CN112710994A - Intersection-based calibrating device and method for Schum imaging system - Google Patents
Intersection-based calibrating device and method for Schum imaging system Download PDFInfo
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- CN112710994A CN112710994A CN202011472021.5A CN202011472021A CN112710994A CN 112710994 A CN112710994 A CN 112710994A CN 202011472021 A CN202011472021 A CN 202011472021A CN 112710994 A CN112710994 A CN 112710994A
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Abstract
The invention discloses a device and a method for calibrating a Schlemm imaging system based on a cross point, which relate to the technical field of measurement and comprise a calibration object, a two-dimensional workbench, a Schlemm imaging system, a positioning mechanism and a computer. The calibration object is fixed on the two-dimensional workbench and can move along with the two-dimensional workbench. The Schlemm imaging system comprises a lens, a CCD device and a line laser light source, and is positioned on the positioning mechanism and fixed. The calibration object has two intersecting planes, and the intersection line of the two intersecting planes is opposite to the Schlemm imaging system. The computer is connected to the two-dimensional table and to the Sam imaging system. The calibration object of the invention has two intersected planes, the intersection point of straight lines formed on the two planes by line laser is used as a space point, and the displacement method is adopted to calibrate the Schlemm imaging system, so that the calibration object has the advantages of simple calibration object, easy manufacture, high calculation precision of space point coordinates, no deformation influence and the like, and is suitable for the calibration of any type of Schlemm imaging systems.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a device and a method for calibrating a Schlemm imaging system based on a cross point.
Background
The contour measurement plays an important role in the industrial manufacturing process, is widely applied to the fields of optical precision engineering, aerospace, robots, chip manufacturing, automobile manufacturing, underwater detection and the like, and becomes an essential link for function realization, equipment data acquisition, part data acquisition, precision analysis, quality detection and the like in more and more industrial application fields.
With higher and higher manufacturing accuracy, non-contact profile measurement is becoming the mainstream trend. Among them, the samm imaging system based on the line structured light method gradually becomes a hot spot. The method has the outstanding advantages of non-contact, high precision, high speed, wide applicability and the like, and becomes the mainstream trend of contour measurement.
The current lamb imaging systems can be divided into two types according to different optical imaging principles: one is a hamm imaging system based on a telecentric light path, which can ensure that the imaging size of a target is basically unchanged in a full-scale range without calibration and positioning, but the lens size is long, which causes a large measuring head volume, inconvenient use and high cost. The other type is a Sasa-type imaging-based Sam imaging system, the extension lines of the spatial positions of the laser, the receiving mirror and the photoelectric device are intersected at a spatial point, transverse focusing can be achieved, the measuring accuracy is high, the measuring head is small in size, strong in practicability and low in cost, and the Sam imaging system becomes a leading mode of development of the Sam imaging system. However, the non-linearity of this type of samm imaging system over the full range is very severe, requiring full range calibration and non-linearity correction.
The existing calibrating method of the Schlemm imaging system can be divided into three types:
(1) a plane method: and adopting a planar chessboard pattern calibration plate and utilizing Zhangyingyou algorithm to calibrate. The method is simple and easy to implement and is widely used. However, the Zhangyingyou algorithm does not consider the optical particularity of the Sasa-type imaging, and the calibration algorithm has large residual error, so the calibration precision is low.
(2) A physical method: and a real object standard part with known size is adopted for calibration, so that the deviation of the contour algorithm can be directly calibrated. However, the number of contour feature points of the real object standard part is limited, the processing difficulty is high, and the whole measuring area cannot be covered.
(3) Displacement method: a calibration object with a specific shape is manufactured, the whole measuring area range is covered by displacement, and the displacement of the calibration object is measured by a high-precision displacement sensor. The method is simple and easy to implement, high in precision and wide in range, and has the greatest development prospect. However, the existing displacement calibration method adopts a spherical calibration object, and utilizes the sphere center as a space point for calibration, but the manufacturing difficulty of the spherical contour is large, the manufacturing error is directly introduced into the calibration process, and the calibration error is also directly generated by the circle center measurement error at different positions, so that the measurement accuracy of the Sanm imaging system is reduced.
Accordingly, those skilled in the art have endeavored to develop a cross-point based calibration apparatus and method for a lamb imaging system to calibrate the same.
Disclosure of Invention
In view of the above-mentioned defects of the prior art, the technical problem to be solved by the present invention is how to improve the calibration precision and the working efficiency, and how to simplify the real object calibration object.
In order to achieve the aim, the invention provides a calibrating device of a Schlemm imaging system based on a cross point, which comprises a calibrating object, a two-dimensional workbench, the Schlemm imaging system, a positioning mechanism and a computer; the calibration object is fixed on the two-dimensional workbench and can move along with the two-dimensional workbench; the positioning mechanism is arranged on the upper portion of the positioning mechanism, the positioning mechanism is fixed on the upper portion of the positioning mechanism, the calibration object is provided with a first plane and a second plane which are intersected, and the intersection line of the first plane and the second plane is opposite to the positioning mechanism; the computer is connected with the two-dimensional workbench; the computer is connected with the Sam imaging system;
the Schlemm imaging system comprises a lens, a CCD device and a linear laser light source;
the two-dimensional workbench is configured to receive a control command sent by the computer and translate in a first direction and a second direction according to the control command, and simultaneously output a first displacement amount in the first direction as a first displacement reference and a second displacement amount in the second direction as a second displacement reference; the first direction is orthogonal to the second direction to form a moving plane of the two-dimensional workbench;
the line laser light source is configured to project laser light to the first plane and the second plane on the calibration object, a first straight line stripe is formed on the first surface, a second straight line stripe is formed on the second surface, and the first straight line stripe and the second straight line stripe are intersected to generate a spatial intersection point;
the computer is configured to send a control command to the two-dimensional work table to control the two-dimensional work table to move the calibration objects together, so that the spatial intersection point moves in the whole measurement area of the Schlemm imaging system;
the computer is further configured to read the first displacement amount and the second displacement amount of the two-dimensional table, and read coordinate values of the spatial intersection.
Further, the included angle between the first plane and the second plane is between 30 degrees and 150 degrees.
Further, the two-dimensional workbench comprises a two-dimensional guide rail system with a built-in precise grating sensor.
Furthermore, the measurement precision of the precise grating sensor is 3-5 times higher than the required calibration precision.
Furthermore, a precise two-dimensional adjusting mechanism is arranged in the positioning mechanism.
Further, the precise two-dimensional adjusting mechanism is configured to drive the lamb imaging system to move, so that a plane where line laser light emitted by the line laser light source is located is parallel to or intersects with the moving plane of the two-dimensional workbench at an acute angle.
The invention also provides a calibration method of the lamb imaging system based on the cross point, which comprises the following steps:
and 7, sending the first calibration deviation value and the second calibration deviation value into the Schlemm imaging system and storing the values as a calibration basis during actual contour measurement.
Further, in step 2, a single-pixel-level edge extraction algorithm is adopted to obtain a first original contour data point of the first contour image and a second original contour data point of the second contour image.
Further, the number of data points removed from the first original contour data points in step 3 is not more than 10% of the total number of first original contour data points.
Further, the number of data points removed from the second original contour data points in step 3 is not more than 10% of the total number of second original contour data points.
Compared with the prior art, the beneficial technical effects of the invention comprise:
(1) the calibrating device and method of the Samm imaging system adopt the calibrating object with two intersecting planes, so that a space point can be formed, the displacement method calibration of the whole measuring area of the Samm imaging system is realized, the calibration range is 100 percent covered, the interval of the calibration point is adjustable, and the maximal adaptability and flexibility are realized.
(2) The calibration space point adopted by the calibration system and the calibration method of the Samm imaging system are obtained by two crossed straight line profiles through a fitting technology, the influence of lens distortion can be effectively overcome, the left and right fitting precision is realized, and the optimal calibration precision can be further obtained.
(3) The calibration object adopted by the calibration system and method of the invention is simple and easy to implement, has low manufacturing cost, no strict precision constraint, low operation cost and good universality, and can be suitable for the calibration of any Schlemm imaging system.
The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, the features and the effects of the present invention.
Drawings
FIG. 1 is a schematic diagram of a calibration apparatus according to a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of a preferred embodiment of a Samm imaging system;
FIG. 3 is a schematic view of a type of calibration object according to a preferred embodiment of the present invention;
FIG. 4 is a schematic view of another type of calibration object in accordance with a preferred embodiment of the present invention;
FIG. 5 is a calibration object image obtained by the Sam imaging system of a preferred embodiment of the present invention;
FIG. 6 is a contour line extracted by the Samm imaging system in accordance with a preferred embodiment of the present invention;
FIG. 7 is a schematic diagram of contour fitting lines and intersections in accordance with a preferred embodiment of the present invention;
FIG. 8 shows the results of fitting straight lines and intersections to the profile according to a preferred embodiment of the present invention.
Detailed Description
The technical contents of the preferred embodiments of the present invention will be more clearly and easily understood by referring to the drawings attached to the specification. The present invention may be embodied in many different forms of embodiments and the scope of the invention is not limited to the embodiments set forth herein.
In the drawings, structurally identical elements are represented by like reference numerals, and structurally or functionally similar elements are represented by like reference numerals throughout the several views. The size and thickness of each component shown in the drawings are arbitrarily illustrated, and the present invention is not limited to the size and thickness of each component. The thickness of the components may be exaggerated where appropriate in the figures to improve clarity.
As shown in fig. 1 and fig. 2, a schematic diagram of a calibration apparatus of a samm imaging system according to an embodiment of the present invention includes a calibration object 1, a two-dimensional table 2, a samm imaging system 3, a positioning mechanism 4, and a computer 5. The lamb imaging system 3 comprises a lens 7, a CCD device 8 and a line laser light source 6.
The calibration object 1 is fixed on the two-dimensional workbench 2 and can move along with the two-dimensional workbench 2, the Schlemm imaging system 3 is positioned on the positioning mechanism 4 and is fixed, the calibration object 1 is provided with a first plane and a second plane which are intersected, and the intersection line of the first plane and the second plane is opposite to the Schlemm imaging system 3.
The two-dimensional workbench 2 is connected with the computer 5, receives a control command sent by the computer 5, translates in a first direction and a second direction according to the control command, and simultaneously outputs a first displacement in the first direction as a first displacement reference and a second displacement in the second direction as a second displacement reference; the first direction is orthogonal to the second direction, and constitutes a movement plane of the two-dimensional table 2.
The Schlemm imaging system 3 is arranged on a positioning mechanism 4 at one side and is reliably fixed, the line laser light source 6 projects laser to a first plane and a second plane on the calibration object 1, a first straight line stripe is formed on the first plane, a second straight line stripe is formed on the second plane, and the first straight line stripe and the second straight line stripe are intersected to generate a spatial intersection point. When the computer 5 sends a control command to the two-dimensional table 2 to control the two-dimensional table 2 to drive the calibration object 1 to move together, the spatial intersection point is enabled to move in the whole measurement area of the Schlemm imaging system 3. Meanwhile, the computer also reads the first displacement and the second displacement of the two-dimensional workbench 2, reads the coordinate value of the spatial intersection point, and further realizes the full-range calibration and calibration of the Schlemm imaging system 3.
In one embodiment of the invention, the calibration object 1 is made of a material having diffuse reflection characteristics in order to guarantee the highest calibration accuracy. For example, white ceramic material or high-stability white organic glass is adopted. As shown in fig. 3 and 4, the calibration object 1 can be made into various regular shapes, such as triangle, rectangle, polygon, and requires that the included angle between the two intersecting first and second planes facing the samm imaging system 3 is between 30 ° and 150 °, preferably between 90 ° and 120 °, that is, quadrangle, pentagon, and hexagon.
In an embodiment of the invention, the two-dimensional workbench 2 is manufactured by a two-dimensional guide rail system with a built-in precise grating sensor, and the measurement precision of the precise grating is preferably 3-5 times higher than the required calibration precision. For example, if the measurement accuracy of the Schlemm imaging system is required to be ± 0.01mm, the measurement accuracy of the precise grating sensor built in the two-dimensional table 2 should preferably not be lower than ± 0.01 mm. The two-dimensional table 2 can be implemented using known techniques.
In one embodiment of the present invention, the positioning mechanism 4 is used to position and fix the samm imaging system 3, so as to ensure that the plane of the line laser emitted by the samm imaging system 3 is parallel to the moving plane of the two-dimensional worktable 2, and simultaneously ensure that the direction of the center line of the line laser of the samm imaging system 4 is parallel to the longitudinal moving direction of the two-dimensional worktable 2. In the preferred embodiment, the positioning mechanism 4 is internally provided with a precise adjusting mechanism, so that the plane of the line laser emitted by the Schlemm imaging system 4 is parallel to or intersected with the moving plane of the two-dimensional workbench 2 to form an acute angle. The positioning means 4 can be realized with the prior art.
By utilizing the device, the invention also provides a calibration method of the Schum imaging system based on the cross point, which comprises the following steps:
and 7, sending the first calibration deviation value and the second calibration deviation value into the Schlemm imaging system and storing the values as a calibration basis during actual contour measurement.
In step 2, a single-pixel-level edge extraction algorithm is adopted to obtain a first original contour data point of the first contour image and a second original contour data point of the second contour image.
The number of data points removed from the first raw contour data points in step 3 is no more than 10% of the total number of first raw contour data points.
The number of data points removed from the second original contour data points in step 3 is no more than 10% of the total number of second original contour data points.
In an embodiment of the invention, the method for calibrating the Samm imaging system specifically comprises the following steps:
(1) fixing the calibration object 1 on the two-dimensional workbench 2, acquiring the outline image of the calibration object 1 by the aid of the Schlemm imaging system 3, synchronously reading displacement values Mx and My of the two-dimensional workbench 2 in two dimensions as shown in fig. 5, and sending the displacement values Mx and My into the computer 5 for processing;
(2) acquiring data points of two straight line contour lines by adopting a single-pixel-level edge extraction algorithm; as shown in fig. 6, the data points of the left straight line contour are L0, L1, L2, …, and L12, respectively, and the data points of the right straight line contour are R0, R1, R2, …, and R10, respectively;
(3) removing data points near the intersection point of the two straight line contour lines, wherein the removing amount is preferably not more than 10% of the total data points, so that the influence of the contour of the transition section on the straight line fitting precision is reduced; assuming that the number of data points of the left and right straight line profiles is 12 and 10 respectively in the previous example, 1 data point can be removed, namely L0 and R0 points are removed, so that the data points respectively retained by the left and right straight lines are L1, L2, …, L12 and R1, R2, … and R10 respectively;
(4) respectively carrying out least square line fitting on the left and right linear profiles by using the residual profile data points to obtain corresponding fitted linear equations; for the previous example, fitting with the remaining L1, …, L12 and R1, …, R10 respectively, to obtain two left and right fitted linear equations, which are: y ═ ax + b and y ═ cx + d, as shown in fig. 7; the schematic diagram of the fitted straight line in the profile image is shown in fig. 8.
(5) Calculating the coordinates of the intersection points of the left fitted straight line and the right fitted straight line by using the obtained fitted straight lines; for the previous example, the intersection coordinates are: x0 ═ d-b)/(a-c), y0 ═ ad-bc)/(a-c);
(6) respectively subtracting the calculated coordinate values (x0, y0) of the intersection point from the displacement values (Mx, My) of the two-dimensional workbench to obtain calibration deviation values; namely: Δ x-x 0-Mx, Δ y-y 0-My;
(7) and sending the deviation values delta x and delta y into a Schlemm imaging system and storing the deviation values delta x and delta y, wherein the deviation values delta y can be used as a calibration basis in actual profile measurement.
The calibration device and the calibration method of the Samm imaging system adopt the calibration object with two intersecting planes, thereby forming a space point to realize the displacement method calibration of the whole measurement area of the Samm imaging system, the calibration range realizes 100 percent coverage, the interval of the calibration point is adjustable, and the calibration device and the calibration method have the maximum adaptability and flexibility; the two crossed straight line profiles can effectively overcome the influence of lens distortion through a fitting technology, have left and right fitting precision, further obtain the optimal calibration precision, and are suitable for the calibration of any Schlemm imaging system.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (10)
1. A calibrating device of a Schum imaging system based on a cross point is characterized by comprising a calibrating object, a two-dimensional workbench, a Schum imaging system, a positioning mechanism and a computer; the calibration object is fixed on the two-dimensional workbench and can move along with the two-dimensional workbench; the positioning mechanism is arranged on the upper portion of the positioning mechanism, the positioning mechanism is fixed on the upper portion of the positioning mechanism, the calibration object is provided with a first plane and a second plane which are intersected, and the intersection line of the first plane and the second plane is opposite to the positioning mechanism; the computer is connected with the two-dimensional workbench; the computer is connected with the Sam imaging system;
the Schlemm imaging system comprises a lens, a CCD device and a linear laser light source;
the two-dimensional workbench is configured to receive a control command sent by the computer and translate in a first direction and a second direction according to the control command, and simultaneously output a first displacement amount in the first direction as a first displacement reference and a second displacement amount in the second direction as a second displacement reference; the first direction is orthogonal to the second direction to form a moving plane of the two-dimensional workbench;
the line laser light source is configured to project laser light to the first plane and the second plane on the calibration object, a first straight line stripe is formed on the first surface, a second straight line stripe is formed on the second surface, and the first straight line stripe and the second straight line stripe are intersected to generate a spatial intersection point;
the computer is configured to send a control command to the two-dimensional work table to control the two-dimensional work table to move the calibration objects together, so that the spatial intersection point moves in the whole measurement area of the Schlemm imaging system;
the computer is further configured to read the first displacement amount and the second displacement amount of the two-dimensional table, and read coordinate values of the spatial intersection.
2. The cross-point based kahm imaging system calibration apparatus of claim 1, wherein the angle between the first plane and the second plane is between 30 ° and 150 °.
3. The cross-point based samm imaging system calibration apparatus of claim 1, wherein said two-dimensional stage comprises a two-dimensional rail system with built-in precision grating sensors.
4. The cross-point based kahm imaging system calibration apparatus of claim 3, wherein the measurement accuracy of the precision grating sensor is 3 to 5 times higher than the required calibration accuracy.
5. The cross-point based kahm imaging system calibration device of claim 1, wherein the positioning mechanism incorporates a precision two-dimensional adjustment mechanism.
6. The cross-point based samm imaging system calibration apparatus of claim 5, wherein said precision two-dimensional adjustment mechanism is configured to move said samm imaging system such that a plane of a line laser emitted by said line laser light source is parallel to or intersects said plane of movement of said two-dimensional stage at an acute angle.
7. A method for calibrating a Schum imaging system based on a cross point is characterized by comprising the following steps:
step 1, fixing a calibration object on a two-dimensional workbench, wherein a linear laser light source projects laser to a first plane and a second plane which are intersected on the calibration object, a first linear stripe is formed on the first surface, and a second linear stripe is formed on the second surface; acquiring a first contour image of the first straight stripe and a second contour image of the second straight stripe by using a Simm imaging system; reading a first displacement value of the two-dimensional workbench in a first direction and a second displacement value of the two-dimensional workbench in a second direction by the computer; the first direction is orthogonal to the second direction to form a moving plane of the two-dimensional workbench;
step 2, acquiring a first original contour data point of the first contour image and a second original contour data point of the second contour image;
step 3, eliminating data points near the intersection point of the first contour image and the second contour image from the first original contour data points to obtain first contour data points to be processed; removing data points near the intersection point of the first contour image and the second contour image from second original contour data points to obtain second contour data points to be processed;
step 4, performing least square straight line fitting on the first contour image by using the first contour to-be-processed data point to obtain a first fitted straight line equation; performing least square straight line fitting on the second contour image by using the second contour data point to be processed to obtain a second fitted straight line equation;
step 5, directly calculating a theoretical two-dimensional coordinate value of the intersection point of the first contour image and the second contour image by using the first fitted linear equation and the second fitted linear equation; the theoretical two-dimensional coordinate value comprises a first theoretical value and a second theoretical value;
step 6, subtracting the first displacement value of the two-dimensional workbench from the first theoretical value to obtain a first calibration deviation value in the first direction, and subtracting the second displacement value of the two-dimensional workbench from the second theoretical value to obtain a second calibration deviation value in the second direction;
and 7, sending the first calibration deviation value and the second calibration deviation value into the Schlemm imaging system and storing the first calibration deviation value and the second calibration deviation value as calibration space point coordinates to be used as a calibration basis in actual contour measurement.
8. The method for calibrating a cross-point based samm imaging system as recited in claim 7 wherein said step 2 uses a single pixel level edge extraction algorithm to obtain first raw contour data points of said first contour image and second raw contour data points of said second contour image.
9. The method for calibrating a cross-point based samm imaging system as described in claim 7 wherein said number of data points removed from said first raw contour data points in said step 3 is no more than 10% of the total number of said first raw contour data points.
10. The method for calibrating a cross-point based samm imaging system as described in claim 7, wherein said number of data points removed from said second raw contour data points in said step 3 is no more than 10% of the total number of said second raw contour data points.
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Application publication date: 20210427 |