CN112695283A - Forming method of aluminum-scandium alloy target - Google Patents
Forming method of aluminum-scandium alloy target Download PDFInfo
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- CN112695283A CN112695283A CN202011529707.3A CN202011529707A CN112695283A CN 112695283 A CN112695283 A CN 112695283A CN 202011529707 A CN202011529707 A CN 202011529707A CN 112695283 A CN112695283 A CN 112695283A
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- Prior art keywords
- aluminum
- scandium alloy
- alloy target
- forging
- scandium
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- LUKDNTKUBVKBMZ-UHFFFAOYSA-N aluminum scandium Chemical compound [Al].[Sc] LUKDNTKUBVKBMZ-UHFFFAOYSA-N 0.000 title claims abstract description 121
- 229910000542 Sc alloy Inorganic materials 0.000 title claims abstract description 118
- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000005242 forging Methods 0.000 claims abstract description 103
- 238000010438 heat treatment Methods 0.000 claims abstract description 35
- 239000013077 target material Substances 0.000 claims abstract description 31
- 239000000654 additive Substances 0.000 claims abstract description 11
- 238000003825 pressing Methods 0.000 claims abstract description 5
- 239000012752 auxiliary agent Substances 0.000 claims description 19
- 239000003795 chemical substances by application Substances 0.000 claims description 16
- 229910052706 scandium Inorganic materials 0.000 claims description 16
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 16
- 229910052582 BN Inorganic materials 0.000 claims description 14
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 229910000831 Steel Inorganic materials 0.000 claims description 12
- 239000010959 steel Substances 0.000 claims description 12
- 238000005507 spraying Methods 0.000 claims description 10
- 238000000465 moulding Methods 0.000 claims description 8
- 229910000695 Aluminium-scandium alloy Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000052 comparative effect Effects 0.000 description 7
- 239000000843 powder Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000005477 sputtering target Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000003723 Smelting Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000009689 gas atomisation Methods 0.000 description 2
- 238000001513 hot isostatic pressing Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910000905 alloy phase Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21J—FORGING; HAMMERING; PRESSING METAL; RIVETING; FORGE FURNACES
- B21J5/00—Methods for forging, hammering, or pressing; Special equipment or accessories therefor
- B21J5/02—Die forging; Trimming by making use of special dies ; Punching during forging
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C21/00—Alloys based on aluminium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Forging (AREA)
Abstract
The invention relates to a forming method of an aluminum-scandium alloy target, which comprises the following steps: and heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging and pressing to obtain the aluminum-scandium alloy target. According to the forming method provided by the invention, through the design of the forming process, the die forging mode is adopted, and the heating is carried out before the forging, so that the problem that the aluminum-scandium alloy target material is cracked in the forming process is solved, the utilization rate of the target blank is obviously improved, the material cost is saved, and the production efficiency is improved.
Description
Technical Field
The invention relates to the field of targets, in particular to a forming method of an aluminum-scandium alloy target.
Background
In the field of semiconductors, an aluminum scandium alloy target is a commonly used material, and for example, CN111636054A discloses a preparation method of an aluminum scandium alloy sputtering target, which comprises the following steps: mixing an aluminum source and a scandium source, and carrying out vacuum melting on the obtained aluminum-scandium alloy ingredients to obtain an aluminum-scandium molten alloy liquid; carrying out vacuum gas atomization on the aluminum-scandium molten alloy liquid by using inert gas flow to obtain aluminum-scandium alloy powder; sequentially carrying out outer sheathing and hot isostatic pressing forming on the aluminum-scandium alloy powder to obtain an aluminum-scandium alloy sputtering target blank; and carrying out binding machining on the aluminum-scandium alloy sputtering target blank to obtain the aluminum-scandium alloy sputtering target. The inert gas flow is used for carrying out vacuum gas atomization, so that the contact between the aluminum-scandium molten alloy liquid and oxygen is isolated, the prepared aluminum-scandium alloy powder is high in sphericity and low in oxygen content, and the grain structure, the granularity and the microstructure are uniform; the aluminum-scandium alloy sputtering target obtained by hot isostatic pressing molding has the defects of high density, uniform chemical composition, no segregation and the like.
CN111647858A discloses a preparation method of an aluminum scandium alloy target, which comprises the following steps: carrying out suspension smelting on an aluminum raw material and a scandium raw material through a cold crucible to obtain an aluminum-scandium alloy melt; casting the aluminum-scandium alloy melt onto a mould for cooling and forming to obtain an aluminum-scandium alloy ingot; placing the aluminum-scandium alloy cast ingot in a vacuum crucible furnace, and heating to melt the cast ingot into aluminum-scandium alloy liquid; atomizing the aluminum-scandium alloy liquid to obtain aluminum-scandium alloy powder; sintering the aluminum-scandium alloy powder to obtain an aluminum-scandium alloy target blank; and machining the aluminum-scandium alloy target blank to obtain the aluminum-scandium alloy target. According to the preparation method of the aluminum-scandium alloy target, provided by the invention, the aluminum raw material is added into the scandium raw material in batches for smelting according to the characteristic that the metal melting points of aluminum and scandium are greatly different, so that the alloy target can be smelted to be completely alloyed, and the aluminum-scandium alloy powder with high product purity is prepared by adopting a melting and atomizing mode, so that the technical problem that the alloy phase splitting is caused when the aluminum-scandium alloy target is prepared in the prior art is solved.
However, most targets are in the shape of round cakes, and forging or rolling processes are required for forming. However, the aluminum-scandium alloy target material has poor toughness and is easy to crack in direct rolling, the target material in the existing hot rolling process has the rolling cracking condition, and meanwhile, the shape of the hot-rolled target material is irregular, so that the subsequent processing loss rate of the target material is increased, and the cost is increased due to the expensive scandium.
Disclosure of Invention
In view of the problems in the prior art, the invention aims to provide a method for forming an aluminum-scandium alloy target, which can solve the problem that the aluminum-scandium alloy target is easy to crack in the rolling forming process, and meanwhile, the material cost is saved and the production efficiency is improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: and heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging and pressing to obtain the aluminum-scandium alloy target.
According to the forming method provided by the invention, through the design of the forming process, the die forging mode is adopted, and the heating is carried out before the forging, so that the problem that the aluminum-scandium alloy target material is cracked in the forming process is solved, the utilization rate of the target blank is obviously improved, the material cost is saved, and the production efficiency is improved.
As a preferable technical scheme of the invention, the aluminum-scandium alloy target blank comprises, by mass, 5-50% of scandium and the balance of aluminum.
In the present invention, the scandium content in the aluminum-scandium alloy target blank may be, for example, 5% to 50% by mass, for example, 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, or 50%, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable.
As a preferable technical scheme of the invention, the forging die comprises 45# steel or 40Cr steel.
In a preferred embodiment of the present invention, the heating temperature is 450 ℃ or 1000 ℃, and may be, for example, 450 ℃, 500 ℃, 550 ℃, 600 ℃, 650 ℃, 700 ℃, 750 ℃, 800 ℃, 850 ℃, 900 ℃, 950 ℃ or 1000 ℃, but is not limited to the values listed, and other values not listed in the range are also applicable.
In a preferred embodiment of the present invention, the heating time is 1 to 2 hours, and may be, for example, 1 hour, 1.1 hour, 1.2 hours, 1.3 hours, 1.4 hours, 1.5 hours, 1.6 hours, 1.7 hours, 1.8 hours, 1.9 hours or 2 hours, but is not limited to the above-mentioned values, and other values not listed in the above range are also applicable.
As a preferable technical scheme of the invention, the auxiliary agent comprises a boron nitride release agent.
In the invention, the boron nitride release agent can be an Elida BN-0028A solvent type boron nitride release agent or LRA-15 boron nitride high-temperature resistant lubricating release coating and other boron nitride release agents of Jun materials company.
As a preferable technical scheme of the invention, the spraying end point of the auxiliary agent is to completely cover the inner surface of the cavity of the forging die. And adding a release agent after the forging die is heated.
In a preferred embodiment of the present invention, the pressure in the forging is 120-200MPa, and may be, for example, 120MPa, 130MPa, 140MPa, 150MPa, 160MPa, 170MPa, 180MPa, 190MPa or 200MPa, but is not limited to the above-mentioned values, and other values not listed in the above range are also applicable.
As a preferable technical scheme of the invention, the end point of the forging is that the aluminum-scandium alloy fills the die cavity of the forging die.
As a preferable embodiment of the present invention, the molding method includes: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with a parting agent for forging and pressing to obtain an aluminum-scandium alloy target material;
the heating temperature is 450-1000 ℃; the heating time is 1-2 h.
Compared with the prior art, the invention at least has the following beneficial effects:
according to the forming method provided by the invention, through the design of the forming process, the die forging mode is adopted, and the heating is carried out before the forging, so that the problem that the aluminum-scandium alloy target material is cracked in the forming process is solved, the utilization rate of the target blank is obviously improved, the material cost is saved, and the production efficiency is improved.
Detailed Description
To better illustrate the invention and to facilitate the understanding of the technical solutions thereof, typical but non-limiting examples of the invention are as follows:
example 1
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises, by mass, 5% of scandium and the balance of aluminum;
the forging die is made of 45# steel;
the heating temperature is 500 ℃, and the time is 1.5 h;
the auxiliary agent is BN-0028A boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging is 120MPa, and the end point of the forging is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Example 2
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises 35% of scandium in percentage by mass and the balance of aluminum;
the forging die is made of 40Cr steel;
the heating temperature is 900 ℃, and the time is 2 h;
the auxiliary agent is LRA-15 boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging process is 180MPa, and the end point of the forging process is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Example 3
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises 20% of scandium in percentage by mass and the balance of aluminum;
the forging die is made of 40Cr steel;
the heating temperature is 600 ℃, and the time is 1.5 h;
the auxiliary agent is LRA-15 boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging is 150MPa, and the end point of the forging is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Example 4
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises 20% of scandium in percentage by mass and the balance of aluminum;
the forging die is made of 45# steel;
the heating temperature is 600 ℃, and the time is 1.2 h;
the auxiliary agent is BN-0028A boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging is 130MPa, and the end point of the forging is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Example 5
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises, by mass, 40% of scandium and the balance of aluminum;
the forging die is made of 45# steel;
the heating temperature is 1000 ℃, and the time is 2 h;
the auxiliary agent is BN-0028A boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging is 190MPa, and the end point of the forging is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Example 6
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises 22% of scandium and the balance of aluminum in percentage by mass;
the forging die is made of 40Cr steel;
the heating temperature is 650 ℃, and the time is 1.5 h;
the auxiliary agent is LRA-15 boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging is 160MPa, and the end point of the forging is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Example 7
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises, by mass, 17% of scandium and the balance of aluminum;
the forging die is made of 40Cr steel;
the heating temperature is 550 ℃, and the time is 1.5 h;
the auxiliary agent is LRA-15 boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging is 140MPa, and the end point of the forging is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Example 8
The invention provides a forming method of an aluminum-scandium alloy target, which comprises the following steps: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging to obtain an aluminum-scandium alloy target material;
the aluminum-scandium alloy target blank comprises 36% of scandium and the balance of aluminum in percentage by mass;
the forging die is made of 45# steel;
the heating temperature is 900 ℃, and the time is 1.8 h;
the auxiliary agent is BN-0028A boron nitride release agent, and the spraying end point of the auxiliary agent is that the inner surface of the cavity of the forging die is completely covered;
the pressure in the forging process is 164MPa, and the end point of the forging process is that the aluminum-scandium alloy fills the die cavity of the forging die.
The obtained aluminum-scandium alloy target material is not cracked.
Comparative example 1
The only difference from example 1 is that the heating temperature is 300 ℃, and the obtained aluminum-scandium alloy target material cracks.
Comparative example 2
The only difference from example 1 is that the forging pressure is 250MPa, and the obtained aluminum-scandium alloy target material cracks slightly.
Comparative example 3
The difference from the embodiment 1 is that the aluminum scandium alloy target material obtained by directly forging without using a forging die is partially cracked and irregular in shape.
Comparative example 4
The difference from the embodiment 1 is that the target blank is not heated, only the forging die is heated, and the obtained aluminum-scandium alloy target material is seriously cracked.
Comparative example 5
The difference from the example 1 is that the target blank is heated, the forging die is not heated, and the obtained aluminum-scandium alloy target material is partially cracked.
Comparative example 6
The only difference from example 1 was that the target blank was replaced with a high nickel alloy of In625 and the molded material cracked locally.
According to the results of the above examples and comparative examples, the forming method provided by the invention solves the problem of cracking of the aluminum-scandium alloy target material in the forming process, remarkably improves the utilization rate of the target blank, saves the material cost and improves the production efficiency by designing the forming process, adopting the die forging mode and heating before forging.
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.
Claims (10)
1. A forming method of an aluminum-scandium alloy target is characterized by comprising the following steps: and heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with the additives for forging and pressing to obtain the aluminum-scandium alloy target.
2. The method of claim 1, wherein the aluminum-scandium alloy target blank comprises, in mass percent, 5-50% scandium and the balance aluminum.
3. The forming method according to claim 1 or 2, wherein the forging die is made of 45# steel or 40Cr steel.
4. The molding method according to any one of claims 1 to 3, wherein the heating temperature is 450 ℃ and 1000 ℃.
5. The molding method according to any one of claims 1 to 4, wherein the heating time is 1 to 2 hours.
6. The molding method according to any one of claims 1 to 5, wherein the auxiliary comprises a boron nitride release agent.
7. The molding method according to any one of claims 1 to 6, wherein the end point of said spraying of the auxiliary agent is to completely cover the inner surface of the cavity of the forging die.
8. The molding method according to any one of claims 1 to 7, wherein the pressure in said forging is 120-200 MPa.
9. The method of forming of any one of claims 1 to 8, wherein the end point of the forging is the aluminium scandium alloy filling the die cavity.
10. The molding method according to any one of claims 1 to 9, comprising: heating the aluminum-scandium alloy target blank and a forging die, and then putting the heated aluminum-scandium alloy target blank into the forging die sprayed with a parting agent for forging and pressing to obtain an aluminum-scandium alloy target material;
the heating temperature is 450-1000 ℃; the heating time is 1-2 h.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011529707.3A CN112695283A (en) | 2020-12-22 | 2020-12-22 | Forming method of aluminum-scandium alloy target |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011529707.3A CN112695283A (en) | 2020-12-22 | 2020-12-22 | Forming method of aluminum-scandium alloy target |
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| CN112695283A true CN112695283A (en) | 2021-04-23 |
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| CN202011529707.3A Pending CN112695283A (en) | 2020-12-22 | 2020-12-22 | Forming method of aluminum-scandium alloy target |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105525149A (en) * | 2014-09-29 | 2016-04-27 | 有研亿金新材料有限公司 | Method for preparing aluminum alloy sputtering target material |
| CN109014012A (en) * | 2017-06-08 | 2018-12-18 | 张无量 | The semi liquid state forging method of magnesium alloy wheel rim |
| CN111455223A (en) * | 2019-08-08 | 2020-07-28 | 湖南稀土金属材料研究院 | Aluminum-scandium alloy target material and preparation method thereof |
| CN111961886A (en) * | 2020-08-25 | 2020-11-20 | 湖南稀土金属材料研究院 | Preparation method of high-purity rare earth metal scandium and scandium sputtering target material |
-
2020
- 2020-12-22 CN CN202011529707.3A patent/CN112695283A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105525149A (en) * | 2014-09-29 | 2016-04-27 | 有研亿金新材料有限公司 | Method for preparing aluminum alloy sputtering target material |
| CN109014012A (en) * | 2017-06-08 | 2018-12-18 | 张无量 | The semi liquid state forging method of magnesium alloy wheel rim |
| CN111455223A (en) * | 2019-08-08 | 2020-07-28 | 湖南稀土金属材料研究院 | Aluminum-scandium alloy target material and preparation method thereof |
| CN111961886A (en) * | 2020-08-25 | 2020-11-20 | 湖南稀土金属材料研究院 | Preparation method of high-purity rare earth metal scandium and scandium sputtering target material |
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Application publication date: 20210423 |