CN112788824B - Electrostatic removing device, vapor deposition device, and electrostatic removing method - Google Patents
Electrostatic removing device, vapor deposition device, and electrostatic removing method Download PDFInfo
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- CN112788824B CN112788824B CN202011545337.2A CN202011545337A CN112788824B CN 112788824 B CN112788824 B CN 112788824B CN 202011545337 A CN202011545337 A CN 202011545337A CN 112788824 B CN112788824 B CN 112788824B
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000007740 vapor deposition Methods 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims abstract description 152
- 239000011521 glass Substances 0.000 claims abstract description 98
- 230000005611 electricity Effects 0.000 claims abstract description 70
- 230000003068 static effect Effects 0.000 claims abstract description 70
- 210000002381 plasma Anatomy 0.000 claims description 32
- 239000000725 suspension Substances 0.000 claims description 18
- 239000012044 organic layer Substances 0.000 claims description 16
- 239000010410 layer Substances 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 abstract description 10
- 238000001704 evaporation Methods 0.000 abstract description 10
- 239000011368 organic material Substances 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 15
- 230000004888 barrier function Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000007641 inkjet printing Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 230000007935 neutral effect Effects 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
Abstract
The application discloses an electrostatic removing device, an evaporation device and an electrostatic removing method, wherein the electrostatic removing device comprises: the lifting frame comprises a bottom plate and a plurality of substrate separating pieces which are arranged on the upper surface of the bottom plate and are spaced from each other, a plurality of suspended areas which are arranged at intervals are formed by encircling the plurality of substrate separating pieces, and spacing areas are formed among the plurality of suspended areas; the electrode assembly comprises a plurality of plate-shaped electrodes which are supported on the upper surface of the bottom plate and are opposite to the upper surface of the bottom plate, the plate-shaped electrodes are arranged in one-to-one correspondence with the suspended areas, the plate-shaped electrodes are arranged at intervals, and the plate-shaped electrodes are matched with the suspended areas in shape. According to the static electricity removing device provided by the application, the shape and the position of the electrode are arranged corresponding to the suspended area formed by encircling the substrate separating piece, so that the organic material on the front surface of the glass substrate is not damaged, the non-display area corresponding to the interval area on the back surface of the glass substrate can be activated and static electricity is removed, and the breaking rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
Description
Technical Field
The application relates to the technical field of display, in particular to an electrostatic removing device, an evaporation device and an electrostatic removing method.
Background
With the development of the liquid crystal industry, the manufacturing process and structure of semiconductors are finer and finer, the integration density of circuits is improved continuously, so that the sensitivity of electronic devices to electrostatic discharge (Electro-STATIC DISCHARGE, ESD) is improved continuously, and the electrostatic problem is outstanding.
At present, there are two ways in which an organic light-Emitting Diode (OLED) manufacturing process is performed: pure evaporation and printing + evaporation. Pure evaporation adopts a tray type conveying system, and a procedure of plasma (plasma) treatment of a glass substrate is carried out before evaporation, and the purposes are as follows: firstly, anode carrier injection is improved, and luminous efficiency is improved; secondly, static electricity on the back of the glass is eliminated, the glass is activated, the bonding characteristic of the glass and the bonding part (gluon) can be improved, and the glass is easier to separate from the tray without breaking when the glass is mechanically separated from the tray after vapor deposition is completed. However, in the printing and vapor deposition mode, the organic film layer is printed on the glass before vapor deposition, if the traditional plasma is still adopted to eliminate the static electricity on the back surface before vapor deposition, the plasma gas can damage the organic film layer on the front surface of the glass, so that the performance of the OLED is affected.
Disclosure of Invention
The application provides an electrostatic removing device, which aims to solve the problem that an organic film layer on the front surface of a glass substrate is damaged by the electrostatic removing device in the prior art.
In a first aspect, the present application provides an electrostatic removing apparatus, comprising:
The lifting frame comprises a bottom plate and a plurality of substrate separating pieces which are arranged on the upper surface of the bottom plate and are spaced from each other, a plurality of suspended areas which are arranged at intervals are formed by enclosing the plurality of substrate separating pieces, and spacing areas are formed among the plurality of suspended areas;
the electrode assembly comprises a plurality of plate electrodes which are supported on the upper surface of the bottom plate and are opposite to the upper surface of the bottom plate, the plate electrodes are arranged in one-to-one correspondence with the suspended areas, the plate electrodes are arranged at intervals, and the plate electrodes are matched with the suspended areas in shape.
Further, the substrate separating piece is in sliding connection with the bottom plate, and an included angle is formed between the sliding direction of the substrate separating piece and the upper surface of the bottom plate.
Further, the substrate separating member has a supporting position and a receding position in the sliding direction, and in the supporting position, the height of the substrate separating member is larger than the heights of the plurality of plate-like electrodes; the difference in height between the height of the substrate separating member and the height of the plurality of plate-shaped electrodes is 1-2mm.
Further, the lifting frame further comprises a bonding portion, the bonding portion is arranged in the interval region, and when the substrate separating piece is at the avoidance position, the height of the substrate separating piece is smaller than that of the bonding portion.
Further, the static electricity removing apparatus further includes a gas injection unit for injecting gas into gaps between the plurality of plate electrodes.
Further, the static electricity removing device further includes an ac power source electrically connected to the plurality of plate electrodes.
Further, the ac power supply is plural, the electrode assembly includes at least one plate electrode group including plural plate electrodes, the plural plate electrodes in the plate electrode group include a first plate electrode and at least one second plate electrode adjacent to the first plate electrode; the first plate electrode is connected with one end of the alternating current power supply, and the at least one second plate electrode is connected with the other end of the alternating current power supply.
Further, two plate-shaped electrodes arranged in any opposite mode in the electrode assembly are provided with side faces opposite to each other, and the side faces are further provided with insulating medium layers.
In a second aspect, the present application also provides an evaporation device comprising an electrostatic removal device according to any one of the preceding claims.
In a third aspect, the present application also provides an electrostatic discharge method using the electrostatic discharge device as defined in any one of the above, the method comprising:
providing a glass substrate with an organic layer formed on one side surface, wherein the glass substrate is provided with a display area corresponding to the suspended area and a non-display area corresponding to the interval area;
applying a voltage to a plurality of plate electrodes of the electrode assembly on the static electricity removing device to remove static electricity on the non-display area of the glass substrate;
And separating the glass substrate subjected to static electricity removal through a plurality of substrate separating pieces of the static electricity removing device.
According to the static electricity removing device provided by the embodiment of the application, the shape and the position of the electrode are correspondingly arranged with the suspension areas which are formed by encircling the substrate separating piece and are arranged at intervals, so that most of plasmas generated by ionization after the electrode is electrified move between the electrodes, and a small number of plasmas are diffused to the interval areas among the suspension areas to neutralize static electricity, so that the static electricity of a glass substrate non-display area positioned in the suspension areas is eliminated. Therefore, organic materials on the front surface of the glass substrate are not damaged, and non-display areas corresponding to the interval areas on the back surface of the glass substrate can be activated and static electricity is eliminated, so that the breakage rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
Drawings
The technical solution and other advantageous effects of the present application will be made apparent by the following detailed description of the specific embodiments of the present application with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of an embodiment of a lifting frame according to the present application;
FIG. 2 is a schematic view of an embodiment of a glass substrate according to the present application;
FIG. 3 is a simplified schematic diagram of an embodiment of an electrostatic discharge device according to an embodiment of the present application;
FIG. 4 is a schematic diagram of an embodiment of an electrode assembly connection relationship according to the present application;
fig. 5 is a cross-sectional view of an embodiment of an electrostatic discharge device according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to fall within the scope of the application.
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically connected, electrically connected or can be communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present application, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
The following disclosure provides many different embodiments, or examples, for implementing different features of the application. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the application. Furthermore, the present application may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present application provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
The embodiment of the application provides an electrostatic removing device, an evaporation device and an electrostatic removing method, which are respectively described below.
An embodiment of the present application provides an electrostatic removing apparatus, which may include:
the lifting frame 10, the lifting frame 10 comprises a bottom plate 101 and a plurality of substrate separating pieces 102 which are arranged on the upper surface of the bottom plate 101 and are mutually spaced, a plurality of suspended areas 103 which are arranged at intervals are formed by surrounding the plurality of substrate separating pieces 102, and a spacing area 104 is formed among the plurality of suspended areas 103;
The electrode assembly 20 includes a plurality of plate electrodes 201 supported on the upper surface of the bottom plate 101 and opposite to the upper surface of the bottom plate 101, the plurality of plate electrodes 201 are disposed in one-to-one correspondence with the plurality of suspended areas 103, the plurality of plate electrodes 201 are disposed at intervals, and the plate electrodes 201 are adapted to the suspended areas 103 in shape.
According to the static electricity removing device provided by the embodiment of the application, the shape and the position of the electrode are correspondingly arranged with the suspension areas which are formed by encircling the substrate separating piece and are arranged at intervals, so that most of plasmas generated by ionization after the electrode is electrified move between the electrodes, and a small number of plasmas are diffused to the interval areas among the suspension areas to neutralize static electricity, so that the static electricity of a glass substrate non-display area positioned in the suspension areas is eliminated. Therefore, organic materials on the front surface of the glass substrate are not damaged, and non-display areas corresponding to the interval areas on the back surface of the glass substrate can be activated and static electricity is eliminated, so that the breakage rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
Specifically, in the embodiment of the present application, the static electricity removing device may include a lifting frame 10, and the lifting frame 10 includes a bottom plate 101, where the bottom plate 101 may be used to place a glass substrate, so as to perform a display panel process such as printing, vapor deposition, etc. on the glass substrate.
Fig. 1 is a schematic structural diagram of an embodiment of a lifting frame according to an embodiment of the present application. In the above embodiment, the plurality of substrate separating members 102 are formed on the base plate 101, the substrate separating members 102 are disposed on the upper surface of the base plate 101, the plurality of substrate separating members 102 are disposed at intervals, and the plurality of substrate separating members 102 enclose a plurality of suspended areas 103 disposed at intervals. In an embodiment of the present application, the substrate separating member 102 may be slidably connected to the base plate 101, i.e., the substrate separating member 102 may be a slidable separating member.
In the above embodiment, the sliding direction of the substrate separating member 102 may form an angle with the upper surface of the bottom plate 101. That is, the substrate separating member 102 can slide up and down in a direction perpendicular to the bottom plate 101; the substrate separating member 102 may have an acute angle with the bottom plate 101, and the substrate separating member 102 slides up and down along the direction of the included angle, i.e. the sliding direction of the substrate separating member 102 is inclined at an angle with respect to the vertical direction of the bottom plate 101.
In the above-described embodiment, when the glass substrate is subjected to the static electricity removal, the glass substrate needs to be separated from the base plate 101, and since the substrate separating member 102 is provided between the glass substrate and the base plate 101, the glass substrate can be separated from the base plate 101 by the substrate separating member 102.
Fig. 2 is a schematic diagram of an embodiment of a glass substrate according to an embodiment of the present application. Referring to fig. 1 and 2, in an embodiment of the present application, a glass substrate may be placed in the suspended area 103 after performing inkjet printing to obtain an organic layer. Meanwhile, since a plurality of display panels with different sizes can be formed on one glass substrate, a plurality of organic layers with different sizes can be formed on the glass substrate; and a plurality of glass substrates with different sizes can be placed in the suspended area 103, and the shape and position of the suspended area 103 can be correspondingly arranged with the shape and position of the organic layer on the glass substrate. As shown in fig. 2, a spacer region is also formed between the plurality of organic layers of different sizes, and the spacer region between the plurality of organic layers corresponds to the spacer region 104 between the plurality of suspended regions 103. And the glass substrate is placed in the suspended area 103, and the plurality of substrate separating members 102 support the glass substrate.
The static electricity removing apparatus provided by the embodiment of the present application further includes an electrode assembly 20, and the electrode assembly 20 may include a plurality of plate-shaped electrodes 201 supported on the upper surface of the base plate 101 and opposite to the upper surface of the base plate 101; that is, the electrode assembly 20 is positioned on the upper surface of the base plate 101, the electrode assembly 20 is disposed between the base plate 101 and the glass substrate, and the electrode assembly 20 includes a plurality of plate electrodes 201. The plurality of plate electrodes 201 are arranged in one-to-one correspondence with the suspended areas 103, that is, the plurality of plate electrodes 201 are arranged at intervals, a spacing area is also present between the plurality of plate electrodes 201, and the spacing area between the plurality of plate electrodes 201 is arranged in correspondence with the spacing area 104 between the plurality of suspended areas 103.
And in an embodiment of the application the shape of the plate electrode 201 may be adapted to the suspended area 103. Specifically, the error between the edge region of the plate electrode 201 and the edge region of the suspended region 103 may be within a preset error range. Preferably, the edge area of the plate electrode 201 and the edge area of the suspended area 103 may completely overlap, i.e. the shape of the plate electrode 201 corresponds to the shape of the suspended area 103.
As shown in fig. 3, an embodiment of the static electricity removing apparatus according to the present application is a simplified schematic diagram, wherein the static electricity removing apparatus includes oppositely disposed electrodes, and when a voltage is applied to the electrodes, a gas existing between the electrodes can be ionized to generate a plasma, and the plasma can be diffused to the surface of the object to neutralize static electricity on the surface of the object. The dashed lines in fig. 3 represent the direction of diffusion of the plasma, i.e. when the plasma is generated, a portion of the plasma diffuses towards the object surface.
Wherein, the plasma is the fourth state of the substances after solid, gas and liquid tri-states, and consists of positive ions, negative ions, electrons and neutral ions, and is called as plasma because the total number of positive charges and negative charges in the system are equal. The plasma generation paths are numerous, and in embodiments of the present application, a dielectric barrier discharge (DIELECTRIC BARRIER DISCHARGE, DBD) technique may be used to generate the plasma. Dielectric barrier discharge is a gas discharge in which an insulating medium is inserted into the discharge space, which insulating medium may be coated on the electrodes or suspended in the discharge space. Thus, when a sufficiently high ac voltage is applied to the discharge electrodes, the gas between the electrodes is ionized to form a dielectric barrier discharge.
In fig. 3, in the dielectric barrier discharge, an insulating medium (not shown) is required to be inserted into the discharge space, preferably, the insulating medium may be coated on the electrodes, and an ac voltage is required to be applied across the electrodes. The air between the electrodes is broken down under the action of alternating voltage to generate dielectric barrier discharge, and the existence of the insulating medium blocks the formation of breakdown channels, so that the insulating medium discharge does not generate sparks or arcs.
Dielectric barrier discharge can be performed in a wide range of atmospheric pressure, for example, in a pressure of 0.1atm to 10 atm; wherein the standard atmospheric pressure is 101.325kPa, which is a unit of pressure, denoted as atm. Meanwhile, during dielectric barrier discharge, the voltages at the two ends of the electrode need to be alternating-current voltages, and the frequency of the alternating-current voltages can be 50Hz-1MHz.
As shown in fig. 4, an embodiment of the connection relationship of the electrode assembly provided in the embodiment of the present application is shown, since the plurality of suspending areas 103 are disposed at intervals, a plurality of plate electrodes 201 included in the electrode assembly 20 are also disposed at intervals, and the shape of the plurality of plate electrodes 201 is adapted to the shape of the suspending areas 103. And in order to perform the subsequent ionization process, it is also necessary to electrically connect the plurality of plate electrodes 201 to a power source. When there is no voltage across the electrodes, the plurality of plate electrodes 201 are in an insulated state; when the plate electrodes 201 are energized, an electric field exists between the plate electrodes 201, and the gas between the plate electrodes 201 is ionized to generate plasma under the action of the electric field. As shown in fig. 4, the dotted line in fig. 4 represents an electric field generated between the plate electrodes 201 when the power is supplied.
In the embodiment of the present application, since the substrate separating member 102 is slidably coupled to the base plate 101, that is, the substrate separating member 102 can slide, the substrate separating member 102 can have a supporting position and a retracted position in the sliding direction. When the substrate separating member 101 is positioned at the supporting position, the substrate separating member 102 supports the glass substrate; and when the substrate separating member 101 is located at the evacuation position, the substrate separating member 102 is away from the glass substrate.
In one embodiment of the present application, the substrate separating member 102 may be a thimble, and the bottom plate 101 is provided with a through hole, and when the static electricity is removed, the thimble may pass through the through hole to lift up the glass substrate, so as to separate and support the glass substrate.
In the above embodiment, when the substrate separating member 102 reaches the supporting position, the substrate separating member 102 supports the glass substrate, and the height of the substrate separating member 102 is larger than the height of the plurality of plate electrodes 201. In some embodiments of the present application, the positions of the plurality of plate electrodes 201 remain unchanged when the substrate separator 102 is located at the supporting position, and the difference in height between the substrate separator 102 and the plurality of plate electrodes 201 may be 1-2mm.
The arrangement is such that when dielectric discharge occurs in the electrode assembly 20, most of the generated plasma moves between the electrodes, and the distance between the lower surface of the glass substrate and the electrode assembly 20 is very short, only 1-2mm, and part of the plasma diffuses perpendicular to the electrode direction to reach the display area on the surface of the display panel, thereby neutralizing the static electricity in the display area.
Meanwhile, in the embodiment of the present application, two plate electrodes 201 disposed in any opposite direction in the electrode assembly 20 have opposite side surfaces, and the side surfaces are provided with insulating dielectric layers for blocking breakdown channels formed when the plate electrodes 201 discharge, so that adverse effects such as spark arc are generated, and thus organic layers prepared on the glass substrate by using inkjet printing are affected.
It should be noted that, in the embodiment of the present application, the voltage across the electrode assembly 20 is an ac voltage, that is, the static electricity removing apparatus provided in the embodiment of the present application further includes an ac power source, and the ac power source is electrically connected to the plurality of plate electrodes 201, and the ac power source is used to provide the voltage to the electrode assembly 20 so as to generate the ionization phenomenon.
In the above-described embodiment, when the ac power source is plural, the electrode assembly 20 includes at least one plate electrode group, wherein the plate electrode group may include plural plate electrodes 201. And the plurality of plate electrodes 201 in the plate electrode group may include a first plate electrode and at least one second plate electrode adjacent to the first plate electrode; the first plate electrode can be connected with one end of one alternating current power supply in a plurality of alternating current power supplies, and the at least one second plate electrode is connected with the other end of the one alternating current power supply; that is, the first plate electrode and at least one second plate electrode adjacent to the first plate electrode in the same plate electrode group are respectively connected to two ends of the same alternating current power supply.
In other embodiments of the present application, when the ac power source is plural, the plural plate electrodes 201 located in different areas may be connected to different ac power sources, respectively, to individually control the areas where static electricity needs to be removed, respectively. The voltage between different ac power sources may be different.
In an embodiment of the present application, the lifting frame 10 may further include a bonding portion 105, referring to fig. 1, the bonding portion 105 is disposed in a spaced area on the base plate 101, and the glass substrate may be connected to the base plate 101 through the bonding portion 105. However, when the static electricity is removed from the glass substrate, the glass substrate needs to be separated from the base 101 for subsequent processes; because static electricity is removed from the non-display area on the glass substrate in the embodiment of the application, the connection force between the bonding part 105 and the glass substrate is weakened, and compared with the separation of the bonding part 105 and the glass substrate in the prior art, the static electricity remover is simpler and saves manpower and material resources.
In some embodiments of the present application, the bond 105 may be disposed in the spacer region 104 between any two overhanging regions 103; in other embodiments of the present application, the bond 105 may be provided only at the edge region of the chassis 101. And when the substrate separating member 102 is located at the escape position, the bonding portion 105 is connected with the glass substrate, and the height of the substrate separating member 102 is smaller than the height of the bonding portion 105.
In the embodiment of the present application, the bonding portion 105 is used to bond the glass substrate and the base plate 101, and the bonding portion 105 may be a material or a device having a bonding effect. In one embodiment of the present application, the bonding portion 105 may be a glue, that is, the glass substrate is connected to the base plate 101 through the glue.
In an embodiment of the present application, the static electricity removing apparatus may further include a gas spraying unit that may spray gas into the gaps between the plurality of plate electrodes 201. Since the plurality of plate electrodes 201 are formed with the interval regions therebetween, the gas spraying unit can spray the gas into the interval regions between the plurality of plate electrodes 201, and the plate electrodes 201 can ionize the sprayed gas to generate plasma after being energized, thereby eliminating static electricity in the non-display region on the glass substrate.
Fig. 5 is a cross-sectional view of an embodiment of an electrostatic discharge device according to an embodiment of the present application. In fig. 5, an electrode assembly 20 is disposed on a base 101, and the electrode assembly 20 includes a plurality of plate electrodes 201, wherein the plate electrodes 201 are disposed corresponding to a suspended area 103 formed by surrounding a plurality of separating members 102, and the suspended area 103 is disposed corresponding to an organic layer on a glass substrate. The plate electrodes 201 are arranged at intervals, and when the plate electrodes 201 perform dielectric discharge, gas between the plate electrodes 201 is ionized to generate plasma, and part of the plasma is diffused to the back surface of the glass substrate, namely, to the side, close to the plate electrodes 201, of the glass substrate, so that static electricity on the back surface of the glass substrate is eliminated.
The application also provides a vapor deposition device comprising the static electricity removing device according to any one of the above. After static electricity is removed, the glass substrate on which the organic layer is formed is subjected to vapor deposition in a vapor deposition apparatus to produce a completed display panel.
According to the evaporation device provided by the embodiment of the application, the electrostatic removing device is arranged, and the shape and the position of the electrode in the electrostatic removing device are correspondingly arranged with the suspension areas which are formed by encircling the substrate separating piece and are arranged at intervals, so that most of plasmas generated by ionization after the electrode is electrified move between the electrodes, and a small number of plasmas are diffused to the interval areas among the suspension areas to neutralize the static electricity, so that the static electricity in the glass substrate non-display area positioned in the suspension areas is eliminated. Therefore, organic materials on the front surface of the glass substrate are not damaged, and non-display areas corresponding to the interval areas on the back surface of the glass substrate can be activated and static electricity is eliminated, so that the breakage rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
The present application also provides a static electricity removing method for removing static electricity using the static electricity removing apparatus as described in any one of the above, the method may include:
providing a glass substrate with an organic layer formed on one side surface, wherein the glass substrate is provided with a display area corresponding to the suspended area and a non-display area corresponding to the interval area; supporting the glass substrate on the side of the glass substrate facing away from the organic layer in a non-display area through a plurality of substrate separating pieces of the static electricity removing device; a voltage is applied to a plurality of plate electrodes of the electrode assembly to remove static electricity on the non-display area of the glass substrate.
Specifically, an organic layer can be prepared on a glass substrate by using ink-jet printing, namely a display area on the glass substrate is prepared, and a non-display area is also included on the glass substrate except the organic layer; the display area on the glass substrate corresponds to the suspended area 103 in the electrostatic device, and the non-display area on the glass substrate corresponds to the spaced area in the electrostatic device.
The aforementioned static electricity removing apparatus further comprises a plurality of substrate separating members 102, and the plurality of substrate separating members 102 can support the non-display area on the side of the glass substrate facing away from the organic layer, so as to perform the subsequent static electricity removing process. The static electricity removing device further comprises an electrode assembly 20, and the electrode assembly 20 further comprises a plurality of plate-shaped electrodes 201; the plurality of plate electrodes 201 are disposed corresponding to the display area on the glass substrate, and when a voltage is applied to the plurality of plate electrodes 201 in the electrode assembly 20, the gas between the plurality of plate electrodes is ionized to generate plasma, and the plasma is diffused to the non-display area of the glass substrate to remove static electricity on the non-display area.
Specifically, the static electricity removing device is used for removing static electricity in the non-display area of the glass substrate, and the shape and the position of the electrode in the static electricity removing device are correspondingly arranged with the suspension areas which are formed by surrounding the substrate separating piece at intervals, so that most of plasmas generated by ionization after the electrode is electrified move between the electrodes, and a small number of plasmas diffuse to the interval areas among the suspension areas to neutralize the static electricity, thereby eliminating the static electricity in the non-display area of the glass substrate in the suspension areas. Therefore, organic materials on the front surface of the glass substrate are not damaged, and non-display areas corresponding to the interval areas on the back surface of the glass substrate can be activated and static electricity is eliminated, so that the breakage rate of the glass substrate when the glass substrate is separated from the lifting frame is reduced.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and for parts of one embodiment that are not described in detail, reference may be made to related descriptions of other embodiments.
The above describes in detail an electrostatic discharge device, an evaporation device and an electrostatic discharge method provided by the embodiments of the present application, and specific examples are applied to illustrate the principles and embodiments of the present application, where the above description of the embodiments is only for helping to understand the technical solution and core ideas of the present application; those of ordinary skill in the art will appreciate that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the application.
Claims (10)
1. An electrostatic discharge device, comprising:
The lifting frame comprises a bottom plate and a plurality of substrate separating pieces which are arranged on the upper surface of the bottom plate and are spaced from each other, a plurality of suspended areas which are arranged at intervals are formed by enclosing the plurality of substrate separating pieces, and spacing areas are formed among the plurality of suspended areas;
The electrode assembly comprises a plurality of plate electrodes which are supported on the upper surface of the bottom plate and are opposite to the upper surface of the bottom plate, the plurality of plate electrodes are arranged in one-to-one correspondence with the plurality of suspension areas, the plurality of suspension areas are arranged corresponding to the organic layers of the glass substrate, the glass substrate is provided with a display area corresponding to the suspension areas and a non-display area corresponding to the interval areas, the plurality of plate electrodes are arranged at intervals, the plate electrodes are matched with the suspension areas in shape, when the plate electrodes are subjected to dielectric discharge, gas between the plate electrodes is ionized to generate plasmas, part of plasmas can be diffused to one side, close to the plate electrodes, of the glass substrate so as to eliminate static electricity on the back surface of the glass substrate, and a small number of plasmas are diffused to the interval areas between the plurality of suspension areas so as to neutralize the static electricity, thereby eliminating the static electricity of the non-display area of the glass substrate positioned in the suspension areas.
2. The static electricity removing apparatus according to claim 1, wherein the substrate separating member is slidably coupled to the base plate, and a sliding direction of the substrate separating member forms an angle with an upper surface of the base plate.
3. The static electricity removing apparatus according to claim 2, wherein the substrate separating member has a supporting position and a receding position in the sliding direction, and a height of the substrate separating member is larger than a height of the plurality of plate-like electrodes at the supporting position; the difference between the height of the substrate separating member and the height of the plurality of plate electrodes is 1-2mm.
4. The static-removing device according to claim 3, wherein the lifter further includes a bonding portion provided in the spaced region, and a height of the substrate separating member is smaller than a height of the bonding portion when the substrate separating member is in the escape position.
5. The static electricity removing apparatus according to claim 1, further comprising a gas injection unit for injecting a gas into the gaps between the plurality of plate electrodes.
6. The static-removing device according to claim 1, further comprising an ac power source electrically connected to the plurality of plate-like electrodes.
7. The static electricity remover according to claim 6, wherein said ac power source is plural, said electrode assembly comprises at least one plate electrode group including plural said plate electrodes, and plural said plate electrodes in said plate electrode group include a first plate electrode and at least one second plate electrode adjacent to said first plate electrode; the first plate electrode is connected with one end of the alternating current power supply, and the at least one second plate electrode is connected with the other end of the alternating current power supply.
8. The static electricity removing device according to claim 1, wherein two of said plate-like electrodes disposed in any of said electrode assemblies are provided with side surfaces opposite to each other, said side surfaces being provided with insulating medium layers.
9. A vapor deposition apparatus, characterized in that the vapor deposition apparatus comprises the static electricity removing apparatus according to any one of claims 1 to 8.
10. A static electricity removing method, characterized in that the static electricity removing method uses the static electricity removing apparatus according to any one of claims 1 to 8, the method comprising:
Providing a glass substrate with an organic layer formed on one side surface, wherein the glass substrate is provided with a display area corresponding to the suspended area and a non-display area corresponding to the interval area;
applying a voltage to a plurality of plate electrodes of the electrode assembly on the static electricity removing device to remove static electricity on the non-display area of the glass substrate;
And separating the glass substrate subjected to static electricity removal through a plurality of substrate separating pieces of the static electricity removing device.
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