CN109141696A - A kind of flexible touch sensation sensor and its signal processing system based on piezoelectric membrane - Google Patents

A kind of flexible touch sensation sensor and its signal processing system based on piezoelectric membrane Download PDF

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Publication number
CN109141696A
CN109141696A CN201810856921.6A CN201810856921A CN109141696A CN 109141696 A CN109141696 A CN 109141696A CN 201810856921 A CN201810856921 A CN 201810856921A CN 109141696 A CN109141696 A CN 109141696A
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CN
China
Prior art keywords
piezoelectric membrane
metal substrate
sensation sensor
flexible touch
touch sensation
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CN201810856921.6A
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CN109141696B (en
Inventor
曾涛
赵程
陈昊
李丽琛
付栖勇
张刚华
吴寒西子
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Shanghai Material Research Institute Co ltd
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Shanghai Institute of Materials
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices

Abstract

The present invention relates to a kind of flexible touch sensation sensor and its signal processing system based on piezoelectric membrane, the flexible touch sensation sensor includes metal substrate and the piezoelectric membrane, flexible body and protective layer that are set in turn in metal substrate two sides from inside to outside, the two sides of metal substrate is provided with metal electrode and protrusion, and flexible body is equipped with dentalation layer.Compared with prior art, the present invention makes piezoelectric membrane constantly generate vibration by protrusion under the action of elasticity, transducing signal is repeated, piezoelectric membrane is set to touch transducing signal at the first time by the toothing layer of flexible body, reduce the hysteresis quality of signal, perceptional function is improved simultaneously, it can accurately identify pressure size and orientation, range 0-1800kpa, cover the entire scope of human-computer interaction, signal processing system is with good stability and sensitivity, it can be provided for intelligent robot in time, accurately external world's tactile and pressure sensation information, it is of great significance for the research of intelligent robot.

Description

A kind of flexible touch sensation sensor and its signal processing system based on piezoelectric membrane
Technical field
The present invention relates to piezoelectric type tactile sensor technology fields, more particularly, to a kind of flexible touching based on piezoelectric membrane Feel sensor and its signal processing system.
Background technique
Piezoelectric material is to realize the important functional material converted between mechanical energy and electric energy.
Common piezoceramic material has many advantages, such as that piezoelectric property is excellent, dielectric loss is low and electromechanical lotus root collaboration number is big, It is widely used in PZT (piezoelectric transducer), sensor etc..
Piezoelectric membrane based on piezoelectric ceramics possesses unique characteristic, as a kind of type of dynamic strain sensor, very It is suitably applied human skin surface or is implanted into the vital signs monitor of inside of human body.Some thin-film components it is sensitive to be enough across Housing detects human pulse.
When stretching or be bent a piece of piezoelectric polyvinylidene fluoride PVDF polymeric membrane (piezoelectric membrane), film upper/lower electrode surface Between will generate an electric signal (charge or voltage), and with stretch or curved deformation it is proportional.General piezoresistive material Material can generate very big all to presser sensor, but for piezoelectric membrane when being longitudinally applied to the power of a very little, in transverse direction Stress, and if the stress of generation can be much smaller when applying same power to film large area.Therefore, piezoelectric membrane is to dynamic Stress is very sensitive.
Piezoelectric membrane is very thin, light, very soft, can be with non-active operation, therefore can be widely applied to medical energy converter, When especially needing to detect subtle signal.Obviously, the characteristics of material, is especially prominent in the case where power supply is limited, and presses Conductive film is extremely durable, can be subjected to millions of bendings and vibration.
Why piezoelectric membrane can detect very small physical signal again can experience it is significantly movable, be because The piezoelectric response of pvdf membrane be all in sizable dynamic range it is linear in most cases, as long as can obviously distinguish target letter Number and noise bandwidth, tiny echo signal can be collected by filter.
Though current existing touch sensor resolution ratio is higher but range is generally smaller, it is only capable of measuring more than ten Ns even only The pressure of several oxen, killing fluid additive can measure the pressure of several megapascal, but insufficient in small-range section measurement accuracy.
Touch sensor helps to detect quality of materials and rebuilds tactilely-perceptible.To which it can be essence in circumstances not known Thin manipulation, path planning and barrier avoid providing authentic data.As human-computer interaction is using more and more, touch sensor Need to have preferable flexibility.
The flexible sensor developed at present is mainly based upon flexible substrates preparation, can't be completely as human skin one Sample bending and high resilience.
It is badly in need of designing a kind of efficient, reliable transducing signal extraction according to touch-pressure sensation sensing arrangement feature on the market at present System eliminates the cross jamming between each sensing unit, improves the extraction rate and stability of transducing signal.
It is finally cost problem, sensor inexpensive, wear-resistant, with high duplication and low hysteresis can succeed Into market.
Therefore, in view of the foregoing drawbacks, there is an urgent need to find a kind of new touch sensor and its signal processing system, to obtain Range height, high, flexible, inexpensive, wear-resistant, with high duplication and low hysteresis the touch sensor of precision.
Summary of the invention
High, precision that it is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of ranges Flexible touch sensation sensor high, flexible, inexpensive, wear-resistant, with high duplication and low hysteresis based on piezoelectric membrane And there is efficient, reliable signal processing system.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of flexible touch sensation sensor based on piezoelectric membrane, including metal substrate and it is set in turn in gold from inside to outside Belong to piezoelectric membrane, flexible body and the protective layer on substrate two sides, the two sides of metal substrate is provided with metal electrode and protrusion.
Preferably, which further includes gasket, and the gasket is set between the flexible body on metal substrate two sides, and Positioned at the outside of metal substrate and piezoelectric membrane, for providing space for metal electrode and protrusion.
Preferably, there are two the gasket is set, it is set to the outer of two opposite sides of metal substrate and piezoelectric membrane Side.
Preferably, the flexible body is equipped with dentalation layer, and the dentalation layer is arranged in flexible body and piezoelectricity The contact position of film.
Preferably, the dentalation layer is made of the protrusion for the taper being arranged in array, the height of dentalation layer Less than the height of flexible body, the spacing of the tapered protrusion of dentalation layer is less than a quarter of dentalation layer length, is greater than / 20th of dentalation layer length.
Preferably, the protrusion is elastic bumps, is equipped with multiple.
It since protrusion is the object with certain elasticity, deformation and vibrates and provides mechanical energy for piezoelectric membrane, therefore want Retain certain oscillation space for metal electrode and protrusion, gasket provides support in the surrounding of protrusion, makes protrusion and piezoelectric membrane Between have certain space.
Preferably, multiple protrusions are regularly distributed at the center on metal substrate two sides.
Protrusion is centrally disposed, there is biggish deformation in operation, is conducive to provide stronger mechanical vibration to piezoelectric membrane It is dynamic.
Preferably, the every face of metal substrate is set there are four protrusion, is evenly distributed along the periphery around metal substrate core point.
Preferably, the two sides of the metal substrate is all provided with there are four metal electrode, and four metal electrodes are lived apart Metal Substrates At four angles of plate.
Preferably, the protective layer is silastic-layer.With preferable flexible, bendability, lesser touching can be differentiated Feel power.
The signal processing system of the flexible touch sensation sensor based on piezoelectric membrane, including processor module;
The processor module passes sequentially through signal conversion module, signal amplification module, piezoelectric sensing module, metal electricity Pole and piezoelectric membrane are electrically connected, to obtain the electric signal generated under vibration by piezoelectric membrane;
It is electrical that the processor module passes sequentially through data inputting module, data analysis processor and information acquisition module Connection, the electric signal to generate to vibration are converted into digital signal and are collected and store;
The processor module passes sequentially through slave computer, core switch, ZigBee communication network, terminal, coordinator It is electrically connected with host computer and LabView platform, the digital signal collected and stored is identified and be handled.
Preferably, the processor module is based on CC2530 processor.
Preferably, the terminal and coordinator are based on CC2530F256 master controller.
Preferably, the slave computer 16 is based on 8051 Integrated Development software of IAR Embedded Workbench for.
Preferably, data are uploaded to host computer by serial ports by the coordinator.
The signal processing system, improve the acquisition rate of sensor array column information, reliability, data transmission it is flexible Property.
Compared with prior art, the invention has the following advantages:
It is convex when flexible contact pressing based on piezoelectric membrane of the invention feels that the protrusion of sensor experiences the pressure of flexible body Play a part of constantly generate vibration in natural resiliency, vibrates piezoelectric membrane constantly by the vibration of protrusion, make transducing signal It is repeated, so that piezoelectric membrane is touched transducing signal at the first time by the toothing layer of flexible body, reduce letter Number hysteresis quality, while improving perceptional function, can accurately identify pressure size and orientation, the range of the sensing device is 0-1800kpa covers the entire scope of human-computer interaction.
The present invention, which is used, has preferable flexible and bendability by prepared by silicon rubber, can differentiate lesser haptic force Protective layer, two have flexible body, the protrusion etc. of toothing layer, the touch sensor of Grazing condition have been substantially achieved, with people Machine interaction using more and more, the present invention can be finely to manipulate in circumstances not known, and path planning and barrier avoid providing Authentic data.
Signal processing system of the present invention can in time, accurately acquire sensor array information, and will by ZigBee-network Information is sent to coordinator, and information is uploaded to host computer again and is shown by LabView platform real time graphical, is based on by coordinator ZigBee technology realizes the wireless real-time information transmission and simultaneous display of tactile sensing information and host computer, and the present invention is based on piezoelectricity The flexible touch sensation sensor and its signal processing system of film be with good stability and sensitivity, can be intelligent robot Timely, accurate extraneous tactile and pressure sensation information are provided.Robot can accurately be perceived by contactant by touch sensor The information of body, design have the touch sensor of high flexibility feature, are of great significance for the research of intelligent robot.
Detailed description of the invention
Fig. 1 is that the present invention is based on the flexible touch sensation sensors of piezoelectric membrane;
Fig. 2 is the structural schematic diagram of metal electrode of the present invention and protrusion;
Fig. 3 is the structural schematic diagram of flexible body dentalation layer of the present invention;
Fig. 4 is touch sensor signal acquisition circuit figure of the present invention.
In figure, 1 is metal substrate, and 2 be piezoelectric membrane, and 3 be gasket, and 4 be flexible body, and 5 be protective layer, and 6 be metal electrode, 7 be protrusion, and 8 be piezoelectric sensing module, and 9 be signal amplification module, and 10 be signal conversion module, and 11 be information acquisition module, 12 It is data inputting module for data analysis processor, 13,14 be data memory module, and 15 be processor module, and 16 be slave computer, 17 be core switch, and 18 be ZigBee communication network, and 19 be terminal, and 20 be coordinator, and 21 be host computer, and 22 be LabView Platform, 23 be dentalation layer.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
A kind of flexible touch sensation sensor based on piezoelectric membrane, as shown in Figures 1 to 3, including metal substrate 1 and from it is interior to It is set in turn in the piezoelectric membrane 2, flexible body 4 and protective layer 5 on metal substrate two sides outside, the two sides of metal substrate 1 is provided with Metal electrode 6 and protrusion 7.
In the present embodiment, which further includes gasket 8, and gasket 8 is set between the flexible body 4 on 1 two sides of metal substrate, And it is located at the outside of metal substrate 1 and piezoelectric membrane 2, for providing space for metal electrode 6 and protrusion 7.Further preferably pad There are two piece 3 is set, it is set to the outside on two opposite sides of metal substrate 1 and piezoelectric membrane 2, two pads in the present embodiment Outside elongated setting of the piece 3 along two opposite sides of metal substrate 1 and piezoelectric membrane 2.
Flexible body 4 in the present embodiment is equipped with dentalation layer 23, and the setting of dentalation layer 23 is thin in flexible body 4 and piezoelectricity The contact position of film 2.Dentalation layer 23 is made of the protrusion for the taper being arranged in array, and the height of dentalation layer 23 is less than soft Property body 4 height, the spacing of the tapered protrusion of dentalation layer 23 is less than a quarter of 23 length of dentalation layer, is greater than tooth / 20th of 23 length of shape structure sheaf.
The protrusion 7 of the metal substrate of the present embodiment is elastic bumps, is equipped with multiple, and is regularly distributed in Metal Substrate At the center on 1 two sides of plate.It is preferred that the every face of metal substrate 1 is set there are four protrusion, circumferentially uniformly arranged around 1 central point of metal substrate Cloth.And the two sides of metal substrate 1 is all provided with there are four metal electrode 6, and four metal electrodes 6 are lived apart four angles of metal substrate 1 Place.
Protective layer 5 in the present embodiment selects silastic-layer.
The signal processing system of flexible touch sensation sensor based on piezoelectric membrane, as shown in figure 4, including processor module 15;
Processor module 15 passes sequentially through signal conversion module 10, signal amplification module 9, piezoelectric sensing module 8, metal electricity Pole 6 and piezoelectric membrane 2 are electrically connected, to obtain the electric signal generated under vibration by piezoelectric membrane 2;
Processor module 15 passes sequentially through 11 electricity of data inputting module 13, data analysis processor 12 and information acquisition module Property connection, the digital signal that is converted into of electric signal to generate to vibration is collected and stores;
Processor module 15 passes sequentially through slave computer 16, core switch 17, ZigBee communication network 18, terminal 19, association Adjust device 20 and host computer 21 and LabView platform 22 to be electrically connected, to collect and the digital signal of storage carry out identification and Processing.
Wherein, processor module is based on CC2530 processor.Terminal and coordinator are based on CC2530F256 master controller. Slave computer 16 is based on 8051 Integrated Development software of IAR Embedded Workbench for.Coordinator passes through serial ports for data It is uploaded to host computer.
Upper and lower surface of the present invention includes the protective layer 5 prepared by silicon rubber, has preferable flexible, bendability, Neng Goufen Distinguish lesser haptic force, while gasket 3 is that protrusion 7 and metal electrode 6 provide space, flexible touch sensation sensor is by external force When effect, flexible body 4 is bent, and by the toothing layer 23 of flexible body 4, piezoelectric membrane 2 is allow to touch sensing at the first time Signal, reduces the hysteresis quality of signal, while improving perceptional function, can accurately identify pressure size and orientation, protrusion 7 When experiencing the pressure of piezoelectric membrane 2, vibration can be constantly generated under the action of elastic force, believe sensing by the vibration of protrusion 7 It number is repeated, after piezoelectric membrane 2 deforms and constantly vibrates, the electric signal of generation is passed through into metal substrate 1 On metal electrode 6 be transmitted to piezoelectric sensing module 8, by signal amplification module 9 by signal amplify and then by signal conversion Module 10 converts electrical signals to digital signal, is handled signal by processor module 16, and processor module 15 passes through After information acquisition module 11 is converted to digital signal by Data Analysis Services module 12 after being acquired signal, pass through data 13 typing processor module 15 of recording module, then stored by data memory module 14, processor module 15 will collect Information be transmitted to slave computer 16, slave computer 16 selects the IAR Embedded Workbench for 8051 with power Integrated Development software, the C/C++ cross-compiler and debugger that IAR Embedded Workbench for 8051 is internally integrated It is professional Embedded Application developing instrument that is most complete and being easiest to introduction in current all C/C++ compiling debugging softwares, User interface is succinct, friendly, intuitive, and slave computer 16 will pass to core switch 17 after the touch-pressure sensation information package of acquisition, so Core switch 17 is wirelessly transmitted to the terminal 19 using CC2530 as microcontroller, terminal 19 by zigBee communication network 18 again Information is acquired, handles, transmits wirelessly programming, receives terminal 19 as the coordinator 20 of microcontroller using CC2530 and transmits Information, coordinator 20 parses data, data is uploaded to by serial ports the programming of host computer 21 again, and host computer 21 leads to LabView platform 22 is crossed to parse data and shown, it is different to create application program from traditional use line of text, LabView creates application program by using icon and figure, then constructs user interface with one group of tool and object, with LabView platform 22 realizes the heat transfer agent that real-time reception is uploaded by slave computer 16 and the journey for passing through virtual instrument graphic software platform Sequence design.
The above-mentioned description to embodiment is for ease of ordinary skill in the art to understand and use the invention.It is ripe The personnel for knowing art technology obviously easily can make various modifications to these embodiments, and general original described herein It ought to use in other embodiments without having to go through creative labor.Therefore, the present invention is not limited to the above embodiments, this field Technical staff's announcement according to the present invention, improvement and modification made without departing from the scope of the present invention all should be in guarantors of the invention Within the scope of shield.

Claims (10)

1. a kind of flexible touch sensation sensor based on piezoelectric membrane, which is characterized in that including metal substrate (1) and from inside to outside It is set in turn in the piezoelectric membrane (2), flexible body (4) and protective layer (5) on metal substrate two sides, the two sides of metal substrate (1) is equal It is provided with metal electrode (6) and protrusion (7).
2. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that the sensor It further include gasket (8), the gasket (8) is set between the flexible body (4) on metal substrate (1) two sides, and is located at Metal Substrate The outside of plate (1) and piezoelectric membrane (2), for providing space for metal electrode (6) and raised (7).
3. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 2, which is characterized in that the pad There are two piece (3) is set, it is set to the outside on two opposite sides of metal substrate (1) and piezoelectric membrane (2).
4. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that described is soft Property body (4) be equipped with dentalation layer (23), described dentalation layer (23) setting is in flexible body (4) and piezoelectric membrane (2) Contact position.
5. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 4, which is characterized in that the tooth Shape structure sheaf (23) is made of the protrusion for the taper being arranged in array, and the height of dentalation layer (23) is less than flexible body (4) Highly, the spacing of the tapered protrusion of dentalation layer (23) is less than a quarter of dentalation layer (23) length, is greater than dentation / 20th of structure sheaf (23) length.
6. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that described is convex Playing (7) is elastic bumps, is equipped with multiple.
7. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 6, which is characterized in that described is more A protrusion (7) is regularly distributed at the center on metal substrate (1) two sides.
8. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 7, which is characterized in that metal substrate (1) every face is set there are four raised (7), is evenly distributed along the periphery around metal substrate (1) central point.
9. a kind of flexible touch sensation sensor based on piezoelectric membrane according to claim 1, which is characterized in that the gold The two sides for belonging to substrate (1) is all provided with there are four metal electrode (6), four angles of four metal electrodes (6) separations metal substrate (1) Place.
10. the signal processing system of the flexible touch sensation sensor based on piezoelectric membrane, feature exist as described in claim 1 In, including processor module (15);
The processor module (15) passes sequentially through signal conversion module (10), signal amplification module (9), piezoelectric sensing module (8), metal electrode (6) and piezoelectric membrane (2) are electrically connected, to obtain the telecommunications generated under vibration by piezoelectric membrane (2) Number;
The processor module (15) passes sequentially through data inputting module (13), data analysis processor (12) and information collection Module (11) is electrically connected, and the electric signal to generate to vibration is converted into digital signal and is collected and stores;
The processor module (15) pass sequentially through slave computer (16), core switch (17), ZigBee communication network (18), Terminal (19), coordinator (20) and host computer (21) and LabView platform (22) are electrically connected, to the number collected and stored Word signal is identified and is handled.
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CN114324034A (en) * 2021-12-13 2022-04-12 华南农业大学 Prawn shelling qualification rate detection device based on multi-touch identification
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