CN112746249A - Multi-arc ion plating arc striking device - Google Patents
Multi-arc ion plating arc striking device Download PDFInfo
- Publication number
- CN112746249A CN112746249A CN202011564072.0A CN202011564072A CN112746249A CN 112746249 A CN112746249 A CN 112746249A CN 202011564072 A CN202011564072 A CN 202011564072A CN 112746249 A CN112746249 A CN 112746249A
- Authority
- CN
- China
- Prior art keywords
- arc
- ion plating
- needle
- cathode
- arc ignition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a multi-arc ion plating arc striking device, which comprises a driving assembly and one or more arc striking units, wherein each arc striking unit comprises an arc striking needle, a cathode target material and a target material power supply; the cathode target is connected with a target power supply; the needle point of the arc ignition needle faces the cathode target material; the driving assembly is used for driving the needle point of the arc ignition needle to contact or be far away from the cathode target material. The multi-arc ion plating arc striking device can use a plurality of arc striking needles, thereby effectively improving the film plating efficiency, and when the plurality of arc striking needles are used, the plurality of arc striking needles share one driving component, thereby saving the space and the cost.
Description
Technical Field
The application relates to a multi-arc ion plating arc striking device, belonging to the technical field of vacuum coating.
Background
Vacuum coating technology mainly comprises magnetron sputtering, evaporation and arc ion plating, compared with other physical vapor deposition technologies, the arc ion plating has the advantages of high density, good adhesive force, high deposition rate, good diffraction and the like, is more and more concerned by people, and has been widely applied to multiple industries such as metallurgy, machining, high-temperature protection, decorative materials, corrosion-resistant materials and the like.
The multi-arc ion plating working area is mainly composed of a cathode target material, an arc striking device and the like. The traditional arc striking devices correspond to the cathode targets one by one, namely, each cathode target corresponds to one arc striking device, and each arc striking device is provided with two air paths for air inlet and air outlet, so that a large amount of space is occupied.
In order to improve the film coating efficiency, the existing vacuum cavity is provided with a plurality of arc sources, but the arc source flange used by each arc source occupies a larger space, and a plurality of arc striking devices and gas circuits are also needed, so that the space is more compact, and the cost of the plurality of arc striking devices is relatively higher.
Disclosure of Invention
The application aims to provide a multi-arc ion plating arc striking device to solve the technical problems of large occupied space and high cost of the existing device.
The embodiment of the invention provides a multi-arc ion plating arc striking device, which comprises a driving assembly and one or more arc striking units, wherein each arc striking unit comprises an arc striking needle, a cathode target material and a target material power supply;
the cathode target is connected with the target power supply;
the needle point of the arc ignition needle faces the cathode target material;
the driving assembly is used for driving the needle point of the arc ignition needle to contact with or be far away from the corresponding cathode target.
Preferably, the driving assembly comprises a cylinder, a sliding push rod and a fixed seat;
one end of the sliding push rod is provided with the arc ignition needle, and the other end of the sliding push rod is connected with the air cylinder;
the cylinder is arranged on the fixed seat and used for driving the needle point of the arc ignition needle on the sliding push rod to contact with or be far away from the cathode target material.
Preferably, the arc source device further comprises a cavity flange and an arc source flange;
the fixed seat is arranged on the cavity flange;
the sliding push rod penetrates through the cavity flange;
the cathode target is arranged on the arc source flange, and the arc source flange is fixed on the cavity flange.
Preferably, when a plurality of cathode targets are arranged, the plurality of cathode targets are arranged on the cavity flange in a circular or rectangular shape.
Preferably, the sliding push rod is detachably connected with the arc ignition needle.
Preferably, the cylinder includes an air inlet and an air outlet.
Compared with the prior art, the multi-arc ion plating arc striking device has the following beneficial effects:
the multi-arc ion plating arc striking device can use a plurality of arc striking needles, thereby effectively improving the film plating efficiency, and when the plurality of arc striking needles are used, the plurality of arc striking needles share one driving component, thereby saving the space and the cost.
The method for fixing the cathode target is simple and convenient to operate.
For production convenience, the cathode targets are arranged on the cavity flange in a circular or rectangular mode.
The arc striking needle is detachably connected with the driving assembly, the arc striking needle can be detached or installed according to the use requirement, the use mode is flexible, and the applicability is strong.
Drawings
FIG. 1 is a schematic structural diagram of an arc striking device for multi-arc ion plating according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a combination of a cavity flange, a cathode target and an arc striking pin according to an embodiment of the present invention;
FIG. 3 is a front view of the multi-arc ion plating arc-striking device of the present invention with a sliding push rod assembled with a plurality of arc-striking needles;
fig. 4 is a top view of fig. 3.
List of parts and reference numerals:
1. a cathode target material; 21. an arc striking needle; 22. a sliding push rod; 23. a cylinder; 24. a fixed seat; 25. an air inlet; 26. an air outlet; 3. an arc source flange; 4. a cavity flange.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.
In addition, it should be noted that the terms of orientation such as left, right, up and down in the embodiments of the present invention are only relative concepts or reference to the normal use state of the product, and should not be considered as limiting.
The embodiment of the invention provides a multi-arc ion plating arc striking device, and the specific structure of the device is shown in fig. 1 to 4. The multi-arc ion plating arc ignition device provided by the embodiment of the invention comprises a driving assembly and one or more arc ignition units, wherein each arc ignition unit comprises an arc ignition needle 21, a cathode target 1 and a target power supply (not shown in the figure); wherein, the cathode target 1 is connected with a target power supply; the tip of the arc ignition needle 21 faces the cathode target 1; the driving assembly is used for driving the needle points of the arc ignition needles 21 to contact with or be far away from the corresponding cathode target 1.
When in use, the vacuum cavity in the multi-arc ion plating arc striking device is vacuumized (5 x 10)-3To 1 x 10-4Pa), a target power supply of the cathode target 1 is connected, the arc ignition needle 21 is instantly contacted with the cathode target 1 under the driving of the driving component, the current density is rapidly increased, the electric arc is ignited, the electric arc moves on the surface of the cathode target 1 under the action of a magnetic field, evaporated particles of the cathode target 1 collide with gas ions introduced into the vacuum cavity, and ionized positive ions are deposited on a workpiece to form a film, so that the film coating operation is completed.
When the multi-arc ion plating arc ignition device comprises a plurality of arc ignition units, but only one cathode target 1 needs to work, the target power supply corresponding to the cathode target 1 is switched on, the arc ignition needle 21 is in contact with the cathode target 1 to ignite an arc, and the cathode target 1 begins to evaporate to obtain cathode target 1 particles. By analogy, when N (N is more than or equal to 1) cathode targets 1 are required to work, the target power supplies corresponding to the N cathode targets 1 are switched on, the N cathode targets 1 work under the action of electric arcs, and other cathode targets 1 which are not switched on are not influenced by the contact of the arc leading needle 21. Of course, the number of cathode targets 1 in operation may also be controlled by reducing the number of arc ignition needles 21.
The driving assembly in the embodiment of the present application includes a cylinder 23, a sliding push rod 22, and a fixing seat 24; wherein, the one end of slip push rod 22 sets up the arc ignition needle 21, and the other end is connected with cylinder 23, and the cylinder is installed on fixing base 24, and the cylinder 23 of this application includes air inlet 25 and gas outlet 26, and this cylinder 23 is used for driving the needle point contact of the arc ignition needle 21 on the slip push rod 22 or keeps away from corresponding cathode target 1. The driving assembly using the combination of the cylinder 23 and the sliding push rod 22 has a simple structure, low cost and is easier to operate.
The embodiment of the application also comprises an arc source flange 3 and a cavity flange 4, and the fixed seat 24 is arranged on the cavity flange 4; the sliding push rod 22 passes through the cavity flange 4; the cathode target 1 is arranged on an arc source flange 3, and the arc source flange 3 is fixed on a cavity flange 4. One side of the cavity flange 4 far away from the arc source flange 3 is a vacuum cavity side.
In this embodiment, the plurality of cathode targets 1 may be randomly distributed on the cavity flange 4, for example, may be circularly arranged, rectangularly arranged, elliptically arranged, arrayed, and the like, and preferably are circularly arranged, because circular arrangement and rectangular arrangement are adopted, production and preparation are facilitated, and further preferably are circularly arranged.
Further, for making the multi-arc ion plating arc ignition device of this application use mode more nimble, increase its suitability, the sliding push rod is still injectd to this embodiment and can be dismantled with arc ignition needle 21 and be connected, and the connected mode can be threaded connection or buckle connection.
The present application will be described in more detail with reference to the following examples.
Example 1
Pumping the vacuum chamber to 5 x 10-3Pa, introducing argon gas into the vacuum cavity, connecting target power supplies corresponding to all 6 cathode targets 1 respectively, starting the operation of the cylinder 23, driving the sliding push rod 22 and the 6 arc ignition needles 21 to move towards the corresponding 6 cathode targets 1, and rapidly increasing the current density and igniting the arc at the moment of contact with the cathode targets 1. Under the action of the magnetic field, the electric arc rapidly moves on the surfaces of the 6 cathode targets 1 to form a small molten pool, evaporated particles of the 6 cathode targets 1 collide with argon ions, and ionized positive ions are deposited on a workpiece to form a film, so that the film coating operation of the workpiece is completed.
Example 2
The number of the cathode targets 1 of the present embodiment is 6, and in the coating process, the vacuum chamber is pumped to 5 x 10-3Pa, introducing argon gas into the vacuum cavity, only connecting target power supplies corresponding to 4 cathode targets 1, starting the operation of the cylinder 23, driving the sliding push rod 22 and the 6 arc-leading needles 21 to move towards the 6 cathode targets 1, wherein at the moment that the 4 arc-leading needles 21 are contacted with the electrified cathode targets 1, the current density is rapidly increased, and an electric arc is ignited, and when the other 2 arc-leading needles 21 are contacted with the non-electrified cathode targets 1, no electric arc is generated. Electric arcs generated by the 4 arc ignition needles 21 rapidly move on the surface of the corresponding cathode target 1 under the action of a magnetic field to form a small molten pool, evaporated particles of the cathode target 1 collide with argon ions, and ionized positive ions are deposited on a workpiece to form a film, so that the film coating operation of the workpiece is completed.
Example 3
The number of the cathode target 1 and the corresponding arc ignition pins 21 in this embodiment is 6, and 4 of the arc ignition pins 21 are removed before film coating. In the coating process, the vacuum cavity is pumped to 1 x 10-4Pa, introducing argon gas into the vacuum cavity, switching on a target power supply corresponding to the 6 cathode target materials 1, starting the operation of the cylinder 23, driving the sliding push rod 22 and the 2 arc leading needles 21 to move towards the 6 cathode target materials 1, wherein at the moment that the 2 arc leading needles 21 are contacted with the corresponding electrified cathode target materials 1, the current density is rapidly increased, igniting the electric arc, rapidly moving the electric arc on the surface of the corresponding cathode target materials 1 under the action of the magnetic field to form a small molten pool, and remaining 4 cathode target materials1, without the corresponding ignition pin 21, there is no arc that can wander off on its surface, and no molten pool can be formed. The evaporated particles of the 2 cathode targets 1 collide with argon ions, and ionized positive ions are deposited on a workpiece to form a film, so that the film coating operation of the workpiece is completed.
The multi-arc ion plating arc striking device can use a plurality of arc striking needles, thereby effectively improving the film plating efficiency, and when the plurality of arc striking needles are used, the plurality of arc striking needles share one driving component, thereby saving the space and the cost.
Although the present application has been described with reference to a few embodiments, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the application as defined by the appended claims.
Claims (6)
1. The multi-arc ion plating arc ignition device is characterized by comprising a driving assembly and one or more arc ignition units, wherein each arc ignition unit comprises an arc ignition needle, a cathode target material and a target material power supply;
the cathode target is connected with the target power supply;
the needle point of the arc ignition needle faces the cathode target material;
the driving assembly is used for driving the needle point of the arc ignition needle to contact with or be far away from the cathode target material.
2. The multi-arc ion plating arc ignition device according to claim 1, wherein the driving assembly comprises a cylinder, a sliding push rod and a fixed seat;
one end of the sliding push rod is provided with the arc ignition needle, and the other end of the sliding push rod is connected with the air cylinder;
the cylinder is arranged on the fixed seat and used for driving the needle point of the arc ignition needle on the sliding push rod to contact with or be far away from the cathode target material.
3. The multi-arc ion plating arc ignition device of claim 2, further comprising a cavity flange and an arc source flange;
the fixed seat is arranged on the cavity flange;
the sliding push rod penetrates through the cavity flange;
the cathode target is arranged on the arc source flange, and the arc source flange is fixed on the cavity flange.
4. The multi-arc ion plating arc ignition device according to claim 3, wherein when there are a plurality of cathode targets, the plurality of cathode targets are arranged on the cavity flange in a circular or rectangular shape.
5. The multi-arc ion plating arc ignition device according to any one of claims 2 to 4, wherein the sliding push rod is detachably connected with the arc ignition needle.
6. The multi-arc ion plating arc ignition device of claim 2, wherein the gas cylinder comprises a gas inlet and a gas outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011564072.0A CN112746249B (en) | 2020-12-25 | 2020-12-25 | Multi-arc ion plating arc striking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011564072.0A CN112746249B (en) | 2020-12-25 | 2020-12-25 | Multi-arc ion plating arc striking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112746249A true CN112746249A (en) | 2021-05-04 |
| CN112746249B CN112746249B (en) | 2022-12-23 |
Family
ID=75646058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011564072.0A Active CN112746249B (en) | 2020-12-25 | 2020-12-25 | Multi-arc ion plating arc striking device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112746249B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008105106A (en) * | 2006-10-23 | 2008-05-08 | Mitsubishi Materials Corp | Surface coated cutting tool with hard coated layer showing excellent wear resistance in high speed cutting |
| US20100213054A1 (en) * | 2009-02-24 | 2010-08-26 | Industrial Technology Research Institute | Vacuum coating apparatus with mutiple anodes and film coating method using the same |
| CN203411602U (en) * | 2013-05-30 | 2014-01-29 | 刘玮 | Bell jar-shaped device for coating cylindrical inner walls |
| CN111705298A (en) * | 2020-05-15 | 2020-09-25 | 温州职业技术学院 | Ion plating rotation straight line combined type arc striking device and ion plating device |
-
2020
- 2020-12-25 CN CN202011564072.0A patent/CN112746249B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008105106A (en) * | 2006-10-23 | 2008-05-08 | Mitsubishi Materials Corp | Surface coated cutting tool with hard coated layer showing excellent wear resistance in high speed cutting |
| US20100213054A1 (en) * | 2009-02-24 | 2010-08-26 | Industrial Technology Research Institute | Vacuum coating apparatus with mutiple anodes and film coating method using the same |
| CN203411602U (en) * | 2013-05-30 | 2014-01-29 | 刘玮 | Bell jar-shaped device for coating cylindrical inner walls |
| CN111705298A (en) * | 2020-05-15 | 2020-09-25 | 温州职业技术学院 | Ion plating rotation straight line combined type arc striking device and ion plating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112746249B (en) | 2022-12-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2461664C2 (en) | Method for deposition of electric insulating layers | |
| EP2788522B1 (en) | Filtered cathodic arc deposition apparatus and method | |
| US6224726B1 (en) | Cathodic arc coating apparatus | |
| CN111172504B (en) | Magnetron sputtering cathode | |
| CN103114276B (en) | Device for rapidly depositing diamond-like carbon film | |
| CN110205589A (en) | Pulse carbon ion excitation source device | |
| CN112746249B (en) | Multi-arc ion plating arc striking device | |
| KR20120101468A (en) | Pvd method and apparatus | |
| CN204874720U (en) | Electric arc evaporation source | |
| CN108286038A (en) | Cold cathode arc plasma source and non-contact striking method | |
| KR20020005449A (en) | Vacuum arc evaporation source and film formation apparatus using the same | |
| RU2516011C1 (en) | Eroding pulse plasma accelerator | |
| US10083822B2 (en) | Physical vapour deposition coating device as well as a physical vapour deposition method | |
| CN110846625B (en) | Rectangular high vacuum cathode arc target device | |
| CN202201957U (en) | Less-droplet electric arc target and plasma coating system with less-droplet droplet electric arc target | |
| CN110144560B (en) | Composite surface modification method and device combining pulse magnetron sputtering and ion implantation | |
| CN103178349A (en) | Microstructure processing method | |
| CN114318249B (en) | Non-drop plasma coating arc source structure, coating system and coating method | |
| CN100463099C (en) | Ion source | |
| CN114411099B (en) | Vacuum coating system and coating method | |
| CN217628583U (en) | Automatic mutual negative and positive arc source cleaning device and coating machine | |
| CN100500930C (en) | Non-grid ion plating aid | |
| RU2390580C1 (en) | Small-size magnetron atomiser | |
| CN101192497A (en) | Ion source | |
| CN202226910U (en) | Composite structure target material for electric arc ion plating depositing magnetic material coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |