CN112729566A - Detector imaging device - Google Patents
Detector imaging device Download PDFInfo
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- CN112729566A CN112729566A CN202011479361.0A CN202011479361A CN112729566A CN 112729566 A CN112729566 A CN 112729566A CN 202011479361 A CN202011479361 A CN 202011479361A CN 112729566 A CN112729566 A CN 112729566A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 41
- 238000013507 mapping Methods 0.000 claims abstract description 21
- 230000003416 augmentation Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 238000009795 derivation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003331 infrared imaging Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/025—Interfacing a pyrometer to an external device or network; User interface
Abstract
The invention discloses a detector imaging device, comprising: the physical pixel array is formed by a plurality of physical pixel units, each physical pixel unit comprises a circuit area and a photosensitive area, and the photosensitive areas of the physical pixel units in odd rows or columns and even rows or columns in the physical pixel array are staggered by a preset distance smaller than the size of the photosensitive areas along the direction of the rows or columns to form staggered arrangement of the odd rows or columns and the even rows or columns; and the pixel expansion processing unit is used for mapping the physical pixel array onto the virtual pixel array according to a pixel expansion algorithm and outputting the pixel value of each virtual pixel unit in the virtual pixel array. The detector imaging device provided by the embodiment of the invention realizes the expansion of the size of the physical pixel array by utilizing the staggered arrangement of the physical pixel array structure in the row or column direction and utilizing the pixel expansion algorithm, thereby realizing the great improvement of the imaging resolution performance by combining the algorithm expansion technology under the condition of unchanging the size of the physical array.
Description
Technical Field
The invention relates to the field of photoelectric detection, in particular to a detector imaging device.
Background
In the imaging sensor of the detector in the prior art, a plurality of pixel units are used to form a pixel array, and the pixel units in the pixel array are the same in size and are uniformly distributed in the pixel array. The drive control of the whole pixel array is realized through the pixel control circuit, and the imaging of the detector is realized by combining an optical system.
In the imaging sensor of the detector in the prior art, the size of the physical pixel unit determines the size of the pixel array and further determines the imaging resolution of the detector, so that the improvement of the imaging resolution of the imaging sensor is limited.
Disclosure of Invention
The present invention is directed to overcome the above-mentioned drawbacks of the prior art, and provides a rotating device for a rotating platform of a lithography machine.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a detector imaging apparatus, comprising:
the physical pixel array is formed by a plurality of physical pixel units, each physical pixel unit comprises a circuit area and a photosensitive area, and the photosensitive areas of the physical pixel units in odd rows or columns and even rows or columns in the physical pixel array are staggered by a preset distance smaller than the size of the photosensitive areas along the direction of the rows or columns to form staggered arrangement of the odd rows or columns and the even rows or columns;
and the pixel expansion processing unit is used for mapping the physical pixel array onto the virtual pixel array according to a pixel expansion algorithm and outputting the pixel value of each virtual pixel unit in the virtual pixel array, wherein the size of the photosensitive area of the virtual pixel unit in the virtual pixel array is smaller than that of the photosensitive area of the physical pixel unit, and the pixel expansion algorithm is determined according to the staggered preset distance.
Further, the preset distance is one half of the size of the photosensitive area in the staggering direction.
Furthermore, the circuit regions and the photosensitive regions of the physical pixel units are located on the same plane, the size of the circuit regions in odd rows or columns is the same as that of the circuit regions in even rows or columns, the size of the photosensitive regions in odd rows or columns is the same as that of the photosensitive regions in even rows or columns, and the arrangement sequence of the photosensitive regions in odd rows or columns is opposite to that of the photosensitive regions and the circuit regions in even rows or columns.
Further, the circuit area and the photosensitive area are the same in size.
Further, the circuit area of the physical pixel unit is located below the photosensitive area.
Further, the pixel augmentation algorithm comprises:
the physical pixel array comprises Y columns and X rows of physical pixel units, a virtual pixel array with Y-1 columns and 2X rows is formed after the physical pixel array is expanded by the pixel expansion algorithm, a first column and a second column of the physical pixel array are mapped into a first column in the virtual array, a second column and a third column of the physical pixel array are mapped into a second column in the virtual array, and so on,
for the mapping relation between the pixel values of the physical pixel units in two adjacent columns in the physical pixel array and the pixel values of the virtual pixel units in the corresponding column in the virtual pixel array, the mapping relation is as follows:
S0＝C0
S2n+1＝2Cn-S2n
S2n+2＝2Bn-S2n+1
S2n+3＝2Cn+1-S2n+2
S2n+4＝2Bn+1-S2n+3
and so on until n ═ X,
b and C are pixel values of physical pixel units of two adjacent columns of the physical pixel array, and S is a pixel value of a virtual pixel unit of a corresponding column in the virtual pixel array obtained by mapping B and C in the virtual pixel array.
Further, the pixel augmentation algorithm comprises:
the physical pixel array comprises physical pixel units in Y rows and X columns, a virtual pixel array in Y-1 rows and 2X columns is formed after the physical pixel units are expanded by the pixel expansion algorithm, the first row and the second row of the physical pixel array are mapped into the first row in the virtual array, the second row and the third row of the physical pixel array are mapped into the second row in the virtual array, and so on,
for the mapping relationship between the pixel values of the physical pixel units in two adjacent rows in the physical pixel array and the pixel values of the virtual pixel units in the corresponding row in the virtual pixel array, the mapping relationship is as follows:
S0＝C0
S2n+1＝2Cn-S2n
S2n+2＝2Bn-S2n+1
S2n+3＝2Cn+1-S2n+2
S2n+4＝2Bn+1-S2n+3
and so on until n ═ X,
b and C are pixel values of physical pixel units of two adjacent rows of the physical pixel array, and S is a pixel value of a virtual pixel unit of a corresponding row in the virtual pixel array obtained by mapping B and C in the virtual pixel array.
Further, the detector imaging apparatus further includes:
and the mode switching unit is used for switching between a pixel expansion mode and an original mode according to a switching instruction, wherein in the pixel expansion mode, the pixel value of each virtual pixel unit in the virtual pixel array is used as the imaging result of the detector to be output, and in the original mode, the pixel value of each physical pixel unit in the physical pixel array is used as the imaging result of the detector to be output.
The detector imaging device provided by the embodiment of the invention realizes the expansion of the size of the physical pixel array by utilizing the staggered arrangement of the physical pixel array structure in the row or column direction and utilizing the pixel expansion algorithm, thereby realizing the great improvement of the imaging resolution performance by combining the algorithm expansion technology under the condition of unchanging the size of the physical array.
Drawings
Fig. 1 is a schematic structural diagram of a detector imaging device according to a preferred embodiment of the present invention.
Fig. 2 is a schematic plan view of a circuit region and a photosensitive region of a physical pixel unit according to a preferred embodiment of the invention.
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
In the following detailed description of the embodiments of the present invention, in order to clearly illustrate the structure of the present invention and to facilitate explanation, the structure shown in the drawings is not drawn to a general scale and is partially enlarged, deformed and simplified, so that the present invention should not be construed as limited thereto.
In the following embodiments of the present invention, a detector imaging device is provided, which can be applied to an infrared imaging detector, and the size limitation of a physical pixel unit is broken through by the staggered arrangement of the pixel units and a pixel expansion algorithm, so as to further improve the imaging resolution of the detector.
Fig. 1 is a schematic structural diagram of a detector imaging apparatus according to a preferred embodiment of the present invention, the detector imaging apparatus includes: the physical pixel array is formed by a plurality of physical pixel units, each physical pixel unit comprises a circuit area and a photosensitive area, only the arrangement schematic diagram of the photosensitive areas is shown in fig. 1, wherein the photosensitive areas are used for receiving optical signals and outputting electric signals through the photoelectric effect of a semiconductor, and the circuit areas are used for driving and controlling the physical pixel units. The size and number of photosensitive areas determines the resolution of the physical pixel array.
In the invention, the photosensitive areas of the physical pixel units of the odd rows or columns and the even rows or columns in the physical pixel array are staggered by a preset distance smaller than the size of the photosensitive areas along the direction of the rows or columns to form an array structure of staggered arrangement of the odd rows or columns and the even rows or columns. Based on the array structure in staggered arrangement, the resolution of the imaging of the detector can be improved by combining with a pixel expansion algorithm.
Further, the detector imaging device further includes a pixel expansion processing unit, configured to map the physical pixel array onto a virtual pixel array according to a pixel expansion algorithm, and output a pixel value of each virtual pixel unit in the virtual pixel array, where a size of a photosensitive area of a virtual pixel unit in the virtual pixel array is smaller than a size of a photosensitive area of the physical pixel unit, and the pixel expansion algorithm is determined according to the staggered preset distance.
The pixel expansion processing unit may be a chip connected to each pixel unit, and converts the pixel value of the physical pixel unit into the pixel value of the corresponding virtual pixel unit through a program code or a hardware logic operation circuit embedded in the chip.
Preferably, the photosensitive regions are staggered along the row or column direction by a preset distance smaller than the size of the photosensitive region, and may be one half of the size of the photosensitive region in the staggered direction. As shown in fig. 1, the photosensitive areas of the physical pixel units are vertically offset by half the photosensitive area height along the column direction (vertical direction in the figure). Similarly, the photosensitive regions may be shifted left and right by half the photosensitive region width along the row direction (not shown).
With a shift of one-half the height of the photosensitive area in the column direction, the pixel expansion algorithm is as follows:
assuming that the physical pixel array includes Y columns and X rows of physical pixel units, after the physical pixel array is extended by the pixel extension algorithm, a Y-1 column and 2X rows of virtual pixel array are formed, the first column and the second column of the physical pixel array are mapped to be the first column in the virtual array, the second column and the third column of the physical pixel array are mapped to be the second column in the virtual array, and so on. As in the example shown in fig. 1, 3 columns and 5 rows of physical pixel cells A, B, C are pixel extended to form 2 columns and 10 rows of virtual pixel cells SS and S. In practical applications, the number of pixel units in the physical pixel array may be thousands or tens of thousands, but the mapping relationship between the adjacent rows or columns and the corresponding rows or columns of the virtual pixel array is the same, and the corresponding relationship between the physical pixel array and the virtual pixel array is derived by taking two columns B and C in fig. 2 as an example, and the two columns B and C may represent any adjacent columns in the physical pixel array.
Specifically, the mapping relationship between the pixel values of the physical pixel units in two adjacent columns in the physical pixel array and the pixel values of the virtual pixel units in the corresponding column in the virtual pixel array is derived as follows:
assuming that the physical pixel cell and the virtual pixel cell shown in FIG. 1 have the same output for the same light input, S is imaged for the same object0、S1、S2And CO、B0In close proximity, then C can be assumed0Imaging Effect and (S)0+S1) Is/2 the same, B0The imaging effect of (S) and1+S2) 2 are the same, so the following relationship can be obtained:
2C0＝S0+S1
2B0＝S1+S2
2C1＝S2+S3
2B1＝S3+S4
……
2Cn＝S2n+S2n+1
2Bn＝S2n+1+S2n+2
2Cn+1＝S2n+2+S2n+3
2Bn+1＝S2n+3+S2n+4formula (1)
And the analogy is repeated until n is equal to X, and n is the line number of the physical pixel unit.
The mapping relationship between the pixel value of the virtual pixel unit and the pixel value of the physical pixel unit can be obtained by transforming the equation set:
S0＝C0
S2n+1＝2Cn-S2n
S2n+2＝2Bn-S2n+1
S2n+3＝2Cn+1-S2n+2
S2n+4＝2Bn+1-S2n+3formula (2)
Wherein n is 0,1,2 … … X, the aboveB and C can represent pixel values of physical pixel units of two adjacent columns of the physical pixel array, S is the pixel value of a virtual pixel unit of a corresponding column in the virtual pixel array obtained by mapping B and C in the virtual pixel array, in the formula of the mapping relation, the pixel values of B and C are the pixel values detected by the physical pixel units and belong to known quantities, and the pixel values of all the virtual pixel units S and S can be obtained based on the pixel values of B and C0＝C0The initial value is set (or referred to as a boundary condition) to be equal to the pixel value of the corresponding physical pixel unit.
The mapping relationship and derivation process are also applicable to the case of the row direction shift, the row direction shift can be regarded as the case of rotating the pixel array in fig. 1 by 90 degrees, the meaning of each label in the above formula is replaced by row and column, and the case of the row direction shift can be applied, specifically, B and C are used as the pixel values of the physical pixel units in two adjacent rows, S is used as the pixel value of the row corresponding to B and C in the virtual pixel array, n is used as the column number of the physical pixel unit, the physical pixel units in Y row and X column are expanded, and after the pixel expansion algorithm, the virtual pixel array in Y-1 row and 2X column is formed.
Further, the circuit region and the photosensitive region in the physical pixel unit may be in the same plane, in which case the surface size of the physical pixel unit is the sum of the circuit region and the photosensitive region. In addition, the circuit area of the physical pixel cell may also be located below the photosensitive area, in which case the surface size of the physical pixel cell and the size of the photosensitive area are the same.
Referring to fig. 2, which is a schematic plan view illustrating a circuit region and a photosensitive region of a physical pixel unit according to a preferred embodiment of the present invention, the circuit region and the photosensitive region may be on the same plane, and in different rows, the sizes of the circuit regions and the sizes of the photosensitive regions are the same, and the staggered arrangement of the photosensitive regions in the column direction is implemented by reversing the arrangement order of the circuit regions and the photosensitive regions in odd rows and even rows. As shown in fig. 2, the photosensitive regions and circuit regions in the next row are arranged left and right, the photosensitive regions and circuit regions in the next row are arranged right and left, and so on, to form an alternate staggered arrangement, but the regions of each physical pixel unit are aligned, and the area of the whole physical pixel array does not change due to the staggered arrangement of the photosensitive regions. Similarly, the arrangement of the circuit regions and the photosensitive regions may also be suitable for staggered arrangement of the photosensitive regions in the row direction, and the staggered arrangement of the photosensitive regions in the row direction may be formed by clockwise rotating the physical pixel array in fig. 2 by 90 degrees, that is, the sizes of the circuit regions and the circuit regions in the odd columns and the even columns are the same, the sizes of the photosensitive regions and the photosensitive regions are the same, but the arrangement order of the circuit regions and the photosensitive regions is opposite.
Preferably, the circuit regions and the photosensitive regions in fig. 2 are the same in size, that is, in the same row, the circuit regions and the photosensitive regions each occupy half of the planar size of the physical pixel unit, and by arranging the circuit regions and the photosensitive regions in the reverse order between the odd-numbered row and the even-numbered row, a case of shifting by half the width of the photosensitive regions in the row direction is formed, and the pixel values of the physical pixel unit can be mapped onto the virtual pixel unit using the above formula (2).
According to the technical scheme of the embodiment of the invention, the physical pixel array structure is arranged in the row or column direction in a staggered manner, and the size of the physical pixel array is expanded by using the pixel expansion algorithm, so that the imaging resolution performance is greatly improved by combining the algorithm expansion technology under the condition that the size of the physical array is not changed.
Further, the detector imaging apparatus may be provided with a mode switching unit for switching between a pixel expansion mode in which a pixel value of each of the virtual pixel units in the virtual pixel array is used as an imaging result output of the detector and an original mode in which a pixel value of each of the physical pixel units in the physical pixel array is used as an imaging result output of the detector, according to a switching instruction.
The mode switching unit may be a chip connected to each pixel unit and the pixel expansion processing unit, and the pixel value of the physical pixel unit and the pixel value of the virtual pixel unit obtained through the operation of the pixel expansion processing unit are selectively output through a program code or a hardware logic operation circuit embedded in the chip. The detector can be more flexible in resolution ratio selection by arranging the mode switching unit, and the using requirements of high and low resolution ratios can be met simultaneously.
The above description is only a preferred embodiment of the present invention, and the embodiments are not intended to limit the scope of the present invention, so that all equivalent structural changes made by using the contents of the specification and the drawings of the present invention should be included in the scope of the present invention.
Claims (8)
1. A detector imaging apparatus, comprising:
the physical pixel array is formed by a plurality of physical pixel units, each physical pixel unit comprises a circuit area and a photosensitive area, and the photosensitive areas of the physical pixel units in odd rows or columns and even rows or columns in the physical pixel array are staggered by a preset distance smaller than the size of the photosensitive areas along the direction of the rows or columns to form staggered arrangement of the odd rows or columns and the even rows or columns;
and the pixel expansion processing unit is used for mapping the physical pixel array onto the virtual pixel array according to a pixel expansion algorithm and outputting the pixel value of each virtual pixel unit in the virtual pixel array, wherein the size of the photosensitive area of the virtual pixel unit in the virtual pixel array is smaller than that of the photosensitive area of the physical pixel unit, and the pixel expansion algorithm is determined according to the staggered preset distance.
2. The detector imaging apparatus of claim 1, wherein the predetermined distance is one-half a size of the photosensitive area in the staggering direction.
3. The detector imaging device of claim 2, wherein the circuit regions and the photosensitive regions of the physical pixel cells are in the same plane, the circuit regions of odd rows or columns are the same size as the circuit regions of even rows or columns, the photosensitive regions of odd rows or columns are the same size as the photosensitive regions of even rows or columns, and the photosensitive regions of odd rows or columns are arranged in an opposite order to the photosensitive regions and the circuit regions of even rows or columns.
4. The detector imaging apparatus of claim 3, wherein the circuit area and the photosensitive area are the same size.
5. The detector imaging apparatus of claim 2, wherein the circuit region of the physical pixel cell is located below the photosensitive region.
6. The detector imaging apparatus of any one of claims 2 to 5, wherein the pixel augmentation algorithm comprises:
the physical pixel array comprises Y columns and X rows of physical pixel units, a virtual pixel array with Y-1 columns and 2X rows is formed after the physical pixel array is expanded by the pixel expansion algorithm, a first column and a second column of the physical pixel array are mapped into a first column in the virtual array, a second column and a third column of the physical pixel array are mapped into a second column in the virtual array, and so on,
for the mapping relation between the pixel values of the physical pixel units in two adjacent columns in the physical pixel array and the pixel values of the virtual pixel units in the corresponding column in the virtual pixel array, the mapping relation is as follows:
S0＝C0
S2n+1＝2Cn-S2n
S2n+2＝2Bn-S2n+1
S2n+3＝2Cn+1-S2n+2
S2n+4＝2Bn+1-S2n+3
and so on until n ═ X,
b and C are pixel values of physical pixel units of two adjacent columns of the physical pixel array, and S is a pixel value of a virtual pixel unit of a corresponding column in the virtual pixel array obtained by mapping B and C in the virtual pixel array.
7. The detector imaging apparatus of any one of claims 2 to 5, wherein the pixel augmentation algorithm comprises:
the physical pixel array comprises physical pixel units in Y rows and X columns, a virtual pixel array in Y-1 rows and 2X columns is formed after the physical pixel units are expanded by the pixel expansion algorithm, the first row and the second row of the physical pixel array are mapped into the first row in the virtual array, the second row and the third row of the physical pixel array are mapped into the second row in the virtual array, and so on,
for the mapping relationship between the pixel values of the physical pixel units in two adjacent rows in the physical pixel array and the pixel values of the virtual pixel units in the corresponding row in the virtual pixel array, the mapping relationship is as follows:
S0＝C0
S2n+1＝2Cn-S2n
S2n+2＝2Bn-S2n+1
S2n+3＝2Cn+1-S2n+2
S2n+4＝2Bn+1-S2n+3
and so on until n ═ X,
b and C are pixel values of physical pixel units of two adjacent rows of the physical pixel array, and S is a pixel value of a virtual pixel unit of a corresponding row in the virtual pixel array obtained by mapping B and C in the virtual pixel array.
8. The detector imaging apparatus according to any one of claims 2 to 5, further comprising:
and the mode switching unit is used for switching between a pixel expansion mode and an original mode according to a switching instruction, wherein in the pixel expansion mode, the pixel value of each virtual pixel unit in the virtual pixel array is used as the imaging result of the detector to be output, and in the original mode, the pixel value of each physical pixel unit in the physical pixel array is used as the imaging result of the detector to be output.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2023056585A1 (en) * | 2021-10-08 | 2023-04-13 | 华为技术有限公司 | Detection system, terminal device, control detection method, and control apparatus |
| WO2024016421A1 (en) * | 2022-07-19 | 2024-01-25 | 中国科学院深圳先进技术研究院 | High temporal-spatial resolution energy spectrum ct imaging method and apparatus based on multi-layer flat panel detector |
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Application publication date: 20210430 |