CN112865598A - Differential inertia type piezoelectric rotary driver - Google Patents

Differential inertia type piezoelectric rotary driver Download PDF

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Publication number
CN112865598A
CN112865598A CN202110341173.XA CN202110341173A CN112865598A CN 112865598 A CN112865598 A CN 112865598A CN 202110341173 A CN202110341173 A CN 202110341173A CN 112865598 A CN112865598 A CN 112865598A
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China
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ring
piezoelectric
double
rotor
flexible beam
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CN112865598B (en
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董景石
张博闻
徐智
刘畅
曹义
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Jilin University
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Jilin University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention relates to a differential inertia type piezoelectric rotary driver, and belongs to the field of precision driving. Comprises a base, a double-layer ring, two groups of piezoelectric driving elements and a rotor. The double-layer circular ring is matched with the two groups of piezoelectric elements through the flexible connecting beam to generate rotary motion; the piezoelectric element converts electric energy into kinetic energy by utilizing an inverse piezoelectric effect, so that the flexible connecting beam generates modal change, and the inner ring and the outer ring of the double-layer circular ring generate differential rotation by controlling the input mode of an electric signal to drive the rotor to generate continuous rotary motion; the rotor serves as an output terminal of the drive. The device has the advantages of quick response, stable rotation, no electromagnetic interference, simple structure and the like, and has good application prospect in the fields of medical instruments, aerospace, precision driving and the like.

Description

Differential inertia type piezoelectric rotary driver
Technical Field
The invention relates to the field of precision machinery, in particular to a differential inertia type piezoelectric rotary driver which is suitable for the fields of medicine, aerospace, precision driving and the like.
Background
The piezoelectric driving technology is a precise driving technology for controlling mechanical deformation and further outputting force and displacement based on the inverse piezoelectric effect of a piezoelectric material, has the characteristics of simple structure, high precision, high resolution, electromagnetic interference resistance and the like, and has important application in the fields of optical instruments, nanotechnology, medical instruments and the like. The piezoelectric driving device has more motion principles, and mainly comprises an inertial motion principle, an inchworm motion principle, a resonance principle and the like at present, wherein the inertial motion principle is divided into a friction inertial principle and an impact inertial principle, and has the characteristic of simple structure; the inchworm motion principle is controlled more complicated; the resonance principle structure size and the power supply equipment have strict requirements. The inertial actuating mechanism has the characteristics of simple structure, ultraprecision and miniaturization, and is widely applied to the fields of microsurgery microscopes, semiconductor manufacturing, precision optical alignment and the like.
In conclusion, the inertial piezoelectric motor has a good application prospect, but the efficiency is low, and the phenomenon of energy waste is obvious.
Disclosure of Invention
The invention aims to provide a differential inertia type piezoelectric rotation driver, which solves the problems in the prior art. The invention utilizes the inverse piezoelectric effect of the piezoelectric element to convert the electric energy into the mechanical energy and leads the inner ring and the outer ring to generate corner displacement; the inner ring generates corner displacement by providing slowly-increasing and rapidly-weakening electric signal excitation for the inner piezoelectric element; in the process of generating rotary angular displacement of the inner ring, the same electric signal excitation is applied to the outer piezoelectric element, so that the outer ring also generates rotary angular displacement in the same direction, the rotary angular displacement is increased under the simultaneous excitation, and the rotor rotates through continuous electric signal excitation; compared with the working efficiency under a single-ring mode, the differential inertia type piezoelectric actuator provided by the invention has the advantages of higher efficiency, stable operation, simple structure, easiness in control and the like.
The above object of the present invention is achieved by the following technical solutions:
a differential inertial piezoelectric rotary actuator, comprising: the inner ring and the outer ring of the double-layer ring generate asynchronous differential motion through different electric signal input modes of the two groups of piezoelectric elements; comprises a base 1, a double piezoelectric ring 2, an inner piezoelectric element 3, an outer piezoelectric element 4 and a rotor 5. The double-layer piezoelectric ring 2 is arranged on a rotating shaft of the base 1, the inner piezoelectric elements 3 are arranged on two sides of an inner flexible beam of the double-layer piezoelectric ring 2, the outer piezoelectric elements 4 are arranged on two sides of an outer flexible beam of the double-layer piezoelectric ring 2, the rotor is arranged at the top of the double-layer piezoelectric ring 2, and the double-layer piezoelectric ring 2 is driven to rotate and the rotor 5 is driven to rotate by giving different electric signal excitations to the inner piezoelectric elements 3 and the outer piezoelectric elements 4 in the working process.
The inner piezoelectric elements 3 are arranged on two sides of the inner flexible beam of the double-piezoelectric ring 2, and the inner piezoelectric elements 3 generate modal change under the excitation of electric signals in the working process, so that the inner flexible beam generates bending deformation, and an inner ring connected with the inner flexible beam generates rotary motion.
The outer piezoelectric elements 4 are arranged on two sides of the outer flexible beam of the double piezoelectric ring 2, and the outer piezoelectric elements 4 are excited by electric signals of different phases in the working process to generate modal change, so that the outer flexible beam is bent and deformed, and the outer ring of the inner flexible beam generates rotary motion.
The rotor 5 is arranged at the top of the double piezoelectric rings and is fixedly connected through threads. The inner piezoelectric element 3 is excited by an electric signal to enable the inner ring to generate rotary motion, the outer piezoelectric element 4 is excited by an electric signal to enable the outer ring to generate rotary motion, and the rotor 5 is enabled to realize continuous rotary motion under the superposition of the rotary action of the inner ring and the outer ring of the double piezoelectric ring 2.
The beneficial results of the invention are as follows: two groups of piezoelectric elements are excited by different electric signals, so that the single-step rotation angle is increased, and the working efficiency is improved. Compact structure, low cost, simple control, no electromagnetic interference and good application prospect in the fields of optical instruments, medical instruments and micro-operation
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic diagram of the overall structure of the present invention
FIG. 2 is a structural view of a double-layer ring
FIG. 3 is a schematic diagram of a piezoelectric patch
FIG. 4 is a schematic diagram of an input electrical signal
FIG. 5 is a schematic diagram of the movement
In the figure: 1. a base; 2. a double-layer ring; 3. an internal piezoelectric element; 4. an outer piezoelectric element; 5. a rotor; 21. an inner ring; 22. an outer ring; 23. an inner flexible beam; 24. an outer flexible beam.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1, the differential inertial type piezoelectric rotary actuator is characterized in that: the inner ring and the outer ring of the double-layer ring generate asynchronous differential motion through different electric signal input modes of the two groups of piezoelectric elements; comprises a base 1, a double piezoelectric ring 2, an inner piezoelectric element 3, an outer piezoelectric element 4 and a rotor 5.
The double-layer piezoelectric ring 2 is arranged on a rotating shaft of the base 1, the inner piezoelectric elements 3 are arranged on two sides of an inner flexible beam of the double-layer piezoelectric ring 2, the outer piezoelectric elements 4 are arranged on two sides of an outer flexible beam of the double-layer piezoelectric ring 2, the rotor is arranged at the top of the double-layer piezoelectric ring 2, and the double-layer piezoelectric ring 2 is driven to rotate and the rotor 5 is driven to rotate by giving different electric signal excitations to the inner piezoelectric elements 3 and the outer piezoelectric elements 4 in the working process.
The inner piezoelectric elements 3 are arranged on two sides of the inner flexible beam of the double-piezoelectric ring 2, and the inner piezoelectric elements 3 generate modal change under the excitation of electric signals in the working process, so that the inner flexible beam generates bending deformation, and an inner ring connected with the inner flexible beam generates rotary motion.
The outer piezoelectric elements 4 are arranged on two sides of the outer flexible beam of the double piezoelectric ring 2, and the outer piezoelectric elements 4 are excited by electric signals of different phases in the working process to generate modal change, so that the outer flexible beam is bent and deformed, and the outer ring of the inner flexible beam generates rotary motion.
The rotor 5 is arranged at the top of the double piezoelectric rings and is fixedly connected through threads. The inner piezoelectric element 3 is excited by an electric signal to enable the inner ring to generate rotary motion, the outer piezoelectric element 4 is excited by an electric signal to enable the outer ring to generate rotary motion, and the rotor 5 is enabled to realize continuous rotary motion under the superposition of the rotary action of the inner ring and the outer ring of the double piezoelectric ring 2.
Referring to fig. 2, 3, 4 and 5, the double-layer ring 2 includes an inner layer ring 21, an outer layer ring 22, an inner flexible beam 23 and an outer flexible beam 24. The inner piezoelectric elements 3 are fixed on two sides of the inner flexible beam 23, the inner flexible beam is bent and deformed under the excitation of an electric signal, and the inner flexible beam 23 is bent to generate corner displacement of the inner layer ring 21; in the process of generating the angular displacement of the inner ring 21, the outer piezoelectric element 4 is also bent and deformed under the excitation of the electrical signals shown in the figure, so that the outer ring 22 also generates the angular displacement, and the two parts of the angular displacement are superposed to improve the efficiency. The rotor 5 is mounted on the outer ring 22 and continuous electrical signal excitation causes macroscopically continuous rotation of the rotor 5.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like of the present invention shall be included in the protection scope of the present invention.

Claims (1)

1. A differential inertial piezoelectric rotary actuator, comprising: the inner ring and the outer ring of the double-layer ring generate asynchronous differential motion through different electric signal input modes of the two groups of piezoelectric elements; comprises a base (1), a double piezoelectric ring (2), an inner piezoelectric element (3), an outer piezoelectric element (4) and a rotor (5); the double-layer piezoelectric ring (2) is arranged on a rotating shaft of the base (1), the inner piezoelectric elements (3) are arranged on two sides of an inner flexible beam of the double-layer piezoelectric ring (2), the outer piezoelectric elements (4) are arranged on two sides of an outer flexible beam of the double-layer piezoelectric ring (2), the rotor is arranged at the top of the double-layer piezoelectric ring (2), and the double-layer piezoelectric ring (2) is driven to rotate and the rotor (5) is driven to rotate by giving different electric signal excitations to the inner piezoelectric elements (3) and the outer piezoelectric elements (4) in the working process;
the inner piezoelectric elements (3) are arranged on two sides of the inner flexible beam of the double-piezoelectric ring (2), and the inner piezoelectric elements (3) generate modal change under the excitation of electric signals in the working process, so that the inner flexible beam generates bending deformation, and an inner ring connected with the inner flexible beam generates rotary motion;
the outer piezoelectric element (4) is arranged on two sides of an outer flexible beam of the double-piezoelectric ring (2), and the outer piezoelectric element (4) generates modal change by being excited by electric signals with different phases from the electric signals in the claim 2 in the working process, so that the outer flexible beam generates bending deformation, and an outer ring of the inner flexible beam generates rotary motion;
the rotor (5) is arranged at the top of the double-piezoelectric ring and is fixedly connected through threads; the inner piezoelectric element (3) is excited by an electric signal to enable the inner ring to generate rotary motion, the outer piezoelectric element (4) is excited by an electric signal to enable the outer ring to generate rotary motion, and the rotor (5) is enabled to realize continuous rotary motion under the superposition of the rotary action of the inner ring and the outer ring of the double piezoelectric ring (2).
CN202110341173.XA 2021-03-30 2021-03-30 Differential inertial piezoelectric rotary driver Active CN112865598B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152026A (en) * 2009-12-24 2011-08-04 Aisin Seiki Co Ltd Rotary drive device
CN108288923A (en) * 2018-02-13 2018-07-17 哈尔滨工业大学 A kind of multiple field rotating piezoelectric precision driver
CN111181436A (en) * 2020-01-13 2020-05-19 吉林大学 Secondary excitation friction piezoelectric rotary driver
CN111245290A (en) * 2020-01-20 2020-06-05 哈尔滨工业大学 Single-degree-of-freedom piezoelectric turntable and excitation method thereof
CN214480332U (en) * 2021-03-30 2021-10-22 吉林大学 Differential inertia type piezoelectric rotary driver

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152026A (en) * 2009-12-24 2011-08-04 Aisin Seiki Co Ltd Rotary drive device
CN108288923A (en) * 2018-02-13 2018-07-17 哈尔滨工业大学 A kind of multiple field rotating piezoelectric precision driver
CN111181436A (en) * 2020-01-13 2020-05-19 吉林大学 Secondary excitation friction piezoelectric rotary driver
CN111245290A (en) * 2020-01-20 2020-06-05 哈尔滨工业大学 Single-degree-of-freedom piezoelectric turntable and excitation method thereof
CN214480332U (en) * 2021-03-30 2021-10-22 吉林大学 Differential inertia type piezoelectric rotary driver

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘建芳;杨志刚;曾平;范尊强;: "内箝位/外驱动型压电精密步进旋转驱动电机研究", 中国电机工程学报, no. 15, 25 May 2007 (2007-05-25), pages 100 - 105 *

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