CN112952392A - Terahertz digital programmable super surface for liquid crystal regulation and control - Google Patents

Terahertz digital programmable super surface for liquid crystal regulation and control Download PDF

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CN112952392A
CN112952392A CN202110101743.8A CN202110101743A CN112952392A CN 112952392 A CN112952392 A CN 112952392A CN 202110101743 A CN202110101743 A CN 202110101743A CN 112952392 A CN112952392 A CN 112952392A
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liquid crystal
super surface
metal
terahertz
super
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CN112952392B (en
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傅晓建
崔铁军
石磊
武军伟
杨非
刘晨曦
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Southeast University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/002Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0086Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials

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Abstract

The invention relates to a terahertz digital programmable super surface controlled by liquid crystal, which mainly comprises a medium substrate, a metal super surface unit structure, a nematic phase liquid crystal layer, a polymer film orientation layer and a metal back plate, wherein the designed working frequency is in a terahertz region. The medium substrate is flexible ultrathin glass, and the metal super-surface unit structure is a complementary open-loop resonant ring structure. The liquid crystal micro-groove is made of SU-8, so that liquid crystal can be effectively isolated, and bias voltage can be loaded column by column. The structure is based on a novel artificial electromagnetic material, and the dielectric constant of the liquid crystal layer can be adjusted by loading bias voltage, so that the reflection phase of the functional unit and the phase distribution of the super-surface array are regulated and controlled, and the far-field wave beam characteristic of the reflected electromagnetic wave is further controlled. The terahertz wave beam surface is a reconfigurable programmable artificial electromagnetic surface, and has the advantages of small size, light weight and the like, so that the terahertz wave beam surface has a good application prospect in terahertz wave beam scanning and imaging.

Description

Terahertz digital programmable super surface for liquid crystal regulation and control
Technical Field
The invention relates to a working principle, a design method and an application technology of a liquid crystal regulation terahertz digital programmable super surface constructed based on an ultrathin glass substrate and a liquid crystal micro-groove, and belongs to the technical field of novel artificial electromagnetic materials.
Background
In recent years, the physical mechanisms, device design and potential applications of artificial electromagnetic surfaces (super-surfaces) have attracted extensive research interest. The super-surface unit generally has a deep sub-wavelength thickness, and the control of properties such as wave front, amplitude, phase and polarization of the electromagnetic wave is realized by designing a phase gradient (discontinuous distribution) between adjacent units. The super-surface scheme can be adopted to design the ultra-light ultra-thin and easily conformal terahertz device, and is more favorable for engineering and practicality.
The digital coding metamaterial (or the super surface) is generally subjected to binary coding according to different unit response phases (or amplitudes) (for example, 1-bit coding is adopted, the digital codes corresponding to two units with phases of 0 degrees and 180 degrees are 0 and 1; for example, 2-bit coding is adopted, the digital codes corresponding to four units with phases of 0 degrees, 90 degrees, 180 degrees and 270 degrees are 00, 01, 10 and 11), and when the metamaterial is designed, only a coding pattern needs to be designed according to functional requirements, so that the design process of the metamaterial is greatly simplified. Further, by introducing semiconductor elements (such as switching diodes) in the metamaterial to regulate and control the phase response of the unit, and combining a Field Programmable Gate Array (FPGA), real-time control of the coding sequence and the far-field pattern can be realized.
In a terahertz frequency band, the geometric dimension of the unit is reduced to hundreds of microns, and due to size limitation and parasitic effect, the mode of regulating and controlling the metamaterial unit by using the diode is difficult to implement. The real-time regulation and control of the electromagnetic wave beam can only be completed by some special functional materials, micro-mechanical structures and other modes, and vanadium dioxide, liquid crystal and graphene are common tunable materials. Among them, the liquid crystal material has good broadband optical anisotropy and electro-optic modulation characteristics, and the development of devices thereof is gradually extending from a short wave band to a long wave direction (such as a terahertz band). A series of terahertz devices are developed based on liquid crystal materials, and comprise a terahertz phase modulator, a continuously tunable wave plate, a spatial light modulator and the like. The mode provided by the invention is that the liquid crystal material is introduced into the metal unit structure, the electric control method is adopted to control the orientation of liquid crystal molecules to change the dielectric constant of the liquid crystal layer, and further the resonance characteristic and the reflection characteristic of the unit are changed to realize the coding of 0 and 1, so that the invention has great innovation and feasibility.
Disclosure of Invention
The technical problem is as follows: the invention provides a liquid crystal control terahertz digital programmable super surface constructed based on an ultrathin glass substrate and a liquid crystal micro-groove, and the electric control programmable terahertz super surface has the advantages of small size, light weight, adjustable function and the like, so the electric control programmable terahertz digital programmable super surface has a good application prospect.
The technical scheme is as follows: the terahertz digital programmable super surface for liquid crystal regulation and control is formed by an array consisting of unit structures, the planar shapes of the unit structures are similar to a Chinese character tian, and the layered structures of the unit structures sequentially comprise a medium substrate, a metal super surface unit structure, a first polymer film orientation layer, a nematic phase liquid crystal layer, a second polymer film orientation layer, a metal stratum and a silicon substrate; the metal super-surface unit structure is a metal open resonant ring complementary structure, and the metal ground layer and the silicon substrate form a metal back plate which is a reflective super-surface; the nematic liquid crystal layer is arranged between the metal open resonant ring and the metal back plate, and the initial orientation of liquid crystal molecules is determined by the first polymer film orientation layer and the second polymer film orientation layer.
The complementary structure of the metal open resonant ring is made of gold.
The metal back plate is made of a silicon wafer with a deposited gold film.
The super-surface design working frequency is in a terahertz region.
The nematic liquid crystal layer is a liquid crystal layer made of a mixture of nematic liquid crystal molecules, the initial orientation of which is determined by the polymer film orientation layer.
The dielectric substrate is used as a substrate material for preparing the super-surface structure, flexible ultrathin fluorine glass is used as the dielectric substrate, the dielectric constant of the flexible ultrathin fluorine glass is 5.0, the loss tangent of the flexible ultrathin fluorine glass is 0.05, the minimum thickness of the flexible ultrathin fluorine glass is 30 micrometers, and the smaller the thickness of the flexible ultrathin fluorine glass is, the more beneficial the larger working bandwidth and the smaller loss are to be obtained.
The metal open resonator structure and the metal back plate are respectively used as a positive electrode and a negative electrode for applying bias voltage; the space orientation of liquid crystal molecules can be changed by adjusting the bias voltage, and further the dielectric constant of the liquid crystal is dynamically regulated and controlled.
The super surface can be designed with different terahertz super surface coding patterns, so that different far field patterns can be obtained.
In order to realize the row-by-row real-time controllability of the coding state of the super-surface units, liquid crystal microgrooves are arranged between the super-surface units, the material of the liquid crystal microgrooves is SU-8 photoresist, the width of the groove wall is 30 micrometers, and the height of the groove wall is the same as the thickness of a liquid crystal layer; and each line of liquid crystal is separated by the liquid crystal microgrooves and is independently applied with bias voltage, so that the dielectric property of the liquid crystal is regulated and controlled.
The super-surface adopts a field programmable gate array FPGA to carry out real-time control on voltage distribution, realizes the reconstruction of reflection phase distribution, further realizes the flexible regulation and control on electromagnetic beams, and realizes that the electromagnetic super-surface constructed based on the ultrathin glass substrate and the liquid crystal microgrooves is a programmable super-surface.
Has the advantages that:
1. the invention reports a liquid crystal regulation terahertz digital programmable super surface constructed based on an ultrathin glass substrate and a liquid crystal micro-groove, and compared with the existing coding super surface, the liquid crystal regulation terahertz digital programmable super surface has the characteristics of electric control, programmability and reconfigurability.
2. The invention takes flexible ultrathin glass as a medium substrate, and an ultrathin metal structure is prepared on the medium substrate, so compared with the traditional metamaterial device, the ultrathin metamaterial device has the advantages of ultrathin thickness, small volume, light weight and the like, and is beneficial to obtaining larger working bandwidth.
3. The liquid crystal micro-groove array is constructed by adopting SU-8 materials, so that liquid crystals in each row can be effectively separated, row-by-row regulation and control of the metamaterial array can be realized, the liquid crystals can deflect more fully under the action of bias voltage, the phase control range of the metamaterial is enlarged, and the far-field regulation and control characteristic of the super-surface array is effectively improved.
Drawings
FIG. 1 is a schematic diagram of a unit structure. The overall size of the unit in the x direction and the y direction is p, the width and the height of the metal opening resonant ring are a, and the width of the metal wire and the width of the opening are w.
FIG. 2 is a schematic side view of the cell structure. The structure is from right to left: the structure comprises a dielectric substrate 1, a metal super surface unit structure 2, a first polymer film orientation layer 3, a nematic phase liquid crystal layer 4, a second polymer film orientation layer 5, a metal ground layer 6 and a silicon substrate 7. The thickness of the flexible ultrathin glass is T', the thickness of the metal open resonator structure is H, the thickness of the polyimide film is l, the thickness of the liquid crystal layer is d, the thickness of the metal stratum is H, the thickness of the silicon substrate is T, and the initial optical axis direction of the liquid crystal molecules is along the y axis.
FIG. 3 is a schematic diagram of a super-surface array antenna and corresponding liquid crystal cell structure. As an example, the pitch of the liquid crystal cells is twice the cell period, and thus is independently controlled for every two columns of super surface cells.
FIG. 4 is a graph showing the magnitude of the reflection coefficient S11 when the dielectric constant of the liquid crystal layer is 2.55(0 state) and 3.65(1 state), respectively.
FIG. 5 is a phase curve of the reflection coefficient S11 when the dielectric constant of the liquid crystal layer is 2.55(0 state) and 3.65(1 state), respectively.
FIG. 6 is a three-dimensional far-field scattering pattern with an encoding sequence of 00110011 …/00110011 … encoding the super-surface, and an operating frequency of 0.56 THz.
FIG. 7 is a three-dimensional far-field scattering pattern with an encoding sequence of 000111000111 …/000111000111 … encoding a super-surface, operating at a frequency of 0.56 THz.
Detailed Description
The unit structure of the terahertz digital programmable super surface is shown in figure 1, and mainly comprises a medium substrate, a metal super surface unit structure, a nematic phase liquid crystal layer, a polymer film orientation layer and a metal back plate, and the designed working frequency is in a terahertz region. The selected super-surface unit is an open resonant ring complementary structure (as shown in figure 1), and the used material is gold. The metal back plate is made of a silicon wafer with a deposited gold film, and can effectively inhibit transmission of terahertz electromagnetic waves, so that the metal back plate is a reflective artificial electromagnetic surface. Between the metal split ring resonator and the metal backplate is a liquid crystal layer made of a mixture of nematic liquid crystal molecules whose initial orientation is determined by the polymer film orientation layer, as shown in fig. 2. Further, the dielectric substrate is used as a substrate material for preparing the super-surface structure, and the smaller the thickness of the dielectric substrate is, the more beneficial the larger working bandwidth and the smaller loss are obtained. The invention adopts flexible ultrathin fluorine glass as a dielectric substrate, the dielectric constant of the flexible ultrathin fluorine glass is 5.0, the loss tangent of the flexible ultrathin fluorine glass is 0.05, and the minimum thickness of the flexible ultrathin fluorine glass can reach 30 micrometers.
The working principle of the terahertz digital programmable super surface controlled by the liquid crystal constructed based on the ultrathin glass substrate and the liquid crystal micro-groove is as follows. The metal open resonator structure and the metal back plate are respectively used as a positive electrode and a negative electrode for applying bias voltage. Under the incident condition that the terahertz wave is perpendicular to the plane of the resonance ring and the electric field component is parallel to the optical axis direction (TM wave mode) of the liquid crystal molecules, if a certain voltage is applied to the resonance ring and the metal back plate, the dielectric constant of the liquid crystal is a specific value, at this time, the resonance frequency omega 1 of the unit structure is the reflection parameter S11 (1). When the bias voltage is increased, the optical axis direction of the liquid crystal molecules is deflected, and the dielectric constant of the liquid crystal layer is changed, so that the resonance property of the cell structure is changed, the resonance frequency is shifted to ω 2, and the reflection parameter is S11 (2). The appropriate operating band is chosen so that in both states the reflection amplitudes of the cells are close and the phases are 180 deg. apart, whereby two basic codes, respectively labelled "0" and "1", can be obtained.
Different coding units are arranged into a specific sequence, so that a super surface with a certain function can be obtained, and flexible control of terahertz wave beams is realized. Here, one key technique is the real-time switching of the encoding states "0" and "1", and since liquid crystals are fluid, it is not easy to apply a bias voltage independently to each column of liquid crystals. The invention designs the liquid crystal cell shown in figure 3, the material of the liquid crystal cell is SU-8 material, the liquid crystal cell separates the liquid crystal line by line, and bias voltage is independently applied and the dielectric constant is regulated. The voltage distribution is controlled in real time by adopting a Field Programmable Gate Array (FPGA), the reconstruction of the reflection phase distribution can be realized, and the regulation and control of electromagnetic wave beams are further realized, so that the super-surface is programmable.
Example 1: in the structural unit shown in fig. 1, the period in the x and y directions is 200 μm, the width and height of the metal open resonator ring is 170 μm, and the width of the metal line and the width of the opening are 16 μm. The thickness H of the metal open resonant ring and the thickness H of the metal ground layer are both 300nm, the thickness d of the liquid crystal layer is 45 μm, the thickness l of the upper and lower layers of polyimide films is 100nm, the thickness T' of the flexible ultrathin glass is 30 μm, and the thickness T of the silicon substrate is 500 μm. The dielectric constant of the liquid crystal layer is 2.55 when no bias voltage is applied, and is about 3.65 when the bias voltage is increased to 5V.
Electromagnetic simulation of the above units was performed using a CST microwave studio, and the resulting S parameters are shown in FIGS. 4 and 5. As can be seen, in the vicinity of 0.56THz, the reflection coefficients S11 in the two states are very close in amplitude, both are about 0.54, and the phase difference is 179 degrees, which meets the requirements of the "0" state and the "1" state in the coded super surface.
When the electromagnetic wave is vertically incident, when the coding sequence of the super-surface antenna is 00110011 …/00110011 …, the far-field beam of the super-surface antenna is analyzed in a CST full-wave simulation mode. In TM wave mode (electric field extending in x direction), the three-dimensional far-field scattering pattern of the super-surface is shown in fig. 6 when the working frequency is 0.56 THz. As can be seen from the figure, the regular reflection beam is significantly suppressed and becomes a scattered beam of two oblique angles, and the angle formed by the scattered beam and the z-axis is 42.0 °.
Example 2: in the structural unit shown in fig. 1, the period in the x and y directions is 200 μm, the width and height of the metal open resonator ring is 170 μm, and the width of the metal line and the width of the opening are 16 μm. The thickness H of the metal open resonant ring and the thickness H of the metal ground layer are both 300nm, the thickness d of the liquid crystal layer is 45 μm, the thickness l of the upper and lower layers of polyimide films is 100nm, the thickness T' of the flexible ultrathin glass is 30 μm, and the thickness T of the silicon substrate is 500 μm. The dielectric constant of the liquid crystal layer is 2.55 when no bias voltage is applied, and is about 3.65 when the bias voltage is increased to 5V. In the vicinity of 0.56THz, under two loading conditions, the phase response of the units is different by 180 degrees and the amplitude is similar, thereby obtaining two coding units of '0' and '1'.
When the electromagnetic wave is vertically incident, when the coding sequence of the super-surface antenna is 000111000111 …/000111000111 …, the far-field beam is analyzed by adopting a CST full-wave simulation mode. In TM wave mode (electric field extending in x direction), the three-dimensional far-field scattering pattern of the super-surface is shown in fig. 7 when the operating frequency is 0.56 THz. As can be seen from the figure, the regular reflection beam is significantly suppressed and becomes a scattered beam of two oblique angles, and the angle formed by the scattered beam and the z-axis is 26.0 °.
Example 3: in the structural unit shown in fig. 1, the period in the x and y directions is 200 μm, the width and height of the metal open resonator ring is 170 μm, and the width of the metal line and the width of the opening are 16 μm. The thickness H of the metal open resonant ring and the thickness H of the metal ground layer are both 300nm, the thickness d of the liquid crystal layer is 45 μm, the thickness l of the upper and lower layers of polyimide films is 100nm, the thickness T' of the flexible ultrathin glass is 30 μm, and the thickness T of the silicon substrate is 500 μm. The dielectric constant of the liquid crystal layer is 2.55 when no bias voltage is applied, and is about 3.65 when the bias voltage is increased to 5V. In the vicinity of 0.56THz, under two loading conditions, the phase response of the units is different by 180 degrees and the amplitude is similar, thereby obtaining two coding units of '0' and '1'.
When the electromagnetic wave is vertically incident, when the coding sequence of the super-surface antenna is 00110011 …/00110011 …, the far-field beam of the super-surface antenna is analyzed in a CST full-wave simulation mode. In the TM wave mode (the electric field extends in the x direction), when the operating frequency deviates from the optimal frequency and is 0.555THz and 0.565THz, respectively, the suppression effect of the regular reflection beam of the super-surface is still significant (the energy difference with the oblique abnormal reflection beam exceeds 10dB), and the angles formed by the abnormal scattering beam and the z axis are 42.5 ° and 41.5 °, respectively.

Claims (10)

1. The liquid crystal regulation terahertz digital programmable super surface is characterized in that the super surface is formed by an array formed by unit structures, the planar shapes of the unit structures are similar to a Chinese character tian, and the laminated structures of the unit structures sequentially comprise a medium substrate (1), a metal super surface unit structure (2), a first polymer film orientation layer (3), a nematic phase liquid crystal layer (4), a second polymer film orientation layer (5), a metal stratum (6) and a silicon substrate (7); the metal super-surface unit structure (2) is a metal open resonator ring complementary structure, and a metal back plate is formed by a metal ground layer (6) and a silicon substrate (7) and is a reflective super-surface; between the metal open resonator ring and the metal back plate is a nematic liquid crystal layer (4), and the initial orientation of liquid crystal molecules is determined by a first polymer film orientation layer (3) and a second polymer film orientation layer (5).
2. The liquid crystal regulation terahertz digital programmable super surface of claim 1, wherein the metal open resonator ring complementary structure is made of gold.
3. The liquid crystal regulation terahertz digital programmable super surface of claim 1, characterized in that the material used for the metal back plate is a silicon wafer with a deposited gold film.
4. The liquid crystal modulation terahertz digital programmable super surface according to claim 1, wherein the super surface design operating frequency is in the terahertz region.
5. The liquid crystal-regulated terahertz digital programmable super surface according to claim 1, characterized in that the nematic liquid crystal layer (4) is a liquid crystal layer made of a mixture of nematic liquid crystal molecules, the initial orientation of which is determined by the polymer film orientation layer.
6. The liquid crystal regulation terahertz digital programmable super surface according to claim 1, characterized in that the dielectric substrate (1) is used as a substrate material for preparing a super surface structure, a flexible ultrathin fluorine glass is used as the dielectric substrate, the dielectric constant of the flexible ultrathin fluorine glass is 5.0, the loss tangent is 0.05, the minimum thickness is 30 microns, and the smaller the thickness is, the more beneficial the larger the working bandwidth and the smaller the loss are.
7. The liquid crystal-regulated terahertz digital programmable super surface according to claim 1, wherein the metal open resonator ring structure and the metal back plate are respectively used as a positive electrode and a negative electrode for applying a bias voltage; the space orientation of liquid crystal molecules can be changed by adjusting the bias voltage, and further the dielectric constant of the liquid crystal is dynamically regulated and controlled.
8. The liquid crystal regulation terahertz digital programmable super surface of claim 1, wherein the super surface can be designed with different terahertz super surface coding patterns so as to obtain different far field patterns.
9. The liquid crystal regulation terahertz digital programmable super surface of claim 8, wherein in order to realize the row-by-row real-time controllability of the coding state of the super surface units, liquid crystal microgrooves are arranged between the super surface units, the material of the liquid crystal microgrooves is SU-8 photoresist, the width of the groove wall is 30 micrometers, and the height of the groove wall is the same as the thickness of the liquid crystal layer; and each line of liquid crystal is separated by the liquid crystal microgrooves and is independently applied with bias voltage, so that the dielectric property of the liquid crystal is regulated and controlled.
10. The liquid crystal regulation terahertz digital programmable super surface according to claim 9, wherein the super surface is a programmable super surface constructed based on an ultrathin glass substrate and a liquid crystal micro-groove, and is characterized in that the super surface adopts a Field Programmable Gate Array (FPGA) to perform real-time control on voltage distribution, so as to realize reconstruction of reflection phase distribution and further realize flexible regulation and control on electromagnetic beams.
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CN113933931A (en) * 2021-08-27 2022-01-14 北京工业大学 Annular cavity optical modulator based on vanadium dioxide nanowire
CN114911084A (en) * 2022-05-03 2022-08-16 南开大学 Terahertz liquid crystal circular polarization beam scanning device
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CN113764896A (en) * 2021-08-26 2021-12-07 中国计量大学 Terahertz wave angular deflection controller and method thereof
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CN115202088B (en) * 2022-05-17 2024-03-19 北京航空航天大学杭州创新研究院 Phase-tunable spin terahertz source device and preparation method and application thereof
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CN114976534B (en) * 2022-05-31 2024-05-17 合肥工业大学 Terahertz reflection type phase shifter
WO2024036455A1 (en) * 2022-08-15 2024-02-22 北京小米移动软件有限公司 Metasurface implementation method and apparatus based on liquid crystal regulation and control, and metasurface unit

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