CN112859042A - Time-sharing multi-wavelength laser interference distance measuring system and method - Google Patents
Time-sharing multi-wavelength laser interference distance measuring system and method Download PDFInfo
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- CN112859042A CN112859042A CN202110260412.9A CN202110260412A CN112859042A CN 112859042 A CN112859042 A CN 112859042A CN 202110260412 A CN202110260412 A CN 202110260412A CN 112859042 A CN112859042 A CN 112859042A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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Abstract
The invention relates to a time-sharing multi-wavelength laser interference distance measurement system and a time-sharing multi-wavelength laser interference distance measurement method, wherein the time-sharing multi-wavelength laser interference distance measurement system comprises a laser source, a fixed plane reflector, a spectroscope, a movable plane reflector, an interference measurement photoelectric detector, a light combination device and a light control switch, wherein the laser source comprises at least two lasers, and the wavelengths of lasers emitted by the lasers are different and have no common divisor; the optical control switches are arranged in one-to-one correspondence with the lasers and used for turning on or off the lasers emitted by the corresponding lasers to the light combining device; the light combining device reflects or transmits the received laser to the spectroscope, the laser is reflected to the fixed plane reflector through the spectroscope and is transmitted to the movable plane reflector, then the laser is reflected to the spectroscope through the fixed plane reflector and the movable plane reflector, and finally the laser is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope. The invention reduces the attenuation of the laser finally reaching the interference measurement photoelectric detector, is beneficial to the detection of the interference measurement photoelectric detector, simplifies the light path and reduces the number of the interference measurement photoelectric detectors.
Description
Technical Field
The invention relates to the technical field of multi-wavelength laser interferometry, in particular to a time-sharing multi-wavelength laser interferometry ranging system and a time-sharing multi-wavelength laser interferometry ranging method.
Background
The appearance of laser enables the ancient interference technology to be rapidly developed, the laser has the characteristics of high brightness, good directivity, good monochromaticity and coherence and the like, and the laser interference measurement technology is relatively mature. Laser interferometry systems are very widely used: measuring precise length and angle, such as detecting a linear ruler, a grating, a gauge block and a precise screw rod; control and correction of positioning detection systems in precision instruments, such as precision machines; positioning detection system in large scale integrated circuit special equipment and detection instrument; measurement of minute dimensions, etc. In most laser interferometry systems, a michelson interferometer or similar optical path structure is used.
Patent No. CN106093956A, entitled "a laser rangefinder system", discloses a measuring system based on Michelson interference principle, which adds a light combining device and a light splitting device, combines at least two beams of laser with different wavelengths into a beam of composite laser through the light combining device, and then divides a beam of composite laser into at least two beams of monochromatic light through the light splitting device, so that each monochromatic light is emitted along different directions. However, in the scheme, after passing through the light combining device, the light splitter and the light splitting device, a plurality of laser beams are subjected to laser intensity reduction, so that the laser beams finally reach the interference photoelectric detector and are greatly attenuated, and the measurement of the photoelectric detector is influenced.
Disclosure of Invention
The invention aims to reduce the attenuation of laser finally reaching an interference measurement photoelectric detector, improve the light intensity of the laser, cancel a light splitting optical path, reduce the optical path of the interference measurement photoelectric detector and the number of the photoelectric detectors, and provide a time-sharing multi-wavelength laser interference ranging system and a time-sharing multi-wavelength laser interference ranging method.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:
a time-sharing multi-wavelength laser interference distance measuring system comprises a laser source, a fixed plane reflector, a spectroscope, a movable plane reflector, an interference measurement photoelectric detector, a light combining device and a light control switch, wherein,
the laser source comprises at least two lasers, and the wavelength of laser emitted by each laser is different and has no common divisor;
the optical control switches are arranged in one-to-one correspondence with the lasers and used for turning on or off the lasers emitted by the corresponding lasers to the light combining device;
the light combining device reflects or transmits the received laser to the spectroscope, the laser is reflected to the fixed plane reflector through the spectroscope and is transmitted to the movable plane reflector, then the laser is reflected to the spectroscope through the fixed plane reflector and the movable plane reflector, and finally the laser is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope.
In the above scheme, when any one light control is turned on, other light control switches are turned off, so that only one laser beam is emitted into the light combining device at the moment, the light combining device reflects or transmits the laser beam to the spectroscope, and because each laser beam is not emitted to the light combining device at the same time and is combined into one composite laser beam by the light combining device, only one interference measurement photoelectric detector needs to be arranged, only one laser beam is received each time, the light splitting device is not needed to be arranged again to divide one composite laser beam into each single laser beam, but paths of each laser beam reaching the interference measurement photoelectric detector after passing through the light combining device are the same.
Furthermore, the light combining device comprises a light combining mirror, the light combining mirror is provided with two surfaces which are respectively a reflecting surface and a transmitting surface, the reflecting surface is provided with an antireflection film, and the transmitting surface is provided with an antireflection film.
When the laser is incident to the reflecting surface, most of the laser is reflected by the light combining mirror, and when the laser is incident to the transmitting surface, most of the laser is transmitted by the light combining mirror, so that the loss of the laser to the light intensity during light splitting is reduced.
Furthermore, the laser source includes N lasers, and the light combining device includes N-1 light combining mirrors, and an included angle between two adjacent light combining mirrors is 90 °.
Furthermore, the laser source comprises three lasers, the lasers emitted by the three lasers are respectively a first laser, a second laser and a third laser, and the wavelengths of the three lasers are different and have no common divisor;
the light control switches comprise three light control switches, namely a first light control switch, a second light control switch and a third light control switch, the first light control switch turns on or turns off the first laser to irradiate the light combining device, the second light control switch turns on or turns off the second laser to irradiate the light combining device, and the third light control switch turns on or turns off the third laser to irradiate the light combining device.
In the above scheme, after the lasers with different wavelengths participate in the interferometry respectively, the fractional part of each laser interferometry is obtained, for example, after the first laser participates in the interferometry, the interferometry result of the first laser is that the number of interference phase fringes is 3.4, then the fractional part of the interference phase fringes is obtained as 0.4, and the fractional part is used to participate in distance calculation through a fractional superposition theory. The decimal coincidence theory can refer to the research on the large-size absolute distance measurement method based on the femtosecond laser optical frequency comb in the Wang national super
Furthermore, each light control switch enables the corresponding laser light to be emitted to the light combining device at different times.
In the above scheme, since only one photoswitch is turned on and the other photoswitches are turned off at each time, the lasers do not simultaneously irradiate the light combining device but respectively participate in the interferometric measurement, so that the respective interferometric measurement fractional part is obtained, a light splitting device is not needed, a laser beam or a composite laser beam does not need to be split into multiple laser beams, and the attenuation of the laser beams to the light intensity during light splitting is reduced. Although the multiple laser beams are not combined into one composite laser beam to participate in interference, the paths of the laser beams reaching the interference measurement photoelectric detector through the light combination device are the same.
A time-sharing multi-wavelength laser interference distance measuring method comprises the following steps:
step S1: sequentially starting the photoswitches to enable the laser corresponding to the started photoswitches to emit laser to the light combining device, and when any photoswitch is started, other photoswitches are closed to enable only one laser to be emitted into the light combining device at any time, so that only the laser participates in interference measurement, and the decimal part of the laser interference measurement is obtained;
step S2: until all the fractional parts of the laser interferometry are obtained, the absolute distance of the laser measurement is obtained according to the fractional parts of each laser interferometry.
Further, the method includes three lasers, which respectively emit a first laser, a second laser, and a third laser, and the step S1 specifically includes the following steps:
firstly, a first photoswitch is turned on, and a second photoswitch and a third photoswitch are turned off at the same time, so that a first laser corresponding to the first photoswitch can emit first laser to a light combining device, and the first laser participates in interference measurement to obtain a decimal part of the first laser interference measurement;
then, a second photoswitch is turned on, and the first photoswitch and the third photoswitch are turned off at the same time, so that a second laser corresponding to the second photoswitch can emit second laser to the light combining device, and the second laser participates in interference measurement to obtain a decimal part of the second laser interference measurement;
and finally, turning on a third photoswitch, and turning off the first photoswitch and the second photoswitch at the same time, so that a third laser corresponding to the third photoswitch can emit a third laser to the light combining device, and the third laser participates in interference measurement to obtain a decimal part of the interference measurement of the third laser.
Furthermore, when there are three lasers, the light combining device includes two light combining mirrors, which are a first light combining mirror and a second light combining mirror respectively; the first laser, the second laser and the third laser participate in the step of interferometry, which comprises the following steps:
the first laser transmits first laser to a reflecting surface of a second light-combining mirror through a started first light-operated switch, so that the first laser is reflected to the spectroscope through the reflecting surface of the second light-combining mirror, the spectroscope reflects the first laser to the fixed plane reflecting mirror and transmits the first laser to the movable plane reflecting mirror, the first laser is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the first laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and the first laser participates in interference measurement;
the second laser emits second laser to the transmission surface of the first light combining mirror through the opened second light control switch, the second laser is transmitted to the transmission surface of the second light combining mirror after being transmitted by the first light combining mirror, the second laser is transmitted to the spectroscope after being transmitted by the second light combining mirror, the second laser is reflected to the fixed plane reflecting mirror and is transmitted to the movable plane reflecting mirror by the spectroscope, the second laser is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the second laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector by the spectroscope, and the second laser participates in interference measurement;
the third laser emits third laser to the reflecting surface of the first light combining mirror through the opened third light control switch, the third laser is reflected to the transmitting surface of the second light combining mirror through the first light combining mirror, the third laser is transmitted to the spectroscope through the second light combining mirror, the third laser is reflected to the fixed plane reflecting mirror and is transmitted to the movable plane reflecting mirror, the third laser is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the third laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and the third laser participates in interference measurement.
Compared with the prior art, the invention has the beneficial effects that:
the contrast patent number is CN106093956A, the name is "a laser rangefinder system" prior art, this scheme is through the photoswitch that sets up high-speed control, change the laser light path that the laser instrument launches through closing the light device, make laser incidence to the spectroscope, the beam splitting device has been saved, only use an interferometry photoelectric detector can obtain laser interferometry's decimal part, the number of times of the beam splitting of laser has been reduced, can effectively reduce the final luminous intensity attenuation that reaches interferometry photoelectric detector of laser, make interferometry's laser luminous intensity improve, thereby improve measurement accuracy. And after the light splitting device is removed and the number of the interference measurement photoelectric detectors is reduced, the volume of the whole ranging system is reduced, and the light path is simplified, so that the invention makes a remarkable progress in the field of multi-wavelength laser interference ranging.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic diagram of a prior art ranging system;
FIG. 2 is a schematic diagram of a ranging system according to the present invention.
Description of the main elements
The device comprises a first laser 11, a second laser 12, a third laser 13, a first photoswitch 21, a second photoswitch 22, a third photoswitch 23, a light combining device 3, a first light combining mirror 31, a second light combining mirror 32, a spectroscope 4, a fixed plane reflector 5, a movable plane reflector 6, an interference measurement photoelectric detector 7, a light splitting device 8, a first spectroscope 81, a second spectroscope 82, a first photoelectric detector 71, a second photoelectric detector 72 and a third photoelectric detector 73.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Also, in the description of the present invention, the terms "first", "second", and the like are used for distinguishing between descriptions and not necessarily for describing a relative importance or implying any actual relationship or order between such entities or operations.
Example 1:
the invention is realized by the following technical scheme that as shown in figure 2, the device comprises a laser source, a fixed plane reflector, a spectroscope, a movable plane reflector, an interference measurement photoelectric detector, a light combining device and a light control switch, wherein the laser source comprises at least two lasers, and the wavelengths of the laser emitted by each laser are different and have no common divisor. At least two lasers are respectively provided with a photoswitch in one-to-one correspondence, when any photoswitch is turned on, other photoswitches are turned off, so that the laser corresponding to the turned-on photoswitch can emit laser to the light combining device, and at the moment, the laser corresponding to the other photoswitch cannot emit laser to the light combining device.
The light combining device reflects or transmits the received laser to the spectroscope, the laser is reflected to the fixed plane reflector through the spectroscope and is transmitted to the movable plane reflector, then the laser is reflected to the spectroscope through the fixed plane reflector and the movable plane reflector, and finally the laser is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope.
In detail, the light combining device comprises light combining mirrors, if the number of the lasers is N, the number of the light combining mirrors should be N-1, and an included angle between every two adjacent light combining mirrors is 90 °. The light combining mirror is provided with two surfaces, wherein one surface is a reflecting surface, the other surface is a transmitting surface, the reflecting surface is provided with an antireflection film, and the transmitting surface is provided with an antireflection film. That is, when the laser light is incident on the reflecting surface of the light combining mirror, most of the laser light is reflected by the light combining mirror; when the laser light is incident on the transmission surface of the light combining mirror, most of the laser light is transmitted by the light combining mirror.
For example, the present embodiment has three lasers, which are respectively defined as a first laser, a second laser and a third laser for easy understanding, and the emitted laser light is respectively a first laser, a second laser and a third laser, and the three laser light have different wavelengths and have no common divisor.
Correspondingly, there are three photoswitches, namely a first photoswitch, a second photoswitch and a third photoswitch. The first photoswitch turns on or turns off the first laser to irradiate the light combining device, the second photoswitch turns on or turns off the second laser to irradiate the light combining device, and the third photoswitch turns on or turns off the third laser to irradiate the light combining device.
When there are three lasers, the light combining device should have two light combining mirrors, which are a first light combining mirror and a second light combining mirror, respectively, an included angle between the first light combining mirror and the second light combining mirror is 90 °, and a reflection surface of the first light combining mirror corresponds to a transmission surface of the second light combining mirror.
Referring to fig. 2, first, the first photoswitch is turned on, and the second photoswitch and the third photoswitch are turned off at the same time, so that the first laser corresponding to the first photoswitch can emit the first laser to the light combining device, and when any photoswitch is turned on, the other photoswitches are turned off, so that only one laser can be emitted into the light combining device at any time; the first laser is incident to the reflecting surface of the second light combining mirror, so that the first laser is reflected to the spectroscope through the reflecting surface of the second light combining mirror, and the spectroscope reflects the first laser to the fixed plane reflecting mirror and transmits the first laser to the movable plane reflecting mirror; and the first laser reflected by the fixed plane reflector and the movable plane reflector is transmitted and reflected to the interference measurement photoelectric detector by the spectroscope, so that the first laser participates in interference measurement and obtains a decimal part of the first laser interference measurement.
Because the distances from the fixed plane reflector and the movable plane reflector to the same point on the spectroscope are unequal, the first laser is reflected to the fixed plane reflector through the spectroscope and is transmitted to the movable plane reflector through the spectroscope, the first laser is divided into two beams of laser, the phases of the two beams of laser are changed, the two beams of laser finally return to the spectroscope, and when the two beams of laser are transmitted and reflected to the interference measurement photoelectric detector from the spectroscope, the first laser also generates an interference phenomenon.
Similarly, the second photoswitch is turned on, and the first photoswitch and the third photoswitch are turned off at the same time, so that the second laser corresponding to the second photoswitch can emit second laser to the light combining device; the second laser is incident to the transmission surface of the first light combining mirror, so that the second laser is transmitted to the transmission surface of the second light combining mirror through the first light combining mirror and then transmitted to the spectroscope through the second light combining mirror, and the spectroscope reflects the second laser to the fixed plane reflector and transmits the second laser to the movable plane reflector; and the second laser reflected by the fixed plane reflector and the movable plane reflector is transmitted and reflected to the interference measurement photoelectric detector by the spectroscope, so that the second laser participates in interference measurement and obtains a decimal part of the second laser interference measurement.
Finally, a third photoswitch is turned on, and the first photoswitch and the second photoswitch are turned off at the same time, so that a third laser corresponding to the third photoswitch can emit third laser to the light combining device; the third laser is incident to the emitting surface of the first light combining mirror, so that the third laser is reflected to the transmission surface of the second light combining mirror through the first light combining mirror and then transmitted to the spectroscope through the second light combining mirror, and the spectroscope reflects the third laser to the fixed plane reflector and transmits the third laser to the movable plane reflector; and the third laser reflected by the fixed plane reflector and the movable plane reflector is transmitted and reflected to the interference measurement photoelectric detector by the spectroscope, so that the third laser participates in interference measurement and obtains a decimal part of the third laser interference measurement.
And after the interference measurement fractional parts of the first laser, the second laser and the third laser are obtained, the absolute distance measured by the lasers is obtained according to the wavelength fractional parts of the three beams of lasers.
The contrast patent number is CN106093956A, the name is "a laser rangefinder system" prior art, this scheme is through setting up high speed control's photoswitch, change the laser light path that the laser instrument sent through closing the light device, make laser incidence to the spectroscope, the beam splitting device has been saved, only use an interferometry photoelectric detector can obtain the decimal part that the laser was interfered, the number of times of the beam splitting of laser has been reduced, can reduce the final decay that reachs interferometry photoelectric detector of laser, make the luminous intensity of laser improve, thereby improve measurement accuracy. And after the light splitting device is removed and the number of the interference measurement photoelectric detectors is reduced, the volume of the whole ranging system is reduced, and the light path is simplified, so that the invention makes a remarkable progress in the field of multi-wavelength laser interference ranging.
The invention also provides a time-sharing multi-wavelength laser interference distance measurement method, which comprises the following steps:
step S1: and sequentially starting the photoswitches to enable the laser corresponding to the started photoswitch to emit laser to the light combining device, and when any photoswitch is started, other photoswitches are closed to enable only one laser beam to be emitted into the light combining device at any moment, so that only the laser beam participates in interference measurement, and the decimal part of the laser interference measurement is obtained.
1. The method includes three lasers, which respectively emit a first laser, a second laser, and a third laser, and the step S1 specifically includes the following steps:
firstly, a first photoswitch is turned on, and a second photoswitch and a third photoswitch are turned off at the same time, so that a first laser corresponding to the first photoswitch can emit first laser to a light combining device, and the first laser participates in interference measurement to obtain a decimal part of the first laser interference measurement;
then, a second photoswitch is turned on, and the first photoswitch and the third photoswitch are turned off at the same time, so that a second laser corresponding to the second photoswitch can emit second laser to the light combining device, and the second laser participates in interference measurement to obtain a decimal part of the second laser interference measurement;
and finally, turning on a third photoswitch, and turning off the first photoswitch and the second photoswitch at the same time, so that a third laser corresponding to the third photoswitch can emit a third laser to the light combining device, and the third laser participates in interference measurement to obtain a decimal part of the interference measurement of the third laser.
2. When there are three lasers, the light combining device comprises two light combining mirrors, namely a first light combining mirror and a second light combining mirror; the first laser, the second laser and the third laser participate in the step of interferometry, which comprises the following steps:
the first laser transmits first laser to a reflecting surface of a second light-combining mirror through a started first light-operated switch, so that the first laser is reflected to the spectroscope through the reflecting surface of the second light-combining mirror, the spectroscope reflects the first laser to the fixed plane reflecting mirror and transmits the first laser to the movable plane reflecting mirror, the first laser is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the first laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and the first laser participates in interference measurement;
the second laser emits second laser to the transmission surface of the first light combining mirror through the opened second light control switch, the second laser is transmitted to the transmission surface of the second light combining mirror through the first light combining mirror, the second laser is transmitted through the second light combining mirror and then enters the spectroscope, the second laser is reflected to the fixed plane reflecting mirror and is transmitted to the movable plane reflecting mirror and is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the second laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and therefore the second laser participates in interference measurement;
the third laser emits third laser to the reflecting surface of the first light combining mirror through the opened third light control switch, the third laser is reflected to the transmitting surface of the second light combining mirror through the first light combining mirror, the third laser is transmitted through the second light combining mirror and then enters the spectroscope, the third laser is reflected to the fixed plane reflecting mirror and is transmitted to the movable plane reflecting mirror, the third laser is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the third laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and therefore the third laser participates in interference measurement.
Step S2: until all the fractional parts of the laser interferometry are obtained, the absolute distance of the laser measurement is obtained according to the fractional parts of each laser interferometry.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. The utility model provides a time-sharing multi-wavelength laser interference range finding system, includes laser source, fixed plane speculum, spectroscope, removal plane speculum, interferometry photoelectric detector, its characterized in that: also comprises a light combination device and a light control switch, wherein,
the laser source comprises at least two lasers, and the wavelength of laser emitted by each laser is different and has no common divisor;
the optical control switches are arranged in one-to-one correspondence with the lasers and used for turning on or off the lasers emitted by the corresponding lasers to the light combining device;
the light combining device reflects or transmits the received laser to the spectroscope, the laser is reflected to the fixed plane reflector through the spectroscope and is transmitted to the movable plane reflector, then the laser is reflected to the spectroscope through the fixed plane reflector and the movable plane reflector, and finally the laser is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope.
2. The time-sharing multi-wavelength laser interferometric ranging system of claim 1, wherein: the light combining device comprises a light combining mirror, the light combining mirror is provided with two surfaces which are respectively a reflecting surface and a transmitting surface, the reflecting surface is provided with an antireflection film, and the transmitting surface is provided with an antireflection film.
3. The time-sharing multi-wavelength laser interferometric ranging system of claim 1, wherein: the laser source comprises N lasers, the light combining device comprises N-1 light combining mirrors, and an included angle between every two adjacent light combining mirrors is 90 degrees.
4. The time-sharing multi-wavelength laser interferometric ranging system of claim 1, wherein: the laser source comprises three lasers, the lasers emitted by the three lasers are respectively a first laser, a second laser and a third laser, the wavelengths of the three lasers are different, and no common divisor exists;
the light control switches comprise three light control switches, namely a first light control switch, a second light control switch and a third light control switch, the first light control switch turns on or turns off the first laser to irradiate the light combining device, the second light control switch turns on or turns off the second laser to irradiate the light combining device, and the third light control switch turns on or turns off the third laser to irradiate the light combining device.
5. The time-sharing multi-wavelength laser interferometric ranging system according to claim 1 or 4, characterized in that: each light control switch enables the corresponding laser to emit to the light combination device at different times.
6. A time-sharing multi-wavelength laser interference distance measuring method is characterized in that: the method comprises the following steps:
step S1: sequentially starting the photoswitches to enable the laser corresponding to the started photoswitches to emit laser to the light combining device, and when any photoswitch is started, other photoswitches are closed to enable only one laser beam to be emitted into the light combining device at any moment, so that only the laser beam participates in interference measurement, and the decimal part of the laser interference measurement is obtained;
step S2: until all the fractional parts of the laser interferometry are obtained, the absolute distance of the laser measurement is obtained according to the fractional parts of each laser interferometry.
7. The time-sharing multi-wavelength laser interferometric ranging method according to claim 6, wherein: the method includes three lasers, which respectively emit a first laser, a second laser, and a third laser, and the step S1 specifically includes the following steps:
firstly, a first photoswitch is turned on, and a second photoswitch and a third photoswitch are turned off at the same time, so that a first laser corresponding to the first photoswitch can emit first laser to a light combining device, and the first laser participates in interference measurement to obtain a decimal part of the first laser interference measurement;
then, a second photoswitch is turned on, and the first photoswitch and the third photoswitch are turned off at the same time, so that a second laser corresponding to the second photoswitch can emit second laser to the light combining device, and the second laser participates in interference measurement to obtain a decimal part of the second laser interference measurement;
and finally, turning on a third photoswitch, and turning off the first photoswitch and the second photoswitch at the same time, so that a third laser corresponding to the third photoswitch can emit a third laser to the light combining device, and the third laser participates in interference measurement to obtain a decimal part of the interference measurement of the third laser.
8. The time-sharing multi-wavelength laser interferometric ranging method according to claim 7, wherein: when there are three lasers, the light combining device comprises two light combining mirrors, namely a first light combining mirror and a second light combining mirror; the first laser, the second laser and the third laser participate in the step of interferometry, which comprises the following steps:
the first laser transmits first laser to a reflecting surface of a second light-combining mirror through a started first light-operated switch, so that the first laser is reflected to the spectroscope through the reflecting surface of the second light-combining mirror, the spectroscope reflects the first laser to the fixed plane reflecting mirror and transmits the first laser to the movable plane reflecting mirror, the first laser is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the first laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and the first laser participates in interference measurement;
the second laser emits second laser to the transmission surface of the first light combining mirror through the opened second light control switch, the second laser is transmitted to the transmission surface of the second light combining mirror through the first light combining mirror, the second laser is transmitted through the second light combining mirror and then enters the spectroscope, the second laser is reflected to the fixed plane reflecting mirror and is transmitted to the movable plane reflecting mirror and is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the second laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and therefore the second laser participates in interference measurement;
the third laser emits third laser to the reflecting surface of the first light combining mirror through the opened third light control switch, the third laser is reflected to the transmitting surface of the second light combining mirror through the first light combining mirror, the third laser is transmitted through the second light combining mirror and then enters the spectroscope, the third laser is reflected to the fixed plane reflecting mirror and is transmitted to the movable plane reflecting mirror, the third laser is reflected back to the spectroscope through the fixed plane reflecting mirror and the movable plane reflecting mirror, the third laser reflected by the fixed plane reflecting mirror and the movable plane reflecting mirror is transmitted and reflected to the interference measurement photoelectric detector through the spectroscope, and therefore the third laser participates in interference measurement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110260412.9A CN112859042A (en) | 2021-03-10 | 2021-03-10 | Time-sharing multi-wavelength laser interference distance measuring system and method |
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| CN202110260412.9A CN112859042A (en) | 2021-03-10 | 2021-03-10 | Time-sharing multi-wavelength laser interference distance measuring system and method |
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| CN112859042A true CN112859042A (en) | 2021-05-28 |
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| CN202110260412.9A Pending CN112859042A (en) | 2021-03-10 | 2021-03-10 | Time-sharing multi-wavelength laser interference distance measuring system and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018823A (en) * | 2021-09-18 | 2022-02-08 | 宝宇(武汉)激光技术有限公司 | Excitation and reception integrated laser ultrasonic flaw detection equipment and method |
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2021
- 2021-03-10 CN CN202110260412.9A patent/CN112859042A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018823A (en) * | 2021-09-18 | 2022-02-08 | 宝宇(武汉)激光技术有限公司 | Excitation and reception integrated laser ultrasonic flaw detection equipment and method |
| CN114018823B (en) * | 2021-09-18 | 2023-03-10 | 宝宇(武汉)激光技术有限公司 | Excitation and reception integrated laser ultrasonic flaw detection equipment and method |
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