CN108106999A - Optic path reversing arrangement and optical performance parameter detecting system - Google Patents
Optic path reversing arrangement and optical performance parameter detecting system Download PDFInfo
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- CN108106999A CN108106999A CN201810053988.6A CN201810053988A CN108106999A CN 108106999 A CN108106999 A CN 108106999A CN 201810053988 A CN201810053988 A CN 201810053988A CN 108106999 A CN108106999 A CN 108106999A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 67
- 230000007246 mechanism Effects 0.000 claims abstract description 9
- 238000007789 sealing Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 5
- 239000000837 restrainer Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 101000911390 Homo sapiens Coagulation factor VIII Proteins 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000023077 detection of light stimulus Effects 0.000 description 1
- 102000057593 human F8 Human genes 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229940047431 recombinate Drugs 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/015—Apparatus with interchangeable optical heads or interchangeable block of optics and detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/066—Modifiable path; multiple paths in one sample
- G01N2201/0666—Selectable paths; insertable multiple sources
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Microscoopes, Condenser (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The present invention provides a kind of optic path reversing arrangements, including input light cylinder, commutate cylinder, optical bracket, first output light cylinder, second output light cylinder, top plate and bottom plate, the commutation cylinder is the hollow cylinder in part, the commutation cylinder is fixedly mounted on the bottom plate, the optical bracket is mounted on the inside of the commutation cylinder, the speculum is fixedly mounted on the optical bracket, it is described commutation cylinder around be equipped with respectively with the input light cylinder, multiple side plates that the first output light cylinder and the second output light cylinder are connected, the mounting of roof plate is at the top of the commutation cylinder, the top plate is equipped with the turntable that can rotate the commutation cylinder, position-limit mechanism is additionally provided on the top plate, and the optical bracket can be limited in first state or the second state different from the first state by the position-limit mechanism.The present invention also provides a kind of optical performance parameter detecting systems for including above-mentioned optic path reversing arrangement.
Description
Technical field
The present invention relates to laser technology fields, are examined more particularly to a kind of optic path reversing arrangement and optical performance parameter
Examining system.
Background technology
Litho machine is mainly made of critical pieces such as projection objective, lighting system, mask platform, work stage, light sources, projection
Litho machine optical source wavelength is covered very extensively, including ultraviolet g lines, i lines, far ultraviolet, deep UV, extreme ultraviolet etc., existing market
Above most widely used is 193nm (ArF) projection optics litho machine.Light source module therein is typically independently to be separated with complete machine
, can independent self-organizing system, from light source to photoetching machine host be typically via certain path transmission light path connect.To avoid
Laser reacts in transmission process with air, it will usually and entire transmission path is done into Seal treatment, and is passed through nitrogen,
Micro-positive pressure is kept in closed path so that air cannot enter light path part, play the role of isolation laser and air.Light path passes
Defeated device is mainly made of refractive power point and pipeline, and the reflective mirror that refractive power point usually inside is one 45 ° can turn light conduction orientation
90 ° of folding, pipeline mainly close laser beam propagation path.Dioptric element is equipped with sealing element with pipeline junction, prevents nitrogen
Leakage, while keep micro-positive pressure in closed light path.
Equally, in the fields such as the detection of conventional optical performance parameter and the detection of light source performance parameter, laser light source
Also all it is indispensable component, at present, laser has formed independent product, will not all be integrated in many cases with complete machine
Together, but discrete installation, so inevitably use optical path transmission device.Laser is to litho machine under normal conditions
Or the transmission light path of optical detection apparatus can all make fixed special light path, i.e. and a laser supplies a photoetching or detection
Equipment uses, but when a laser needs to be used alternatingly for two equipment, since these equipment volume quality are very big, no
Just carry, just need a kind of light path reversing arrangement at this time, it can be according on use demand switched laser to different equipment.It is this
Application scenario is generally not on semiconductor factory's production line, but is present in equipment research and development and optical detection, herein
Kind application scenario, establishes special light path of the laser to a photoetching or experimental facilities, will use a laser more,
Thus the resources such as some spaces and source of the gas, the energy can also be used more, increase cost.
The content of the invention
The purpose of the present invention is at least solving one of drawbacks described above and deficiency, which is to be achieved through the following technical solutions
's.
The present invention provides a kind of optic path reversing arrangement, including input light cylinder, commutation cylinder, optical bracket, first defeated
Light extraction tube, the second output light cylinder, top plate and bottom plate, the commutation cylinder are the hollow cylinder in part, and the commutation cylinder fixes peace
On the bottom plate, the optical bracket is mounted on the inside of the commutation cylinder, and the speculum is fixedly mounted on the light
Learn stent on, it is described commutation cylinder around be equipped with respectively with the input light cylinder, the first output light cylinder and described second
Multiple side plates that output light cylinder is connected, the mounting of roof plate it is described commutation cylinder top, the top plate be equipped with can make
The turntable that cylinder rotates that commutates, is additionally provided with position-limit mechanism, also, the position-limit mechanism can be by the optics on the top plate
Stent is limited in first state or the second state different from the first state, in first shape of the optical bracket
State, light are exported via the first output light cylinder, and in second state of the optical bracket, light is via described second
Output light cylinder exports.
Further, the central axis of the central axis of the first output light cylinder and the second output light cylinder overlaps,
The central axis of the input light cylinder and the central axis of the first output light cylinder and the central shaft of the second output light cylinder
Line is vertical.
Further, the multiple side plate includes the input side plate being connected with the input light cylinder, is exported with described first
First side plate of light cylinder connection and the second side plate being connected with the second output light cylinder, first side plate and described second
Side plate is symmetrically mounted at the both sides of the input side plate, and the commutation cylinder is surrounded closing by the multiple side plate.
Further, the optical bracket is vertical with the bottom plate, and the speculum is fixed on the optics by pressure ring
On stent.
Further, the optical bracket is fixedly connected with the commutation cylinder by tension spring.
Further, the optical bracket is equipped with adjusting screw rod, for being adjusted to the optical bracket.
Further, the position-limit mechanism includes the first spring catch and second spring pin, and first spring catch enters institute
The optical bracket is limited in the first state when stating the pin hole of commutation cylinder, the second spring pin enters the commutation cylinder
The pin hole when optical bracket is limited in second state.
Further, the turntable is fixedly connected by bolt with the commutation cylinder.
Further, the edge of the commutation cylinder is equipped with sealing strip.
The present invention also provides a kind of optical performance parameter detecting system, the optical performance parameter detecting system includes swashing
Light device light source and above-mentioned optic path reversing arrangement, the optic path reversing arrangement can will be inputted from the input light cylinder
The light of the laser light source is switched to different optics via the first output light cylinder or the second output light cylinder and examines
Measurement equipment.
Advantages of the present invention is as follows：
(1) present invention is without needing to change and dismantle parts, you can between the equipment light path of laser is used alternatingly in Liang Tai into
Row is switched fast, and realizes that a light source is mostly used.
(2) handoff procedure of the invention will not introduce outside air and impurity, can remain the guarantor in closed light path
The pressure of gas is protected, pressure maintaining performance is good.
(3) present invention can save the energy, source of the gas, space etc. and consume and improve utilization rate of equipment and installations.
Description of the drawings
By reading the detailed description of hereafter preferred embodiment, it is various other the advantages of and benefit it is common for this field
Technical staff will be apparent understanding.Attached drawing is only used for showing the purpose of preferred embodiment, and is not considered as to the present invention
Limitation.And throughout the drawings, the same reference numbers will be used to refer to the same parts.
Fig. 1 is the structure diagram of optic path reversing arrangement provided in an embodiment of the present invention.
Fig. 2 is the schematic internal view of optic path reversing arrangement provided in an embodiment of the present invention.
Fig. 3 is the structure diagram removed after part of optic path reversing arrangement provided in an embodiment of the present invention.
Fig. 4 is the other direction structure diagram of optic path reversing arrangement provided in an embodiment of the present invention.
Fig. 5 is the other direction structure diagram of optic path reversing arrangement provided in an embodiment of the present invention.
Fig. 6 is the sectional view of optic path reversing arrangement provided in an embodiment of the present invention.
Reference numeral is as follows in figure：
1- commutation cylinder 2- optical brackets
3- speculum 4- input light cylinders
5- the first output light cylinder 6- the first output light cylinders
7- top plate 8- bottom plates
10- tension spring 11- sealing strips
12- tension springs hole 21- adjusting screw rods
22- tension springs hole 71- turntables
72- bolts the first spring catch of 731-
732- second spring pin the first spring buttons of 741-
742- second spring button 81- mounting holes
91- input side plates 92- first exports side plate
93- second exports side plate
Specific embodiment
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although this public affairs is shown in attached drawing
The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here
The mode of applying is limited.It is to be able to be best understood from the disclosure on the contrary, providing these embodiments, and can be by this public affairs
The scope opened completely is communicated to those skilled in the art.
Fig. 1 to Fig. 6 shows the structure diagram of the optic path reversing arrangement provided according to the embodiment of the present invention.
As shown in Figures 1 to 6, the present apparatus includes input light cylinder 4, commutation cylinder 1, optical bracket 2, the first output light cylinder 5, the second output light
Cylinder 6, top plate 7 and bottom plate 8, the optic path passage in the present apparatus is closing, is filled with inert gas or dry air.
Commutation cylinder 1 is cylindrical rotatable hollow structure, is fixedly mounted on bottom plate 8, is internally provided with optical branch
Frame 2, optical bracket 2 are vertically mounted on bottom plate 8, and speculum 3 is installed on optical bracket 2, and speculum 3 passes through pressure ring
It is fixed on optical bracket 2.Speculum 3 is plane mirror or curved reflector.
Optical bracket 2 is set there are three extension spring hole 22, and corresponding three extension spring holes are provided on the cylinder 1 that commutates
12, optical bracket 2 is fixed by the inner surface of 3 tension springs 10 and the cylinder 1 that commutates.As shown in fig. 6, optical bracket 2 is close to
In the one side that commutation 1 inner surface of cylinder is more flat, and there is certain distance with inner surface, connected the two by tension spring 10.
As shown in Figures 3 and 5, be additionally provided with adjusting screw rod 21 on optical bracket 2, for the pitching of optical bracket 2, swing,
Distance is adjusted, and so as to be finely adjusted to reflected light path, adjusting screw rod 21 connects through the hole on commutation cylinder 1 with optical bracket 2
It connects.In the present embodiment, 21 quantity of adjusting screw rod set on optical bracket 2 is 3.
In specific implementation, the quantity of tension spring 10 and the quantity of adjusting screw rod 21 can be set according to actual conditions, the present invention
It does not limit specifically.
Laser beam is injected in input light cylinder 4, and incident ray is after the reflection of speculum 3, by the first output light cylinder 5 or the second
Output light cylinder 6 is emitted.First output light cylinder 5 and the second output light cylinder 6 are set compared with input light cylinder 4 in mirror symmetry, and first
The central axis of the central axis of output light cylinder 5 and the second output light cylinder 6 overlaps, the central axis of input light cylinder 4 and first defeated
The central axis upright of 5 and second output light cylinder 6 of light extraction tube, 4 and first output light cylinder 5 of input light cylinder and the second output light cylinder 6
Form T shape.The agent structure of the present apparatus is symmetrical arranged, improves the convenience of processing, symmetric component structure is identical, centainly
Degree improves the interchangeability of component.
As shown in figs. 1 and 4, it is equipped with around commutation cylinder 1 defeated with input light cylinder 4, the first output light cylinder 5 and second respectively
Multiple side plates that light extraction tube 6 is connected, the multiple side plate include the input side plate 91 being connected with input light cylinder 4, with it is first defeated
The first side plate 92 and the second side plate 93 being connected with the second output light cylinder 6, the first side plate 92 and the second side that light extraction tube 5 connects
Plate 93 is symmetrically mounted at the both sides of input side plate 91, and a circle sealing strip 11 is pasted at the edge of commutation 1 hollow structure inside of cylinder
The sealing being closed is formed with the side plate of periphery so that input light cylinder 4, the first output light cylinder 5 and the second output light cylinder 6 and commutation
1 sealing of cylinder is connected, and outside air and impurity will not be introduced because of light path converting, remains the micro-positive pressure in closed light path.
The top of commutation cylinder 1 is provided with top plate 7, and top plate 7 is equipped with turntable 71, and turntable 71 passes through bolt 72 and commutation cylinder 1
Connection drives commutation cylinder 1 to rotate, while optical bracket 2 is driven to rotate when turntable 71 rotates, realize light path commutation.
Be additionally provided with position-limit mechanism on top plate 7, position-limit mechanism is spring catch in the present embodiment, be connected on spring catch spring by
Button, spring button can pull up the height of control spring catch, for determining the rotation position of optical bracket 2 and angle, change simultaneously
It is equipped with and the matched pin hole of spring catch to the upper surface of cylinder 1.Spring catch is equipped with 2, is respectively the first spring catch 731 and second
Spring catch 732 so that optical bracket 2 is exactly in first state or the second state.Correspondingly, the first spring catch 731 and first
Spring button 741 coordinates, and second spring pin 732 and second spring button 742 coordinate.
When optical bracket 2 is in first state, the first spring catch 731 is fairly fallen in the pin hole of 1 upper surface of commutation cylinder,
At this point, speculum 3 is towards the first output light cylinder 5, the minute surface direction of speculum 3 compared with the first output light cylinder 5 central axis
At 45 ° or 135 ° of angles, light are exported via the first output light cylinder 5；When optical bracket 2 is in the second state, second spring
Pin 732 is fairly fallen in the pin hole of commutation cylinder 1 upper surface, at this point, mirror surface is to the second output light cylinder 6, the minute surface of speculum 3
Direction is at 45 ° or 135 ° of angles, light are exported via the second output light cylinder 6 compared with the central axis of the second output light cylinder 6.
Optical bracket 2 can be positioned and locked by spring catch, the stability of optical bracket 2, structure can be enhanced
Simple and stable, simple installation ensure switching direction precision.
In addition, being equipped with bolt hole around top plate 7, top plate 7 passes through bolt and input side plate 91, the first side plate 92 and the
Two side plates 93 are fixedly connected, and commutation cylinder 1 is closed.
Bottom plate 8 is one piece of rectangular slab, and corner is equipped with mounting hole 81, for the present apparatus to be fixed.In other embodiment, bottom plate
8 can be circle, triangle etc..
The place that all of above contact is related to gas leakage is designed with sealing element, is effectively isolated laser and air, begins
The pressure of the protective gas in closed light path is kept eventually, to ensure air-tightness.
The course of work of this optic path reversing arrangement is as follows：
Laser beam is injected in input light cylinder 4, and light can be exported along the first output light path or the second output light path.Work as reflection
Mirror 3 is towards the direction of the first output light cylinder 5, and the minute surface direction of speculum 3 is compared with the central axis of the first output light cylinder 5
During at 45 ° or 135 ° of angles, the first spring catch 731 is fairly fallen in the pin hole of commutation cylinder 1 upper surface, at this point, light is along first
Output light path exports, as illustrated by the arrows in fig. 1.When needing the first output light path of optical routing being switched to the second output light path
When, the first spring button 741 is pulled up, while the first spring catch 731 is driven to move up, at this time without any between top plate 7 and commutation cylinder 1
Barrier structure can rotate commutation cylinder 1 by rotary turnplate 71, while the speculum 3 on the optical bracket 2 also can be with
It is rotated with commutation cylinder 1, until second spring pin 732 is fallen into the pin hole of 1 upper surface of commutation cylinder, at this point, speculum 3 towards second
The direction of output light cylinder 6, output light path commutate to the second output light path, and second spring pin 732 is being changed due to elastic force automatic impaction
In the pin hole of cylinder 1.To ensure that handoff angle is accurate, rotatable adjusting screw rod 21 is finely adjusted optical bracket 2.
Similarly, light path is switched to the first output light cylinder 5 from the second output light cylinder 6, it is only necessary to reverse operating pull-up second
Spring button 742 simultaneously rotates turntable 71, and details are not described herein.
The present apparatus switches emergent light by the reflecting optics inside the operation adjustment of pull-up spring catch and rotation turntable 71
Direction without needing to change and dismantling parts, need not recombinate light path, and the fast and easy commutation for solving light beam in optic path is asked
Topic.All tangent or parts that connect all are designed with sealing element, and entire handoff procedure will not draw because closed light path is dismantled
Enter outside air and impurity, solve the leakage of gas, keep micro-positive pressure inside transmission light path, so as to be effectively isolated laser with
Air, pressure maintaining performance is good, less to Clean- consumption of air source in addition.
A kind of optic path reversing arrangement provided by the invention can Liang Tai be used alternatingly laser equipment light path
Between fast switched, change the situation that is used only for an equipment of a laser, one can be realized by light path switching
Light source is mostly used.Especially suitable two equipment need not use the application scenario of light source simultaneously, reduce by a laser light source, thus
Also the consumption such as the energy brought therefrom, source of the gas can be saved, while also correspondingly save space, improve the utilization of equipment
Rate.
The present invention also provides a kind of optical performance parameter detecting system, the optical performance parameter detecting system includes swashing
Light device light source and the optic path reversing arrangement, the institute that the optic path reversing arrangement can will be inputted from the input light cylinder
The light for stating laser light source is switched to different optical detections via the first output light cylinder or the second output light cylinder
Equipment.
It is pointed out that in the description of the present invention, term " first ", " second " are only used for an entity or behaviour
Make with another entity or operate distinguish, without necessarily requiring or implying between these entities or operation there are it is any this
Kind actual relation or order.
It is pointed out that in the description of the present invention, term " installation ", " connected ", " connection " should be interpreted broadly, example
Such as, it can be connection inside mechanical connection or electrical connection or two elements, can be directly connected, can also lead to
It crosses intermediary to be indirectly connected, for the ordinary skill in the art, can understand above-mentioned term as the case may be
Concrete meaning.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, the change or replacement that can be readily occurred in,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of the claim
Subject to enclosing.
Claims (10)
1. a kind of optic path reversing arrangement, which is characterized in that including input light cylinder, commutation cylinder, optical bracket, the first output light
Cylinder, the second output light cylinder, top plate and bottom plate, the commutation cylinder are the hollow cylinder in part, and the commutation cylinder is fixedly mounted on
On the bottom plate, the optical bracket is mounted on the inside of the commutation cylinder, and the speculum is fixedly mounted on the optical branch
On frame, it is equipped with around the commutation cylinder and is exported respectively with the input light cylinder, the first output light cylinder and described second
Multiple side plates that light cylinder is connected, the mounting of roof plate at the top of the commutation cylinder, the top plate be equipped with can make it is described
Commutate the turntable that cylinder rotates, and is additionally provided with position-limit mechanism on the top plate, also, the position-limit mechanism can be by the optical bracket
First state or the second state different from the first state are limited in, in the first state of the optical bracket, light
Line is exported via the first output light cylinder, and in second state of the optical bracket, light is via the described second output
Light cylinder exports.
2. optic path reversing arrangement according to claim 1, which is characterized in that the central shaft of the first output light cylinder
The central axis of line and the second output light cylinder overlaps, central axis and the first output light cylinder of the input light cylinder
The central axis upright of central axis and the second output light cylinder.
3. optic path reversing arrangement according to claim 1, which is characterized in that the multiple side plate include with it is described defeated
The input side plate for entering the connection of light cylinder, the first side plate for being connected with the first output light cylinder and with the second output light cylinder company
The second side plate connect, first side plate is symmetrically mounted at the both sides of the input side plate with second side plate, described more
The commutation cylinder is surrounded closing by a side plate.
4. optic path reversing arrangement according to claim 1, which is characterized in that the optical bracket hangs down with the bottom plate
Directly, the speculum is fixed on by pressure ring on the optical bracket.
5. optic path reversing arrangement according to claim 1, which is characterized in that the optical bracket and the commutation cylinder
It is fixedly connected by tension spring.
6. optic path reversing arrangement according to claim 4, which is characterized in that the optical bracket, which is equipped with, adjusts spiral shell
Bar, for being adjusted to the optical bracket.
7. the optic path reversing arrangement according to any one of claim 1 to 6, which is characterized in that the position restrainer
Structure includes the first spring catch and second spring pin, first spring catch into the commutation cylinder pin hole when by the optical branch
Frame is limited in the first state, and the second spring pin limits the optical bracket when entering the pin hole of the commutation cylinder
Positioned at second state.
8. the optic path reversing arrangement according to any one of claim 1 to 6, which is characterized in that the turntable leads to
Bolt is crossed to be fixedly connected with the commutation cylinder.
9. the optic path reversing arrangement according to any one of claim 1 to 6, which is characterized in that the commutation cylinder
Edge be equipped with sealing strip.
10. a kind of optical performance parameter detecting system, which is characterized in that the optical performance parameter detecting system includes laser
Light source and the optic path reversing arrangement according to any one of claim 1 to 9, the optic path reversing arrangement energy
The light of enough laser light sources that will be inputted from the input light cylinder is via the first output light cylinder or described second defeated
Light extraction tube is switched to different optical detection apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810053988.6A CN108106999B (en) | 2018-01-19 | 2018-01-19 | Light path transmission reversing device and optical performance parameter detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810053988.6A CN108106999B (en) | 2018-01-19 | 2018-01-19 | Light path transmission reversing device and optical performance parameter detection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108106999A true CN108106999A (en) | 2018-06-01 |
| CN108106999B CN108106999B (en) | 2023-11-17 |
Family
ID=62220201
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810053988.6A Active CN108106999B (en) | 2018-01-19 | 2018-01-19 | Light path transmission reversing device and optical performance parameter detection system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077108A (en) * | 2019-12-31 | 2020-04-28 | 中国科学院地质与地球物理研究所 | Laser sample room suitable for deep space detection |
| CN113008798A (en) * | 2021-03-15 | 2021-06-22 | 上海华力微电子有限公司 | Illumination light path, defect detection device and light intensity measurement method |
| CN114709701A (en) * | 2022-04-11 | 2022-07-05 | 苏州新镭激光科技有限公司 | High-power optical fiber laser |
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