CN112786236A - Transparent conductive film, preparation method thereof and touch screen - Google Patents
Transparent conductive film, preparation method thereof and touch screen Download PDFInfo
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- CN112786236A CN112786236A CN201911086010.0A CN201911086010A CN112786236A CN 112786236 A CN112786236 A CN 112786236A CN 201911086010 A CN201911086010 A CN 201911086010A CN 112786236 A CN112786236 A CN 112786236A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
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Abstract
The invention relates to a transparent conductive film, which comprises a substrate, a nano silver wire layer, an insulating layer and a metal layer. The insulating layer contains a plurality of particles, and the plurality of particles protrude from the surface of the insulating layer facing the metal layer to form a plurality of protrusions. Gaps exist among the bulges, and the silver wires protruding out of the surface of the insulating layer are generally distributed in the gaps. When the metal material is roll-coated, the bulges can play an overhead role, so that the probability and the degree of the contact between the silver wire head and the surface of the roll shaft are reduced. Furthermore, the contact area of the surface of the bulge and the roller shaft is larger than that of the silver wire head, so the bulge cannot scratch the roller shaft. Moreover, the metal material of the roll coating can flow and fill in the gap, so that the nano silver wire layer and the metal layer are not influenced to realize conductive lap joint. Therefore, the transparent conductive film can effectively avoid the generation of pinholes in the metal layer, thereby improving the quality. In addition, the invention also provides a preparation method of the transparent conductive film and a touch screen.
Description
Technical Field
The invention relates to the technical field of capacitive touch screens, in particular to a transparent conductive film, a preparation method thereof and a touch screen.
Background
The transparent conductive film is a core element of a capacitive touch screen, and generally includes a substrate layer, an ITO transparent conductive layer, and a metal layer. As the user's needs are continuously being explored, foldable touch schemes are in force. Because ITO is hard and brittle and is not suitable for being made into a bendable conductive material, the ITO transparent conductive layer is replaced by a nano silver wire conductive layer when the ITO transparent conductive layer is applied to a conductive film of a foldable touch scheme.
Because the nano silver wire is active and easy to oxidize and electromigration, an insulating layer is often covered on the silver wire layer. Furthermore, in order to achieve conductive bonding of the silver wire layer and the metal layer, a few silver wires need to be erected and protrude from the insulating layer. However, the protruding silver wire head scratches the roller shaft for coating the metal material, and further causes a lot of pinholes in the formed metal layer, which affects the quality of the conductive film.
Disclosure of Invention
In view of the above, it is necessary to provide a transparent conductive film having a high quality in order to solve the problem of pinholes in the metal layer of the conventional conductive film.
A transparent conductive film comprising:
a substrate having two opposing surfaces; and
a nano silver wire layer, an insulating layer and a metal layer which are sequentially formed on at least one surface of the substrate;
the insulating layer contains a plurality of particles, and the particles protrude from the surface of the insulating layer facing the metal layer to form a plurality of bulges.
In the transparent conductive film, the particles form a plurality of protrusions on the surface of the insulating layer, gaps exist among the protrusions, and the silver wires protruding out of the surface of the insulating layer are generally distributed in the gaps. When the metal material is roll-coated, the bulges can play an overhead role, so that the probability and the degree of the contact between the silver wire head and the surface of the roll shaft are reduced. Furthermore, the contact area of the surface of the bulge and the roller shaft is larger than that of the silver wire head, so the bulge cannot scratch the roller shaft. Moreover, the metal material of the roll coating can flow and fill in the gap, so that the nano silver wire layer and the metal layer are not influenced to realize conductive lap joint. Therefore, the transparent conductive film can effectively avoid the generation of pinholes in the metal layer, thereby improving the quality.
In one embodiment, the thickness of the insulating layer is 30 to 150 nm; or
The thickness of the insulating layer is 50 to 100 nm.
When the thickness of the insulating layer is less than 50 nanometers, the protective effect is poor, and the oxidation and electromigration of the nano silver wire layer cannot be well prevented. When the thickness of the insulating layer is greater than 100 nm, the overall transmittance of the transparent conductive film is lowered, and the flexibility is lowered. Therefore, the insulating layer with a thickness of 50 nm to 100 nm can have protection, light transmittance and flexibility.
In one embodiment, the height of the protrusion is 200 nm to 1800 nm.
In one embodiment, the height of the protrusion is 300 nm to 800 nm.
The higher the height of the protrusion is, the more obvious the overhead effect is, the probability of the contact of the roller shaft and the silver wire head can be further reduced, and the better the protection effect on the roller shaft is. However, as the height increases, the size of the particles needs to be increased accordingly, so that the haze value of the transparent conductive film is increased accordingly, and the optical effect and flexibility of the transparent conductive film are seriously affected to a certain extent. Within the above height range, the transparent conductive film can preferably give consideration to the protection effect on the roll shaft, the optical effect and the flexibility.
In one embodiment, the density of the particles in the insulating layer is greater than or equal to 300 particles per square millimeter.
In one embodiment, the density of the particles in the insulating layer is 400 to 600 particles per square millimeter.
When the distribution density of the particles is too high, the haze value of the transparent conductive film is too high, the light transmittance is reduced, and the appearance and the optical effect of the transparent conductive film are seriously affected. And if the distribution density of the particles is too small, the distance between the protrusions is too large, so that the roller shaft cannot be effectively overhead by the protrusions, and the risk that the roller shaft is contacted with the silver thread head in the roll coating process is high. And the transparent conductive film can better give consideration to the optical effect and the protection effect on the roller shaft when the particles are in the distribution density range.
In one embodiment, the refractive index of the particles is the same as the refractive index of the substrate.
Because the refractive indexes are the same, the light path is less distorted when the light passes through. Therefore, the increase in haze of the transparent conductive film due to the addition of the particles can be reduced.
In one embodiment, the nano silver wire layer, the insulating layer and the metal layer are formed on one surface of the substrate; or
The nano silver wire layer, the insulating layer and the metal layer are formed on both surfaces of the substrate.
The invention also provides a preparation method of the transparent conductive film, which comprises the following steps:
forming a nano silver wire layer on at least one surface of the substrate;
forming an insulating layer on the surface of the nano silver wire layer, and adding particles into the insulating layer so that the surface of the insulating layer, which faces away from the nano silver wire layer, forms a protrusion;
and coating a metal material on the surface of the insulating layer by adopting a roller shaft, and curing to obtain a metal layer.
The invention further provides a touch screen, which is made of the transparent conductive film described in any of the above preferred embodiments, and the touch screen includes a touch area and a lead area disposed along a circumferential direction of the touch area, the touch area includes an electrode formed by etching the silver nanowire layer, and the lead area includes a lead formed by etching the metal layer and the silver nanowire layer located in the lead area.
The touch screen can be folded because the transparent conductive film has better flexibility. In addition, due to the existence of the particles, pinholes are not easy to generate in the metal layer forming process, so that the reliability of the lead obtained by etching is higher. Therefore, the quality of the touch screen is higher.
Drawings
FIG. 1 is a schematic structural diagram of a transparent conductive film according to a preferred embodiment of the present invention;
FIG. 2 is an enlarged partial view of the transparent conductive film shown in FIG. 1;
FIG. 3 is a schematic view of the transparent conductive film shown in FIG. 1 during the formation of a metal layer;
FIG. 4 is a schematic flow chart of a method for preparing a transparent conductive film according to a preferred embodiment of the present invention;
fig. 5 is a schematic structural diagram of a touch screen in a preferred embodiment of the invention.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, a transparent conductive film 100 according to a preferred embodiment of the present invention includes a substrate 110, a nano-silver wire layer 120, an insulating layer 130, and a metal layer 140.
The substrate 110 has two opposite surfaces, i.e., an upper surface and a lower surface as shown in fig. 1. Since the transparent conductive film 100 is generally applied to a flexible touch panel, the substrate 110 should be formed of a material with good bending property. Specifically, the base material 110 may be formed of any one of organic polymer materials such as polyacrylate, polyester, and polypropylene, or a mixture of any two or more of them.
The nano silver wire layer 120, the insulating layer 130 and the metal layer 140 are sequentially formed on at least one surface of the substrate 110. The transparent conductive film 100 may be a single-sided conductive film or a double-sided conductive film, and is applied to GF and GFF touch panels, respectively.
As shown in fig. 1, in the present embodiment, a nano silver wire layer 120, an insulating layer 130 and a metal layer 140 are formed on both surfaces of a substrate 110. That is, the transparent conductive film 100 is a double-sided conductive film.
Obviously, in other embodiments, only one surface of the substrate 110 may be formed with the nano silver wire layer 120, the insulating layer 130 and the metal layer 140. In this case, the transparent conductive film 100 is a single-sided conductive film.
The nano silver wire layer 120 is formed by silk-screening a nano silver paste material. The nano silver wire layer 120 replaces an ITO layer in a conventional transparent conductive film, and is etched into a transparent electrode pattern when a touch screen is manufactured. Compared with the conventional ITO layer, the bending performance of the nano silver wire layer 120 is better, so that the flexibility of the touch screen can be realized.
In order to prevent the nano silver wire layer 120 from oxidation and electromigration, an insulating layer 130 is further formed on the surface of the nano silver wire layer 120. The insulating layer 130 may be formed by curing an insulating material such as resin. Also, referring to fig. 2, in order to realize the conductive connection between the nano silver wire layer 120 and the metal layer 140. Part of the silver wires in the nano silver wire layer 120 need to be led out and pass through the insulating layer 130, and the silver wire heads 121 of the part of the silver wires protrude out of the surface of the insulating layer 130, which is opposite to the nano silver wire layer 120.
Therefore, when the metal layer 140 is molded, the silver wire tip 121 may be inserted into the metal layer 140, thereby achieving good electrical connection between the metal layer 140 and the nano-silver wire layer 120.
In the present embodiment, the thickness of the insulating layer 130 is 30 nm to 150 nm. Further, in the present embodiment, the thickness of the insulating layer 130 is 50 nm to 100 nm.
When the thickness of the insulating layer 130 is less than 50 nm, the protection effect is poor, and the nano silver wire layer 120 cannot be well prevented from oxidation and electromigration. When the thickness of the insulating layer 130 is greater than 100 nm, the overall transmittance of the transparent conductive film 100 is reduced. Further, the insulating layer 130 increases in thickness and decreases in flexibility, which also leads to a decrease in flexibility of the transparent conductive film 100. Therefore, the insulating layer 130 with a thickness of 50 nm to 100 nm can have protection, light transmittance and flexibility.
The metal layer 140 is attached to the side of the insulating layer 130 facing away from the nano-silver wire layer 120. When the touch screen is manufactured, the metal layer 140 is used to form an electrode lead outside the touch input area. The metal layer 140 is formed by solidifying a metal conductive material, and common metal conductive materials include copper, silver, aluminum, nickel, molybdenum, and titanium, but any metal having excellent conductivity other than copper may be used.
Referring to fig. 3, a metal material is generally coated on the surface of the insulating layer 130 by roll coating, and then cured to obtain the metal layer 140. Roll coating requires rolling the roll shaft 20 along the insulation layer 130 to achieve coating of the metal material. In order to prevent the silver wire head 121 protruding from the surface of the insulating layer 130 from scratching the roller 20 and eventually causing the metal layer 140 to have a pinhole. The insulating layer 130 contains a plurality of particles 150, and the plurality of particles 150 protrude from the surface of the insulating layer 130 facing the metal layer 140 to form a plurality of protrusions (not shown).
In the present embodiment, the refractive index of the particles 150 is the same as that of the substrate 110.
Specifically, the refractive index of the particles 150 in the present embodiment is 1.5 to 1.53. The refractive indices are the same, meaning that the refractive indices are identical or equivalent. The particles 150 may be made of the same material as the substrate 110 or may be made of different materials having a refractive index. Because the refractive indexes are the same, the light path is less distorted when the light passes through. Therefore, the increase in haze of the transparent conductive film 100 due to the addition of the particles 150 can be reduced.
The particles 150 are molded from a transparent material, which may be an acrylic based material. The particles 150 are partially embedded in the insulating layer 130, thereby forming protrusions. Specifically, the particle size of the particles 150 is controlled to be larger than the thickness of the insulating layer 130, so that the particles 150 protrude from the surface of the insulating layer 130 to form protrusions. Furthermore; the protrusions may also be formed by controlling the density of the particles 150 to be suspended in the insulating layer 130.
Gaps exist among the protrusions on the surface of the insulating layer 130, and the silver wire heads 121 protruding from the surface of the insulating layer 130 can be distributed in the gaps. The roll-coated metal material can flow and fill in the gap, and therefore, the nano silver wire layer 120 and the metal layer 140 are not affected to realize conductive lap joint, and the normal function of the transparent conductive film 100 is ensured.
Referring again to fig. 3, the protrusions may be raised to an overhead state when the metal material is roll-coated, so that the silver wire 121 protruding from the surface of the insulating layer 130 cannot contact the surface of the roller 20, or even contact is made to a lesser extent. Therefore, the protruding silver wire heads 121 can be prevented from scratching the surface of the roll 20, thereby preventing pinholes from being formed in the metal layer 140.
Further, the contact area of the convex surface with the roller shaft 20 is larger than that of the silver wire head 121, so that the pressure generated by the contact point to the roller shaft 20 is smaller. Therefore, the protrusions do not cause scratches on the roller shaft 20. Moreover, the particles 150 are generally spherical or substantially ellipsoidal, with smooth surfaces, which further avoid damage to the roller shaft 20.
In the present embodiment, the height of the protrusions is 200 nm to 1800 nm. As shown in fig. 2, the height of the protrusion refers to the distance h from the top of the protrusion to the surface of the insulating layer 130.
Further, in the present embodiment, the height of the protrusion is 300 nm to 800 nm.
The higher the height of the projection is, the more remarkable the overhead effect is, the probability that the roll shaft 20 is in contact with the silver wire head 121 can be further reduced, and the better the protection effect on the roll shaft 20 is. However, as the height increases, the size of the particles 150 needs to be increased, so that the haze value of the transparent conductive film 100 is increased, and the optical effect and flexibility of the transparent conductive film 100 are seriously affected to a certain extent. Within the above height range, the transparent conductive film 100 can preferably achieve the protective effect, the optical effect, and the flexibility of the roll shaft 20.
In this embodiment, the density of particles 150 in insulating layer 130 is greater than or equal to 300 per square millimeter. Further, in the present embodiment, the density of the particles in the insulating layer 130 is 400 to 600 particles per square millimeter.
When the distribution density of the particles 150 is too large, the haze value of the transparent conductive film 100 is too large, and the light transmittance is lowered, thereby seriously affecting the appearance and the optical effect of the transparent conductive film 100. If the distribution density of the particles 150 is too low, the spacing between the protrusions is too large, and the protrusions cannot effectively lift the roller 20, and there is a high risk that the roller 20 will come into contact with the silver wire head 121 during the roll coating process. In the range of the distribution density of the particles 150, the transparent conductive film 100 can achieve both the optical effect and the protection effect on the roll 20.
In the transparent conductive film 100, the particles 150 form a plurality of protrusions on the surface of the insulating layer 130, gaps exist between the protrusions, and the silver wires protruding from the surface of the insulating layer 130 are generally distributed in the gaps. When the metal material is roll-coated, the protrusions can play an overhead role, so that the probability and the degree of contact between the silver wire head 121 and the surface of the roller shaft 20 are reduced. Further, the contact area of the surface of the protrusion with the roller 20 is larger than that of the silver wire head 121, so that the protrusion will not scratch the roller 20. Moreover, the metal material can flow and fill in the gap, so that the conductive connection between the nano-silver wire layer 120 and the metal layer 140 is not affected. Therefore, the transparent conductive film 100 can effectively prevent the metal layer 140 from generating pinholes, thereby improving the quality.
Referring to fig. 4, the present invention also provides a method for preparing a transparent conductive film, which includes steps S101 to S103:
in step S101, a silver nanowire layer 120 is formed on at least one surface of the substrate 110.
Specifically, the structure, material and forming manner of the substrate 110 and the nano silver wire layer 120 are the same as those of the transparent conductive film 100, and therefore, the description thereof is omitted.
Step S102 is to form an insulating layer 130 on the surface of the nano silver wire layer 120, and to add particles 150 into the insulating layer 130, so that the surface of the insulating layer 130 opposite to the nano silver wire layer 120 is formed into a protrusion.
Specifically, the particles 150 may be doped in the resin material forming the insulating layer 130, and then the resin material doped with the particles 150 may be coated on the surface of the nano silver wire layer 120. After curing, the insulating layer 130 containing the particles 150 is obtained. Alternatively, a pure resin material may be coated on the surface of the nano silver wire layer 120, and the particles 150 may be added to the resin material in a semi-cured state. After the resin material is further cured, the insulating layer 130 containing the particles 150 can be obtained as well
The structure, material and forming method of the insulating layer 130, the particles 150 and the protrusions are the same as those of the transparent conductive film 100, and thus are not described herein again.
In step S103, a metal material is coated on the surface of the insulating layer 130 by using the roller 20, and is cured to obtain the metal layer 140.
When the metal material is roll-coated, the protrusions can play an overhead role on the roller shaft 20, so that the probability and the degree of contact between the silver wire head 121 and the surface of the roller shaft 20 are reduced. Further, the contact area of the surface of the protrusion with the roller 20 is larger than that of the silver wire head 121, so that the protrusion will not scratch the roller 20. Therefore, pinholes are not present or are present in a very small amount in the obtained metal layer 140, and the obtained transparent conductive film has higher quality.
The metal layer 140 has the same structure and material as those of the transparent conductive film 100, and therefore, the description thereof is omitted.
The metal layer 140 is formed by roll coating at a low cost. Furthermore, by doping the particles 150 in the insulating layer 130 in advance, the generation of pinholes in the metal layer 140 can be effectively prevented.
Referring to fig. 5, the present invention also provides a touch panel 200. The touch panel is made of the transparent conductive film 100. Wherein:
the touch screen 200 includes a touch area 201 and a lead area 202. The touch area 201 is located in the middle of the touch screen 200, and the lead area 202 is disposed along the circumference of the touch area 201. The touch pad 201 includes electrodes 210, and the lead pad 202 includes leads 220.
The electrode 210 is etched from the nano-silver wire layer 120. Specifically, the nano silver wire layer 120 located in the touch area 201 is etched into an electrode pattern having a predetermined shape, thereby forming the electrode 210. Wherein, the electrode pattern is generally in a strip shape and is vertically crossed to form a grid shape. In addition, the surface of the electrode 210 is covered with the insulating layer 130 etched into an electrode pattern.
The leads 220 are formed by etching the metal layer 140 and the nanosilver layer 120 at the lead region 202. The portion of the metal layer 140 in the touch pad 201 is etched away, leaving only the portion in the lead pad 202. The lead 220 has a double-layered structure, thereby achieving electrical connection with the electrode 210.
The touch panel 200 shown in fig. 5 is made of a double-layered transparent conductive film 100, and both sides thereof are formed with electrodes 210 and leads 220.
In the touch panel 200, the transparent conductive film 100 has better flexibility, so that the touch panel can be folded. Furthermore, due to the existence of the particles 150, pinholes are not easily generated during the molding process of the metal layer 140, and thus the reliability of the etched lead 220 is higher. Therefore, the quality of the touch screen 200 is higher.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A transparent conductive film, comprising:
a substrate having two opposing surfaces; and
a nano silver wire layer, an insulating layer and a metal layer which are sequentially formed on at least one surface of the substrate;
the insulating layer contains a plurality of particles, and the particles protrude from the surface of the insulating layer facing the metal layer to form a plurality of bulges.
2. The transparent conductive film according to claim 1, wherein the insulating layer has a thickness of 30 to 150 nm; or
The thickness of the insulating layer is 50 to 100 nm.
3. The transparent conductive film according to claim 1, wherein the height of the protrusions is 200 nm to 1800 nm.
4. The transparent conductive film according to claim 3, wherein the height of the protrusions is 300 nm to 800 nm.
5. The transparent conductive film of claim 1, wherein the density of the particles in the insulating layer is greater than or equal to 300 per square millimeter.
6. The transparent conductive film according to claim 5, wherein the density of the particles in the insulating layer is 400 to 600 particles per square millimeter.
7. The transparent conductive film according to claim 1, wherein the refractive index of the particles is the same as that of the substrate.
8. The transparent conductive film according to claim 1,
the nano silver wire layer, the insulating layer and the metal layer are sequentially formed on two surfaces of the base material.
9. A method for preparing a transparent conductive film, comprising the steps of:
forming a nano silver wire layer on at least one surface of the substrate;
forming an insulating layer on the surface of the nano silver wire layer, and adding particles into the insulating layer so that the surface of the insulating layer, which faces away from the nano silver wire layer, forms a protrusion;
and forming a metal layer on the surface of the insulating layer.
10. A touch panel made of the transparent conductive film according to any one of claims 1 to 8, the touch panel comprising a touch area and a lead area disposed along a circumferential direction of the touch area, the touch area comprising electrodes formed by etching the silver nanowire layer, and the lead area comprising leads formed by etching the metal layer and the silver nanowire layer located in the lead area.
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| CN201911086010.0A CN112786236A (en) | 2019-11-08 | 2019-11-08 | Transparent conductive film, preparation method thereof and touch screen |
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| CN201911086010.0A CN112786236A (en) | 2019-11-08 | 2019-11-08 | Transparent conductive film, preparation method thereof and touch screen |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113821125A (en) * | 2021-11-22 | 2021-12-21 | 广东省科学院半导体研究所 | Touch substrate, preparation method thereof, touch module and display device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113821125A (en) * | 2021-11-22 | 2021-12-21 | 广东省科学院半导体研究所 | Touch substrate, preparation method thereof, touch module and display device |
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Application publication date: 20210511 |