CN112719329A

CN112719329A - Stacked slice chuck

Info

Publication number: CN112719329A
Application number: CN202011545918.6A
Authority: CN
Inventors: 张训; 黄炳; 沈鑫; 陈泽均
Original assignee: Ningbo Zhongda Leader Intelligent Transmission Co ltd
Current assignee: Ningbo Zhongda Leader Intelligent Transmission Co ltd
Priority date: 2020-12-23
Filing date: 2020-12-23
Publication date: 2021-04-30
Anticipated expiration: 2040-12-23
Also published as: CN112719329B

Abstract

The application relates to a stacked slice chuck, in particular to a clamp, which comprises a mounting seat as a bearing main body; the diaphragm disc is arranged on the mounting seat, and a deformation groove is formed in one side surface of the diaphragm disc and enables an outer disc ring and an inner disc ring to be formed on the diaphragm disc; the driver is arranged on the mounting seat and is used for driving the inner coil and/or the outer coil of the diaphragm disc to bend along the axial direction of the diaphragm disc; the clamping head disc is arranged on the membrane disc, a plurality of clamping blocks for clamping the workpiece are arranged on the clamping head disc, and the clamping blocks surround the clamping head disc to form a clamping opening for placing the workpiece; and the positioning disc is arranged on the driver, is positioned in the clamping port and is used for correcting the flatness of the workpiece. The clamping block driven by the bending deformation of the diaphragm plate can have extremely high motion synchronism, so that the caliber change of the clamping opening has higher roundness, and higher positioning accuracy can be maintained in the process of repeatedly clamping a workpiece.

Description

Stacked slice chuck

Technical Field

The application relates to the field of clamps, in particular to a stacked slice chuck.

Background

Clamping and positioning of a workpiece are required during machining, so that the workpiece is prevented from flying or shifting during machining, and a chuck is a main tool for fixing the workpiece on a machine tool.

The chuck may be classified into a three-jaw chuck, a four-jaw chuck, a six-jaw chuck, etc., according to the number of jaws. At present, the three-jaw chuck is most applied to machine tool equipment, and the three-jaw chuck drives a jaw to move through a spiral groove on the chuck mainly by adjusting a bevel gear so as to clamp and release a workpiece.

In view of the above-mentioned related technologies, the inventor believes that when a workpiece is machined by a secondary clamping surface and needs to be switched back to a primary clamping surface for re-machining, since a power system of a chuck is mostly in a gear transmission structure, a large gap exists between gears, and a defect that repeated clamping accuracy is poor exists.

Disclosure of Invention

In order to improve the precision of the repeated clamping of chuck, this application provides a stack formula thin slice chuck.

The application provides a stack formula thin slice chuck adopts following technical scheme:

a stacked sheet chuck includes

The mounting seat is used as a bearing main body;

the diaphragm disc is arranged on the mounting seat, and a deformation groove is formed in one side surface of the diaphragm disc and enables an outer disc ring and an inner disc ring to be formed on the diaphragm disc;

the driver is arranged on the mounting seat and is used for driving the inner coil and/or the outer coil of the diaphragm disc to bend along the axial direction of the diaphragm disc;

the clamping head disc is arranged on the membrane disc, a plurality of clamping blocks for clamping the workpiece are arranged on the clamping head disc, and the clamping blocks surround the clamping head disc to form a clamping opening for placing the workpiece;

and the positioning disc is arranged on the driver, is positioned in the clamping port and is used for correcting the flatness of the workpiece.

Through adopting above-mentioned technical scheme, the mount pad is as bearing the weight of the main part for be connected with equipment such as lathe, diaphragm dish and driver are as driving system, when needs carry out the clamping to the work piece, because chuck dish is installed on diaphragm dish, and the clamp splice of chuck dish has thickness, therefore when the driver pulling diaphragm dish inner coil or outer coil produce the bending to one side, the clamp splice can produce the slope, can produce the motion that is close to each other or keeps away from between the clamp splice promptly, and then realize pressing from both sides tight or relax to the work piece. In the process, the driver bends the diaphragm disc through the inner disc ring or the outer disc ring, and the inner disc ring or the outer disc ring is of a uniform annular structure, so that the bending process of the diaphragm disc is very uniform, namely the motion among the clamping blocks can have extremely high synchronism, and the motion amount among the clamping blocks can also keep extremely high consistency, so that the repeated clamping of the clamping blocks on the workpiece can keep extremely high precision.

Preferably, the driver comprises

The centering shaft is fixed on the mounting seat and comprises a centering seat connected with the mounting seat and a centering column integrally arranged on the centering seat;

the driving cylinder is sleeved on the centering column and positioned between the centering seat and the diaphragm disc, the centering seat and the driving cylinder are sequentially connected with each other, the driving cylinder and the outer disc ring of the diaphragm disc are sequentially connected with each other, and air chambers are respectively formed between the adjacent two air chambers;

the piston disc is arranged in the air chamber and comprises a piston part and a connecting part, the connecting part is arranged on the centering column in a sealing manner, and the piston part is positioned in the air chamber and divides the air chamber into an air inlet cavity and an air outlet cavity;

the positioning disc is fixed on a centering column of the centering shaft, a driving port is formed between the driving cylinder and the centering column, the connecting part of the piston disc penetrates through the driving port in a sealing mode, and the connecting part is connected with an inner disc ring of the diaphragm disc.

Through adopting above-mentioned technical scheme, the centering shaft mainly has two effects, forms the air chamber of driving about the piston disc motion with the driving cylinder combination on the one hand, and on the other hand is as the connection media between diaphragm dish and the mount pad, and the piston dish then is used for driving the diaphragm dish and produces the bending, and then makes the clamp splice can move in opposite directions or back of the body mutually to the realization is to the centre gripping of work piece or is relaxed.

Preferably, be provided with the main intake duct of mutual intercommunication in centering seat and the centering post, be provided with the confined air gap between centering post and the piston dish, the main intake duct with the air gap is linked together, be provided with the branch way that admits air on the connecting portion of piston dish, the branch way intercommunication that admits air the air inlet chamber of air gap and air chamber.

Through adopting above-mentioned technical scheme, when filling gas in toward main intake duct, in gaseous earlier got into the air gap through main intake duct, the rethread branch says that the air inlet chamber that gets into the air chamber that admits air, promotes the piston dish towards the one side motion of keeping away from the diaphragm dish, and the piston dish can stimulate the inner plate circle of diaphragm dish at the in-process of motion, makes the diaphragm dish produce the bending to the slope of drive clamp splice inside positioning disk, thereby realizes the purpose of centre gripping work piece.

Preferably, the actuating cylinder and the piston disc cooperate in pairs and are provided with two sets at least, link to each other in proper order between the actuating cylinder and form the air chamber respectively, the antithetical couplet intake duct has been seted up on the actuating cylinder, the both ends of antithetical couplet intake duct communicate respectively in the inlet chamber of two adjacent air chambers. .

Through adopting above-mentioned technical scheme, set up multiunit actuating cylinder and piston disc and can strengthen the pulling force to the inner coil, make the diaphragm dish can produce bigger bending, and then make the clamp splice can press from both sides the work piece tighter, and the intake duct that allies oneself with can communicate the chamber of admitting air of each air chamber, make just can be all air chamber air supplies through a pipeline, can improve the orderliness of chuck installation on the one hand, in order to facilitate the maintenance, on the other hand can improve the motion synchronism between each piston disc, and then make the piston disc can stimulate the inner coil better.

Preferably, the centering seat is provided with a main gas outlet channel, and the main gas outlet channel is communicated with a gas outlet cavity between the centering seat and the driving cylinder.

When the intracavity of admitting air toward the air chamber during inflated, the piston dish can produce the extrusion to the air of the intracavity of giving vent to anger, if go out the air cavity and be confined, then the gas of the intracavity of giving vent to anger can hinder the motion of piston dish after the pressurized, through adopting above-mentioned technical scheme, after seting up main gas outlet channel, the pressure of the intracavity of giving vent to anger can release away via main gas outlet channel, makes the motion of piston dish more smooth and easy, and then makes the piston dish can more easily pull the diaphragm dish and produce the bending.

Preferably, the driving cylinders are provided with a gas connecting channel, one end of the gas connecting channel is communicated with the main gas outlet channel, and the other end of the gas connecting channel is communicated with a gas outlet cavity of a gas chamber formed between two adjacent driving cylinders.

Through adopting above-mentioned technical scheme, ally oneself with the gas outlet channel and can communicate the chamber of giving vent to anger of each air chamber for each piston dish can receive more unanimous resistance when synchronous motion, and the bending of diaphragm dish will be more even so, and then makes the clamp splice higher to the repeated clamping precision of work piece.

Preferably, the clamping blocks are connected through a positioning ring, a bent opening is formed in the position, between the adjacent clamping heads, of the positioning ring, and the bent opening enables a bent piece to be formed on the positioning ring.

By adopting the technical scheme, the positioning ring can further reinforce the positions among the chucks, so that the change range of the distance among the chucks is more consistent in the process of clamping the workpiece by the chucks, and the repeated clamping of the workpiece by the clamping block is more accurate; the bending opening can thin the part of the positioning ring between the clamping blocks, so that the part of the positioning ring, which is positioned on the bending piece, is easier to bend along with the movement of the clamping blocks, and further the clamping blocks can apply larger clamping force to the workpiece.

Preferably, the centering seat and the centering column are internally provided with an air detection channel, the positioning disc is provided with a positioning table and a shunting air channel, one end of the shunting air channel is communicated with the surface of the positioning table, and the other end of the shunting air channel is communicated with the air detection channel.

Through adopting above-mentioned technical scheme, the work piece need support tightly on the location bench when the clamping to the roughness when making the work piece clamping at every turn keeps unanimous, after the clamp splice presss from both sides the work piece tight afterwards, aerify toward shunting the air flue in, when the pressure in each shunting air flue keeps a relatively stable numerical value, the roughness when proving the work piece clamping is higher, this design can be as the reference basis of operating personnel adjustment work piece apposition degree when the repeated clamping of work piece promptly, consequently can further improve the clamping precision of work piece.

Preferably, the side wall of the clamping block, which is positioned in the clamping opening, is provided with a movable opening for embedding the positioning disc.

Through adopting above-mentioned technical scheme, the distance between the clamp splice can produce the change along with the motion of diaphragm dish, consequently seting up the activity mouth after for the clamp splice is when pressing from both sides the work piece tightly, is difficult to produce with the positioning disk and contradicts, makes the clamp splice can apply bigger clamp force to the work piece on the one hand, in order to improve clamping stability, on the other hand can reduce the extrusion to the positioning disk, makes the positioning disk be difficult to produce and warp, and then makes the chuck can keep more permanent clamping precision.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the clamping block driven by the bending deformation of the diaphragm disc can have extremely high motion synchronism, so that the caliber change of the clamping opening has higher roundness, and higher positioning accuracy can be maintained in the process of repeatedly clamping the workpiece;

2. the multiple groups of linked piston discs can provide larger driving force for the diaphragm discs, so that workpieces can be clamped more tightly when the clamping is accelerated, and meanwhile, the air inlet cavity and the air outlet cavity which are communicated with each other among the air chambers enable the movement among the piston discs to have higher synchronism, so that the deformation of the diaphragm discs is more uniform, and the clamping blocks have higher repeated clamping precision;

3. the gas detection channel on the centering shaft and the flow dividing air channel on the positioning disc can assist an operator to correct the apposition degree of the workpiece during repeated clamping, so that the repeated clamping precision of the workpiece on the chuck is further improved.

Drawings

FIG. 1 is a cross-sectional view of a stacked sheet chuck as disclosed herein;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

FIG. 3 is a schematic diagram of the overall structure of the stacked sheet chuck as disclosed herein;

fig. 4 is a schematic structural view of a chuck disk of the stack sheet chuck disclosed in the present application.

Description of reference numerals: 1. a mounting seat; 2. a driver; 21. a centering shaft; 211. a centering seat; 212. a centering post; 22. a drive cylinder; 221. an air chamber; 222. an air inlet cavity; 223. an air outlet cavity; 23. a piston disc; 231. a piston portion; 232. a connecting portion; 3. a membrane disc; 31. a deformation groove; 32. an inner coil; 33. an outer coil; 34. connecting blocks; 4. a chuck plate; 41. a clamping block; 411. a movable opening; 42. a positioning ring; 421. bending the opening; 422. bending the sheet; 5. positioning a plate; 51. a positioning table; 6. an air gap; 7. a seal ring; 8. a primary air intake; 9. an air intake branch passage; 10. an air inlet channel; 11. a main gas outlet channel; 12. installing a clamping opening; 13. a gas detection channel; 14. shunting an air passage; 15. a drive port; 16. is connected with the gas channel.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses stack formula thin slice chuck, refer to fig. 1, including mount pad 1, driver 2, diaphragm dish 3, chuck dish 4, positioning disk 5, mount pad 1 is as bearing the main part for be connected with equipment such as lathe, specifically, for easy to assemble, can set up the screw hole on mount pad 1.

The driver 2, the chuck plate 4, the diaphragm plate 3 and the positioning plate 5 are sequentially superposed on the mounting seat, specifically, the driver 2 comprises a centering shaft 21, a driving cylinder 22 and a piston plate 23, the centering shaft 21 comprises a centering seat 211 and a centering column 212, the centering seat 211 is disc-shaped and is fixed on the mounting seat 1 by taking a bolt as a fastener; the centering shaft 21 is integrally disposed on the centering seat 211 and faces away from the mounting seat 1.

Referring to fig. 1 and 2, the driving cylinder 22 and the piston disc 23 are matched in pairs, in this embodiment, two sets of driving cylinders 22 and piston discs 23 are provided, and in other embodiments, the number of the driving cylinders 22 and the piston discs 23 can be adjusted according to actual needs. Specifically, the center of the driving cylinder 22 is provided with a through hole which is sleeved on the centering column 212, the driving opening 15 is formed between the driving cylinder 22 and the centering column 212 at a certain interval, after installation, the centering seat 211 and the driving cylinder 22, and the driving cylinder 22 are sequentially connected by using a bolt as a fastener, and at this time, air chambers 221 are respectively formed between the centering seat 211 and the driving cylinder 22, and between the driving cylinder 22 and the driving cylinder 22.

The piston disc 23 comprises a piston part 231 and a connecting part 232, the piston part 231 is disc-shaped, the connecting part 232 is circular and integrally fixed at the center of the piston part 231, during installation, the connecting part 232 of the piston disc 23 is sleeved on the positioning column, an air gap 6 is formed between the connecting part 232 and the positioning column 212 at the moment, the connecting part 232 penetrates through the driving port 15, and the connecting parts 232 of the piston discs 23 are sequentially connected with each other by taking bolts as fasteners.

For enhancing the sealing, sealing rings 7 are respectively arranged between the connecting part 232 and the centering column 212, between the connecting part 232 and the driving cylinder 22, and the sealing rings 7 between the connecting part 232 and the centering column 212 are positioned at two sides of the air gap 6, so that the air gap 6 forms a closed chamber.

The piston disk 23 is mounted with its piston portion 231 located within the air chamber 221 and divides the air chamber 221 into two portions, an inlet chamber 222 and an outlet chamber 223. To enhance the sealing property, a seal ring 7 is provided between the piston portion 231 and the inner wall of the drive cylinder 22, and leakage between the intake chamber 222 and the exhaust chamber 223 is less likely to occur.

The diaphragm plate 3 is a disc-shaped structure with a hole in the middle, an annular deformation groove 31 is formed in one side surface of the diaphragm plate 3, the deformation groove 31 enables an inner coil 32 and an outer coil 33 to be formed on the diaphragm plate 3, the outer coil 33 of the diaphragm plate 3 is fixed on the driving cylinder 22 by using bolts as fasteners, and the inner coil 32 is connected with the connecting portion 232 of the piston plate 23.

In order to enable the piston disc 23 to move in the air chamber 221, a main air inlet channel 8 is arranged in the centering seat 211 and the centering column 212 and communicated with each other, an air inlet branch channel 9 is arranged on a connecting part 232 of the piston disc 23, the main air inlet channel 8 and the air inlet branch channel 9 are both communicated with the air gap 6, and the other end of the air inlet branch channel 9 is communicated with an air inlet cavity 222 of the air chamber 221.

In order to better link the piston discs 23, the driving cylinder 22 is provided with the connecting air inlet passage 10, two ends of the connecting air inlet passage 10 are respectively communicated with the air inlet cavities 222 of two adjacent air chambers 221, and therefore when the main air inlet passage 8 is inflated, the air inlet cavities 222 of the air chambers 221 can be supplied with air to drive the piston discs 23 to move synchronously.

In order to reduce the obstruction of the gas in the gas outlet cavity 223 to the movement of the piston disc 23, the centering seat 211 is provided with a main gas outlet channel 11, the main gas outlet channel 11 is communicated with the gas outlet cavity 223 of the gas chamber 221 between the centering seat 211 and the driving cylinder 22, the driving cylinder 22 is provided with a gas connecting channel 16, one end of the gas connecting channel 16 is communicated with the main gas outlet channel 11, and the other end of the gas connecting channel is communicated with the gas outlet cavity 223 of the gas chamber 221 between two adjacent driving cylinders 22, so that the gas outlet cavity 223 of each gas chamber 221 can synchronously give out gas in the process of gas inlet of the main gas inlet channel 8, and the piston disc 23 can have higher movement synchronism, and the piston disc 23 can pull the inner disc ring 32 in the movement process, so that the part of the diaphragm disc 3 located at the deformation groove 31 is bent, and the driving of the diaphragm disc 3 is further realized.

Referring to fig. 3 and 4, the chuck disk 4 includes a plurality of clamping blocks 41 and a plurality of positioning rings 42, the clamping blocks 41 are integrally fixed on the positioning ring 42, and the clamping blocks 41 are uniformly distributed along the circumferential direction of the positioning ring 42, a gap is formed between two adjacent clamping blocks 41, a curved opening 421 is formed in a portion of the positioning ring 42 located in the gap between two adjacent clamping blocks 41, and the curved opening 421 thins the portion of the positioning ring 42, so that a curved piece 422 capable of conveniently generating curved deformation is formed at the position of the positioning ring 42. In order to facilitate the installation of the chuck plate 4, the connecting blocks 34 are integrally arranged on the membrane plate 3, the connecting blocks 34 are distributed on the membrane plate 3 along the ring shape, during the installation, the positioning ring 42 is sleeved on the connecting blocks 34, and the clamping block 41 and the connecting blocks 34 are fixed by using bolts as fasteners, at this time, the clamping block 41 is enclosed on the membrane plate 3 to form the clamping opening 12.

When the inner ring 32 is bent towards the mounting seat 1 under the pulling of the piston disc 23, the inner ring 32 is driven to incline towards the inside of the clamping opening 12, so that the clamping opening 12 is contracted to clamp a workpiece, and in the resetting process of the piston disc 23, the inner ring 32 is bent towards one side far away from the mounting seat 1, so that the clamping block 41 inclines towards the outside of the clamping opening 12, and the workpiece is loosened.

The chuck disk 4 is fixed on the centering column 212 by bolts as fasteners and is positioned in the clamping opening 12. The surfaces of the chuck disk 4, which are opposite to the centering column 212, are integrally provided with a plurality of positioning tables 51, the positioning tables 51 are annularly distributed by taking the circle center of the positioning disk 5 as the center, and the surfaces of the positioning tables 51 are located on the same plane, so that the positioning tables 51 can be used as positioning planes when workpieces are clamped.

Referring to fig. 1 and 3, in order to ensure that the workpiece is fully contacted with the positioning table 51 every time when being clamped, an air detection channel 13 is formed in the centering seat 211 and the centering column 212, meanwhile, a diversion air channel 14 is formed in the positioning disc 5, one end of the diversion air channel 14 is communicated with the surface of the positioning table 51, and the other end of the diversion air channel is communicated with the air detection channel 13, so that when the workpiece is in a leveling state, after the air detection channel 13 is inflated, air pressure in each diversion air channel 14 can fluctuate within a relatively stable range, and data are approximately the same, thereby helping an operator to confirm the leveling degree of the workpiece.

In order to prevent the clamping block 41 from interfering with the positioning plate 5 easily in the process of shrinking, a movable opening 411 is formed in the side wall of the clamping block 41 in the clamping opening 12, and the movable opening 411 can be used for the positioning plate 5 to be embedded in the process of inclining the clamping block 41.

The implementation principle of the stack type slice chuck in the embodiment of the application is as follows: during clamping, a workpiece is placed into the clamping opening 12 and is completely contacted with the positioning table 51, the flatness of the workpiece can be detected through the air detection channel 13, the air is filled into the main air inlet channel 8 after the flatness of the workpiece is confirmed, the piston disc 23 pulls the membrane disc 3 to bend, the clamping block 41 clamps the workpiece, and when the other side needs to be switched after machining is finished, the same steps are carried out.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A stacked sheet chuck, comprising: comprises that

The mounting seat (1) is used as a bearing main body;

the diaphragm disc (3) is arranged on the mounting seat (1), one side surface of the diaphragm disc is provided with a deformation groove (31), and the deformation groove (31) enables an outer disc ring (33) and an inner disc ring (32) to be formed on the diaphragm disc (3);

the driver (2) is arranged on the mounting seat (1) and is used for driving the inner coil (32) and/or the outer coil (33) of the diaphragm disc (3) to bend along the axial direction of the diaphragm disc (3);

the clamping head disc (4) is arranged on the membrane disc (3), a plurality of clamping blocks (41) used for clamping the workpiece are arranged on the clamping head disc (4), and the clamping blocks (41) surround the clamping head disc (4) to form a clamping opening (12) for placing the workpiece;

and the positioning disc (5) is arranged on the driver (2), is positioned in the clamping opening (12) and is used for correcting the flatness of the workpiece.

2. The stacked sheet chuck as set forth in claim 1, wherein: the driver (2) comprises

The centering shaft (21) is fixed on the mounting seat (1) and comprises a centering seat (211) connected with the mounting seat (1) and a centering column (212) integrally arranged on the centering seat (211);

the driving cylinder (22) is sleeved on the centering column (212) and is positioned between the centering seat (211) and the diaphragm disc (3), the centering seat (211) and the driving cylinder (22) as well as the driving cylinder (22) and the outer coil (33) of the diaphragm disc (3) are sequentially connected, and air chambers (221) are respectively formed between the adjacent two;

the piston disc (23) is arranged in the air chamber (221) and comprises a piston part (231) and a connecting part (232), the connecting part (232) is arranged on the centering column (212) in a sealing mode, and the piston part (231) is located in the air chamber (221) and divides the air chamber (221) into an air inlet cavity (222) and an air outlet cavity (223);

the positioning disc (5) is fixed on a centering column (212) of the centering shaft (21), a driving port (15) is formed between the driving cylinder (22) and the centering column (212), a connecting part (232) of the piston disc (23) penetrates through the driving port (15) in a sealing mode, and the connecting part (232) is connected with an inner disc ring (32) of the diaphragm disc (3).

3. The stacked wafer chuck of claim 2, wherein: be provided with main intake duct (8) that communicate each other in centering seat (211) and centering post (212), be provided with confined air gap (6) between centering post (212) and piston dish (23), main intake duct (8) with air gap (6) are linked together, be provided with air inlet branch way (9) on connecting portion (232) of piston dish (23), air inlet branch way (9) intercommunication air inlet chamber (222) of air gap (6) and air chamber (221).

4. The stack slice chuck of any one of claims 2 or 3, wherein: drive cylinder (22) and piston dish (23) cooperate in pairs and are provided with two sets ofly at least, link to each other in proper order between drive cylinder (22) and form air chamber (221) respectively, it allies oneself with intake duct (10) to have seted up on drive cylinder (22), the both ends of alliing oneself with intake duct (10) communicate respectively in the intake chamber (222) of two adjacent air chambers (221).

5. The stacked wafer chuck of claim 4, wherein: the centering seat (211) is provided with a main gas outlet channel (11), and the main gas outlet channel (11) is communicated with a gas outlet cavity (223) between the centering seat (211) and the driving cylinder (22).

6. The stacked wafer chuck of claim 5, wherein: the driving cylinders (22) are provided with gas connecting channels (16), one end of each gas connecting channel (16) is communicated with the main gas outlet channel (11), and the other end of each gas connecting channel is communicated with a gas outlet cavity (223) of a gas chamber (221) formed between every two adjacent driving cylinders (22).

7. The stack slice chuck of any one of claims 2 or 3, wherein: the clamping blocks (41) are connected through a positioning ring (42), the positioning ring (42) is provided with a bending opening (421) at the position between the adjacent clamping heads, and the bending opening (421) enables the positioning ring (42) to form a bending piece (422).

8. The stack slice chuck of any one of claims 2 or 3, wherein: gas detection channel (13) are arranged in the centering seat (211) and the centering column (212), a positioning table (51) and a shunting gas channel (14) are arranged on the positioning disc (5), one end of the shunting gas channel (14) is communicated with the surface of the positioning table (51), and the other end of the shunting gas channel is communicated with the gas detection channel (13).

9. The stack slice chuck as claimed in any one of claims 1 to 3, wherein: the side wall of the clamping block (41) in the clamping opening (12) is provided with a movable opening (411) for embedding the positioning disc (5).