CN112763651B - Positioning puncture clamp, internal atmosphere content analyzer and testing method thereof - Google Patents
Positioning puncture clamp, internal atmosphere content analyzer and testing method thereof Download PDFInfo
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- CN112763651B CN112763651B CN202011423425.5A CN202011423425A CN112763651B CN 112763651 B CN112763651 B CN 112763651B CN 202011423425 A CN202011423425 A CN 202011423425A CN 112763651 B CN112763651 B CN 112763651B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to a positioning puncture clamp, an internal atmosphere content analyzer and a test method thereof, wherein the positioning puncture clamp is used for puncturing a sealed component and comprises a carrying clamping assembly, the sealed component is arranged on the carrying clamping assembly, the carrying clamping assembly comprises a moving module and a clamping piece, the moving module pushes the sealed component to move to a puncture point along the plane direction of the sealed component, the moving module circumferentially clamps the sealed component, the clamping piece is arranged on one side of the sealed component along the vertical plane direction, and the clamping piece moves close to the sealed component to clamp the sealed component; the puncture assembly is arranged on one side, away from the clamping piece, of the sealing component and comprises a puncture needle, and the puncture needle penetrates into the sealing component through a puncture point. The application provides a location puncture anchor clamps has the advantage that can the accurate positioning await measuring components and parts puncture position, can realize accurate puncture to small-size components and parts of awaiting measuring, can not destroy its inside packaging structure during just the puncture.
Description
Technical Field
The invention relates to the technical field of integrated circuit packaging, in particular to a positioning puncture clamp, an internal atmosphere content analyzer and a testing method thereof.
Background
The internal atmosphere content analyzer can effectively detect the internal gas components of the sealed components, has important application in the field of electronic component packaging airtightness detection, and is important equipment for realizing the detection of the sealing reliability of the electronic components by utilizing a destructive physical experiment method. When the existing internal atmosphere content analyzer is used for measuring the air tightness of a sealed component and an integrated circuit, the internal gas of the sealed component needs to be released by a method of puncturing the component by a probe under a vacuum environment, and the internal atmosphere content analysis is completed by analyzing the components of the released gas.
In practical operation, because the relative position between the specimen holder and the puncture probe of the existing internal atmosphere content analyzer is fixed, the puncture needle can only be punctured to a required position by placing a specimen on different positions of the specimen stage by an operator. When the external airtight package is punctured, because the internal structure of the component is not clear and the size of the sealed component is small, the puncture position is not aligned with the cavity body but only punctures the side shell of the component possibly because of the deviation of the needle dropping position during the puncture package operation; or the puncture needle is mistakenly punctured into the internal integrated chip due to the internal complex structure of the uncertain component, the internal chip package is damaged, redundant atmosphere is introduced, and finally component analysis and measurement errors are caused.
The traditional method can not accurately position the position to be punctured, can only rely on the intuitive experience and experience judgment of an operator, is easy to cause the situations of skewing, wrong puncturing and the like in the process of puncturing the component, and can not puncture the component to be punctured or puncture other sealed chips to leak redundant atmosphere to cause measurement errors.
Disclosure of Invention
Therefore, a positioning puncture clamp is needed to be provided for solving the problem that the atmosphere measurement error is caused by inaccurate positioning of the puncture position in the detection packaging chip of the current internal atmosphere content analyzer.
A positioning puncture clamp is used for puncturing a sealed component and comprises a carrying clamping assembly, the sealed component is arranged on the carrying clamping assembly, the carrying clamping assembly comprises a moving module and a clamping piece, the moving module pushes the sealed component to move to a puncture point along the plane direction of the sealed component, the moving module circumferentially clamps the sealed component, the clamping piece is arranged on one side of the sealed component along the direction perpendicular to the plane direction, and the clamping piece moves close to the sealed component to clamp the sealed component; the puncture assembly is arranged on one side, away from the clamping piece, of the sealing component, the puncture assembly comprises a puncture needle, and the puncture needle penetrates into the sealing component through the puncture point.
Further, still include the closing plate, the closing plate sets up carry thing clamping component with between the puncture component, set up on the closing plate the puncture point, carry thing clamping component with the closing plate forms sealed cavity.
Further, the object holding assembly further comprises an object carrier, the moving module is arranged on the object carrier, the moving module comprises a stopper and a pushing device which are arranged oppositely, the pushing device is close to or far away from the stopper along the plane direction, and the sealing element is held between the stopper and the pushing device.
Further, the propelling device comprises an adjusting nut and a push rod, and the adjusting nut is used for controlling the push rod to be close to or far away from the stopper.
Furthermore, the stopper comprises a limiting baffle and a limiting elastic body, the limiting elastic body is connected with the limiting baffle and the object carrier, and the sealing element is clamped between the propelling device and the limiting baffle.
Further, the object carrier is provided with a positioning point, and the positioning point is a base point for determining the moving distance of the propelling device.
Further, the object holding assembly further comprises an upper cover plate, the upper cover plate is connected with the object carrier, and the clamping piece penetrates through the upper cover plate to move close to the sealing component.
Furthermore, the puncture assembly further comprises a lower cover plate and an adjusting rod, one end of the adjusting rod is connected with the puncture needle, the other end of the adjusting rod penetrates through the lower cover plate, and the adjusting rod is used for controlling the puncture needle to penetrate into the sealing component.
Further, the device comprises a connecting rod, wherein the connecting rod is sequentially connected with the object carrying clamping assembly, the sealing plate and the puncture assembly, and the connecting rod is used for adjusting the distance between the object carrying clamping assembly, the sealing plate and the puncture assembly.
The application provides a location puncture anchor clamps, it is in the same place to carry thing centre gripping subassembly and puncture subassembly integration, it can follow the plane direction promotion sealing components and parts and remove puncture point department to carry the removal module on the thing centre gripping subassembly, simultaneously can follow sealing components and parts's circumference clamp seal components and parts, simultaneously, the direction that sealing components and parts are perpendicularly compressed tightly to the clamping piece on carrying the thing centre gripping subassembly, realize sealing components and parts's three-dimensional location through removal module and clamping piece, pass the puncture point with the pjncture needle that is located sealing components and parts opposite side at last in order to pierce sealing components and parts, realize sealing components and parts's location and puncture. The application provides a location puncture anchor clamps has the advantage that can the accurate positioning await measuring components and parts puncture position, especially treats the puncture components and parts to the microminiature and can realize accurate puncture, and the puncture position of the components and parts that await measuring can remove, under the condition of not destroying other packaging structure of the inside components and parts that await measuring, can treat the puncture components and parts to have little cavity structure and realize accurate puncture, and then improve the detection efficiency of the components and parts that await measuring, have better market using value.
Further, an internal atmosphere content analyzer is provided, which comprises the positioning puncture clamp and an X-ray scanner, wherein the X-ray scanner is used for determining a position to be punctured of the sealing component.
The application provides an inside atmosphere content analysis appearance scans the sealed components and parts that need puncture through X-ray scanner, obtains by X-ray machine scanner and treats puncture sealed components and parts inside structure picture to denoising, sharpening, promoting basic processing such as contrast to the image, carry out digital coordinate to the inside structure picture pixel after handling, confirm every part and treat the coordinate that the puncture position corresponds. Through frame extraction and pixel coordinate location, the calibration of the coordinates of the position to be punctured is realized, and the position to be punctured is moved to the position right above the puncture needle by utilizing the self upper computer of the atmosphere content analyzer to guide the positioning puncture clamp, so that accurate positioning and puncturing are realized, and further, the atmosphere content in the sealed component can be conveniently detected. The problem of current inside atmosphere content analysis appearance can only rely on experience or producer legend to confirm roughly that treat the puncture position, arouse puncture position deviation easily, release other built-in chip encapsulated gases and arouse measuring error is solved, the irreversible loss that sealed components and parts inner structure is destroyed and arouse because of the puncture position is inaccurate has been avoided.
Further, there is provided an internal atmosphere content testing method including the above-described internal atmosphere content analyzer, including the steps of:
placing the sealing element in a carrier of the positioning puncture clamp;
scanning the sealed component by using an X-ray scanner, and calibrating the coordinate of the position to be punctured on the sealed component;
scanning the positioning puncture clamp by using an X-ray scanner, and calibrating the coordinates of a puncture point on the positioning puncture clamp;
pushing the sealing element to move so that the coordinate of the position to be punctured is superposed with the coordinate of the puncture point;
and clamping the sealing component, and adjusting a puncture needle to penetrate through the puncture point to the position to be punctured.
Furthermore, the positioning puncture clamp comprises a loading clamping assembly and a puncture assembly, the loading clamping assembly comprises a loading frame, a moving module and a clamping piece, the moving module is connected with the loading frame, the moving module pushes the sealing element to move and circumferentially clamp the sealing element, the clamping piece moves above the sealing element to clamp the sealing element, the puncture assembly comprises a puncture needle, and the puncture needle is arranged on one side, far away from the clamping piece, of the sealing element.
The application provides an inside atmosphere content test method, to having inside atmosphere content analysis appearance can not obtain sealed components and parts integrated circuit inner structure, easily cause the problem that puncture position error arouses atmosphere measuring error, through portable accurate positioning's inside atmosphere content analysis appearance, and utilize inside atmosphere content analysis appearance host computer to carry out frame extraction, pixel coordinated location to the sealed components and parts inner structure of treating that obtains by X-ray scanner, make the position of treating puncture on the sealed components and parts of treating puncture coincide with the puncture point, the accurate positioning puncture is realized to final cooperation pjncture needle. The internal atmosphere content testing method provided by the application can realize accurate puncture especially for a micro component to be punctured, improves the internal atmosphere detection effect, and simultaneously avoids the damage to the structure of the component to be punctured in the puncturing process.
Drawings
FIG. 1 is an exploded view of a positioning piercing fixture according to one embodiment of the present application;
FIG. 2 is a perspective view of a stage of a positioning piercing fixture according to an embodiment of the present application;
FIG. 3 is a perspective view of a clamping assembly of an embodiment of the present application for positioning a piercing fixture;
FIG. 4 is a perspective view of a piercing assembly of an embodiment of the present application positioning a piercing fixture;
FIG. 5 is a state view of the positioning piercing fixture in use according to one embodiment of the present application;
FIG. 6 is a flow chart of an internal atmosphere content testing method according to an embodiment of the present application.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless explicitly specified otherwise.
In the present invention, unless otherwise explicitly stated or limited, the terms "mounted," "connected," "fixed," and the like are to be construed broadly, e.g., as being permanently connected, detachably connected, or integral; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
Fig. 1 shows an exploded view of a positioning and piercing fixture according to an embodiment of the present application, which comprises a carrier holding assembly (not shown), a sealing plate 4, a piercing assembly 30 and a connecting rod 5, from top to bottom, wherein the carrier holding assembly is preferably composed of detachable components, including a clamping assembly 10 and a carrier platform 20. Wherein, the connecting rod 5 is used for connecting the clamping assembly 10, the loading platform 20, the sealing plate 4 and the puncturing assembly 30, and adjusting the distance between the other assemblies through the connecting rod 5, preferably, the connecting rod 5 is a long screw rod. The loading platform 20 comprises a moving module (not shown) and a loading rack 23, the moving module comprises a plurality of sets of propelling devices 21 and stoppers 22 which are arranged oppositely, the sealed component to be detected can move in the loading platform 20 by adjusting the propelling devices 21, and the sealed component can be clamped between the propelling devices 21 and the stoppers 22.
Furthermore, the clamping assembly 10 is provided with a clamping member 11 and an upper cover plate 12, the upper cover plate 12 is connected above the object carrier 23, the axial direction of the clamping member 11 is perpendicular to the plane of the object carrying platform 10, and the clamping member 11 penetrates through the upper cover plate 12 and moves close to or away from the object carrying platform 20, so as to press the sealing component in the direction perpendicular to the object carrying platform 20. The sealing plate 4 is connected below the object carrier 23, and the upper cover plate 12 and the sealing plate 4 are arranged on two sides of the object carrier 23, and the distance between the upper cover plate and the sealing plate 4 is adjusted by the connecting rod 5, so that a sealed cavity is formed among the clamping assembly 10, the object carrying platform 20 and the sealing plate 4, and a sealed component to be detected is placed in the sealed cavity. Because carry out sealed components and parts atmosphere and detect and need go on in the closed environment, the location puncture anchor clamps that this application provided can satisfy the tight and puncture of clamp to sealed components and parts promptly, can provide the sealed environment of detecting usefulness again.
This application preferred embodiment, closing plate and cargo platform integrated design set up the bottom plate promptly on the cargo platform, and sealed components and parts are placed on the bottom plate, and the pjncture needle can penetrate sealed components and parts through cargo platform's bottom plate. A sealed cavity for placing a sealed component is formed between the carrying platform and the clamping assembly.
Preferably, the loading platform 20 is horizontally arranged, and the moving module thereon can push the sealing component to move along the horizontal plane, and clamp the sealing component by using the pushing device 21 and the stopper 22, so as to horizontally position the sealing component; the axial direction of the clamping part 11 on the clamping assembly 10 is perpendicular to the horizontal plane, the clamping part 11 can pass through the upper cover plate 12 to approach or depart from the sealing component, preferably, the clamping part 11 is in threaded connection with the upper cover plate 12, and the clamping part 11 can move in the longitudinal direction by adjusting the feeding amount of the clamping part 11. Finally, the sealing element is clamped longitudinally by the clamping element 11 located above it and by the base plate of the sealing plate 4 or carrier platform 20 located below it.
It should be noted that, in the positioning puncture clamp shown in fig. 1, for convenience of description of various parts therein, the loading platform 20 is set to be horizontally arranged, the circumferential horizontal fixation of the sealing component is realized through the loading platform 20, and meanwhile, the clamping member 11 is vertically arranged, and the vertical positioning of the sealing component is realized through the clamping member 11. However, this embodiment is only a preferred embodiment, and the horizontal and vertical directions are only relative to fig. 1, and three-dimensional positioning of the sealing component is performed through three directions, which does not mean that the positioning puncture clamp provided by the present application must be arranged in this direction during installation, and installation in other directions can also meet the technical requirements of the present application.
Further, the puncture assembly 30 is disposed at the bottom of the sealing plate 4, the puncture assembly 30 includes an adjusting rod 31, a lower cover plate 32 and a puncture needle 33, the adjusting rod 31 is telescopically movable with respect to the lower cover plate 32, the end of the adjusting rod 31 is connected to the puncture needle 33, the sealing plate 4 is provided with a puncture point 41, and preferably, the puncture point 41 is in a hole shape. Puncture needle 33 is located directly below puncture point 41. In combination with the above, the moving module pushes the sealing component to move along the plane where the object platform 20 is located, so that the position to be punctured on the sealing component moves to the position where the puncturing point 41 is located, and the adjusting rod 31 can enable the puncturing needle 33 to penetrate through the puncturing point 41 and penetrate into the sealing component, thereby achieving puncturing of the sealing component.
According to another embodiment of the application, the puncture point is arranged on the bottom plate of the loading platform, and the puncture needle 33 penetrates through the puncture point on the bottom plate of the loading platform through the adjusting rod 31 to pierce into the sealing component, so that the sealing component is punctured.
According to another embodiment of the application, based on the above invention thought, on one hand, the sealing component needs to be punctured, and on the other hand, the punctured sealing component is required to be in a sealed environment during subsequent detection, the puncture needle can be conveniently penetrated by arranging the elastic material on the bottom plate of the sealing plate or the loading platform, and meanwhile, after the puncture needle is withdrawn, the puncture point is healed due to the resilience of the elastic material, a sealed space can be formed around the sealing component.
Further, above a seal chamber for placing and testing sealed components is formed by clamping component 10, cargo platform 20 and closing plate 4, through adjusting the distance between the three, is convenient for on the one hand get and put sealed components, and on the other hand makes its inseparable laminating in order to form seal chamber, and then is favorable to follow-up to sealed components business turn over puncture detection, in order to promote sealed effect, preferably, sets up the sealing washer between clamping component 10, cargo platform 20 and the closing plate 4.
It should be noted that, the above method, which integrates the test environment for performing the atmosphere detection on the sealed component and the piercing station, is only one preferred embodiment of the present application. This another embodiment of application is about to whole location puncture anchor clamps and places in vacuum environment, need not to require closely laminating in order to form sealed cavity between clamping component 10, cargo platform 20 and the closing plate 4, and the test environment that sealed components and parts atmosphere detected is provided by outside vacuum environment, can realize above technical purpose equally to can reduce the machining precision and the sealed requirement of location puncture anchor clamps each part, reduction in production cost.
Fig. 2 is a perspective view of a carrier platform of a positioning and piercing fixture according to an embodiment of the present application, where the carrier platform 20 includes a plurality of moving modules (not shown) and a carrier rack 23, and a sealing component is disposed in the middle of the moving modules, and the sealing component is adjusted in position on the carrier platform 20 by the moving modules and clamped in a circumferential direction of the sealing component. The moving module is composed of a propelling device 21 and a limiting stopper 22 which are oppositely arranged, the propelling device 21 comprises a propelling controller 211 and a push rod 212, and preferably, the propelling controller 211 comprises but is not limited to an adjusting nut, a spiral position finder and the like. The stopper 22 comprises a stopper elastic body 221 and a stopper 222, preferably, the stopper elastic body 221 is a stopper spring, one end of the stopper spring 221 is connected to the article carrier 23, and the other end is connected to the stopper 222. By adopting the structure mode, on one hand, the limit baffle 222 can be matched with the propelling device 21 to clamp the sealed component, and on the other hand, when the propelling device 21 pushes the sealed component to move, the limit baffle 222 can not limit the movement of the sealed component. Finally, the push rod 212 is adjusted by the push controller 211 to be close to or far from the limit baffle 222, so that the position to be punctured on the sealing component is moved to the position above the puncture needle 33, and meanwhile, clamping is realized in the circumferential direction of the sealing component.
Preferably, the object stage 20 provided by the present application includes two pairs of moving modules, the two pairs of moving modules are respectively disposed along an X-X direction and a Y-Y direction, the X-X direction is perpendicular to the Y-Y direction, a sealing component to be detected is placed between the pushing device 21 and the stopper 22, the pushing controller 211 on the pushing device 21 is adjusted to push the pushing rod 212 to move along the X-X or Y-Y direction, and push the sealing component to gradually approach the limiting baffles 222 on both sides, and finally the sealing component is in a fixed state under the clamping of the limiting baffles 222 and the pushing rod 212, so as to achieve the positioning of the sealing component on the plane of the object stage 20. Furthermore, the push rod 212 can be extended and retracted by adjusting the push controller 211, so as to push the sealing component to move along the X-X direction and the Y-Y direction, and finally, the position to be punctured on the sealing component is moved to the position of the puncture needle 33.
Further, preferably, the object carrier 23 is a frame-shaped structure, the upper and lower parts of which are closed by the upper cover plate 12 and the sealing plate 4 of the clamping assembly 10, the two pairs of moving modules are respectively disposed on the mutually perpendicular side plates of the object carrier 23, a plurality of mounting holes 231 are circumferentially disposed on the outer part of the object carrier 23, and the connecting rod 5 connects the object platform 20 with other parts through the mounting holes 231. In addition, the carrier rack 23 is provided with a positioning point 232, the positioning point 232 is a coordinate base point of two perpendicular directions X-X and Y-Y, preferably, the positioning point 232 is an inner right angle of the carrier rack 23, and the positioning point 232 can help the propulsion device 21 to determine the moving distance thereof, so as to achieve accurate positioning of the sealed component.
Fig. 3 is a perspective view of a clamping assembly for positioning a lancing fixture according to an embodiment of the present application, and referring to fig. 1-3, clamping assembly 10 includes a clamping member 11 and an upper cover plate 12, clamping member 11 extending through upper cover plate 12 and being movable toward and away from carrier platform 20 in a Z-Z direction, which is perpendicular to a plane formed by the X-X direction and the Y-Y direction. Preferably, the clamping member 11 is a bolt, the clamping member 11 is in threaded connection with the upper cover plate 12, and the clamping member 11 is close to or far from the loading platform 20 by adjusting the thread pitch, so that the clamping of the sealing component along the Z-Z direction is realized. The outer circumference of the upper cover plate 12 is also provided with a mounting hole 121, and the connecting rod 5 passes through the mounting hole 121 to realize the connection of the clamping assembly 10 with other assemblies. Further, in order to facilitate clamping and puncturing of the sealing component, and to make the upper and lower clamping of the sealing component more stable, the clamping member 11 is preferably disposed coaxially with the puncture needle 33.
Fig. 4 shows a perspective view of a puncture assembly for positioning a puncture clamp according to an embodiment of the present application, where the puncture assembly 30 includes an adjusting rod 31, a lower cover plate 32 and a puncture needle 33, the puncture needle 33 is disposed at an end of the adjusting rod 31, the adjusting rod 31 passes through the lower cover plate 32 and drives the puncture needle 33 to approach or depart from the carrier platform 20, preferably, the adjusting rod 31 is in threaded connection with the lower cover plate 32, and the puncture needle 33 is moved by adjusting a thread pitch of the adjusting rod 31. The outer circumference of the lower cover plate 32 is provided with a mounting hole 321, and the connecting rod 5 connects the puncture assembly 30 with other assemblies through the mounting hole 321. The sealing plate 4 is arranged between the loading platform 20 and the puncture assembly 30, a puncture point 41 is arranged on the sealing plate 4, and the puncture needle 33 can penetrate through the puncture point 41 into the sealed cavity and further penetrate into the sealed component therein. Further, a mounting hole 42 is provided in the outer circumferential direction of the seal plate 4, and the connecting rod 5 connects the seal plate 4 to other components and the like through the mounting hole 42.
Fig. 5 shows a using state diagram of a positioning puncture fixture according to an embodiment of the present application, and referring to fig. 1 to 5, a loading platform 20 includes a rack 23, a pushing device 21 respectively disposed in the X direction and the Y direction, and a stopper 22 respectively disposed in the X direction and the Y direction, wherein the Y direction pushing device 21 and the Y direction stopper 22 constitute a sample Y direction moving module to be punctured, and the X direction sample pushing device 21 and the X direction stopper 22 constitute a sample X direction moving module to be punctured. The pushing controller 211 in the X direction and the Y direction is rotated to push the sealed component to be punctured, so that the position to be punctured on the component is positioned right above the puncture needle 33, and finally the purpose of high-precision puncture at a fixed point is achieved.
Furthermore, the gap among the upper cover plate 12, the carrying platform 20 and the sealing plate 4 is adjusted through the connecting rod 5 to form a vacuum operation environment of the sealed component to be punctured; the loading platform 20 can change the position of the sample to be punctured relative to the puncture needle 33 by rotating the moving modules in the X direction and the Y direction according to the coordinates of the position to be punctured, so that the position to be punctured is right above the puncture needle 33; after the position of waiting to puncture of sealing components and parts moves directly over pjncture needle 33, move clamping piece 11 downwards along the Z direction in order to compress tightly sealing components and parts for sealing components and parts can be fixed in three dimension directions, and the pjncture needle 33 that cooperates the liftable at last punctures, realizes the purpose to the accurate location of sealing components and parts and puncture.
The application provides a location puncture anchor clamps, it is in the same place to carry thing centre gripping subassembly and puncture subassembly integration, it can follow the plane direction promotion sealing components and parts and remove puncture point department to carry the removal module on the thing centre gripping subassembly, simultaneously can follow sealing components and parts's circumference clamp seal components and parts, simultaneously, the direction that sealing components and parts are perpendicularly compressed tightly to the clamping piece on carrying the thing centre gripping subassembly, realize sealing components and parts's three-dimensional location through removal module and clamping piece, pass the puncture point with the pjncture needle that is located sealing components and parts opposite side at last in order to pierce sealing components and parts, realize sealing components and parts's location and puncture. The application provides a location puncture anchor clamps has the advantage that can the accurate positioning await measuring components and parts puncture position, especially treats the puncture components and parts to the microminiature and can realize accurate puncture, and the puncture position of the components and parts that await measuring can remove, under the condition of not destroying other packaging structure of the inside components and parts that await measuring, can treat the puncture components and parts to have little cavity structure and realize accurate puncture, and then improve the detection efficiency of the components and parts that await measuring, have better market using value.
Further, this application provides an inside atmosphere content analysis appearance, include above location puncture anchor clamps still include X-ray scanner, X-ray scanner is used for confirming the position of waiting to puncture of sealed components and parts. The component to be punctured is processed through an X-ray scanner, an internal structure diagram of the component to be punctured is obtained, the structure diagram is input into an internal atmosphere content analyzer and is arranged in an upper computer, the internal structure diagram of the component to be punctured is denoised, sharpened, the image processing operations such as contrast improvement and the like are carried out, the internal structure frame of the component to be punctured is extracted, then discretization and pixel coordinatization processing are carried out on the extraction result of the internal frame, the coordinate fineness of pixel points is determined according to the size of a puncture probe, the coordinate of each pixel point is established, the position to be punctured determined by scanning is moved to the puncture point on an object carrying platform, and the accurate positioning puncture of the sealing component is realized by matching a positioning puncture clamp.
It should be noted that, in order to ensure that the image edge is clear, the structure division is obvious, and the microstructure is accurately positioned, the upper computer needs to perform image processing such as denoising, sharpening, and contrast improvement on the image and frame extraction to obtain a fine structure of the internal structure of the component to be punctured. The upper computer of the internal atmosphere content analyzer with the frame extraction, the structure discretization and the coordinated positioning is an auxiliary structure of the positioning puncture clamp, the upper computer can adopt a common commercial computer, and the software or algorithm used for image processing is commercially available image processing software, self-editing development software and the like.
The application provides an inside atmosphere content analysis appearance scans the sealed components and parts that need puncture through X-ray scanner, obtains by X-ray machine scanner and treats puncture sealed components and parts inside structure picture to denoising, sharpening, promoting basic processing such as contrast to the image, carry out digital coordinate to the inside structure picture pixel after handling, confirm every part and treat the coordinate that the puncture position corresponds. Through frame extraction and pixel coordinate location, the calibration of the coordinates of the position to be punctured is realized, and the position to be punctured is moved to the position right above the puncture needle by utilizing the self upper computer of the atmosphere content analyzer to guide the positioning puncture clamp, so that accurate positioning and puncturing are realized, and further, the atmosphere content in the sealed component can be conveniently detected. The problem of current inside atmosphere content analysis appearance can only rely on experience or producer legend to confirm roughly that treat the puncture position, arouse puncture position deviation easily, release other built-in chip encapsulated gases and arouse measuring error is solved, the irreversible loss that sealed components and parts inner structure is destroyed and arouse because of the puncture position is inaccurate has been avoided.
Further, the present application relates to an internal atmosphere content testing method, which adopts the above-mentioned internal atmosphere content analyzer, and comprises the following steps:
s111: placing the sealing element in a carrier of the positioning puncture clamp;
referring to fig. 1-5, the positioning puncture clamp comprises, from top to bottom, a clamping assembly 10, a loading platform 20, a sealing plate 4, a puncture assembly 30, and a connecting rod 5, wherein the connecting rod 5 is used for connecting the clamping assembly 10, the loading platform 20, the sealing plate 4, and the puncture assembly 30, and adjusting the distance between the other assemblies through the connecting rod 5, and preferably, the connecting rod 5 is a long screw rod. The loading platform 20 comprises a moving module 21 and a loading rack 23, the moving module 21 comprises a plurality of sets of propelling devices 21 and stoppers 22 which are arranged oppositely, the sealing component to be detected can move in the loading platform 20 by adjusting the propelling devices 21, and the sealing component can be clamped between the propelling devices 21 and the stoppers 22.
The propelling device 21 comprises a propelling controller 211 and a push rod 212, and the stopper 22 comprises a stopper elastic body 221 and a stopper baffle 222, preferably, the stopper elastic body 221 is a stopper spring, one end of the stopper spring 221 is connected with the carrier rack 23, and the other end is connected with the stopper baffle 222. By adopting the structure mode, on one hand, the limit baffle 222 can be matched with the propelling device 21 to clamp the sealed component, and on the other hand, when the propelling device 21 pushes the sealed component to move, the limit baffle 222 cannot limit the movement of the sealed component.
S112: scanning the sealed component by using an X-ray scanner, and calibrating the coordinate of the position to be punctured on the sealed component;
because the component to be punctured is in an asymmetric structure, an initial position point with coordinates (0,0) of the component to be punctured needs to be set before an X-ray scanner scans an internal structure, any end point on the component to be punctured can be set as the initial position point of (0,0), and the original point position is not changed after the initial position point of (0,0) is set. And scanning the component to be punctured by an X-ray scanner to obtain an internal structure diagram, and inputting the internal structure diagram into an upper computer of the internal atmosphere content analyzer through a data transmission medium (a mobile hard disk, a U disk or a transmission line). The existing conventional digital image processing technology is utilized to perform operations such as denoising, sharpening, contrast improvement and the like on the scanning image of the internal structure, so that the internal structure is clearer, and the determination of the position to be punctured of the sealed component is facilitated. And carrying out pixel discretization on the processed internal structure scanning image, determining the diameter of a pixel point according to the size of the puncture needle, and converting the internal structure scanning image into a pixel discretization image. Setting coordinates for each pixel point according to the determined origin position, converting the internal structure scanning image into a two-dimensional coordinate image, and marking the coordinates of the position to be punctured as (x) 0 ,y 0 )。
S113: scanning the positioning puncture clamp by using an X-ray scanner, and calibrating the coordinates of a puncture point on the positioning puncture clamp;
referring to fig. 2, the positioning point 232 is disposed on the object carrier 23, and the positioning point 232 is two coordinate base points perpendicular to the X-X direction and the Y-Y direction, i.e. the positioning point 232 on the object carrier 23 is also a coordinateIs the initial position point of (0, 0). Preferably, the positioning point 232 is an inner right angle of the carrier rack 23, and the positioning point 232 can help the propulsion device 21 determine the moving distance thereof, so as to achieve accurate positioning of the sealing component. Referring to step S112, the X-ray scanner identifies the coordinates of the puncture point 41, and the coordinates of the puncture point 41 are (X) 1 ,y 1 )。
S114: pushing the sealing element to move so that the coordinate of the position to be punctured is superposed with the coordinate of the puncture point;
in order to realize the coordinated and accurate puncture of the position to be punctured, the positioning puncture clamp with the direction controllable at X, Y is designed, and the position of a sealing component can be moved by the clamp within a certain range according to the coordinate of the position to be punctured, so that the position to be punctured is right above the puncture needle. Specifically, according to the digitized coordinates of the discrete pixel points of the position to be punctured, the pushing controller 211 in the X direction and the Y direction is adjusted to move the sample to be punctured on the object carrier 23 until the coordinates of the position to be punctured are (X) 0 ,y 0 ) And the coordinates of the puncture point 41 are (x) 1 ,y 1 ) And the superposition is carried out, and at the moment, the position to be punctured of the sample to be punctured is positioned right above the puncture needle 33.
By adopting the mode, when the sample to be punctured is moved, the coordinate (x) of the position to be punctured can be calculated 0 ,y 0 ) And the coordinates of the puncture point 41 are (x) 1 ,y 1 ) The coordinate (x) of the position to be punctured is finally pushed by adjusting the displacement of the pushing controller 211 0 ,y 0 ) Moves directly above the puncture site 41.
And S115, clamping the sealing component, and adjusting the puncture needle to penetrate through the puncture point to the position to be punctured.
When the position to be punctured is right above the puncturing point 41, the circumferential direction of the sample to be punctured is clamped by the moving module 21, and at the moment, the clamping assembly 10 is adjusted to enable the clamping member 11 to press the sealing element along the direction perpendicular to the loading platform 20, so that the sample to be punctured is clamped in the three-dimensional direction. The puncture needle 33 is located at the bottom of the object carrying platform 20, at the moment, the sealing component is clamped by the object carrying platform 20 in the circumferential direction, the top of the sealing component is tightly pressed by the clamping component 10, the puncture needle 33 is arranged at the bottom of the sealing component, and the puncture needle 33 is adjusted to penetrate through the puncture point 41 and penetrate into a position to be punctured, so that the internal atmosphere of a sample to be punctured is released, and the detection of the sample to be punctured is facilitated.
The application provides an internal atmosphere content testing method, can not obtain sealed components and parts integrated circuit inner structure to having internal atmosphere content analysis appearance, easily cause the problem that puncture position mistake arouses atmosphere measuring error, through portable accurate positioning's internal atmosphere content analysis appearance, and utilize internal atmosphere content analysis appearance host computer to carry out the frame extraction to the sealed components and parts inner structure of treating the puncture that obtains by X-ray scanner, pixel coordinate location, make treat puncture position and puncture point coincidence on the sealed components and parts of treating the puncture, finally cooperate the pjncture needle to realize the accurate positioning puncture. The internal atmosphere content testing method provided by the application can realize accurate puncture especially for a micro component to be punctured, improves the internal atmosphere detection effect, and simultaneously avoids the damage to the structure of the component to be punctured in the puncturing process.
All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (12)
1. The utility model provides a location puncture anchor clamps for puncture sealing element spare, its characterized in that includes:
the object carrying clamping assembly is arranged on the object carrying clamping assembly and comprises a moving module and a clamping piece, the moving module pushes the sealing component along the plane direction of the sealing component so that the position to be punctured on the sealing component moves to a puncture point, the moving module circumferentially clamps the sealing component, the clamping piece is arranged on one side of the sealing component along the direction perpendicular to the plane direction, and the clamping piece moves close to the sealing component to clamp the sealing component;
the puncture assembly is arranged on one side, away from the clamping piece, of the sealing component, the puncture assembly comprises a puncture needle, and the puncture needle penetrates into the sealing component through the puncture point.
2. The localization puncture clamp of claim 1, further comprising a sealing plate disposed between the object holding assembly and the puncture assembly, the sealing plate having the puncture point disposed thereon, the object holding assembly and the sealing plate forming a sealed cavity.
3. The localization puncture clamp of claim 1, wherein the carrier holding assembly further comprises a carrier frame, the moving module is disposed on the carrier frame, the moving module comprises a stopper and an urging device which are oppositely disposed, the urging device is close to or far away from the stopper along the plane direction, and the sealing element is held between the stopper and the urging device.
4. The positioning puncture clamp of claim 3, wherein the advancing means comprises an adjusting nut and a push rod, the adjusting nut being used to control the push rod to approach or depart from the stopper.
5. The positioning puncture clamp of claim 3, wherein the stopper comprises a stopper plate and a stopper elastic body, the stopper elastic body is connected with the stopper plate and the carrier, and the sealing element is clamped between the propelling device and the stopper plate.
6. The positioning and piercing fixture of claim 3, wherein the carrier has a positioning point, the positioning point being a base point for determining a distance traveled by the pusher.
7. The localization puncture clamp of claim 3, wherein the carrier holding assembly further comprises an upper cover plate coupled to the carrier frame, the clamping member moving through the upper cover plate adjacent to the sealing element.
8. The positioning and puncturing clamp according to claim 1, wherein the puncturing assembly further comprises a lower cover plate and an adjusting rod, one end of the adjusting rod is connected with the puncturing needle, the other end of the adjusting rod penetrates through the lower cover plate, and the adjusting rod is used for controlling the puncturing needle to penetrate into the sealing component.
9. The localization puncture clamp of claim 2, further comprising a connecting rod, the connecting rod sequentially connecting the object holding assembly, the sealing plate and the puncture assembly, the connecting rod being used to adjust the distance between the object holding assembly, the sealing plate and the puncture assembly.
10. An internal atmosphere content analyzer comprising the positioning and puncturing fixture as claimed in any one of claims 1 to 9, further comprising an X-ray scanner for determining a position to be punctured of the sealed component.
11. A method for measuring an internal atmosphere content, comprising the internal atmosphere content analyzer of claim 10, characterized by comprising the steps of:
placing the sealing element in a carrier of the positioning puncture clamp;
scanning the sealing component by using an X-ray scanner, and calibrating the coordinate of the position to be punctured on the sealing component;
scanning the positioning puncture clamp by using an X-ray scanner, and calibrating the coordinates of a puncture point on the positioning puncture clamp;
pushing the sealing element to move so that the coordinate of the position to be punctured is superposed with the coordinate of the puncture point;
and clamping the sealing component, and adjusting a puncture needle to penetrate through the puncture point to the position to be punctured.
12. The method according to claim 11, wherein the positioning and piercing fixture comprises a loading clamping assembly and a piercing assembly, the loading clamping assembly comprises the loading frame, a moving module and a clamping member, the moving module and the clamping member are connected with the loading frame, the moving module pushes the sealing component to move and circumferentially clamp the sealing component, the clamping member moves along the upper side of the sealing component to clamp the sealing component, and the piercing assembly comprises the piercing needle, and the piercing needle is arranged on a side of the sealing component far away from the clamping member.
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| CN114323818A (en) * | 2021-11-17 | 2022-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for sampling internal atmosphere of ceramic airtight component and application |
| CN114324546A (en) * | 2021-12-18 | 2022-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for detecting internal atmosphere of vacuum packaging device, airtight container and detection equipment |
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| US4445390A (en) * | 1982-12-02 | 1984-05-01 | Leco Corporation | Sampling tube and apparatus |
| DE19809460C1 (en) * | 1998-03-06 | 1999-09-30 | Siemens Ag | Medical target device for breathing-compensated punction |
| US7470140B1 (en) * | 2007-06-18 | 2008-12-30 | David Eldridge | Integrated chip clamp adjustment assembly and method |
| US7626405B2 (en) * | 2007-06-18 | 2009-12-01 | David Eldridge | Suspension system and adjustment mechanism for an integrated chip and method |
| CN201262602Y (en) * | 2008-09-12 | 2009-06-24 | 北京圣涛平试验工程技术研究院有限责任公司 | Apparatus for sampling mass spectrometer gas |
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