CN112941606A - Cathode assembly for electroplating equipment - Google Patents
Cathode assembly for electroplating equipment Download PDFInfo
- Publication number
- CN112941606A CN112941606A CN202011446915.7A CN202011446915A CN112941606A CN 112941606 A CN112941606 A CN 112941606A CN 202011446915 A CN202011446915 A CN 202011446915A CN 112941606 A CN112941606 A CN 112941606A
- Authority
- CN
- China
- Prior art keywords
- shaft
- fastening
- cathode assembly
- fastening part
- fastening portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009713 electroplating Methods 0.000 title claims abstract description 10
- 238000007747 plating Methods 0.000 claims abstract description 48
- 239000002184 metal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 8
- 238000003780 insertion Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 12
- 239000010409 thin film Substances 0.000 description 7
- 239000010949 copper Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
- C25D17/12—Shape or form
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
Abstract
The cathode assembly for a plating apparatus according to the present invention comprises: a roller body provided with a first fastening portion and a second fastening portion; a first shaft which is provided with a third fastening part corresponding to the first fastening part and is connected to one end part of the roller main body in a manner of being capable of being disengaged; and a second shaft which is provided with a fourth fastening part corresponding to the second fastening part and is connected to the other end part of the roller main body in a manner of being capable of releasing the combination, thereby ensuring excellent quality of electroplating, facilitating replacement of the cathode and saving manufacturing cost.
Description
Technical Field
The present invention relates to a cathode assembly for a plating (plating) apparatus, and more particularly, to a cathode assembly for a plating apparatus, which can ensure excellent quality of a plating resist and can save manufacturing costs.
Background
A Roll-To-Roll (Roll To Roll) type plating apparatus includes a plating tank and a cathode To form a plating protective film on a film (film). The cathode includes a shaft and a roller body. An electroplating solution and an anode are disposed in the plating tank. The film may be transported through the cathode. At this time, the thin film is immersed in the plating solution inside the plating tank. When power is applied to the anode and cathode, the plating solution will be electrolyzed and copper will be electrodeposited onto the film.
Fig. 1 is a view showing a cathode assembly for a plating apparatus in the related art.
In the case of the plating apparatus in the related art, the quality of the plating protective film is deteriorated by heat generated when current flows through the cathode, surface unevenness caused by contact with the plating liquid, and the like. Accordingly, the cathode needs to be frequently replaced, which causes a problem of an increase in manufacturing cost. In particular, referring to fig. 1, the shaft and the roller body are joined in a welded manner. The roundness of the roller is not good due to the fusion bonding. This causes unstable film conveyance, and causes a problem such as wrinkles in the film.
Disclosure of Invention
An object of one embodiment of the present invention is to provide a cathode assembly for a plating apparatus, which can ensure excellent quality of a plating protective film and can reduce manufacturing cost.
In order to achieve the above object, a cathode assembly for a plating apparatus according to an embodiment of the present invention includes: a roller body provided with a first fastening portion and a second fastening portion; a first shaft including a third fastening portion corresponding to the first fastening portion, the first shaft being detachably connected to one end portion of the roller main body; and a second shaft including a fourth fastening portion corresponding to the second fastening portion, the second shaft being detachably connected to the other end portion of the roller main body.
According to the present invention, the roller body and the shaft can be easily coupled and uncoupled, so that the number of assembling steps can be reduced, and only the roller body can be replaced if necessary, so that the replacement cost can be saved.
In addition, since the roundness of the roller can be maintained, excellent quality of the plating resist can be ensured.
Drawings
Fig. 1 is a view showing a cathode assembly for a plating apparatus in the related art.
FIG. 2 is a view schematically showing a cathode assembly for an electroplating apparatus according to an embodiment of the present invention.
Fig. 3 is an enlarged view of both end portions of the cathode assembly for a plating apparatus shown in fig. 2.
Description of the reference numerals
10: cathode assembly for plating apparatus 100: roller body
110: first fastening portion 130: second fastening part
200: first axis (draft) 210: third fastening part
220: shaft main body 240: shaft flange
300: second shaft 310: fourth fastening part
400: support shaft 500: sealing member
H1: insertion groove H2: fastening groove
Detailed Description
Hereinafter, the cathode assembly 10 for a plating apparatus according to a preferred embodiment of the present invention will be described in detail.
Fig. 2 is a view schematically showing a cathode assembly 10 for a plating apparatus according to an embodiment of the present invention, and fig. 3 is an enlarged view showing both end portions of the cathode assembly 10 for a plating apparatus shown in fig. 2.
Referring to fig. 2 and 3, a cathode assembly 10 for a plating apparatus according to an embodiment of the present invention includes a roller body 100, a first shaft 200, and a second shaft 300 to ensure excellent quality of a plated film and to save manufacturing costs. The first shaft 200 and the second shaft 300 are connected to both end portions of the roller body 100 so as to be easily coupled and uncoupled. Accordingly, after the roller main body 100 and the two shafts 200 and 300 are separated, only the roller main body can be replaced, and thus the manufacturing cost (replacement cost) can be saved.
The roller body 100 has a first fastening portion 110 and a second fastening portion 130. The first fastening portion 110 is disposed at one end of the roller body 100. The second fastening portion 130 is disposed at the other end portion of the roller main body 100. The first shaft 200 has a third fastening portion 210. The third fastening part 210 of the first shaft 200 may be fastenable and unfastenable corresponding to the first fastening part 110. The second shaft 300 has a fourth fastening portion 310. The fourth fastening part 310 may be fastenable and unfastenable corresponding to the second fastening part 130.
As an example, the roller body 100 may have a cylindrical shape. The first fastening portion 110 and the second fastening portion 130 are disposed on the inner circumferential surface of the roller body 100. The first fastening part 110 and the second fastening part 130 may have the shape of a thread crest and a thread root. As an example, the first fastening portion 110 and the second fastening portion 130 may be an internal thread and an external thread, respectively. Accordingly, the first fastening part 110 and the second fastening part 130 extend in the circumferential direction along the inner or outer circumferential surface of the roller main body 100. For example, in the case where the first fastening part 110 is formed on the inner circumferential surface of the roller body 100, the second fastening part 130 may be formed on the inner circumferential surface or the outer circumferential surface of the roller body 100; in the case where the second fastening part 130 is formed on the inner circumferential surface of the roller main body 100, the first fastening part 110 may be formed on the inner circumferential surface or the outer circumferential surface of the roller main body 100. The first fastening part 110 and the second fastening part 130 are respectively recessed toward the inside (inside of the surface) or protruded toward the outside (outside of the surface) from the surface formed by themselves. The first fastening portion 110 is disposed at one end portion of the roller main body 100, and the second fastening portion 130 is disposed at the other end portion of the roller main body 100.
The third fastening portion 210 is disposed on the outer circumferential surface of the first shaft 200. The fourth fastening portion 310 is disposed on the outer circumferential surface of the second shaft 300. The third fastening part 210 and the fourth fastening part 310 may have the shape of a thread crest and a thread root. As an example, the third fastening portion 210 and the fourth fastening portion 310 may be an internal thread and an external thread, respectively. Accordingly, the third fastening parts 210 and the fourth fastening parts 310 extend in the circumferential direction along the outer or inner circumferential surfaces of the first and second shafts 200 and 300, respectively. For example, in the case where the first fastening part 110 is formed on the inner circumferential surface or the outer circumferential surface of the roller body 100, the third fastening part 210 may be formed on the outer circumferential surface or the inner circumferential surface of the first shaft 200; in the case where the second fastening part 130 is formed on the inner or outer circumferential surface of the roller body 100, the fourth fastening part 310 may be formed on the outer or inner circumferential surface of the second shaft 300. The third fastening portion 210 and the fourth fastening portion 310 are respectively recessed toward the inside (inside of the surface) or protruded toward the outside (outside of the surface) from the surface formed by itself. Accordingly, the first shaft 200 can be screw-coupled with and unscrewed from the first fastening part 110 of the roller main body 100. In addition, the second shaft 300 may be screw-coupled with and unscrewed from the second fastening part 130 of the roller body 100. Therefore, the assembly and replacement of the cathode become easy, so that it is possible to prevent the failure and save the manufacturing cost.
The first and second shafts 200 and 300 include a shaft body 220 and a shaft flange 240, respectively. The shaft main body 220 serves as a rotation shaft supporting the roller main body 100. The shaft flange 240 is connected to the shaft body 220 and at least a portion thereof is inserted into the roller body 100. Here, the shaft flange 240 has a third fastening portion 210 and a fourth fastening portion 310.
In addition, the shaft flange 240 includes: an inclined portion whose diameter gradually decreases from the outer diameter of the roller main body 100 toward the inner diameter of the roller main body 100 as it goes toward the extending direction of the roller main body 100; and an insertion portion inserted inside the roller body 100. Here, after the shaft flange 240 and the roller main body 100 are fastened, the inclined portion of the shaft flange 240 and the roller main body 100 corresponding to the inclined portion may be joined in a thermocompression bonding manner. Accordingly, the roller body 100 and the shaft flange 240 can be sealed. That is, the roller main body 100 and the shaft flange 240 can be connected to each other so as to be engageable with and disengageable from each other while ensuring the sealing between the roller main body 100 and the shaft flange 240.
The cathode assembly 10 for a plating apparatus according to an embodiment of the present invention further includes a support shaft 400. The support shaft 400 is used to connect the first shaft 200 and the second shaft 300. The support shaft 400, the first shaft 200, and the second shaft 300 have the same shaft as a central shaft. The support shaft 400 serves to reinforce the combined support force between the first shaft 200 and the second shaft 300. Therefore, even when the first shaft 200 and the second shaft 300 are coupled or decoupled, the roundness of the roller body 100 can be maintained.
As an example, one end portion of the support shaft 400 may be fixed to any one of the first shaft 200 and the second shaft 300. The support shaft 400 may be formed integrally (one body) with the second shaft 300 or the first shaft 200. Therefore, the support shaft 400 and the second shaft 300 may be formed of the same material. In other words, there is no engagement portion between the support shaft 400 and the second shaft 300. As another example, any one of the first shaft 200 and the second shaft 300 and the support shaft 400 may be integrally formed by welding or the like. In this case, there may be an engagement portion between the support shaft 400 and any one of the first shaft 200 and the second shaft 300. Therefore, the support shaft 400 and any one of the first shaft 200 and the second shaft 300 may be formed as an integral body that is inseparably coupled regardless of the presence or absence of the engagement portion.
If the support shaft 400 is integrally formed with either the first shaft 200 or the second shaft 300, not only the assembly can be easily performed, but also the assembly can be performed precisely. For example, in a state where the roller body 100 and the first shaft 200 are coupled, if the second shaft 300 is fastened to the roller body 100, the end of the support shaft 400 is inserted into the fastening groove of the first shaft 200 (H2 in fig. 3). That is, the joint surfaces of the end of the support shaft 400 and the first shaft 200 will be disposed between the two ends of the roller body 100. Accordingly, the first shaft 200, the support shaft 400, and the second shaft 300 can be easily fastened to have the same central axis by simple assembly. Conversely, when the first shaft 200 is fastened to the roller body 100 in a state where the roller body 100 and the second shaft 300 are coupled, the end of the support shaft 400 is also inserted into the fastening groove of the first shaft 200. That is, as the end of the support shaft 400 is inserted into the fastening groove of the first shaft 200, the second shaft 300, and the support shaft 400 may be aligned with the same central axis.
In addition, the other end portion of the support shaft 400 may be detachably coupled to the remaining one of the first shaft 200 and the second shaft 300. For this, the first shaft 200 or the second shaft 300 may have a fastening groove H2. The other end portion of the support shaft 400 may be inserted into the fastening groove H2 and supported. As another example, a screw thread may be provided on an inner circumferential surface of the fastening groove H2. Correspondingly, the support shaft 400 may also have threads. That is, the other end portion of the support shaft 400 may be screw-coupled with the fastening groove H2. The fastening groove H2 extends in the circumferential direction with respect to the center axis of the roller body 100. The fastening groove H2 may be spaced apart from a fastening portion (screw fastening portion) between the one end of the roller body 100 and the first shaft 200 by a predetermined distance toward the second shaft 300. As another example, the fastening groove H2 may be spaced a prescribed distance toward the first shaft 200 from a fastening portion (screw fastening portion) between the other end of the roller body 100 and the second shaft 300.
The cathode assembly 10 for a plating apparatus according to an embodiment of the present invention further includes a sealing member 500. The sealing member 500 may have a ring shape. The seal member 500 is disposed between the shaft flange 240 and the roller main body 100 and seals. The shaft flange 240 has an insertion groove H1 corresponding to the sealing member 500. The sealing member 500 may be inserted into the insertion groove H1 and fixed. Thus, the seal member 500 may not be disengaged during the coupling and decoupling of the shaft flange 240 and the roller body 100.
On the other hand, the cathode assembly 10 for a plating apparatus of the present invention transports a thin film (not shown) so that the thin film passes through a plating tank (not shown), thereby forming a plating resist. Here, the film includes a metal layer (not shown). Before the thin film is electroplated, a metal layer with a specified thickness is formed on the surface of the thin film. The metal layer functions as a conductive function and may be formed by sputtering or plating. The metal layer may have
To
Is measured. Here, the metal layer includes a copper (Cu) seed layer.
In addition, in the step of vertical electrolytic plating, the plating liquid contained in the plating tank has a copper concentration of 30 to 40g/L, a sulfuric acid concentration of 170 to 180g/L, and a chlorine (Cl) concentration of 45 to 55 ppm. In addition, plating may be achieved in a manner to pass through 10 to 20 plating baths. In addition, the plating bath may be adjusted to have a current density of 0.1ASD to 3.5 ASD.
The thin film may have a metal layer thickness of 0.5 μm or more and a current density (ASD) of 0.1A/m2To 3.5A/m2And the plating process is performed at a temperature of 34 ℃ or higher. Here, a copper plating protective film having a thickness of 1.8 μm to 2.4 μm is plated on one side or both sides of the thin film in a vertical or horizontal manner.
The present invention made by the present inventors has been specifically described above based on the above embodiments, but the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention.
Claims (9)
1. A cathode assembly for an electroplating apparatus, comprising:
a roller body provided with a first fastening part and a second fastening part;
a first shaft including a third fastening portion corresponding to the first fastening portion, the first shaft being detachably connected to one end portion of the roller main body; and
and a second shaft including a fourth fastening portion corresponding to the second fastening portion, the second shaft being detachably connected to the other end portion of the roller main body.
2. The cathode assembly for plating apparatuses as recited in claim 1,
threads are formed on the first fastening part and the second fastening part, respectively,
a screw thread corresponding to the first fastening part is formed at the third fastening part such that the first fastening part and the third fastening part are screw-coupled,
a screw thread corresponding to the second fastening portion is formed at the fourth fastening portion such that the second fastening portion and the fourth fastening portion are screw-coupled.
3. The cathode assembly for plating apparatuses as recited in claim 2,
the support shaft connects the first shaft and the second shaft.
4. The cathode assembly for plating apparatuses as recited in claim 3,
at least one of the first shaft and the second shaft includes a fastening groove, and the support shaft is inserted into the fastening groove.
5. The cathode assembly for plating apparatuses as recited in claim 1,
the first shaft and the second shaft respectively include:
a shaft body; and
and a shaft flange disposed at an end of the shaft body and coupled to the roller body.
6. The cathode assembly for plating apparatuses as recited in claim 1,
further comprising a sealing member disposed between the roller body and the first shaft and between the roller body and the second shaft.
7. The cathode assembly for plating apparatuses as recited in claim 6,
the roller body includes an insertion groove, and the sealing member is inserted into the insertion groove.
8. The cathode assembly for plating apparatuses as recited in claim 1,
the electroplating device uses the cathode component to convey the film to form an electroplating protective film,
the film includes a metal layer disposed on a surface of the film at a prescribed thickness before performing electroplating,
the thickness of the film on the metal layer is more than 0.5 μm, and the current density is 0.1A/m2To 3.5A/m2And the temperature is 34 ℃ or higher.
9. The cathode assembly for plating apparatuses as recited in claim 3,
either one of the first shaft and the second shaft is formed integrally with the support shaft.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20190163525 | 2019-12-10 | ||
| KR10-2019-0163525 | 2019-12-10 | ||
| KR10-2020-0141394 | 2020-10-28 | ||
| KR1020200141394A KR20210073443A (en) | 2019-12-10 | 2020-10-28 | The cathode assembly for plating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112941606A true CN112941606A (en) | 2021-06-11 |
Family
ID=76234793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011446915.7A Pending CN112941606A (en) | 2019-12-10 | 2020-12-09 | Cathode assembly for electroplating equipment |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7101229B2 (en) |
| CN (1) | CN112941606A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990015161U (en) * | 1997-10-13 | 1999-05-15 | 이구택 | Hold down roller to prevent fume penetration |
| CN1227283A (en) * | 1997-10-28 | 1999-09-01 | Sms舒路曼-斯玛公司 | Conductive roller in electroplating strip device |
| JP2011225937A (en) * | 2010-04-20 | 2011-11-10 | Akahoshi Kogyo Kk | Conductor roll |
| CN102828214A (en) * | 2012-09-03 | 2012-12-19 | 中冶南方工程技术有限公司 | Novel conducting roller for band steel electroplating |
| CN105308222A (en) * | 2013-06-14 | 2016-02-03 | Ｋｙｂ株式会社 | Power-supply member, and high-speed plating device provided with same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5370934A (en) * | 1976-12-06 | 1978-06-23 | Ngk Insulators Ltd | Conductor roll |
| JPH069023Y2 (en) * | 1989-03-07 | 1994-03-09 | 新日本製鐵株式会社 | Conductor roll |
| JPH0372114U (en) * | 1989-11-17 | 1991-07-22 | ||
| JPH0874839A (en) * | 1994-09-06 | 1996-03-19 | Canon Inc | Development sleeve with shaft and its manufacture |
| JPH11249416A (en) * | 1998-03-05 | 1999-09-17 | Ricoh Co Ltd | Manufacture of developing roller |
| JP2000127006A (en) * | 1998-10-20 | 2000-05-09 | Canon Inc | Manufacture of cylinder member, and developing device and image forming device equipped with the same |
| AUPR857401A0 (en) | 2001-10-29 | 2001-11-29 | Kirk Engineering Services Australia Pty Ltd | Printing cylinders and methods of construction |
| JP2004109338A (en) * | 2002-09-17 | 2004-04-08 | Ricoh Co Ltd | Developing roller |
| CN101241340A (en) * | 2003-10-09 | 2008-08-13 | 富士电机电子技术株式会社 | Electrophotograph developing roller and image forming device using the same |
| JP4862513B2 (en) * | 2005-06-23 | 2012-01-25 | 東レ株式会社 | Power feeding roller and apparatus and method for producing film with electrolytic plating film |
| JP6682828B2 (en) * | 2015-11-30 | 2020-04-15 | Tdk株式会社 | Magnet roll and manufacturing method thereof |
-
2020
- 2020-11-24 JP JP2020194109A patent/JP7101229B2/en active Active
- 2020-12-09 CN CN202011446915.7A patent/CN112941606A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990015161U (en) * | 1997-10-13 | 1999-05-15 | 이구택 | Hold down roller to prevent fume penetration |
| CN1227283A (en) * | 1997-10-28 | 1999-09-01 | Sms舒路曼-斯玛公司 | Conductive roller in electroplating strip device |
| JP2011225937A (en) * | 2010-04-20 | 2011-11-10 | Akahoshi Kogyo Kk | Conductor roll |
| CN102828214A (en) * | 2012-09-03 | 2012-12-19 | 中冶南方工程技术有限公司 | Novel conducting roller for band steel electroplating |
| CN105308222A (en) * | 2013-06-14 | 2016-02-03 | Ｋｙｂ株式会社 | Power-supply member, and high-speed plating device provided with same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2021091962A (en) | 2021-06-17 |
| JP7101229B2 (en) | 2022-07-14 |
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