CN112837994B - Cleaning method of semiconductor device - Google Patents
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- CN112837994B CN112837994B CN201911167421.2A CN201911167421A CN112837994B CN 112837994 B CN112837994 B CN 112837994B CN 201911167421 A CN201911167421 A CN 201911167421A CN 112837994 B CN112837994 B CN 112837994B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
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Abstract
The embodiment of the invention provides a method for cleaning a semiconductor device. In the embodiment of the invention, a wetting procedure is arranged at the interval of switching the cleaning solution so as to keep the liquid in the interval of the stacked structure. Through increasing the wetting process, do not need to switch over cleaning solution after dry front end device layer, can avoid the surface drying process of front end device layer in-process, the stacked structure slope that leads to because cleaning solution's surface tension. Therefore, the cleaning method provided by the embodiment of the invention can avoid the mutual contact of the adjacent stacked structures due to the inclination, so that the short circuit of the front-end device layer caused by the electric connection of the adjacent stacked structures is avoided. Therefore, the yield of the semiconductor device can be improved, and the reliability of the semiconductor device can be ensured.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a cleaning method of a semiconductor device.
Background
With the continuous development of semiconductor manufacturing processes, the integration level of semiconductor devices is higher and higher, and the feature size of semiconductor devices is also gradually reduced. However, the performance of semiconductor devices is also in need of improvement.
Disclosure of Invention
In view of the above, embodiments of the present invention provide a method for cleaning a semiconductor device to improve the performance of the semiconductor device.
The method of the embodiment of the invention comprises the following steps:
providing a front-end device layer comprising a plurality of stacked structures;
and cleaning the front-end device layer by adopting different cleaning solutions to remove impurities, wherein a wetting procedure is arranged between processes of switching the cleaning solutions to keep the cleaning solutions in the gaps of the stacked structure.
Further, the wetting process includes at least extension of a process before switching and pre-start of a process after switching.
Further, the semiconductor device is a nand flash memory.
Further, the cleaning solution includes at least one or more of dilute hydrofluoric acid, ozonated deionized water, and carbon dioxide-containing deionized water.
Further, the step of cleaning the front-end device layer with different cleaning solutions specifically includes:
and spraying a cleaning solution on the upper surface of the front-end device layer, and spraying nitrogen or deionized water containing carbon dioxide on the lower surface of the front-end device layer.
Further, the step of cleaning the front-end device layer with different cleaning solutions specifically includes:
a first step of spraying a dilute hydrofluoric acid solution on the upper surface of the front-end device layer;
a first wetting step of spraying a dilute hydrofluoric acid solution, carbon dioxide-containing deionized water, and ozonized deionized water in this order on the upper surface of the front-end device layer;
a second step of spraying ozonized deionized water on the upper surface of the front-end device layer;
a second wetting step of spraying ozonized deionized water and carbon dioxide-containing deionized water on the upper surface of the front-end device layer in sequence;
a third step of spraying deionized water containing carbon dioxide on the upper surface of the front-end device layer;
and a third wetting procedure, namely spraying deionized water containing carbon dioxide on the upper surface of the front-end device layer.
Further, the rotating speed of the chuck in the first procedure is 500rpm-1000rpm;
in the first wetting process, the rotation speeds of the chucks for spraying the dilute hydrofluoric acid solution, the deionized water containing carbon dioxide and the ozonized deionized water on the upper surface of the front-end device layer are respectively 500rpm-1000rpm,400rpm-800rpm and 400rpm-800rpm.
Further, the rotation speed of the second step is 400rpm-800rpm; the rotation speed of the second wetting procedure is 400rpm-800rpm.
Further, the rotation speed of the third step is 300rpm to 700rpm; the rotation speed of the third wetting procedure is 300rpm-700rpm.
Further, after the front-end device layer is cleaned by using different cleaning solutions, the method further comprises the following steps:
and drying the front-end device layer.
In the embodiment of the invention, a wetting procedure is arranged at the interval of switching the cleaning solution so as to keep the liquid in the interval of the stacked structure. Through increasing the wetting process, do not need to switch over cleaning solution after dry front end device layer, can avoid the surface drying process of front end device layer in-process, the stacked structure slope that leads to because cleaning solution's surface tension. Therefore, the cleaning method provided by the embodiment of the invention can avoid the mutual contact of the adjacent stacked structures due to the inclination, so that the short circuit of the front-end device layer caused by the electric connection of the adjacent stacked structures is avoided. Therefore, the yield of the semiconductor device can be improved, and the reliability of the semiconductor device can be ensured.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent from the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:
FIG. 1 is a photograph of a semiconductor device after cleaning by a cleaning method of a comparative example;
fig. 2 is a schematic view of a semiconductor device after cleaning by the cleaning method of the comparative example;
fig. 3 is a flowchart of a cleaning method of a semiconductor device of an embodiment of the present invention;
FIGS. 4-6 are schematic diagrams of structures formed at various steps of a method of cleaning a semiconductor device according to an embodiment of the present invention;
FIG. 7 is a photograph of front-end device layers after being cleaned using a cleaning method according to an embodiment of the invention;
FIG. 8 shows the yield test results of front-end device layers with 2200 angstroms trench depth between stacked structures after being cleaned by the cleaning methods according to the embodiments of the present invention and the comparative example;
fig. 9 shows the results of yield tests on the front-end device layers with trench depth of 1900 a between stacked structures after cleaning by the cleaning methods of the embodiment and the comparative example of the present invention, respectively.
Detailed Description
The present invention will be described below based on examples, but the present invention is not limited to only these examples. In the following detailed description of the present invention, certain specific details are set forth. It will be apparent to one skilled in the art that the present invention may be practiced without these specific details. Well-known methods, procedures, components and circuits have not been described in detail so as not to obscure the present invention.
Furthermore, those of ordinary skill in the art will appreciate that the drawings provided herein are for illustrative purposes and are not necessarily drawn to scale.
Unless the context clearly requires otherwise, throughout this specification, the words "comprise", "comprising", and the like are to be construed in an inclusive sense as opposed to an exclusive or exhaustive sense; that is, what is meant is "including, but not limited to".
In the description herein, it is to be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description herein, it is to be understood that the term "layer" is used in its broadest sense to include a film, a cap layer, or the like, and a layer may include a plurality of sub-layers.
Semiconductor devices are electronic devices that have electrical conductivity between a good electrical conductor and an insulator, and that use the special electrical properties of semiconductor materials to perform specific functions, and can be used to generate, control, receive, convert, amplify signals, and perform energy conversion. A commonly used semiconductor device includes a Flash Memory (FM). Flash memory is the most basic device in semiconductor manufacturing and is widely used in various integrated circuits, so that it is important to the development of integrated circuits to improve the performance of flash memory.
The Flash Memory is classified into a NOR Flash Memory (NOR) and a NAND Flash Memory (NAND) according to a structure. Compared with a not-gate flash memory, the nand-gate flash memory can provide high cell density and can achieve high storage density.
However, in order to improve the integration of the semiconductor device, the aspect ratio of the gate stack structure of the nand flash memory is increasingly higher. Cleaning is widely used in various stages of semiconductor manufacturing processes as a basic process in semiconductor manufacturing processes. Such as: in the step of removing the resist layer after the etching is completed, in the step of removing the surface residue after the etching is completed, and in the step of removing the surface residue after the ion implantation is completed, a cleaning process is required. As the aspect ratio of the gate stack structure increases, cleaning is difficult.
In one comparative example, a method of cleaning a semiconductor device includes spraying a dilute hydrofluoric acid solution, ozonated deionized water, and carbon dioxide-containing deionized water on a surface of a front-end device layer in this order. When the solution is switched, the spray head stops spraying the solution, which can cause the solution on the surface of the front-end device layer to evaporate, and the solution evaporation can form certain stress. The stress created by the evaporation of the solution tends to cause defects in high aspect ratio structures. Fig. 1 is a photograph of a semiconductor device after cleaning by the cleaning method of the comparative example. As shown in fig. 1, since the depth-to-width ratio of the stacked structure 1 is high, stress concentration is likely to occur during the cleaning process, thereby causing the gate stacked structure to bend or tilt. Therefore, the reliability of the semiconductor device is lowered. Fig. 2 is a schematic view of the semiconductor device after cleaning by the cleaning method of the comparative example. As shown in fig. 2, the stacked structure 1 includes a floating gate 2, an intergate dielectric layer 3, and a control gate 4, which are sequentially stacked.
In view of this, the performance of the semiconductor device is improved. The embodiment of the invention provides a method for cleaning a semiconductor device. In the embodiment of the present invention, the cleaning of the nand flash memory is taken as an example for description, and it should be understood that the cleaning method of the embodiment of the present invention can also be used for cleaning other semiconductor devices, such as Fin-Field-Effect transistors (Fin-FETs).
Fig. 3 is a flowchart of a cleaning method of a semiconductor device according to an embodiment of the present invention. As shown in fig. 3, the method for cleaning a semiconductor device according to the embodiment of the present invention includes the steps of:
and step S100, providing a front-end device layer. The front-end device layer comprises a plurality of stacked structures thereon.
And step S200, adopting different cleaning solutions to clean the front-end device layer so as to remove impurities. Wherein a wetting procedure is provided between processes of switching cleaning solutions to maintain the cleaning solution in the gaps of the stacked structure.
In an optional implementation manner, the method for cleaning a semiconductor device according to the embodiment of the present invention further includes:
and step S300, drying the front-end device layer.
Referring to fig. 4, in step S100, a front-end device layer 10 is provided. The front-end device layer 10 includes a plurality of stacked structures having an aspect ratio of a predetermined value.
Specifically, the front-end device layer 10 provided in step S100 may include a silicon single crystal substrate, a germanium single crystal substrate, or a silicon germanium single crystal substrate. Alternatively, front-end device layer 10 may also include a silicon-on-insulator (SOI) substrate, a silicon-on-insulator stack (SSOI), a silicon-on-insulator stack germanium (S-SiGeOI), a silicon-on-insulator germanium (SiGeOI), a germanium-on-insulator (GeOI), a substrate of an epitaxial layer structure on silicon, a compound substrate, or an alloy substrate. The compound substrate includes silicon carbide, gallium arsenide, gallium phosphide, indium arsenide, or indium dysprosium, the alloy substrate includes SiGe, gaAsP, alInAs, alGaAs, gaInAs, gaInP, gaInAsP, or combinations thereof, the SOI substrate includes a semiconductor layer (e.g., a silicon layer, a silicon germanium layer, a silicon carbon layer, or a germanium layer) disposed on an insulating material layer having active and passive devices therein, the insulating material layer protecting the active and passive devices disposed on the semiconductor layer.
As shown in fig. 4, the front-end device layer 10 includes a plurality of stacked structures 20. The stacked structure 20 includes a floating gate 21, an intergate dielectric layer 22, and a control gate 23, which are sequentially stacked. The stacked structure 20 is used to store data as a memory transistor.
As the integration degree of the semiconductor device is higher, the aspect ratio of the stacked structure 20 is higher, and the higher the aspect ratio of the stacked structure 20 is, the more easily the defect occurs. In an alternative implementation, the aspect ratio of the stacked structure 20 is greater than 10. In the present embodiment, the depth of the groove between the stacked structures 20 is 1900 angstroms.
The stacked structure 20 is formed by a photolithography process, and impurities 30 remain on the surface. The impurities 30 include organic particles, metal particles, and the like.
Referring to fig. 5, in step S200, the front-end device layer 10 is cleaned with different cleaning solutions to remove impurities. Wherein a wetting process is provided at the gap where the cleaning solution is switched to maintain the existence of the liquid at the gap of the stacked structure.
The wetting process includes at least an extension of the process before switching and a pre-start of the process after switching.
In the present embodiment, the cleaning operation is performed using a Single Wafer Clean (SWC) process. The single-chip cleaning has the advantages of excellent cleaning effect, short cleaning operation duration and the like. Specifically, the front-end device layer 10 is cleaned in a single-chip spraying machine.
The cleaning solution includes at least dilute hydrofluoric acid (DHF), ozonated deionized water (DIO) 3 ) And deionized water containing carbon Dioxide (DICO) 2 ) One or more of (a).
The dilute hydrofluoric acid is an aqueous solution of Hydrogen Fluoride (HF) and can corrode and dissolve an oxide layer formed on the surface of the wafer in the previous step, and partial metal impurities and other impurity particles on the surface of the wafer enter the hydrofluoric acid solution along with the dilute hydrofluoric acid and are discharged from the edge of the wafer, so that the purpose of removing the metal impurities and the other impurity particles is achieved. In the embodiment, dilute hydrofluoric acid (DHF) is adopted and is prepared by mixing 49% by mass of HF solution and water according to the volume ratio of 1:x, wherein x is more than or equal to 50 and less than or equal to 500.
Ozone (O) 3 ) Is a strong oxidant, can decompose organic matters to generate carbon dioxide and water, and ozone is corrosive to most metals. And meanwhile, ozonized deionized water is easy to obtain, and the cost can be reduced by adopting the ozonized deionized water as a cleaning solution. In thatIn this example O 3 The concentration of the aqueous solution of (2) is 15ppm to 100ppm.
The carbon dioxide-containing deionized water can remove the impurities 30 by the force of the rinse. And static electricity generated by the rotation of the chuck of the machine table during the cleaning process can be removed by dissolving a certain amount of carbon dioxide in the deionized water.
Specifically, a cleaning solution is sprayed on the front-end device layer 10 through at least one nozzle in the machine table to the upper surface of the front-end device layer 10. Under the front-end device layer 10, nitrogen or deionized water containing carbon dioxide is sprayed on the lower surface of the front-end device layer 10 through at least one nozzle in the machine.
And spraying nitrogen or deionized water containing carbon dioxide on the lower surface of the front-end device layer 10 to ensure that impurities are discharged along with a cleaning solution at the edge of the front-end device layer 10, so as to avoid the impurities remaining at the edge and the bottom of the front-end device layer 10.
In the embodiment of the present invention, the cleaning of the front-end device layer 10 includes the following steps:
step S210, a first step of spraying a dilute hydrofluoric acid solution on the upper surface of the front-end device layer 10.
Step S220, a first wetting process, in which a diluted hydrofluoric acid solution, deionized water containing carbon dioxide, and ozonized deionized water are sequentially sprayed on the upper surface of the front-end device layer 10.
Step S230, a second process, spraying ozonated deionized water on the top surface of the front-end device layer 10.
Step S240, a second wetting process, in which ozonized deionized water and carbon dioxide-containing deionized water are sequentially sprayed on the upper surface of the front-end device layer 10.
Step S250, a third step of spraying deionized water containing carbon dioxide on the upper surface of the front end device layer 10.
Step S260, a third wetting process, in which deionized water containing carbon dioxide is sprayed on the upper surface of the front-end device layer 10.
In step S210, a first process includes spraying a dilute hydrofluoric acid solution on the upper surface of the front-end device layer 10 and spraying nitrogen gas on the lower surface of the front-end device layer 10. The rotation speed of the chuck in the first step is 500rpm-1000rpm. The duration of the first step was 21.8 seconds. In an alternative implementation, the chuck speed is 800rpm.
The rotation speed of the chuck varies according to the flowability of different cleaning solutions, and the poorer the flowability of the cleaning solution, the higher the rotation speed of the chuck is, so as to increase the centrifugal force and enable the cleaning solution to be uniformly coated on the surface of the front-end device layer 10.
The first process uses a dilute hydrofluoric acid solution to remove most of the metal particles and organic particles from the surface of the front-end device layer 10.
In step S220, in the first wetting process, a diluted hydrofluoric acid solution, deionized water containing carbon dioxide, and ozonated deionized water are sequentially sprayed on the upper surface of the front-end device layer 10.
Step S220 includes the following steps:
step S221, a first wetting sub-process, spraying a dilute hydrofluoric acid solution on the upper surface of the front-end device layer.
Step S222, a second wetting sub-process, spraying carbon dioxide-containing deionized water on the upper surface of the front-end device layer.
Step S223, a third wetting sub-process, spraying ozonated deionized water on the top surface of the front-end device layer.
In step S221, a dilute hydrofluoric acid solution is sprayed on the upper surface of the front-end device layer. Nitrogen gas is sprayed on the lower surface of the front-end device layer 10. The rotating speed of the chuck is 400rpm-800rpm. The duration is 10s. In an alternative implementation, the chuck speed is 600rpm.
In step S222, deionized water containing carbon dioxide is sprayed on the upper surface of the front-end device layer. And spraying deionized water containing carbon dioxide on the lower surface of the front-end device layer 10. The rotating speed of the chuck is 400rpm-800rpm, and the time length is 10s. In an alternative implementation, the chuck speed is 600rpm.
In step S223, ozonated deionized water is sprayed on the top surface of the front-end device layer. Nitrogen gas is sprayed on the lower surface of the front-end device layer 10. The chuck speed is 400rpm-800rpm, and the duration is 10s.
The first wetting process serves to connect the first process and the second process, and since the di water may cause too strong oxidation, the two solutions may not be sprayed in one nozzle, and thus, the cleaning solution may be switched by sequentially spraying the diluted hydrofluoric acid solution, the di water containing carbon dioxide, and the ozonated di water. And the rotational speed of the chuck is reduced. By adding the first wetting process, it is not necessary to dry the front-end device layer 10 to switch the cleaning solution, thereby preventing the stack structure 20 from being inclined due to the surface tension of the cleaning solution when the surface of the front-end device layer 10 is dried. Therefore, the reliability of the semiconductor device can be improved by adding the first stacking process.
In this step, a first wetting step is provided between the first step and the second step, and the first wetting sub-step of the first wetting step is cleaned with the same cleaning solution as that used in the first step. That is, the first wetting sub-step corresponds to an extension of the first step. The second wetting sub-process is cleaned by deionized water containing carbon dioxide. The third wetting sub-process is cleaned with ozonated deionized water as in the second process, i.e., the third wetting sub-process corresponds to a pre-start-up of the second process. By adopting the process, the limitation that the cleaning machine platform needs to dry the wafer in the switching process of the dilute hydrofluoric acid solution in the first procedure and the ozonized deionized water in the second procedure can be avoided. The surface of the front-end device layer 10 is kept wet during switching between the first process and the second process, and surface tension caused by drying of the surface of the front-end device layer 10 in the comparative example is avoided, so that the stack structure 20 can be prevented from tilting. Thereby, the adjacent stacked structures 20 can be prevented from contacting each other due to the inclination, and the front-end device layer 10 can be prevented from being short-circuited due to the electrical connection of the adjacent stacked structures 20. Therefore, the yield of the semiconductor device can be improved, and the reliability of the semiconductor device can be ensured.
In step S230, in the second process, ozonized deionized water is sprayed on the upper surface of the front-end device layer 10; nitrogen gas is sprayed on the lower surface of the front-end device layer 10. The rotating speed of the second procedure is 400rpm-800rpm, and the duration time is 60s. In an alternative implementation, the second process is performed at 600rpm.
The second process uses ozonated deionized water to remove remaining metal particles and organic particles from the surface of the front-end device layer 10.
In step S240, in the second wetting process, ozonated deionized water and carbon dioxide-containing deionized water are sequentially sprayed on the upper surface of the front-end device layer 10. The rotating speed of the second wetting procedure is 400rpm-800rpm, and the duration time is 10s. In an alternative implementation, the second wetting sequence is performed at 600rpm.
That is, in the front end of the second wetting process, the same ozonated deionized water as the cleaning solution of the second process is sprayed on the upper surface of the front-end device layer 10, which corresponds to the extension of the second process. In the latter stage of the second wetting process, the same ozonated deionized water as the cleaning solution of the subsequent third process is sprayed on the upper surface of the front device layer 10, i.e., corresponding to the pre-start-up of the third process.
The second wetting procedure is used as a transition procedure between the second procedure and the third procedure, is similar to the first wetting procedure, can prevent the machine from stopping spraying the cleaning solution in the switching process of the second procedure and the third procedure, prevents the surface of the front-end device layer 10 from being dry, keeps the surface of the front-end device layer 10 wet, and prevents the stacked structure caused by surface tension from inclining.
In step S250, in the third process, deionized water containing carbon dioxide is sprayed on the upper surface of the front-end device layer 10; nitrogen gas is sprayed on the lower surface of the front-end device layer 10. The rotating speed of the third procedure is 300-700 rpm, and the duration is 20s. In an alternative implementation, the third process step is performed at 500rpm.
In step S260, in the third wetting process, deionized water containing carbon dioxide is sprayed on the upper surface of the front-end device layer 10. The rotating speed of the third wetting procedure is 300rpm-700rpm, and the duration is 10s. In an alternative implementation, the third wetting sequence is performed at 500rpm.
The third wetting procedure is a transition procedure of the third procedure and the subsequent drying procedure. The method is used for keeping the surface of the front-end device layer 10 wet and avoiding the inclination of the stacked structure caused by surface tension. Referring to fig. 6, in step S300, the front-end device layer 10 is dried.
Drying the front-end device layer 10 includes the steps of:
step S301, spraying an isopropyl alcohol (IPA) solution on the upper surface of the front-end device layer 10.
Specifically, in an alternative implementation, an isopropyl alcohol (IPA) solution is sprayed on the upper and lower surfaces of the front-end device layer 10.
Step S302, evaporating the isopropanol solution to dry the front-end device layer 10.
Since isopropyl alcohol (IPA) solution is volatile and has small surface tension, the aqueous solution on the surface of the front-end device layer is replaced with isopropyl alcohol solution before drying, and the isopropyl alcohol solution is removed by evaporation, so that the stack structure 20 can be prevented from being inclined, and impurities can be prevented from remaining on the front-end device layer 10.
Fig. 7 is a photograph of front-end device layers after being cleaned using the cleaning method of an embodiment of the present invention. As shown in fig. 7, the stacked structure 20 in the front-end device layer 10 does not have the defects shown in the comparative example.
In a first embodiment of the present invention, the trench depth between the pair of stacked structures is 2200 angstroms for the front-end device layer. Fig. 8 shows the yield test results of front-end device layers with trench depth of 2200 a between stacked structures after being cleaned by the cleaning methods of the embodiment and the comparative example of the present invention, respectively. As shown in fig. 8, the left graph shows the yield test result of the front-end device layer cleaned by the cleaning method according to the embodiment of the invention. The right graph shows the yield test results of the front-end device layer after being cleaned by the cleaning method of the comparative example. The cleaning method provided by the embodiment of the invention can obviously reduce defects and improve the yield of semiconductor devices.
In a second embodiment of the present invention, a front-end device layer with a trench depth of 1900 angstroms between stacked structures is provided. Fig. 9 shows the results of yield tests on the front-end device layers with trench depth of 1900 a between stacked structures after cleaning by the cleaning methods of the embodiment and the comparative example of the present invention, respectively. As shown in fig. 9, the left graph shows the yield test results of the front-end device layer cleaned by the cleaning method according to the embodiment of the invention. The right graph shows the yield test results of the front-end device layer after being cleaned by the cleaning method of the comparative example. The cleaning method provided by the embodiment of the invention can obviously reduce defects and improve the yield of semiconductor devices.
In the embodiment of the invention, a wetting procedure is arranged at the interval of switching the cleaning solution so as to keep the liquid in the interval of the stacked structure. Through increasing the wetting process, do not need to switch over cleaning solution after dry front end device layer, can avoid the surface drying process of front end device layer in-process, the stacked structure slope that leads to because cleaning solution's surface tension. Therefore, the adjacent stacking structures can be prevented from contacting with each other due to inclination, and short circuit of the front-end device layer caused by electric connection of the adjacent stacking structures is avoided. Therefore, the yield of the semiconductor device can be improved, and the reliability of the semiconductor device can be ensured. The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method of cleaning a semiconductor device, the method comprising:
providing a front-end device layer comprising a plurality of stacked structures;
cleaning the front-end device layer by adopting different cleaning solutions to remove impurities, wherein a wetting procedure is arranged between processes of switching the cleaning solutions to keep the cleaning solutions in the gaps of the stacked structure;
the method for cleaning the front-end device layer by adopting different cleaning solutions specifically comprises the following steps:
a first step of spraying a dilute hydrofluoric acid solution on the upper surface of the front-end device layer;
a first wetting step of spraying a dilute hydrofluoric acid solution, carbon dioxide-containing deionized water, and ozonized deionized water in this order on the upper surface of the front-end device layer;
a second step of spraying ozonized deionized water on the upper surface of the front-end device layer;
a second wetting step of spraying ozonized deionized water and carbon dioxide-containing deionized water on the upper surface of the front-end device layer in sequence;
a third step of spraying deionized water containing carbon dioxide on the upper surface of the front-end device layer;
and a third wetting procedure, namely spraying deionized water containing carbon dioxide on the upper surface of the front-end device layer.
2. A method for cleaning a semiconductor device according to claim 1, wherein the wetting process includes at least extension of a process before switching and pre-start of a process after switching.
3. The method of cleaning a semiconductor device according to claim 1, wherein the semiconductor device is a nand flash memory.
4. The method of claim 1, wherein the cleaning solution comprises one or more of dilute hydrofluoric acid, ozonated deionized water, and carbon dioxide-containing deionized water.
5. The method for cleaning the semiconductor device according to claim 1, wherein the step of cleaning the front-end device layer with different cleaning solutions specifically comprises:
and spraying a cleaning solution on the upper surface of the front-end device layer, and spraying nitrogen or deionized water containing carbon dioxide on the lower surface of the front-end device layer.
6. A method for cleaning a semiconductor device according to claim 1, wherein the first wetting process comprises:
a first wetting sub-process, spraying a dilute hydrofluoric acid solution on the upper surface of the front-end device layer;
a second wetting sub-process, namely spraying deionized water containing carbon dioxide on the upper surface of the front-end device layer; and
and a third wetting sub-process, namely spraying ozonized deionized water on the upper surface of the front-end device layer.
7. A cleaning method of a semiconductor device according to claim 6,
the rotating speed of the chuck in the first procedure is 500rpm-1000rpm;
the rotating speeds of the chucks in the first wetting sub-process, the second wetting sub-process and the third wetting sub-process are respectively 500rpm-1000rpm,400rpm-800rpm and 400rpm-800rpm.
8. The method for cleaning a semiconductor device according to claim 6, wherein a rotation speed in the second step is 400rpm to 800rpm; the rotation speed of the second wetting procedure is 400rpm-800rpm.
9. The method for cleaning a semiconductor device according to claim 6, wherein a rotation speed in the third step is 300rpm to 700rpm; the rotation speed of the third wetting procedure is 300rpm-700rpm.
10. The method of cleaning a semiconductor device according to claim 1, wherein after the front-end device layer is cleaned with different cleaning solutions, the method further comprises:
and drying the front-end device layer.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1958177A (en) * | 2005-10-24 | 2007-05-09 | 史考特公司 | Acid-free cleaning process for substrates, in particular masks and mask blanks |
| CN101903985A (en) * | 2007-12-14 | 2010-12-01 | 朗姆研究公司 | Utilize material single-phase and two-phase media removal particle |
| CN105047529A (en) * | 2015-05-28 | 2015-11-11 | 上海集成电路研发中心有限公司 | Method for improving wet process wettability of small-size and high aspect ratio structures |
| CN107331598A (en) * | 2016-04-28 | 2017-11-07 | 中芯国际集成电路制造(上海)有限公司 | A kind of semiconductor devices and preparation method, electronic installation |
| CN109427579A (en) * | 2017-08-31 | 2019-03-05 | 长鑫存储技术有限公司 | The preparation method and structure of high aspect ratio structure |
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| CN102810459B (en) * | 2011-06-03 | 2015-04-08 | 中国科学院微电子研究所 | Method for cleaning wafer after chemical mechanical planarization |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1958177A (en) * | 2005-10-24 | 2007-05-09 | 史考特公司 | Acid-free cleaning process for substrates, in particular masks and mask blanks |
| CN101903985A (en) * | 2007-12-14 | 2010-12-01 | 朗姆研究公司 | Utilize material single-phase and two-phase media removal particle |
| CN105047529A (en) * | 2015-05-28 | 2015-11-11 | 上海集成电路研发中心有限公司 | Method for improving wet process wettability of small-size and high aspect ratio structures |
| CN107331598A (en) * | 2016-04-28 | 2017-11-07 | 中芯国际集成电路制造(上海)有限公司 | A kind of semiconductor devices and preparation method, electronic installation |
| CN109427579A (en) * | 2017-08-31 | 2019-03-05 | 长鑫存储技术有限公司 | The preparation method and structure of high aspect ratio structure |
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