CN112629734A - Spherical three-dimensional force-measuring piezomagnetic sensor and three-dimensional force measuring method thereof - Google Patents
Spherical three-dimensional force-measuring piezomagnetic sensor and three-dimensional force measuring method thereof Download PDFInfo
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- CN112629734A CN112629734A CN202011638254.8A CN202011638254A CN112629734A CN 112629734 A CN112629734 A CN 112629734A CN 202011638254 A CN202011638254 A CN 202011638254A CN 112629734 A CN112629734 A CN 112629734A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/169—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using magnetic means
Abstract
The invention discloses a spherical three-dimensional force measurement piezomagnetic sensor and a three-dimensional force measurement method thereof, wherein the method comprises the following steps: the device comprises a force measuring mechanism, a signal excitation circuit and a signal conditioning circuit; the force measuring mechanism comprises a spherical shell, a force transmission element and a piezomagnetic element, wherein the force transmission element is connected with the inner surface of the spherical shell in the three-dimensional orthogonal direction; the piezomagnetic element receives external force exerted on the spherical shell through the force transmission element; after the piezomagnetic element receives the external force, the signal excitation circuit transmits an excitation signal to the piezomagnetic element so that the piezomagnetic element converts the external force into non-zero induction voltage and transmits the induction voltage to the signal conditioning circuit; and the signal conditioning circuit performs signal compensation, output decoupling and component force synthesis on the induction voltage to obtain an external force value and a component force value in each direction. The load force in each direction can be accurately detected, and the offset degree of the magnetic field is increased on the basis of equal stress deformation by measuring, so that the complex working condition in practical application is met.
Description
Technical Field
The invention relates to the technical field of force measurement, in particular to a spherical three-dimensional force measurement piezomagnetic sensor and a three-dimensional force measurement method thereof.
Background
The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.
The force sensor is widely applied to the fields of engineering machinery, aerospace, building industry, automation and the like, and has various types, such as a resistance strain gauge type, a semiconductor strain gauge, a piezoresistive type, a piezoelectric type and the like. The piezomagnetic force sensor has the advantages of strong bearing capacity, large output power, good anti-interference capacity and capability of keeping a better working state under the working condition of a severe environment relative to a strain gauge type force sensor.
The piezomagnetic sensor is a force-electricity conversion sensor, and its basic principle is that the piezomagnetic effect of ferromagnetic material is used, and under the action of external force the ferromagnetic material can produce internal deformation to produce stress, and the change of material magnetic conductivity can make the output voltage of the sensor produce correspondent change.
The inventor finds that the existing piezomagnetic sensor has the following defects when measuring external force:
(1) when the existing piezomagnetic sensor works, an excitation magnetic core can only detect the stress condition of two dimensions, and the actual external force cannot be completely reflected;
(2) when an external force value is measured, the existing piezomagnetic sensor is influenced by a working environment, so that excitation voltage is suddenly large and suddenly small to cause measurement errors;
(3) because the magnetic conductivity changes caused by different measuring conditions or different external force application and other factors are different, the output induction voltages are different, and if a uniform detection range is adopted, accurate values cannot be obtained for smaller induction voltages;
(4) due to the mutual influence between the sensor structure and the magnetic fields in different directions and the like, when the piezomagnetic sensor is in actual operation, when the piezomagnetic element in each dimension measures the component of force, the output signal of the piezomagnetic element is influenced by other dimensions, so that the value measured by the dimension is not all the component of the external force in the dimension, and the problem of coupling errors among multiple dimensions exists.
Disclosure of Invention
In order to solve the problems, the invention provides a spherical three-dimensional force measurement piezomagnetic sensor and a three-dimensional force measurement method thereof.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides a spherical three-dimensional force measurement piezomagnetic sensor, comprising: the device comprises a force measuring mechanism, a signal excitation circuit and a signal conditioning circuit; the force measuring mechanism comprises a spherical shell, a force transmission element and a piezomagnetic element, wherein the force transmission element is connected with the inner surface of the spherical shell in the three-dimensional orthogonal direction;
the piezomagnetic element receives external force exerted on the spherical shell through the force transmission element;
after the piezomagnetic element receives external force, the signal excitation circuit transmits an excitation signal to the piezomagnetic element so that the piezomagnetic element converts the external force into non-zero induction voltage and transmits the induction voltage to the signal conditioning circuit;
and the signal conditioning circuit performs signal compensation, output decoupling and component force synthesis on the induction voltage to obtain an external force value and a component force value in each direction.
In a second aspect, the present invention provides a three-dimensional force measuring method for a spherical three-dimensional force measurement piezomagnetic sensor, comprising:
after external force is applied to the force measuring mechanism, the external force is subjected to orthogonal decomposition into component forces in multiple directions, the force measuring mechanism receives the component forces and receives an excitation signal transmitted by the signal excitation circuit, so that the external force is converted into non-zero induction voltage, and the induction voltage is transmitted to the signal conditioning circuit;
and the signal conditioning circuit performs signal compensation, output decoupling and component force synthesis on the induction voltage to obtain an external force value and a component force value in each direction.
Compared with the prior art, the invention has the beneficial effects that:
the invention realizes the three-dimensional force measurement of the piezomagnetic sensor by changing the internal structure of the sensor, can accurately detect the load force in each direction, and simultaneously measures the bias degree of the magnetic field on the basis of equal stress deformation, thereby meeting the complex working condition in practical application and improving the measurement accuracy and sensitivity of the piezomagnetic sensor.
In order to solve the problem of measurement error caused by the fact that the excitation voltage is suddenly large and suddenly small due to working conditions of the sensor, the signal excitation circuit is provided with the detection circuit and the PLC circuit, the detection circuit detects whether the output voltage is stable and provides a feedback signal, and the PLC circuit adjusts the power supply voltage to a stable state according to the received feedback signal.
In order to solve the problems that different magnetic conductivity changes and different output induced voltages are caused by different measuring conditions or different applied external force and other factors, the invention adopts the automatic range conversion circuit in the signal conditioning circuit to automatically select a proper range according to the magnitude of the induced voltages so as to realize the high-precision measurement of the sensor.
In order to solve the problem of coupling errors among multiple dimensions, nonlinear decoupling of the spherical three-dimensional force measurement piezomagnetic sensor is realized in a signal conditioning circuit through a BP neural network model, force components in each direction are obtained after decoupling, and force synthesis is carried out through a parallelogram.
In order to solve the problem of reducing the influence of working conditions such as temperature or vibration on the sensor, the invention adopts a PSO-LSSVM algorithm to compensate signals and improves the anti-interference capability of the sensor.
Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
Fig. 1 is a schematic structural diagram of a spherical three-dimensional force measurement piezomagnetic sensor according to embodiment 1 of the present invention;
FIG. 2 is a three-dimensional isometric view of a spherical three-dimensional force-measuring piezomagnetic sensor provided in embodiment 1 of the present invention;
fig. 3 is a circuit diagram of a signal driving circuit provided in embodiment 1 of the present invention;
fig. 4 is a circuit diagram of a signal conditioning circuit according to embodiment 1 of the present invention;
the magnetic field excitation type force measuring device comprises a force measuring mechanism 1, a signal exciting circuit 2, a signal conditioning circuit 3, a wiring port 4, a spherical shell 5, a piezomagnetic element 6, a force transmission element 7, a spherical fixer 8, a positioning groove 51, an excitation magnetic core 61, an excitation winding 62, an induction magnetic core 63, an induction winding 64 and an intermediate magnetic circuit 65.
The specific implementation mode is as follows:
the invention is further described with reference to the following figures and examples.
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
In the present invention, terms such as "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "side", "bottom", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only terms of relationships determined for convenience of describing structural relationships of the parts or elements of the present invention, and are not intended to refer to any parts or elements of the present invention, and are not to be construed as limiting the present invention.
In the present invention, terms such as "fixedly connected", "connected", and the like are to be understood in a broad sense, and may be a fixed connection, or may be an integral connection or a detachable connection; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be determined according to specific situations by persons skilled in the relevant scientific or technical field, and are not to be construed as limiting the present invention.
The embodiments and features of the embodiments of the present invention may be combined with each other without conflict.
Example 1
As shown in fig. 1, the present embodiment provides a spherical three-dimensional force measurement piezomagnetic sensor, including: the device comprises a force measuring mechanism 1, a signal excitation circuit 2 and a signal conditioning circuit 3; the force measuring mechanism 1 comprises a spherical shell 5, a force transmission element 7 connected in the three-dimensional orthogonal direction of the inner surface of the spherical shell 5 and a piezomagnetic element 6 connected with the force transmission element 7;
the piezomagnetic element 6 receives an external force exerted on the spherical shell 5 through the force transmission element 7;
after the piezomagnetic element 6 receives external force, the signal excitation circuit 2 transmits an excitation signal to the piezomagnetic element 6, so that the piezomagnetic element 6 converts the external force into non-zero induction voltage and transmits the induction voltage to the signal conditioning circuit 3;
and the signal conditioning circuit 3 performs signal compensation, output decoupling and component force synthesis on the induction voltage to obtain an external force value and a component force value in each direction.
In this embodiment, the spherical three-dimensional force measurement piezomagnetic sensor is distributed in a spatially symmetrical manner and is used for measuring the tensile stress and the compressive stress of the force application component, the force measurement mechanism 1 is a core element, the signal excitation circuit 2 inputs an alternating current excitation signal into the force measurement mechanism 1 through the input end of the wiring port 4 to provide electric energy for the sensor, and the force measurement mechanism 1 outputs induced electromotive force into the signal conditioning circuit 3 through the output end of the wiring port 4 to condition and display the induced electromotive force.
In the present embodiment, the force-measuring cell comprises a spherical housing 5, a spherical holder 8, a force-transmitting element 7 and a piezomagnetic element 6; specifically, the method comprises the following steps:
the spherical shell 5 is in a sealed spherical shape, has a cavity structure inside, is made of high-strength alloy, can bear larger stress, can generate elastic deformation at the same time, and ensures that the sensor is uniformly stressed in a three-dimensional space;
the bottom end of the force transmission element 7 is fixedly connected with the piezomagnetic element 6 and is used for transmitting the external force applied to the spherical shell to the piezomagnetic element 6;
the piezomagnetic element 6 comprises an excitation magnetic core 61, an excitation winding 62, an induction magnetic core 63, an induction winding 64 and an intermediate magnetic circuit 65; an excitation winding 62 is wound on the excitation magnetic core 61, an induction winding 64 is wound on the induction magnetic core 63, and the homonymous ends of the two induction windings are connected to form reverse series connection;
the wiring among the windings of the piezomagnetic element is independent, the excitation winding 62 is connected with the signal excitation circuit 2 through the input end of the wiring port 4, and the induction winding 64 is connected with the signal conditioning circuit 3 through the output end of the wiring port 4.
Preferably, the connection port 4 is composed of an input port, an output port and a wire connector, so that the circuit is stable.
Preferably, the force transfer element 7 is made of a non-ferromagnetic material and has a Y-shaped structure, and the induction cores of the piezomagnetic elements 6 in other dimensions pass through the branches of the Y-shape to avoid the crossing in space.
Preferably, the present embodiment is provided with six sets of positioning grooves, two positioning grooves in each set, for embedding six force transfer elements;
preferably, the piezomagnetic elements 6 are made of ferromagnetic material, and three groups of piezomagnetic elements are provided, wherein the three groups of piezomagnetic elements have completely identical structures, and fig. 1 only shows the piezomagnetic elements 6 in the X direction.
As shown in fig. 2, the excitation magnetic cores 61 of the piezomagnetic elements 6 are orthogonally assembled two by two on the spherical holder 8, and the spherical holder 8 is concentric with the spherical shell 5 and is provided with three through holes for orthogonally assembling the piezomagnetic elements two by two on the spherical holder.
In this embodiment, the signal excitation circuit 2 is used for the excitation winding 62 to provide a signal source of a stable ac signal, and includes an external power supply, a detection circuit and a PLC circuit, as shown in fig. 3; specifically, the method comprises the following steps: the external power supply provides the alternating current, and detection circuitry adopts the chip that the model is UM803 for whether detect output voltage is stable and provide feedback signal, and the PLC circuit is used for receiving detection circuitry's feedback signal, adjusts mains voltage to stable state, prevents that the sensor from leading to the excitation voltage because of operating condition to neglect and suddenly cause measuring error.
In this embodiment, the signal conditioning circuit 3 is configured to receive the induced voltage generated by the induction winding, perform signal processing on the induced voltage, and output a relatively accurate external force value, and includes a filtering and amplifying circuit, an automatic range switching circuit, a microprocessor, an a/D switching circuit, and a display, as shown in fig. 4; specifically, the method comprises the following steps:
after the external force is converted into an electric signal in the piezomagnetic element, the electric signal is corrected through a filtering and amplifying circuit because the signal is small and noise exists; the automatic range conversion circuit is used for automatically adjusting a proper range according to the judgment of the magnitude of the sensed voltage, so that the external force is measured in an effective range; the microprocessor is used for performing signal compensation, output decoupling and component force synthesis on the sensor through an algorithm; the A/D conversion circuit is used for converting the digital signal in the microprocessor into a numerical value of the actual force and outputting the numerical value to the display.
When the piezomagnetic element 6 is not acted by external force, the magnetic conductivity of each area is the same, two poles of the excitation winding 62 form symmetrical magnetic fields, the magnetic fields are only conducted inside the piezomagnetic element 6 because the force transmission element 7 is made of non-ferromagnetic materials, the distances from the excitation winding 62 to the two induction windings 64 are equal, the magnetic fluxes flowing to the two induction magnetic cores are equal, the magnetic fluxes are emitted from the excitation magnetic cores, are conducted through the induction magnetic cores through the intermediate magnetic circuit 65 and then return to the excitation magnetic cores, and a closed loop is formed;
because the excitation signal sent by the signal excitation circuit is an alternating voltage, the generated magnetic field changes constantly, the magnetic flux flowing through the induction windings 64 also changes, the two induction windings 64 generate induced electromotive forces with equal magnitude, and the output voltage is 0 after the two induction windings 64 are connected in series in the reverse direction.
When an external force F is applied to the spherical three-dimensional force-measuring piezomagnetic sensor, the external force F is decomposed into F according to an orthogonal decomposition methodX、FY、FZThe three piezomagnetic elements 6 respectively detect the component force in each direction, and because the piezomagnetic elements 6 are made of ferromagnetic materials, when the ferromagnetic materials are magnetized and subjected to stress action according to the piezomagnetic effect, the magnetic permeability of the ferromagnetic materials is changed oppositely along the direction of the action force and the direction perpendicular to the direction of the action force, so that the internal magnetic field is changed;
when an external force F is transmitted to the excitation magnetic core 61 through the force transmission element 7, the magnetic fields symmetrical inside the piezomagnetic element 6 are biased, the magnitude of the induced electromotive forces generated by the two induction windings 64 is unequal through the change of the magnetic fluxes of the two induction magnetic cores, and the output voltage is not 0 after the two induction magnetic cores are connected in series in the reverse direction; through the above process, the force measuring mechanism 1 realizes the mapping of force-magnetism-electricity, and outputs the induced voltage.
The induction winding 64 of the piezomagnetic element 6 is connected with the signal conditioning circuit 3 through the input end of the wiring port 4, and the signal conditioning circuit 3 performs the processes of signal compensation, output decoupling and component force synthesis on the induction voltage, and specifically comprises:
(1) firstly, after the induction voltage is processed by a filtering and amplifying circuit, the induction voltage is output as stable and effective voltage;
(2) because the magnetic permeability changes are different due to different external forces, the output induced voltages are also different, so that a range automatic switching circuit is adopted in the embodiment, and a proper range is automatically selected according to the magnitude of the induced voltages;
(3) in order to reduce the influence of working conditions such as temperature, vibration and the like on the sensor, the PSO-LSSVM algorithm model is adopted for signal compensation in the embodiment, so that the anti-jamming capability of the sensor is improved;
(4) due to the mutual influence between the sensor structure and the magnetic fields in different directions and the like, in the actual work of the sensor, when the piezomagnetic element in each dimension measures the component of force, the output signal of the piezomagnetic element in each dimension is influenced by other dimensions, so that the measured value of the dimension is not all the component of external force in the dimension, in order to eliminate the influence of coupling errors among the three dimensions, the embodiment realizes the nonlinear decoupling of the spherical three-dimensional force measurement piezomagnetic sensor through a BP neural network algorithm model, obtains the component of force in each direction after the decoupling, and synthesizes the force through a parallelogram rule; integrating the algorithms in microprocessing to accurately invert the applied three-dimensional force;
(5) and outputting the external force value and the component force value in each direction on a display through an A/D conversion circuit by the signal after signal compensation, output decoupling and component force synthesis processing to finish the measurement of the three-dimensional force.
Example 2
Based on the specific structure of the spherical three-dimensional force measurement piezomagnetic sensor described in embodiment 1, this embodiment provides a three-dimensional force measurement method for a spherical three-dimensional force measurement piezomagnetic sensor, including:
after external force is applied to the force measuring mechanism, the external force is subjected to orthogonal decomposition into component forces in multiple directions, the force measuring mechanism receives the component forces and receives an excitation signal transmitted by the signal excitation circuit, so that the external force is converted into non-zero induction voltage, and the induction voltage is transmitted to the signal conditioning circuit;
and the signal conditioning circuit performs signal compensation, output decoupling and component force synthesis on the induction voltage to obtain an external force value and a component force value in each direction.
The embodiment realizes the three-dimensional force measurement of the piezomagnetic sensor by changing the internal structure of the sensor, can accurately detect the load force in each direction, and simultaneously measures the bias degree of a magnetic field on the basis of equal stress deformation, thereby meeting the complex working condition in practical application and improving the measurement accuracy and sensitivity of the piezomagnetic sensor.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Although the embodiments of the present invention have been described with reference to the accompanying drawings, it is not intended to limit the scope of the present invention, and it should be understood by those skilled in the art that various modifications and variations can be made without inventive efforts by those skilled in the art based on the technical solution of the present invention.
Claims (10)
1. The utility model provides a spherical three-dimensional dynamometry piezomagnetic sensor which characterized in that includes: the device comprises a force measuring mechanism, a signal excitation circuit and a signal conditioning circuit; the force measuring mechanism comprises a spherical shell, a three-dimensional force transmission element and a piezomagnetic element, wherein the three-dimensional force transmission element is connected to the inner surface of the spherical shell in the three-dimensional orthogonal direction;
the piezomagnetic element receives external force exerted on the spherical shell through the force transmission element;
after the piezomagnetic element receives external force, the signal excitation circuit transmits an excitation signal to the piezomagnetic element so that the piezomagnetic element converts the external force into non-zero induction voltage and transmits the induction voltage to the signal conditioning circuit;
and the signal conditioning circuit performs signal compensation, output decoupling and component force synthesis on the induction voltage to obtain an external force value and a component force value in each direction.
2. The spherical three-dimensional force-measuring piezomagnetic sensor according to claim 1, wherein a positioning groove is formed in the inner surface of the spherical shell in the three-dimensional orthogonal direction, the top end of the force-transmitting element is embedded in the positioning groove, and the bottom end of the force-transmitting element is fixedly connected with the piezomagnetic element.
3. The spherical three-dimensional force measurement piezomagnetic sensor according to claim 1, wherein the piezomagnetic element comprises an excitation magnetic core, an excitation winding, an induction magnetic core and an induction winding; the excitation magnetic core is wound with an excitation winding, the induction magnetic core is wound with an induction winding, and the homonymous ends of the induction windings are connected to form reverse series connection.
4. The spherical three-dimensional force measuring piezomagnetic sensor according to claim 1, wherein the force measuring mechanism further comprises a spherical holder concentric with the spherical housing.
5. The spherical three-dimensional force-measuring piezomagnetic sensor as claimed in claim 4, wherein said spherical holder is provided with through holes for orthogonally assembling two-by-two excitation magnetic cores of the piezomagnetic element on the spherical holder.
6. The spherical three-dimensional force-measuring piezomagnetic sensor according to claim 1, wherein the signal excitation circuit comprises a detection circuit and a PLC circuit, the detection circuit is used for detecting whether the excitation signal is stable and outputting a feedback signal to the PLC circuit, and the PLC circuit is used for adjusting the power supply voltage to a stable state according to the feedback signal.
7. The spherical three-dimensional force-measuring piezomagnetic sensor according to claim 1, wherein the signal conditioning circuit comprises an automatic range switching circuit for automatically adjusting the external force measuring range according to the determination result of the magnitude of the induced voltage.
8. The spherical three-dimensional force-measuring piezomagnetic sensor according to claim 1, wherein the signal conditioning circuit comprises a microprocessor, the microprocessor performs nonlinear decoupling on external force through a BP neural network model to obtain component force in each direction, and component force synthesis is performed through a parallelogram rule.
9. The spherical three-dimensional force-measuring piezomagnetic sensor according to claim 1, wherein the signal conditioning circuit comprises an a/D conversion circuit, and the a/D conversion circuit is configured to perform a/D conversion on the external force and the component force obtained by signal compensation, output decoupling, and component force synthesis, and output the external force and the component force to a display for display.
10. A three-dimensional force measuring method of a spherical three-dimensional force measuring piezomagnetic sensor is characterized by comprising the following steps:
after external force is applied to the force measuring mechanism, the external force is subjected to orthogonal decomposition into component forces in multiple directions, the force measuring mechanism receives the component forces and receives an excitation signal transmitted by the signal excitation circuit, so that the external force is converted into non-zero induction voltage, and the induction voltage is transmitted to the signal conditioning circuit;
and the signal conditioning circuit performs signal compensation, output decoupling and component force synthesis on the induction voltage to obtain an external force value and a component force value in each direction.
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| CN113310605A (en) * | 2021-05-11 | 2021-08-27 | 山东大学 | Double-meter-shaped-shaft type force sensor and method thereof |
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| CN107101755A (en) * | 2017-06-15 | 2017-08-29 | 西安交通大学 | A kind of strain-type three-dimensional force sensor |
| CN108593161A (en) * | 2018-04-20 | 2018-09-28 | 南开大学 | A kind of minimally invasive surgical operation robot three-dimensional force sensor based on fiber grating |
| CN208902314U (en) * | 2018-11-27 | 2019-05-24 | 山东建业工程科技有限公司 | Triaxial pressure sensor |
| CN110595416A (en) * | 2019-09-02 | 2019-12-20 | 西安交通大学 | Three-dimensional decoupling calibration method and calibration device for scanning measuring head |
| CN110550238A (en) * | 2019-10-16 | 2019-12-10 | 中山大学 | closed-loop component force synthesis active vibration suppression method for flexible satellite |
| CN111426338A (en) * | 2020-05-19 | 2020-07-17 | 中国人民解放军91388部队 | Optical fiber vector acoustic-magnetic composite sensor |
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| CN113310605A (en) * | 2021-05-11 | 2021-08-27 | 山东大学 | Double-meter-shaped-shaft type force sensor and method thereof |
| CN113310605B (en) * | 2021-05-11 | 2022-12-27 | 日照海卓液压有限公司 | Double-meter-shaped-shaft type force sensor and method thereof |
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