CN112865598A

CN112865598A - Differential inertia type piezoelectric rotary driver

Info

Publication number: CN112865598A
Application number: CN202110341173.XA
Authority: CN
Inventors: 董景石; 张博闻; 徐智; 刘畅; 曹义
Original assignee: Jilin University
Current assignee: Jilin University
Priority date: 2021-03-30
Filing date: 2021-03-30
Publication date: 2021-05-28
Anticipated expiration: 2041-03-30
Also published as: CN112865598B

Abstract

The invention relates to a differential inertia type piezoelectric rotary driver, and belongs to the field of precision driving. Comprises a base, a double-layer ring, two groups of piezoelectric driving elements and a rotor. The double-layer circular ring is matched with the two groups of piezoelectric elements through the flexible connecting beam to generate rotary motion; the piezoelectric element converts electric energy into kinetic energy by utilizing an inverse piezoelectric effect, so that the flexible connecting beam generates modal change, and the inner ring and the outer ring of the double-layer circular ring generate differential rotation by controlling the input mode of an electric signal to drive the rotor to generate continuous rotary motion; the rotor serves as an output terminal of the drive. The device has the advantages of quick response, stable rotation, no electromagnetic interference, simple structure and the like, and has good application prospect in the fields of medical instruments, aerospace, precision driving and the like.

Description

Differential inertia type piezoelectric rotary driver

Technical Field

The invention relates to the field of precision machinery, in particular to a differential inertia type piezoelectric rotary driver which is suitable for the fields of medicine, aerospace, precision driving and the like.

Background

The piezoelectric driving technology is a precise driving technology for controlling mechanical deformation and further outputting force and displacement based on the inverse piezoelectric effect of a piezoelectric material, has the characteristics of simple structure, high precision, high resolution, electromagnetic interference resistance and the like, and has important application in the fields of optical instruments, nanotechnology, medical instruments and the like. The piezoelectric driving device has more motion principles, and mainly comprises an inertial motion principle, an inchworm motion principle, a resonance principle and the like at present, wherein the inertial motion principle is divided into a friction inertial principle and an impact inertial principle, and has the characteristic of simple structure; the inchworm motion principle is controlled more complicated; the resonance principle structure size and the power supply equipment have strict requirements. The inertial actuating mechanism has the characteristics of simple structure, ultraprecision and miniaturization, and is widely applied to the fields of microsurgery microscopes, semiconductor manufacturing, precision optical alignment and the like.

In conclusion, the inertial piezoelectric motor has a good application prospect, but the efficiency is low, and the phenomenon of energy waste is obvious.

Disclosure of Invention

The invention aims to provide a differential inertia type piezoelectric rotation driver, which solves the problems in the prior art. The invention utilizes the inverse piezoelectric effect of the piezoelectric element to convert the electric energy into the mechanical energy and leads the inner ring and the outer ring to generate corner displacement; the inner ring generates corner displacement by providing slowly-increasing and rapidly-weakening electric signal excitation for the inner piezoelectric element; in the process of generating rotary angular displacement of the inner ring, the same electric signal excitation is applied to the outer piezoelectric element, so that the outer ring also generates rotary angular displacement in the same direction, the rotary angular displacement is increased under the simultaneous excitation, and the rotor rotates through continuous electric signal excitation; compared with the working efficiency under a single-ring mode, the differential inertia type piezoelectric actuator provided by the invention has the advantages of higher efficiency, stable operation, simple structure, easiness in control and the like.

The above object of the present invention is achieved by the following technical solutions:

a differential inertial piezoelectric rotary actuator, comprising: the inner ring and the outer ring of the double-layer ring generate asynchronous differential motion through different electric signal input modes of the two groups of piezoelectric elements; comprises a base 1, a double piezoelectric ring 2, an inner piezoelectric element 3, an outer piezoelectric element 4 and a rotor 5. The double-layer piezoelectric ring 2 is arranged on a rotating shaft of the base 1, the inner piezoelectric elements 3 are arranged on two sides of an inner flexible beam of the double-layer piezoelectric ring 2, the outer piezoelectric elements 4 are arranged on two sides of an outer flexible beam of the double-layer piezoelectric ring 2, the rotor is arranged at the top of the double-layer piezoelectric ring 2, and the double-layer piezoelectric ring 2 is driven to rotate and the rotor 5 is driven to rotate by giving different electric signal excitations to the inner piezoelectric elements 3 and the outer piezoelectric elements 4 in the working process.

The inner piezoelectric elements 3 are arranged on two sides of the inner flexible beam of the double-piezoelectric ring 2, and the inner piezoelectric elements 3 generate modal change under the excitation of electric signals in the working process, so that the inner flexible beam generates bending deformation, and an inner ring connected with the inner flexible beam generates rotary motion.

The outer piezoelectric elements 4 are arranged on two sides of the outer flexible beam of the double piezoelectric ring 2, and the outer piezoelectric elements 4 are excited by electric signals of different phases in the working process to generate modal change, so that the outer flexible beam is bent and deformed, and the outer ring of the inner flexible beam generates rotary motion.

The rotor 5 is arranged at the top of the double piezoelectric rings and is fixedly connected through threads. The inner piezoelectric element 3 is excited by an electric signal to enable the inner ring to generate rotary motion, the outer piezoelectric element 4 is excited by an electric signal to enable the outer ring to generate rotary motion, and the rotor 5 is enabled to realize continuous rotary motion under the superposition of the rotary action of the inner ring and the outer ring of the double piezoelectric ring 2.

The beneficial results of the invention are as follows: two groups of piezoelectric elements are excited by different electric signals, so that the single-step rotation angle is increased, and the working efficiency is improved. Compact structure, low cost, simple control, no electromagnetic interference and good application prospect in the fields of optical instruments, medical instruments and micro-operation

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.

FIG. 1 is a schematic diagram of the overall structure of the present invention

FIG. 2 is a structural view of a double-layer ring

FIG. 3 is a schematic diagram of a piezoelectric patch

FIG. 4 is a schematic diagram of an input electrical signal

FIG. 5 is a schematic diagram of the movement

In the figure: 1. a base; 2. a double-layer ring; 3. an internal piezoelectric element; 4. an outer piezoelectric element; 5. a rotor; 21. an inner ring; 22. an outer ring; 23. an inner flexible beam; 24. an outer flexible beam.

Detailed Description

The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.

Referring to fig. 1, the differential inertial type piezoelectric rotary actuator is characterized in that: the inner ring and the outer ring of the double-layer ring generate asynchronous differential motion through different electric signal input modes of the two groups of piezoelectric elements; comprises a base 1, a double piezoelectric ring 2, an inner piezoelectric element 3, an outer piezoelectric element 4 and a rotor 5.

The double-layer piezoelectric ring 2 is arranged on a rotating shaft of the base 1, the inner piezoelectric elements 3 are arranged on two sides of an inner flexible beam of the double-layer piezoelectric ring 2, the outer piezoelectric elements 4 are arranged on two sides of an outer flexible beam of the double-layer piezoelectric ring 2, the rotor is arranged at the top of the double-layer piezoelectric ring 2, and the double-layer piezoelectric ring 2 is driven to rotate and the rotor 5 is driven to rotate by giving different electric signal excitations to the inner piezoelectric elements 3 and the outer piezoelectric elements 4 in the working process.

Referring to fig. 2, 3, 4 and 5, the double-layer ring 2 includes an inner layer ring 21, an outer layer ring 22, an inner flexible beam 23 and an outer flexible beam 24. The inner piezoelectric elements 3 are fixed on two sides of the inner flexible beam 23, the inner flexible beam is bent and deformed under the excitation of an electric signal, and the inner flexible beam 23 is bent to generate corner displacement of the inner layer ring 21; in the process of generating the angular displacement of the inner ring 21, the outer piezoelectric element 4 is also bent and deformed under the excitation of the electrical signals shown in the figure, so that the outer ring 22 also generates the angular displacement, and the two parts of the angular displacement are superposed to improve the efficiency. The rotor 5 is mounted on the outer ring 22 and continuous electrical signal excitation causes macroscopically continuous rotation of the rotor 5.

The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.

Claims

1. a differential inertia type piezoelectric rotary driver, it is characterized in that: the electrical signal input modes of two groups of piezoelectric elements are different, so that the inner and outer rings of the double-layer ring produce asynchronous differential motion; comprising base (1), A double-layer piezoelectric ring (2), an inner piezoelectric element (3), an outer piezoelectric element (4), and a rotor (5); the double-layer piezoelectric ring (2) is installed on the rotating shaft of the base (1), The inner piezoelectric element (3) is installed on both sides of the inner flexible beam of the double-layer piezoelectric ring (2), and the outer piezoelectric element (4) is installed on both sides of the outer flexible beam of the double-layer piezoelectric ring (2), The rotor is installed on the top of the double-layer piezoelectric ring (2), and the double-layer piezoelectric ring (2) is driven to rotate by giving different electrical signal excitations to the inner piezoelectric element (3) and the outer piezoelectric element (4) during operation. and make the rotor (5) rotate;

The inner piezoelectric element (3) is installed on both sides of the inner flexible beam of the double piezoelectric ring (2), and the inner piezoelectric element (3) is stimulated by an electric signal during operation to produce a modal change, so that the inner flexible The beam is bent and deformed, which in turn causes the inner ring connected by the inner flexible beam to rotate;

The external piezoelectric element (4) is installed on both sides of the external flexible beam of the double piezoelectric ring (2), and is stimulated by an electrical signal of a different phase from the electrical signal of claim 2 during the working process to make the external piezoelectric The element (4) produces a modal change, causing the outer flexible beam to bend and deform, thereby causing the outer ring of the inner flexible beam to rotate;

The rotor (5) is installed on the top of the double piezoelectric ring and fixed by screw connection; the inner piezoelectric element (3) is excited by the electric signal to make the inner ring rotate, and the outer piezoelectric element (4) is subjected to the electric signal The excitation of the outer ring produces a rotational motion, and the rotor (5) realizes a continuous rotational motion under the superposition of the rotational action of the inner and outer rings of the double piezoelectric ring (2).