CN112653415A - 一种多层膜声表面波谐振器及制造方法 - Google Patents
一种多层膜声表面波谐振器及制造方法 Download PDFInfo
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- CN112653415A CN112653415A CN202011567491.XA CN202011567491A CN112653415A CN 112653415 A CN112653415 A CN 112653415A CN 202011567491 A CN202011567491 A CN 202011567491A CN 112653415 A CN112653415 A CN 112653415A
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910012463 LiTaO3 Inorganic materials 0.000 claims abstract description 29
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 28
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 28
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 28
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 15
- 238000000151 deposition Methods 0.000 claims abstract description 13
- 150000002500 ions Chemical class 0.000 claims abstract description 6
- 238000002513 implantation Methods 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 3
- 239000010408 film Substances 0.000 claims description 46
- 229910052751 metal Inorganic materials 0.000 claims description 8
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- 150000002739 metals Chemical class 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 230000008021 deposition Effects 0.000 abstract 2
- 238000013461 design Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 9
- 230000008878 coupling Effects 0.000 description 6
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02889—Means for compensation or elimination of undesirable effects of influence of mass loading
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/023—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the membrane type
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
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CN202011567491.XA CN112653415A (zh) | 2020-12-25 | 2020-12-25 | 一种多层膜声表面波谐振器及制造方法 |
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CN202011567491.XA CN112653415A (zh) | 2020-12-25 | 2020-12-25 | 一种多层膜声表面波谐振器及制造方法 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113114158A (zh) * | 2021-05-11 | 2021-07-13 | 中国科学院上海微系统与信息技术研究所 | 一种兰姆波谐振器及弹性波装置 |
WO2022266789A1 (zh) * | 2021-06-21 | 2022-12-29 | 中国科学技术大学 | 基于高结晶度掺杂压电薄膜的声波谐振器及其制备方法 |
WO2023087211A1 (zh) * | 2021-11-18 | 2023-05-25 | 华为技术有限公司 | 一种saw谐振器及saw滤波器 |
CN116436432A (zh) * | 2023-04-17 | 2023-07-14 | 中国电子科技集团公司第二十六研究所 | 一种小型化的声表面波滤波器结构 |
CN116915211A (zh) * | 2023-09-12 | 2023-10-20 | 苏州声芯电子科技有限公司 | 一种超宽带零温漂声表面波滤波器 |
WO2024012311A1 (zh) * | 2022-07-11 | 2024-01-18 | 常州承芯半导体有限公司 | 声表面波谐振装置的形成方法 |
CN116436432B (zh) * | 2023-04-17 | 2024-07-09 | 中国电子科技集团公司第二十六研究所 | 一种小型化的声表面波滤波器结构 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015115870A (ja) * | 2013-12-13 | 2015-06-22 | 株式会社村田製作所 | 弾性波デバイス |
CN107733395A (zh) * | 2017-11-14 | 2018-02-23 | 安徽云塔电子科技有限公司 | 一种压电谐振器和压电谐振器的制备方法 |
CN108039872A (zh) * | 2017-12-26 | 2018-05-15 | 海宁市瑞宏科技有限公司 | 一种用于高性能声表面波滤波器的谐振器结构设计 |
CN111510106A (zh) * | 2020-05-06 | 2020-08-07 | 中电科技德清华莹电子有限公司 | 一种声表面波谐振结构滤波器 |
-
2020
- 2020-12-25 CN CN202011567491.XA patent/CN112653415A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015115870A (ja) * | 2013-12-13 | 2015-06-22 | 株式会社村田製作所 | 弾性波デバイス |
CN107733395A (zh) * | 2017-11-14 | 2018-02-23 | 安徽云塔电子科技有限公司 | 一种压电谐振器和压电谐振器的制备方法 |
CN108039872A (zh) * | 2017-12-26 | 2018-05-15 | 海宁市瑞宏科技有限公司 | 一种用于高性能声表面波滤波器的谐振器结构设计 |
CN111510106A (zh) * | 2020-05-06 | 2020-08-07 | 中电科技德清华莹电子有限公司 | 一种声表面波谐振结构滤波器 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113114158A (zh) * | 2021-05-11 | 2021-07-13 | 中国科学院上海微系统与信息技术研究所 | 一种兰姆波谐振器及弹性波装置 |
WO2022266789A1 (zh) * | 2021-06-21 | 2022-12-29 | 中国科学技术大学 | 基于高结晶度掺杂压电薄膜的声波谐振器及其制备方法 |
WO2023087211A1 (zh) * | 2021-11-18 | 2023-05-25 | 华为技术有限公司 | 一种saw谐振器及saw滤波器 |
WO2024012311A1 (zh) * | 2022-07-11 | 2024-01-18 | 常州承芯半导体有限公司 | 声表面波谐振装置的形成方法 |
CN116436432A (zh) * | 2023-04-17 | 2023-07-14 | 中国电子科技集团公司第二十六研究所 | 一种小型化的声表面波滤波器结构 |
CN116436432B (zh) * | 2023-04-17 | 2024-07-09 | 中国电子科技集团公司第二十六研究所 | 一种小型化的声表面波滤波器结构 |
CN116915211A (zh) * | 2023-09-12 | 2023-10-20 | 苏州声芯电子科技有限公司 | 一种超宽带零温漂声表面波滤波器 |
CN116915211B (zh) * | 2023-09-12 | 2023-12-19 | 苏州声芯电子科技有限公司 | 一种超宽带零温漂声表面波滤波器 |
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