CN112697583A - Pressure test fixture and pressure test device - Google Patents
Pressure test fixture and pressure test device Download PDFInfo
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- CN112697583A CN112697583A CN202011383633.7A CN202011383633A CN112697583A CN 112697583 A CN112697583 A CN 112697583A CN 202011383633 A CN202011383633 A CN 202011383633A CN 112697583 A CN112697583 A CN 112697583A
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- 238000012360 testing method Methods 0.000 title claims abstract description 82
- 238000006073 displacement reaction Methods 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000003139 buffering effect Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 abstract description 6
- 230000006835 compression Effects 0.000 abstract description 4
- 238000007906 compression Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000001105 regulatory effect Effects 0.000 abstract description 4
- 238000009530 blood pressure measurement Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The application relates to the technical field of pressure measurement, and discloses a pressure test tool and pressure test device, connects the pressure test tool on pressure test device's test head through first installation axle, regulating part regulation fly leaf with distance between the fixed plate makes the fly leaf push pressure sensor and slowly be close to the test head, return to zero displacement sensor when pressure sensor just contacts the test head. And continuously adjusting the movable plate, stopping rotating when the reading of the displacement sensor shows the required stroke, compressing a set value by the air bag on the test head, and recording the reading of the pressure sensing instrument at the moment. The compression stroke of the pressure air bag can be seen during measurement, the air bag of the test head is ensured to be bottomed, and therefore the measured pressure is accurate.
Description
Technical Field
The invention relates to the technical field of pressure measurement, in particular to a pressure test fixture and a pressure test device.
Background
At present, during the semiconductor subsequent testing process, the testing pressure provided by a machine to a chip is a very important parameter, but the current jig for measuring the testing pressure of the chip has the following defects: the sizes of the products are different, and the pressure testing jig part needs to be replaced when the pressure is measured; when the pressure is tested, the pressing stroke of the machine air bag cannot be seen, and whether the machine air bag touches the bottom or not cannot be ensured; the test is heavy, the test is required to be used together with a computer, and the test takes a long time.
Disclosure of Invention
In view of the above-mentioned drawbacks and deficiencies of the prior art, it is desirable to provide a pressure testing fixture and a pressure testing apparatus.
In a first aspect, the present invention provides a pressure testing fixture, including: the fixing plate penetrates through a plurality of first mounting shafts; the movable plate and the fixed plate are arranged at intervals, and the movable plate is positioned on the inner side of a region defined by the first mounting shafts; an adjusting member connected to the movable plate through the fixed plate for adjusting a distance between the movable plate and the fixed plate; the pressure sensor is mounted on one side of the movable plate, which is far away from the fixed plate; and the displacement sensor is arranged on the fixed plate, and the detection end of the displacement sensor is connected with the movable plate.
In one embodiment, the adjusting member comprises a micro screw rod, the micro screw rod penetrates through the fixed plate and is connected with the movable plate, the micro screw rod is in threaded connection with the fixed plate, and the micro screw rod is in rotation anti-disengagement fit with the movable plate.
In one embodiment, a nut is arranged on the fixing plate, and the fixing plate is in threaded connection with the micro lead screw through the nut.
In one embodiment, the pressure testing jig further includes a plurality of second mounting shafts, the fixing plate is provided with a plurality of bar holes, and the plurality of second mounting shafts pass through the plurality of bar holes.
In one embodiment, the pressure test fixture further comprises a guide shaft and a guide shaft sleeve, the guide shaft is connected to the fixed plate and penetrates through the movable plate, and the guide shaft sleeve is arranged at a position of the movable plate, which is penetrated by the guide shaft.
In one embodiment, a return spring is sleeved on a part of the guide shaft, which penetrates out of the movable plate.
In one embodiment, the first mounting shafts include four first mounting shafts, which pass through four corners of the fixed plate and the movable plate, respectively; the second mounting shafts comprise four second mounting shafts, and the four second mounting shafts are respectively arranged on the inner side of an area defined by the four first mounting shafts; the guide shafts comprise four guide shafts, and the four guide shafts are respectively arranged on the inner side of an area defined by the four second mounting shafts.
In one embodiment, a buffer structure is arranged on one side of the pressure sensor, which is far away from the movable plate.
In one embodiment, the fixing plate is provided with a notch, and the displacement sensor is mounted at the notch.
In a second aspect, the present invention provides a pressure testing apparatus, which includes a testing head and the pressure testing fixture described in the first aspect.
Compared with the prior art, the invention has the beneficial effects that:
the invention provides a pressure test fixture and a pressure test device, wherein the pressure test fixture is connected to the pressure test device through a first mounting shaft, and a regulating part regulates the distance between a movable plate and a fixed plate, so that the movable plate pushes a pressure sensor to slowly approach a test head, and the displacement sensor returns to zero when the pressure sensor just contacts the test head. And continuously adjusting the movable plate, stopping rotating when the reading of the displacement sensor shows the required stroke, compressing a set value by the air bag on the test head, and recording the reading of the pressure sensing instrument at the moment. The compression stroke of the pressure air bag can be seen during measurement, the air bag of the test head is ensured to be bottomed, and therefore the measured pressure is accurate.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
fig. 1 is a perspective view illustrating a viewing angle of a pressure testing jig according to an embodiment of the present disclosure;
fig. 2 is a perspective view illustrating another view of a pressure testing fixture according to an embodiment of the present disclosure.
In the figure: 1-a first mounting shaft, 2-a fixed plate, 3-a movable plate, 4-a micro screw rod, 5-a pressure sensor, 6-a displacement sensor, 7-a nut, 8-a guide shaft, 9-a guide shaft sleeve, 10-a return spring, 11-a buffer structure, 12-a strip hole, 13-a notch, 14-a second mounting shaft.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Fig. 1 and fig. 2 show a pressure testing jig provided by the present application.
Pressure test tool includes: the fixing plate 2 penetrates through the plurality of first mounting shafts 1; a movable plate 3, the movable plate 3 and the fixed plate 2 are arranged at intervals, and the movable plate 3 is located inside a region enclosed by the plurality of first mounting shafts 1; an adjusting member connected to the movable plate 3 through the fixed plate 2 for adjusting a distance between the movable plate 3 and the fixed plate 2; the pressure sensor 5 is mounted on one side, away from the fixed plate 2, of the movable plate 3; and the displacement sensor 6 is arranged on the fixed plate 2, and the detection end of the displacement sensor 6 faces the movable plate 3 and is connected with the movable plate 3.
Connect the pressure test tool on pressure test device's test head through first installation axle 1, the regulating part adjust the fly leaf 3 with the distance between the fixed plate 2 makes fly leaf 3 push away pressure sensor 5 and slowly be close to the test head, and zero displacement sensor 6 returns when pressure sensor 5 just contacted the test head. And continuously adjusting the movable plate 3, stopping rotating when the reading of the displacement sensor 6 shows the required stroke, compressing the set value of the air bag on the test head at the moment, and recording the reading of the pressure sensing instrument at the moment. The compression stroke of the pressure air bag can be seen during measurement, the air bag of the test head is ensured to be bottomed, and therefore the measured pressure is accurate.
In this embodiment, the adjusting member may include a micro screw rod 4, the micro screw rod 4 penetrates through the fixed plate 2 to be connected with the movable plate 3, the micro screw rod 4 is in threaded connection with the fixed plate 2, and the micro screw rod 4 is in rotation anti-disengagement fit with the movable plate 3.
In other embodiments, the adjustment member may also comprise a piston mechanism, for example a sleeve of the piston mechanism is connected to the fixed plate 2, and a piston rod of the piston mechanism is connected to the movable plate 3 through the fixed plate 2. The adjusting part can also comprise a clamping groove type rotating button, one side of the movable plate 3, which is close to the fixed plate 2, is arranged on a clamping block corresponding to the clamping groove, one clamping groove is rotated, and the movable plate 3 is pressed for a certain distance.
In this embodiment, a nut 7 is disposed on the fixing plate 2, and the fixing plate 2 is in threaded connection with the micro lead screw 4 through the nut 7. Every time the micro screw rod 4 rotates for one circle, the movable plate 3 is pushed to be close to one point to the testing head of the pressure testing device, and a manual button can be arranged on the micro screw rod 4, so that the operation of a tester is facilitated.
On the basis of the above embodiment, the pressure test fixture further includes a plurality of second mounting shafts 14, a plurality of bar holes 12 are provided on the fixing plate 2, and the plurality of second mounting shafts 14 pass through the plurality of bar holes 12.
A plurality of second installation axle 14 are used for being connected with the test head, when needs are connected with the test head of equidimension not, adjust second installation axle 14 and pass the position of bar hole 12 realizes adjusting it respectively and is connected with different test heads, can adapt to the test equipment to the test process of different chips.
It should be noted that, after the second mounting shaft 14 passes through the bar-shaped hole 12, the fixing plate and the second mounting shaft 14 are fixed at their relative positions by the snap spring.
On the basis of the above embodiment, the pressure testing jig further includes a guide shaft 8 and a guide shaft sleeve 9, the guide shaft 8 is connected to the fixed plate 2 and penetrates through the movable plate 3, and the guide shaft sleeve 9 is disposed at a position of the movable plate 3 penetrated by the guide shaft 8. The direction of movement of the movable plate 3 is defined by the guide shaft 8 cooperating with the guide sleeve 9.
On the basis of the above embodiment, the part of the guide shaft 8 penetrating through the movable plate 3 is sleeved with a return spring 10. When the micro screw rod 4 is reversely adjusted, the return spring 10 extrudes the movable plate 3 to move reversely to be close to the fixed plate 2.
On the basis of the above embodiment, a buffer structure 11 is disposed on a side of the pressure sensor 5 away from the movable plate 3. So that the pressure sensor 5 is in flexible surface contact with the test head during pressure measurement, preventing the pressure sensor 5 from damaging the surface of the test head.
In order to facilitate the installation of the displacement sensor 6, a notch 13 is arranged on the fixing plate 2, and the displacement sensor 6 is installed at the notch 13.
Specifically, the first mounting shafts 1 include four first mounting shafts 1, and the four first mounting shafts 1 respectively penetrate four corners of the fixed plate 2 and the movable plate 3; the second mounting shafts 14 comprise four second mounting shafts, and the four second mounting shafts are respectively arranged on the inner sides of the areas enclosed by the four first mounting shafts 1; the guide shafts 8 comprise four guide shafts, and the four guide shafts 8 are respectively arranged on the inner side of an area surrounded by the four second mounting shafts 14.
The application also provides a pressure testing device, which comprises a testing head and the pressure testing jig described above.
Connect the pressure test tool on pressure test device's test head through first installation axle 1, the regulating part adjust the fly leaf 3 with the distance between the fixed plate 2 makes fly leaf 3 push away pressure sensor 5 and slowly be close to the test head, and zero displacement sensor 6 returns when pressure sensor 5 just contacted the test head. And continuously adjusting the movable plate 3, stopping rotating when the reading of the displacement sensor 6 shows the required stroke, compressing the set value of the air bag on the test head at the moment, and recording the reading of the pressure sensing instrument at the moment. The compression stroke of the pressure air bag can be seen during measurement, the air bag of the test head is ensured to be bottomed, and therefore the measured pressure is accurate.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the disclosure herein is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of the above features or their equivalents without departing from the spirit of the disclosure. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (10)
1. A pressure test fixture is characterized by comprising:
the fixing plate penetrates through a plurality of first mounting shafts;
the movable plate and the fixed plate are arranged at intervals, and the movable plate is positioned on the inner side of a region defined by the first mounting shafts;
an adjusting member connected to the movable plate through the fixed plate for adjusting a distance between the movable plate and the fixed plate;
the pressure sensor is mounted on one side of the movable plate, which is far away from the fixed plate;
and the displacement sensor is arranged on the fixed plate, and the detection end of the displacement sensor is connected with the movable plate.
2. The pressure testing jig of claim 1, wherein the adjusting member comprises a micro screw rod, the micro screw rod passes through the fixed plate and is connected with the movable plate, the micro screw rod is connected with the fixed plate by a screw thread, and the micro screw rod is in rotation and anti-disengagement fit with the movable plate.
3. The jig for testing pressure of claim 2, wherein a nut is disposed on the fixing plate, and the fixing plate is connected to the micro lead screw through the nut.
4. The jig for testing pressure of any one of claims 1 to 3, further comprising a plurality of second mounting shafts, wherein the fixing plate is provided with a plurality of bar holes, and the plurality of second mounting shafts pass through the plurality of bar holes.
5. The jig for testing pressure of claim 4, further comprising a guiding shaft and a guiding shaft sleeve, wherein the guiding shaft is connected to the fixed plate and passes through the movable plate, and the guiding shaft sleeve is disposed at a position of the movable plate where the guiding shaft passes through.
6. The pressure testing fixture of claim 5, wherein a return spring is sleeved on a portion of the guide shaft penetrating out of the movable plate.
7. The pressure testing jig of claim 6, wherein the first mounting shafts comprise four first mounting shafts, and the four first mounting shafts respectively penetrate through four corners of the fixed plate and the movable plate; the second mounting shafts comprise four second mounting shafts, and the four second mounting shafts are respectively arranged on the inner side of an area defined by the four first mounting shafts; the guide shafts comprise four guide shafts, and the four guide shafts are respectively arranged on the inner side of an area defined by the four second mounting shafts.
8. The pressure testing jig of claim 1, wherein a buffering structure is disposed on a side of the pressure sensor away from the movable plate.
9. The pressure testing jig of claim 1, wherein the fixing plate is provided with a notch, and the displacement sensor is mounted at the notch.
10. A pressure testing apparatus comprising a testing head and the pressure testing jig of any one of claims 1 to 9.
Priority Applications (1)
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CN202011383633.7A CN112697583A (en) | 2020-12-01 | 2020-12-01 | Pressure test fixture and pressure test device |
Applications Claiming Priority (1)
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CN202011383633.7A CN112697583A (en) | 2020-12-01 | 2020-12-01 | Pressure test fixture and pressure test device |
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CN112697583A true CN112697583A (en) | 2021-04-23 |
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CN202011383633.7A Pending CN112697583A (en) | 2020-12-01 | 2020-12-01 | Pressure test fixture and pressure test device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113324850A (en) * | 2021-06-18 | 2021-08-31 | 好维股份有限公司 | Method for testing bending resistance of children toothbrush |
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CN204514588U (en) * | 2015-03-11 | 2015-07-29 | 常州鼎吉能源工程技术有限公司 | Multifunctional mobile testing table |
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CN207019989U (en) * | 2017-03-16 | 2018-02-16 | 山东科技大学 | A kind of general planar material tension, strain and deflection test device |
CN206920253U (en) * | 2017-04-05 | 2018-01-23 | 西安智荣机电科技有限公司 | Mechanical property testing device in a kind of docking operation |
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Application publication date: 20210423 |