CN112864053B - Transmission chamber in semiconductor process equipment and semiconductor process equipment - Google Patents
Transmission chamber in semiconductor process equipment and semiconductor process equipment Download PDFInfo
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- CN112864053B CN112864053B CN202110104954.7A CN202110104954A CN112864053B CN 112864053 B CN112864053 B CN 112864053B CN 202110104954 A CN202110104954 A CN 202110104954A CN 112864053 B CN112864053 B CN 112864053B
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 20
- 230000008569 process Effects 0.000 title claims abstract description 18
- 238000003825 pressing Methods 0.000 claims abstract description 35
- 230000006835 compression Effects 0.000 claims abstract description 10
- 238000007906 compression Methods 0.000 claims abstract description 10
- 238000009434 installation Methods 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 238000012546 transfer Methods 0.000 claims description 37
- 238000012545 processing Methods 0.000 claims description 7
- 230000000712 assembly Effects 0.000 description 9
- 238000000429 assembly Methods 0.000 description 9
- 238000007689 inspection Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000011900 installation process Methods 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000010425 asbestos Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a transmission chamber in semiconductor process equipment and the semiconductor process equipment, wherein a mounting hole (210) is formed in an upper cover plate (200) of the transmission chamber, an observation window assembly (100) is arranged in the mounting hole (210) in a sealing manner, and the observation window assembly (100) comprises a base (110), a transparent piece (120) and a compression ring (130); the mounting hole is internally provided with a bearing table (220), and the base (110) is annular, is arranged on the bearing table (220) and is connected with the bearing table (220); the pressing ring (130) is connected with the base (110), and the transparent piece (120) is clamped between the base (110) and the pressing ring (130). The problem that the observation window subassembly installation or dismantlement in-process damaged easily can be solved to above-mentioned scheme.
Description
Technical Field
The present invention relates to the field of semiconductor chip manufacturing technology, and in particular, to a transfer chamber in a semiconductor processing apparatus and a semiconductor processing apparatus.
Background
Be provided with the observation window subassembly on the transmission cavity of semiconductor process equipment, operating personnel can observe the position of wafer and the route of manipulator transmission wafer in the semiconductor process equipment through the observation window subassembly to can calibrate the transmission route of manipulator, and then improve the precision of the biography piece of wafer.
In the related art, the viewing window assembly includes a transparent member and a pressure ring. When installing the observation window subassembly, at first place transparent piece on the transmission cavity, and cover the through-hole of seting up on the transmission cavity, then the bolt passes the clamping ring and is connected with the cavity body of transmission cavity, and the bolt provides precompression for the clamping ring to compress tightly transparent piece, and then realize the installation of observation window subassembly on semiconductor process equipment.
However, the window assembly with such a structure is easy to cause the transparent member to drop during the process of mounting or dismounting, and thus the window assembly is easy to be damaged.
Disclosure of Invention
The invention discloses a transmission chamber in semiconductor process equipment and the semiconductor process equipment, which are used for solving the problem that an observation window assembly is easy to damage in the process of installation or disassembly.
In order to solve the problems, the invention adopts the following technical scheme:
the transmission chamber in the semiconductor process equipment is characterized in that a mounting hole is formed in an upper cover plate of the transmission chamber, an observation window assembly is hermetically arranged in the mounting hole, and the observation window assembly comprises a base, a transparent piece and a pressing ring;
the mounting hole is internally provided with a bearing table, and the base is annular, is arranged on the bearing table and is connected with the bearing table;
the pressing ring is connected with the base, and the transparent piece is clamped between the base and the pressing ring.
A semiconductor processing apparatus comprising the transfer chamber described above.
The technical scheme adopted by the invention can achieve the following beneficial effects:
in the transmission chamber disclosed by the invention, the observation window assembly comprises a base, a transparent piece and a pressure ring, wherein the transparent piece is clamped between the base and the pressure ring, and the pressure ring is connected with the base. In this scheme, clamping ring and base are with transparent piece centre gripping, and the observation window subassembly is when installing or dismantling, and clamping ring, transparent piece and the integrative dismantlement of base or installation, clamping ring and base are with transparent piece centre gripping to can prevent that transparent piece from dropping, simultaneously, clamping ring and base can also protect transparent piece, prevent at the in-process of installation, and transparent piece collides with other structures, and then make the observation window subassembly be difficult to damage.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings:
FIG. 1 is an exploded view of a sight glass assembly in a transmission chamber in accordance with an embodiment of the present invention;
FIG. 2 is a bottom view of a base of a view window assembly in a transfer chamber in accordance with an embodiment of the present disclosure;
FIG. 3 is a side view of a base of a view window assembly in a transfer chamber in accordance with an embodiment of the present disclosure;
FIG. 4 is a partial cross-sectional view of a view window assembly in a transfer chamber disclosed in an embodiment of the invention;
FIG. 5 is a schematic view of the handle of the view window assembly in the transmission chamber according to an embodiment of the present invention;
FIG. 6 is a top view of a transfer chamber according to an embodiment of the present disclosure;
FIG. 7 is an exploded view of a transfer chamber according to an embodiment of the present invention;
FIG. 8 is an enlarged view of a portion of a transfer chamber disclosed in an embodiment of the present invention;
FIG. 9 is a schematic diagram illustrating assembly of an upper cover plate and a window assembly in a transfer chamber according to an embodiment of the present invention;
FIG. 10 is a cross-sectional view of a transfer chamber disclosed in an embodiment of the present invention;
fig. 11 and 12 are partial cross-sectional views of a transfer chamber disclosed in an embodiment of the present invention.
Reference numerals illustrate:
100-viewing window assembly, 101-central viewing window assembly, 102-edge viewing window assembly, 110-base, 111-first attachment aperture, 112-second attachment aperture, 114-load bearing projection, 1101-arc, 1102-straight, 120-transparency, 130-press ring, 131-third attachment aperture, 132-fourth attachment aperture, 133-fifth attachment aperture, 1331-projection, 140-first attachment, 150-second attachment, 160-handle, 161-handle, 162-threaded rod, 1621-first retention aperture, 1622-second retention aperture, 163-first elastic, 170-jackscrew, 180-insulating ring, 190-cushion, and,
200-upper cover plate, 210-mounting hole, 220-bearing table, 221-holding groove and 230-sealing ring.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to specific embodiments of the present invention and corresponding drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The technical scheme disclosed by each embodiment of the invention is described in detail below with reference to the accompanying drawings.
As shown in fig. 1 to 12, an embodiment of the present invention discloses a transfer chamber in a semiconductor processing apparatus, where the transfer chamber is used to implement transition transfer of a wafer during a processing process, for example, the transfer chamber may be a preloaded chamber, so as to implement transfer of the wafer from an atmospheric environment to a vacuum environment. As another example, the transfer chamber may also be a vacuum transfer chamber to effect transfer of the wafer from a vacuum environment to a process environment. The specific type of transfer chamber is not limited herein. The disclosed transfer chamber includes a chamber body and a viewing window assembly 100.
The chamber body is the main part of transmission cavity, and the chamber body provides the installation basis for other component parts of transmission cavity and provides the transmission space for transmission cavity. The chamber body comprises an upper cover plate 200, a mounting hole 210 is formed in the upper cover plate 200, and an observation window assembly 100 is hermetically arranged in the mounting hole 210. The inspection window assembly 100 is used to inspect the placement position of the wafer in the transfer chamber and the transfer path of the robot.
The viewing window assembly 100 includes a base 110, a transparent member 120, and a pressing ring 130, wherein the pressing ring 130 is connected to the base 110, and the transparent member 120 is clamped between the base 110 and the pressing ring 130. The operator can see through the transparent member 120 to see the inside of the transfer chamber. The mounting hole 210 is provided with a bearing table 220, and the mounting hole 210 has a stepped structure. The base 110 is annular, and the base 110 is disposed on the carrying platform 220 and is connected to the carrying platform 220. The loading platform 220 is used for loading the base 110, so as to realize the installation of the observation window assembly 100 in the installation hole 210.
In a specific installation process, the window assembly 100 may be assembled into a unitary structure first, and then the window assembly 100 may be assembled integrally to the upper cover plate 200.
Optionally, a sealing ring 230 may be disposed on the upper cover 200, where the sealing ring 230 may be disposed around the base 110, and the sealing ring 230 is used to seal a gap between the base 110 and the mounting hole 210, so as to improve sealing performance between the upper cover 200 and the observation window assembly 100, thereby preventing damage to the working environment of the transmission chamber.
In the embodiment disclosed by the invention, the transparent member 120 is clamped by the pressing ring 130 and the base 110, and when the observation window assembly 100 is installed or disassembled, the transparent member 120 and the base 110 are integrally disassembled or installed, so that the transparent member 120 can be prevented from falling off by the pressing ring 130 and the base 110, and meanwhile, the transparent member 120 can be protected by the pressing ring 130 and the base 110, and the transparent member 120 is prevented from colliding with other structures in the installation process, so that the observation window assembly 100 is not easy to damage.
In addition, the pressing ring 130, the transparent member 120 and the base 110 are integrally disassembled or assembled, that is, the viewing window assembly 100 is assembled into a unitary structure and then assembled with the upper cover plate 200, so that the assembly of the viewing window assembly 100 and the upper cover plate 200 is simple and convenient, and the operation is easy.
Optionally, the chamber body may further include a main body portion and a bottom plate, a through cavity may be disposed in the main body portion, the bottom plate and the upper cover plate 200 may be disposed on an upper end surface and a lower end surface of the main body portion, respectively, and the bottom plate and the upper cover plate 200 cover two ends of the through cavity, respectively. Of course, the chamber body may have other structures, and is not limited herein.
Alternatively, the transparent member 120 may be transparent glass or transparent plastic, and the transparent member 120 may be made of other transparent materials, which is not limited herein.
In an alternative embodiment, the bottom surface of the base 110 may be provided with a carrying protrusion 114, and the carrying protrusion 114 may extend downward from the bottom surface of the base 110 and be bent inward. The transparent member 120 may be disposed on the carrying projection 114, and the base 110 may surround the transparent member 120. At this time, the carrying protrusions 114 may serve to carry the transparent member 120, thereby preventing the transparent member 120 from falling off the base 110.
Further, the top surface of the transparent member 120 may be not higher than the top surface of the base 110, and preferably, the top surface of the transparent member 120 is flush with the top surface of the base 110. At this time, the transparent member 120 does not protrude from the top surface of the base 110, and the bottom surface of the pressing ring 130 may contact with the top surface of the base 110, thereby improving the connection stability of the pressing ring 130 and the base 110. In addition, the contact of the top surface of the base 110 with the bottom surface of the pressure ring 130 helps to improve the sealing performance of the sight glass assembly 100.
In an alternative embodiment, the bearing platform 220 may be provided with a receiving groove 221 for receiving the bearing boss 114. In this embodiment, at least a portion of the carrying protrusion 114 may be located in the accommodating groove 221, and the accommodating groove 221 limits the assembling position of the carrying protrusion 114 on the upper cover plate 200, thereby limiting the assembling position of the window assembly 100 on the upper cover plate 200, and further improving the assembling accuracy of the window assembly 100 and the upper cover plate 200.
In addition, the side walls of the receiving groove 221 can restrict the bearing protrusion 114 from rotating in the circumferential direction of the mounting hole 210, thereby preventing the window assembly 100 from rotating in the mounting hole 210, and thus preventing the window assembly 100 from being mounted in a malposition.
Further, the number of the carrying protrusions 114 may be plural, and the carrying protrusions 114 are spaced around the transparent member 120. In this embodiment, the number of the carrying protrusions 114 is plural, so that the carrying protrusions 114 apply a larger carrying force to the transparent member 120, and thus the transparent member 120 can be more reliably mounted on the base 110. Meanwhile, when one or more of the carrying protrusions 114 are broken, the rest of the carrying protrusions 114 can still support the transparent member 120, thereby prolonging the service life of the base 110.
To further improve the assembly accuracy of the window assembly 100 and the upper cover 200, in an alternative embodiment, the base 110 includes an arc portion 1101 and a straight portion 1102, and the arc portion 1101 and the straight portion 1102 are connected to each other to form a ring shape. The transparent member 120 and the pressing ring 130 are matched with the outer shape structure of the base 110. The mounting holes 210 also match the profile of the base 110. In this scheme, when the operator assembles the observation window assembly 100, the operator can make preliminary determination on the assembly position of the observation window assembly 100 according to the orientations of the arc-shaped portion 1101 and the straight line portion 1102, and then the assembly accuracy of the observation window assembly 100 and the upper cover plate 200 is improved, and meanwhile, the assembly efficiency of the operator can also be improved.
In addition, since the portion of the mounting hole 210 corresponding to the straight portion 1102 has a straight line structure, the mounting hole 210 can prevent the rotation of the base 110, and the mounting positions of the base 110 and the mounting hole 210 are not easily displaced, thereby improving the mounting accuracy of the window assembly 100 and the upper cover 200.
In the above embodiment, the typical wafer sizes are 6 inches and 8 inches, and the 6 inch wafer diameter is approximately 198mm, for which reason, in an alternative embodiment, the arcuate portion 1101 has a diameter greater than or equal to 200mm. In this solution, the diameter of the smallest outline of the observation window assembly 100 is close to the diameter of the 6 inch wafer, so that the blind area of the observation window assembly 100 is smaller, and the wafer can be observed in a larger range.
Of course, the range of the arc 1101 may be flexibly selected according to the specific size of the upper cover plate 200, which is not limited herein.
Alternatively, the distance between the center of the arc portion 1101 and the straight portion 1102 may be specifically selected according to the diameter of the arc portion 1101, which is not limited herein.
In the above embodiment, the base 110 and the pressing ring 130 may be connected by a clamping connection, and the base 110 and the carrying platform 220 may be connected by a clamping connection. In the above structure, when the operator removes the viewing window assembly 100, a part of force is applied between the base 110 and the pressing ring 130, so that the clamping structure at the base 110 and the pressing ring 130 is separated, and the transparent member 120 is easily separated, thereby easily damaging the viewing window assembly 100.
In this regard, in an alternative embodiment, the base 110 may be provided with a first connection hole 111 and a second connection hole 112, and the pressing ring 130 may be provided with a third connection hole 131 and a fourth connection hole 132. The first connection hole 111 and the third connection hole 131 may be opposite. The second connection hole 112 and the fourth connection hole 132 may be opposite. The first connection member 140 may pass through the first connection hole 111 and the third connection hole 131 to connect the base 110 and the pressing ring 130, and the first connection member 140 is used to assemble the base 110 and the pressing ring 130. The second connection member 150 may pass through the second connection hole 112 and the fourth connection hole 132 to connect the base 110 and the carrier 220, and the second connection member 150 is used to assemble the window assembly 100 with the upper cover 200. In this scheme, operating personnel only need dismantle when dismantling viewing window assembly 100 second connecting piece 150 can, at this moment, base 110 still is connected through first connecting piece 140 with clamping ring 130, and first connecting piece 140 exerts pressure to clamping ring 130 and base 110 to can prevent clamping ring 130 and base 110 separation, and then make transparent piece 120 be difficult for droing, further improved viewing window assembly 100's security.
Alternatively, the first and second connection members 140 and 150 may be rivets or bolts. When the first and second connection members 140 and 150 are rivets, the rivets are required to be broken when the window assembly 100 is disassembled, thus making the window assembly 100 inconvenient to disassemble, and for this reason, in another alternative embodiment, the first and second connection members 140 and 150 may be screws, and when the window assembly 100 is disassembled, only the first or second connection members 140 and 150 are required to be screwed, so that the first and second connection members 140 and 150 are not easily broken. The particular number of first and second connectors 140, 150 may be flexibly selected according to the particular assembly needs of the transfer chamber, and is not limited herein.
In the above embodiment, when the window assembly 100 is installed into the mounting hole 210, the gap between the outer edge of the window assembly 100 and the inner sidewall of the mounting hole 210 is smaller, so that it is difficult for an operator to insert his or her finger into the gap, and the weight of the window assembly 100 is larger, so that it is difficult for the operator to remove the window assembly 100 from the mounting hole 210, thereby causing a difficulty in removing the window assembly 100.
In another alternative embodiment, the viewing window assembly 100 may further include a handle 160, where the handle 160 may include a handle bar 161 and a threaded rod 162, and the pressing ring 130 is provided with a fifth connection hole 133, and the threaded rod 162 passes through the fifth connection hole 133 and is screwed with the base 110. In this solution, an operator can remove the window assembly 100 from the mounting hole 210 through the handle 160, so that the difficulty of disassembling the window assembly 100 is small.
In addition, the base 110 is in threaded connection with the handle 160, so that the maintainability of the handle 160 and the base 110 is improved, and therefore, when the handle 160 is damaged, an operator can only replace the handle 160, and then the whole observation window assembly 100 is not required to be replaced, so that the service life of the observation window assembly 100 is prolonged.
Alternatively, one end of the threaded rod 162 may be located in the middle of the handle 161, where the handle 160 forms a T-shaped structure. Of course, the handle 160 may have other structures, and is not limited herein. The number of handles 160 may be two, and when the size of the viewing window assembly 100 is large, the number of handles 160 may be three, four, or more, so that multiple persons may commonly disassemble the viewing window assembly 100.
In another alternative embodiment, the fifth connecting hole 133 may include a boss 1331 protruding from the top surface of the compression ring 130, and a jackscrew 170 is disposed in a sidewall of the boss 1331, and the jackscrew 170 is used to tighten the threaded rod 162. In this aspect, the top thread 170 can prevent the threaded rod 162 from sliding out of the second connection hole 112, thereby preventing the handle 160 from being separated from the base 110, and further improving the safety and reliability of the viewing window assembly 100.
Optionally, the threaded rod 162 is provided with a first limiting hole 1621 and a second limiting hole 1622, the first limiting hole 1621 is located near an end of the handle 161, and the second limiting hole 1622 is located far from the end of the handle 161. In assembling the window assembly 100, the threaded rod 162 is first threaded into the fifth attachment aperture 133 and the jackscrew 170 is rotated into the second limiting aperture 1622. Then, the base 110, the transparent part 120 and the compression ring 130 are sequentially installed, after the base 110, the transparent part 120 and the compression ring 130 are installed, the jackscrew 170 is screwed out from the second limiting hole 1622, the threaded rod 162 is connected with the base 110 in a threaded manner, and then the jackscrew 170 is screwed into the first limiting hole 1621.
In another alternative, the handle 160 may further include a first elastic member 163, and the first elastic member 163 may be sleeved on the threaded rod 162. The first elastic member 163 may be located between the hand lever 161 and the pressing ring 130. In this case, the first elastic member 163 may apply elastic force to the pressing ring 130, thereby making the connection of the pressing ring 130 with the base 110 more secure. And simultaneously, the handle 160 can be prevented from being in rigid contact with the pressing ring 130, so that the pressing ring 130 is stressed excessively, and the pressing ring 130 is crushed.
Alternatively, the first elastic member 163 may be a spring, but the first elastic member 163 may be other elastic structures, not limited herein.
In the above embodiments, the transfer chamber may need to heat the wafer according to the processing requirement of the wafer, and the temperature of the transfer chamber is high, so that the heat is transferred to the inspection window assembly 100, which easily causes the transparent member 120 to burst. Based on this, in another alternative embodiment, the viewing window assembly 100 can further include an insulating ring 180, the insulating ring 180 disposed around the transparent member 120, the insulating ring 180 positioned between the base 110 and the transparent member 120. In this case, the heat insulating ring 180 can prevent heat on the susceptor 110 from being transferred to the transparent member 120, so that the temperature on the susceptor 110 can be reduced, thereby preventing the transparent member 120 from being burst.
Alternatively, the insulating ring 180 may be made of fiberglass, asbestos, or the like, although the insulating ring 180 may be made of other materials, and is not limited herein. In addition, the heat insulation ring 180 may have a certain elasticity, thereby preventing the base 110 from rigidly contacting the transparent member 120, and thus, may have a buffering effect on the elastic member, preventing the transparent member 120 from being damaged.
In an alternative embodiment, the viewing window assembly 100 may further include a cushion 190, the cushion 190 being disposed between the pressure ring 130 and the transparent member 120. In this aspect, the cushion pad 190 can prevent the pressure ring 130 from rigidly contacting the transparent member 120, thereby preventing the pressure ring 130 from being too pressurized to fracture the transparent member 120.
Alternatively, the cushion 190 may be made of foam, plastic, or the like, although other materials may be used, as well, without limitation.
In another alternative embodiment, the first connecting member 140 may be sleeved with a second elastic member, where one end of the second elastic member abuts against the compression ring 130, and the other end of the second elastic member abuts against the end of the first connecting member 140. In this solution, the second elastic member can apply an elastic force to the pressing ring 130, so that the pressing ring 130 is connected with the base 110 more tightly. In addition, the second elastic member can prevent the first connection member 140 from applying excessive pre-compression force, thereby preventing the compression ring 130, the transparent member 120, or the base 110 from being damaged.
Alternatively, the second elastic member may be a spring, although the second elastic member may be other elastic structures, which are not limited herein.
To further increase the viewing range of the transfer chamber, in another alternative embodiment, the number of the viewing window assemblies 100 may be multiple, and the multiple viewing pass assemblies may include a central viewing window assembly 101 and multiple edge viewing window assemblies 102, with the multiple edge viewing window assemblies 102 disposed around the central viewing window assembly 101, with the central viewing window assembly 101 having a greater viewing range than the edge viewing window assemblies 102. In this solution, the number of the inspection window assemblies 100 is multiple, so as to increase the inspection range of the transmission chamber, and further improve the reliability and safety of the wafer during transmission.
Alternatively, the size of the center window assembly 101 and the size of the edge window assembly 102 may be specifically set according to the size of the upper cover plate 200.
For example, when the diameter of the upper cover plate 200 is 836mm, the diameter of the central window assembly 101 may be 356mm, and the diameter of the edge window may be 105mm, with the viewing range of the central window assembly 101 being 99487.76mm 2 The diameter of the edge observation window can be 8654.62mm 2 . This document provides only one particular solution and is not intended to limit the specific structure herein.
The above arc 1101 has a diameter of 200mm or more to define the central viewing window assembly 101 therein, and thus may be smaller in size since the edge viewing window is only used to view the edge of the wafer. The dimensions defined above are not inconsistent with the dimensions of the edge window assembly 102 herein.
In addition, because the size of the central observation window assembly 101 is larger, when an operator maintains the transmission chamber, only the central observation window assembly 101 needs to be disassembled, so that the operator can maintain the transmission chamber through the installation hole 210 of the central observation window assembly 101, and the upper cover plate 200 does not need to be opened, and the maintenance operation of the transmission chamber is simple and convenient.
Alternatively, the number of edge window assemblies 102 may be eight, wherein the center of the connected two edge window assemblies 102 forms an angle of 45 ° with the line of the center window assembly 101. Of course, the number of edge window assemblies 102 may be other numbers, and is not limited herein.
Based on the transfer chamber of any one of the above embodiments of the present invention, the embodiment of the present invention further discloses a semiconductor process apparatus, where the disclosed semiconductor apparatus has the transfer chamber of any one of the above embodiments.
The foregoing embodiments of the present invention mainly describe differences between the embodiments, and as long as there is no contradiction between different optimization features of the embodiments, the embodiments may be combined to form a better embodiment, and in view of brevity of line text, no further description is provided herein.
The foregoing is merely exemplary of the present invention and is not intended to limit the present invention. Various modifications and variations of the present invention will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are to be included in the scope of the claims of the present invention.
Claims (10)
1. A transmission chamber in semiconductor process equipment is characterized in that an upper cover plate (200) of the transmission chamber is provided with a mounting hole (210), an observation window assembly (100) is arranged in the mounting hole (210) in a sealing manner, and the observation window assembly (100) comprises a base (110), a transparent piece (120) and a compression ring (130);
a bearing table (220) is arranged in the mounting hole (210), and the base (110) is annular, is arranged on the bearing table (220) and is connected with the bearing table (220);
the pressing ring (130) is connected with the base (110), and the transparent piece (120) is clamped between the base (110) and the pressing ring (130);
the observation window assembly (100) further comprises a handle (160), the handle (160) comprises a hand lever (161) and a threaded rod (162), a fifth connecting hole (133) is formed in the pressure ring (130), and the threaded rod (162) penetrates through the fifth connecting hole (133) and is in threaded connection with the base (110); the fifth connecting hole (133) comprises a protruding part (1331) protruding out of the top surface of the compression ring (130), and a jackscrew (170) is arranged in the side wall of the protruding part (1331); the threaded rod (162) is provided with a first limiting hole (1621) and a second limiting hole (1622), the first limiting hole (1621) is positioned at one end close to the hand-held rod (161), and the second limiting hole (1622) is positioned at one end far away from the hand-held rod (161); when the observation window assembly (100) is assembled, the threaded rod (162) is firstly screwed in the fifth connecting hole (133), and the jackscrew (170) is turned into the second limiting hole (1622); then to base (110), transparent piece (120) with clamping ring (130) are installed in proper order, wait base (110), transparent piece (120) with clamping ring (130) installation is accomplished the back, will jackscrew (170) follow second spacing hole (1622) internal rotation is out, will again threaded rod (162) with base (110) threaded connection, then will jackscrew (170) are revolved to in first spacing hole (1621).
2. The transmission chamber according to claim 1, wherein a carrying protrusion (114) is disposed on a bottom surface of the base (110), the carrying protrusion (114) extends downward from the bottom surface of the base (110) and is bent inward, the transparent member (120) is disposed on the carrying protrusion (114), the base (110) surrounds the transparent member (120), a top surface of the transparent member (120) is not higher than a top surface of the base (110), and a receiving groove (221) for receiving the carrying protrusion (114) is formed in the carrying table (220).
3. The transfer chamber of claim 1, wherein the base (110) comprises an arc portion (1101) and a straight portion (1102), the arc portion (1101) and the straight portion (1102) being interconnected to define a ring, the transparent member (120) and the pressure ring (130) being configured to match the configuration of the base (110).
4. A transfer chamber according to claim 3, characterized in that the diameter of the arc (1101) is greater than or equal to 200mm.
5. The transmission chamber according to claim 1, wherein the base (110) is provided with a first connecting hole (111) and a second connecting hole (112), the pressing ring (130) is provided with a third connecting hole (131) and a fourth connecting hole (132), the first connecting hole (111) is opposite to the third connecting hole (131), the second connecting hole (112) is opposite to the fourth connecting hole (132), the first connecting piece (140) penetrates the first connecting hole (111) and the third connecting hole (131), the base (110) is connected with the pressing ring (130), and the second connecting piece (150) penetrates the second connecting hole (112) and the fourth connecting hole (132) to connect the base (110) with the bearing table (220).
6. The transfer chamber of claim 1, wherein the handle (160) further comprises a first elastic member (163), the first elastic member (163) is sleeved on the threaded rod (162), and the first elastic member (163) is located between the carrying bar (161) and the pressing ring (130).
7. The transfer chamber of claim 1, wherein the viewing window assembly (100) further comprises a thermally insulating ring (180), the thermally insulating ring (180) disposed around the transparent member (120), the thermally insulating ring (180) being located between the base (110) and the transparent member (120).
8. The transfer chamber of claim 1, wherein the viewing window assembly (100) further comprises a cushion pad (190), the cushion pad (190) being disposed between the pressure ring (130) and the transparent member (120).
9. The transfer chamber according to claim 5, wherein the first connecting member (140) is sleeved with a second elastic member, one end of the second elastic member is propped against the compression ring (130), and the other end of the second elastic member is propped against the end of the first connecting member (140).
10. A semiconductor processing apparatus comprising a transfer chamber according to any one of claims 1 to 9.
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| CN202110104954.7A CN112864053B (en) | 2021-01-26 | 2021-01-26 | Transmission chamber in semiconductor process equipment and semiconductor process equipment |
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| CN202110104954.7A CN112864053B (en) | 2021-01-26 | 2021-01-26 | Transmission chamber in semiconductor process equipment and semiconductor process equipment |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140109013A (en) * | 2013-03-04 | 2014-09-15 | 김영삼 | Semiconductor process chamber clear lid improved the visibility of the inside of the chamber with integrally formed on the polycarbonate led |
| KR20150019986A (en) * | 2013-08-13 | 2015-02-25 | 에이유 오프트로닉스 코퍼레이션 | Observation window and chamber using the same |
| CN208142129U (en) * | 2018-03-14 | 2018-11-23 | 北京北方华创微电子装备有限公司 | Reaction chamber observation window assembly and reaction chamber |
| CN111834188A (en) * | 2019-04-18 | 2020-10-27 | 北京北方华创微电子装备有限公司 | Observation window assembly and semiconductor processing equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100397193B1 (en) * | 2001-09-18 | 2003-09-13 | 주성엔지니어링(주) | wafer sensing device |
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2021
- 2021-01-26 CN CN202110104954.7A patent/CN112864053B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140109013A (en) * | 2013-03-04 | 2014-09-15 | 김영삼 | Semiconductor process chamber clear lid improved the visibility of the inside of the chamber with integrally formed on the polycarbonate led |
| KR20150019986A (en) * | 2013-08-13 | 2015-02-25 | 에이유 오프트로닉스 코퍼레이션 | Observation window and chamber using the same |
| CN208142129U (en) * | 2018-03-14 | 2018-11-23 | 北京北方华创微电子装备有限公司 | Reaction chamber observation window assembly and reaction chamber |
| CN111834188A (en) * | 2019-04-18 | 2020-10-27 | 北京北方华创微电子装备有限公司 | Observation window assembly and semiconductor processing equipment |
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| CN112864053A (en) | 2021-05-28 |
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