CN112601169A - 一种宽频带高灵敏度谐振式压电mems麦克风 - Google Patents
一种宽频带高灵敏度谐振式压电mems麦克风 Download PDFInfo
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- CN112601169A CN112601169A CN202011479067.XA CN202011479067A CN112601169A CN 112601169 A CN112601169 A CN 112601169A CN 202011479067 A CN202011479067 A CN 202011479067A CN 112601169 A CN112601169 A CN 112601169A
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- 230000002093 peripheral effect Effects 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 24
- 239000012528 membrane Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/02—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/02—Transducers using more than one principle simultaneously
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202011479067.XA CN112601169B (zh) | 2020-12-15 | 2020-12-15 | 一种宽频带高灵敏度谐振式压电mems麦克风 |
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CN202011479067.XA CN112601169B (zh) | 2020-12-15 | 2020-12-15 | 一种宽频带高灵敏度谐振式压电mems麦克风 |
Publications (2)
Publication Number | Publication Date |
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CN112601169A true CN112601169A (zh) | 2021-04-02 |
CN112601169B CN112601169B (zh) | 2021-09-24 |
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CN202011479067.XA Active CN112601169B (zh) | 2020-12-15 | 2020-12-15 | 一种宽频带高灵敏度谐振式压电mems麦克风 |
Country Status (1)
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CN (1) | CN112601169B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113556657A (zh) * | 2021-06-29 | 2021-10-26 | 歌尔微电子股份有限公司 | Mems麦克风 |
CN114222231A (zh) * | 2021-12-10 | 2022-03-22 | 武汉大学 | 基于固支梁结构的双晶压电式mems麦克风 |
CN114390413A (zh) * | 2021-12-30 | 2022-04-22 | 深圳市爱林瑞电子有限公司 | 一种具有高灵敏度的压电式麦克风 |
WO2022222316A1 (zh) * | 2021-04-23 | 2022-10-27 | 深圳市韶音科技有限公司 | 传感装置 |
WO2023184403A1 (zh) * | 2022-03-31 | 2023-10-05 | 京东方科技集团股份有限公司 | 麦克风、显示面板 |
US11924608B2 (en) | 2021-08-11 | 2024-03-05 | Shenzhen Shokz Co., Ltd. | Microphone |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050168102A1 (en) * | 2004-02-04 | 2005-08-04 | Hitachi Media Electronics Co., Ltd. | Film bulk acoustic wave resonator, film bulk acoustic wave resonator filter and method of manufacturing film bulk acoustic wave resonator |
US20070201710A1 (en) * | 2006-02-24 | 2007-08-30 | Yamaha Corporation | Condenser microphone |
JP2007228539A (ja) * | 2006-02-21 | 2007-09-06 | Taiyo Yuden Co Ltd | 振動板及び圧電振動板 |
CN101098569A (zh) * | 2006-06-28 | 2008-01-02 | 潍坊歌尔电子有限公司 | 半导体传声器芯片 |
US20170022046A1 (en) * | 2015-07-22 | 2017-01-26 | Robert Bosch Gmbh | Mems component including a sound-pressure-sensitive diaphragm element |
CN108337617A (zh) * | 2018-03-02 | 2018-07-27 | 上海微联传感科技有限公司 | 压电式麦克风 |
CN109495829A (zh) * | 2018-12-31 | 2019-03-19 | 瑞声声学科技(深圳)有限公司 | 压电式mems麦克风 |
CN110052391A (zh) * | 2019-05-28 | 2019-07-26 | 浙江大学 | 双谐振模式耦合的微机械压电超声波换能器 |
CN110602616A (zh) * | 2019-08-28 | 2019-12-20 | 武汉大学 | 一种高灵敏度mems压电式麦克风 |
CN111294715A (zh) * | 2020-03-02 | 2020-06-16 | 瑞声声学科技(深圳)有限公司 | 压电mems麦克风 |
CN111328005A (zh) * | 2020-03-10 | 2020-06-23 | 瑞声声学科技(深圳)有限公司 | 压电式mems麦克风 |
-
2020
- 2020-12-15 CN CN202011479067.XA patent/CN112601169B/zh active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050168102A1 (en) * | 2004-02-04 | 2005-08-04 | Hitachi Media Electronics Co., Ltd. | Film bulk acoustic wave resonator, film bulk acoustic wave resonator filter and method of manufacturing film bulk acoustic wave resonator |
JP2007228539A (ja) * | 2006-02-21 | 2007-09-06 | Taiyo Yuden Co Ltd | 振動板及び圧電振動板 |
US20070201710A1 (en) * | 2006-02-24 | 2007-08-30 | Yamaha Corporation | Condenser microphone |
CN101098569A (zh) * | 2006-06-28 | 2008-01-02 | 潍坊歌尔电子有限公司 | 半导体传声器芯片 |
US20170022046A1 (en) * | 2015-07-22 | 2017-01-26 | Robert Bosch Gmbh | Mems component including a sound-pressure-sensitive diaphragm element |
CN108337617A (zh) * | 2018-03-02 | 2018-07-27 | 上海微联传感科技有限公司 | 压电式麦克风 |
CN109495829A (zh) * | 2018-12-31 | 2019-03-19 | 瑞声声学科技(深圳)有限公司 | 压电式mems麦克风 |
CN110052391A (zh) * | 2019-05-28 | 2019-07-26 | 浙江大学 | 双谐振模式耦合的微机械压电超声波换能器 |
CN110602616A (zh) * | 2019-08-28 | 2019-12-20 | 武汉大学 | 一种高灵敏度mems压电式麦克风 |
CN111294715A (zh) * | 2020-03-02 | 2020-06-16 | 瑞声声学科技(深圳)有限公司 | 压电mems麦克风 |
CN111328005A (zh) * | 2020-03-10 | 2020-06-23 | 瑞声声学科技(深圳)有限公司 | 压电式mems麦克风 |
Non-Patent Citations (3)
Title |
---|
YANG ZOU: "Dual-mode thin film bulk acoustic wave resonator and filter", 《JOURNAL OF APPLIED PHYSICS》 * |
国世上: "巨电致伸缩共聚物P(VDF-TrFE)超声传感器的研制", 《传感技术学报》 * |
张保军: "宽频响高灵敏度传声器", 《电声技术》 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022222316A1 (zh) * | 2021-04-23 | 2022-10-27 | 深圳市韶音科技有限公司 | 传感装置 |
CN113556657A (zh) * | 2021-06-29 | 2021-10-26 | 歌尔微电子股份有限公司 | Mems麦克风 |
US11924608B2 (en) | 2021-08-11 | 2024-03-05 | Shenzhen Shokz Co., Ltd. | Microphone |
CN114222231A (zh) * | 2021-12-10 | 2022-03-22 | 武汉大学 | 基于固支梁结构的双晶压电式mems麦克风 |
CN114222231B (zh) * | 2021-12-10 | 2023-12-29 | 武汉敏声新技术有限公司 | 基于固支梁结构的双晶压电式mems麦克风 |
CN114390413A (zh) * | 2021-12-30 | 2022-04-22 | 深圳市爱林瑞电子有限公司 | 一种具有高灵敏度的压电式麦克风 |
CN114390413B (zh) * | 2021-12-30 | 2023-08-22 | 深圳市鑫启辉科技发展有限公司 | 一种具有高灵敏度的压电式麦克风 |
WO2023184403A1 (zh) * | 2022-03-31 | 2023-10-05 | 京东方科技集团股份有限公司 | 麦克风、显示面板 |
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Publication number | Publication date |
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CN112601169B (zh) | 2021-09-24 |
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Effective date of registration: 20220823 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |
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