CN112695290A - High-reliability intelligent evaporation device - Google Patents

High-reliability intelligent evaporation device Download PDF

Info

Publication number
CN112695290A
CN112695290A CN202110303833.5A CN202110303833A CN112695290A CN 112695290 A CN112695290 A CN 112695290A CN 202110303833 A CN202110303833 A CN 202110303833A CN 112695290 A CN112695290 A CN 112695290A
Authority
CN
China
Prior art keywords
evaporation
vacuum
output end
current
primer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110303833.5A
Other languages
Chinese (zh)
Other versions
CN112695290B (en
Inventor
史延锋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Mengfu Electronic Technology Co ltd
Original Assignee
Suzhou Mengfu Electronic Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Mengfu Electronic Technology Co ltd filed Critical Suzhou Mengfu Electronic Technology Co ltd
Priority to CN202110303833.5A priority Critical patent/CN112695290B/en
Publication of CN112695290A publication Critical patent/CN112695290A/en
Application granted granted Critical
Publication of CN112695290B publication Critical patent/CN112695290B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/36—Successively applying liquids or other fluent materials, e.g. without intermediate treatment
    • B05D1/38—Successively applying liquids or other fluent materials, e.g. without intermediate treatment with intermediate treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a high-reliability intelligent evaporation device. It includes: the device comprises a primer process unit, a primer thickness detection unit, a vacuum evaporation coating machine, a finish process unit, a finish thickness detection unit and a master controller. And the total processing unit acquires the current thickness value of the evaporated film according to the thickness value of the primer layer, the predicted finish paint thickness value and the set total film thickness value and sends the current thickness value of the evaporated film to the evaporation processing unit. The evaporation processing unit drives the vacuum degree control end according to the current vacuum degree so as to enable the vacuum chamber to be in a vacuum state. And driving the control switch to be closed according to the current evaporation time so as to enable the electric heating circuit to heat the evaporation source. According to the invention, the thickness value of the current vacuum evaporation film layer is obtained through the thickness values of the finish paint film and the primer paint film, so that the uniformity of the evaporation film layer is ensured while the total film layer thickness and the film layer performance are ensured. The control information of the vacuum evaporation coating machine is dynamically adjusted to ensure the coating quality, improve the processing efficiency and facilitate the automatic auxiliary production.

Description

High-reliability intelligent evaporation device
Technical Field
The invention relates to a vacuum evaporation coating process in vacuum coating and the application field. The invention particularly relates to a high-reliability intelligent evaporation device.
Background
In the existing vacuum evaporation coating processing, the coating thickness is mainly determined by controlling the processing current and time of a vacuum evaporation coating machine. But the thickness of the finished film of the evaporation coating is difficult to accurately ensure due to the influence of vacuum degree control in the vacuum chamber, heating conversion rate of the evaporation source and purity of the evaporation material. In order to ensure the thickness of the film and other comprehensive properties, the vacuum sputtering coating is often adopted to process the plated part, but the equipment cost investment, the target material cost and the power consumption of the vacuum sputtering coating are high, so that the vacuum sputtering coating is difficult to be generally applied to common plated parts.
Disclosure of Invention
The invention aims to provide a high-reliability intelligent evaporation device, which gives a film thickness tolerance value of vacuum evaporation coating by integrating the thickness values of finish paint and primer paint films, and ensures the uniformity of a coating between coatings while ensuring the total thickness and the performance of the coating. The control information of the vacuum evaporation coating machine can be dynamically adjusted to ensure the coating quality, reduce the processing cost, improve the processing efficiency and facilitate the automatic auxiliary production.
The invention provides a high-reliability intelligent evaporation device, which comprises: the device comprises a primer process unit, a primer thickness detection unit, a vacuum evaporation coating machine, a finish process unit, a finish thickness detection unit and a master controller.
And the primer process unit can output the dried to-be-evaporated piece. And the primer thickness detection unit is arranged at the back of the primer process unit. The primer thickness detection unit is provided with a primer layer thickness output end and can measure and acquire a primer layer thickness value of the dried workpiece to be evaporated. The thickness output end of the primer layer can output the thickness value of the primer layer.
The vacuum evaporation coating machine comprises a machine body, an electric heating circuit, an evaporation source, a workpiece frame and a vacuum evaporation coating controller.
The machine body is provided with a vacuum chamber capable of generating a set vacuum environment. The vacuum chamber has a vacuum control end. The electric heating circuit is connected with a control switch in series. The evaporation source is arranged in the vacuum chamber. The evaporation source is connected with an electric heating circuit and can heat the evaporation material arranged in the evaporation source.
The work piece erects and arranges in vacuum chamber and can assemble and treat the coating by vaporization piece and can treat the coating by vaporization piece heating. The vacuum evaporation controller is provided with a plurality of evaporation data input ends, an evaporation processing unit and a plurality of evaporation control output ends. The evaporation control output end is connected with the vacuum degree control end and the control switch.
And the finish paint process unit is arranged in the subsequent process of the vacuum evaporation coating machine and can output the dried coating piece. And the finish thickness detection unit is arranged at the rear of the UV finish irradiation dryer. The finish paint thickness detection unit is provided with a finish paint thickness output end and can measure and acquire the thickness value of the finish paint layer of the dried plated part. The finish thickness output end can output a finish thickness value.
The master controller is provided with a plurality of master control input ends, a master processing unit and a plurality of master control output ends. The master control input end of the device is connected with the thickness output end of the primer layer and can receive the thickness value of the primer layer. The master control input end is connected with the finish thickness output end and can receive the thickness value of the surface paint layer. The master control output end is connected with the evaporation data input end.
The overall processing unit is capable of receiving a plurality of historical thickness values of the topcoat layer. And obtaining a predicted finish paint thickness value according to the historical thickness values of the finish paint layers. The total processing unit can acquire the current thickness value of the evaporated film according to the primer layer thickness value, the predicted finish paint thickness value and the locally pre-stored set total film thickness value. The total processing unit can output the thickness value of the current evaporated film to an evaporation data input end.
And the evaporation processing unit acquires the current vacuum degree and the current evaporation time according to the current evaporation film thickness value and the pre-stored corresponding information of the vacuum degree and the evaporation time. The evaporation processing unit outputs the current vacuum degree to an evaporation control output end. And the evaporation control output end drives the vacuum control end according to the current vacuum degree.
The evaporation processing unit outputs the current evaporation time to an evaporation control output end. The evaporation control output end drives the control switch to be closed according to the current evaporation time so that the electric heating circuit heats the evaporation source.
In another embodiment of the highly reliable intelligent vapor deposition device of the present invention, the highly reliable intelligent vapor deposition device further includes:
and the vacuum detection sensors are arranged in the vacuum chamber and can acquire the acquisition vacuum degree value in the current vacuum chamber. The vacuum detection sensor has a vacuum data output. The vacuum data output end can output the collected vacuum degree value.
And the temperature sensors are arranged in the vacuum chamber and can acquire the acquired temperature values in the vacuum chamber. The temperature sensor has a temperature data output. The temperature data output end can output the collected temperature value.
The evaporation data input end of one vacuum evaporation controller is connected with the vacuum data output end and the temperature data output end.
In another embodiment of the highly reliable intelligent vapor deposition device, the vapor deposition processing unit drives the vacuum detection sensor to start according to the current vacuum degree. If the collected vacuum degree value is equal to the current vacuum degree value, the evaporation processing unit outputs the current evaporation time to the evaporation control output end.
The evaporation treatment unit drives the temperature sensor to start according to the current evaporation time. And if the collected temperature value is equal to the current temperature value, the evaporation processing unit times according to the current evaporation time, and acquires turn-off information after the time is over.
The vapor deposition processing unit outputs the turn-off information to a vapor deposition control output end.
The evaporation control output end controls the switch to be switched off according to the switching-off information so that the electric heating circuit stops heating the evaporation source. And controlling the vacuum degree control end to be closed according to the evaporation control output end and the turn-off information so as to enable the vacuum chamber to lose the vacuum state.
In another embodiment of the highly reliable intelligent vapor deposition apparatus according to the present invention, the body includes: a shell and a door body.
The shell is provided with an evaporation vacuum cavity. The evaporation vacuum cavity is provided with a vacuum chamber extending direction. The housing defines a chamber opening. The extending direction of the cavity opening is vertical to the extending direction of the vacuum chamber and is communicated with the evaporation vacuum chamber. The door body is rotatably arranged on the shell and can cover the cavity opening through a rotating axis parallel to the extending direction of the vacuum chamber. The door body is sealed at the cavity opening and then forms a vacuum chamber with the evaporation vacuum cavity.
In another embodiment of the highly reliable intelligent vapor deposition device of the present invention, the vapor deposition device further includes: an infrared sensor is disposed at the orifice. When the door body is sealed at the cavity opening, the infrared sensor can output infrared sensing information caused by shielding. The infrared sensor is provided with an induction output end and can output infrared induction information through the induction output end.
The response output of infrared sensor connects evaporation plating data input end and can be to evaporation plating data input end output infrared induction information.
And if the evaporation processing unit receives the infrared induction information, outputting the current vacuum degree to an evaporation control output end. And the evaporation control output end drives the vacuum control end according to the current vacuum degree.
In another embodiment of the highly reliable intelligent vapor deposition device of the present invention, the primer process unit includes: a UV varnish process unit and a UV primer irradiation dryer. The UV varnish primer process unit can form UV varnish primer on the surface of the piece to be evaporated. The UV priming paint irradiation dryer can dry the UV gloss oil priming paint of the piece to be evaporated to obtain the dried piece to be evaporated.
The finish paint process unit comprises: a UV varnish finish paint working procedure unit and a UV finish paint irradiation dryer.
The UV gloss oil finish paint working procedure unit is arranged in the subsequent process of the vacuum evaporation coating machine. The UV varnish step unit can form a UV varnish on the surface of the evaporation material. The UV finish paint irradiation dryer can dry the UV finish paint of the evaporated part to obtain the dried plated part.
In still another embodiment of the highly reliable intelligent vapor deposition apparatus of the present invention, a UV primer irradiation dryer includes: a primer drying shell and a light curing conveyor belt.
The primer drying shell is provided with a drying channel. The drying tunnel includes in its extending direction: a first illumination inlet and a first illumination outlet. The light curing conveyor belt is provided with a drying conveying surface. The drying transmission surface is parallel to the extending direction of the drying channel. The light curing conveyor is capable of rolling from the first light inlet to the first light outlet. The first illumination outlet outputs the dried piece to be evaporated.
In another embodiment of the highly reliable intelligent vapor deposition device of the present invention, the vapor deposition device further includes: a first conveyor belt unit, an acquisition frame and an image acquisition camera.
The first belt unit includes a first transfer surface. The first drive face is formed by a plurality of rollers. The first conveying surface can convey the piece to be evaporated from a first position to a second position along a first conveying direction. The first conveying direction is located in the extending direction of the drying conveying surface.
The collecting frame is arranged on the first conveying belt unit and is provided with a supporting beam facing the first conveying surface. The support beam corresponds to the second position. The image acquisition camera is arranged on the supporting beam. When waiting to evaporate a position in the second place, the image acquisition camera can acquire and wait to evaporate a three-dimensional image information of piece. The image acquisition camera is provided with an image output end. The image output end can output three-dimensional image information of the piece to be evaporated.
In another embodiment of the highly reliable intelligent evaporation device, the image output end is connected with the master control input end, and the master control input end can acquire three-dimensional image information of an element to be evaporated.
And after the total processor acquires the thickness value of the current evaporation film, acquiring the surface area value of the piece to be evaporated according to the three-dimensional image information of the piece to be evaporated. And the total processor obtains the total evaporation area according to the surface area value and the number of the pieces to be evaporated. And obtaining the value of the evaporation coating material according to the total evaporation area and the current thickness value of the evaporation coating. And sending the evaporation film material value to an evaporation data input end of a vacuum evaporation controller. The vapor deposition processing unit places a vapor deposition material in the evaporator according to the amount of the vapor deposition film material.
In another embodiment of the highly reliable intelligent vapor deposition apparatus of the present invention, a vacuum vapor deposition apparatus comprises:
a vacuum molecular pump has an air pumping port and a pump control end. The pumping hole is communicated with the vacuum chamber. The pump control end is a vacuum control end. The evaporation source includes: tungsten wire baskets or alumina crucibles.
The workpiece holder is rotatably connected to the machine body along a workpiece holder rotation axis and is positioned in the vacuum chamber. The rotation axis of the workpiece frame is parallel to the extending direction of the vacuum chamber. And a plurality of evaporation shelves which are arranged around the outer circumference of the workpiece shelf by taking the rotation axis of the workpiece shelf as the center. The evaporation sources are uniformly arranged on the evaporation rack.
The characteristics, technical features, advantages and implementation of the highly reliable intelligent vapor deposition device will be further described in an explicit and understandable manner with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic connection diagram for explaining a control section of a highly reliable intelligent vapor deposition device according to an embodiment of the present invention.
Fig. 2 is a schematic diagram illustrating connection of a control part of a highly reliable intelligent vapor deposition device according to another embodiment of the present invention.
Fig. 3 is a schematic diagram illustrating connection of a control section of a highly reliable intelligent vapor deposition device according to still another embodiment of the present invention.
Fig. 4 is a schematic diagram illustrating connection of a control part of a highly reliable intelligent vapor deposition device according to still another embodiment of the present invention.
Detailed Description
In order to more clearly understand the technical features, objects and effects of the present invention, embodiments of the present invention will now be described with reference to the accompanying drawings, in which the same reference numerals indicate the same or structurally similar but functionally identical elements.
"exemplary" means "serving as an example, instance, or illustration" herein, and any illustration, embodiment, or steps described as "exemplary" herein should not be construed as a preferred or advantageous alternative. For the sake of simplicity, the drawings only schematically show the parts relevant to the present exemplary embodiment, and they do not represent the actual structure and the true scale of the product.
The invention provides a high-reliability intelligent evaporation device, as shown in figure 1, the high-reliability intelligent evaporation device comprises: a primer process unit 101, a primer thickness detection unit 201, a vacuum evaporation coating machine, a finish process unit 301, a finish thickness detection unit 401 and a master controller 501.
And the primer process unit 101 is capable of outputting the dried to-be-evaporated piece. And a primer thickness detection unit 201 which is arranged at the back of the primer process unit 101. The primer thickness detection unit 201 has a primer layer thickness output end and can measure and acquire a primer layer thickness value of the dried workpiece to be evaporated. The thickness output end of the primer layer can output the thickness value of the primer layer. The thickness of the primer layer is usually 5 to 13 μm.
A vacuum evaporation coating machine comprises a machine body, an electric heating circuit, an evaporation source, a workpiece frame and a vacuum evaporation controller 601.
The machine body is provided with a vacuum chamber capable of generating a set vacuum environment. The vacuum chamber has a vacuum control terminal 701. A control switch 801 is connected in series in the electric heating circuit. The evaporation source is arranged in the vacuum chamber. The evaporation source is connected with an electric heating circuit and can heat the evaporation material arranged in the evaporation source.
The work piece erects and arranges in vacuum chamber and can assemble and treat the coating by vaporization piece and can treat the coating by vaporization piece heating. The vacuum evaporation controller 601 includes a plurality of evaporation data input terminals, an evaporation processing unit, and a plurality of evaporation control output terminals. The evaporation control output end is connected with a vacuum degree control end 701 and a control switch 801. The workpiece holder is understood to be a substrate in vacuum evaporation.
The finish paint process unit 301 is arranged in the subsequent process of the vacuum evaporation coating machine and can output the dried coated piece. The finish thickness detection unit 401 is disposed at the subsequent stage of the UV finish irradiation dryer. The finish thickness detection unit 401 has a finish thickness output end and can measure and acquire the thickness value of the finish layer of the dried plated part. The finish thickness output end can output a finish thickness value.
The master controller 501 has a plurality of master control input terminals, a master processing unit and a plurality of master control output terminals. The master control input end of the device is connected with the thickness output end of the primer layer and can receive the thickness value of the primer layer. The master control input end is connected with the finish thickness output end and can receive the thickness value of the surface paint layer. The master control output end is connected with the evaporation data input end.
The overall processing unit is capable of receiving a plurality of historical thickness values of the topcoat layer. And obtaining a predicted finish paint thickness value according to the historical thickness values of the finish paint layers. The plurality of historical thickness values of the finish paint layer are the paint film values formed on the surface of the evaporation piece in the prior production of the finish paint process unit. The thickness of the finish paint layer is usually 9-15 μm.
The total processing unit can acquire the current thickness value of the evaporated film according to the primer layer thickness value, the predicted finish paint thickness value and the locally pre-stored set total film thickness value. The total processing unit can output the thickness value of the current evaporated film to an evaporation data input end.
Such as: the thickness value of the primer layer of the current batch of plated parts is 8 mu m, the thickness of the predicted finish coat layer is 10 mu m, and the total film thickness value is required to be set to be 20 mu m, so that the thickness value of the current evaporated film is 2 mu m.
And the evaporation processing unit acquires the current vacuum degree and the current evaporation time according to the current evaporation film thickness value and the pre-stored corresponding information of the vacuum degree and the evaporation time. The evaporation processing unit outputs the current vacuum degree to an evaporation control output end. The evaporation control output end drives the vacuum control end 701 according to the current vacuum degree.
The evaporation processing unit outputs the current evaporation time to an evaporation control output end. The evaporation control output end drives the control switch 801 to be closed according to the current evaporation time, so that the electric heating circuit heats the evaporation source.
Therefore, the high-reliability intelligent evaporation device dynamically acquires the thickness of the current evaporation film layer through the comprehensive data of the primer film layer, the evaporation film layer and the finish paint film layer, so that the total thickness of the coating of the evaporation film layer after the evaporation film layer is formed is ensured, and the coating quality of the coating is ensured.
It should be noted that, from the perspective of the system, the invention combines the conditions of the primer process and the finish process to control the evaporation of the evaporation coating layer. Synthesize above-mentioned data control vacuum evaporation controller through total controller, guaranteed the independence of data and control system's stability, realize vacuum evaporation's automated control, reduce artifical the participation, stabilize plating a processingquality.
In another embodiment of the highly reliable intelligent vapor deposition device according to the present invention, as shown in fig. 2, the highly reliable intelligent vapor deposition device further includes:
a plurality of vacuum detection sensors 602 disposed in the vacuum chamber and capable of acquiring a current acquired vacuum level in the vacuum chamber. The vacuum detection sensor 602 has a vacuum data output. The vacuum data output end can output the collected vacuum degree value.
And a plurality of temperature sensors 603 which are provided in the vacuum chamber and can collect a collection temperature value in the vacuum chamber. The temperature sensor 603 has a temperature data output. The temperature data output end can output the collected temperature value.
An evaporation data input terminal of a vacuum evaporation controller 601 is connected to the vacuum data output terminal and the temperature data output terminal.
In another embodiment of the highly reliable intelligent vapor deposition device, the vapor deposition processing unit drives the vacuum detection sensor to start according to the current vacuum degree. If the collected vacuum degree value is equal to the current vacuum degree value, the evaporation processing unit outputs the current evaporation time to the evaporation control output end.
The evaporation processing unit drives the temperature sensor 603 to start according to the current evaporation time. And if the collected temperature value is equal to the current temperature value, the evaporation processing unit times according to the current evaporation time, and acquires turn-off information after the time is over.
The vapor deposition processing unit outputs the turn-off information to a vapor deposition control output end.
The evaporation control output end controls the switch 801 to be turned off according to the turn-off information, so that the electric heating circuit stops heating the evaporation source. And controlling the vacuum degree control end to be closed according to the evaporation control output end and the turn-off information so as to enable the vacuum chamber to lose the vacuum state.
The vacuum evaporation coating machine is automatically turned off by monitoring the vacuum detection sensor and the temperature sensor, and is particularly suitable for the unattended condition. Meanwhile, the driving of the vacuum detection sensor and the temperature sensor can reduce the use of the vacuum detection sensor and the temperature sensor in a non-working state and prolong the service life of the sensor. Through the sequential control of vacuum and temperature, the safety problem caused by misoperation of the equipment can be effectively reduced, and the safety and stability of the operation of the equipment are improved.
In another embodiment of the highly reliable intelligent vapor deposition apparatus according to the present invention, the body includes: a shell and a door body.
The shell is provided with an evaporation vacuum cavity. The evaporation vacuum cavity is provided with a vacuum chamber extending direction. The housing defines a chamber opening. The extending direction of the cavity opening is vertical to the extending direction of the vacuum chamber and is communicated with the evaporation vacuum chamber. The door body is rotatably arranged on the shell and can cover the cavity opening through a rotating axis parallel to the extending direction of the vacuum chamber. The door body is sealed at the cavity opening and then forms a vacuum chamber with the evaporation vacuum cavity.
In another embodiment of the highly reliable intelligent vapor deposition device according to the present invention, as shown in fig. 3, the highly reliable intelligent vapor deposition device further includes: an infrared sensor 604 is disposed at the orifice. After the door body is sealed in the cavity opening, the infrared sensor 604 can output infrared sensing information caused by shielding. The infrared sensor 604 has a sensing output and is capable of outputting infrared sensing information through the sensing output.
The response output of infrared sensor 604 connects evaporation data input end and can be to evaporation data input end output infrared induction information.
And if the evaporation processing unit receives the infrared induction information, outputting the current vacuum degree to an evaporation control output end. The evaporation control output end drives the vacuum control end 701 according to the current vacuum degree.
Therefore, the vacuum evaporation coating machine is ensured to restart under the condition that the vacuum chamber is kept closed, and the safe use of the equipment is ensured. The potential safety hazard brought by misoperation is reduced, the implementation structure is simple, and the implementation is facilitated.
In another embodiment of the highly reliable intelligent vapor deposition apparatus of the present invention, the primer process unit 101 includes: a UV varnish process unit and a UV primer irradiation dryer. The UV varnish primer process unit can form UV varnish primer on the surface of the piece to be evaporated. The UV priming paint irradiation dryer can dry the UV gloss oil priming paint of the piece to be evaporated to obtain the dried piece to be evaporated.
The finish process unit 301 includes: a UV varnish finish paint working procedure unit and a UV finish paint irradiation dryer.
The UV gloss oil finish paint working procedure unit is arranged in the subsequent process of the vacuum evaporation coating machine. The UV varnish step unit can form a UV varnish on the surface of the evaporation material. The UV finish paint irradiation dryer can dry the UV finish paint of the evaporated part to obtain the dried plated part.
In still another embodiment of the highly reliable intelligent vapor deposition apparatus of the present invention, the UV primer irradiation dryer includes: a primer drying shell and a light curing conveyor belt.
The primer drying shell is provided with a drying channel. The drying tunnel includes in its extending direction: a first illumination inlet and a first illumination outlet. The light curing conveyor belt is provided with a drying conveying surface. The drying transmission surface is parallel to the extending direction of the drying channel. The light curing conveyor is capable of rolling from the first light inlet to the first light outlet. The first illumination outlet outputs the dried piece to be evaporated.
In another embodiment of the highly reliable intelligent vapor deposition device according to the present invention, as shown in fig. 4, the highly reliable intelligent vapor deposition device further includes: a first conveyor belt unit, an acquisition rack, and an image acquisition camera 502.
The first belt unit includes a first transfer surface. The first drive face is formed by a plurality of rollers. The first conveying surface can convey the piece to be evaporated from a first position to a second position along a first conveying direction. The first conveying direction is located in the extending direction of the drying conveying surface.
The collecting frame is arranged on the first conveying belt unit and is provided with a supporting beam facing the first conveying surface. The support beam corresponds to the second position. The image capturing camera 502 is disposed on the support beam. When waiting to evaporate a material and being located the second position, image acquisition camera 502 can acquire waiting to evaporate three-dimensional image information of material. Image capture camera 502 has an image output. The image output end can output three-dimensional image information of the piece to be evaporated.
In another embodiment of the highly reliable intelligent evaporation device, the image output end is connected with the master control input end, and the master control input end can acquire three-dimensional image information of an element to be evaporated.
And after the total processor acquires the thickness value of the current evaporation film, acquiring the surface area value of the piece to be evaporated according to the three-dimensional image information of the piece to be evaporated. And the total processor obtains the total evaporation area according to the surface area value and the number of the pieces to be evaporated. And obtaining the value of the evaporation coating material according to the total evaporation area and the current thickness value of the evaporation coating. The amount of the deposition film material is sent to the deposition data input terminal of the vacuum deposition controller 601. The vapor deposition processing unit places a vapor deposition material in the evaporator according to the amount of the vapor deposition film material.
Thereby guarantee its evaporation coating material volume's reasonable selection, also can be through the control to evaporation coating material volume its vacuum evaporation coating in the time of its vacuum evaporation coating, the formation thickness of coating film further improves the automatic level of vacuum evaporation coating machine in control process simultaneously.
In another embodiment of the highly reliable intelligent vapor deposition apparatus of the present invention, a vacuum vapor deposition apparatus comprises:
a vacuum molecular pump has an air pumping port and a pump control end. The pumping hole is communicated with the vacuum chamber. The pump control terminal is a vacuum control terminal 701. The evaporation source includes: tungsten wire baskets or alumina crucibles.
The workpiece holder is rotatably connected to the machine body along a workpiece holder rotation axis and is positioned in the vacuum chamber. The rotation axis of the workpiece frame is parallel to the extending direction of the vacuum chamber. And a plurality of evaporation shelves which are arranged around the outer circumference of the workpiece shelf by taking the rotation axis of the workpiece shelf as the center. The evaporation sources are uniformly arranged on the evaporation rack. Thereby ensuring the uniform vapor plating of the plated piece.
It should be understood that although the present description is described in terms of various embodiments, not every embodiment includes only a single embodiment, and such description is for clarity purposes only, and those skilled in the art will recognize that the embodiments described herein as a whole may be suitably combined to form other embodiments as will be appreciated by those skilled in the art.
The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.

Claims (10)

1. The utility model provides a high reliable intelligent coating by vaporization device which characterized in that, high reliable intelligent coating by vaporization device includes:
the primer process unit can output the dried piece to be evaporated;
a primer thickness detection unit arranged at the rear of the primer process unit; the primer thickness detection unit is provided with a primer layer thickness output end and can measure and acquire the primer layer thickness value of the dried piece to be evaporated; the primer layer thickness output end can output the primer layer thickness value;
vacuum evaporation coating machine, it includes:
a body having a vacuum chamber capable of generating a set vacuum environment; the vacuum chamber is provided with a vacuum degree control end;
the electric heating circuit is connected with a control switch in series;
an evaporation source disposed in the vacuum chamber; the evaporation source is connected with the electric heating circuit and can heat the evaporation material arranged in the evaporation source;
a workpiece holder which is arranged in the vacuum chamber, can be provided with the piece to be evaporated and can heat the piece to be evaporated; and
the vacuum evaporation controller is provided with a plurality of evaporation data input ends, an evaporation processing unit and a plurality of evaporation control output ends; the evaporation control output end is connected with the vacuum degree control end and the control switch;
the finish paint process unit is arranged in the subsequent process of the vacuum evaporation coating machine and can output the dried coating piece;
the finish paint thickness detection unit is provided with a finish paint thickness output end and can measure and acquire the thickness value of the finish paint layer of the dried plated part; the finish paint thickness output end can output the finish paint thickness value;
the master controller is provided with a plurality of master control input ends, a master processing unit and a plurality of master control output ends; the master control input end of the primer layer thickness control device is connected with the primer layer thickness output end and can receive the primer layer thickness value; the master control input end is connected with the finish paint thickness output end and can receive the thickness value of the finish paint layer; the master control output end is connected with the evaporation data input end;
the overall processing unit is capable of receiving a plurality of historical thickness values of the topcoat layer; obtaining a predicted finish paint thickness value according to the historical thickness values of the finish paint layers;
the total processing unit can acquire a current thickness value of the evaporated film according to the primer layer thickness value, the predicted finish paint thickness value and a locally pre-stored set total film thickness value;
the total processing unit can output the thickness value of the current evaporation film to the evaporation data input end;
the evaporation processing unit acquires the current vacuum degree and the current evaporation time according to the current evaporation film thickness value and pre-stored corresponding information of the vacuum degree and the evaporation time;
the evaporation processing unit outputs the current vacuum degree to the evaporation control output end; the evaporation control output end drives the vacuum degree control end according to the current vacuum degree;
the evaporation processing unit outputs the current evaporation time to the evaporation control output end; and the evaporation control output end drives the control switch to be closed according to the current evaporation time so as to enable the electric heating circuit to heat the evaporation source.
2. The highly reliable intelligent vapor deposition device according to claim 1, further comprising:
the vacuum detection sensors are arranged in the vacuum chamber and can acquire the current acquired vacuum degree value in the vacuum chamber; the vacuum detection sensor has a vacuum data output; the vacuum data output end can output the collected vacuum degree value;
a plurality of temperature sensors which are arranged in the vacuum chamber and can acquire the acquired temperature value in the vacuum chamber; the temperature sensor is provided with a temperature data output end; the temperature data output end can output the acquired temperature value;
the evaporation data input end of one vacuum evaporation controller is connected with the vacuum data output end and the temperature data output end.
3. The high-reliability intelligent evaporation device according to claim 2, wherein the evaporation processing unit drives a vacuum detection sensor to start according to the current vacuum degree; if the collected vacuum value is equal to the current vacuum value, the evaporation processing unit outputs the current evaporation time to the evaporation control output end;
the evaporation treatment unit drives the temperature sensor to start according to the current evaporation time; if the collected temperature value is equal to the current temperature value, the evaporation processing unit times according to the current evaporation time and acquires turn-off information after the time expires;
the evaporation processing unit outputs the turn-off information to the evaporation control output end;
the evaporation control output end controls the control switch to be switched off according to the switching-off information so as to enable the electric heating circuit to stop heating the evaporation source; and controlling the vacuum degree control end to be closed according to the evaporation control output end and the turn-off information so as to enable the vacuum chamber to lose the vacuum state.
4. The highly reliable intelligent coating by vaporization device according to claim 1, wherein the machine body comprises:
a housing having a vacuum chamber for evaporation; the evaporation vacuum cavity is provided with a vacuum chamber extending direction; the housing defines a chamber opening; the extending direction of the cavity opening is perpendicular to the extending direction of the vacuum chamber; the cavity opening is communicated with the evaporation vacuum cavity;
the door body is rotatably arranged on the shell through a rotating axis parallel to the extending direction of the vacuum chamber and can cover the cavity opening; the door body and the evaporation vacuum cavity form the vacuum chamber after being sealed at the cavity opening.
5. The highly reliable intelligent coating by vaporization device according to claim 4, further comprising:
an infrared sensor disposed at the orifice; after the door body is sealed at the cavity opening, the infrared sensor can output infrared sensing information caused by shielding; the infrared sensor is provided with an induction output end and can output the infrared induction information through the induction output end;
the induction output end of the infrared sensor is connected with the evaporation data input end and can output the infrared induction information to the evaporation data input end;
if the evaporation processing unit receives the infrared induction information, the current vacuum degree is output to the evaporation control output end; and the evaporation control output end drives the vacuum degree control end according to the current vacuum degree.
6. The highly reliable intelligent coating by vaporization device according to claim 1, wherein the primer process unit comprises:
the UV gloss oil primer working unit can form UV gloss oil primer on the surface of the piece to be evaporated; and
the UV primer irradiation dryer can dry the UV gloss oil primer of the piece to be evaporated to obtain the dried piece to be evaporated;
the finish paint process unit comprises:
the UV gloss oil finish paint working procedure unit is arranged in the subsequent process of the vacuum evaporation coating machine; the UV varnish finish process unit can form UV varnish finish on the surface of the evaporation member;
and the UV finish paint irradiation dryer can dry the UV finish paint of the evaporation piece to obtain the dried plating piece.
7. The highly reliable intelligent coating by vaporization device according to claim 6, characterized in that, the UV primer irradiation dryer comprises:
a primer drying housing having a drying channel; the drying tunnel includes in its extending direction: a first illumination inlet and a first illumination outlet;
an illumination curing conveyor; the illumination curing conveyor belt is provided with a drying conveying surface; the drying transmission surface is parallel to the extending direction of the drying channel; the light curing conveyor is rollable from the first light inlet to the first light outlet; and the first illumination outlet outputs the dried piece to be evaporated.
8. The highly reliable intelligent vapor deposition device according to claim 7, further comprising:
a first conveyor belt unit including a first drive face; the first transmission surface is formed by a plurality of rollers; the first conveying surface can convey the piece to be evaporated from a first position to a second position along a first conveying direction; the first conveying direction is located in the extending direction of the drying conveying surface;
a collecting frame provided to the first conveyor belt unit and having a support beam facing the first conveying surface; the support beam corresponds to the second position;
the image acquisition camera is arranged on the supporting beam; when the piece to be evaporated is located at the second position, the image acquisition camera can acquire three-dimensional image information of the piece to be evaporated; the image acquisition camera is provided with an image output end; the image output end can output three-dimensional image information of the piece to be evaporated.
9. The high-reliability intelligent evaporation device according to claim 8, wherein the image output end is connected with the master control input end, and the master control input end can acquire three-dimensional image information of an evaporation piece;
after the total processor obtains the thickness value of the current evaporation film, the surface area value of the piece to be evaporated is obtained according to the three-dimensional image information of the piece to be evaporated; the total processor obtains a total evaporation area according to the surface area value and the number of the pieces to be evaporated;
acquiring a vapor deposition film material value according to the total vapor deposition area and the current vapor deposition film thickness value;
sending the evaporation film material value to an evaporation data input end of the vacuum evaporation controller; the evaporation treatment unit is used for placing evaporation materials in the evaporator according to the evaporation film material value.
10. The high-reliability intelligent evaporation device according to claim 1, wherein the vacuum evaporation coater further comprises:
a vacuum molecular pump having an air pumping port and a pump control end; the air pumping port is communicated with the vacuum chamber; the pump control end is a vacuum degree control end;
the evaporation source includes: tungsten wire baskets or alumina crucibles;
the workpiece frame is rotatably connected to the machine body along a workpiece frame rotating axis and is positioned in the vacuum chamber; the rotation axis of the workpiece frame is parallel to the extending direction of the vacuum chamber;
a plurality of evaporation shelves arranged around the outer circumference of the work rest with the work rest rotation axis as a center; the evaporation sources are uniformly arranged on the evaporation rack.
CN202110303833.5A 2021-03-22 2021-03-22 High-reliability intelligent evaporation device Active CN112695290B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110303833.5A CN112695290B (en) 2021-03-22 2021-03-22 High-reliability intelligent evaporation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110303833.5A CN112695290B (en) 2021-03-22 2021-03-22 High-reliability intelligent evaporation device

Publications (2)

Publication Number Publication Date
CN112695290A true CN112695290A (en) 2021-04-23
CN112695290B CN112695290B (en) 2021-07-16

Family

ID=75515283

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110303833.5A Active CN112695290B (en) 2021-03-22 2021-03-22 High-reliability intelligent evaporation device

Country Status (1)

Country Link
CN (1) CN112695290B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115505893A (en) * 2022-09-28 2022-12-23 山东申华光学科技有限公司 Coating machine control method and system based on optical lens coating

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1405900A (en) * 2002-11-07 2003-03-26 上海交通大学 Plasma wave-filter indium nitride semiconductor thin-film
JP3659292B2 (en) * 1998-05-06 2005-06-15 日東電工株式会社 Coating thickness control method, coating thickness control apparatus, and pressure-sensitive adhesive tape manufactured using this method
CN201770771U (en) * 2010-08-26 2011-03-23 李正平 Real-time film thickness monitoring system of coiled film coating machine
CN102677002A (en) * 2012-05-31 2012-09-19 宫杰 Vacuum coating preparation method of aviation organic glass and preparation thereof
CN105352611A (en) * 2015-10-21 2016-02-24 中国科学院上海光学精密机械研究所 Method for manufacturing step board for measuring transfer function of interferometer
CN111394700A (en) * 2020-04-22 2020-07-10 深圳恒泰克科技有限公司 Evaporation coating manufacturing device and method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3659292B2 (en) * 1998-05-06 2005-06-15 日東電工株式会社 Coating thickness control method, coating thickness control apparatus, and pressure-sensitive adhesive tape manufactured using this method
CN1405900A (en) * 2002-11-07 2003-03-26 上海交通大学 Plasma wave-filter indium nitride semiconductor thin-film
CN201770771U (en) * 2010-08-26 2011-03-23 李正平 Real-time film thickness monitoring system of coiled film coating machine
CN102677002A (en) * 2012-05-31 2012-09-19 宫杰 Vacuum coating preparation method of aviation organic glass and preparation thereof
CN105352611A (en) * 2015-10-21 2016-02-24 中国科学院上海光学精密机械研究所 Method for manufacturing step board for measuring transfer function of interferometer
CN111394700A (en) * 2020-04-22 2020-07-10 深圳恒泰克科技有限公司 Evaporation coating manufacturing device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115505893A (en) * 2022-09-28 2022-12-23 山东申华光学科技有限公司 Coating machine control method and system based on optical lens coating

Also Published As

Publication number Publication date
CN112695290B (en) 2021-07-16

Similar Documents

Publication Publication Date Title
CN112695290B (en) High-reliability intelligent evaporation device
EP0810633B1 (en) Coating film forming method and apparatus
CN107190236B (en) Crucible, evaporation coating device and evaporation coating method
CN102641823B (en) A kind of even adhesive dispenser of microwave and even gluing method
CN110360815A (en) A kind of hot wind of Temperature and Humidity Control and vacuum impulse combined drying method and equipment
JP2001044176A5 (en)
CN106544637B (en) Magnetic-controlled sputtering coating equipment
US4956196A (en) Method for producing a corrosion-resistant coating on the surface of lacquered workpieces
CN109182995A (en) A kind of control system and method for non-homogeneous film layer product filming equipment
JP2003329246A (en) Method of detecting humidity in device treating and preparing food, and device treating and preparing food
AU2004284370A1 (en) Method and apparatus for determining the resistance of materials to light and corrosives
CN208124811U (en) A kind of automatic temperature changing drying unit
CN101713063B (en) Film plating device
CN106149324A (en) Dehydrator and the furnace drying method thereof of the fabric with implant can be dried
CN208151470U (en) A kind of antireflective coating system
CN205556763U (en) Adopt coating film device of scanning formula evaporation source
CN114909896B (en) Automatic control method and system for air quantity applied to continuous drying
CN116077959A (en) Control system and control method of roller scraper drying device
CN110391056B (en) Automatic paint film regulating and controlling system based on cascade regulation
CN207243982U (en) A kind of substrate heating unit of coating apparatus
CN213172553U (en) Transmission system of vacuum coating machine
CN212199407U (en) Continuous coating equipment capable of being screened
CN105486054A (en) Spiral drying device for pills
CN206219652U (en) A kind of vacuum coating of automobile lamp, drying unit
CN108642469A (en) Flexible product winding-type vacuum coater

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant