CN109932670A - Based on the closed loop TMR magnetic field measuring device for powering on set - Google Patents
Based on the closed loop TMR magnetic field measuring device for powering on set Download PDFInfo
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Abstract
Turn single-ended chip, integrating circuit, V/I conversion circuit, exciting circuit, feedback conductor based on the closed loop TMR magnetic field measuring device for powering on set, including TMR magneto-dependent sensor, difference.The feedback conductor is arranged in below TMR magneto-dependent sensor, and magnetic field caused by feedback conductor is parallel with the sensitive axes of TMR magneto-dependent sensor；The signal output end connection difference of the TMR magneto-dependent sensor turns single-ended chip, and difference turns single-ended chip and connects integrating circuit, and the output end of integrating circuit is connected to feedback conductor after the conversion of V/I conversion circuit, constitutes closed loop；The V/I conversion circuit includes feedback resistance, for adjusting the size of feedback current in closed loop；The feedback conductor, V/I conversion circuit are all connected with exciting circuit.Apparatus of the present invention use closed loop configuration, pass through design of feedback conducting wire and are arranged under TMR sensor chip as set and feedback element, field compensation are carried out to TMR sensor from hardware, to inhibit sensor magnetic hysteresis and improve its sensitivity.
Description
Technical field
The present invention relates to magnetic field measurement technology fields, and in particular to a kind of based on the closed loop TMR magnetic-field measurement for powering on set
Device.
Background technique
Earth's magnetic field is a faint vector field, and as a kind of natural magnetic source for being present in earth surface, its purposes is non-
Often extensively, there is irreplaceable role in numerous areas such as military and aviations.It is high-precision for weak magnetic fields measurement
Magnetic field measuring device be it is essential, it mainly using magnetic field sensor as sensing element and combine corresponding signal conditioning circuit
It is made, therefore selects suitable magnetic field sensor, and design simple and effective signal conditioning circuit and optimize to it, be to develop
The important leverage of high performance magnetic field measuring device.
Currently, common magnetic field sensor has anisotropic magnetoresistive (AMR) sensor, giant magnetoresistance (GMR) sensor, tunnel
Magneto-resistor (TMR) sensor, giant magnetic impedance (GMI) sensor and fluxgate sensor etc., they suffer from respective advantage, but
It is for transducer sensitivity, TMR sensor has big advantage, such as: the model TMR9001 of multidimensional company production
Sensor, sensitivity has reached 300mV/V/Oe, is ten times of other sensors even decades of times.In comparison, high
The sensor of sensitivity does not need to carry out signal amplification, just can export the voltage signal for meeting circuit measuring condition, so just
It can be reduced the introducing of amplifier noise in classical signal conditioning circuit, therefore to design high-precision magnetic field measuring device, with
TMR sensor is that sensing element is that one kind selects well.In practice, using TMR sensor as the magnetic field of sensing element
Measuring device often uses the signal conditioning circuit of open loop structure, it has small in size, advantages of simple structure and simple, but TMR is passed
Sensor is made of magnetic multilayer films material, and the characteristic of the material determines own, and there are biggish magnetic hysteresis, such as TMR9001 to pass
Sensor, in the magnetic field range of ± 0.5Oe, magnetic hysteresis has reached 0.1Oe, this is surveyed to using it as magnetic field designed by sensing element
The performance of amount device has a great impact, and the signal conditioning circuit of open loop structure can only make simply sensor output signal
Processing, can not but solve its hysteresis problems.
For the hysteresis problems of TMR sensor, existing suppressing method is broadly divided into two aspects: first is that in physics or number
On the basis of learning principle, corresponding sensor output hysteresis model is established, the local hysteresis curve of the sensor is obtained, then leads to
It crosses algorithm to compensate it, but due to sensor individuals difference, needs to establish different magnetic hysteresis numbers to different sensors
Model is learned, is not suitable for batch production in this way.Second is that passing through the quick of development of new from the immanent cause that magnetic hysteresis generates
Sense material is fundamentally reduced the magnetic hysteresis of sensor or is changed magnetic hysteresis using novel production technology, such as has document to pass through
Research finds that different annealing temperatures can change the magnetic hysteresis of material, however the above method is while reducing sensor magnetic hysteresis, past
Toward the loss that will cause sensor other performance.
Summary of the invention
In order to solve the above technical problems, the present invention provide it is a kind of based on the closed loop TMR magnetic field measuring device for powering on set, should
Device uses closed loop configuration, passes through design of feedback conducting wire and is arranged under TMR sensor chip as set and feedback member
Part carries out field compensation to TMR sensor from hardware, to inhibit sensor magnetic hysteresis and improve its sensitivity.
The technical scheme adopted by the invention is as follows:
Turn single-ended chip, product based on the closed loop TMR magnetic field measuring device for powering on set, including TMR magneto-dependent sensor, difference
Parallel circuit, V/I conversion circuit, exciting circuit, feedback conductor.
The feedback conductor is arranged in below TMR magneto-dependent sensor, and magnetic field caused by feedback conductor and TMR magnetosensitive pass
The sensitive axes of sensor are parallel；
The signal output end connection difference of the TMR magneto-dependent sensor turns single-ended chip, and difference turns single-ended chip connection product
The output end of parallel circuit, integrating circuit is connected to feedback conductor after the conversion of V/I conversion circuit, constitutes closed loop；
The V/I conversion circuit includes feedback resistance, for adjusting the size of feedback current in closed loop；
The feedback conductor, V/I conversion circuit are all connected with exciting circuit.
The feedback conductor is arranged under TMR magneto-dependent sensor chip in a manner of PCB layout, is filled when to the magnetic-field measurement
It sets when powering on, a pulse current can be provided in exciting circuit, set is carried out to TMR magneto-dependent sensor, makes its output voltage edge
Fixed curve of output variation.
The TMR magneto-dependent sensor after powering on set, the electric bridge of TMR magneto-dependent sensor can export one with it is external to
The directly proportional voltage signal in magnetic field is surveyed, an integral voltage being gradually increased, product will be exported after the integrated circuit integral of the voltage
Component voltage can generate feedback current after V/I conversion circuit carries out V/I conversion and be sent into feedback conductor.
The present invention is a kind of based on the closed loop TMR magnetic field measuring device for powering on set, and technical effect is as follows:
1, the present invention combines TMR sensor to control sensor output curve using the set pulse that exciting circuit generates, and
Make working sensor under a zero stable magnetic field condition by closed loop feedback, sensor output voltage made to be maintained at zero point,
The hysteresis problems for effectively inhibiting TMR sensor, improve the performance of sensor.
2, sensitivity is adjustable: the resistance value by adjusting feedback resistance R in V/I conversion circuit, can be according to practice when institute
The magnetic-field measurement range needed freely adjusts the level of sensitivity of this magnetic field measuring device, if required magnetic-field measurement range very little,
Adjustable to one of the sensitivity of the present apparatus is greatly worth.
3, noiseproof feature is good: the present invention is sensing element, the output voltage of itself using highly sensitive TMR sensor
Signal is just able to satisfy the testing requirements of subsequent conditioning circuit, so signal amplification circuit is eliminated, so as to avoid amplifier noise
It introduces；And output voltage of the invention is to integrate gained by integrating circuit, and integrating circuit itself will not generate noise；Except this
In addition, the present invention uses closed loop feedback structure, therefore its output voltage sensitivity is unrelated with the sensitivity of sensor itself, be by
The resistance value of feedback resistance determined, therefore when the device sensitivity is very big, its actual noise just very little after converting, such as:
Assuming that the input noise of the magnetic field measuring device isThen when sensitivity is 50 μ V/nT, theoretic noise
Power spectral density isIt is theoretical when sensitivity is set as 100 μ V/nT
On noise power spectral density be just
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is feedback element layout viewing of the invention.
Fig. 2 is overall structure figure of the invention.
Fig. 3 is the schematic diagram of V/I conversion circuit in the present invention.
Fig. 4 (1) is operation schematic diagram when sensor is by set pulse in the present invention (before set)；
Fig. 4 (2) is operation schematic diagram when sensor is by set pulse in the present invention (after set).
Specific embodiment
Based on the closed loop TMR magnetic field measuring device for powering on set, including TMR magneto-dependent sensor 1, difference turn single-ended chip 2,
Integrating circuit 3, V/I conversion circuit 4, exciting circuit 5, feedback conductor 6.
The feedback conductor 6 is arranged in 1 lower section of TMR magneto-dependent sensor, and magnetic field caused by feedback conductor 6 and TMR magnetic
The sensitive axes of dependent sensor 1 are parallel.The sensitive axis direction of 1 magnetic core of TMR magneto-dependent sensor is found out before wiring, then surrounding should
Sensitive axes are arranged, guarantee that feedback conductor 6 is parallel with sensitive axes and in feedback conductor produced magnetic direction it is opposite with it is quick
It is opposite to feel external magnetic-field direction suffered by axis.When input feedback electric current in feedback conductor, one will be generated in feedback conductor
Feedback magnetic field, since in wiring, feedback conductor is parallel with sensitive axes, and produced magnetic direction and sensitive axes in feedback conductor
Suffered external magnetic-field direction reaches on the contrary, so produced magnetic field energy is offseted with external magnetic field suffered by sensitive axes in feedback conductor
To the effect of compensation, the magnetic core of sensor is made to work in null field.
The signal output end connection difference of the TMR magneto-dependent sensor 1 turns single-ended chip 2, and difference turns single-ended chip 2 and connects
The output end of integrating circuit 3, integrating circuit 3 is connected to feedback conductor 6 after the conversion of V/I conversion circuit 4, constitutes closed loop；
The V/I conversion circuit 4 includes feedback resistance 7, for adjusting the size of feedback current in closed loop.
The feedback conductor 6, V/I conversion circuit 4 are all connected with exciting circuit 5.
The TMR magneto-dependent sensor 1 is the sensor of the model TMR9001 of Jiangsu Duowei Technology Co., Ltd.'s production,
The chip has lower background noise and sensitivity has reached 300mV/V/Oe.
The difference turns the difference amplifier chip that single-ended chip 2 is model AD620.
The integrating circuit 3 is made of the input operational amplifier chip of model OPA4130UA.
The exciting circuit 5 is made of the constant-current source chip of model REF200.
The resistance value of the feedback resistance 7 can be adjusted according to use demand, should when required range is ± 100000nT
The resistance value of resistance may be configured as 50 Ω；When required range is ± 500000nT, the resistance value of the resistance may be configured as 100 Ω.
The feedback conductor 6 is arranged under 1 chip of TMR magneto-dependent sensor in a manner of PCB layout, when to the magnetic-field measurement
A pulse current can be provided when device powers on, in exciting circuit 5, set is carried out to TMR magneto-dependent sensor 1, make its output electricity
It presses and changes along fixed curve of output.
For the TMR magneto-dependent sensor 1 after powering on set, the electric bridge of TMR magneto-dependent sensor 1 can export one and outside
The directly proportional voltage signal in magnetic field to be measured, the integrated circuit 3 of the voltage will export an integral voltage being gradually increased after integrating,
Integral voltage can generate feedback current after V/I conversion circuit 4 carries out V/I conversion and be sent into feedback conductor 6.
The V/I conversion circuit 4 includes operational amplifier U1, operational amplifier U2, feedback resistance 7,6 one end of feedback conductor
7 one end of feedback resistance, operational amplifier U1 non-inverting input terminal are connected, operational amplifier U1 inverting input terminal connects operational amplifier
U1 output end, operational amplifier U1 output end connect the one end resistance R1, and the resistance R1 other end connects operational amplifier U2 with mutually defeated
Enter end, the one end resistance R2, operational amplifier U2 inverting input terminal connects the one end resistance R3, the resistance R4 other end, the one end resistance R4
Connect 7 other end of feedback resistance, operational amplifier U2 output end；6 other end of feedback conductor ground connection, resistance R3 other end ground connection,
The resistance R2 other end connects integrating circuit 3.
The exciting circuit 5 is a monostable circuit, and for generating set pulse, composition powers on setting circuit, every time
The circuit can all generate a set pulse when powering on, and set pulse, which acts on feedback conductor 6, will generate a high-intensity magnetic field pair
TMR magneto-dependent sensor 1 is motivated, so that it be made to export on the hysteresis loop for being maintained at fixed.
The magnetic field measuring device, by the size of 7 resistance value of feedback resistance in setting V/I conversion circuit 4, to control closed loop electricity
The size of feedback current in road.Its conversion process is as follows:
1 output voltage signal of TMR magneto-dependent sensor, can be defeated after difference turns single-ended chip 2 and is integrated by integrating circuit 3
An integral voltage U out0, which can generate through V/I conversion feeds back an electric current I, size are as follows:
Wherein R is resistance value used in V/I conversion process.
The magnetic field measuring device, after set, sensor bridge can export one it is directly proportional to external magnetic field to be measured
Voltage signal will export an integral voltage being gradually increased after the voltage is integrated, and integral voltage can generate after V/I is converted
One feedback current acts on feedback conductor 6.When the electric current exported through V/I conversion circuit 4 is passed through feedback conductor 6, feedback conductor 6
In can generate a feedback magnetic field BI, formula is as follows:
In formula, B is the compensation magnetic field strength that bias current circuit energization generates；μ is space permeability；I is feedback current；r
For the distance of space certain point to bias current circuit.The magnetic field can gradually be offseted with external magnetic field to be measured, while integrate output
Voltage is gradually increased until saturation, when integral output voltage reaches saturation point, feedback magnetic field supports completely with external magnetic field to be measured
Disappear, working sensor is in null field at this time.It works in sensor in a stable magnetic field environment, is passed to substantially reduce in this way
Sensor generated magnetic hysteresis under the variation of outer magnetic field environment.
The output voltage sensitivity of the magnetic field measuring device can by change V/I conversion circuit 4 in feedback resistance 7 it is big
It is small to be adjusted, but its corresponding range will reduce while raising magnetic field measuring device output voltage sensitivity.Due to this
Magnetic field measuring device be closed loop configuration and use integral feedback, therefore the voltage of magnetic field measuring device final output is by accumulating
Parallel circuit 3 generates, and voltage swing is unrelated with the sensitivity of TMR magneto-dependent sensor 1 itself, and its actual output voltage spirit
Sensitivity can be changed by adjusting the feedback resistance 7 in V/I conversion circuit 4, and principle is as follows:
Assuming that the magnetic-field measurement range of magnetic field measuring device designed by the present invention is ± 50000nT, corresponding output electricity
Pressure is ± 2.5V, and feedback conductor constant is 50mA/GS.It is S that magnetic field measuring device virtual voltage sensitivity, which can then be obtained,N=2.5V/
50000nT=50 μ V/nT.
In a feedback circuit, the feedback magnetic field that feedback conductor generates are as follows: BI=I/k.Wherein BIFor feedback magnetic field, I V/I
Feedback current caused by conversion circuit, k are the coil constant for the feedback conductor that the present invention designs.And after V/I is converted, instead
Supply current may be expressed as: I=V0/ R, wherein V0For integral output voltage, R is the feedback resistance in V/I conversion circuit.Thus may be used
Obtain integral voltage V0With feedback magnetic field BIRelational expression: V0=kRBI.Again because the device uses closed loop configuration, work as electricity
When road balances, working sensor is in zero magnetic field, i.e. BI=BX, so the sensibility in practice of the magnetic field measuring device are as follows: SN=k
R, since feedback conductor constant k is definite value, so by the resistance value for changing feedback resistance R, the spirit of adjustable signal conditioning circuit
Sensitivity.However increasing resistance R, the output voltage sensitivity of conditioning circuit will increase, but output range can also decrease, example
Such as R=100 Ω, calculated voltage sensibility is 50 μ V/nT, and corresponding range is ± 50000nT；As R=200 Ω,
Voltage sensibility is up to 100 μ V/nT, but range is only ± 25000nT.
Implementation steps:
(1): feedback element arrangement, as shown in Figure 1, feedback conductor 6 is placed in 1 chip bottom of TMR magneto-dependent sensor, feedback
Sensitive axis direction is parallel with TMR magneto-dependent sensor 1 for its magnetic direction of conducting wire 6.
(2): the signal output end of TMR magneto-dependent sensor 1 being connected with the input terminal that difference turns single-ended chip 2, by this
Module exports after the differential signal that TMR magneto-dependent sensor 1 exports is converted to single-ended signal.
(3): the output end that difference turns single-ended chip 2 is connected with the input terminal of integrating circuit 3, it is right using integrating circuit 3
Output signal carries out integral operation, improves signal output amplitude.
(4): 3 output end of integrating circuit is connected with the input terminal of V/I conversion circuit 4.Use 4 pairs of products of V/I conversion circuit
The voltage exported after point is handled, and circuit output voltage can be converted to feedback current by the circuit and input feedback is led
Line 6.
(5): the exciting circuit 5 being made of monostable circuit being connected with feedback conductor 6, composition powers on setting circuit.When
When to device power, feedback conductor 6 can generate a high-intensity magnetic field after being activated the pulse signal that circuit issues, and TMR magnetosensitive passes
Sensor 1 will be worked in hysteresis loop by its voltage output curve of the excitation of high-intensity magnetic field, as shown in Figure 4.
(6): the input terminal of V/I conversion circuit 4 is connected with feedback conductor 6.Compensation magnetic field pair is generated using feedback conductor 6
External magnetic field suffered by TMR magneto-dependent sensor 1 compensates.After feedback current flows into feedback conductor 6, one can be generated around conducting wire
A compensation magnetic field, the magnetic field is equal in magnitude, contrary with external magnetic field suffered by TMR magneto-dependent sensor 1, therefore the compensation magnetic
Field can be offseted with external magnetic field, make working sensor in a stable magnetic field environment, be existed to substantially reduce sensor
Generated magnetic hysteresis under external magnetic field environmental change.
Claims (8)
1. based on the closed loop TMR magnetic field measuring device for powering on set, including TMR magneto-dependent sensor (1), difference turn single-ended chip
(2), integrating circuit (3), V/I conversion circuit (4), exciting circuit (5), feedback conductor (6)；It is characterized by:
The feedback conductor (6) is arranged in below TMR magneto-dependent sensor (1), and magnetic field and TMR caused by feedback conductor (6)
The sensitive axes of magneto-dependent sensor (1) are parallel；
The signal output end connection difference of the TMR magneto-dependent sensor (1) turns single-ended chip (2), and difference turns single-ended chip (2) even
It connects integrating circuit (3), the output end of integrating circuit (3) is connected to feedback conductor (6) after V/I conversion circuit (4) conversion, is constituted
Closed loop；
The V/I conversion circuit (4) includes feedback resistance (7), for adjusting the size of feedback current in closed loop；
The feedback conductor (6), V/I conversion circuit (4) are all connected with exciting circuit (5).
2. according to claim 1 based on the closed loop TMR magnetic field measuring device for powering on set, it is characterised in that: the feedback
Conducting wire (6) is arranged under TMR magneto-dependent sensor (1) chip in a manner of PCB layout, when being powered on to the magnetic field measuring device,
A pulse current can be provided in exciting circuit (5), and set is carried out to TMR magneto-dependent sensor (1), makes its output voltage along fixed
Curve of output variation.
3. according to claim 1 based on the closed loop TMR magnetic field measuring device for powering on set, it is characterised in that: the TMR magnetic
For dependent sensor (1) after powering on set, the electric bridge of TMR magneto-dependent sensor (1) can export one with external magnetic field to be measured at just
The voltage signal of ratio, the integrated circuit of the voltage (3) will export an integral voltage being gradually increased, integral voltage warp after integrating
V/I conversion circuit (4) can generate feedback current feeding feedback conductor (6) after carrying out V/I conversion.
4. according to claim 1 based on the closed loop TMR magnetic field measuring device for powering on set, it is characterised in that: the V/I turns
Changing circuit (4) includes operational amplifier U1, operational amplifier U2, feedback resistance (7), feedback conductor (6) one end connection feedback electricity
(7) one end, operational amplifier U1 non-inverting input terminal are hindered, operational amplifier U1 inverting input terminal connects operational amplifier U1 output
End, operational amplifier U1 output end connect the one end resistance R1, and the resistance R1 other end connects operational amplifier U2 non-inverting input terminal, electricity
The one end R2 is hindered, operational amplifier U2 inverting input terminal connects the one end resistance R3, the resistance R4 other end, the one end resistance R4 connection feedback
Resistance (7) other end, operational amplifier U2 output end；Feedback conductor (6) other end ground connection, resistance R3 other end ground connection, resistance
The R2 other end connects integrating circuit (3).
5. according to claim 1 based on the closed loop TMR magnetic field measuring device for powering on set, it is characterised in that: the excitation
Circuit (5) is a monostable circuit, and for generating set pulse, the composition that is connected with feedback conductor (6) powers on setting circuit, often
Secondary circuit when powering on can all generate a set pulse, and set pulse, which acts on feedback conductor (6), will generate a strong magnetic
TMR magneto-dependent sensor (1) is motivated in field, so that it be made to export on the hysteresis loop for being maintained at fixed.
6. according to claim 1 based on the closed loop TMR magnetic field measuring device for powering on set, it is characterised in that: the magnetic field is surveyed
Device is measured by the size of feedback resistance (7) resistance value in setting V/I conversion circuit (4), to control feedback current in closed loop circuit
Size；Its conversion process is as follows:
TMR magneto-dependent sensor (1) output voltage signal is after difference turns single-ended chip (2) and is integrated by integrating circuit (3), meeting
Export an integral voltage U0, which can generate through V/I conversion feeds back an electric current I, size are as follows:
Wherein R is resistance value used in V/I conversion process.
7. according to claim 1 based on the closed loop TMR magnetic field measuring device for powering on set, it is characterised in that: the magnetic field is surveyed
Device is measured, when the electric current exported through V/I conversion circuit (4) is passed through feedback conductor (6), one can be generated in feedback conductor (6) instead
Present magnetic field BI, formula is as follows:
In formula, B is the compensation magnetic field strength that bias current circuit energization generates；μ is space permeability；I is feedback current；R is sky
Between certain point to bias current circuit distance；The magnetic field can gradually be offseted with external magnetic field to be measured, while integral output voltage
It is gradually increased until being saturated, when integral output voltage reaches saturation point, feedback magnetic field is completely counterbalanced by with external magnetic field to be measured, this
When working sensor in null field.
8. according to claim 1 based on the closed loop TMR magnetic field measuring device for powering on set, it is characterised in that: the magnetic field is surveyed
The output voltage sensitivity for measuring device can be adjusted by changing the size of feedback resistance (7) in V/I conversion circuit (4),
In a feedback circuit, the feedback magnetic field that feedback conductor (6) generates are as follows: BI=I/k, wherein BIFor feedback magnetic field, I is V/I conversion
Feedback current caused by circuit, k are the coil constant of feedback conductor；And after V/I is converted, feedback current indicates are as follows: I=
V0/ R, wherein V0For integral output voltage, R is the feedback resistance in V/I conversion circuit；It can thus be concluded that integral voltage V0With feedback
Magnetic field BIRelational expression: V0=kRBI；Due to the device use closed loop configuration, when circuit balancing, working sensor in
Zero magnetic field, i.e. BI=BX, so the sensibility in practice of the magnetic field measuring device are as follows: SN=kR, since feedback conductor constant k is
Definite value, so by the resistance value for changing feedback resistance (7), the sensitivity of adjustable signal conditioning circuit；However increase feedback electricity
(7) resistance value is hindered, the output voltage sensitivity of conditioning circuit will increase.
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| CN113391115A (en) * | 2021-03-17 | 2021-09-14 | 清华大学 | Circular sensor array for measuring current |
| CN116666036A (en) * | 2023-05-17 | 2023-08-29 | 珠海多创科技有限公司 | Demagnetizing module and current sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113391115A (en) * | 2021-03-17 | 2021-09-14 | 清华大学 | Circular sensor array for measuring current |
| CN116666036A (en) * | 2023-05-17 | 2023-08-29 | 珠海多创科技有限公司 | Demagnetizing module and current sensor |
| CN116666036B (en) * | 2023-05-17 | 2024-02-13 | 珠海多创科技有限公司 | Demagnetizing module and current sensor |
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