CN112626623A - Crystal growth furnace with positioning mechanism and furnace charging method - Google Patents
Crystal growth furnace with positioning mechanism and furnace charging method Download PDFInfo
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- CN112626623A CN112626623A CN202011419529.9A CN202011419529A CN112626623A CN 112626623 A CN112626623 A CN 112626623A CN 202011419529 A CN202011419529 A CN 202011419529A CN 112626623 A CN112626623 A CN 112626623A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V33/00—Structural combinations of lighting devices with other articles, not otherwise provided for
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/18—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring depth
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21W—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO USES OR APPLICATIONS OF LIGHTING DEVICES OR SYSTEMS
- F21W2131/00—Use or application of lighting devices or systems not provided for in codes F21W2102/00-F21W2121/00
- F21W2131/40—Lighting for industrial, commercial, recreational or military use
- F21W2131/409—Lighting for industrial, commercial, recreational or military use for furnaces or kilns
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The application discloses a crystal growth furnace with a positioning mechanism and a furnace charging method, wherein the furnace charging method comprises the following steps: providing a raw material component and a crystal growth furnace, wherein the crystal growth furnace comprises a positioning mechanism and a crystal growth furnace body, the positioning mechanism comprises a leveling component, a light source component and a supporting piece, and the leveling component and the light source component are respectively connected with the supporting piece; and adjusting the supporting piece to be horizontally arranged above the opening of the crystal growth furnace body according to the result of the leveling component, enabling light beams formed by a light source in the light source component to enter the crystal growth furnace body from the opening and form an aperture at a target position, moving the raw material component to the target position formed by the aperture in the crystal growth furnace body through the bottom opening of the crystal growth furnace body, and charging. The charging method is easy to operate, improves the operation safety, and the crystal growth furnace with the positioning mechanism is simple and convenient to operate, improves the working efficiency, has high working precision, and further improves the quality of prepared crystals.
Description
Technical Field
The application relates to a crystal growth furnace with a positioning mechanism and a furnace charging method, and belongs to the field of crystal growth.
Background
At present, in the semiconductor crystal growth process, raw material assemblies need to be placed at specified positions in a crystal growth furnace according to process requirements. The mode that adopts among the prior art is that the manual work is according to experience visual inspection adjustment raw materials subassembly, places the raw materials subassembly in the approximate required position, and the horizontal relative position completion operation of rethread handheld range finder adjustment raw materials subassembly.
In the prior art, repeated adjustment and measurement are needed, the operation is complicated, the working efficiency is low, and the labor cost is high; meanwhile, the working precision is low, the measurement error is large, and the strict process requirements cannot be met, so that the quality of the prepared crystal is influenced.
Disclosure of Invention
In order to solve the problems, the application provides a crystal growth furnace with a positioning mechanism and a furnace loading method, wherein a horizontal reference is provided by arranging a leveling component so that the positioning mechanism is horizontally placed above an opening of a crystal growth furnace body; the supporting piece is arranged to connect the leveling component and the light source component so that light beams formed by the light source can accurately form an aperture at a target position on the basis of the same horizontal plane; the position of the raw material assembly is positioned through an aperture formed by the light source assembly, so that the raw material assembly is accurately placed at a target position; the raw material assembly can be accurately placed at the target position by one-time operation of the positioning mechanism, the working precision is high, the measurement error is small, and the strict process requirements can be met; the charging method is easy to operate, improves the operation safety, reduces the abrasion of manual repeated operation on the raw material assembly, is beneficial to enhancing the stability of crystal growth, is simple and convenient to operate, greatly improves the working efficiency, reduces the labor cost and further improves the quality of the prepared crystal.
According to one aspect of the application, a furnace charging method of a crystal growth furnace is provided, and comprises the following steps:
providing a raw material component and a crystal growth furnace, wherein the crystal growth furnace comprises a positioning mechanism and a crystal growth furnace body, the positioning mechanism comprises a leveling component, a light source component and a supporting piece, and the leveling component and the light source component are respectively connected with the supporting piece;
and adjusting the supporting piece to be horizontally arranged above the opening of the crystal growth furnace body according to the result of the leveling component, enabling light beams formed by a light source in the light source component to enter the crystal growth furnace body from the opening and form an aperture at a target position, moving the raw material component to the target position formed by the aperture in the crystal growth furnace body through the bottom opening of the crystal growth furnace body, and charging.
Optionally, the raw material assembly is placed on a lifting table and then ascended to a target height position in the crystal growth furnace from an opening at the bottom of the crystal growth furnace body;
and adjusting the raw material assembly according to an aperture formed by the light beam on the top surface of the lifting platform or the top surface of a lower cover arranged on the lifting platform, so that the radial cross section of the raw material assembly is superposed with the aperture, namely, the raw material assembly is adjusted to the target position.
According to another aspect of the application, a crystal growth furnace with a positioning mechanism is provided, and comprises the positioning mechanism and a crystal growth furnace body;
the positioning mechanism comprises a leveling component, a light source component and a supporting piece, and the leveling component and the light source component are respectively connected with the supporting piece; the leveling component adjusts the supporting piece to be horizontally arranged above the opening of the crystal growth furnace body, and light beams formed by a light source in the light source component enter the crystal growth furnace body from the opening and form an aperture at a target position so as to position the raw material component;
the support piece is lapped on the top opening of the crystal growth furnace body, and the raw material assembly is placed in the crystal growth furnace body through the bottom opening of the crystal growth furnace body. The supporting piece is arranged to connect the leveling component and the light source component so that light beams formed by the light source can accurately form an aperture at a target position on the basis of the same horizontal plane; the position of the raw material assembly is positioned through an aperture formed by the light source assembly, so that the raw material assembly is accurately placed at a target position; the positioning mechanism can accurately place the raw material assembly at a target position by one-time operation, is simple and convenient to operate, greatly improves the working efficiency, reduces the labor cost, has high working precision and small measurement error, can meet strict technological requirements, and further improves the quality of the prepared crystal.
Optionally, the supporting member is a planar plate-shaped structure, the supporting member is overlapped above the opening of the crystal growth furnace body, the light source assembly is connected to the bottom surface of the supporting member, and the leveling assembly is connected to the top surface of the supporting member. The support piece is of a plane plate-shaped structure, is convenient to lap with the crystal growth furnace body and is convenient to hold for use; the leveling component is connected to the top surface of the supporting piece, so that the supporting piece can be observed and adjusted conveniently to be horizontally lapped above the opening of the crystal growth furnace body.
Optionally, the aperture formed by the light source assembly matches the shape of the feedstock assembly housing.
Optionally, the aperture is sized to correspond to the size of the feedstock assembly housing. The aperture is shaped to match the shape of the material assembly housing and is of a consistent size to facilitate accurate placement of the material assembly at a target location.
Optionally, the crystal growth furnace further comprises a scale arranged on the support member to adjust the relative position of the light source assembly with respect to the horizontal direction of the crystal growth furnace body. The arrangement of the scale enables the light source assembly to adjust the relative position of the horizontal direction according to different process requirements.
Optionally, the light source assembly comprises a barrel with a lamp holder and a lens, the lamp holder is connected to the inner side of the bottom of the barrel, the bottom of the barrel is connected to the bottom surface of the supporting piece, and the lens is arranged at the top of the barrel.
Preferably, the light source assembly comprises at least two replaceable lenses, the lenses of the light source assembly comprising different shapes to match differently shaped feedstock assemblies. The lens can be replaced according to the shape of the raw material assembly so as to meet different process requirements.
Optionally, the light source assembly further comprises a focusing piece, the focusing piece is connected with the lamp holder, and the size of the aperture is changed by adjusting the focal length of the light source assembly through the focusing piece, so that the aperture is consistent with the size of the raw material assembly shell.
Optionally, the distance measuring device is arranged on the support and on the same side as the light source assembly, and the distance measuring device detects the depth distance of the raw material assembly in the crystal growth furnace body so as to position the raw material assembly at a target depth position in the crystal growth furnace body.
The depth distance of the raw material assembly is the vertical distance from the top of the raw material assembly to the bottom surface of the support member.
The distance measuring component is arranged on the supporting piece and is positioned on the same side of the light source assembly, so that the distance measuring component and the light source assembly are positioned on the same horizontal reference, the measuring error is further reduced, and the working precision is improved; and can directly measure the depth distance of the raw material assembly after adjusting the raw material assembly to the target position, improve the working efficiency and avoid errors caused by switching different measuring tools.
Optionally, an annular supporting table is formed in the side wall of the top opening of the crystal growth furnace body in a concave manner, the supporting piece is lapped on the supporting table, two ends of the supporting piece are respectively abutted against the side wall of the supporting table, and the light source is positioned in the middle of the supporting piece.
Optionally, the edge of the support member is provided with a downwardly extending flange, a rib is formed around the top opening of the crystal growth furnace body, and the flange of the support table is clamped outside the rib.
Benefits that can be produced by the present application include, but are not limited to:
1. the furnace loading method provided by the application comprises the steps that a positioning mechanism is installed above an opening of a long crystal furnace body, a support piece is kept horizontal through a leveling component, a light source component is arranged on a lower cover of the long crystal furnace to form an aperture at a target position, a raw material component is adjusted to enable the radial cross section of the raw material component to be exactly matched with the aperture in shape, the lower cover and the raw material component are lifted to a long crystal fixing position at last, the operation is easy, the operation safety is improved, the abrasion of manual repeated operation on the raw material component is reduced, and the stability of crystal growth is favorably enhanced.
2. According to the crystal growth furnace, the horizontal reference is provided by the horizontal adjusting assembly, so that the positioning mechanism is horizontally placed above the opening of the crystal growth furnace body; the supporting piece is arranged to connect the leveling component and the light source component so that light beams formed by the light source can accurately form an aperture at a target position on the basis of the same horizontal plane; the position of the raw material assembly is positioned through an aperture formed by the light source assembly, so that the raw material assembly is accurately placed at a target position; the positioning mechanism can accurately place the raw material assembly at a target position by one-time operation, is simple and convenient to operate, greatly improves the working efficiency, reduces the labor cost, has high working precision and small measurement error, can meet strict technological requirements, and further improves the quality of the prepared crystal.
3. According to the crystal growth furnace, the supporting piece is of a plane plate-shaped structure, so that the crystal growth furnace is conveniently lapped with a crystal growth furnace body and is convenient to hold and use; the leveling component is connected to the top surface of the supporting piece, so that the supporting piece can be observed and adjusted conveniently to be horizontally lapped above the opening of the crystal growth furnace body.
4. The long brilliant stove that this application provided, the light ring that the light source subassembly formed with the shape of raw materials subassembly casing matches, and the size is unanimous so that place the raw materials subassembly accuracy in the target location.
5. The long brilliant stove that this application provided sets up the scale so that the light source subassembly can adjust the relative position of horizontal direction according to different technological requirements.
6. The long brilliant stove that this application provided, lens can be changed according to the shape of raw materials subassembly to satisfy different technology demands.
7. The long brilliant stove that this application provided, the focus through focusing piece regulation light source subassembly changes the size of light ring to make the light ring with the size of raw materials subassembly casing is unanimous, thereby can fix a position the raw materials subassembly of not unidimensional.
8. According to the crystal growth furnace, the distance measurement component is arranged on the supporting piece and is positioned on the same side of the light source assembly, so that the distance measurement component and the light source assembly are positioned on the same horizontal reference, the measurement error is further reduced, and the working precision is improved; and can directly measure the depth distance of the raw material assembly after adjusting the raw material assembly to the target position, improve the working efficiency and avoid errors caused by switching different measuring tools.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
fig. 1 is a schematic perspective view of a positioning mechanism according to an embodiment of the present disclosure;
FIG. 2 is an elevation view of a positioning mechanism according to an embodiment of the present application;
list of parts and reference numerals:
1. a support member; 2. a level gauge; 3. a light source assembly; 4. a lens; 5. a focusing member; 6. a barrel; 7. a distance measuring part; a scale.
Detailed Description
In order to more clearly explain the overall concept of the present application, the following detailed description is given by way of example in conjunction with the accompanying drawings.
In order that the above objects, features and advantages of the present application can be more clearly understood, the present application will be described in further detail with reference to the accompanying drawings and detailed description. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.
In addition, in the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present application.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The crystal growth furnace of the present application includes, but is not limited to, a silicon carbide single crystal furnace, a silicon carbide polycrystal furnace, a single crystal silicon crystal growth furnace, a polycrystalline silicon crystal growth furnace, and the like.
Referring to fig. 1-2, an embodiment of the application discloses a crystal growth furnace with a positioning mechanism, which comprises a positioning mechanism and a crystal growth furnace body; the positioning mechanism comprises a leveling component, a light source component 3 and a supporting piece 1, wherein the leveling component and the light source component 3 are respectively connected with the supporting piece 1; the leveling component adjusts the supporting piece 1 to be horizontally arranged above the opening of the crystal growth furnace body, light beams formed by a light source in the light source component 3 enter the crystal growth furnace body from the opening and form an aperture at a target position so as to position the raw material component; the support piece 1 is lapped on the top opening of the crystal growth furnace body, and the raw material assembly is placed in the crystal growth furnace body through the bottom opening of the crystal growth furnace body.
A horizontal reference is provided by arranging a leveling component, so that the positioning mechanism is horizontally placed above the opening of the crystal growth furnace body; the supporting piece 1 is arranged to connect the leveling component and the light source component 3, so that light beams formed by the light source can accurately form an aperture at a target position on the basis of the same horizontal plane; the position of the raw material assembly is positioned through an aperture formed by the light source assembly 3, so that the raw material assembly is accurately placed at a target position; the positioning mechanism can accurately place the raw material assembly at a target position by one-time operation, is simple and convenient to operate, greatly improves the working efficiency, reduces the labor cost, has high working precision and small measurement error, can meet strict technological requirements, and further improves the quality of the prepared crystal.
The raw material assembly may be a crystal, a raw material barrel, a crucible assembly, or the like. The following description will be given by taking the crystal growth furnace body as a cylindrical structure with an upper and lower opening and the raw material assembly as a cylindrical crystal, including but not limited to the above.
Specifically, the support 1 may have any structure, preferably a planar plate-like structure, and more preferably a rectangular parallelepiped plate-like structure. The material of the support member 1 is not limited, and may be wood, plastic, metal, etc., as long as the support function is achieved. The leveling component can be a level 2, a level ruler and the like as long as the leveling function can be realized. Preferably, the leveling assembly is a level 2.
In addition, the structure of the supporting member 1 can be modified by those skilled in the art according to the actual operation requirement, for example, a continuous groove structure is provided on both sides of the supporting member 1 to facilitate the holding, and the embodiment is not limited to the above manner.
In one embodiment, the support 1 is a rectangular plate-shaped structure, the support 1 is overlapped above the opening of the crystal growth furnace body, the light source assembly 3 is connected to the bottom surface of the support 1, and the level 2 is connected to the top surface of the support 1. The support piece 1 is of a cuboid plate-shaped structure, is convenient to lap joint with the crystal growth furnace body and is convenient to hold for use; the level 2 is connected to the top surface of the support 1 so as to observe and adjust the support 1 to horizontally overlap the opening of the crystal growth furnace body.
Specifically, the connection mode between the light source assembly 3 and the level gauge 2 and the supporting member 1 is not limited, and may be a snap connection, a threaded connection, an adhesive connection, or the like.
As a preferred embodiment, the light source assembly 3 is connected to the bottom surface of the support 1 by means of a snap fit, and the level 2 is connected to the top surface of the support 1 by means of an adhesive.
As an embodiment, the aperture formed by the light source assembly 3 matches the shape of the raw material assembly housing.
In one embodiment, the aperture is sized to correspond to the size of the raw assembly housing. The aperture is shaped to match the shape of the material assembly housing and is of a consistent size to facilitate accurate placement of the material assembly at a target location.
In one embodiment, the device further comprises a scale 8 arranged on the support 1 to adjust the relative position of the light source assembly 3 with respect to the horizontal direction of the crystal growth furnace body. The scale 8 is arranged so that the light source assembly 3 can adjust the relative position in the horizontal direction according to different process requirements.
The arrangement mode of the scale 8 is not limited, and further, a scale 8 can be arranged and connected to the top surface of the support member 1, or scales can be directly marked on the top surface of the support member 1. Specifically, if the scale of the central position of the light source is 0, the scales on the two sides are sequentially increased.
The mode of adjusting the relative position of the light source assembly 3 in the horizontal direction is not limited, and the light source assembly 3 can be adjusted in a sliding manner or clamping grooves are arranged at corresponding scales so as to meet the horizontal relative positions of different process requirements.
As an embodiment not shown, the positions of the scale 8 on the support 1 corresponding to the scales are respectively provided with a slot, and the light source assembly 3 is connected to the corresponding scale positions on the support 1 by a buckle according to the process requirements.
As an embodiment, the light source assembly 3 includes a barrel 6 having a lamp holder attached to the inside of the bottom of the barrel 6, and a lens 4 attached to the bottom of the support member 1, the lens 4 being disposed on the top of the barrel 6.
The connection mode of the lamp holder and the inner side of the bottom of the cylinder 6, the bottom of the cylinder 6 and the bottom surface of the support member 1 and the connection mode of the lens 4 and the top of the cylinder 6 are not limited, and can be a buckle connection, a threaded connection or an adhesive connection and the like. In one embodiment, the lamp holder is screwed inside the bottom of the barrel 6, the bottom of the barrel 6 is snapped on the bottom of the support member 1, and the lens 4 is screwed on the barrel 6.
The number of the lenses 4 is not limited as long as the lenses 4 can be matched with the shapes of different raw material components.
As a preferred embodiment, the light source assembly 3 comprises at least two replaceable lenses 4, the light source assembly 3 comprising lenses 4 of different shapes to match differently shaped stock assemblies. The lens 4 can be replaced according to the shape of the raw material assembly so as to meet different process requirements.
As an embodiment, the light source assembly 3 further includes a focusing member 5, the focusing member 5 is connected to the lamp holder, and the focusing member 5 adjusts the focal length of the light source assembly 3 to change the size of the aperture, so that the aperture is consistent with the size of the raw material assembly housing.
The focusing piece 5 and the lamp holder connected mode can be threaded connection, adhesive bonding and the like, the focusing mode is not limited, telescopic focusing, rotary focusing and the like can be realized, and the focal length of the light source component 3 can be changed.
As an embodiment, the focusing piece 5 is arranged at the bottom of the lamp holder and is in rotary threaded connection with the lamp holder, and the focusing mode is telescopic focusing. The lamp holder is raised or lowered by rotating the focusing member 5, so that the focal length of the light source assembly 3 is changed to change the size of the aperture, so that the aperture is consistent with the size of the raw material assembly housing.
As an embodiment, a distance measuring part 7 is further included on the support 1 and on the same side as the light source assembly 3, and the distance measuring part 7 detects the depth distance of the raw material assembly in the long crystal furnace body to position the raw material assembly at a target depth position in the long crystal furnace body. The distance measuring component 7 is arranged on the supporting piece 1 and is positioned on the same side of the light source assembly 3, so that the distance measuring component 7 and the light source assembly 3 are positioned on the same horizontal reference, the measuring error is further reduced, and the working precision is improved; and can directly measure the depth distance of the raw material assembly after adjusting the raw material assembly to the target position, improve the working efficiency and avoid errors caused by switching different measuring tools.
The distance measuring means 7 is not limited, and may be a laser distance meter, an ultrasonic distance meter, or the like as long as a function of measuring a distance is realized. Preferably, the distance measuring means 7 is a laser distance meter.
Specifically, the depth distance of the raw material assembly is the vertical distance from the top of the raw material assembly to the bottom surface of the support member 1.
As an implementation mode, the side wall of the top opening of the crystal growth furnace body is concave inwards to form an annular support platform, the support piece 1 is lapped on the support platform, two ends of the support piece 1 are respectively abutted against the side wall of the support platform, and the light source is positioned in the middle of the support piece 1. The annular supporting platform provides supporting force for the bottom surface of the supporting piece 1, so that the supporting piece is stably lapped on the supporting platform, and the side wall of the supporting platform provides supporting force for the two ends of the supporting piece 1, so that the supporting piece and the supporting platform are stably lapped, and the supporting piece 1 is prevented from displacing and affecting measured data.
As another embodiment, the edge of the supporting piece 1 is provided with a flanging extending downwards, a convex rib is formed around the top opening of the crystal growth furnace body, and the flanging of the supporting table is clamped outside the convex rib. The flanging of the support piece 1 is clamped with the convex rib to ensure that the support piece 1 is stable, the operation is simple and convenient, and the working precision is improved.
A furnace charging method preferred by any one of the crystal growth furnaces comprises the following steps:
1) select circular lens 4 according to the technological requirement, connect light source subassembly 3 in advance at the technological requirement and correspond 8 scale positions of scale and set up corresponding focus, with the positioning mechanism overlap joint on the brace table at long brilliant furnace body top, both ends lean on the brace table lateral wall or with the positioning mechanism turn-ups joint in the long brilliant furnace body top protruding muscle outside, adjust support piece 1 according to spirit level 2 and make its level overlap joint in furnace body opening top.
2) The lower cover of the crystal growth furnace is placed on the lifting platform, the cylindrical crystal is placed at any position on the lower cover of the crystal growth furnace, the cylindrical crystal is moved into the aperture according to the circular aperture formed on the lower cover by the light source assembly 3, the bottom edge of the crystal is adjusted to be just matched with the aperture in shape, and the lifting platform is controlled to lift the lower cover and the cylindrical crystal to the crystal growth fixed position of the crystal growth furnace and then stop.
3) And measuring the vertical distance from the top of the crystal to the bottom surface of the support member 1 by using a laser range finder, and moving away the positioning mechanism to finish charging.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the system embodiment, since it is substantially similar to the method embodiment, the description is simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
Claims (10)
1. The charging method of the crystal growth furnace is characterized by comprising the following steps:
providing a raw material component and a crystal growth furnace, wherein the crystal growth furnace comprises a positioning mechanism and a crystal growth furnace body, the positioning mechanism comprises a leveling component, a light source component and a supporting piece, and the leveling component and the light source component are respectively connected with the supporting piece;
and adjusting the supporting piece to be horizontally arranged above the opening of the crystal growth furnace body according to the result of the leveling component, enabling light beams formed by a light source in the light source component to enter the crystal growth furnace body from the opening and form an aperture at a target position, moving the raw material component to the target position formed by the aperture in the crystal growth furnace body through the bottom opening of the crystal growth furnace body, and charging.
2. The charging method of the crystal growth furnace according to claim 1, wherein the raw material assembly is placed on a lifting table and then ascended to a target height position in the crystal growth furnace from an opening at the bottom of the crystal growth furnace body;
and adjusting the raw material assembly according to an aperture formed by the light beam on the top surface of the lifting platform or the top surface of a lower cover arranged on the lifting platform, so that the radial cross section of the raw material assembly is superposed with the aperture, namely, the raw material assembly is adjusted to the target position.
3. The crystal growth furnace with the positioning mechanism is characterized by comprising the positioning mechanism and a crystal growth furnace body;
the positioning mechanism comprises a leveling component, a light source component and a supporting piece, and the leveling component and the light source component are respectively connected with the supporting piece; the leveling component adjusts the supporting piece to be horizontally arranged above the opening of the crystal growth furnace body, and light beams formed by a light source in the light source component enter the crystal growth furnace body from the opening and form an aperture at a target position so as to position the raw material component;
the support piece is lapped on the top opening of the crystal growth furnace body, and the raw material assembly is placed in the crystal growth furnace body through the bottom opening of the crystal growth furnace body.
4. The crystal growth furnace of claim 3, wherein the supporting members are of a planar plate-shaped structure, the supporting members are overlapped above the opening of the crystal growth furnace body, the light source assembly is connected to the bottom surfaces of the supporting members, and the leveling assembly is connected to the top surfaces of the supporting members.
5. The crystal growth furnace of claim 4, wherein the light source assembly forms an aperture that matches the shape of the housing of the feedstock assembly; and/or
The aperture is the same size as the raw material assembly housing.
6. The crystal growth furnace of claim 3, further comprising a scale provided on the support to adjust the relative position of the light source assembly with respect to the horizontal direction of the crystal growth furnace body.
7. The crystal growth furnace of any one of claims 3 to 6, wherein the light source assembly comprises a barrel with a lamp holder attached to the inside of the bottom of the barrel, and a lens attached to the bottom of the support, the lens being disposed on the top of the barrel.
Preferably, the light source assembly comprises at least two replaceable lenses, the lenses of the light source assembly comprising different shapes to match differently shaped feedstock assemblies.
8. The crystal growth furnace of claim 7, wherein the light source assembly further comprises a focusing member, the focusing member is connected with the lamp holder, and the size of the aperture is changed by adjusting the focal length of the light source assembly through the focusing member, so that the aperture is consistent with the size of the raw material assembly shell.
9. The crystal growth furnace of claim 3, further comprising a distance measuring part on the same side of the support as the light source assembly, the distance measuring part detecting a depth distance of the raw material assembly in the crystal growth furnace body to position the raw material assembly at a target depth position in the crystal growth furnace body.
10. The crystal growth furnace according to any one of claims 3 to 6, wherein the side wall of the top opening of the crystal growth furnace body is recessed to form an annular support platform, the support piece is lapped on the support platform, two ends of the support piece are respectively abutted against the side wall of the support platform, and the light source is positioned in the middle of the support piece; or
The edge of the supporting piece is provided with a flanging extending downwards, a convex rib is formed around the top opening of the crystal growth furnace body, and the flanging of the supporting table is clamped outside the convex rib.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011419529.9A CN112626623A (en) | 2020-12-07 | 2020-12-07 | Crystal growth furnace with positioning mechanism and furnace charging method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011419529.9A CN112626623A (en) | 2020-12-07 | 2020-12-07 | Crystal growth furnace with positioning mechanism and furnace charging method |
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| US20080022922A1 (en) * | 2006-07-26 | 2008-01-31 | Burkhard Altekruger | Crystal pulling apparatus and method for the production of heavy crystals |
| CN103173853A (en) * | 2013-03-14 | 2013-06-26 | 中山兆龙光电科技有限公司 | Thermal field centralized positioning device of single crystal furnace for growing large sapphires through kyropoulos method |
| CN103882529A (en) * | 2012-12-21 | 2014-06-25 | 有研光电新材料有限责任公司 | Adjustment method and device for aligning seed crystals in crystal growing furnace with crucible |
| CN210802367U (en) * | 2019-10-12 | 2020-06-19 | 济宁天岳新材料科技有限公司 | Laser range finder |
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2020
- 2020-12-07 CN CN202011419529.9A patent/CN112626623A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080022922A1 (en) * | 2006-07-26 | 2008-01-31 | Burkhard Altekruger | Crystal pulling apparatus and method for the production of heavy crystals |
| CN103882529A (en) * | 2012-12-21 | 2014-06-25 | 有研光电新材料有限责任公司 | Adjustment method and device for aligning seed crystals in crystal growing furnace with crucible |
| CN103173853A (en) * | 2013-03-14 | 2013-06-26 | 中山兆龙光电科技有限公司 | Thermal field centralized positioning device of single crystal furnace for growing large sapphires through kyropoulos method |
| CN210802367U (en) * | 2019-10-12 | 2020-06-19 | 济宁天岳新材料科技有限公司 | Laser range finder |
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