CN112702035A - High-frequency large-broadband low-insertion-loss high-performance surface acoustic wave resonator and manufacturing method thereof - Google Patents
High-frequency large-broadband low-insertion-loss high-performance surface acoustic wave resonator and manufacturing method thereof Download PDFInfo
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- CN112702035A CN112702035A CN202011508307.4A CN202011508307A CN112702035A CN 112702035 A CN112702035 A CN 112702035A CN 202011508307 A CN202011508307 A CN 202011508307A CN 112702035 A CN112702035 A CN 112702035A
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 27
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- 229910052737 gold Inorganic materials 0.000 claims description 6
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Images
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/0259—Characteristics of substrate, e.g. cutting angles of langasite substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
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Priority Applications (1)
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CN202011508307.4A CN112702035A (en) | 2020-12-18 | 2020-12-18 | High-frequency large-broadband low-insertion-loss high-performance surface acoustic wave resonator and manufacturing method thereof |
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CN202011508307.4A CN112702035A (en) | 2020-12-18 | 2020-12-18 | High-frequency large-broadband low-insertion-loss high-performance surface acoustic wave resonator and manufacturing method thereof |
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CN112702035A true CN112702035A (en) | 2021-04-23 |
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CN202011508307.4A Pending CN112702035A (en) | 2020-12-18 | 2020-12-18 | High-frequency large-broadband low-insertion-loss high-performance surface acoustic wave resonator and manufacturing method thereof |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104101451A (en) * | 2014-07-17 | 2014-10-15 | 电子科技大学 | Acoustic surface wave sensor with double sensitive sources |
CN106840056A (en) * | 2016-12-28 | 2017-06-13 | 电子科技大学 | A kind of alliteration surface wave strain transducer and its method for designing |
CN111587534A (en) * | 2018-01-12 | 2020-08-25 | 株式会社村田制作所 | Elastic wave device, multiplexer, high-frequency front-end circuit, and communication device |
-
2020
- 2020-12-18 CN CN202011508307.4A patent/CN112702035A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104101451A (en) * | 2014-07-17 | 2014-10-15 | 电子科技大学 | Acoustic surface wave sensor with double sensitive sources |
CN106840056A (en) * | 2016-12-28 | 2017-06-13 | 电子科技大学 | A kind of alliteration surface wave strain transducer and its method for designing |
CN111587534A (en) * | 2018-01-12 | 2020-08-25 | 株式会社村田制作所 | Elastic wave device, multiplexer, high-frequency front-end circuit, and communication device |
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Address after: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangna Technology Development Co.,Ltd. Address before: 510700 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong guangnaixin Technology Co.,Ltd. |
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Effective date of registration: 20210816 Address after: 510535 Room 201, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangdong Guangdong Hong Kong Macao Dawan District National Nanotechnology Innovation Research Institute Address before: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong Guangna Technology Development Co.,Ltd. |
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Effective date of registration: 20210913 Address after: 510700 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong guangnaixin Technology Co.,Ltd. Address before: 510535 Room 201, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong Guangdong Guangdong Hong Kong Macao Dawan District National Nanotechnology Innovation Research Institute |