CN112899619A - High-hardness abrasion-resistant antibacterial nano composite coating and preparation method thereof - Google Patents

High-hardness abrasion-resistant antibacterial nano composite coating and preparation method thereof Download PDF

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CN112899619A
CN112899619A CN202110068302.2A CN202110068302A CN112899619A CN 112899619 A CN112899619 A CN 112899619A CN 202110068302 A CN202110068302 A CN 202110068302A CN 112899619 A CN112899619 A CN 112899619A
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composite coating
coating
metal
hardness
nitride
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李金龙
赵春蕾
黄伟东
左义德
姚斌
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Shaoxing Jiazhuo New Material Technology Co ltd
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Shaoxing Jiazhuo New Material Technology Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

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  • Engineering & Computer Science (AREA)
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Abstract

The invention discloses a high-hardness abrasion-resistant antibacterial nano composite coating and a preparation method thereof, wherein the coating comprises a metal layer, nano titanium dioxide, a nitride composite coating, nano metal, a metal composite coating and a nitride hard coating, and the metal composite coating is arranged on one side of the nitride hard coating, and the invention has the beneficial effects that: the invention adopts the physical vapor deposition technology to prepare the high-hardness abrasion-resistant antibacterial nano composite coating, and trace amount of Ag and Cu metal ions which can be controllably released are doped in the manufacturing process, so that the coating has good broad-spectrum antibacterial property and heat resistance, the coating has excellent performances of good dispersibility, small drug resistance and the like in use, the coating has good wear resistance and excellent antibacterial protection performance, can adapt to the surface of key medical and health instruments, simultaneously the performance of preventing biofouling is also well improved, the service life of the coating can be prolonged, and the application range is wide.

Description

High-hardness abrasion-resistant antibacterial nano composite coating and preparation method thereof
Technical Field
The invention relates to the technical field of composite coatings, in particular to a high-hardness abrasion-resistant antibacterial nano composite coating and a preparation method thereof.
Background
The improvement of living standard leads people to attach more importance to the safety and sanitation in daily life, along with the progress development of urbanization, the population density of cities is higher and higher, the hidden danger of spreading viruses through bacteria is higher and higher, the probability of spreading the viruses in public places is higher, public transport means such as buses, subways and the like are crowded and easy to spread the viruses, so that the public transport means at present need to be sterilized regularly, people can clean hands in time after taking the public transport means, the safety and sanitation in family life are gradually attached importance to people, on the basis of the common knowledge that diseases enter from the mouth, the kitchen utensils represented by vegetable washing basins are attached more importance to people, and because the vegetable washing basins are in contact with food materials and are in a moist environment, the bacteria are easy to breed, the use of disinfectants for disposal can also lead to concerns about the safety of the disinfectants, which all contribute to the development of antimicrobial coating technology.
The antibacterial coating is prepared by adding an antibacterial agent into the coating, so that the coating has antibacterial performance, and when the antibacterial coating is used in families, the bacterial density of the surfaces of rooms and furniture and household appliances can be effectively reduced; when used in public places, can reduce the bacterial density of public facilities in the public places, and reduce the possibility of cross infection and contact infection; when the antibacterial coating is used in food processing enterprises and medicine production workshops, the possibility of microbial contamination of food or medicines can be prevented, and the product quality is improved, but the existing antibacterial coating is not doped with trace amount of Ag or Cu metal which can be controllably released in the manufacturing process, so that ions do not have broad-spectrum antibacterial property, the heat resistance and the dispersibility are poor in use, the wear resistance and the biofouling resistance of the coating are poor, and the service life is short.
Disclosure of Invention
The invention aims to provide a high-hardness abrasion-resistant antibacterial nano composite coating and a preparation method thereof, so as to solve the problems in the background technology.
In order to achieve the above purpose, the present invention provides a high-hardness abrasion-resistant antibacterial nanocomposite coating, including a metal layer, nano titanium dioxide, a nitride composite coating, a nano metal, a metal composite coating and a nitride hard coating, wherein the metal composite coating is disposed on one side of the nitride hard coating, the nitride composite coating is disposed on one side of the metal composite coating away from the nitride hard coating, the metal layer is disposed on one side of the nitride composite coating away from the metal composite coating, the nano metal is uniformly distributed in the hard coating, the atomic fraction of the doped Ag of the metal composite coating is 1 to 8 at.%, and the atomic fraction of the doped Cu is 3 to 12 at.%.
Preferably, the nitride hard coating is a coating containing Ag or Cu and prepared by adopting physical vapor deposition technology for codeposition, and the process condition is that the vacuum degree of a back bottom is 3 multiplied by 10-5Pa～7×10-5Pa, the target current applied to the metal target is 60-80A, the target current applied to the soft metal target is 20-40A, the deposition bias voltage is-20V-100V, the temperature of the reaction cavity is 350-450 ℃, the flow rate of the protective gas is 200-400 sccm, the flow rate of nitrogen is 300-800 sccm, the rotating speed of the rotating disc is 1-5 rpm, and the deposition time is 60-150 min; preferably, the protective gas comprises an inert gas, particularly preferably argon.
Preferably, the metal layer comprises Ti, Ag or Cu, and the Ti, Ag or Cu is each 99.9 at.% pure.
A preparation method of a high-hardness abrasion-resistant antibacterial nano composite coating comprises the following steps:
s1, cleaning the surface of the sample or part to be plated, removing oil stain, impurities and rust on the surface by sand blasting or polishing treatment to ensure that the surface roughness of the part is 2.5-3.5 mu m, then respectively carrying out ultrasonic cleaning by using reagents such as petroleum ether, acetone and alcohol, wherein the sample needs to be cleaned for more than three times, and finally cleaning the surface of the sample by using deionized water and drying the sample by using a nitrogen gun;
s2, putting the washed sample into a reaction cavity, vacuumizing to 3 x 10 < -5 > Pa-7 x 10 < -5 > Pa, and heating at 350-450 ℃;
s3, placing the cleaning target and the sample into a cleaning cavity, sputtering and cleaning the target for 5-10min, and performing ion etching on the sample for 15-20 min;
s4, preparing and depositing the composite coating containing the Ag or Cu nitride, adding nano titanium dioxide in the preparation process, and controlling the content of Ag or Cu by regulating and controlling Ag or Cu target current.
Preferably, argon is used as working gas for the cleaning cavity and the target, bias voltages of 900V, 1100V and 1200V are sequentially used during ion etching, and the etching time is 5-10min each time.
Preferably, the nitride hard coating comprises Ti-based binary, ternary and quaternary nitrides, and is one or more of TiN, TiAlN, TiCN, TiAlCN and TiSiCN.
Preferably, the nitride composite coating has hardness of 35GPa-40GPa and wear rate of 10 GPa by adjusting the content of Ag or Cu-6mm3Of the order of/Nm.
Preferably, the reaction chamber is cooled to below 100 ℃ after the high-hardness antibacterial composite coating is deposited and formed, and finally the high-hardness antibacterial nano composite coating material is taken out and deposited.
Compared with the prior art, the invention has the beneficial effects that: the invention adopts the physical vapor deposition technology to prepare the high-hardness abrasion-resistant antibacterial nano composite coating, and trace amount of Ag and Cu metal ions which can be controllably released are doped in the manufacturing process, so that the coating has good broad-spectrum antibacterial property and heat resistance, the coating has excellent performances of good dispersibility, small drug resistance and the like in use, the coating has good wear resistance and excellent antibacterial protection performance, can adapt to the surface of key medical and health instruments, simultaneously the performance of preventing biofouling is also well improved, the service life of the coating can be prolonged, and the application range is wide.
Drawings
For ease of illustration, the invention is described in detail by the following detailed description and the accompanying drawings.
FIG. 1 is a schematic representation of the structure of the coating of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the following technical solutions are adopted in the present embodiment:
the invention provides a technical scheme that: the high-hardness wear-resistant antibacterial nano composite coating comprises a metal layer, nano titanium dioxide, a nitride composite coating, a nano metal, a metal composite coating and a nitride hard coating, wherein the metal composite coating is arranged on one side of the nitride hard coating, the nitride composite coating is arranged on one side, away from the nitride hard coating, of the metal composite coating, the metal layer is arranged on one side, away from the metal composite coating, of the nitride composite coating, the nano metal is uniformly distributed in the hard coating, the atomic fraction of Ag doped in the metal composite coating is 1-8 at.%, and the atomic fraction of Cu doped in the metal composite coating is 3-12 at.%.
Wherein the nitride hard coating is a coating containing Ag or Cu prepared by adopting physical vapor deposition technology codeposition, and the process condition is that the vacuum degree of the back bottom is 3 multiplied by 10-5Pa～7×10-5Pa, target current applied on the metal target is 60-80A, target current applied on the soft metal target is 20-40A, deposition bias voltage is-20V-100V, temperature of the reaction cavity is 350-450 ℃, and protectiveness is achievedThe gas flow is 200 sccm-400 sccm, the nitrogen flow is 300 sccm-800 sccm, the rotating speed of the rotating disc is 1 rpm-5 rpm, and the deposition time is 60 min-150 min; preferably, the protective gas comprises an inert gas, particularly preferably argon.
Wherein the metal layer comprises Ti, Ag or Cu, and the purity of the Ti, Ag or Cu is 99.9 at.%.
A preparation method of a high-hardness abrasion-resistant antibacterial nano composite coating is characterized by comprising the following steps: the method comprises the following steps:
s1, cleaning the surface of the sample or part to be plated, removing oil stain, impurities and rust on the surface by sand blasting or polishing treatment to ensure that the surface roughness of the part is 2.5-3.5 mu m, then respectively carrying out ultrasonic cleaning by using reagents such as petroleum ether, acetone and alcohol, wherein the sample needs to be cleaned for more than three times, and finally cleaning the surface of the sample by using deionized water and drying the sample by using a nitrogen gun;
s2, putting the washed sample into a reaction cavity, vacuumizing to 3 x 10 < -5 > Pa-7 x 10 < -5 > Pa, and heating at 350-450 ℃;
s3, placing the cleaning target and the sample into a cleaning cavity, sputtering and cleaning the target for 5-10min, and performing ion etching on the sample for 15-20 min;
s4, preparing and depositing the composite coating containing the Ag or Cu nitride, adding nano titanium dioxide in the preparation process, and controlling the content of Ag or Cu by regulating and controlling Ag or Cu target current.
Argon is used as working gas for the cleaning cavity and the target, bias voltages of 900V, 1100V and 1200V are sequentially used during ion etching, and the etching time is 5-10min each time.
The nitride hard coating comprises Ti-based binary, ternary and quaternary nitrides, and is one or more of TiN, TiAlN, TiCN, TiAlCN and TiSiCN.
Wherein the nitride composite coating has hardness of 35GPa-40GPa and wear rate of 10 GPa by adjusting the content of Ag or Cu-6mm3Of the order of/Nm.
After the reaction cavity is deposited to form the high-hardness antibacterial composite coating, the temperature is reduced to be below 100 ℃, and finally the high-hardness antibacterial nano composite coating material is taken out and deposited.
Embodiment 1, a high-hardness abrasion-resistant antibacterial nano composite coating and a preparation method thereof, which adopt a multi-arc ion plating technology and mainly comprise the following steps:
s1, mechanically polishing the surface of the titanium alloy sample to be plated, ultrasonically cleaning the surface of the titanium alloy sample for 2 times by using acetone and alcohol respectively, wherein the ultrasonic time is 15min each, and finally cleaning the surface of the sample by using deionized water and drying the sample by using a nitrogen gun;
s2, loading the cleaned sample into a cavity, vacuumizing to 4 x 10 < -5 > mbar of vacuum degree, and heating at 450 ℃;
s3, sputtering a target and etching a sample, wherein the target is sputtered and cleaned for 5min, the titanium alloy sample is subjected to ion etching for 15min, and bias voltages adopted by the ion etching are 900V, 1100V and 1200V in sequence;
s4, preparing the high-hardness TiN/Ag abrasion-resistant antibacterial nano composite functional coating, wherein a Ti target and an Ag target with the purity of 99.9 at.% are adopted, high-purity nitrogen is adopted as gas, the argon flow is 200sccm, the nitrogen flow is 700sccm, the Ti target current is 70A, the Ag target current is 30A, the deposition bias voltage is-30V, the total deposition time is 120min, and the rotating speed of a rotating disc is 2 rpm.
Embodiment 2a high-hardness abrasion-resistant antibacterial nano composite coating and a preparation method thereof, which adopt a multi-arc ion plating technology and mainly comprise the following steps:
s1, mechanically polishing the surface of the titanium alloy sample to be plated, ultrasonically cleaning the surface of the titanium alloy sample for 2 times by using acetone and alcohol respectively, wherein the ultrasonic time is 15min each, and finally cleaning the surface of the sample by using deionized water and drying the sample by using a nitrogen gun;
s2, loading the cleaned sample into a cavity, vacuumizing to 4 x 10 < -5 > mbar of vacuum degree, and heating at 450 ℃;
s3, sputtering the target and etching the sample. Sputtering and cleaning a target material for 5min, and performing ion etching on the titanium alloy sample for 15min, wherein bias voltages adopted by the ion etching are 900V, 1100V and 1200V in sequence;
s4, preparing the high-hardness TiN/Ag abrasion-resistant antibacterial nano composite functional coating. The method is characterized in that a Ti target and an Ag target with the purity of 99.9 at.% are adopted, high-purity nitrogen is adopted as gas, the argon flow is 200sccm, the nitrogen flow is 700sccm, the Ti target current is 70A, the Cu target current is 35A, the deposition bias voltage is-30V, the total deposition time is 120min, and the rotating speed of a rotating disc is 2 rpm.
Furthermore, the terms "first", "second", "third", "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, whereby the features defined as "first", "second", "third", "fourth" may explicitly or implicitly include at least one such feature.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," "secured," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. The high-hardness wear-resistant antibacterial nano composite coating is characterized by comprising a metal layer, nano titanium dioxide, a nitride composite coating, nano metal, a metal composite coating and a nitride hard coating, wherein the metal composite coating is arranged on one side of the nitride hard coating, the nitride composite coating is arranged on one side of the metal composite coating, which is far away from the nitride hard coating, the metal layer is arranged on one side of the nitride composite coating, which is far away from the metal composite coating, the nano metal is uniformly distributed in the hard coating, the atomic fraction of Ag doped in the metal composite coating is 1-8 at.%, and the atomic fraction of Cu doped in the metal composite coating is 3-12 at.%.
2. The high-hardness abrasion-resistant antibacterial nanocomposite coating according to claim 1, wherein: the nitride hard coating is a coating containing Ag or Cu prepared by adopting physical vapor deposition technology codeposition, and the process condition is that the vacuum degree of the back bottom is 3 multiplied by 10-5Pa～7×10-5Pa, the target current applied to the metal target is 60-80A, the target current applied to the soft metal target is 20-40A, the deposition bias voltage is-20V-100V, the temperature of the reaction cavity is 350-450 ℃, the flow rate of the protective gas is 200-400 sccm, the flow rate of nitrogen is 300-800 sccm, the rotating speed of the rotating disc is 1-5 rpm, and the deposition time is 60-150 min; preferably, the protective gas comprises an inert gas, particularly preferably argon.
3. The high-hardness abrasion-resistant antibacterial nanocomposite coating according to claim 1, wherein: the metal layer comprises Ti, Ag or Cu, and the purity of the Ti, Ag or Cu is 99.9 at.%.
4. A preparation method of a high-hardness abrasion-resistant antibacterial nano composite coating is characterized by comprising the following steps: the method comprises the following steps:
s1, cleaning the surface of the sample or part to be plated, removing oil stain, impurities and rust on the surface by sand blasting or polishing treatment to ensure that the surface roughness of the part is 2.5-3.5 mu m, then respectively carrying out ultrasonic cleaning by using reagents such as petroleum ether, acetone and alcohol, wherein the sample needs to be cleaned for more than three times, and finally cleaning the surface of the sample by using deionized water and drying the sample by using a nitrogen gun;
s2, putting the washed sample into a reaction cavity, vacuumizing to 3 x 10 < -5 > Pa-7 x 10 < -5 > Pa, and heating at 350-450 ℃;
s3, placing the cleaning target and the sample into a cleaning cavity, sputtering and cleaning the target for 5-10min, and performing ion etching on the sample for 15-20 min;
s4, preparing and depositing the composite coating containing the Ag or Cu nitride, adding nano titanium dioxide in the preparation process, and controlling the content of Ag or Cu by regulating and controlling Ag or Cu target current.
5. The method for preparing the high-hardness abrasion-resistant antibacterial nano composite coating according to claim 4, wherein the method comprises the following steps: argon is used as working gas for the cleaning cavity and the target, bias voltages of 900V, 1100V and 1200V are sequentially used during ion etching, and the etching time is 5-10min each time.
6. The method for preparing the high-hardness abrasion-resistant antibacterial nano composite coating according to claim 4, wherein the method comprises the following steps: the nitride hard coating comprises Ti-based binary, ternary and quaternary nitrides, and is one or more of TiN, TiAlN, TiCN, TiAlCN and TiSiCN.
7. The method for preparing the high-hardness abrasion-resistant antibacterial nano composite coating according to claim 4, wherein the method comprises the following steps: the nitride composite coating has the hardness of 35GPa-40GPa and the wear rate of 10 GPa by adjusting the content of Ag or Cu-6mm3Of the order of/Nm.
8. The method for preparing the high-hardness abrasion-resistant antibacterial nano composite coating according to claim 4, wherein the method comprises the following steps: after the reaction cavity is deposited to form the high-hardness antibacterial composite coating, the temperature is reduced to be below 100 ℃, and finally the high-hardness antibacterial nano composite coating material is taken out and deposited.
CN202110068302.2A 2021-01-19 2021-01-19 High-hardness abrasion-resistant antibacterial nano composite coating and preparation method thereof Pending CN112899619A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
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CN111074213A (en) * 2018-10-22 2020-04-28 中国科学院宁波材料技术与工程研究所 Nano composite coating imitating shell stacking type pearl layer, preparation method and application thereof

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Application publication date: 20210604