CN112953441A - 谐振器和谐振器的制造方法 - Google Patents
谐振器和谐振器的制造方法 Download PDFInfo
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- CN112953441A CN112953441A CN202110181106.6A CN202110181106A CN112953441A CN 112953441 A CN112953441 A CN 112953441A CN 202110181106 A CN202110181106 A CN 202110181106A CN 112953441 A CN112953441 A CN 112953441A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052682 stishovite Inorganic materials 0.000 claims description 7
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- 229920000334 poly[3-(3'-N,N,N-triethylamino-1-propyloxy)-4-methylthiophene-2,5-diyl hydrochloride] polymer Polymers 0.000 claims 6
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- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical group [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
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- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202110181106.6A CN112953441B (zh) | 2021-02-09 | 2021-02-09 | 谐振器和谐振器的制造方法 |
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CN202110181106.6A CN112953441B (zh) | 2021-02-09 | 2021-02-09 | 谐振器和谐振器的制造方法 |
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CN112953441A true CN112953441A (zh) | 2021-06-11 |
CN112953441B CN112953441B (zh) | 2023-10-24 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002141768A (ja) * | 2000-11-02 | 2002-05-17 | Alps Electric Co Ltd | 表面弾性波素子 |
CN1647923A (zh) * | 2004-01-26 | 2005-08-03 | 精工爱普生株式会社 | 压电元件、压电致动器、喷墨式记录头及喷墨打印机 |
JP2009201101A (ja) * | 2008-01-21 | 2009-09-03 | Panasonic Electric Works Co Ltd | Baw共振装置およびその製造方法 |
CN105119585A (zh) * | 2010-06-17 | 2015-12-02 | 天工松下滤波方案日本有限公司 | 弹性波元件 |
CN111262543A (zh) * | 2020-04-01 | 2020-06-09 | 河源市众拓光电科技有限公司 | 一种钪掺杂氮化铝兰姆波谐振器与制备方法 |
-
2021
- 2021-02-09 CN CN202110181106.6A patent/CN112953441B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002141768A (ja) * | 2000-11-02 | 2002-05-17 | Alps Electric Co Ltd | 表面弾性波素子 |
CN1647923A (zh) * | 2004-01-26 | 2005-08-03 | 精工爱普生株式会社 | 压电元件、压电致动器、喷墨式记录头及喷墨打印机 |
JP2009201101A (ja) * | 2008-01-21 | 2009-09-03 | Panasonic Electric Works Co Ltd | Baw共振装置およびその製造方法 |
CN105119585A (zh) * | 2010-06-17 | 2015-12-02 | 天工松下滤波方案日本有限公司 | 弹性波元件 |
CN111262543A (zh) * | 2020-04-01 | 2020-06-09 | 河源市众拓光电科技有限公司 | 一种钪掺杂氮化铝兰姆波谐振器与制备方法 |
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CN112953441B (zh) | 2023-10-24 |
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Address after: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangna Technology Development Co.,Ltd. Address before: 510700 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong guangnaixin Technology Co.,Ltd. |
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Effective date of registration: 20210816 Address after: 510535 Room 201, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangdong Guangdong Hong Kong Macao Dawan District National Nanotechnology Innovation Research Institute Address before: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong Guangna Technology Development Co.,Ltd. |
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