
Fig. 4 is a schematic structural diagram of a tunable filter according to an embodiment of the present invention, as shown in fig. 4, the tunable filter includes an inductor 100 and a MEMS capacitive switch 200 for implementing any one of the above embodiments; the inductor 100 is connected to the MEMS capacitive switch 200.
The inductor 100 includes the inductor 100 provided in any embodiment of the present invention, and therefore, the beneficial effects of the inductor 100 provided in the embodiment of the present invention are achieved, and details are not described herein. In addition, the inductor 100 is connected to the MEMS capacitive switch 200, and the inductance of the inductor 100 and the capacitance of the MEMS capacitive switch 200 can be independently changed by operating the inductor 100 and the MEMS capacitive switch 200, so that the passband characteristic of the tunable filter maintains the ideal chebyshev prototype response characteristic.
Fig. 5 is a schematic structural diagram of another tunable filter according to an embodiment of the present invention, and as shown in fig. 5, the tunable filter further includes a capacitor 300; a first terminal of the capacitor 300 is connected to the MEMS capacitive switch 200 and a second terminal of the capacitor 300 is connected to ground.
The capacitor 300 has the characteristics of storing electricity, discharging electricity and isolating direct current and direct current. The MEMS capacitive switch 200 may be provided with a bias voltage by connecting a first terminal of the capacitor 300 to the MEMS capacitive switch 200 using the storage characteristics thereof. In addition, by using the characteristic of the capacitor 300 for blocking direct current and alternating current, the first end of the capacitor 300 is connected with the MEMS capacitive switch 200, and the second end of the capacitor 300 is grounded, so that noise generated in the filter circuit can be led to the negative end or the ground end instead of the bias decoupling circuit, thereby removing the noise generated in the filter circuit.
Fig. 6 is a schematic structural diagram of another tunable filter according to an embodiment of the present invention, and as shown in fig. 6, the tunable filter includes an input end a, an output end B, two inductors 100, and three MEMS capacitive switches 200; two inductors 100 are connected in series between the input terminal a and the output terminal B, and three MEMS capacitive switches 200 are connected to the connection points of the input terminal a, the output terminal B, and the two inductors 100, respectively.
For example, fig. 7 is a schematic structural diagram of an equivalent circuit of a tunable filter according to an embodiment of the present invention, as shown in fig. 7, two inductors L are connected in series between an input terminal a and an output terminal B, and a MEMS capacitive switch C is connected to the two inductors L1An MEMS capacitive switch C connected with the input end A2Connected to the junction of two inductors L, a MEMS capacitive switch C1Connected to the input B. Wherein, when the two inductors L are in a 'down' state (i.e. closed state), the MEMS capacitive switch C1And MEMS capacitive switch C2In the "up" state (i.e., the on state), the tunable filter is in the "wide band" state, which is now 57 GHz. When the two inductors L are in the "up" state (i.e. open state), the MEMS capacitive switch C1And MEMS capacitive switch C2In the "down" state (i.e., closed state), the tunable filter is in the "narrow band" state, where the bandwidth is now 19 GHz.
It should be noted that: when the inductor is in the "down" state (i.e., closed state): the first driving plate and the second driving plate are close to the contact piece along the first direction at the same time, and the contact piece can be bent towards the direction close to the coplanar waveguide transmission structure under the condition that the first driving plate connected with the first end and the second driving plate connected with the second end of the contact piece are simultaneously extruded, so that the contact piece is in contact with the central signal line and the support arms in one pair, and further the central signal line is connected with the support arms in one pair through the contact piece.
The following table shows the inductance L, MEMS capacitance switch C of the tunable filter in each state1And MEMS capacitive switch C2The filter bandwidth of each state of the tuned filter. As can be seen from the table, the inductor L, MEMS capacitor switch C was designed and tested1And MEMS capacitive switch C2The estimated value of (c) is biased due to the micro-electromechanical system bridge being slightly deflected downward, so that the extracted inductance value has a parasitic series resistance of 2.3 ohms in the "wide band" state and 3 ohms in the "narrow band" state.
The tunable filter may further comprise an rf choke, a first end of the rf choke being connected to the input a of the tunable filter and a second end of the rf choke being connected to ground. Wherein the radio frequency choke is used for eliminating a coupling component in an input signal provided by the input end.
Optionally, the MEMS switch capacitor comprises a tunable membrane bridge capacitor.
A gap is formed between the insulating layer and the metal film of the adjustable film bridge capacitor, and when voltage is applied, electrostatic attraction is generated due to the presence of different charges in the metal bridge and the central lead, so that the metal film bridge moves downwards and is tightly attached to the insulating layer. The insulating layer can prevent direct current short circuit, and can be used as a dielectric layer to form a capacitor with an MIM structure together with the upper and lower metal plates. When the applied voltage is removed, the metal film bridge is restored to the original state. The adjustable film bridge capacitor can change the capacitance value of the adjustable film bridge capacitor through the up-and-down movement of the metal film bridge, thereby realizing the independent change of the capacitance value of the adjustable filter.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. An inductor comprising a MEMS multi-contact switch and a coplanar waveguide transmission structure;
the coplanar waveguide transmission structure comprises a central signal line and a plurality of support arms arranged on two sides of the central signal line; at least one pair of the support arms is arranged on at least two straight lines along the extending direction of the central signal line; the center signal line and the support arm in a pair are connected through the MEMS multi-contact switch when the MEMS multi-contact switch is closed.
2. The inductor according to claim 1, wherein the MEMS multi-contact switch comprises a contact pad, a first drive plate, and a second drive plate;
the contact piece, the first driving plate and the second driving plate are all provided with holes which are arranged in an array manner; the contact piece comprises a first end and a second end along a first direction, and the first driving plate and the second driving plate are respectively arranged on two sides of the contact piece and are respectively connected with the first end and the second end; the first drive plate and the second drive plate are movable in the first direction toward the contact piece;
the first direction is a row direction of the holes arrayed on the contact sheet.
3. The reconfigurable inductor of claim 2, wherein the MEMS multi-contact switch further comprises a first support beam and a second support beam;
along a second direction, the contact piece comprises a third end and a fourth end, and the first supporting beam and the second supporting beam are respectively arranged on two sides of the contact piece; the first end of the first supporting beam and the first end of the second supporting beam are respectively connected with the first driving plate, and the second end of the first supporting beam and the second end of the second supporting beam are respectively connected with the second driving plate; and the second direction is the column direction of the holes arrayed on the contact sheet.
4. The inductor according to claim 1, wherein one side of the central signal line is provided with a first arm and a second arm, and the other side of the central signal line is provided with a third arm and a fourth arm;
along the extending direction of the central signal line, the first support arm and the second support arm are positioned on the same straight line, and the third support arm and the fourth support arm are positioned on the same straight line; the one end that the second support arm was kept away from to first support arm with central signal line is connected, the one end that the first support arm was kept away from to the second support arm with central signal line is connected, the one end that the fourth support arm was kept away from to the third support arm with central signal line is connected, the one end that the third support arm was kept away from to the fourth support arm with central signal line is connected.
5. The inductor of claim 2, further comprising a substrate;
the coplanar waveguide transmission structure is arranged on the substrate, and the MEMS multi-contact switch is arranged on one side of the coplanar waveguide transmission structure, which is far away from the substrate; and in the thickness direction of the substrate, the orthographic projection of the contact piece is partially overlapped with the central signal line and the support arm of the coplanar waveguide transmission structure.
6. An inductor according to claim 2, wherein the legs of said pair are spaced apart by a distance less than the length of said contact in the first direction.
7. A tunable filter comprising an inductor and MEMS capacitive switch as claimed in any one of claims 1 to 6;
the inductor is connected with the MEMS capacitive switch.
8. The tunable filter of claim 7, further comprising a capacitor;
the first end of the capacitor is connected with the MEMS capacitive switch, and the second end of the capacitor is grounded.
9. The tunable filter of any one of claims 7-8, comprising an input, an output, two of the inductors, and three of the MEMS capacitive switches;
the two inductors are connected in series between the input end and the output end, and the three MEMS capacitive switches are respectively connected with the input end, the output end and the connection points of the two inductors.
10. The tunable filter of claim 7, wherein the MEMS switch capacitor comprises a tunable membrane bridge capacitor.
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| CN202110335564.0A CN113014221A (en) | 2021-03-29 | 2021-03-29 | Inductor and tunable filter |
| PCT/CN2021/103437 WO2022205647A1 (en) | 2021-03-29 | 2021-06-30 | Inductor and tunable filter |
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| CN202110335564.0A CN113014221A (en) | 2021-03-29 | 2021-03-29 | Inductor and tunable filter |
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| WO2022205647A1 (en) * | 2021-03-29 | 2022-10-06 | 广东大普通信技术有限公司 | Inductor and tunable filter |
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| JP2014175157A (en) * | 2013-03-08 | 2014-09-22 | Omron Corp | High frequency switch |
| CN106817103B (en) * | 2016-12-19 | 2023-08-04 | 北京航天微电科技有限公司 | Micro-mechanical adjustable filter |
| CN110768643B (en) * | 2019-10-11 | 2023-08-01 | 成都挚信电子技术有限责任公司 | Electric control impedance allocation chip based on radio frequency micro-electromechanical structure and microwave system |
| CN113014221A (en) * | 2021-03-29 | 2021-06-22 | 广东大普通信技术有限公司 | Inductor and tunable filter |
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| WO2022205647A1 (en) * | 2021-03-29 | 2022-10-06 | 广东大普通信技术有限公司 | Inductor and tunable filter |
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