CN112904597A - Optical phased array device and scanning method - Google Patents
Optical phased array device and scanning method Download PDFInfo
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- CN112904597A CN112904597A CN202110134072.5A CN202110134072A CN112904597A CN 112904597 A CN112904597 A CN 112904597A CN 202110134072 A CN202110134072 A CN 202110134072A CN 112904597 A CN112904597 A CN 112904597A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
Abstract
The invention discloses an optical phased array device and a scanning method, and belongs to the field of optical phased arrays and laser radars. The antenna comprises a power divider, a phase compensation area, a phase shifter and an array antenna; the power divider divides a beam of light into multi-path light with equal power; the phase compensation area is used for carrying out optical path compensation; the phase shifter changes a phase difference between adjacent waveguides; the optical blocking structures between adjacent waveguides in the array antenna are used for inhibiting crosstalk, so that smaller waveguide spacing is allowed to be used, and the scanning angle can be increased. The array antenna comprises a one-dimensional scanning array antenna and a two-dimensional scanning array antenna, wherein the one-dimensional scanning array antenna is formed by arranging N array waveguides at equal intervals, and the phase of each array waveguide is regulated and controlled through a phase shifter to control the direction of interference light; the two-dimensional scanning array antenna is characterized in that gratings with the same period and duty ratio are simultaneously formed on each array waveguide, and the diffraction angle of the grating can be changed by changing the wavelength of input light.
Description
Technical Field
The invention belongs to the field of optical phased arrays and laser radars, and particularly relates to an optical phased array device and a scanning method.
Background
The rise of intelligent systems such as autonomous vehicles and intelligent robots has attracted much attention. For lidar, it is a prerequisite that it is commercially available to perform beam scanning quickly and accurately over a wide range. The optical phased array is a light emitting device, can realize light beam scanning by effectively regulating and controlling an antenna, has wider application in laser radars, and can also be applied to the fields of optical imaging and military and national defense.
The optical phased array based on the electro-optic crystal and the piezoelectric ceramic has the advantages of simple structure and high response speed, but the defects of overlarge driving voltage, small deflection angle and difficulty in integration do not meet the actual requirement; liquid crystal or MEMS based optical phased arrays are bulky, have limited scanning range, and crosstalk between adjacent array elements increases with drive voltage; the array waveguide optical phased array based on AlGaAs and InP has high response speed, but the array waveguide has large space and limited transverse scanning range, and the device structure is mostly a quantum well type multilayer structure, has complex process and is not suitable for large-scale production and application. With existing semiconductor processes, the smaller size and power consumption and faster scanning speed of optical phased array devices make them attractive in the fields of lidar, free-space optical communications, and optical imaging and display.
Disclosure of Invention
Aiming at the defects of the related technology, the invention aims to provide an optical phased array device and a scanning method, and aims to solve the problems of small scanning range, large crosstalk, large volume, large power consumption, complex system and the like of the optical phased array.
In order to achieve the above object, an aspect of the present invention provides an optical phased array device, including a power divider, a phase compensation region, a phase shifter, and an array antenna;
the power divider divides a beam of light into multiple paths of light with equal power, and the light enters a plurality of waveguides arranged at equal intervals to be transmitted;
the phase compensation area is used for carrying out optical path compensation, so that the initial phases of all paths of light reaching the array antenna are the same;
the phase shifter acts on a plurality of waveguides which are arranged at equal intervals to change the phase difference between the adjacent waveguides;
gratings with the same period and duty ratio are manufactured on each waveguide, so that the array antenna is formed; and an optical blocking structure is arranged between adjacent waveguides in the array antenna.
Further, the phase compensation zone comprises a plurality of tapered waveguides, curved waveguides and straight waveguides, and the optical path length of each waveguide is individually compensated by changing the length of the straight waveguide.
Further, the phase shifter adjusts and controls the refractive index of each waveguide through a thermo-optic effect or an electro-optic effect, thereby changing the phase difference between adjacent waveguides.
Further, the power divider is a star coupler, a cascade Y-branch or a multi-mode interferometer.
Further, the light isolation structure is a metal strip or an air groove.
Furthermore, the power divider, the phase compensation area and the array antenna are made of silicon on insulator, silicon nitride and lithium niobate.
The invention also provides a scanning method based on the optical phased array device, which comprises the following steps:
the phase difference between adjacent waveguides is controlled through the phase shifter, the direction of interference light is controlled, and one-dimensional scanning is realized;
meanwhile, the diffraction angle of the grating is changed by adjusting the wavelength of incident light, and two-dimensional scanning is realized.
Through the technical scheme, compared with the prior art, the invention has the following beneficial effects:
(1) the invention provides an optical phased array device with large-angle scanning.A one-dimensional array antenna is formed by arranging array waveguides in the array antenna at equal intervals, and the phase difference between adjacent waveguides is controlled by a phase shifter to realize one-dimensional scanning; meanwhile, a grating is manufactured on each array waveguide, and the incident light wavelength is adjusted to change the diffraction angle of the grating, so that two-dimensional scanning is realized.
(2) In order to solve the crosstalk between the adjacent waveguides of the array antenna, the light barrier structure is manufactured between the adjacent waveguides, so that the crosstalk can be effectively reduced, and the process is simple.
(3) The optical phased array provided by the invention can realize large-angle scanning, does not need an additional control system, has small volume, low power consumption, simple operation, easy on-chip integration and low cost, and is suitable for large-scale production and application.
Drawings
FIG. 1 is a schematic diagram of a large angle scanning optical phased array device according to the present invention;
FIG. 2 is a schematic diagram of several configurations of the power divider of the present invention;
FIG. 3 is a schematic diagram of the phase compensation region according to the present invention;
FIG. 4 is a schematic view of a light barrier structure of the present invention being a metal strip or an air groove;
FIG. 5 is a block diagram of an array antenna of the present invention;
FIG. 6 is a cross-talk diagram of adjacent waveguides after adding light blocking structures between arrayed waveguides in accordance with the present invention;
fig. 7 is a graph of the angular variation of the lateral and longitudinal scans of the array antenna of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention provides an optical phased array device with large-angle scanning, which mainly comprises a power divider 101, a phase compensation area 102, a phase shifter 103 and an array antenna 104, as shown in figure 1.
The power divider 101 divides the incident light into N paths of light with equal power, and the light enters the arrayed waveguides with equal spacing for transmission, the power divider may be a star coupler, a cascade Y-branch or a multimode interferometer, as shown in fig. 2, and the resolution and width of the light beam depend on the number N of the arrayed waveguides.
The phase compensation area 102 accurately calculates the length of each waveguide for optical path compensation, so that the initial phases of the light reaching the array antenna are the same. The optical path compensation device comprises a plurality of tapered waveguides, a plurality of bent waveguides and a plurality of straight waveguides, wherein the optical path compensation can be carried out on each waveguide by changing the length of each straight waveguide.
The phase shifter 103 adjusts and controls the refractive index of each waveguide through a thermo-optic effect, an electro-optic effect or an acousto-optic effect, changes the phase difference between adjacent waveguides, and enables the emergent light beams to move transversely.
Gratings with the same period and duty ratio are manufactured on each waveguide, so that an array antenna 104 is formed; adjacent waveguides in the array antenna 104 are isolated by an optical isolation structure.
When scanning, the array antenna 104 includes two types: one-dimensional array antennas and two-dimensional array antennas.
A) One-dimensional scanning is achieved by a one-dimensional array antenna. The one-dimensional array antenna is formed by arranging N array waveguides at equal intervals, a light blocking structure is arranged between the adjacent waveguides to reduce crosstalk, and light is emitted to a free space through the end faces of the waveguides. The optical phased array of one-dimensional light beam scanning regulates and controls the phase of each waveguide through a phase shifter, and controls the direction of interference light so as to realize the deflection of the light beam.
B) The two-dimensional scanning is achieved by a two-dimensional array antenna. The two-dimensional array antenna is characterized in that shallow etching gratings are formed on each array waveguide to form gratings with the same period and duty ratio, and a light isolation structure is arranged in the middle to reduce crosstalk. In the transverse direction, the phase of each array waveguide is regulated and controlled through the phase shifter, and the direction of interference light is controlled so as to realize the deflection of light beams. In the longitudinal direction, the longitudinal diffraction angle of the grating can be changed by changing the wavelength of the input light, so that two-dimensional scanning is realized.
It can be seen that the division into one-dimensional array antennas and two-dimensional array antennas here is from the point of view of the mode of operation rather than a structural division.
Fig. 3 is a structural diagram of the phase compensation region 102 of the present invention, which includes tapered waveguides 301 and 303, curved waveguides 302 and 304, and a straight waveguide 305, where the length of each waveguide is precisely calculated, and changing the length of the straight waveguide 305 can individually compensate the optical path length of each waveguide, so that the initial phases of the light reaching the array antenna are the same, and the width of the curved waveguide is reduced to avoid exciting a higher-order mode in the waveguide during the bending process, and the tapered waveguide is used to connect the curved waveguide and the straight waveguide.
Fig. 4 (a) and (b) are schematic views of the light barrier structure of the present invention using a metal strip and an air groove, respectively. Wherein 401 is an array waveguide arranged at equal intervals; 402 is a metal strip; 403 are air slots to suppress cross talk between adjacent waveguides.
The contents of the above embodiments will be described with reference to a preferred embodiment.
Fig. 5 (a) and (b) are schematic views of one-dimensional scanning and two-dimensional scanning of the present invention.
The optical phased array of one-dimensional light beam scanning regulates and controls the phase of each waveguide through a phase shifter, and controls the direction of interference light so as to realize the deflection of the light beam. By the formula
It can be seen that the waveguide spacing d and the operating wavelength λ0The angular scan in the transverse psi direction can be achieved by varying the phase difference delta phi between adjacent waveguides without change. The scanning range depends on the spacing d of adjacent waveguides, and when the waveguide spacing is less than half the operating wavelength, the phase difference varies within + -pi, and the light beam scanning of + -90 DEG can be realized.
When two-dimensional light beams are scanned, shallow etching gratings are formed on each array waveguide of the two-dimensional array antenna to form gratings with the same period and duty ratio, and a light isolation structure is arranged in the middle of each grating to reduce crosstalk. In the psi direction, the phase of each array waveguide is regulated and controlled by a phase shifter, and the direction of interference light is controlled to further realize the deflection of the light beam. In the theta direction, by the diffraction formula of the grating
It can be known that the operating wavelength λ is changed0The diffraction angle of the grating is changed, so that the scanning of the light beam in the longitudinal direction can be realized, and the scanning range depends on the adjusting range of the working wavelength.
Fig. 5 (c) is a cross-sectional view of an array antenna of the present invention, which is designed based on silicon on insulator, wherein 501 represents a bottom silicon substrate and a top silicon waveguide, the thickness of the top silicon waveguide is 220nm, the etching depth of the grating on each waveguide is 15nm, and the duty ratio is 0.5; 503 represents a buried oxide layer made of silicon oxide; above the waveguide grating, 502 is deposited silicon oxide, which is an important medium for protecting the optical waveguide and isolating light, and the film thickness is 1 μm. Fig. 5 (b) is a cross-sectional view of the light blocking structure between the arrayed waveguides of the present invention being an air groove, and 505 represents the air groove.
Fig. 6 is a graph showing the variation of crosstalk between adjacent waveguides with the transmission distance and the pitch between the waveguides of 1.1 μm after adding a light blocking structure (taking an aluminum strip and an air slot as an example) between two arrayed waveguides, wherein fig. 6(a) is a cross talk comparison graph before and after adding the aluminum strip, and fig. 6(b) is a cross talk comparison graph before and after adding the air slot. It can be seen from the figure that as the transmission distance increases, the crosstalk increases. When light is transmitted by 1000 mu m in the dense waveguide after the aluminum strips are added, the crosstalk is obviously reduced from-0.2 dB to-26.6 dB; after air grooves are added, when light is transmitted by 200 mu m in the dense waveguide, the crosstalk is obviously reduced from-11.5 dB to-22.0 dB.
By adopting 64 waveguides as an array antenna, the distance between the waveguides is 1.1 mu m, the refractive index of each waveguide is adjusted, the phase difference in different waveguides is changed to be 0-5 pi/3, and as shown in (a) in fig. 7, the scanning range of transverse psi can be 89.6 degrees. By varying the operating wavelength between 1.4 μm and 1.6 μm, a scanning range of 32.6 ° in the longitudinal direction θ can be achieved, as shown in (b) of fig. 7.
In conclusion, the optical phased array with large-angle scanning is realized, the device structure is simple and compact, a large-scale antenna array and a control circuit are not needed, and the power consumption is low; and the chip is easy to integrate and the cost is low. Compared with other phased array devices, the phased array device has a larger scanning range, smaller volume and power consumption, so that the device has extremely high application potential and practical value in the fields of laser radar, space optical communication and the like.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. An optical phased array device is characterized by comprising a power divider, a phase compensation area, a phase shifter and an array antenna;
the power divider divides a beam of light into multiple paths of light with equal power, and the light enters a plurality of waveguides arranged at equal intervals to be transmitted;
the phase compensation area is used for carrying out optical path compensation, so that the initial phases of all paths of light reaching the array antenna are the same;
the phase shifter acts on a plurality of waveguides which are arranged at equal intervals to change the phase difference between the adjacent waveguides;
gratings with the same period and duty ratio are manufactured on each waveguide, so that the array antenna is formed; and an optical blocking structure is arranged between adjacent waveguides in the array antenna.
2. The optical phased array device as claimed in claim 1, wherein said phase compensation zone comprises a plurality of tapered waveguides, curved waveguides and straight waveguides, each of which is individually optical path compensated by varying the length of the straight waveguide.
3. The optical phased array device as claimed in claim 1, wherein said phase shifter adjusts a refractive index of each waveguide by a thermo-optical effect or an electro-optical effect to change a phase difference between adjacent waveguides.
4. The optical phased array device of claim 1, wherein the power splitter is a star coupler, a cascaded Y-branch, or a multimode interferometer.
5. The optical phased array device of claim 1, wherein the light blocking structure is a metal strip or an air slot.
6. The optical phased array device of any of claims 1-4, wherein the power divider, the phase compensation section, and the array antenna are made of silicon-on-insulator, silicon nitride, or lithium niobate.
7. A method for scanning an optical phased array device according to any of claims 1 to 6, comprising:
the phase difference between adjacent waveguides is controlled through the phase shifter, the direction of interference light is controlled, and one-dimensional scanning is realized;
meanwhile, the diffraction angle of the grating is changed by adjusting the wavelength of incident light, and two-dimensional scanning is realized.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113534564A (en) * | 2021-07-14 | 2021-10-22 | 华中科技大学 | Method and device for improving scanning angle of optical phased array |
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