CN112857489A - Graphene film-based liquid micro-flow metering device and manufacturing method thereof - Google Patents
Graphene film-based liquid micro-flow metering device and manufacturing method thereof Download PDFInfo
- Publication number
- CN112857489A CN112857489A CN202110017954.3A CN202110017954A CN112857489A CN 112857489 A CN112857489 A CN 112857489A CN 202110017954 A CN202110017954 A CN 202110017954A CN 112857489 A CN112857489 A CN 112857489A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- graphene film
- film
- graphene
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 75
- 239000007788 liquid Substances 0.000 title claims abstract description 55
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000013307 optical fiber Substances 0.000 claims abstract description 115
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 26
- 238000001228 spectrum Methods 0.000 claims description 16
- 238000003466 welding Methods 0.000 claims description 11
- 239000012528 membrane Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 5
- 239000000835 fiber Substances 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 3
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- CRQQGFGUEAVUIL-UHFFFAOYSA-N chlorothalonil Chemical compound ClC1=C(Cl)C(C#N)=C(Cl)C(C#N)=C1Cl CRQQGFGUEAVUIL-UHFFFAOYSA-N 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007596 consolidation process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/661—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters using light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/662—Constructional details
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
本发明公开了一种基于石墨烯膜的液体微小流量计量装置及其制作方法，所述装置包括光纤传感器、金属弹性薄膜、石墨烯膜、液体腔、阻隔板、进水管道与计时器；所述光纤传感器包括光纤和光纤插芯；所述光纤与光纤插芯的一端连接固定在一起，所述光纤内焊接有光栅；所述石墨烯膜固定于光纤插芯的一端，光纤通过光纤插芯的另一端插入，并使光纤的端面与石墨烯膜构成法珀腔；所述液体腔的一端与金属弹性薄膜焊接固定在一起，另一端连接进水管道。
The invention discloses a graphene film-based liquid micro flow metering device and a manufacturing method thereof. The device comprises an optical fiber sensor, a metal elastic film, a graphene film, a liquid cavity, a baffle plate, a water inlet pipe and a timer; The optical fiber sensor includes an optical fiber and an optical fiber ferrule; one end of the optical fiber and the optical fiber ferrule are connected and fixed together, and a grating is welded in the optical fiber; the graphene film is fixed on one end of the optical fiber ferrule, and the optical fiber passes through the optical fiber ferrule. The other end of the liquid cavity is inserted, and the end face of the optical fiber and the graphene film form a Faber cavity; one end of the liquid cavity is welded and fixed with the metal elastic film, and the other end is connected to the water inlet pipe.
Description
Technical Field
The invention relates to the technical field of micro-flow measurement, in particular to a graphene film-based liquid micro-flow measurement device and a manufacturing method thereof.
Background
With the development of science and technology, the requirement for flow measurement accuracy is higher and higher, and the measurement and measurement of micro flow become the research enthusiasm. The graphene film is one of the materials with the highest known strength, and simultaneously has good mechanical properties such as toughness and very good optical characteristics. The optical fiber interference sensor is also the most widely used optical sensor, and has the advantages of small size, electromagnetic interference resistance and the like. The invention discloses a liquid micro-flow metering device based on a graphene film volume method, which is characterized in that a graphene film and an optical fiber interference sensor are utilized to convert the change of the flow into the change of an optical fiber reflection interference spectrum, and then a fiber grating demodulator is utilized to analyze the spectrum.
Disclosure of Invention
In order to solve the technical problems, the invention aims to provide a graphene film-based liquid micro-flow metering device and a manufacturing method thereof.
The purpose of the invention is realized by the following technical scheme:
a graphene membrane based liquid micro-flow metering device comprising:
the device comprises an optical fiber sensor, a metal elastic film, a graphene film, a liquid cavity, a baffle plate, a water inlet pipeline and a timer;
the optical fiber sensor comprises an optical fiber and an optical fiber inserting core; the optical fiber is fixedly connected with one end of the optical fiber insertion core, and the grating is welded in the optical fiber;
the graphene film is fixed at one end of the optical fiber ferrule, the optical fiber is inserted through the other end of the optical fiber ferrule, and the end face of the optical fiber and the graphene film form a Fabry-Perot cavity;
one end of the liquid cavity is welded and fixed with the metal elastic film, and the other end of the liquid cavity is connected with the water inlet pipeline.
A method for manufacturing a graphene membrane-based liquid micro-flow metering device comprises the following steps:
welding the grating in the optical fiber;
the end surfaces of the optical fiber and the optical fiber ferrule are subjected to cleanliness and flatness treatment;
cutting the graphene film into a circle with a proper size, removing the PMMA coating through an acetone solution, immersing the optical fiber ferrule below the suspended graphene film, performing film fishing and wet transfer, then placing the optical fiber ferrule adsorbed with the graphene film in a drying box, heating to 40 ℃, and keeping for 1 hour, so that the dried graphene film is adsorbed on one end of the optical fiber ferrule;
after the graphene film is fixed at one end of the optical fiber ferrule, connecting and fixing the optical fiber and the other end of the optical fiber ferrule to enable the end face of the optical fiber and the graphene film to form a Fabry-Perot cavity;
welding and fixing one end of the liquid cavity and the metal elastic film together, and connecting the other end of the liquid cavity with the water inlet pipe;
one end of the optical fiber ferrule fixed with the graphene film is fixed with one end of the pipeline, the other section of the pipeline is fixed with the liquid cavity fixed with the metal elastic film, and the graphene film and the metal elastic film form an inert gas cavity.
One or more embodiments of the present invention may have the following advantages over the prior art:
the micro flow meter has the advantages of simple manufacture, small volume, high sensitivity and electromagnetic interference resistance, and can be used for measuring micro flow and calibrating the micro flow meter in the fields of biomedicine, aerospace, industrial measurement and the like.
Drawings
FIG. 1 is a structural diagram of a graphene membrane-based liquid micro-flow metering device;
fig. 2 is a structural view of a graphene film-based liquid micro-flow meter during experimental measurement.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the following embodiments and accompanying drawings.
As shown in fig. 1, the graphene film-based liquid micro-flow metering device comprises: the device comprises an optical fiber sensor, a metal elastic film 1, a graphene film 2, a liquid cavity 3, a baffle plate 4, a water inlet pipeline 5 and a timer; the optical fiber sensor comprises an optical fiber 6 and an optical fiber inserting core 7; the optical fiber is fixedly connected with one end of the optical fiber insertion core, and a grating 8 is welded in the optical fiber; the graphene film is fixed at one end of the optical fiber ferrule, the optical fiber is inserted through the other end of the optical fiber ferrule, and the end face of the optical fiber and the graphene film form a Fabry-Perot cavity 9; one end of the liquid cavity is welded and fixed with the metal elastic film, and the other end of the liquid cavity is connected with the water inlet pipeline.
A straight pipeline is arranged between the graphene film fixedly connected with the optical fiber inserting core and the metal elastic film fixed on the liquid cavity, and the graphene film and the metal elastic film form an inert gas cavity 10 through the connection of the straight pipeline. The graphene film and the optical fiber form a Fabry-Perot cavity, and the change of the length of the Fabry-Perot cavity is used for changing the reflection interference spectrum of the optical fiber. And barrier plates are arranged above and below the inside of the liquid cavity and used for reducing the impact of water flow on the graphene film. The section of the graphene film is larger than that of the optical fiber inserting core so as to fix the graphene film on the liquid cavity.
The embodiment also provides a method for manufacturing the graphene film-based liquid micro-flow metering device, which comprises the following steps:
1) the grating is soldered into the fiber by means of a fiber soldering machine.
2) The end surfaces of the optical fiber and the optical fiber ferrule are subjected to cleanliness and flatness treatment;
the method comprises the steps of cutting an optical fiber, processing the surface of a bare core, processing the surface of the end face of a ferrule, and detecting the flatness of the end face by using an end face detector; the treatment of the end face of the optical fiber ferrule is as follows: ultrasonic cleaning can be carried out, and then an optical fiber cleaning pen is selected for cleaning; for an optical fiber: and (3) cutting one end of the tail part of the optical fiber flat by using an optical fiber cutter, reserving a bare core with the length of about 1cm, enabling the end surface of the bare core to be vertical to the axial direction of the optical fiber, and then checking the flatness by using an optical fiber fusion splicer, for example, if the inclination angle between the plane and the cross section of the optical fiber is smaller than 1 degree, the optical fiber is qualified, or the optical fiber is continuously cut.
3) Cutting the graphene film into a circle with a proper size, removing the PMMA coating through an acetone solution, immersing the optical fiber ferrule below the suspended graphene film, performing film fishing and wet transfer, then placing the optical fiber ferrule adsorbed with the graphene film in a drying box, heating to 40 ℃, and keeping for 1 hour, so that the dried graphene film is adsorbed on one end of the optical fiber ferrule;
4) after the graphene film is fixed at one end of the optical fiber ferrule, connecting and fixing the optical fiber and the other end of the optical fiber ferrule to enable the end face of the optical fiber and the graphene film to form a Fabry-Perot cavity;
and (3) performing welding treatment on the joint of the end face of the optical fiber and the end face of the optical fiber ferrule, wherein low-temperature welding or laser welding can be selected.
5) Welding and fixing one end of the liquid cavity and the metal elastic film together, and connecting the other end of the liquid cavity with the water inlet pipe;
6) one end of the optical fiber ferrule fixed with the graphene film is fixed with one end of the pipeline, the other section of the pipeline is fixed with the liquid cavity fixed with the metal elastic film, and the graphene film and the metal elastic film form an inert gas cavity.
The joint of one end of the optical fiber ferrule fixed with the graphene film and one end of the pipeline is connected by adopting a welding flux, laser or consolidation mode, and the like, and the elastic metal diaphragm is connected with the liquid cavity by adopting a welding flux or laser welding.
The Fabry-Perot cavity formed by the graphene film optical fiber changes the relation of reflection interference spectrum of the optical fiber, such as light intensity and frequency of the spectrum, through the change of the length of the Fabry-Perot cavity.
The volume of water can be obtained by calculating the flow and the time, the change of the optical fiber reflection interference spectrum caused by the increase of the volume of water can be changed into the change of the optical fiber reflection interference spectrum caused by the size of the flow, the timing is started when the water is input again, meanwhile, the optical fiber measuring point is aligned to the circle center of the graphene film, the reflected light spectrum and the time data are recorded, the experiment is carried out for many times, other variables are unchanged, only the flow is changed, and the relation between the flow and the reflection interference spectrum measured by the optical fiber is found out; the water flow flows into the liquid cavity from the water inlet pipe, the barrier plate is arranged in the liquid cavity to reduce the impact of the water flow on the graphene film, and the other end of the liquid cavity is provided with the metal elastic film; before the test starts, a water flow is added to make the metal elastic film in a strain-free state.
As shown in fig. 2, after the part of water flowing into the liquid chamber makes the metal elastic membrane in a non-strain state (neither concave nor convex); after the measurement is started, water continuously flows into the liquid cavity through the water inlet pipe (the timer starts to time and is recorded as t)0) The metal elastic film is deformed (protruded outwards) due to the increase of the volume of water in the liquid cavity, so that the air pressure in the inert gas cavity is increased, and the graphene film is strained due to the increase of the air pressure, namely the graphene film and the inert gasThe length of the Fabry-Perot cavity formed by the optical fiber changes, which causes the reflection interference spectrum of the optical fiber to change (such as the frequency and the light intensity to change), when the volume of water in the liquid cavity is filled quickly, the measurement such as the input of water is stopped (the timer stops counting and is recorded as t)1). It can be concluded that the increase of the volume of water in the liquid chamber is the main cause of the change of the reflection interference spectrum (such as the change of frequency and light intensity) measured by the optical fiber, and enters the optical fiber regulator 12 through the jumper 11 to obtain the relationship between the chamber length and the interference spectrum, and then the volume of the water flowing in after the timing is started can be obtained by calculating the flow and the time by knowing the time and the flow of the water. Therefore, the relationship between the flow rate of water and the change of the reflection interference spectrum of the optical fiber can be known. The flow of water is changed, and the relation between the reflection interference spectrum (such as light intensity and frequency) of the optical fiber measured by the optical fiber and the flow of the added water is found out through a plurality of experiments, so that the micro flow is measured.
Although the embodiments of the present invention have been described above, the above descriptions are only for the convenience of understanding the present invention, and are not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (7)
1. A graphene film-based liquid micro-flow metering device is characterized by comprising an optical fiber sensor, a metal elastic film, a graphene film, a liquid cavity, a baffle plate, a water inlet pipeline and a timer;
the optical fiber sensor comprises an optical fiber and an optical fiber inserting core; the optical fiber is fixedly connected with one end of the optical fiber insertion core, and the grating is welded in the optical fiber;
the graphene film is fixed at one end of the optical fiber ferrule, the optical fiber is inserted through the other end of the optical fiber ferrule, and the end face of the optical fiber and the graphene film form a Fabry-Perot cavity;
one end of the liquid cavity is welded and fixed with the metal elastic film, and the other end of the liquid cavity is connected with the water inlet pipeline.
2. The graphene film based liquid micro-flow metering device according to claim 1, wherein a straight pipeline is arranged between the graphene film fixedly connected with the optical fiber ferrule and the metal elastic film fixed on the liquid cavity, and the graphene film and the metal elastic film form an inert gas cavity through the connection of the straight pipeline.
3. The graphene membrane-based liquid micro-flow metering device of claim 1, wherein the graphene membrane and the optical fiber form a Fabry-Perot cavity, and the change of the length of the Fabry-Perot cavity is used for changing the reflection interference spectrum of the optical fiber.
4. The graphene film based liquid micro-flow metering device according to claim 1, wherein barrier plates are arranged above and below the inside of the liquid chamber and used for reducing impact of water flow on the graphene film.
5. The graphene membrane-based liquid micro-flow metering device of claim 1, wherein a cross section of the graphene membrane is larger than a cross section of the fiber stub to fix the graphene membrane to the liquid chamber.
6. The method for manufacturing the graphene-film-based liquid micro-flow metering device according to claim 1, wherein the method comprises:
welding the grating in the optical fiber;
the end surfaces of the optical fiber and the optical fiber ferrule are subjected to cleanliness and flatness treatment;
cutting the graphene film into a circle with a proper size, removing the PMMA coating through an acetone solution, immersing the optical fiber ferrule below the suspended graphene film, performing film fishing and wet transfer, then placing the optical fiber ferrule adsorbed with the graphene film in a drying box, heating to 40 ℃, and keeping for 1 hour, so that the dried graphene film is adsorbed on one end of the optical fiber ferrule;
after the graphene film is fixed at one end of the optical fiber ferrule, connecting and fixing the optical fiber and the other end of the optical fiber ferrule to enable the end face of the optical fiber and the graphene film to form a Fabry-Perot cavity;
welding and fixing one end of the liquid cavity and the metal elastic film together, and connecting the other end of the liquid cavity with the water inlet pipe;
one end of the optical fiber ferrule fixed with the graphene film is fixed with one end of the pipeline, the other section of the pipeline is fixed with the liquid cavity fixed with the metal elastic film, and the graphene film and the metal elastic film form an inert gas cavity.
7. The method for manufacturing the graphene film based liquid micro-flow metering device according to claim 6, wherein the Fabry-Perot cavity formed by the graphene film optical fiber changes the relation of reflection interference spectra of the optical fiber through the change of the length of the Fabry-Perot cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110017954.3A CN112857489B (en) | 2021-01-07 | 2021-01-07 | Graphene film-based liquid micro-flow metering device and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110017954.3A CN112857489B (en) | 2021-01-07 | 2021-01-07 | Graphene film-based liquid micro-flow metering device and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112857489A true CN112857489A (en) | 2021-05-28 |
| CN112857489B CN112857489B (en) | 2022-06-24 |
Family
ID=76004760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110017954.3A Active CN112857489B (en) | 2021-01-07 | 2021-01-07 | Graphene film-based liquid micro-flow metering device and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112857489B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115265679A (en) * | 2022-07-26 | 2022-11-01 | 北京化工大学 | A kind of differential pressure micro-flow sensor based on graphene film and its making method |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102944270A (en) * | 2012-11-16 | 2013-02-27 | 中国科学院半导体研究所 | Dynamometry-type optical fiber flowmeter |
| CN103234590A (en) * | 2013-05-10 | 2013-08-07 | 中国石油集团长城钻探工程有限公司 | Underground optical fiber flow sensor in oil field |
| CN103557985A (en) * | 2013-11-04 | 2014-02-05 | 贵州大学 | Differential pressure sensing method and sensor thereof |
| CN103557984A (en) * | 2013-11-04 | 2014-02-05 | 贵州大学 | Method and structure for packaging probes of differential pressure sensor |
| CN205037998U (en) * | 2015-07-10 | 2016-02-17 | 成都凯天电子股份有限公司 | Optic fibre F -P chamber stress release pressure sensor |
| CN105890679A (en) * | 2016-06-20 | 2016-08-24 | 天津大学 | Optical fiber Fabry-Perot type flow measuring device with local bending for flow guiding and measuring method |
| CN106153978A (en) * | 2016-06-20 | 2016-11-23 | 天津大学 | Flow velocity based on optical fiber MEMS method amber microcavity test device and method of testing |
| CN106225965A (en) * | 2016-07-04 | 2016-12-14 | 北京航空航天大学 | A kind of micro high sensitivity optical fiber interference type pressure transducer and preparation method thereof |
| CN107063554A (en) * | 2017-04-01 | 2017-08-18 | 天津大学 | A kind of integrated fiber big pressure sensor and preparation method thereof |
| US9995628B1 (en) * | 2015-05-14 | 2018-06-12 | Nutech Ventures | Fiber-optic temperature and flow sensor system and methods |
-
2021
- 2021-01-07 CN CN202110017954.3A patent/CN112857489B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102944270A (en) * | 2012-11-16 | 2013-02-27 | 中国科学院半导体研究所 | Dynamometry-type optical fiber flowmeter |
| CN103234590A (en) * | 2013-05-10 | 2013-08-07 | 中国石油集团长城钻探工程有限公司 | Underground optical fiber flow sensor in oil field |
| CN103557985A (en) * | 2013-11-04 | 2014-02-05 | 贵州大学 | Differential pressure sensing method and sensor thereof |
| CN103557984A (en) * | 2013-11-04 | 2014-02-05 | 贵州大学 | Method and structure for packaging probes of differential pressure sensor |
| US9995628B1 (en) * | 2015-05-14 | 2018-06-12 | Nutech Ventures | Fiber-optic temperature and flow sensor system and methods |
| CN205037998U (en) * | 2015-07-10 | 2016-02-17 | 成都凯天电子股份有限公司 | Optic fibre F -P chamber stress release pressure sensor |
| CN105890679A (en) * | 2016-06-20 | 2016-08-24 | 天津大学 | Optical fiber Fabry-Perot type flow measuring device with local bending for flow guiding and measuring method |
| CN106153978A (en) * | 2016-06-20 | 2016-11-23 | 天津大学 | Flow velocity based on optical fiber MEMS method amber microcavity test device and method of testing |
| CN106225965A (en) * | 2016-07-04 | 2016-12-14 | 北京航空航天大学 | A kind of micro high sensitivity optical fiber interference type pressure transducer and preparation method thereof |
| CN107063554A (en) * | 2017-04-01 | 2017-08-18 | 天津大学 | A kind of integrated fiber big pressure sensor and preparation method thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115265679A (en) * | 2022-07-26 | 2022-11-01 | 北京化工大学 | A kind of differential pressure micro-flow sensor based on graphene film and its making method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112857489B (en) | 2022-06-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110487454B (en) | A miniature diaphragm type optical fiber end FP pressure sensor, manufacturing method and application | |
| CN105954231B (en) | A kind of hole based on Mode Coupling mechanism helps twin-core fiber sensor | |
| CN105371981A (en) | Inner wall-silver plated and liquid crystal-filled hollow optical fiber surface plasmon resonance temperature sensor | |
| CN104374440A (en) | Micro-fluid flowmeter based on echo wall mode and manufacturing and applying method thereof | |
| CN109431481B (en) | Micro optical fiber pressure sensor, manufacturing method thereof and pressure sensing system | |
| CN105136744A (en) | Single particle scattering measurement apparatus based on microfluidic chip particle capturing | |
| CN106066313A (en) | Distributed surface plasma resonance optical fiber sensor and the method for measuring refractive indexes of liquid | |
| CN112857489A (en) | Graphene film-based liquid micro-flow metering device and manufacturing method thereof | |
| CN205157037U (en) | Focus supersound focus acoustic pressure measuring instrument | |
| CN203191069U (en) | Extrinsic optical fiber Fabry-Perot acoustic emission sensor and ultrasonic detection device comprising same | |
| TWI528021B (en) | Method of manufacturing a coriolis mass flow rate sensor from a polymeric material | |
| CN103398975B (en) | The measurement mechanism of optical glass refractive index and measuring method thereof | |
| CN111948423A (en) | A graphene-based flow sensor optical chip and its application | |
| CN101701905B (en) | Wide-aperture long path sample pool | |
| CN106482808A (en) | A kind of liquid level sensor based on quartzy glass capillary and preparation method | |
| CN104776954A (en) | Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor | |
| CN105887052B (en) | A kind of slant Bragg fiber grating side surface coating apparatus | |
| CN105866141A (en) | Dual-mode four-channel steam turbine steam humidity measuring system and method | |
| CN204085595U (en) | A kind of gas flow sensor | |
| CN105466808A (en) | Liquid refractive index optical fiber sensor based on image analysis and surface plasma resonance | |
| CN214583635U (en) | A device for measuring the speed of sound of cylindrical guided waves at high temperature | |
| CN104034698A (en) | Portable replaceable optical fiber SPR sensor probe | |
| CN113238075B (en) | Flow velocity meter based on optical fiber tweezers technology | |
| CN213397458U (en) | Residual stress measuring device based on phased array supersound | |
| CN107807110B (en) | Solution concentration detection system based on SPR sensor and preparation method of SPR sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |