CN112859284A - Precise adjustment method based on electromagnetic force - Google Patents
Precise adjustment method based on electromagnetic force Download PDFInfo
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- CN112859284A CN112859284A CN202110022826.8A CN202110022826A CN112859284A CN 112859284 A CN112859284 A CN 112859284A CN 202110022826 A CN202110022826 A CN 202110022826A CN 112859284 A CN112859284 A CN 112859284A
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000006073 displacement reaction Methods 0.000 claims abstract description 44
- 239000000696 magnetic material Substances 0.000 claims abstract description 27
- 230000033001 locomotion Effects 0.000 claims description 39
- 230000001133 acceleration Effects 0.000 claims description 9
- 238000004364 calculation method Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 13
- 239000004020 conductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000003638 chemical reducing agent Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
Abstract
The invention discloses a precise adjustment method based on electromagnetic force, which comprises a controlled device rotating relative to a rotating shaft, wherein a magnetic material is arranged on the controlled device, an electromagnetic component acts on the magnetic material with electromagnetic force, and the controlled device is subjected to angular displacement adjustment through a controllable variable during control. Compared with the prior art, the invention has the following advantages and beneficial effects: the nanometer displacement regulation control method of electromagnetic force is adopted, so that various defects caused by a contact regulation mode are avoided; the pulse is used for controlling the tiny time of the electrification, so that the accurate displacement is controlled.
Description
Technical Field
The invention relates to the adjustment of a precision instrument, in particular to a precision adjustment method based on electromagnetic force.
Background
With the implementation of a plurality of important optical projects in China, the demand of large-caliber optical elements is higher and higher. In order to improve the working accuracy of the large-diameter optical element, more and more researchers have conducted researches on the processing process, the clamping device, the detection device, the adjusting frame structure and the like of the large-diameter optical element. The reflecting mirror is an important optical element, is often used in grating processing and optical path control, and has a great influence on the quality of grating processing and optical path control. In order to improve the working precision of the reflector, on one hand, the processing quality of the reflector needs to be optimized, and the processing error is reduced; on the other hand, it is required to improve the adjustment accuracy of the mirror adjustment frame.
In the prior art, the angle adjustment of the reflection adjustment frame is mainly performed by adopting a driving mode as shown in fig. 1, and the driving component comprises a brushless servo motor component 11 (including a speed reducer), a coupler 12, an anti-backlash screw rod 13, a nut seat 14, a linear guide rail 15, a base 16 and the like. After the servo motor is decelerated by the zero back clearance speed reducer, the backlash eliminating screw rod is driven to rotate through the coupler, the backlash eliminating nut drives the nut seat to do linear motion on the linear guide rail under the driving of the backlash eliminating screw rod, so that the ball head 17 is driven to do axial linear motion, and the ball head is connected with the optical element through the spherical hinge and finally converted into the motion of the optical part. For the current adjusting mode, the following defects exist to achieve the optical element adjusting precision superior to 0.2 ″:
1. the existing adjusting mode belongs to a contact type, and the contact area brings thermal influence to the optical element, so that the working stability of the optical element is influenced;
2. the existing adjusting mechanism has many related elements, and in the adjusting process, the adjusting precision can be influenced by various aspects such as the processing precision, the structural form, the material and the like of mechanical parts, so that gaps and deformation can be generated, and the adjusting precision can be finally reduced, so that the adjusting precision of the optical element can not be achieved;
3. if the adjustment precision is better than 0.2 ″, a sufficiently large reduction ratio of the speed reducer is required, so that the size of the speed reducer is too large, and the space requirement cannot be met.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a precision adjusting method based on electromagnetic force, and solves the problems of insufficient precision and large occupied structural space of the existing contact type adjusting mechanism.
The invention is realized by the following technical scheme: a precise regulation method based on electromagnetic force includes rotating the controlled device relative to the rotating shaft, setting magnetic material on the controlled device, applying electromagnetic force to the magnetic material by electromagnetic component, and carrying out angular displacement regulation on the controlled device by controllable variable in control.
Further, the controllable variable comprises at least one of a gap d between the electromagnetic assembly and the magnetic material, a moment arm R between the rotating shaft and the magnetic material, a current magnitude I of the electromagnetic assembly, and a power-on time t of the electromagnetic assembly.
Furthermore, the electromagnetic assembly comprises an electromagnetic coil and a current controller, millisecond pulse current is output to the electromagnetic coil through the current controller, electromagnetic force is acted on a controlled device through the electromagnetic coil, and precise angular displacement adjustment is achieved.
Furthermore, the magnetic materials are magnetic conductive materials arranged on two sides of the controlled device, and electromagnetic force is respectively applied to the magnetic conductive materials on the two sides through the electromagnetic assemblies, so that clockwise or anticlockwise displacement of the controlled device is realized.
Furthermore, the magnetic material is a permanent magnet arranged on the controlled device, the direction of the current is changed through the electromagnetic assembly, and the electromagnetic assembly acts on the permanent magnet to absorb or repel the electromagnetic force, so that clockwise or counterclockwise displacement of the controlled device is realized.
Furthermore, the displacement motion of the controlled device is divided into two stages; in the first stage of accelerated motion, the electromagnetic component is electrified, the current is I, and the generated electromagnetic force is FMAngular acceleration of a1The power-on time is t, and the angular displacement of the controlled device is delta1(ii) a The second stage of deceleration movement, stopping energizing the electromagnetic assembly, through the friction torque T of the rotating shaftfThe controlled device is decelerated to zero with an angular acceleration of afThe angular displacement at the deceleration stage is deltafThe total displacement is δ, and the specific calculation method is as follows:
ΔT＝FM·R-Tf (2)
in the formula: fMIs electromagnetic force; kMIs a constant coefficient of electromagnetic force and is related to the electromagnetic coil structure; i is electrifying current during movement; d is a gap between the electromagnetic assembly and the magnetic material; r is a force arm corresponding to the magnetic material during movement; Δ T is the total torque at the time of acceleration movement; t isfThe friction torque of the controlled device; j is the moment of inertia of the controlled device; a is1Acceleration in accelerating movement; a isfAcceleration during deceleration movement; delta1Displacement when accelerating movement; deltafThe displacement when the speed is reduced; δ: the total displacement of the controlled device in the accelerated motion and the decelerated motion;
and the angular displacement of the controlled device is adjusted by controlling the controllable variable during manufacturing.
Further, the specific calculation method is as follows:
in the formula: k is a system constant coefficient during movement and is related to a system structure;
during adjustment, K is guaranteed to be unchanged, the power-on time t is controlled, and precise angular displacement adjustment of the controlled device is achieved.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the nanometer displacement regulation control method of electromagnetic force is adopted, so that various defects caused by a contact regulation mode are avoided;
2. the pulse is used for controlling the tiny time of the electrification, so that the accurate displacement is controlled.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
fig. 1 is a schematic structural diagram of a conventional adjusting mechanism.
Fig. 2 is a schematic diagram of the adjustment of the magnetic conductive material according to the present invention.
Fig. 3 is a diagram of the permanent magnet type regulation principle of the present invention (the electromagnetic assembly is located outside the range of the controlled device).
Fig. 4 is a diagram of the permanent magnet type regulation principle of the present invention (the electromagnetic assembly is located within the controlled device).
FIG. 5 is a diagram of the steps for controlling the energization time according to the present invention.
In the figure: 1-controlled device, 2-rotating shaft, 3-electromagnetic coil, 4-current controller, 5-magnetic conductive material, 6-permanent magnet; 11-brushless servo motor component, 12-coupler, 13-gap eliminating screw rod, 14-nut seat, 15-linear guide rail, 16-base and 17-ball head.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1
A precise adjustment method based on electromagnetic force comprises a controlled device 1 rotating relative to a rotating shaft 2, wherein a magnetic material is arranged on the controlled device 1, an electromagnetic component acts on the magnetic material with the electromagnetic force, and the controlled device 1 is subjected to angular displacement adjustment through a controllable variable during control.
The displacement motion of the controlled device 1 is divided into two stages; in the first stage of accelerated motion, the electromagnetic component is electrified, the current is I, and the generated electromagnetic force is FMAngular acceleration of a1The power-on time is t, and the angular displacement of the controlled device 1 is delta1(ii) a The second stage of deceleration movement stops energizing the electromagnetic assembly, and friction torque T of the rotating shaft 2 is usedfThe controlled device 1 is decelerated to zero with an angular acceleration afThe angular displacement at the deceleration stage is deltafThe total displacement is δ, and the specific calculation method is as follows:
ΔT＝FM·R-Tf (2)
in the formula: fMIs electromagnetic force; kMIs a constant coefficient of electromagnetic force and is related to the electromagnetic coil structure; i is electrifying current during movement; d is a gap between the electromagnetic assembly and the magnetic material; r is a force arm corresponding to the magnetic material during movement; Δ T is the total torque at the time of acceleration movement; t isfThe friction torque of the controlled device; j is the moment of inertia of the controlled device; a is1Acceleration in accelerating movement; a isfAcceleration during deceleration movement; delta1Displacement when accelerating movement; deltafThe displacement when the speed is reduced; δ: the total displacement of the controlled device in the accelerated motion and the decelerated motion;
and carrying out angular displacement adjustment on the controlled device 1 by controlling the controllable variables during manufacturing, wherein the controllable variables comprise at least one of a gap d between the electromagnetic assembly and the magnetic material, a force arm R between the rotating shaft 2 and the magnetic material, the current I of the electromagnetic assembly and the power-on time t of the electromagnetic assembly.
Example 2
A precise adjustment method based on electromagnetic force comprises the following specific calculation modes:
in the formula: k is a system constant coefficient during movement and is related to a system structure;
as shown in FIG. 5, during adjustment, K is guaranteed to be unchanged, the power-on time t is controlled, and the precise angular displacement adjustment of the controlled device is realized. The electromagnetic assembly comprises an electromagnetic coil 3 and a current controller 4, millisecond pulse current is output to the electromagnetic coil 3 through the current controller 4, electromagnetic force is acted on the controlled device 1 through the electromagnetic coil 3, and precise angular displacement adjustment is achieved.
The other methods were the same as in example 1.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. A method for fine adjustment based on electromagnetic force, comprising a controlled device (1) rotating with respect to a rotation axis (2), characterized in that: the controlled device (1) is provided with a magnetic material, the electromagnetic assembly acts electromagnetic force on the magnetic material, and the controlled device (1) is subjected to angular displacement adjustment through the controllable variable during control.
2. The electromagnetic force-based precision adjusting method according to claim 1, characterized in that: the controllable variables comprise at least one of a gap d between the electromagnetic assembly and the magnetic material, a force arm R between the rotating shaft (2) and the magnetic material, the current magnitude I of the electromagnetic assembly and the power-on time t of the electromagnetic assembly.
3. The electromagnetic force-based precision adjusting method according to claim 1, characterized in that: the electromagnetic assembly comprises an electromagnetic coil (3) and a current controller (4), millisecond pulse current is output to the electromagnetic coil (3) through the current controller (4), electromagnetic force acts on the controlled device (1) through the electromagnetic coil (3), and precise angular displacement adjustment is achieved.
4. The electromagnetic force-based precision adjustment method according to any one of claims 1 to 3, characterized in that: the magnetic materials are magnetic conduction materials (5) arranged on two sides of the controlled device (1), and electromagnetic force acts on the magnetic conduction materials (5) on the two sides through the electromagnetic assemblies respectively, so that clockwise or anticlockwise displacement of the controlled device (1) is achieved.
5. The electromagnetic force-based precision adjustment method according to any one of claims 1 to 3, characterized in that: the magnetic material is a permanent magnet (6) arranged on the controlled device (1), the direction of current is changed through the electromagnetic assembly, and the electromagnetic assembly acts on the permanent magnet (6) to absorb or repel the electromagnetic force, so that clockwise or anticlockwise displacement of the controlled device (1) is realized.
6. The electromagnetic force-based precision adjusting method according to claim 1 or 2, characterized in that: the displacement motion of the controlled device (1) is divided into two stages; in the first stage of accelerated motion, the electromagnetic component is electrified, the current is I, and the generated electromagnetic force is FMAngular acceleration of a1The power-on time is t, and the angular displacement of the controlled device (1) is delta1(ii) a The second stage of deceleration movement stops energizing the electromagnetic assembly, and friction torque T is generated through the rotating shaft (2)fThe controlled device (1) is decelerated to zero with an angular acceleration afThe angular displacement at the deceleration stage is deltafThe total displacement is delta, and the specific calculation method is as follows,
ΔT＝FM·R-Tf (2)
in the formula: fMIs electromagnetic force; kMIs a constant coefficient of electromagnetic force and is related to the electromagnetic coil structure; i is electrifying current during movement; d is a gap between the electromagnetic assembly and the magnetic material; r is a force arm corresponding to the magnetic material during movement; Δ T is the total torque at the time of acceleration movement; t isfThe friction torque of the controlled device; j is the moment of inertia of the controlled device; a is1Acceleration in accelerating movement; a isfAcceleration during deceleration movement; delta1Displacement when accelerating movement; deltafThe displacement when the speed is reduced; δ: the total displacement of the controlled device in the accelerated motion and the decelerated motion;
the angular displacement of the controlled device (1) is adjusted by the controllable variable during control.
7. The electromagnetic force-based precision adjusting method according to claim 7, characterized in that: the specific way of calculation is as follows,
in the formula: k is a system constant coefficient during movement and is related to a system structure;
during adjustment, K is guaranteed to be unchanged, the power-on time t is controlled, and precise angular displacement adjustment of the controlled device is achieved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110022826.8A CN112859284A (en) | 2021-01-08 | 2021-01-08 | Precise adjustment method based on electromagnetic force |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110022826.8A CN112859284A (en) | 2021-01-08 | 2021-01-08 | Precise adjustment method based on electromagnetic force |
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08129142A (en) * | 1994-10-31 | 1996-05-21 | Nec Eng Ltd | Mirror driving device |
| JP2003015123A (en) * | 2001-06-27 | 2003-01-15 | Nec Viewtechnology Ltd | Liquid crystal display device |
| US20040008468A1 (en) * | 2002-07-11 | 2004-01-15 | Nikolai Babich | Method of controlling magnetic flux of electromagnet, and electromagnet implementing the same |
| CN1691048A (en) * | 2004-04-20 | 2005-11-02 | 巨豪实业股份有限公司 | Dynamic scan structure of bar code reader |
| JP2007143302A (en) * | 2005-11-18 | 2007-06-07 | Saitama Prefecture | Minute displacement controller, device using the same and method |
| CN103038693A (en) * | 2010-04-06 | 2013-04-10 | Alpao公司 | Deformable mirror having a low bonding footprint and process for manufacturing such a mirror |
| WO2014041129A1 (en) * | 2012-09-14 | 2014-03-20 | Trumpf Laser Marking Systems Ag | Device for deflecting a laser beam |
| CN104506077A (en) * | 2014-12-10 | 2015-04-08 | 上海交通大学 | Ultra-precision driving device based on electromagnetic and permanent magnetic drive |
| CN107966995A (en) * | 2017-12-01 | 2018-04-27 | 西安交通大学 | A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress |
| US20180130586A1 (en) * | 2015-07-06 | 2018-05-10 | Trumpf Laser Marking Systems Ag | Devices and systems for deflecting a laser beam |
| CN110168426A (en) * | 2017-12-14 | 2019-08-23 | 京东方科技集团股份有限公司 | Show that equipment, Adaptive Modulation show that the component of equipment displayed contrast and Adaptive Modulation show the method for equipment displayed contrast |
-
2021
- 2021-01-08 CN CN202110022826.8A patent/CN112859284A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08129142A (en) * | 1994-10-31 | 1996-05-21 | Nec Eng Ltd | Mirror driving device |
| JP2003015123A (en) * | 2001-06-27 | 2003-01-15 | Nec Viewtechnology Ltd | Liquid crystal display device |
| US20040008468A1 (en) * | 2002-07-11 | 2004-01-15 | Nikolai Babich | Method of controlling magnetic flux of electromagnet, and electromagnet implementing the same |
| CN1691048A (en) * | 2004-04-20 | 2005-11-02 | 巨豪实业股份有限公司 | Dynamic scan structure of bar code reader |
| JP2007143302A (en) * | 2005-11-18 | 2007-06-07 | Saitama Prefecture | Minute displacement controller, device using the same and method |
| CN103038693A (en) * | 2010-04-06 | 2013-04-10 | Alpao公司 | Deformable mirror having a low bonding footprint and process for manufacturing such a mirror |
| WO2014041129A1 (en) * | 2012-09-14 | 2014-03-20 | Trumpf Laser Marking Systems Ag | Device for deflecting a laser beam |
| CN104506077A (en) * | 2014-12-10 | 2015-04-08 | 上海交通大学 | Ultra-precision driving device based on electromagnetic and permanent magnetic drive |
| US20180130586A1 (en) * | 2015-07-06 | 2018-05-10 | Trumpf Laser Marking Systems Ag | Devices and systems for deflecting a laser beam |
| CN107966995A (en) * | 2017-12-01 | 2018-04-27 | 西安交通大学 | A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress |
| CN110168426A (en) * | 2017-12-14 | 2019-08-23 | 京东方科技集团股份有限公司 | Show that equipment, Adaptive Modulation show that the component of equipment displayed contrast and Adaptive Modulation show the method for equipment displayed contrast |
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Application publication date: 20210528 |