CN112716475A - Surface impedance identification method and device based on flexible piezoelectric sensing technology - Google Patents
Surface impedance identification method and device based on flexible piezoelectric sensing technology Download PDFInfo
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
- A61B5/053—Measuring electrical impedance or conductance of a portion of the body
- A61B5/0531—Measuring skin impedance
- A61B5/0532—Measuring skin impedance specially adapted for acupuncture or moxibustion
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H39/00—Devices for locating or stimulating specific reflex points of the body for physical therapy, e.g. acupuncture
- A61H39/02—Devices for locating such points
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/0247—Pressure sensors
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Abstract
The disclosure relates to a surface impedance identification method and an identification device based on a flexible piezoelectric sensing technology. The method comprises the following steps: fixing an impedance recognition system on a surface to be detected, wherein the impedance recognition system comprises an electrode, an electrostrictive module connected with the electrode, an insulating layer positioned below the electrostrictive module, a sensor module positioned below the insulating layer and a hard material positioned above the electrostrictive module; energizing the electro-deformation module to cause deformation of the electro-deformation module, the insulating layer transferring a load due to deformation of the electro-deformation module to the sensor module, and the load being further transferred to the surface under test, causing a difference in an electrical signal of an output of the sensor module; and measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module, and identifying the impedance of the surface to be measured from the electrical signal difference.
Description
Technical Field
The present disclosure relates to surface impedance identification, and more particularly, to a surface impedance identification method and apparatus based on flexible piezoelectric sensing technology.
Background
In daily life, the positions of the acupuncture points are often required to be judged. It is known that the tissue modulus at the muscle demarcation and the onset and termination points of the muscles and tendons is lower than that of the muscles and tendons around the acupuncture point. Conventionally, an object hardness identification method based on a gaussian mixture noise generation type countermeasure network is adopted.
Fig. 1 is a schematic diagram of a prior art method for performing surface impedance identification. Referring to fig. 1, in the object hardness identification method based on the gaussian mixture noise generation type countermeasure network in the prior art, the gaussian mixture noise generation type countermeasure network is trained with the tactile data of small scale labeled hardness level as the true value, and gaussian mixture noise is input into the gaussian mixture noise generation type countermeasure network to obtain a large scale generation sample; using the parameters of a discriminator of the Gaussian mixed noise generation type countermeasure network as initial values of the parameters of the hardness recognition network, pre-training the hardness recognition network by using the large-scale generation sample, and re-training the hardness recognition network by using the tactile data marked with the hardness grade to determine the parameters of the hardness recognition network; and inputting the tactile data to be predicted into a hardness recognition network to obtain the hardness grade of the tactile data to be predicted. The method comprises the following specific steps: step 1.1: the method comprises the steps of touching a target object by using a sensor at the front end of a mechanical arm, collecting touch data, dividing the collected touch data into L hardness levels according to hardness physical attributes of the touch data, and marking the touch data with corresponding labels of 1, 2, 3, 1.
A sensor is attached to the surface of the hard manipulator, the manipulator is controlled to apply pressure to the surface, and the hardness degree of the surface is judged according to the reading of the sensor. The mode seriously depends on the movement of the mechanical arm, for a mechanical system, the control precision can not be ensured by the current technical level, the thickness of the flexible sensor is in the micron order, the deformation size is smaller under the action of pressure, the control on the mechanical arm is difficult to achieve in the micron order, and the servo control system is extremely low in precision efficiency when trying to achieve the high precision. Therefore, the identification precision of the impedance is inaccurate, and the problem of surface impedance identification cannot be effectively solved, namely, the resistance type acupuncture point identification method is greatly limited by the skin surface environment, and the acupuncture point identification precision is poor.
Disclosure of Invention
In order to solve the technical problem, the flexible pressure sensing device is manufactured by judging the positions of acupuncture points in a pressure measurement mode and combining an electrostriction module and a capacitance pressure sensing module. The inverse piezoelectric effect of the piezoelectric material is utilized, the electrostrictive deformation module deforms under the driving of voltage, and meanwhile, pressure is applied to the pressure sensor; because the muscle group and the acupoint have different moduli, the pressure sensors at the corresponding parts of the muscle and the acupoint obtain different reaction forces, and the voltage distribution cloud pictures of different parts are obtained through the array type pressure sensors. And identifying the positions of the acupuncture points according to the voltage distribution dot matrix data.
According to one aspect of the present disclosure, a surface impedance identification method based on a flexible piezoelectric sensing technology is provided, which is characterized by comprising the following steps: fixing an impedance recognition system on a surface to be detected, wherein the impedance recognition system comprises an electrode, an electrostrictive module connected with the electrode, an insulating layer positioned below the electrostrictive module, a sensor module positioned below the insulating layer and a hard material positioned above the electrostrictive module; energizing the electro-deformation module to cause deformation of the electro-deformation module, the insulating layer transferring a load caused by deformation of the electro-deformation module to the sensor module, and the load being further transferred to the surface under test, causing a difference in an electrical signal of an output of the sensor module; the electrical signal difference is measured by an electrical device connected to the upper and lower electrodes of the sensor module, and the impedance of the surface to be measured is identified from the electrical signal difference.
In one embodiment of the present disclosure, a side of the sensor module contacting the surface to be measured is a flat plate structure.
In one embodiment of the present disclosure, a side of the sensor module contacting the surface to be measured is provided with a microstructure, and the microstructure includes a conical, hemispherical, cylindrical or spherical shell structure.
In one embodiment of the present disclosure, a plurality of the impedance recognition systems are arranged as a flexible recognition array, with S-shaped wires or split wires connected between the respective impedance recognition systems.
In one embodiment of the disclosure the hard material is an insulating ceramic or insulating crystal with a modulus of greater than 200GPa and a thickness of 50-200 μm;
and/or the electrostrictive module is piezoelectric ceramic or piezoelectric crystal, and the thickness of the electrostrictive module is 50-200 mu m;
and/or the electrode material is copper foil, gold foil or silver foil, and the thickness is 0.5-10 mu m;
and/or the insulating layer is made of an insulating ceramic material and has the thickness of 5-30 mu m;
and/or the sensor module is a resistance type pressure sensor, a capacitance type pressure sensor or a piezoelectric type pressure sensor.
According to the method, the inverse piezoelectric effect of the piezoelectric material is utilized, the electrostrictive module deforms under the driving of voltage, and meanwhile pressure is applied to the pressure sensor. Because the muscle group and the acupoint have different moduli, the pressure sensors at the corresponding parts of the muscle and the acupoint obtain different reaction forces, and the surface impedance can be obtained with high precision.
According to another aspect of the present disclosure, there is provided a surface impedance identification device based on flexible piezoelectric sensing technology, comprising: the impedance recognition system fixing module is used for fixing the impedance recognition system on a surface to be detected, and the impedance recognition system comprises an electrode, an electrostrictive module connected with the electrode, an insulating layer positioned below the electrostrictive module, a sensor module positioned below the insulating layer and a hard material positioned above the electrostrictive module; an electro-deformation module heating module for energizing the electro-deformation module to cause the electro-deformation module to deform, the insulating layer transferring a load caused by the deformation of the electro-deformation module to the sensor module, and the load being further transferred to the surface under test, causing a difference in an electrical signal of an output of the sensor module; and an impedance recognition module for measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module and recognizing the impedance of the surface to be measured according to the electrical signal difference.
According to the surface impedance recognition device based on the flexible piezoelectric sensing technology, the inverse piezoelectric effect of the piezoelectric material is utilized, the electrostrictive module deforms under the driving of voltage, and meanwhile pressure is applied to the pressure sensor. Because the muscle group and the acupoint have different moduli, the pressure sensors at the corresponding parts of the muscle and the acupoint obtain different reaction forces, and the surface impedance can be obtained with high precision.
According to still another aspect of the present disclosure, there is provided an impedance identification system, including: an electrode; an electro-deformable module connected to the electrode; an insulating layer located below the electro-deformable module; a sensor module located below the insulating layer; and a hard material located over the electro-deformable module.
In one embodiment of the present disclosure, a side of the sensor module contacting the surface to be measured is a flat plate structure; and/or the presence of a gas in the gas,
and one side of the sensor module, which is in contact with the surface to be detected, is provided with a microstructure, and the microstructure comprises a conical, hemispherical, cylindrical or spherical shell structure.
In one embodiment of the disclosure, the hard material is an insulating ceramic or insulating crystal having a modulus of greater than 200GPa and a thickness of 50-200 μm;
and/or the electrostrictive module is piezoelectric ceramic or piezoelectric crystal, and the thickness of the electrostrictive module is 50-200 mu m;
and/or the electrode material is copper foil, gold foil or silver foil, and the thickness is 0.5-10 mu m;
and/or the insulating layer is made of an insulating ceramic material and has the thickness of 5-30 mu m;
and/or the sensor module is a resistance type pressure sensor, a capacitance type pressure sensor or a piezoelectric type pressure sensor.
In one embodiment of the present disclosure, a plurality of impedance recognition systems are arranged as a flexible recognition array, with S-wires or split wires connected between the respective impedance recognition systems.
According to the impedance identification system disclosed by the invention, the technology and the method for accurately identifying and positioning the acupuncture points of the human body are established by utilizing the high-precision flexible pressure array sensor based on the inverse piezoelectric effect, so that the guarantee is provided for the intelligent measurement of the acupuncture point data. Moreover, according to the method disclosed by the embodiment of the disclosure, the acupoint pressure data can be quantitatively identified, and data support is provided for digital medical treatment.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the disclosure and are not to be construed as limiting the disclosure.
Fig. 1 is a schematic diagram of a surface impedance identification method according to the prior art.
Fig. 2 is a flowchart of a surface impedance identification method based on a flexible piezoelectric sensing technology according to an exemplary embodiment of the present disclosure.
Fig. 3 is a front view of an impedance identification system according to a first exemplary embodiment of the present disclosure.
Fig. 4 is a front view of an impedance identification system according to a second exemplary embodiment of the present disclosure.
Fig. 5 is a front view of an impedance identification system according to a third exemplary embodiment of the present disclosure.
Fig. 6 is a schematic diagram of identification of body acupuncture points using an impedance identification system according to an exemplary embodiment of the present disclosure.
Fig. 7 is a block diagram of a surface impedance identification apparatus based on flexible piezoelectric sensing technology according to an exemplary embodiment of the present disclosure.
Detailed Description
In order to make the technical solutions of the present disclosure better understood by those of ordinary skill in the art, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings.
It should be noted that the terms "first," "second," and the like in the description and claims of the present disclosure and in the above-described drawings are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the disclosure described herein are capable of operation in sequences other than those illustrated or otherwise described herein. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
In order to solve the above problem, the present disclosure provides a surface impedance identification method based on a flexible piezoelectric sensing technology, which is characterized by including the following steps: fixing an impedance recognition system on a surface to be detected, wherein the impedance recognition system comprises an electrode, an electrostrictive module connected with the electrode, an insulating layer positioned below the electrostrictive module, a sensor module positioned below the insulating layer and a hard material positioned above the electrostrictive module; energizing the electro-deformation module to cause deformation of the electro-deformation module, the insulating layer transferring a load due to deformation of the electro-deformation module to the sensor module, and the load being further transferred to the surface under test, causing a difference in an electrical signal of an output of the sensor module; the electrical signal difference is measured by an electrical device connected to the upper and lower electrodes of the sensor module, and the impedance of the surface to be measured is identified from the electrical signal difference.
In particular, fig. 2 shows a flow chart of a surface impedance identification method based on a flexible piezoelectric sensing technology according to an exemplary embodiment of the present disclosure.
Referring to fig. 2, in step 201, an impedance recognition system is placed on a surface to be measured and the impedance recognition system is fixed.
Specifically, as shown in fig. 3, the impedance recognition system includes an electrode, an electro-deformation module connected to the electrode, an insulating layer under the electro-deformation module, a sensor module under the insulating side, and a hard material over the electro-deformation module. According to one example of the present disclosure, the impedance identification system may be secured using tape, glue strips, or other adhesive material.
At step 202, the electro-deformation module is energized to cause the electro-deformation module to deform, the insulating layer transfers the load due to the deformation of the electro-deformation module to the sensor, and the load is further transferred to the surface to be measured, causing an electrical signal difference.
Specifically, the upper and lower electrodes of the electro-deformation module are connected with a power supply to electrify the electro-deformation module, so that the module is deformed. The resulting deformation applies a load to the insulating layer, which is transferred by the insulating layer to the sensor; the load is transmitted to the surface to be measured by the sensor, and the hardness of the surface to be measured can cause different deformations of the sensor, thereby causing the difference of electric signals of the sensor.
In step 203, the electrical device connected by the upper and lower electrodes of the sensor module measures the difference of the electrical signals, and identifies the impedance of the surface to be measured according to the difference of the electrical signals.
Fig. 3 is a front view showing an impedance recognition system according to the first embodiment of the present disclosure, but the device top view may be prepared in any shape, and the system overall structure includes electrodes, an electro-deformation module, an insulating layer, a sensor module, and a hard material.
Specifically, the impedance identification system operates on the principle: the system is placed on the surface to be measured, and the whole system is fixed in position by using the medical adhesive tape. The upper electrode and the lower electrode of the electro-deformation module are connected with a power supply to electrify the electro-deformation module to cause the module to deform; the deformation applies a load to the insulating layer, which is transmitted to the sensor by the insulating layer; the load is transmitted to the surface to be measured by the sensor, and the hardness of the surface to be measured can cause different deformations of the sensor, thereby causing the difference of electric signals of the sensor. The electrical signal is measured by the electrical device to which the upper and lower electrodes of the sensor module are connected. And judging the impedance of the surface to be measured according to the difference of the electric signals.
Optionally, the hard material requires a high modulus, and the insulating ceramic or insulating crystal may be selected to have a modulus greater than 200GPa and a thickness of 50-200 μm.
Optionally, the selected electrostrictive module can be piezoelectric ceramics or piezoelectric crystals, and the thickness of the selected electrostrictive module is 50-200 mu m.
Optionally, the electrode material can be a metal material with excellent conductivity, such as copper foil, gold foil, silver foil and the like, and the thickness of the electrode material is 0.5-10 μm.
Optionally, the insulating layer requires an insulating ceramic material with a thin thickness, and the thickness is 5-30 μm.
Optionally, the sensor module is a pressure sensor, a resistance-type pressure sensor is selected, and the connected electrical device is an ohmmeter; the capacitive pressure sensor can be selected, and the connected electric equipment is a voltmeter; a piezoelectric pressure sensor can also be selected, and the connected electric equipment is a voltmeter.
In the embodiment of the disclosure, the hard material is a hard insulating SiC ceramic film with a thickness of 100 μm;
the electrode material is copper foil with the thickness of 5 mu m;
the electro-deformation material is PZT piezoelectric ceramic with the thickness of 100 mu m;
the insulating layer is an insulating SiC ceramic film with the thickness of 5 mu m;
the sensor module is prepared by mixing PDMS and carbon nano tubes, and the resistance of the resistance type sensor changes in the deformation process. The connected electrical measuring equipment is an ohmmeter, and the value of the ohmmeter can be read.
Fig. 4 is a front view of an impedance identification system according to a second exemplary embodiment of the present disclosure.
In the impedance identification system shown in fig. 3, the side of the sensor module that contacts the surface to be measured is a flat plate structure. The flat plate structure has low sensitivity in measurement and poor identification capability for small differences. In order to identify the surface impedance more precisely, in a second embodiment according to the disclosure, the side of the sensor module that is in contact with the surface to be measured is designed as a microstructure.
Specifically, referring to fig. 4, an impedance recognition system according to a second embodiment of the present disclosure includes an electrode, an electro-deformation module connected to the electrode, an insulating layer under the electro-deformation module, a sensor module under the insulating side, and a hard material over the electro-deformation module. However, it is different from the first embodiment of the impedance recognition system shown in fig. 3 in that the side of the sensor module that is in contact with the surface to be measured is designed as a microstructure. The microstructures may include conical, hemispherical, cylindrical, or spherical shell structures. By using the microstructure, the loading area is reduced, the force on the unit area is increased, and the deformation is more obvious, so that the sensitivity of the sensor can be obviously improved by the design of the structure, and the surface identification precision of weak impedance difference is higher.
Fig. 5 is a front view of an impedance identification system according to a third exemplary embodiment of the present disclosure.
The two schemes shown in fig. 3 and 4 have good identification capability for the surface with better impedance uniformity, and the impedance value of the measured surface can be obtained by single-point measurement, but the efficiency is low when the surface with inconsistent impedance is measured. In an embodiment according to the third aspect of the present disclosure, a flexible identification array is designed. Referring specifically to fig. 5, in a flexible identification array, individual identification cells are connected by S-wires, parting wires, which improves the stretchability of the identification system. Due to the design of the S-shaped lead, the system has certain bending capability and good conformal capability on the curved surface, and has high accuracy when used for identifying the impedance of the curved surface structure. The planar impedance distribution is obtained by comparing a plurality of measurement data.
Fig. 6 shows a block diagram of a surface impedance identification apparatus based on flexible piezoelectric sensing technology according to an embodiment of the present disclosure. As shown in fig. 6, the surface impedance recognition apparatus includes an impedance recognition system fixing module for fixing the impedance recognition system on a surface to be detected, where the impedance recognition system includes an electrode, an electrostrictive module connected to the electrode, an insulating layer located below the electrostrictive module, a sensor module located below the insulating layer, and a hard material located above the electrostrictive module. The surface impedance identification device further comprises an electric deformation module and a power-on module, wherein the electric deformation module is used for electrifying the electric deformation module to cause the electric deformation module to deform, the insulating layer transmits the load caused by deformation of the electric deformation module to the sensor module, and the load is further transmitted to the surface to be detected to cause the difference of the electric signals output by the sensor module. The surface impedance identification apparatus further includes an impedance identification module for measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module and identifying the impedance of the surface to be measured according to the electrical signal difference.
It should be noted that the foregoing explanation on the embodiment of the surface impedance identification method based on the flexible piezoelectric sensing technology is also applicable to the embodiment of the surface impedance identification apparatus based on the flexible piezoelectric sensing technology of this embodiment, and details are not described here again.
According to the surface impedance recognition device based on the flexible piezoelectric sensing technology, the inverse piezoelectric effect of the piezoelectric material is utilized, the electrostrictive module deforms under the driving of voltage, and meanwhile pressure is applied to the pressure sensor. Because the muscle group and the acupoint have different moduli, the pressure sensors at the corresponding parts of the muscle and the acupoint obtain different reaction forces, and the surface impedance can be obtained with high precision.
Fig. 7 illustrates a block diagram of a surface impedance recognition apparatus based on a flexible piezoelectric sensing technology according to an exemplary embodiment of the present disclosure.
Referring to fig. 7, applying the surface impedance recognition apparatus according to the embodiment of the present disclosure to the skin surface can accurately determine the positions of the acupoint portions.
Specifically, at the onset and termination points of muscle tissue and periosteum, the tissue modulus is lower than that of muscle tendons around acupuncture points. By using the surface impedance identification method and the surface impedance identification device based on the flexible piezoelectric sensing technology, the electrostrictive deformation module deforms under the voltage driving by using the inverse piezoelectric effect of the piezoelectric material, and meanwhile, pressure is applied to the pressure sensor. Because the muscle group and the acupuncture point have different moduli, the pressure sensors at the corresponding parts of the muscle and the acupuncture point obtain different reaction forces, and the surface impedance can be obtained with high precision, so that the acupuncture point position can be determined with high precision.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
In the description of the present disclosure, reference to the description of the terms "one embodiment," "some embodiments," "an example," "a specific example" or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In the present disclosure, the schematic representations of the terms described above are not necessarily intended to be the same real-time or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this disclosure can be combined and combined by one skilled in the art without contradiction.
It will be understood that the present disclosure is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (10)
1. A surface impedance identification method based on a flexible piezoelectric sensing technology is characterized by comprising the following steps:
fixing an impedance recognition system on a surface to be detected, wherein the impedance recognition system comprises an electrode, an electrostrictive module connected with the electrode, an insulating layer positioned below the electrostrictive module, a sensor module positioned below the insulating layer and a hard material positioned above the electrostrictive module;
energizing the electro-deformation module to cause deformation of the electro-deformation module, the insulating layer transferring a load caused by deformation of the electro-deformation module to the sensor module, and the load being further transferred to the surface under test, causing a difference in an electrical signal of an output of the sensor module;
the electrical signal difference is measured by an electrical device connected to the upper and lower electrodes of the sensor module, and the impedance of the surface to be measured is identified from the electrical signal difference.
2. The method of claim 1, wherein the side of the sensor module in contact with the surface to be measured is a flat plate structure.
3. The method of claim 1, wherein the sensor module comprises a microstructure on a side thereof contacting the surface to be measured, the microstructure comprising a conical, hemispherical, cylindrical or spherical shell structure.
4. The method of claim 1, wherein a plurality of the impedance identification systems are arranged as a flexible identification array, with S-wires or split wires connecting between each of the impedance identification systems.
5. The method according to claim 1, wherein the hard material is an insulating ceramic or an insulating crystal with a modulus of more than 200GPa and a thickness of 50-200 μ ι η;
and/or the electrostrictive module is piezoelectric ceramic or piezoelectric crystal, and the thickness of the electrostrictive module is 50-200 mu m;
and/or the electrode material is copper foil, gold foil or silver foil, and the thickness is 0.5-10 mu m;
and/or the insulating layer is made of an insulating ceramic material and has the thickness of 5-30 mu m;
and/or the sensor module is a resistance type pressure sensor, a capacitance type pressure sensor or a piezoelectric type pressure sensor.
6. A surface impedance recognition device based on flexible piezoelectric sensing technology is characterized by comprising:
the impedance recognition system fixing module is used for fixing the impedance recognition system on a surface to be detected, and the impedance recognition system comprises an electrode, an electrostrictive module connected with the electrode, an insulating layer positioned below the electrostrictive module, a sensor module positioned below the insulating layer and a hard material positioned above the electrostrictive module;
an electro-deformation module heating module for energizing the electro-deformation module to cause the electro-deformation module to deform, the insulating layer transferring a load caused by the deformation of the electro-deformation module to the sensor module, and the load being further transferred to the surface under test, causing a difference in an electrical signal of an output of the sensor module; and
an impedance identification module for measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module and identifying the impedance of the surface to be measured according to the electrical signal difference.
7. An impedance identification system, comprising:
an electrode;
an electro-deformable module connected to the electrode;
an insulating layer located below the electro-deformable module;
a sensor module located below the insulating layer; and
a hard material located over the electro-deformable module.
8. The impedance identification system of claim 7, wherein the side of the sensor module in contact with the surface to be measured is of a flat plate configuration; and/or the presence of a gas in the gas,
and one side of the sensor module, which is in contact with the surface to be detected, is provided with a microstructure, and the microstructure comprises a conical, hemispherical, cylindrical or spherical shell structure.
9. The impedance identification system according to claim 7, wherein the hard material is an insulating ceramic or an insulating crystal having a modulus of greater than 200GPa and a thickness of 50-200 μm;
and/or the electrostrictive module is piezoelectric ceramic or piezoelectric crystal, and the thickness of the electrostrictive module is 50-200 mu m;
and/or the electrode material is copper foil, gold foil or silver foil, and the thickness is 0.5-10 mu m;
and/or the insulating layer is made of an insulating ceramic material and has the thickness of 5-30 mu m;
and/or the sensor module is a resistance type pressure sensor, a capacitance type pressure sensor or a piezoelectric type pressure sensor.
10. The impedance recognition system of claim 7, wherein a plurality of the impedance recognition systems are arranged as a flexible recognition array, with the impedance recognition systems connected with S-wires or parting wires therebetween.
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| CN113837008A (en) * | 2021-08-24 | 2021-12-24 | 中国科学院深圳先进技术研究院 | Hardness identification method and device, electronic equipment and storage medium |
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| CN113837008A (en) * | 2021-08-24 | 2021-12-24 | 中国科学院深圳先进技术研究院 | Hardness identification method and device, electronic equipment and storage medium |
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