CN112872582A - Continuously adjustable large-size shaping system and method - Google Patents
Continuously adjustable large-size shaping system and method Download PDFInfo
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- CN112872582A CN112872582A CN202011601790.0A CN202011601790A CN112872582A CN 112872582 A CN112872582 A CN 112872582A CN 202011601790 A CN202011601790 A CN 202011601790A CN 112872582 A CN112872582 A CN 112872582A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
Abstract
The invention relates to the technical field of laser processing, and provides a continuously adjustable large-size shaping system which comprises a light beam shaping device, a focusing lens and a continuously adjustable wide-angle variable-magnification angle amplifying lens group capable of adjusting the diffraction angle of the light beam shaping device, wherein the light beam shaping device, the continuously adjustable wide-angle variable-magnification angle amplifying lens group and the focusing lens are sequentially arranged along the direction of a light path; the continuously adjustable wide-angle zoom angle magnifying lens group comprises a biconvex lens, a meniscus lens, a reversed meniscus lens and a biconcave lens which are sequentially arranged along the direction of a light path, wherein the convex side of the meniscus lens faces towards the biconvex lens, and the convex side of the reversed meniscus lens faces towards the biconcave lens. Also provides a continuously adjustable large-size shaping method. The invention adjusts the diffraction angle of the shaping lens through the continuously adjustable wide-angle zoom lens, and the light beam is converged through the focusing lens to obtain the required shaped light beam after adjusting different magnification according to the actual use requirement.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a continuously adjustable large-size shaping system and a method.
Background
With the development of the technical field of laser processing, lasers are applied to various fields of national economy, but because the distribution of light spots of the lasers is in Gaussian distribution, namely the energy at the center is far higher than that at the edge, which can affect processing in many applications, different requirements are put forward on the distribution of the energy of the laser light spots with the continuous development of the laser application, so the shaping of the laser light spots is carried out, and many shaping methods of the laser light spots are provided, including refraction methods, binary optical methods, holographic methods, micro-lens array methods, aspheric lens groups, birefringent lens groups and the like, and finally the light spots can be shaped into the distribution of the lattice light spots of the same plane, the distribution of the lattice light spots of three-dimensional space, annular light spots, flat-top light spots, longitudinal multi-focus light spots, light spots of various shapes and the like, and the formation of the light spots is basically based on a scalar model, the light beam is modulated and shaped by a vector model or a light model, the scalar model needs to use different algorithms to carry out unlimited iteration, the time is very time-consuming, the scalar model is easy to fall into local minimum and is not suitable for diffraction elements of sub-wavelength levels, the vector fuzzy control iterative algorithm of the vector model can solve the problem, but the model has a lot of subjective data, the light model can use the existing optical design software, but needs external extension, namely, some programming is added on the basis of the existing software, the designed shaping device is fixed, if one parameter is changed, a new round of demonstration is designed to processing, however, the light model is diversified in practical application, has a lot of uncertain factors and cannot be completely limited to use, and therefore, the light beam is used in reality and brings a lot of limitations.
Disclosure of Invention
The invention aims to provide a continuously adjustable large-size shaping system and a method, which solve the problem that the diffraction angle of a light beam is fixed and unadjustable after being shaped by a shaping light path.
In order to achieve the above purpose, the embodiments of the present invention provide the following technical solutions: a continuously adjustable large-size shaping system comprises a light beam shaping device, a focusing lens and a continuously adjustable wide-angle variable-magnification angle amplifying lens group capable of adjusting the diffraction angle of the light beam shaping device, wherein the light beam shaping device, the continuously adjustable wide-angle variable-magnification angle amplifying lens group and the focusing lens are sequentially arranged along the direction of a light path; the continuously adjustable wide-angle zoom angle magnifying lens group comprises a biconvex lens, a meniscus lens, a reversed meniscus lens and a biconcave lens which are sequentially arranged along the direction of a light path, wherein the convex side of the meniscus lens faces towards the biconvex lens, and the convex side of the reversed meniscus lens faces towards the biconcave lens.
Further, the distance between the meniscus lens and the inverted meniscus lens is adjustable, and the adjustment range is 25-414 mm.
Furthermore, the distance between the inverse meniscus lens and the biconcave lens is adjustable, and the adjustment range is 108-61.6 mm.
Furthermore, the diffraction angle of the beam shaping device can be adjusted to be 5-10 times of the original diffraction angle.
Further, the beam shaping device is a diffraction shaping lens.
Furthermore, the continuously adjustable wide-angle zoom angle magnifying lens group changes the light spot size of the light beam without changing the intensity distribution and the shape distribution.
The embodiment of the invention provides another technical scheme: a continuously adjustable large-size shaping method is characterized by comprising the following steps:
s1, sequentially arranging a light beam shaping device, a biconvex lens, a meniscus lens, a reversed meniscus lens, a biconcave lens and a focusing lens according to the direction of a light path;
and S2, adjusting the distance between the meniscus lens and the inverse meniscus lens, and adjusting the distance between the inverse meniscus lens and the biconcave lens.
Further, the distance between the meniscus lens and the inverse meniscus lens is adjusted within the range of 25-414 mm.
Further, the distance between the inverse meniscus lens and the biconcave lens is adjusted within the range of 108-61.6 mm.
Furthermore, the diffraction angle of the beam shaping device can be adjusted to be 5-10 times of the original diffraction angle.
Compared with the prior art, the invention has the beneficial effects that: the diffraction angle of the shaping lens is adjusted through the continuously adjustable wide-angle zoom lens, and the light beams with different magnifications are adjusted according to the actual use requirement and then converged through the focusing lens to obtain the required shaped light beams.
Drawings
Fig. 1 is a schematic diagram of a continuously adjustable large-scale shaping system according to an embodiment of the present invention;
fig. 2 is a light spot distribution diagram of an unshaped system according to an embodiment of the present invention;
fig. 3 is a rectangular light spot distribution diagram of a continuously adjustable large-size shaping system 5X plus shaping system according to an embodiment of the present invention;
fig. 4 is a rectangular light spot distribution diagram of a continuously adjustable large-size shaping system 6.25X plus shaping system according to an embodiment of the present invention;
fig. 5 is a rectangular light spot distribution diagram of a continuously adjustable large-size shaping system 11.5X plus shaping system according to an embodiment of the present invention;
fig. 6 is a circular light spot distribution diagram of a continuously adjustable large-size shaping system 6.25X plus shaping system according to an embodiment of the present invention;
fig. 7 is a circular light spot distribution diagram of a continuously adjustable large-size shaping system 11.5X plus shaping system according to an embodiment of the present invention;
fig. 8 is a schematic diagram of the magnification and the adjustment distance of a continuously adjustable large-size shaping system according to an embodiment of the present invention;
in the reference symbols: 1-a beam shaping device; 2-a continuously adjustable wide-angle zoom-angle magnifying lens group; 3-focusing mirror.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, an embodiment of the present invention provides a continuously adjustable large-size shaping system, including a light beam shaping device 1, a focusing lens 3, and a continuously adjustable wide-angle zoom-angle magnifying lens assembly 2 capable of adjusting a diffraction angle of the light beam shaping device 1, where the light beam shaping device 1, the continuously adjustable wide-angle zoom-angle magnifying lens assembly 2, and the focusing lens 3 are sequentially arranged along a light path direction; the continuously adjustable wide-angle zoom angle magnifying lens group 2 comprises a biconvex lens, a meniscus lens, a reversed meniscus lens and a biconcave lens which are sequentially arranged along the light path direction, wherein the convex side of the meniscus lens faces towards the biconvex lens, and the convex side of the reversed meniscus lens faces towards the biconcave lens. Preferably, the distance between the meniscus lens and the inverted meniscus lens is adjustable, and the adjustment range is 25-414 mm. The distance between the inverted meniscus lens and the biconcave lens is adjustable, and the adjustment range is 108-61.6 mm. In this embodiment, the diffraction angle of the shaping lens is adjusted through the continuously adjustable wide-angle zoom lens, and the light beam with different magnifications is adjusted according to the actual use requirement and then converged through the focusing lens 3 to obtain the required shaped light beam. Specifically, we define the spacing between the beam shaping device 1 and the double convex lens as d1, the spacing between the double convex lens and the meniscus lens as d21, the spacing between the meniscus lens and the inverse meniscus lens as d22, the spacing between the inverse meniscus lens and the double concave lens as d23, and the spacing between the double concave lens and the focusing mirror 3 as d 3. When the diffraction angle is needed, only the distance d22 between the meniscus lens and the inverse meniscus lens and the distance d23 between the inverse meniscus lens and the biconcave lens need to be adjusted. As shown in fig. 8, a schematic diagram of the magnification and the adjustment distance is shown, wherein the abscissa is the magnification and the ordinate is the adjustment distance. After the adjustment, the diffraction angle of the beam shaper 1 can be adjusted to 5 to 10 times of the original diffraction angle. As shown in fig. 2 to 7, which are the rectangular spot distribution diagrams without the shaping system and the rectangular spot distribution diagrams with the shaping system, there is a significant change, wherein fig. 3, 4 and 5 are the rectangular spot distribution diagrams, fig. 6 and 7 are the circular spot distribution diagrams, and the abscissa is the spot size and the unit mm and the ordinate is the normalized energy distribution of the light beam.
And optimizing the scheme, wherein the beam shaping device 1 is a diffraction shaping lens. The focusing mirror 3 can adopt a specially designed lens or a conventional focusing mirror 3. This embodiment is not limited thereto.
As an optimization scheme of the embodiment of the invention, the continuously adjustable wide-angle zoom-angle magnifying lens group 2 changes the spot size of the light beam without changing the intensity distribution and the shape distribution. In this embodiment, the shape distribution of the light beam in the X-Y direction after passing through the continuously adjustable wide-angle zoom-angle magnifying lens does not change the intensity distribution and the shape distribution except the spot size. And the angle of the light beam after passing through the beam shaping device 1 is θ ═ arcsin (M λ/d), the magnification of the continuously adjustable wide-angle variable magnification angle magnifying lens is M, and then the angle of the light beam passing through the continuously adjustable wide-angle variable magnification angle magnifying lens is θ ═ M ═ arcsin (M λ/d).
The embodiment of the invention provides a continuously adjustable large-size shaping method, which is characterized by comprising the following steps of: s1, sequentially arranging a light beam shaping device 1, a biconvex lens, a meniscus lens, a reversed meniscus lens, a biconcave lens and a focusing lens 3 according to the direction of a light path; and S2, adjusting the distance between the meniscus lens and the inverse meniscus lens, and adjusting the distance between the inverse meniscus lens and the biconcave lens. Preferably, the distance between the meniscus lens and the inverse meniscus lens is adjusted within a range of 25-414 mm. And adjusting the distance between the inverted meniscus lens and the biconcave lens within the range of 108-61.6 mm. The diffraction angle of the beam shaping device 1 can be adjusted to 5-10 times of the original diffraction angle. In this embodiment, the diffraction angle of the shaping lens is adjusted through the continuously adjustable wide-angle zoom lens, and the light beam with different magnifications is adjusted according to the actual use requirement and then converged through the focusing lens 3 to obtain the required shaped light beam. Specifically, we define the spacing between the beam shaping device 1 and the double convex lens as d1, the spacing between the double convex lens and the meniscus lens as d21, the spacing between the meniscus lens and the inverse meniscus lens as d22, the spacing between the inverse meniscus lens and the double concave lens as d23, and the spacing between the double concave lens and the focusing mirror 3 as d 3. When the diffraction angle is needed, only the distance d22 between the meniscus lens and the inverse meniscus lens and the distance d23 between the inverse meniscus lens and the biconcave lens need to be adjusted. As shown in fig. 6, a schematic diagram of the magnification and the adjustment distance is shown, wherein the abscissa is the magnification and the ordinate is the adjustment distance. After the adjustment, the diffraction angle of the beam shaper 1 can be adjusted to 5 to 10 times of the original diffraction angle. As shown in fig. 2 to 5, the rectangular spot distribution diagram without the shaping system and the rectangular spot distribution diagram with the shaping system are obviously changed.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A continuously adjustable large-size reshaping system is characterized in that: the device comprises a light beam shaping device, a focusing lens and a continuously adjustable wide-angle variable-magnification angle amplifying lens group capable of adjusting the diffraction angle of the light beam shaping device, wherein the light beam shaping device, the continuously adjustable wide-angle variable-magnification angle amplifying lens group and the focusing lens are sequentially arranged along the direction of a light path; the continuously adjustable wide-angle zoom angle magnifying lens group comprises a biconvex lens, a meniscus lens, a reversed meniscus lens and a biconcave lens which are sequentially arranged along the direction of a light path, wherein the convex side of the meniscus lens faces towards the biconvex lens, and the convex side of the reversed meniscus lens faces towards the biconcave lens.
2. A continuously variable oversize reshaping system as in claim 1, wherein: the distance between the meniscus lens and the inverted meniscus lens is adjustable, and the adjustment range is 25-414 mm.
3. A continuously variable oversize reshaping system as in claim 1, wherein: the distance between the inverted meniscus lens and the biconcave lens is adjustable, and the adjustment range is 108-61.6 mm.
4. A continuously variable oversize reshaping system as in claim 1, wherein: the diffraction angle of the beam shaping device can be adjusted to be 5-10 times of the original diffraction angle.
5. A continuously variable oversize reshaping system as in claim 1, wherein: the beam shaping device is a diffraction shaping lens.
6. A continuously variable oversize reshaping system as in claim 1, wherein: the continuously adjustable wide-angle zooming angle amplifying mirror group changes the light spot size of the light beam without changing the intensity distribution and the shape distribution.
7. A continuously adjustable large-size shaping method is characterized by comprising the following steps:
s1, sequentially arranging a light beam shaping device, a biconvex lens, a meniscus lens, a reversed meniscus lens, a biconcave lens and a focusing lens according to the direction of a light path;
and S2, adjusting the distance between the meniscus lens and the inverse meniscus lens, and adjusting the distance between the inverse meniscus lens and the biconcave lens.
8. A method of continuously variable oversize reshaping as in claim 7, wherein: and adjusting the distance between the meniscus lens and the inverted meniscus lens within the range of 25-414 mm.
9. A method of continuously variable oversize reshaping as in claim 7, wherein: and adjusting the distance between the inverted meniscus lens and the biconcave lens within the range of 108-61.6 mm.
10. A method of continuously variable oversize reshaping as in claim 7, wherein: the diffraction angle of the beam shaping device can be adjusted to be 5-10 times of the original diffraction angle.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113463045A (en) * | 2021-06-11 | 2021-10-01 | 华中科技大学 | Laser pulse deposition system and processing method |
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Application publication date: 20210601 |