CN214086601U - Wafer taking and placing device and automation equipment - Google Patents

Abstract

The utility model discloses a wafer is got and is put device and automation equipment, include: a drive device including a shaft; the air slip ring comprises a stator and a rotor, the rotor is coated on the circumferential surface of the rotating shaft, the rotor is fixed relative to the rotating shaft, the stator is rotationally connected with the rotor, a first air inlet hole is formed in the stator, a first air outlet hole is formed in the rotor, and the first air inlet hole is communicated with the first air outlet hole; the first suction nozzle is arranged on the rotor and communicated with the first air outlet hole. The utility model discloses can shorten the length of transmission rolling motion's axle, the suction nozzle is difficult to the vibration.

Description

Wafer taking and placing device and automation equipment

Technical Field

The utility model belongs to the technical field of automation equipment and specifically relates to a device and automation equipment are put to precision getting that relates to small materials such as wafer (size from 0.05mm to 50 mm).

Background

The wafer taking and placing device generally needs a rotary swing arm, a suction nozzle is installed at the front end of the swing arm and connected with a negative pressure air pipe, when a wafer is taken, the swing arm rotates to a wafer taking position, the suction nozzle is connected with negative pressure, the wafer is sucked up through the negative pressure and then rotates to another position, and the wafer is put down. However, in the conventional wafer pick-and-place device, an air slip ring is generally used due to the need of preventing the air pipe from winding, and a rotating shaft of the driving device is connected with a rotor of the air slip ring through a coupling. This makes the axle of transmission rotational motion overlength, and when the focus of swing arm deviated the rotation axis center, the suction nozzle was easy to vibrate, and this will influence the positioning accuracy of suction nozzle, prolongs the positioning time of suction nozzle.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a wafer is got and is put device can shorten the length of transmission rotational motion's axle, and the suction nozzle is difficult to the vibration.

The utility model also provides an automation equipment.

In a first aspect, an embodiment of the present invention provides a wafer taking and placing device, including: a drive device including a shaft; the air slip ring comprises a stator and a rotor, the rotor is coated on the circumferential surface of the rotating shaft, the rotor is fixed relative to the rotating shaft, the stator is rotationally connected with the rotor, a first air inlet hole is formed in the stator, a first air outlet hole is formed in the rotor, and the first air inlet hole is communicated with the first air outlet hole; the first suction nozzle is arranged on the rotor and communicated with the first air outlet hole.

The utility model discloses wafer is got and is put device has following beneficial effect at least: in a conventional structure, a rotating shaft is connected with a rotor of an air slip ring through a coupler, and a first suction nozzle is fixed on the rotor, namely the length of a shaft for transmitting rotary motion needs to be calculated; the rotor direct cladding of the gas sliding ring of this embodiment is on the circumference face of pivot, and first suction nozzle is fixed on the rotor, between pivot and the first suction nozzle, has saved the shaft coupling, and because of the rotor cladding is on the circumference face of pivot, and the length of rotor is very little to the increase contribution of the length of transmission rolling motion's axle, and first suction nozzle is difficult to the vibration when rotatory, and first suction nozzle positioning accuracy is high, and positioning time is short.

According to the wafer taking and placing device of other embodiments of the present invention, the rotating shaft and the rotor are integrally disposed.

According to the utility model discloses a wafer is got and is put device of other embodiments, the rotor is opened along the axial has the mounting hole, the pivot is arranged in the mounting hole.

According to the utility model discloses a wafer of other embodiments is got and is put device still includes mount pad, swing arm, shell fragment and elastic element, the mount pad with rotor fixed connection, the shell fragment is located the first end of mount pad with between the second end of mount pad, the shell fragment includes first section, second section and third section, the second section is located first section with between the third section, first section with mount pad fixed connection, the third section with swing arm fixed connection, the first end of swing arm is fixed with first suction nozzle, elastic element can give second end one of swing arm is close to the effort of stator.

According to the utility model discloses a wafer of other embodiments is got and is put device, still including adjusting screw, adjusting screw with mount pad threaded connection, adjusting screw's one end can with the swing arm supports and holds, and has the messenger the second end of swing arm is kept away from the power of rotor.

According to the utility model discloses a wafer is got and is put device of other embodiments, be provided with the air vent on the mount pad, first suction nozzle passes through the air vent with first venthole intercommunication.

According to the utility model discloses a device is got to wafer of other embodiments, be provided with first ring channel on the outer circumferential surface of rotor, first venthole is followed the axial setting of rotor, first inlet port with first venthole all with first ring channel intercommunication.

According to the utility model discloses a wafer is got and is put device still includes the sealing washer, the sealing washer is arranged in the stator with between the rotor, the both sides of first ring channel are provided with one respectively the sealing washer.

According to the utility model discloses a wafer is got and is put device of other embodiments, still including the second suction nozzle, be provided with the second inlet port on the stator, be provided with the second venthole on the rotor, the second inlet port with second venthole intercommunication, the second suction nozzle sets up on the rotor, the second suction nozzle with second venthole intercommunication.

In a second aspect, an embodiment of the present invention provides an automated apparatus, including the above wafer taking and placing device.

The utility model discloses automation equipment has following beneficial effect at least: by using the wafer taking and placing device, the suction nozzle is high in positioning precision and short in positioning time, the efficiency of automatic equipment is improved, and the competitiveness of the automatic equipment is improved.

Drawings

Fig. 1 is an isometric view of a wafer drive and release apparatus of a first embodiment;

FIG. 2 is an enlarged schematic view of region I of FIG. 1;

FIG. 3 is an exploded view of the wafer drive apparatus of FIG. 1;

FIG. 4 is a front view of the stator of FIG. 1;

FIG. 5 is a cross-sectional view of the stator of FIG. 4 taken along section A-A;

FIG. 6 is a front view of the rotor of FIG. 1;

FIG. 7 is a cross-sectional view of the rotor of FIG. 6 taken along section B-B;

FIG. 8 is an isometric view of the mount of FIG. 1;

FIG. 9 is a top view of the mount of FIG. 1;

FIG. 10 is a cross-sectional view of the mount of FIG. 9 taken along section C-C;

FIG. 11 is an isometric view of the body of FIG. 1;

FIG. 12 is an isometric view of the connection block of FIG. 1.

Detailed Description

The conception and the resulting technical effects of the present invention will be described clearly and completely with reference to the following embodiments, so that the objects, features and effects of the present invention can be fully understood. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention.

In the description of the embodiments of the present invention, if an orientation description is referred to, for example, the directions or positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", etc. are based on the directions or positional relationships shown in the drawings, only for convenience of description and simplification of description, but not for indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

In the description of the embodiments of the present invention, if a feature is referred to as being "disposed", "fixed", "connected", or "mounted" on another feature, it can be directly disposed, fixed, or connected to the other feature or indirectly disposed, fixed, connected, or mounted on the other feature. In the description of the embodiments of the present invention, if "a plurality" is referred to, it means one or more, if "a plurality" is referred to, it means two or more, if "greater than", "less than" or "more than" is referred to, it is understood that the number is not included, and if "more than", "less than" or "within" is referred to, it is understood that the number is included. If reference is made to "first" or "second", this should be understood to distinguish between features and not to indicate or imply relative importance or to implicitly indicate the number of indicated features or to implicitly indicate the precedence of the indicated features.

Referring to fig. 1 and 3, fig. 1 is an isometric view of a wafer drive of a first embodiment, and fig. 3 is an exploded view of the wafer drive of fig. 1. The wafer picking and placing device of the present embodiment includes a driving device, a frame 200, an air slip ring 300, a mounting seat 400, a swing arm assembly 500, a first suction nozzle 600 and a second suction nozzle 700. The swing arm assembly 500 is provided in two, the first suction nozzle 600 is connected with the mount 400 through one swing arm assembly 500, and the first suction nozzle 600 is located at the front side of the mount 400, the second suction nozzle 700 is connected with the mount 400 through the other swing arm assembly 500, and the second suction nozzle 700 is located at the rear side of the mount 400. The mounting base 400 is connected to a driving device through an air slip ring 300, the driving device is disposed on the frame 200, and the mounting base 400 can rotate around a vertical axis by the driving device. The first suction nozzle 600 and the second suction nozzle 700 are both communicated with a negative pressure air source through the air slip ring 300.

Specifically, the driving device is a motor 100, a rotating shaft 110 is arranged on the motor 100, the motor 100 is locked and fixed on the rack 200, and after the motor 100 is powered on, the rotating shaft 110 can rotate around the vertical axis.

In another embodiment, the drive means may also be a rotary cylinder, which also has a shaft for rotation.

Referring to fig. 3 to 7, fig. 4 is a front view of the stator 330 of fig. 1, fig. 5 is a sectional view of the stator 330 of fig. 4 taken along a-a section, fig. 6 is a front view of the rotor 310 of fig. 1, and fig. 7 is a sectional view of the rotor 310 of fig. 6 taken along B-B section. The air slip ring 300 comprises a rotor 310, a sealing ring 320 and a stator 330, the stator 330 is locked and fixed on the frame 200, the rotor 310 is rotatably connected with the stator 330, the upper end of the rotor 310 is fixedly connected with the rotating shaft 110, and the lower end of the rotor 310 is fixedly connected with the mounting seat 400. Thus, the rotation shaft 110 can rotate the mounting base 400 about the vertical axis by the driving of the motor 100, and the first suction nozzle 600 and the second suction nozzle 700 can rotate on the horizontal plane.

In order to realize the rotational connection between the rotor 310 and the stator 330, the stator 330 is provided with a receiving hole 331 along the vertical direction, the rotor 310 is disposed in the receiving hole 331, a rolling bearing is disposed between the rotor 310 and the stator 330, an inner ring of the rolling bearing is sleeved on the rotor 310, and an outer ring of the rolling bearing abuts against an inner surface of the receiving hole 331. Thus, by providing the accommodation hole 331 and the rolling bearing, the rotational connection of the rotor 310 and the stator 330 is achieved.

In order to communicate the first suction nozzle 600 and the second suction nozzle 700 with the negative pressure air source, a first air inlet hole 333 and a second air inlet hole 336 (refer to fig. 5) are formed in the stator 330, the first air inlet hole 333 and the second air inlet hole 336 are both arranged along the radial direction of the stator 330, the first air inlet hole 333 communicates the accommodating hole 331 with the outer circumferential surface of the stator 330, and the second air inlet hole 336 also communicates the accommodating hole 331 with the outer circumferential surface of the stator 330. The first intake hole 333 and the second intake hole 336 are respectively communicated with a negative pressure air source through air pipes, and the air intake action of the first intake hole 333 and the air intake action of the second intake hole 336 can be respectively controlled through electromagnetic valves.

The rotor 310 is provided with a first air outlet hole 313 and a second air outlet hole 314 (see fig. 7), and the first air outlet hole 313 and the second air outlet hole 314 are both arranged along the axial direction of the rotor 310. The upper end of the first air outlet hole 313 is communicated with the first air inlet hole 333, the lower end of the first air outlet hole 313 extends to the lower end surface of the rotor 310, and the first suction nozzle 600 is communicated with the lower end of the first air outlet hole 313, thereby realizing the communication between the first suction nozzle 600 and the negative pressure air source.

The same applies to the second air outlet hole 314, that is, the upper end of the second air outlet hole 314 is communicated with the second air inlet hole 336, the lower end of the second air outlet hole 314 extends to the lower end surface of the rotor 310, and the second suction nozzle 700 is communicated with the lower end of the second air outlet hole 314.

In order to communicate the upper end of the first air outlet hole 313 with the first air inlet hole 333, a first annular groove 311 is provided on the outer circumferential surface of the rotor 310, and the upper end of the first air outlet hole 313 communicates with the first annular groove 311. After the rotor 310 is seated in the receiving hole 331, the first annular groove 311 is aligned with the first air intake holes 333, thereby achieving communication between the upper ends of the first air outlet holes 313 and the first air intake holes 333. In addition, during the rotation of the rotor 310 relative to the stator 330, since the first air intake holes 333 can be always aligned with the first annular groove 311, the first air intake holes 333 can always communicate with the first annular groove 311, and finally the upper ends of the first air outlet holes 313 can always communicate with the first air intake holes 333, and the first nozzle 600 can normally operate.

The rotor 310 is further provided at an outer circumferential surface thereof with a second annular groove 312, and an upper end of a second outlet hole 314 is communicated with the second annular groove 312. After the rotor 310 is seated in the receiving hole 331, the second annular groove 312 is aligned with the second air intake holes 336. Therefore, the upper end of the second outlet hole 314 can be always communicated with the second inlet hole 336, and the second suction nozzle 700 can also normally operate in the process that the rotor 310 rotates relative to the stator 330.

The first annular groove 311 is located above the second annular groove 312, and the first annular groove 311 and the second annular groove 312 do not communicate with each other. Therefore, when the negative pressure gas passes through the rotor 310, the first suction nozzle 600 and the second suction nozzle 700 can independently operate without being mixed with each other.

To prevent air leakage from the gap between the stator 330 and the rotor 310, a third annular groove 332, a fourth annular groove 334, and a fifth annular groove 335 (refer to fig. 5) are provided on the surface of the receiving hole 331. After the rotor 310 is seated in the receiving hole 331, the first annular groove 311 is located between the third annular groove 332 and the fourth annular groove 334, and the second annular groove 312 is located between the fourth annular groove 334 and the fifth annular groove 335. A seal ring 320 is disposed in each of the third annular groove 332, the fourth annular groove 334, and the fifth annular groove 335.

The sealing rings 320 are generally made of an elastically deformable rubber material, and after the three sealing rings 320 are respectively disposed in the third annular groove 332, the fourth annular groove 334 and the fifth annular groove 335, the sealing rings 320 are deformed by being pressed, so that the sealing rings 320 simultaneously abut against the surface of the accommodating hole 331 and the outer circumferential surface of the rotor 310, thereby preventing gas from entering the first annular groove 311 and the second annular groove 312 from a gap between the stator 330 and the rotor 310, and ensuring the normal operation of the first suction nozzle 600 and the second suction nozzle 700.

In this embodiment, in order to fixedly connect the rotor 310 to the rotating shaft 110, the rotor 310 is provided with a mounting hole 316 along the axial direction. After the rotating shaft 110 of the motor 100 is inserted into the mounting hole 316, the lower end of the rotating shaft 110 abuts against the limiting step 315. The rotor 310 is further provided with a first threaded hole 317 along the radial direction, and a first set screw is screwed into the first threaded hole 317 to fix the rotating shaft 110 in the mounting hole 316, thereby realizing the fixed connection of the rotor 310 and the rotating shaft 110.

In another embodiment, the inner surface of the mounting hole 316 may be provided with a first key slot, the circumferential surface of the rotating shaft 110 may be provided with a second key slot along the axial direction, and the rotor 310 may be fixedly connected to the rotating shaft 110 by a key inserted into the first key slot and the second key slot.

Compared with the conventional structure that the rotating shaft 110 is fixedly connected with the rotor 310 through a coupler, no coupler is arranged between the rotating shaft 110 and the mounting seat 400, and the rotor 310 is wrapped on the circumferential surface of the rotating shaft 110, so that the length of the rotor 310 has little contribution to the increase of the distance between the rotating shaft 110 and the mounting seat 400. When the first suction nozzle 600 rotates on the horizontal plane, the swing arm 520 is not easy to vibrate, the positioning accuracy of the first suction nozzle 600 is high, and the positioning time is short.

In another embodiment, the rotor 310 and the rotating shaft 110 may be integrally formed, that is, when the rotating shaft 110 of the motor 100 is manufactured, the first annular groove 311, the second annular groove 312, the first air outlet hole 313 and the second air outlet hole 314 may be formed in the rotating shaft 110. At this time, the swing arm 520 is also less likely to vibrate.

Referring to fig. 3 and 9, fig. 9 is a top view of mount 400 of fig. 1. In order to realize the installation and fixation of the first suction nozzle 600 and the second suction nozzle 700, a mounting seat 400 and a swing arm assembly 500 are provided, the mounting seat 400 is locked and fixed at the lower end of the rotor 310, the first suction nozzle 600 is arranged at the front side of the mounting seat 400 through one swing arm assembly 500, and the second suction nozzle 700 is arranged at the rear side of the mounting seat 400 through the other swing arm assembly 500.

In order to fasten the mounting seat 400 to the lower end of the rotor 310, a first through hole 410 is formed at a middle position of the mounting seat 400, and a screw is screwed to the lower end of the rotor 310 after passing through the first through hole 410, thereby fastening the mounting seat 400 to the rotor 310.

In order to conduct the first air outlet 313 on the rotor 310 through the mounting seat 400, the mounting seat 400 is provided with vent holes, and the vent holes comprise a first vent hole 420 and a second vent hole 430. The first vent hole 420 is disposed in the up-down direction, and the first vent hole 420 is aligned with the first air outlet hole 313. The second vent hole 430 is disposed in the front-rear direction, and the lower end of the first vent hole 420 communicates with the rear end of the second vent hole 430. Thus, the first nozzle 600 communicates with the front end of the second ventilation hole 430 through the air tube, thereby achieving communication with the first air outlet hole 313. The structure in which the second outlet hole 314 communicates with the second outlet hole 314 through the mount 400 is the same as the above structure, and a description thereof will not be repeated.

The first nozzle 600 will be described as an example, in which the first nozzle 600 is connected to the mount 400 by the swing arm assembly 500.

Referring to fig. 3 and 11, fig. 11 is an isometric view of the connection block 522 of fig. 1. The swing arm assembly 500 comprises an adjusting screw 510, a swing arm 520, a spring piece 530, a first pressing plate 540, a second pressing plate 550, a positioning screw 560 and an elastic element, the swing arm 520 comprises a main body 521 and a connecting block 522, the rear end of the connecting block 522 is connected with the mounting seat 400, the front end of the connecting block 522 is fixedly connected with the rear end of the main body 521 (locked and fixed through a screw), and the first suction nozzle 600 is fixed at the rear end of the main body 521.

In order to fix the first nozzle 600 to an end of the main body 521, which is away from the connecting block 522, a second through hole 571 (see fig. 11) and a separating slit 573 communicating with the second through hole 571 are formed in the front end of the main body 521, and the separating slit 573 separates the front end of the main body 521 into a first clamping block 572 and a second clamping block 574. After the first suction nozzle 600 is inserted into the second through hole 571, one end of the screw passes through the first clamping block 572 and the second clamping block 574, and the nut is screwed on, so that the first clamping block 572 and the second clamping block 574 are close to each other by the screw and the nut, and the first suction nozzle 600 is clamped in the second through hole 571.

Referring to fig. 9, 10 and 12, fig. 10 is a sectional view of the mount 400 of fig. 9 taken along the section C-C, and fig. 12 is an isometric view of the connection block of fig. 1. In order to provide a buffer from moving to stationary when the first suction nozzle 600 approaches the wafer, the resilient piece 530 and the elastic member are provided. Specifically, the rear end of the connection block 522 is provided with an insertion block 582 (refer to fig. 12), the mounting base 400 is provided with an accommodating cavity 490 therein, the front end of the mounting base 400 is provided with a third through hole 460 along the front-rear direction, the rear end of the third through hole 460 is communicated with the accommodating cavity 490, and the front end of the third through hole 460 extends to the front end surface of the mounting base 400. The plug 582 passes through the third through hole 460, and the rear end of the plug 582 is disposed in the receiving chamber 490, and the plug 582 is in clearance fit with the third through hole 460.

Referring to fig. 1, 2, 3, 8 and 12, fig. 2 is an enlarged schematic view of region i in fig. 1. In order to achieve flexible connection between the swing arm 520 and the mount 400, a first notch 470 (see fig. 8) is provided on the lower surface of the front end of the mount 400, and a second notch 581 (see fig. 12) is provided on the rear end of the connection block 522. The elastic piece 530 comprises a first section 531, a second section 532 and a third section 533, wherein the second section 532 is located between the first section 531 and the third section 533, the first section 531 is disposed in the first notch 470 and is fixedly connected with the mounting seat 400, and the third section 533 is disposed in the second notch 581 and is fixedly connected with the connecting block 522. Accordingly, the swing arm 520 is swung by a small amount about the axis in the left-right direction with respect to the mount 400 by the bending deformation of the second block 532, and the swing arm 520 does not come off the third through hole 460.

To achieve a fixed connection of the first section 531 to the mounting socket 400, a first pressure plate 540 is provided. The first pressing plate 540 is located at the lower side of the elastic sheet 530, and one end of the screw passes through the first pressing plate 540 and the elastic sheet 530 in sequence and is in threaded fit with the mounting seat 400, so that the first pressing plate 540 is locked and fixed on the mounting seat 400. Similarly, the second section 532 is fixedly connected to the connecting block 522 by the second pressing plate 550, and the description is not repeated here.

In this embodiment, the elastic element is a compression spring. The insert 582 is provided with a fourth through hole 584 (see fig. 12) extending in the vertical direction, the mount 400 is provided with a stepped hole 440 (see fig. 10) extending in the vertical direction, the set screw 560 is inserted through the fourth through hole 584 and the stepped hole 440 in this order, the compression spring is fitted over the set screw 560, and the set nut 570 is screwed on. Meanwhile, the insert block 582 is opened with a second screw hole 583 (see fig. 12) in the left-right direction, the second screw hole 583 communicates with the fourth through hole 584, and the second screw hole 583 is screwed into a second set screw, thereby fastening the set screw 560 to the attachment block 522.

Therefore, the lower end of the compression spring abuts against the mounting seat 400, the upper end of the compression spring abuts against the positioning nut 570, and the compression spring provides an upward acting force to the positioning nut 570, namely, the compression spring provides an upward acting force to the connecting block 522.

When the first suction nozzle 600 does not contact the wafer, the compression spring provides an upward acting force to the second end of the swing arm 520 (the rear end of the swing arm 520 is the second end thereof), the suction nozzle 600 is fixed at the first end of the swing arm 520, and the elastic piece 530 is located between the first end of the swing arm 520 and the second end of the swing arm 520. The whole swing arm 520 is of a lever structure, wherein the elastic sheet 530 playing a role of fixed connection is a fulcrum, the first end of the swing arm 520 tilts upwards under the action of the compression spring, and the suction nozzle 600 at the first end of the swing arm 520 falls downwards.

After the first suction nozzle 600 contacts the wafer, the suction nozzle 600 at the first end of the swing arm 520 receives an upward acting force, the second end of the swing arm 520 overcomes the pressure of the compression spring and swings downwards, the first suction nozzle 600 moves upwards to be buffered, and the first suction nozzle 600 and the wafer are not easy to damage.

In order to conveniently adjust the second set screw for fixing the set screw 560, the mounting seat 400 is provided with an avoiding hole 480 (refer to fig. 10) along the left-right direction, the avoiding hole 480 is communicated with the accommodating cavity 490, and the avoiding hole 480 and the second threaded hole 583 are coaxially arranged. Thus, by avoiding the hole 480, the second set screw can be adjusted to secure or release the set screw 560.

In other embodiments, the elastic element may be a bellows or a rubber column, which is mounted in the same manner as the compression spring.

In order to adjust the initial angle of the swing arm 520, which facilitates the first suction nozzle 600 to suck the wafer, an adjustment screw 510 is provided. The mounting seat 400 is provided with a third threaded hole 450 (see fig. 10), and the third threaded hole 450 communicates with the receiving cavity 490. After being screwed into the third threaded hole 450, one end of the adjusting screw 510 extends out of the lower end of the third threaded hole 450 and abuts against the insertion block 582 of the connection block 522 extending into the accommodating cavity 490. Since the insertion block 582 will tilt upwards under the action of the compression spring, the tilting will engage with the adjusting screw 510, thereby positioning the connection block 522. By rotating the adjustment screw 510, the initial angle of the swing arm 520 can be adjusted by adjusting the length of the adjustment screw 510 extending from the lower end of the third threaded hole 450.

The utility model discloses still relate to an automation equipment, this automation equipment includes that foretell wafer gets puts the device, and this automation equipment can be solid brilliant machine, and wafer gets this moment and puts the device and be used for the material loading. Or, the automated equipment is a wafer aligner, where the wafer pick-and-place device is used to align the wafers.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art. Furthermore, the embodiments of the present invention and features of the embodiments may be combined with each other without conflict.

Claims (10)

1. A wafer pick and place apparatus, comprising:

a drive device including a shaft;

the air slip ring comprises a stator and a rotor, the rotor is coated on the circumferential surface of the rotating shaft, the rotor is fixed relative to the rotating shaft, the stator is rotationally connected with the rotor, a first air inlet hole is formed in the stator, a first air outlet hole is formed in the rotor, and the first air inlet hole is communicated with the first air outlet hole;

the first suction nozzle is arranged on the rotor and communicated with the first air outlet hole.

2. The wafer pick-and-place apparatus of claim 1, wherein the spindle is integral with the rotor.

3. The wafer picking and placing device according to claim 1, wherein the rotor has a mounting hole along an axial direction, and the spindle is disposed in the mounting hole.

4. The wafer pick-and-place device as claimed in any one of claims 1 to 3, further comprising a mounting base, a swing arm, a spring, and a resilient element, wherein the mounting base is fixedly connected to the rotor, the spring is located between a first end of the swing arm and a second end of the swing arm, the spring comprises a first section, a second section, and a third section, the second section is located between the first section and the third section, the first section is fixedly connected to the mounting base, the third section is fixedly connected to the swing arm, the first end of the swing arm is fixed with the first suction nozzle, and the resilient element can provide an acting force to the second end of the swing arm close to the rotor.

5. The wafer picking and placing device according to claim 4, further comprising an adjusting screw, wherein the adjusting screw is in threaded connection with the mounting base, one end of the adjusting screw can abut against the swing arm, and the adjusting screw has a force that makes the second end of the swing arm away from the rotor.

6. The wafer handling device of claim 4, wherein the mounting base is provided with a vent hole, and the first suction nozzle is communicated with the first air outlet hole through the vent hole.

7. The wafer pick-and-place device according to any one of claims 1 to 3, wherein a first annular groove is provided on an outer circumferential surface of the rotor, the first air outlet hole is provided along an axial direction of the rotor, and the first air inlet hole and the first air outlet hole are both communicated with the first annular groove.

8. The wafer pick-and-place device of claim 7, further comprising a sealing ring disposed between the stator and the rotor, one sealing ring disposed on each side of the first annular groove.

9. The wafer picking and placing device according to any one of claims 1 to 3, further comprising a second suction nozzle, wherein the stator is provided with a second air inlet hole, the rotor is provided with a second air outlet hole, the second air inlet hole is communicated with the second air outlet hole, the second suction nozzle is provided on the rotor, and the second suction nozzle is communicated with the second air outlet hole.

10. An automated apparatus, comprising a wafer handling device according to any of claims 1 to 9.

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