CN112904435A - Miniaturized optical SERF magnetometer integrated with VCSEL laser - Google Patents

Miniaturized optical SERF magnetometer integrated with VCSEL laser Download PDF

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CN112904435A
CN112904435A CN202011634663.0A CN202011634663A CN112904435A CN 112904435 A CN112904435 A CN 112904435A CN 202011634663 A CN202011634663 A CN 202011634663A CN 112904435 A CN112904435 A CN 112904435A
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vcsel laser
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林强
黄宇翔
张桂迎
曾红健
李�昊
刘国磊
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Zhejiang University of Technology ZJUT
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Abstract

The invention discloses a miniaturized optical rotation non-Spin Exchange Relaxation (SERF) magnetometer integrated with a VCSEL laser. In order to overcome the problems of the miniaturized SERF magnetometer adopting optical fiber transmission in practical application, the invention adopts the VCSEL laser as a light source to replace optical fiber transmission, and realizes the miniaturized SERF magnetometer integrating the VCSEL laser. Meanwhile, by utilizing an elliptical polarized light optical rotation detection mode, the advantage of simple single-light configuration light path is ensured, the influence of frequency jitter of a VCSEL laser on the sensitivity of the magnetometer is greatly reduced, and 55fT/Hz is achieved1/2High sensitivity of (3). The SERF magnetometer can be used for measuring the magnetic field of the heart of a human body.

Description

Miniaturized optical SERF magnetometer integrated with VCSEL laser
Technical Field
The invention belongs to the technical field of atomic magnetometers, and particularly relates to a miniaturized optical SERF magnetometer integrated with a VCSEL laser, which can be used for measuring a weak magnetic field of a heart.
Background
The study of the weak magnetic field of the heart was first initiated in 1963, and Baule et al first detected magnetocardiographic signals using a coil magnetometer. With the development of Superconducting Quantum Interference devices (SQUIDs), Cohen et al detected magnetocardiographic signals using SQUID magnetometers in 1970. Subsequently, the study of the weak magnetic field of the heart has attracted much attention, and the magnetocardiogram technology based on the SQUID magnetometer is gradually developed and applied to clinical diagnosis and medical research. The magnetocardiogram may be used for 3D localization of arrhythmias, risk assessment of life-threatening arrhythmias, non-ischemic cardiomyopathies with normal QRS timing, prediction of late stage heart disease, detection of fetal arrhythmia signatures, early diagnosis of coronary artery disease, detection of allograft cardiovascular disease, etc. The greatest advantage of magnetocardiography is that it is a non-contact, non-invasive, rapid method for detecting heart disease. Therefore, the study of the magnetocardiogram has very important significance in clinical diagnosis and medical research.
The magnetocardiogram signal is very weak, the maximum magnetocardiogram signal amplitude of an adult is about 100pT, and the measuring device must have high sensitivity to detect the weak magnetocardiogram signal. Magnetocardiogram measurements have long been dependent on sensitivity up to 1fT/Hz1/2The SQUID magnetometer of. However, SQUID magnetometers need to operate in the ultra-low temperature environment of liquid helium, and maintenance cost is very expensive.
In recent years, with the progress of laser technology, atomic magnetometers based on laser interaction with atoms emerge like spring shoots after rain, and the most interesting of them is the atomic magnetometer based on Spin Exchange Relaxation (SERF). The SERF magnetometer has the characteristics of high sensitivity, non-low temperature working conditions, easiness in miniaturization and the like, and is very suitable for measuring magnetocardiogram signals. At present, most of light sources of the miniaturized SERF magnetometer couple laser emitted by a laser into a polarization-maintaining optical fiber, and transmit the laser to the miniaturized SERF magnetometer, such as a dupeng (CN 111035386 a) and the like, and a miniature SERF magnetometer is realized by using the polarization-maintaining optical fiber. However, the scheme based on optical fiber transmission faces many problems in clinical application, and environmental vibration easily causes optical fiber jitter, thereby changing the power and polarization of output light of the optical fiber and affecting the sensitivity of the magnetometer. And the optical fiber is very easy to break, so that the optical fiber is very inconvenient in the moving process, and the application range of the optical fiber is limited.
Compared with DFB lasers and external cavity type tunable semiconductor lasers, VCSEL lasers are much smaller in size and very suitable for being integrated into miniaturized SERF magnetometers. But the frequency jitter of VCSEL lasers is much more severe and the linewidth is often 100 MHz. If a circularly polarized light absorption detection method commonly used for miniaturized SERF magnetometers is adopted, such as a miniaturized SERF magnetometer device realized by the leek army (CN 111044947 a), and the like, the frequency jitter of the VCSEL laser itself can seriously affect the sensitivity of the magnetometer. Through a platform experiment, a circularly polarized light absorption detection mode is adopted, and the sensitivity of the SERF magnetometer can only reach 400fT/Hz at about 10Hz1/2. The common idea for overcoming the problem is to stabilize the frequency of the VCSEL laser by utilizing the absorption peak of an atomic gas chamber filled with high-pressure inert gas under the working action of the SERF magnetometer and through a laser frequency locking circuit. However, the process of the method is complicated and complicated, the implementation difficulty is high, and only Quspin company masters the technology at present (US10243325B 2).
Disclosure of Invention
In order to solve the above technical problems, it is an object of the present invention to provide a compact, flexible, high-sensitivity miniaturized optical SERF magnetometer integrated with a VCSEL laser.
In order to achieve the purpose, the invention adopts the following technical scheme:
a miniaturized optical SERF magnetometer integrated with a VCSEL laser comprises a light source part, an optical path part, an atomic gas chamber part, a magnetic field part and a signal detection part; wherein, the light source part selects a VCSEL laser, and the laser frequency is tuned to a wave band with the optical rotation angle close to the maximum; the light path part adjusts the light emitted by the VCSEL laser into elliptically polarized light; the signal detection part measures the magnitude of an external magnetic field in an optical rotation detection mode.
This scheme adopts the VCSEL laser instrument as the light source, with the laser instrument integration to the magnetometer probe in, reduces the influence that environmental vibration brought, makes the magnetometer device more nimble simultaneously. The problems faced by optical fiber transmission schemes in clinical applications are avoided, such as: the environmental vibration easily causes the optical fiber to shake, so that the power and the polarization of the output light of the optical fiber are changed, and the sensitivity of the magnetometer is influenced; the optical fiber is very easy to break and inconvenient to move, and the application range of the optical fiber is limited. By utilizing an elliptical polarized light optical rotation detection mode, the frequency of the VCSEL laser is tuned to a wave band with the optical rotation angle close to the maximum, and the wave band is just the position with the minimum influence of the frequency jitter of the VCSEL laser on the optical rotation angle, so that the influence of the frequency jitter of the VCSEL laser on the sensitivity of the magnetometer is greatly reduced, and the high-sensitivity miniaturized optical rotation SERF magnetometer integrating the VCSEL laser is realized.
Preferably, the light source section includes a VCSEL laser and a collimating lens; the wavelength of the VCSEL laser is detuned from rubidium atom D1 line by about 20-30G, and light emitted by the VCSEL laser becomes parallel light through the collimating lens.
Preferably, the optical path portion comprises a linear polarizer, an 1/4 wave plate, a first polarization maintaining mirror and a second polarization maintaining mirror; the parallel light passes through the polarizing film and the 1/4 wave plate and then becomes elliptical polarized light, and the elliptical polarized light passes through the atomic gas chamber after passing through the first polarization maintaining reflector and then reaches the signal detection part through the second polarization maintaining reflector.
Preferably, the atomic gas chamber part comprises an atomic gas chamber arranged in a boron nitride heating shell, the atomic gas chamber is positioned in the center of the Helmholtz coil, and a non-magnetic high-resistance heating wire is wound on the boron nitride heating shell to uniformly heat the atomic gas chamber. The heat preservation sponge is wrapped up to boron nitride heating shell outside, prevents that the heat from running off, makes the inside temperature of device even. The boron nitride heating shell is provided with a light through hole, and the light through hole is blocked by a film coating window sheet so as to isolate the thermal convection between the atomic air chamber and the outside.
Preferably, the atomic gas chamber is filled with87Rb atoms while being charged with 760Torr nitrogen as a buffer and quench gas.
Preferably, a thermocouple for detecting the temperature of the gas chamber in real time is arranged on the atomic gas chamber.
Preferably, the magnetic field portion comprises five sets of helmholtz coils, each set of helmholtz coils comprises two parallel square coils in the same direction, wherein there is a set of helmholtz coils along the X direction for generating a compensation magnetic field, which compensates for the Light Shift virtual magnetic field generated by the laser pump. The Y-direction and the Z-direction respectively contain two sets of helmholtz coils, one set for generating a modulated magnetic field and the other set for generating a compensation magnetic field. The entire coil is fixed on a cubic former with the atomic gas cell in the center of the coil. Wherein the Z direction is standard square Helmholtz coils, and the distance is 0.5445 times of the side length of the coils. The Helmholtz coil spacing in the X and Y directions is equal to the coil side length. The compensation coil is used for compensating the external magnetic field to zero, and the modulation coil applies a modulation magnetic field to modulate the low-frequency signal to high frequency.
The signal detection part comprises an 1/2 wave plate, a Wollaston prism, a focusing lens and a balance detector; after light reflected by the second polarization-maintaining reflector passes through the 1/2 wave plate and the Wollaston prism, a light beam is divided into two beams, the two beams of light are focused on two Photoelectric Detectors (PD) of the balance detector through a focusing lens, the optical rotation angle is measured, linear polarization components of elliptically polarized light reflect the change of atom spin polarization through the change of the optical rotation angle, and then the size of an external magnetic field is obtained. The detection of the atom spin polarization adopts an optical rotation detection mode, so that the influence of the frequency jitter of the VCSEL laser on the sensitivity of the SERF magnetometer can be greatly reduced.
The invention adopts the technical scheme that the VCSEL laser is used as the light source, and the laser is integrated into the magnetometer probe, so that the influence caused by environmental vibration is reduced, and the magnetometer device is more flexible. The problems faced by optical fiber transmission schemes in clinical applications are avoided, such as: the environmental vibration easily causes the optical fiber to shake, so that the power and the polarization of the output light of the optical fiber are changed, and the sensitivity of the magnetometer is influenced; the optical fiber is very easy to break and inconvenient to move, and the application range of the optical fiber is limited.
According to the scheme, the frequency of the VCSEL laser is tuned to the wave band with the nearly maximum optical rotation angle by using an elliptical polarized light optical rotation detection mode, and the wave band is just the position with the minimum influence of the frequency jitter of the VCSEL laser on the optical rotation angle, so that the influence of the frequency jitter of the VCSEL laser on the sensitivity of the magnetometer is greatly reduced, and the high-sensitivity miniaturized optical rotation SERF magnetometer integrating the VCSEL laser is realized.
The scheme adopts the integration of the VCSEL laser and the optical rotation detection mode of elliptically polarized light, not only enables the magnetometer device to be small and exquisite and flexible, but also overcomes the influence of the self frequency jitter of the VCSEL laser on the sensitivity of the magnetometer, and realizes about 10Hz and 55fT/Hz1/2High sensitivity of (3).
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application.
FIG. 1 is a schematic diagram of the present invention;
FIG. 2 is a light path diagram of the present invention;
FIG. 3 is a graph of the noise power density spectrum of the present invention;
FIG. 4 is a graph of magnetocardiogram signals measured in accordance with the present invention.
Detailed Description
The invention is further described with reference to the following figures and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, the singular is also intended to include the plural unless the context clearly dictates otherwise, and it should be further understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of the features, steps, operations, devices, components, and/or combinations thereof.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "a plurality" means two or more unless explicitly defined otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Example 1:
a miniaturized optical SERF magnetometer integrated with a VCSEL laser as shown in fig. 2, comprising a light source section, a light path section, an atomic gas cell section, a magnetic field section and a signal detection section; wherein, the light source part selects a VCSEL laser 1, and the laser frequency is tuned to a wave band with the optical rotation angle close to the maximum; the light path part adjusts the light emitted by the VCSEL laser 1 into elliptically polarized light; the signal detection part measures the magnitude of an external magnetic field in an optical rotation detection mode.
The light source part comprises a VCSEL laser 1 and a collimating lens 2; the laser is driven to emit light through the temperature control system and the precise current source, the output current of the current source is adjusted, the wavelength of the VCSEL laser 1 and the detuning of a rubidium atom D1 line are controlled to be about 20-30G, light emitted by the VCSEL laser 1 becomes parallel light through the collimating lens 2, and the size of a light spot is 2.5 mm.
The optical path part comprises a linear polarizer 3, an 1/4 wave plate 4, a first polarization maintaining mirror 5 and a second polarization maintaining mirror 6; the parallel light passes through the polarizing plates 3 and 1/4 wave plate 4 and then becomes elliptical polarized light, the elliptical polarized light passes through the atomic gas cell 14 after passing through the first polarization maintaining reflector 5, and then reaches the signal detection part through the second polarization maintaining reflector 6.
The atomic gas chamber part comprises an atomic gas chamber 14 arranged in the boron nitride heating shell 11, the atomic gas chamber 14 is positioned in the center of the Helmholtz coil 13, and the boron nitride heating shell 11 is wound with a non-magnetic high-resistance heating wire 12 to uniformly heat the atomic gas chamber 14. The heat preservation sponge is wrapped up in the outside of boron nitride heating shell 11, prevents that the heat from running off, makes the inside temperature of device even. The boron nitride heating shell 11 is provided with a light through hole, and the light through hole is blocked by a film coating window sheet 15 so as to isolate the thermal convection between the atomic air chamber 14 and the outside. The atomic gas chamber 14 is filled with87Rb atom, withWhile charging 760Torr of nitrogen gas as a buffer and quench gas. The atomic gas chamber 14 is provided with a thermocouple for detecting the temperature of the gas chamber in real time.
The magnetic field portion comprises five sets of helmholtz coils 13, each set of helmholtz coils 13 comprises two parallel square coils, wherein there is a set of helmholtz coils along the X direction for generating a compensation magnetic field, which compensates for the Light Shift (Light Shift) virtual magnetic field generated by the laser pump. The Y-direction and Z-direction contain two sets of helmholtz coils, respectively, one set serving as a magnetic field compensation coil and the other set serving as a magnetic field modulation coil. The entire coil is fixed on a cubic former with the atomic gas cell in the center of the coil. Wherein the Z direction is standard square Helmholtz coils, and the distance is 0.5445 times of the side length of the coils. The Helmholtz coil spacing in the X and Y directions is equal to the coil side length. The compensation coil is used for compensating the external magnetic field to zero, and the modulation coil applies a modulation magnetic field to modulate the low-frequency signal to high frequency.
The signal detection part comprises an 1/2 wave plate 7, a Wollaston prism 8, a focusing lens 9 and a balance detector 10; after light reflected by the second polarization maintaining reflector 6 passes through the 1/2 wave plate 7 and the wollaston prism 8, the light beam is divided into two beams, and the two beams are focused on two Photoelectric Detectors (PD) of the balance detector 10 through a focusing lens 9 to measure the optical rotation angle. The circularly polarized component of the elliptically polarized light pumps atoms to generate spin polarization, and the linearly polarized component of the elliptically polarized light reflects the change of the spin polarization of the atoms through the change of the optical rotation angle, so that the size of an external magnetic field is obtained. The detection of the atomic spin polarization adopts an optical rotation detection mode, so that the influence of the frequency jitter of the VCSEL laser 1 on the sensitivity of the SERF magnetometer can be greatly reduced.
The precession of the atomic spin polarization is analyzed below.
In the transverse parametric modulation mode shown in fig. 1, the relationship between the spin polarization of the atom and the external magnetic field is given by Bloch equation:
Figure BDA0002878077870000091
wherein delta P is atomic spin polarization change, P'0For steady polarization, gamma is the atom gyromagnetic ratio, and the modulated magnetic field B is Bmsin(ωt),τ1For relaxation time, δ Bx、δBy、δBzX, Y, Z for three-directional magnetic field changes. The elliptically polarized light is along the X axis, and the direction of the modulation magnetic field and the direction of the magnetic field to be measured are the Z axis. From the formula, the atomic spin polarization changes δ P and δ BzIn a linear relationship, the higher order terms include δ By、δBxAnd (4) information. Therefore, to measure the magnetic field in the Z direction, δ B needs to be measuredy、δBxThe magnetic field in the direction is zeroed, and high-order terms are eliminated. Then, the magnitude of the magnetic field to be measured in the Z direction can be obtained by detecting the change of the optical rotation angle.
During measurement, the miniaturized SERF magnetometer is placed in a shielding barrel, and then the following operations are carried out:
the first step is as follows: first, the temperature is controlled in the operating range of the VCSEL laser 1 by a temperature controller. After the temperature stabilized, the current was slowly increased until the output wavelength of the VCSEL laser 1 was the operating wavelength of the SERF magnetometer.
The second step is that: a high-frequency ac voltage is applied to the non-magnetic high-resistance heating wire 12 to heat the atomic gas cell 14. And detecting the temperature of the air chamber in real time by a T-shaped thermocouple until the temperature is stabilized at 150 ℃.
In a third step, a magnetic field is applied in five sets of helmholtz coils 13. A high-frequency modulation magnetic field is applied to the Z-direction modulation coil, and a compensation field is applied to the compensation coil; a compensation magnetic field is applied to the Y-direction compensation coil; the X-direction compensation coil also applies a compensation magnetic field to compensate for a virtual magnetic field caused by Light shift (Light shift). Meanwhile, in order to debug the sensitivity of the magnetometer, a 10Hz sinusoidal magnetic field signal is added to the Z-direction compensation coil.
And fourthly, optimizing parameters. The SERF magnetometer was operated near zero field by adjusting X, Y, Z the direction of the compensating magnetic field.
Fifthly, after the parameter optimization is completed, the signal output by the balance detector 10 is sent to a phase-locked amplifier, the signal demodulated by the phase-locked amplifier is output to a spectrum analyzer, and the noise shown in fig. 3 is obtainedPower density spectrum. The 10Hz magnetic field signal is used to scale the magnetic field and determine the sensitivity of the magnetometer. The noise power density spectrum of FIG. 3 shows that the sensitivity of the miniaturized optical SERF magnetometer integrated with the VCSEL laser can reach 55fT/Hz at about 10Hz1/2
And sixthly, closing the 10Hz magnetic field signal, enabling a person to lie in the shielding barrel, placing the SERF magnetometer in a heart magnetic field sensitive area, and recording the signal demodulated by the phase-locked amplifier to obtain the magnetocardiogram signal shown in the figure 4.
The invention adopts the VCSEL laser as a light source to replace optical fiber transmission, and realizes the miniaturized SERF magnetometer integrated with the VCSEL laser. Meanwhile, by using an elliptical polarized light optical rotation detection mode, the advantage of simple single-light configuration light path is ensured, the influence of frequency jitter of the VCSEL laser on the sensitivity of the magnetometer is greatly reduced, and the high sensitivity of 55fT/Hz1/2 is achieved. The SERF magnetometer can be used for measuring the magnetic field of the heart of a human body.
In the description herein, reference to the description of the terms "one embodiment," "some embodiments," "one implementation," "a specific implementation," "other implementations," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment, implementation, or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described above may also be combined in any suitable manner in any one or more of the embodiments, examples, or examples. The invention also includes any one or more of the specific features, structures, materials, or characteristics described above, taken alone or in combination.
Although the embodiments of the present invention have been shown and described, it is understood that the embodiments are illustrative and not restrictive, and that those skilled in the art can make changes, modifications, substitutions, variations, deletions, additions or rearrangements of features and elements within the scope of the invention without departing from the spirit and scope of the invention.

Claims (8)

1. A miniaturized optically active SERF magnetometer integrated with a VCSEL laser, characterized in that: comprises a light source part, a light path part, an atomic gas chamber part, a magnetic field part and a signal detection part; wherein, the light source part selects a VCSEL laser (1), and the laser frequency is tuned to a wave band with the optical rotation angle close to the maximum; the light path part adjusts the light emitted by the VCSEL laser (1) into elliptically polarized light; the signal detection part measures the magnitude of an external magnetic field in an optical rotation detection mode.
2. The integrated VCSEL laser miniaturized optical SERF magnetometer of claim 1, wherein the light source section comprises a VCSEL laser (1) and a collimating lens (2); the wavelength of the VCSEL laser (1) is detuned with a rubidium atom D1 line by about 20-30G, and light emitted by the VCSEL laser (1) becomes parallel light through the collimating lens (2).
3. A miniaturized optical SERF magnetometer integrated VCSEL laser according to claim 1 characterized in that the optical path section comprises a linear polarizer (3), an 1/4 wave plate (4), a first polarization maintaining mirror (5) and a second polarization maintaining mirror (6); the parallel light passes through the polarizing film (3) and the 1/4 wave plate (4) and then becomes elliptical polarized light, and the elliptical polarized light passes through the atom air chamber (14) after passing through the first polarization-maintaining reflector (5) and then reaches the signal detection part through the second polarization-maintaining reflector (6).
4. The miniaturized optical SERF magnetometer of integrated VCSEL laser according to claim 1, wherein the atomic gas cell portion comprises an atomic gas cell (14) installed inside a boron nitride heating shell (11), the atomic gas cell (14) is located at the center of the helmholtz coil (13), and the atomic gas cell (14) is uniformly heated by winding a non-magnetic high resistance heating wire (12) on the boron nitride heating shell (11). The boron nitride heating shell (11) is wrapped with heat preservation sponge, the boron nitride heating shell (11) is provided with a light through hole, and the light through hole is blocked by a film coating window sheet (15) so as to isolate the thermal convection between the atomic air chamber (14) and the outside.
5. The miniaturized optical SERF magnetometer of integrated VCSEL laser according to claim 4, wherein the atomic gas cell (14) is filled with87Rb atoms while being charged with 760Torr nitrogen as a buffer and quench gas.
6. The integrated VCSEL laser miniaturized optical SERF magnetometer of claim 4 wherein the atomic gas cell (14) is provided with a thermocouple for real-time detection of the cell temperature.
7. A miniaturized optical SERF magnetometer integrated VCSEL laser according to claim 1 characterized in that the magnetic field part comprises five sets of helmholtz coils (13), each set of helmholtz coils (13) comprising two mutually parallel co-directional square coils, wherein along the X-direction there is one set of helmholtz coils for generating the compensation magnetic field, and the Y-direction and Z-direction comprise two sets of helmholtz coils, one for generating the modulation magnetic field and the other for generating the compensation magnetic field, respectively.
8. The integrated VCSEL laser miniaturized optical SERF magnetometer of claim 1, wherein the signal detecting section comprises 1/2 wave plate (7), wollaston prism (8), focusing lens (9) and balanced detector (10); after light reflected by the second polarization-maintaining reflector (6) passes through an 1/2 wave plate (7) and a Wollaston prism (8), a light beam is divided into two beams, the two beams of light are focused on two Photoelectric Detectors (PD) of a balance detector (10) through a focusing lens (9), an optical rotation angle is measured, linear polarization components of elliptically polarized light reflect the change of atomic spin polarization through the change of the optical rotation angle, and then the size of an external magnetic field is obtained.
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