CN113008798A - Illumination light path, defect detection device and light intensity measurement method - Google Patents
Illumination light path, defect detection device and light intensity measurement method Download PDFInfo
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- CN113008798A CN113008798A CN202110274241.5A CN202110274241A CN113008798A CN 113008798 A CN113008798 A CN 113008798A CN 202110274241 A CN202110274241 A CN 202110274241A CN 113008798 A CN113008798 A CN 113008798A
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- 238000005286 illumination Methods 0.000 title claims abstract description 69
- 230000007547 defect Effects 0.000 title claims abstract description 37
- 238000001514 detection method Methods 0.000 title claims abstract description 37
- 238000000691 measurement method Methods 0.000 title abstract description 10
- 239000000523 sample Substances 0.000 claims abstract description 114
- 230000009471 action Effects 0.000 claims abstract description 16
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- 238000005259 measurement Methods 0.000 abstract description 16
- 238000010586 diagram Methods 0.000 description 8
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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Abstract
The invention provides an illumination light path, a defect detection device and a light intensity measurement method, wherein the illumination light path comprises a light source and an oblique light path, the tail end of the oblique light path is provided with a light intensity measurement device for measuring light intensity, and the light intensity measurement device comprises a probe and a probe bracket; the probe is arranged on the probe bracket, and the probe bracket is positioned at the tail end of the oblique light path; the probe bracket is connected with a driving piece, and the driving piece is used for controlling the steering of the probe bracket; when the defect detection device is in a working state, the probe deviates from the illumination light path under the action of the driving piece; when the light intensity at the tail end of the oblique light path needs to be measured, the light emitted by the light source can reach the probe through the oblique light path under the action of the driving piece. The light intensity measuring device provided by the invention avoids manual light intensity measurement, achieves the purpose of automatic light intensity measurement, reduces the time for stopping the device to measure the light intensity, improves the operation efficiency of the device, and can directly read the detected light intensity outside the device.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to an illumination light path, a defect detection device and a light intensity measurement method.
Background
The method of measuring the laser intensity in the current KTSP 2 model's board is manual measurement, often when measuring, because the laser intensity in the board is generally between 200MW ~ 300MW, the sight can not be directly viewed, and the measuring staff need wear safety glasses, then unpack the light path apron of board apart, at oblique light path terminal department measurement laser intensity.
However, the measurement method in the prior art needs manual measurement, which is time-consuming and labor-consuming, increases workload, increases machine recovery time of the machine, reduces operation efficiency of the device, and is prone to damage to eyes of measurement personnel due to direct laser irradiation.
Therefore, it is necessary to invent a device capable of automatically measuring the light intensity of the laser in the machine at the end of the oblique light path.
Disclosure of Invention
The invention aims to provide an illumination light path, a defect detection device and a light intensity measurement method, and aims to solve the problems that a light path cover plate needs to be disassembled, time and labor are wasted, the measurement efficiency is low, the operation efficiency of equipment is easily influenced, and the eyes of measurement personnel are easily damaged in the manual light intensity measurement method in the prior art.
In order to solve the technical problems, the invention provides an illumination light path, which is applied to a defect detection device, wherein the illumination light path comprises a light source and an oblique light path, the tail end of the oblique light path is provided with a light intensity measuring device for measuring light intensity, and the light intensity measuring device comprises a probe and a probe bracket;
the probe is arranged on the probe bracket, and the probe bracket is positioned at the tail end of the oblique light path;
the probe bracket is connected with a driving piece, and the driving piece is used for controlling the steering of the probe bracket;
when the defect detection device is in a working state, the probe deviates from the illumination light path under the action of the driving piece;
when the light intensity at the tail end of the oblique light path needs to be measured, the light emitted by the light source can reach the probe through the oblique light path under the action of the driving piece.
Optionally, the driving member is connected to an electromagnetic valve, and the electromagnetic valve is used for controlling the working state of the driving member.
Optionally, the light source is a laser emitter.
Optionally, a first clamping groove for mounting the measuring lens is formed in the probe bracket.
Optionally, the probe bracket is provided with a second clamping groove at the edge close to the first clamping groove, the opening of the second clamping groove faces the first clamping groove, and the second clamping groove is used for clamping the edge of the probe.
Optionally, the light intensity measuring device further includes a fixture block detachably connected to the probe holder, and the fixture block is disposed at the position of the opening of the first clamping groove.
Optionally, the light intensity measuring device further comprises a measuring machine body in communication connection with the probe, and a display screen is arranged on the measuring machine body.
The invention also provides a defect detection device which is characterized by comprising the illumination light path.
The present invention also provides a light intensity measuring method of the illumination light path as described above, the light intensity measuring method including:
receiving an instruction for measuring light intensity;
controlling the driving piece to drive the probe bracket to rotate so that the probe is positioned on the illumination light path;
the probe receives the light rays passing through the oblique light path so as to measure the light intensity at the tail end of the oblique light path.
Optionally, the light intensity measuring method further includes: and displaying the measured light intensity at the tail end of the oblique light path.
Compared with the prior art, the illumination light path, the defect detection device and the light intensity measurement method provided by the invention have the following advantages: the illumination light path provided by the invention comprises a light source and an oblique light path, wherein a light intensity measuring device for measuring light intensity is arranged at the tail end of the oblique light path, and the light intensity measuring device comprises a probe and a probe bracket; the probe is arranged on the probe bracket, and the probe bracket is positioned at the tail end of the oblique light path; the probe bracket is connected with a driving piece, and the driving piece is used for controlling the steering of the probe bracket, so that when the defect detection device is in a working state, the probe deviates from the illumination light path under the action of the driving piece, the probe avoids the light emitted by the light source, the light emitted by the light source normally passes through the illumination light path, and the defect detection device is ensured to normally work; when the light intensity at the tail end of the oblique light path needs to be measured, under the action of the driving piece, the light emitted by the light source can reach the probe through the oblique light path, so that the probe can measure the light intensity of the light at the tail end of the oblique light path and transmit the measured light intensity data. According to the illumination light path provided by the invention, the light intensity measuring device is additionally arranged at the tail end of the oblique light path, so that the light intensity at the tail end of the oblique light path is automatically measured under the condition that a light path cover plate of a machine table is not detached, and meanwhile, the detected light intensity can be directly read outside the machine table. In addition, the light intensity measuring device is added in the illumination light path to automatically detect the light intensity, so that the risk during manual measurement can be avoided, the labor cost is reduced, the measuring time can be greatly saved, and the operation efficiency of the device is improved. The defect detection device provided by the invention comprises the illumination light path, so that the defect detection device has the advantages of measuring the light intensity at the tail end of the oblique light path more quickly and accurately, shortening the time of detecting the light intensity and improving the detection efficiency of the defect detection device. The light intensity detection method provided by the invention can be applied to the illumination light path, so that the light intensity of the tail end of the oblique light path in the illumination light path can be more effectively detected by adopting the light intensity detection method.
Drawings
FIG. 1 is a schematic diagram of an illumination path provided in accordance with an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a probe holder according to an embodiment of the present invention;
FIG. 3 is a bottom view of the probe carrier shown in FIG. 2;
FIG. 4 is a schematic structural diagram of a light intensity measuring device according to an embodiment of the present invention when light is irradiated to a probe;
FIG. 5 is a schematic structural diagram of a light intensity measuring apparatus according to an embodiment of the present invention, when a probe is deviated from an illumination light path;
fig. 6 is a schematic flow chart of a light intensity measuring method according to an embodiment of the present invention.
Wherein the reference numbers are as follows:
100-light source, 110-light, 210-oblique light path, 220-direct light path, 230a, 230b, 230 c-lens, 240, 241-reflector, 250-optical path converter, 260a, 260 b-signal receiver, 300-light intensity measuring device, 310-probe bracket, 320-driving piece, 330-first clamping groove, 340-second clamping groove, 350-clamping block, 400-probe, 410-optical sensor and 500-wafer.
Detailed Description
In order to make the objects, advantages and features of the present invention more clear, the illumination light path, the defect detecting device and the light intensity measuring method according to the present invention are further described in detail with reference to fig. 1 to 6. It should be noted that the drawings are simplified in form and not to precise scale, are only used for convenience and clarity to aid in describing the embodiments of the present invention, and are not used for limiting the implementation of the present invention, so that the present invention has no technical significance, and any structural modification, change of proportion relation or adjustment of size should still fall within the scope of the technical content disclosed by the present invention without affecting the function and the achievable purpose of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood as appropriate by those of ordinary skill in the art.
The core idea of the invention is to provide an illumination light path, a defect detection device and a light intensity measurement method, so as to achieve the purpose of automatically measuring the light intensity at the tail end of an oblique light path in a machine table, reduce the time for measuring the light intensity, improve the operation efficiency of the machine table, directly read the detected light intensity on the machine table, and avoid the risk of damaging the eyes of a measurer by laser during manual measurement.
To achieve the above idea, the present invention provides an illumination light path applied in a defect detection apparatus, please refer to fig. 1 to 5, wherein fig. 1 schematically illustrates a schematic diagram of the illumination light path provided by the present invention; FIG. 2 is a schematic structural diagram of a probe holder provided by the present invention;
FIG. 3 schematically illustrates a bottom view of the probe carrier shown in FIG. 2; FIG. 4 is a schematic diagram illustrating the structure of the light intensity measuring device provided by the present invention when light is irradiated to the probe; fig. 5 is a schematic diagram showing the structure of the light intensity measuring device provided by the invention when the probe deviates from the illumination light path. As shown in fig. 1 to 5, the illumination light path includes a light source 100 and an oblique light path 210, a light intensity measuring device 300 for measuring light intensity is disposed at a terminal of the oblique light path 210, and the light intensity measuring device 300 includes a probe 400 and a probe holder 310; the probe 400 is mounted on the probe holder 310, and the probe holder 310 is located at the tail end of the oblique light path 210; the probe holder 310 is connected with a driving member 320, and the driving member 320 is used for controlling the steering of the probe holder 310; when the defect detecting device is in an operating state, the probe 400 deviates from the illumination light path under the action of the driving member 320; when the light intensity at the end of the oblique light path 210 needs to be measured, the light 110 emitted by the light source 100 can reach the probe 400 through the oblique light path 210 under the action of the driving member 320. Therefore, when the defect detection device is in a working state, the probe 400 avoids the light 110 emitted by the light source 100, and ensures that the light 110 emitted by the light source 100 normally passes through the illumination light path, so that the defect detection device can be ensured to normally work; when the light intensity at the end of the oblique light path 210 needs to be measured, the light 110 emitted by the light source 100 can reach the probe 400 through the oblique light path 210, so that the probe 400 can measure the light intensity of the light 110 at the end of the oblique light path 210 and transmit the measured light intensity data. According to the illumination light path provided by the invention, the light intensity measuring device is additionally arranged at the tail end of the oblique light path, so that the light intensity at the tail end of the oblique light path 210 can be automatically measured under the condition that a light path cover plate of a machine table is not detached, and meanwhile, the detected light intensity can be directly read outside the machine table. In addition, the light intensity measuring device is added in the illumination light path to automatically detect the light intensity, so that the risk of manual measurement can be avoided, the labor cost is reduced, the measuring time can be greatly saved, and the operation efficiency of the device is improved.
Specifically, the probe 400 is provided with a light sensor 410, and when the light intensity at the end of the oblique light path 210 needs to be measured, under the action of the driving member 320, the light 110 emitted by the light source 100 can reach the light sensor 410 on the probe 400 through the oblique light path 210.
Preferably, as shown in fig. 1, the illumination light path further includes a lens 230, a reflective mirror 240, a light path converter 250, a signal receiver 260 and a direct light path 220, the oblique light path 210 includes a lens 230a, a lens 230b and a lens 230c which are sequentially arranged, the light 110 emitted by the light source 100 reaches the light path converter 250 through the lens 230 and the reflective mirror 240, the light 110 emitted by the light source 100 is divided into two light rays 100 by the light path converter 250, the two light rays 100 respectively enter the direct light path 220 and the oblique light path 210, and the light entering the oblique light path 210 sequentially passes through the lens 230a, the lens 230b and the lens 230c and reaches the end of the oblique light path 210. When the defect on the surface of the wafer 500 needs to be detected, the light 110 passing through the oblique light path 210 can be irradiated onto the wafer 500 to form a first reflected light, and the first reflected light is received by the signal receiver 260a correspondingly arranged thereon; the light passing through the direct light path 220 can also be irradiated onto the wafer 500 to form a second reflected light, and the second reflected light is received by the signal receiver 260b correspondingly disposed thereon; information such as the size, the number, and the position of the particles on the surface of the wafer 500, which are conveyed by the first reflected light and the second reflected light, can be obtained through the signal receivers 260a and 260 b. In addition, the reflector 241 can adjust the angle of the light 110 irradiating the wafer 500 during the transmission of the light 110.
As shown in fig. 1, the probe holder 310 is installed at the end of the oblique light path 210, and when the light intensity at the end of the oblique light path 210 needs to be measured, the light 110 emitted by the light source 100 passes through the lens 230a, the lens 230b and the lens 230c in sequence, and finally reaches the light intensity measuring device 300, so that the light intensity at the end of the oblique light path is measured by the light intensity measuring device 300.
Preferably, the driving member 320 is connected to a solenoid valve, and the solenoid valve is used for controlling the working state of the driving member 320. Therefore, the electromagnetic valve can control the driving element 320 to rotate to a certain direction when the defect detection device is in a working state, so that the probe 400 deviates from the illumination light path, and can control the driving element 320 to rotate to another direction when the light intensity of the tail end of the oblique light path 210 needs to be measured, so that the probe 400 rotates into the illumination light path, so that the light 110 emitted by the light source 100 can reach the probe 400, and the light intensity of the light 110 at the tail end position of the oblique light path 210 can be measured by the probe 400.
Preferably, the electromagnetic valve is a pneumatic electromagnetic valve, and the electromagnetic valve pushes the driving member 320 to control the probe holder 310 to rotate in a compressed gas manner.
Preferably, the light source 100 is a laser emitter. Since the laser light 110 is more concentrated and the transmission loss of the laser light is lower, the wafer 500 can be detected more effectively by using the laser emitter as the light source 100.
Preferably, as shown in fig. 2, a first slot 330 for mounting the measuring lens is provided on the probe holder 310. Therefore, the probe 400 can be detachably mounted in the first card slot 330 through the first card slot 330, and meanwhile, the light sensor 410 of the probe 400 can be effectively exposed through the first card slot 330, so that the light 110 emitted by the light source 100 can irradiate the light sensor 410 on the probe 400, thereby being more beneficial to measuring the light intensity.
Preferably, as shown in fig. 2 and fig. 3, second card slots 340 are provided at edges of the probe holder 310 close to the first card slot 330, openings of the second card slots 340 face the first card slot 330, and the second card slots 340 are used for the edges of the probe 400 to be snapped in. Therefore, the probe 400 can be mounted on the probe bracket 310 in an edge-embedded manner through the second clamping groove 340, and the probe 400 is more convenient to detach and mount.
Preferably, as shown in fig. 4 and 5, the light intensity measuring device 300 further includes a latch 350 detachably connected to the probe holder 310, and the latch 350 is disposed at the opening of the first latch 330. Therefore, the probe 400 can be effectively prevented from falling off the probe holder 310 by the latch 350. It should be noted that the latch 350 and the probe holder 310 may be connected by a snap connection, a welding or an adhesion.
Preferably, the light intensity measuring device 300 further comprises a measuring body in communication connection with the probe 400, and a display screen is arranged on the measuring body. From this, through the display screen can show the light intensity numerical value that probe 400 detected, the operating personnel of being convenient for carry out the reading, in addition, can with measure the fuselage and place outside the board to avoided opening the light path apron on the board and measured and the reading, saved the time effectively, improved measurement of efficiency.
In order to achieve the above idea, the present invention further provides a defect detecting apparatus, which includes the above-mentioned illumination light path. The defect detection device provided by the invention comprises the illumination light path, so that illumination can be provided for the machine table through the illumination light path, and the size, the position and the number of particles on the surface of the wafer can be detected through the illumination light path, so that the defect detection device is more beneficial to detecting the surface defects of the wafer; the light intensity measuring device in the illumination light path can effectively measure the light intensity at the tail end of the oblique light path in the illumination light path automatically under the condition that a light path cover plate of a machine table is not detached, and meanwhile, the light intensity measured can be directly read outside the machine table. In addition, the light intensity is detected by the light intensity measuring device in the illumination light path, so that the normal working state of the defect detecting device is not influenced, the risk and the cost of manual measurement can be reduced, the measuring time is greatly saved, and the operating efficiency of equipment is improved.
To achieve the above idea, the present invention further provides a method for measuring light intensity of an illumination light path as described above, please refer to fig. 6, which schematically shows a flow chart of the method for measuring light intensity provided by the present invention. As shown in fig. 6, the light intensity measuring method includes:
step S1, receiving an instruction of measuring light intensity;
step S2, controlling the driving piece to drive the probe bracket to rotate so that the probe is positioned on the illumination light path;
and step S3, the probe receives the light rays passing through the oblique light path so as to measure the light intensity at the tail end of the oblique light path.
Therefore, by adopting the light intensity measuring method comprising the steps, the light intensity at the tail end of the oblique light path can be more effectively measured through the probe.
Preferably, the light intensity measuring method further includes: and displaying the measured light intensity at the tail end of the oblique light path. Therefore, the measured light intensity at the tail end of the oblique light path is displayed in a numerical value mode, so that the reading and the light intensity emitted by the light source can be conveniently adjusted, and the light intensity at the tail end of the oblique light path can be effectively ensured to meet the standard.
In summary, compared with the prior art, the illumination light path, the defect detection device and the light intensity measurement method provided by the invention have the following advantages:
the illumination light path provided by the invention comprises a light source and an oblique light path, wherein a light intensity measuring device for measuring light intensity is arranged at the tail end of the oblique light path, and the light intensity measuring device comprises a probe and a probe bracket; the probe is arranged on the probe bracket, and the probe bracket is positioned at the tail end of the oblique light path; the probe bracket is connected with a driving piece, and the driving piece is used for controlling the steering of the probe bracket, so that when the defect detection device is in a working state, the probe deviates from the illumination light path under the action of the driving piece, the probe avoids the light emitted by the light source, the light emitted by the light source normally passes through the illumination light path, and the defect detection device is ensured to normally work; when the light intensity at the tail end of the oblique light path needs to be measured, under the action of the driving piece, the light emitted by the light source can reach the probe through the oblique light path, so that the probe can measure the light intensity of the light at the tail end of the oblique light path and transmit the measured light intensity data. According to the illumination light path provided by the invention, the light intensity measuring device is additionally arranged at the tail end of the oblique light path, so that the light intensity at the tail end of the oblique light path is automatically measured under the condition that a light path cover plate of a machine table is not detached, and meanwhile, the detected light intensity can be directly read outside the machine table. In addition, the light intensity measuring device is added in the illumination light path to automatically detect the light intensity, so that the risk during manual measurement can be avoided, the labor cost is reduced, the measuring time can be greatly saved, and the operation efficiency of the device is improved. The defect detection device provided by the invention comprises the illumination light path, so that the defect detection device has the advantages of measuring the light intensity at the tail end of the oblique light path more quickly and accurately, shortening the time of detecting the light intensity and improving the detection efficiency of the defect detection device. The light intensity detection method provided by the invention can be applied to the illumination light path, so that the light intensity of the tail end of the oblique light path in the illumination light path can be more effectively detected by adopting the light intensity detection method.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. An illumination light path is applied to a defect detection device and is characterized in that the illumination light path comprises a light source and an oblique light path, a light intensity measuring device for measuring light intensity is arranged at the tail end of the oblique light path, and the light intensity measuring device comprises a probe and a probe bracket;
the probe is arranged on the probe bracket, and the probe bracket is positioned at the tail end of the oblique light path;
the probe bracket is connected with a driving piece, and the driving piece is used for controlling the steering of the probe bracket;
when the defect detection device is in a working state, the probe deviates from the illumination light path under the action of the driving piece;
when the light intensity at the tail end of the oblique light path needs to be measured, the light emitted by the light source can reach the probe through the oblique light path under the action of the driving piece.
2. The illumination circuit of claim 1, wherein the driving member is connected to a solenoid valve, and the solenoid valve is used for controlling the operating state of the driving member.
3. The illumination circuit of claim 1, wherein the light source is a laser emitter.
4. The illumination light path according to claim 1, wherein a first clamping groove for mounting the measuring lens is formed on the probe bracket.
5. The illumination light path according to claim 4, wherein the probe bracket is provided with second clamping grooves at edges close to the first clamping grooves, the second clamping grooves are opened towards the first clamping grooves, and the second clamping grooves are used for clamping the edges of the probes.
6. The illumination light path according to claim 4, wherein the light intensity measuring device further comprises a fixture block detachably connected to the probe holder, and the fixture block is disposed at the position of the opening of the first fixture groove.
7. The illumination light path of claim 1, wherein the light intensity measuring device further comprises a measuring body in communication with the probe, and a display screen is disposed on the measuring body.
8. A defect detection apparatus comprising an illumination path according to any one of claims 1 to 7.
9. A light intensity measuring method of an illumination light path according to any one of claims 1 to 7, characterized by comprising:
receiving an instruction for measuring light intensity;
controlling the driving piece to drive the probe bracket to rotate so that the probe is positioned on the illumination light path;
the probe receives the light rays passing through the oblique light path so as to measure the light intensity at the tail end of the oblique light path.
10. The method for measuring light intensity of an illumination light path according to claim 9, further comprising:
and displaying the measured light intensity at the tail end of the oblique light path.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116296292A (en) * | 2023-03-23 | 2023-06-23 | 合肥全色光显科技有限公司 | Detection system of large-area illumination light source and product |
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