CN113013010B - Corrugated pipe structure, method for adjusting verticality and plasma processing device thereof - Google Patents
Corrugated pipe structure, method for adjusting verticality and plasma processing device thereof Download PDFInfo
- Publication number
- CN113013010B CN113013010B CN201911327071.1A CN201911327071A CN113013010B CN 113013010 B CN113013010 B CN 113013010B CN 201911327071 A CN201911327071 A CN 201911327071A CN 113013010 B CN113013010 B CN 113013010B
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- corrugated pipe
- bellows
- adjusting block
- shaft
- pipe shaft
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32807—Construction (includes replacing parts of the apparatus)
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Diaphragms And Bellows (AREA)
Abstract
Bellows structure, method for adjusting verticality and plasma processing device thereof. The invention relates to a corrugated pipe structure and a method for adjusting perpendicularity of a corrugated pipe shaft. The corrugated pipe structure comprises a corrugated pipe shaft, a corrugated pipe body and an adjusting block. The corrugated pipe body is sleeved with a corrugated pipe shaft. The adjusting block is sleeved with the corrugated pipe shaft in an adjustable sleeved position and is used for changing the perpendicularity of the corrugated pipe shaft. The corrugated pipe shaft is sleeved and adjusted through the adjusting block, so that the corrugated pipe shaft has a better perpendicularity effect.
Description
Technical Field
The invention relates to a device in the field of semiconductors, in particular to a corrugated pipe structure and a method for adjusting perpendicularity of a corrugated pipe shaft.
Background
Generally, the bellows is mainly applied in a vacuum cavity of a plasma processing device, a bellows shaft is arranged in the bellows, and the relative position of the bellows shaft and a bellows body has errors relative to a standard position; however, the conventional bellows structure does not have a function of adjusting the bellows shaft, and cannot be adjusted.
Disclosure of Invention
The present invention is directed to a bellows structure and a method for adjusting perpendicularity of a bellows shaft thereof, which are used for solving the problems in the prior art.
In order to achieve the above object, a first technical solution of the present invention is to provide a bellows structure including a bellows shaft, a bellows body, and an adjusting block. The corrugated pipe body is sleeved with a corrugated pipe shaft. The adjusting block is sleeved with the corrugated pipe shaft in an adjustable sleeved position and is used for changing the perpendicularity of the corrugated pipe shaft.
Optionally, the adjusting block is disposed in the bellows body and is adjustable in relative position to the bellows body.
Optionally, an elastomer is arranged between the adjusting block and the bellows body, and a plurality of locking elements respectively penetrate through the periphery of the adjusting block and are locked on one surface of the bellows body corresponding to the elastomer in an adjustable and elastic manner.
Optionally, a protrusion is formed on a side of the adjustment block corresponding to the bellows axis.
Optionally, the bellows body is concave to form a concave part corresponding to the surface of the elastic body, and the adjusting block and the elastic body are positioned in the concave part.
Optionally, the bellows body includes a channel for receiving the adjustment block and the bellows shaft therethrough, the adjustment block being movable up and down the channel.
Optionally, the adjusting block has a tapered through hole for the bellows shaft to pass through, the tapered through hole corresponds to one end of the bellows shaft in a tapered shape, and the adjusting block moves along the channel of the bellows body so that the tapered through hole of the adjusting block matches with the one end of the bellows shaft in a tapered shape for adjusting perpendicularity of the bellows shaft.
Optionally, the bellows body is sleeved and does not contact the bellows shaft.
In order to achieve the above object, a second aspect of the present invention provides a method for adjusting perpendicularity of a bellows shaft, comprising the steps of: sleeving a corrugated pipe body on the outer side of a corrugated pipe shaft; sleeving an adjusting block on the outer side of the corrugated pipe shaft; the adjusting block is positioned between the corrugated pipe body and the corrugated pipe shaft or above the corrugated pipe body; the relative position between the adjusting block and the corrugated pipe body is changed, so that the adjusting block and the corrugated pipe shaft are propped against each other, and the perpendicularity of the corrugated pipe shaft is changed.
Optionally, the method for adjusting the perpendicularity of the bellows shaft further comprises the following steps: an elastic body is arranged between the adjusting block and the corrugated pipe body; a plurality of locking elements respectively penetrate through the adjusting block and the elastic body; and adjusting at least one locking element, and changing the relative position between the adjusting block and the corrugated pipe body by changing the thickness of the elastic body at the corresponding position of the locking element so as to realize the adjustment of the perpendicularity of the adjusting block to the corrugated pipe shaft.
Optionally, the method for adjusting the perpendicularity of the bellows shaft further comprises the following steps: the corrugated pipe body comprises a channel for accommodating the up-and-down movement of the adjusting block; the conical through hole for accommodating the corrugated pipe shaft of the adjusting block and one conical end of the corrugated pipe shaft, which is close to the adjusting block, are provided with a taper matched with each other; when the adjusting block moves downwards along the channel of the corrugated pipe body, the conical through hole of the adjusting block is matched with one conical end of the corrugated pipe shaft, so that the perpendicularity of the corrugated pipe shaft is adjusted.
In order to achieve the above object, a third aspect of the present invention provides a plasma processing apparatus, including a vacuum reaction chamber; the vacuum reaction chamber comprises a corrugated pipe structure provided in the first technical scheme, and the corrugated pipe structure is used for realizing isolation between a vacuum environment and an atmospheric environment.
Compared with the prior art, the corrugated pipe shaft is sleeved and adjusted through the adjusting block, so that the corrugated pipe shaft has a better perpendicularity effect.
Drawings
FIG. 1 is a schematic illustration of a first embodiment of a bellows structure of the present invention prior to adjustment;
FIG. 2 is a schematic illustration of a first embodiment of the bellows structure of the present invention after adjustment;
FIG. 3 is a schematic illustration of a second embodiment of the bellows structure of the present invention prior to adjustment;
FIG. 4 is a schematic illustration of a second embodiment of the bellows structure of the present invention after adjustment;
FIG. 5 is a flow chart of a method of adjusting perpendicularity of a bellows axis according to the present invention.
Detailed Description
For the purpose of promoting an understanding of the nature, content and advantages of this invention and its advantages, reference should be made to the drawings and specific language used to describe the same in connection with the accompanying drawings, which are intended to illustrate and assist in the description, but not necessarily to the actual scale and organization of the invention, so that the invention should not be construed as limited to the actual scope of the claims.
Please refer to fig. 1 to 4; FIG. 1 is a schematic illustration of a first embodiment of a bellows structure of the present invention prior to adjustment; FIG. 2 is a schematic illustration of a first embodiment of the bellows structure of the present invention after adjustment; FIG. 3 is a schematic illustration of a second embodiment of the bellows structure of the present invention prior to adjustment; fig. 4 is a schematic illustration of an adaptation of a second embodiment of the bellows structure of the present invention.
Example 1:
as shown in fig. 1 and 2, the present invention provides a bellows structure 100 including a bellows shaft 110, a bellows body 120, and an adjustment block 130.
The bellows body 120 is used for sleeving the bellows shaft 110; the adjusting block 130 is provided with the bellows shaft 110 to change the perpendicularity of the bellows shaft 110 so as to adjust the fitting position.
The elastic body 140 is disposed between the adjusting block 130 and the bellows body 120 of the bellows structure 100, and a plurality of locking elements 150 respectively pass through the periphery of the adjusting block 130 and are locked on one surface of the bellows body 120 corresponding to the elastic body 140 in an adjustable manner.
Wherein, the adjusting block 130 forms a convex part 131 at one side corresponding to the bellows shaft 110.
On the other hand, the bellows body 120 may be recessed into a recess 121 corresponding to the surface of the elastic body 140, and the adjustment block 130 and the elastic body 140 are disposed in the recess 121. However, the above is only an example, and is not limited thereto. In addition, the bellows body 120 is sleeved and does not contact the bellows shaft 110.
At least one locking element 150 is adjusted, the thickness of the elastic body 140 at the corresponding position of the locking element 150 is changed, so that the adjusting block which is positioned at the same diameter as the adjusted locking element 150 and is positioned at the other side of the corrugated pipe shaft is inclined towards the direction of the adjusted locking element 150, and further the convex part 131 of the adjusting block pushes the corrugated pipe to axially incline towards the direction of the adjusted locking element 150, and finally the perpendicularity adjustment of the corrugated pipe shaft is realized. By changing the relative position between the adjustment block 130 and the bellows body 120, adjustment of the perpendicularity of the adjustment block 130 to the bellows shaft 110 is achieved.
The present invention also provides a method for adjusting the perpendicularity of the bellows shaft 110 based on the bellows structure 100 provided above. Referring to FIG. 5, a flow chart of a method for adjusting perpendicularity of a bellows shaft 110 according to the present invention is shown. The method for adjusting the perpendicularity of the bellows shaft 110 of the present invention comprises the following steps:
step S11: a bellows body 120 is sleeved outside the bellows shaft 110.
Step S12: an adjustment block 130 is sleeved outside the bellows shaft 110.
Step S13: the adjustment block 130 is located above the bellows body 120.
Step S14: the relative position between the adjustment block 130 and the bellows body 120 is changed such that the adjustment block 130 and the bellows shaft 110 abut against each other to change the perpendicularity of the bellows shaft 110.
Wherein, changing the relative position between the adjusting block 130 and the bellows body 120 further comprises the steps of:
step S14.1: an elastic body 140 is provided between the adjustment block 130 and the bellows body 120.
Step S14.2: a plurality of locking members 150 are inserted through the adjustment block 130 and the elastic body 140, respectively.
Step S14.3: the at least one locking element 150 is adjusted, and the perpendicularity of the adjusting block 130 to the bellows shaft 110 is adjusted by changing the thickness of the elastic body 140 at the corresponding position of the locking element 150 and changing the relative position between the adjusting block 130 and the bellows body 120.
It should be noted that the present invention also provides a plasma processing apparatus, which includes a vacuum reaction chamber; the vacuum reaction chamber comprises the bellows structure 100 provided above, and the bellows structure 100 is used for realizing isolation of a vacuum environment and an atmospheric environment. The bellows structure 100 is mainly applied to the inside of a vacuum cavity in a plasma processing device, for example, up-and-down moving parts in the vacuum cavity, and common parts include a baffle assembly behind a slit valve and the like; however, the bellows structure is applicable to many components and is not limited thereto.
Example 2:
as shown in fig. 3 and 4, the present invention provides a bellows structure 200, which includes a bellows shaft 210, a bellows body 220, and an adjustment block 230.
The bellows body 220 is used for sleeving the bellows shaft 210; the adjusting block 230 is provided with the bellows shaft 210 to adjust the fitting position, so as to change the perpendicularity of the bellows shaft 210.
Wherein, the adjusting block 230 is disposed in the bellows body 220 and is adjustable with respect to the bellows body 220. The bellows body 220 of the bellows structure 200 includes a channel 222 that receives the adjustment block 230 and the bellows shaft 210 therethrough, the adjustment block 230 being movable up and down the channel 222.
The adjusting block 230 has a tapered through hole 232 for the bellows shaft 210 to pass through, the tapered through hole 232 corresponds to one tapered end of the bellows shaft 210, and the adjusting block 230 moves along the channel 222 of the bellows body 220 such that the tapered through hole 232 of the adjusting block 230 matches with one tapered end of the bellows shaft 210 for adjusting the perpendicularity of the bellows shaft 210.
On the other hand, the bellows body 220 is sleeved and does not contact the bellows shaft 210.
The present invention also provides a method for adjusting the perpendicularity of the bellows shaft 210 based on the bellows structure 200 provided above. Referring to FIG. 5, a flow chart of a method for adjusting the perpendicularity of the bellows shaft 210 according to the present invention is shown. The method for adjusting the perpendicularity of the bellows shaft 210 of the present invention comprises the following steps:
step S21: a bellows body 220 is sleeved outside the bellows shaft 210.
Step S22: an adjustment block 230 is sleeved outside the bellows shaft 210.
Step S23: the adjustment block 230 is located between the bellows body 220 and the bellows shaft 210.
Step S24: the relative position between the adjustment block 230 and the bellows body 220 is changed such that the adjustment block 230 and the bellows shaft 210 abut against each other to change the perpendicularity of the bellows shaft 210.
Wherein, changing the relative position between the adjusting block 230 and the bellows body 220 further comprises the steps of:
step S24.1: the bellows body 220 includes a channel 222 that accommodates up and down movement of an adjustment block 230.
Step S24.2: the tapered through hole 232 where the adjustment block 230 receives the bellows shaft 210 and the tapered end of the bellows shaft 210 adjacent the adjustment block 230 have a matching taper.
Step S24.3: when the adjusting block 230 moves downward along the channel 222 of the bellows body 220, the tapered through hole 232 of the adjusting block 230 and the tapered end of the bellows shaft 210 cooperate with each other to adjust the perpendicularity of the bellows shaft 210.
It should be noted that the present invention also provides a plasma processing apparatus, which includes a vacuum reaction chamber; the vacuum reaction chamber comprises the bellows structure 200 provided above, and the bellows structure 200 is used for realizing isolation of a vacuum environment and an atmospheric environment. The bellows structure 200 is mainly applied to the inside of a vacuum cavity in a plasma processing device, for example, up-and-down moving parts in the vacuum cavity, and common parts include a baffle assembly behind a slit valve and the like; however, the bellows structure is applicable to many components and is not limited thereto.
Compared with the prior art, the corrugated pipe shaft is sleeved and adjusted through the adjusting block, so that the corrugated pipe shaft has a better perpendicularity effect.
While the present invention has been described in detail through the foregoing description of the preferred embodiment, it should be understood that the foregoing description is not to be considered as limiting the invention. Many modifications and substitutions of the present invention will become apparent to those of ordinary skill in the art upon reading the foregoing. Accordingly, the scope of the invention should be limited only by the attached claims.
Claims (9)
1. A bellows structure, comprising:
a bellows shaft;
the corrugated pipe body is sleeved with the corrugated pipe shaft; and
the adjusting block is sleeved with the corrugated pipe shaft in an adjustable sleeved position and is used for changing the perpendicularity of the corrugated pipe shaft; the adjusting block is positioned between the corrugated pipe body and the corrugated pipe shaft or above the corrugated pipe body;
when the adjusting block is positioned between the corrugated pipe body and the corrugated pipe shaft, the corrugated pipe body comprises a channel for accommodating the adjusting block and the corrugated pipe shaft to pass through, and the adjusting block can move up and down along the channel; the adjusting block is provided with a conical through hole for the corrugated pipe shaft to pass through, the conical through hole corresponds to one conical end of the corrugated pipe shaft, and the adjusting block moves along a channel of the corrugated pipe body so that the conical through hole of the adjusting block is matched with one conical end of the corrugated pipe shaft and is used for adjusting the perpendicularity of the corrugated pipe shaft.
2. The bellows structure of claim 1 wherein the adjustment block is disposed in the bellows body and is adjustable in relative position to the bellows body.
3. The bellows structure of claim 1, wherein when the adjusting block is located above the bellows body, an elastic body is provided between the adjusting block and the bellows body, and a plurality of locking elements respectively pass through the periphery of the adjusting block and are locked on one surface of the bellows body corresponding to the elastic body in an adjustable and elastic manner.
4. A bellows structure according to claim 3, wherein a side of the adjustment block corresponding to the bellows axis forms a convex portion.
5. A bellows structure according to claim 3, wherein the bellows body is recessed into a recess corresponding to the face of the elastic body, the adjustment block and the elastic body being located in the recess.
6. The bellows structure of claim 1 wherein the bellows body is nested without contacting the bellows shaft.
7. A method of adjusting the perpendicularity of a bellows shaft, comprising the steps of:
sleeving a corrugated pipe body on the outer side of the corrugated pipe shaft;
sleeving an adjusting block on the outer side of the corrugated pipe shaft;
the adjusting block is positioned between the corrugated pipe body and the corrugated pipe shaft or above the corrugated pipe body; and
changing the relative position between the adjusting block and the corrugated pipe body so that the adjusting block and the corrugated pipe shaft are propped against each other to change the perpendicularity of the corrugated pipe shaft;
when the adjusting block is positioned between the corrugated pipe body and the corrugated pipe shaft, the method further comprises the following steps:
the corrugated pipe body comprises a channel for accommodating the adjusting block to move up and down;
the conical through hole for accommodating the corrugated pipe shaft of the adjusting block and one conical end of the corrugated pipe shaft, which is close to the adjusting block, are provided with a mutually matched taper; and
when the adjusting block moves downwards along the channel of the corrugated pipe body, the conical through hole of the adjusting block is matched with one conical end of the corrugated pipe shaft, so that the perpendicularity of the corrugated pipe shaft is adjusted.
8. The method of adjusting the perpendicularity of a bellows shaft of claim 7, wherein the adjusting block is located above the bellows body, further comprising the steps of:
an elastic body is arranged between the adjusting block and the corrugated pipe body; passing a plurality of locking elements through the adjustment block and the elastic body respectively; and
and adjusting at least one locking element, and changing the relative position between the adjusting block and the corrugated pipe body by changing the thickness of the elastic body at the corresponding position of the locking element so as to realize the adjustment of the perpendicularity of the adjusting block to the corrugated pipe shaft.
9. A plasma processing apparatus comprising a vacuum reaction chamber, characterized in that: the vacuum reaction chamber comprises a bellows structure according to any one of claims 1-6 for achieving isolation of a vacuum environment from an atmospheric environment.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911327071.1A CN113013010B (en) | 2019-12-20 | 2019-12-20 | Corrugated pipe structure, method for adjusting verticality and plasma processing device thereof |
| TW109139178A TWI827891B (en) | 2019-12-20 | 2020-11-10 | Bellows structure, method for adjusting verticality and plasma treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911327071.1A CN113013010B (en) | 2019-12-20 | 2019-12-20 | Corrugated pipe structure, method for adjusting verticality and plasma processing device thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113013010A CN113013010A (en) | 2021-06-22 |
| CN113013010B true CN113013010B (en) | 2023-09-29 |
Family
ID=76382057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911327071.1A Active CN113013010B (en) | 2019-12-20 | 2019-12-20 | Corrugated pipe structure, method for adjusting verticality and plasma processing device thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113013010B (en) |
| TW (1) | TWI827891B (en) |
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| US6123317A (en) * | 1999-08-09 | 2000-09-26 | Aeroquip Corporation | Coupling |
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| GB2229959A (en) * | 1989-02-14 | 1990-10-10 | Usui Kokusai Sangyo Kk | Method and apparatus for manufacturing a bellows pipe |
| US5772773A (en) * | 1996-05-20 | 1998-06-30 | Applied Materials, Inc. | Co-axial motorized wafer lift |
| JPH10184929A (en) * | 1996-12-25 | 1998-07-14 | Hitachi Electron Eng Co Ltd | Linear motion mechanism |
| US6123317A (en) * | 1999-08-09 | 2000-09-26 | Aeroquip Corporation | Coupling |
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| CN106548970A (en) * | 2015-09-23 | 2017-03-29 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Lowering or hoisting gear and semiconductor processing equipment |
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| CN209447072U (en) * | 2019-03-06 | 2019-09-27 | 国网江苏省电力有限公司靖江市供电分公司 | Computer monitor used in a kind of control room |
| CN110565055A (en) * | 2019-10-28 | 2019-12-13 | 北京泰科诺科技有限公司 | arc striking device for ion plating and ion plating device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202139247A (en) | 2021-10-16 |
| TWI827891B (en) | 2024-01-01 |
| CN113013010A (en) | 2021-06-22 |
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