CN112903587A - Terahertz system and method - Google Patents
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- CN112903587A CN112903587A CN202110192203.5A CN202110192203A CN112903587A CN 112903587 A CN112903587 A CN 112903587A CN 202110192203 A CN202110192203 A CN 202110192203A CN 112903587 A CN112903587 A CN 112903587A
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- 238000000034 method Methods 0.000 title claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims abstract description 44
- 230000033001 locomotion Effects 0.000 claims abstract description 15
- 238000001514 detection method Methods 0.000 abstract description 10
- 239000000523 sample Substances 0.000 description 75
- 238000010586 diagram Methods 0.000 description 10
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 7
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 238000005102 attenuated total reflection Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
- G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
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Abstract
The invention provides a terahertz system and a terahertz method, which comprise the following steps: the terahertz transmission device comprises an annular guide rail, a terahertz emission lens, a sample seat support, a two-dimensional scanning table and a terahertz receiving lens; the annular guide rail is provided with a first sliding block and a second sliding block; the first and second sliding blocks slide along the annular guide rail; the terahertz transmitting lens is rotatably arranged on the first sliding block, and the terahertz receiving lens is rotatably arranged on the second sliding block; one end of the sample holder support is connected with the sample holder, and the other end of the sample holder support is connected with the two-dimensional scanning platform, so that the two-dimensional scanning platform drives the sample holder to perform two-dimensional motion, and the sample holder performs two-dimensional motion relative to the terahertz emission lens and the terahertz receiving lens; the terahertz transmitting lens transmits terahertz waves so that the terahertz waves are reflected or transmitted by a sample placed on the sample seat, and the terahertz waves carrying the sample information are received by the terahertz receiving lens. The terahertz system and the method are used for simultaneously switching different detection modes and performing two-dimensional scanning on a sample.
Description
Technical Field
The invention relates to the technical field of terahertz, in particular to a terahertz system and a terahertz method.
Background
At present, the terahertz time-domain spectroscopy (THz-TDS) and the terahertz attenuated total reflection time-domain spectroscopy (THz-ATR-TDS) are mainly used for substance detection and analysis by utilizing the terahertz spectroscopy, and in the terahertz time-domain spectroscopy, the detection mode is mainly divided into a transmission mode and a reflection mode; in the terahertz attenuated total reflection time-domain spectroscopy technology, the detection mode is mainly divided into a focusing light ATR mode and a parallel light ATR mode, four probes with different functions can be formed aiming at the four modes, and probes in the market are basically only provided with a single mode function or two modes and integrated, so that the application range is limited. The invention integrates the four modes into a whole, integrates the scanning imaging function, and can meet most detection application requirements in the market.
Therefore, it is desirable to be able to solve the problem of how to simultaneously accommodate multiple terahertz detection modes.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention is directed to a terahertz system and method for solving the problem of how to simultaneously accommodate multiple terahertz detection modes in the prior art.
To achieve the above and other related objects, the present invention provides a terahertz system, including: the terahertz transmission device comprises an annular guide rail, a terahertz emission lens, a sample seat support, a two-dimensional scanning table and a terahertz receiving lens; the annular guide rail is provided with a first sliding block and a second sliding block; the first sliding block and the second sliding block slide along the annular guide rail; the terahertz transmitting lens is rotatably arranged on the first sliding block, and the terahertz receiving lens is rotatably arranged on the second sliding block; one end of the sample holder support is connected with the sample holder, and the other end of the sample holder support is connected with the two-dimensional scanning platform, so that the two-dimensional scanning platform drives the sample holder to perform two-dimensional motion, and the sample holder performs two-dimensional motion relative to the terahertz emission lens and the terahertz receiving lens; the terahertz transmitting lens emits terahertz waves so that a sample placed on the sample holder reflects or transmits the terahertz waves, and the terahertz waves carrying sample information are received by the terahertz receiving lens.
In order to achieve the above object, the present invention further provides a terahertz method applied to a terahertz system, where the terahertz system includes: the terahertz transmission device comprises an annular guide rail, a terahertz emission lens, a sample seat support, a two-dimensional scanning table and a terahertz receiving lens; the method comprises the following steps: a first sliding block and a second sliding block are arranged on the annular guide rail; so that the first and second sliders slide along the endless guide rail; the terahertz transmitting lens is rotationally arranged on the first sliding block, and the terahertz receiving lens is rotationally arranged on the second sliding block; connecting one end of the sample holder support with the sample holder, and connecting the other end of the sample holder support with the two-dimensional scanning platform, so that the two-dimensional scanning platform drives the sample holder to perform two-dimensional scanning movement, and the sample holder moves two-dimensionally relative to the terahertz emission lens and the terahertz receiving lens; the terahertz wave is emitted based on the terahertz emitting lens, so that a sample placed on the sample holder reflects or transmits the terahertz wave, and the terahertz wave carrying sample information is received by the terahertz receiving lens.
As described above, the terahertz system and method of the present invention have the following beneficial effects: and simultaneously, different detection modes can be switched to perform two-dimensional scanning on the sample.
Drawings
FIG. 1 is a schematic structural diagram of a terahertz system according to an embodiment of the invention;
FIG. 2 is a schematic diagram of a THz-ATR-TDS parallel light ATR mode of the terahertz system according to an embodiment of the present invention;
fig. 3 is a schematic diagram illustrating a structure of a THz-ATR-TDS parallel light ATR mode optical path in an embodiment of the terahertz system of the present invention;
FIG. 4 is a schematic diagram of a THz-ATR-TDS focusing light ATR mode of the terahertz system according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of the structure of the THz-ATR-TDS focusing light ATR mode optical path in one embodiment of the terahertz system of the present invention;
FIG. 6 is a schematic diagram of a THz-TDS transmission mode of the terahertz system in one embodiment of the present invention;
FIG. 7 is a schematic diagram of a THz-TDS transmission mode optical path in an embodiment of the terahertz system of the present invention;
FIG. 8 is a schematic diagram of the THz-TDS reflection mode of the terahertz system according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of a THz-TDS reflective mode optical path in an embodiment of the terahertz system of the present invention;
fig. 10 is a schematic flow chart illustrating a terahertz method according to an embodiment of the present invention.
Description of the element reference numerals
11 circular guide rail
12 terahertz emission lens
121 terahertz transmitting terminal
122 first reflector
123 first transmission mirror
13 sample holder
14 sample holder support
15 two-dimensional scanning table
16 terahertz receiving lens
161 second transmission mirror
162 second reflector
163 terahertz receiving end
17 trapezoidal prism
18 samples
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, so that the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, the type, quantity and proportion of the components in actual implementation can be changed freely, and the layout of the components can be more complicated.
The terahertz system and the method are used for simultaneously switching different detection modes and performing two-dimensional scanning on a sample.
As shown in fig. 1, in an embodiment, the terahertz system of the present invention includes: the terahertz transmission device comprises a ring-shaped guide rail 11, a terahertz transmission lens 12, a sample holder 13, a sample holder support 14, a two-dimensional scanning platform 15 and a terahertz receiving lens 16. A first sliding block and a second sliding block are arranged on the annular guide rail 11; the first and second sliders slide along the endless guide rail 11; the terahertz emission lens 12 is rotatably arranged on the first slide block, and the terahertz receiving lens 16 is rotatably arranged on the second slide block; one end of the sample holder support 14 is connected with the sample holder 13, and the other end is connected with the two-dimensional scanning stage 15, so that the two-dimensional scanning stage 15 drives the sample holder 13 to perform two-dimensional motion, so that the sample holder 13 performs two-dimensional motion relative to the terahertz emission lens 12 and the terahertz receiving lens 16; the terahertz emission lens 12 emits terahertz waves so that the terahertz waves are reflected or transmitted by a sample placed on the sample holder 13, so that the terahertz waves carrying sample information are received by the terahertz reception lens 16. The two-dimensional scanning platform 15 is controlled to drive the sample holder 13 to do two-dimensional linear motion, so that the sample placed in the sample holder 13 does two-dimensional motion relative to the terahertz transmitting lens 12 and the terahertz receiving lens 16, and the function of scanning the sample by the terahertz transmitting lens 12 and the terahertz receiving lens 16 can be realized. Specifically, the two-dimensional motion refers to motion in the x-axis direction and in the direction perpendicular to the plane of the x-axis and the y-axis.
Specifically, as shown in fig. 2, in an embodiment, the terahertz system of the present invention includes: the terahertz emission lens 12 includes: the terahertz wave detector comprises a first shell, a terahertz wave transmitting end 121, a first reflector 122 and a light outlet; the terahertz transmitting end 121 and the first reflector 122 are arranged in the first shell; the terahertz transmitting end 121 is used for generating terahertz waves; the first reflector 122 is configured to reflect the terahertz waves to the light outlet. The terahertz receiving lens 16 includes: the second shell, the light inlet, the second reflector 162 and the terahertz receiving end 163; the second mirror 162 and the terahertz receiving end 163 are arranged in the second shell; the second mirror 162 is configured to reflect the terahertz waves coming from the light inlet to the terahertz receiving end 163. The specific light path diagram is shown in fig. 3. The terahertz emission end 121 and the first reflector 122 are arranged in a first shell; generating a terahertz wave based on the terahertz emitting end 121; the terahertz waves are reflected to a light outlet based on the first reflecting mirror 122. Thus, the terahertz waves are incident on the sample, and the sample 8 placed on the sample holder 13 reflects the terahertz waves, so that the terahertz waves carrying the sample information are received by the terahertz receiving lens 16. Disposing the second mirror 162 and the terahertz receiving end 163 within the second housing; the terahertz waves coming from the light inlet are reflected to the terahertz receiving end 163 by the second mirror 162. The first mirror 122 and the second mirror 162 are off-axis parabolic mirrors. Further comprising placing a trapezoidal prism 17 on the sample holder. Thus, a THz-ATR-TDS parallel light ATR mode optical path is formed.
Specifically, the terahertz emission lens 12 further includes: a first transmission mirror 123; the first transmission mirror 123 is detachably disposed at the light outlet, and is configured to focus the terahertz waves to the sample holder. A second transmission mirror 161; the second transmission mirror 161 is detachably disposed at the light inlet, and is configured to collimate the terahertz wave to the second reflection mirror 162.
Specifically, as shown in fig. 4, in an embodiment, the terahertz system of the present invention includes: the terahertz emission lens 12 further includes: a first transmission mirror 123; the first transmission mirror 123 is detachably disposed at the light outlet, and is configured to focus the terahertz waves to the sample holder. A second transmission mirror 161; the second transmission mirror 161 is detachably disposed at the light inlet, and is configured to collimate the terahertz wave to the second reflection mirror 162. As shown in fig. 5, the terahertz emission end 121 and the first reflector 122 are disposed in a first housing; generating a terahertz wave based on the terahertz emitting end 121; the terahertz waves are reflected to a light outlet based on the first reflecting mirror 122. The first transmission mirror 123 is detachably disposed at the light outlet, and is configured to focus the terahertz waves to the sample holder. Thereby, the terahertz wave is incident on the sample. The terahertz wave is reflected by the sample placed on the sample holder 13, so that the terahertz wave carrying the sample information is received by the terahertz receiving lens 16. The second transmission mirror 161 is detachably disposed at the light inlet, and is used for collimating the terahertz waves to the second reflection mirror 162. Disposing the second mirror 162 and the terahertz receiving end 163 within the second housing; the terahertz waves coming from the light inlet are reflected to the terahertz receiving end 163 by the second mirror 162. The first mirror 122 and the second mirror 162 are off-axis parabolic mirrors. Further comprising placing a trapezoidal prism 17 on the sample holder. Thus, an ATR mode optical path of THz-ATR-TDS focusing light is formed.
Specifically, as shown in fig. 6, in an embodiment, the terahertz system of the present invention includes: the terahertz emission lens 12 further includes: a first transmission mirror 123; the first transmission mirror 123 is detachably disposed at the light outlet, and is configured to focus the terahertz waves to the sample holder. A second transmission mirror 161; the second transmission mirror 161 is detachably disposed at the light inlet, and is configured to collimate the terahertz wave to the second reflection mirror 162. As shown in fig. 7, the terahertz emission end 121 and the first reflector 122 are disposed in a first housing; generating a terahertz wave based on the terahertz emitting end 121; the terahertz waves are reflected to a light outlet based on the first reflecting mirror 122. The first transmission mirror 123 is detachably disposed at the light outlet, and is configured to focus the terahertz waves to the sample holder. The terahertz emission lens 12 is adjusted so that the terahertz waves coming out of the terahertz emission lens 12 can penetrate through the sample. The terahertz wave is transmitted by the sample placed on the sample holder 13, so that the terahertz wave carrying the sample information is received by the terahertz receiving lens 16. The second transmission mirror 161 is detachably disposed at the light inlet, and is used for collimating the terahertz waves to the second reflection mirror 162. Disposing the second mirror 162 and the terahertz receiving end 163 within the second housing; the terahertz waves coming from the light inlet are reflected to the terahertz receiving end 163 by the second mirror 162. The first mirror 122 and the second mirror 162 are off-axis parabolic mirrors. The sample is capable of transmitting terahertz waves, so that a THz-TDS transmission mode optical path is formed.
Specifically, as shown in fig. 8, in an embodiment, the terahertz system of the present invention includes: a first transmission mirror 123; the first transmission mirror 123 is detachably disposed at the light outlet, and is configured to focus the terahertz waves to the sample holder. A second transmission mirror 161; the second transmission mirror 161 is detachably disposed at the light inlet, and is configured to collimate the terahertz wave to the second reflection mirror 162. As shown in fig. 9, the terahertz emission end 121 and the first reflector 122 are disposed in a first housing; generating a terahertz wave based on the terahertz emitting end 121; the terahertz waves are reflected to a light outlet based on the first reflecting mirror 122. The first transmission mirror 123 is detachably disposed at the light outlet, and is configured to focus the terahertz waves to the sample holder. The terahertz emission lens 12 is adjusted so that the sample reflects the terahertz waves coming out of the terahertz emission lens 12. The terahertz wave is reflected by the sample placed on the sample holder 13, so that the terahertz wave carrying the sample information is received by the terahertz receiving lens 16. The second transmission mirror 161 is detachably disposed at the light inlet, and is used for collimating the terahertz waves to the second reflection mirror 162. Disposing the second mirror 162 and the terahertz receiving end 163 within the second housing; the terahertz waves coming from the light inlet are reflected to the terahertz receiving end 163 by the second mirror 162. The first mirror 122 and the second mirror 162 are off-axis parabolic mirrors. The sample is capable of reflecting terahertz waves, so that a THz-TDS reflection mode light path is formed.
As shown in fig. 10, in an embodiment, the terahertz method of the present invention is applied to a terahertz system, and the terahertz system includes: the terahertz transmission device comprises an annular guide rail, a terahertz emission lens, a sample seat support, a two-dimensional scanning table and a terahertz receiving lens; the method comprises the following steps:
step S21, arranging a first sliding block and a second sliding block on the annular guide rail; so that the first and second sliders slide along the endless guide rail.
And step S22, rotationally arranging the terahertz emission lens on the first slide block, and rotationally arranging the terahertz receiving lens on the second slide block.
Step S23, connecting one end of the sample holder bracket with the sample holder, and connecting the other end of the sample holder bracket with the two-dimensional scanning platform, so that the two-dimensional scanning platform drives the sample holder to perform two-dimensional scanning movement, and the sample holder moves two-dimensionally relative to the terahertz emission lens and the terahertz receiving lens.
Step S24, sending out the terahertz wave based on the terahertz emission lens, so that the terahertz wave is reflected or transmitted by the sample placed on the sample holder, and the terahertz wave carrying the sample information is received by the terahertz receiving lens.
Specifically, the method further comprises the following steps: arranging the terahertz emission end and a first reflector in a first shell; generating terahertz waves based on the terahertz transmitting end; reflecting the terahertz waves to a light outlet based on the first reflector.
Specifically, the method further comprises the following steps: and the first transmission mirror is detachably arranged at the light outlet and is used for focusing the terahertz waves to the sample holder.
Specifically, the method further comprises the following steps: arranging a second reflector and a terahertz receiving end in a second shell; the terahertz waves coming from the light inlet are reflected to the terahertz receiving end based on the second reflector.
Specifically, the method further comprises the following steps: and the second transmission mirror is detachably arranged at the light inlet and is used for collimating the terahertz waves to the second reflection mirror.
It should be noted that the principle of the method corresponds to the structure of the terahertz system one by one, and therefore, the details are not repeated herein.
In summary, the terahertz system and the method of the present invention are used for simultaneously providing a switching mechanism capable of switching different detection modes to perform two-dimensional scanning on a sample. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A terahertz system, characterized in that the system comprises: the terahertz transmission device comprises an annular guide rail, a terahertz emission lens, a sample seat support, a two-dimensional scanning table and a terahertz receiving lens;
the annular guide rail is provided with a first sliding block and a second sliding block; the first sliding block and the second sliding block slide along the annular guide rail;
the terahertz transmitting lens is rotatably arranged on the first sliding block, and the terahertz receiving lens is rotatably arranged on the second sliding block;
one end of the sample holder support is connected with the sample holder, and the other end of the sample holder support is connected with the two-dimensional scanning platform, so that the two-dimensional scanning platform drives the sample holder to perform two-dimensional motion, and the sample holder performs two-dimensional motion relative to the terahertz emission lens and the terahertz receiving lens;
the terahertz transmitting lens emits terahertz waves so that a sample placed on the sample holder reflects or transmits the terahertz waves, and the terahertz waves carrying sample information are received by the terahertz receiving lens.
2. The terahertz system of claim 1, wherein: the terahertz emission lens includes: the terahertz wave detector comprises a first shell, a terahertz transmitting end, a first reflector and a light outlet;
the terahertz transmitting end and the first reflector are arranged in the first shell;
the terahertz transmitting end is used for generating terahertz waves;
the first reflecting mirror is used for reflecting the terahertz waves to the light outlet.
3. The terahertz system of claim 2, wherein: the terahertz emission lens further comprises: a first transmission mirror;
the first transmission mirror is detachably arranged at the light outlet and used for focusing the terahertz waves to the sample holder.
4. The terahertz system of claim 1, wherein: the terahertz receiving lens includes: the terahertz wave detector comprises a second shell, a light inlet, a second reflector and a terahertz receiving end;
the second reflector and the terahertz receiving end are arranged in the second shell;
the second reflector is used for reflecting the terahertz waves coming from the light inlet to the terahertz receiving end.
5. The terahertz system of claim 5, wherein: the terahertz receiving lens further comprises: a second transmission mirror;
the second transmission mirror is detachably arranged at the light inlet and used for collimating the terahertz waves to the second reflection mirror.
6. A terahertz method is applied to a terahertz system, and the terahertz system comprises the following steps: the terahertz transmission device comprises an annular guide rail, a terahertz emission lens, a sample seat support, a two-dimensional scanning table and a terahertz receiving lens; the method comprises the following steps:
a first sliding block and a second sliding block are arranged on the annular guide rail; so that the first and second sliders slide along the endless guide rail;
the terahertz transmitting lens is rotationally arranged on the first sliding block, and the terahertz receiving lens is rotationally arranged on the second sliding block;
connecting one end of the sample holder support with the sample holder, and connecting the other end of the sample holder support with the two-dimensional scanning platform, so that the two-dimensional scanning platform drives the sample holder to perform two-dimensional scanning movement, and the sample holder moves two-dimensionally relative to the terahertz emission lens and the terahertz receiving lens;
the terahertz wave is emitted based on the terahertz emitting lens, so that a sample placed on the sample holder reflects or transmits the terahertz wave, and the terahertz wave carrying sample information is received by the terahertz receiving lens.
7. The terahertz method of claim 6, wherein: further comprising the steps of:
arranging the terahertz emission end and a first reflector in a first shell;
generating terahertz waves based on the terahertz transmitting end;
reflecting the terahertz waves to a light outlet based on the first reflector.
8. The terahertz method of claim 7, wherein: further comprising the steps of:
and the first transmission mirror is detachably arranged at the light outlet and is used for focusing the terahertz waves to the sample holder.
9. The terahertz method of claim 6, wherein: further comprising the steps of:
arranging a second reflector and a terahertz receiving end in a second shell;
the terahertz waves coming from the light inlet are reflected to the terahertz receiving end based on the second reflector.
10. The terahertz method of claim 9, wherein: further comprising the steps of:
and the second transmission mirror is detachably arranged at the light inlet and is used for collimating the terahertz waves to the second reflection mirror.
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| CN202110192203.5A CN112903587A (en) | 2021-02-19 | 2021-02-19 | Terahertz system and method |
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| CN202110192203.5A CN112903587A (en) | 2021-02-19 | 2021-02-19 | Terahertz system and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113933262A (en) * | 2021-09-26 | 2022-01-14 | 华太极光光电技术有限公司 | Modular terahertz detection system with selectable functions |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113933262A (en) * | 2021-09-26 | 2022-01-14 | 华太极光光电技术有限公司 | Modular terahertz detection system with selectable functions |
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