CN112596344B - Exposure control system and method of exposure equipment - Google Patents

Exposure control system and method of exposure equipment Download PDF

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Publication number
CN112596344B
CN112596344B CN202011341287.6A CN202011341287A CN112596344B CN 112596344 B CN112596344 B CN 112596344B CN 202011341287 A CN202011341287 A CN 202011341287A CN 112596344 B CN112596344 B CN 112596344B
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Prior art keywords
laser
exposure
module
control
fpga controller
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CN112596344A (en
Inventor
陈国军
刘智慧
吴景舟
马迪
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Jiangsu Desheng Intelligent Technology Co ltd
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Jiangsu Desheng Intelligent Technology Co ltd
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption

Abstract

The invention discloses an exposure control system and method of exposure equipment, wherein the system comprises an emission card, a data processing board, a laser driving and control board and a motion control board, the data processing board comprises an FPGA controller and an embedded processor embedded in the FPGA controller, the emission card receives data information and instruction information sent by an upper computer, the embedded processor processes the data information and the instruction information and outputs a laser signal and an equipment motion signal through the FPGA controller, the laser driving and control board controls a laser to generate a laser beam according to the laser signal, and the motion control board controls the exposure equipment to execute corresponding actions according to the equipment motion signal. According to the invention, the data processing and the motion control of the exposure equipment are separated, so that the functions of the board card are independent, and the fault is conveniently positioned when the fault occurs.

Description

Exposure control system and method of exposure equipment
Technical Field
The invention relates to the technical field of exposure, in particular to an exposure control system and method of exposure equipment.
Background
The exposure apparatus is a mechanical apparatus for transferring image information on a film or other transparent body onto a surface coated with a photosensitive substance using light of a specific wavelength, and includes a CTS (Computer To Screen) apparatus, a CTP apparatus, a roll-To-roll apparatus, and the like. The CTP (Computer to Plate) device is an optical, mechanical and electrical integration device for imaging a digital printing Plate, which is controlled by a Computer and an embedded system, converts characters and images into digital signals, drives a laser to scan and image on a special Plate by using the digital signals, and then develops images by using a developing solution to generate the printing Plate, and is divided into four types, namely an inner drum type CTP device, an outer drum type CTP device, a flat Plate type CTP device and a curved Plate type CTP device. The external drum CTP equipment comprises an optical part, a mechanical part and the like, wherein a single original laser beam generated by an optical laser is decomposed into a plurality of laser beams by a complex optical system, and the plurality of laser beams are directly emitted to the surface of the printing plate for scanning and recording.
The exposure control system can set the parameters necessary for the operation of the exposure equipment, adjust and control the state of the exposure equipment, and the like. Some exposure control systems at present adopt a large integrated circuit CPLD (Complex Programmable Logic Device) control system, which is a Complex Programmable Logic Device, relatively large in scale and Complex in structure, belongs to the field of large-scale integrated circuits, and is a digital integrated circuit in which a user constructs Logic functions according to respective needs. Some exposure control systems adopt a control system composed of an MCU (micro controller Unit) and an FPGA (Field-Programmable Gate Array), which has the disadvantages of complex board-level structure and high cost, and such control systems adopt the same control board card to complete the data processing and motion control functions, so that accurate positioning cannot be performed when a fault occurs, that is, it cannot be determined whether a fault exists in a data processing circuit part or a fault exists in a motion control circuit part. In addition, some exposure control systems adopt split type design of the bus card and the control board card, which easily causes the defects of high cost and large space occupation of the control system.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an exposure control system of exposure equipment, which has a simple board-level structure, is low in cost and is convenient for fault positioning.
In order to achieve the purpose, the invention provides the following technical scheme: an exposure control system of an exposure apparatus, the system comprising
The issuing card is connected with the upper computer and used for receiving the data information and the instruction information sent by the upper computer;
the data processing board is integrated with the bus card into a whole and comprises a first FPGA controller and an embedded processor embedded in the first FPGA controller, the embedded processor processes received data information and instruction information and outputs laser signals and equipment motion signals through the first FPGA controller;
the laser driving and control panel is connected with the data processing panel and is used for controlling the laser to generate laser beams according to the laser signals;
and the motion control board is connected with the data processing board and used for controlling the exposure equipment to execute corresponding actions according to the equipment motion signal.
Preferably, the hair bank card comprises
The network interface module is connected with the upper computer;
and the Ethernet PHY module is connected between the network interface module and the first FPGA controller and is used for realizing connection of an Ethernet physical layer.
Preferably, the laser signal comprises a laser data signal and a laser control signal, and the laser driving and controlling board comprises
The laser driving board is connected with the first FPGA controller and used for receiving the laser data signals and controlling a laser according to the laser data signals;
and the laser control panel is connected with the first FPGA controller and used for receiving the laser control signal and controlling the laser according to the laser control signal.
Preferably, the data processing board further comprises
The exposure data interface module is connected between the laser drive board and the first FPGA controller and used for processing the laser data signals output by the first FPGA controller and outputting the processed laser data signals to the laser drive board; and/or
And the laser control interface module is connected between the laser control panel and the first FPGA controller and used for processing the laser control signal output by the first FPGA controller and then outputting the processed laser control signal to the laser control panel.
Preferably, the first FPGA controller comprises
The laser logic circuit module is connected with the embedded processor and is used for outputting laser signals;
and the focal length adjusting logic circuit module is connected with the embedded processor and is used for outputting a focal length motor control signal.
Preferably, the embedded processor comprises
An embedded kernel;
the laser parameter setting module is connected with the embedded kernel and used for realizing the manual setting of the laser energy and controlling the output of the process interface;
the laser parameter analysis module is connected with the embedded kernel and used for analyzing laser setting parameters;
the motion control panel communication module is connected with the embedded kernel and is used for realizing the communication function with the motion control panel;
and the focal length setting module is connected with the embedded kernel and is used for realizing the control flow of the focal length motor and the output of the control signal of the focal length motor.
Preferably, the exposure control system of the exposure apparatus further includes
And the peripheral control circuit module comprises a focus motor control circuit module connected with the first FPGA controller module, and the focus motor control circuit module is used for controlling a focus motor to work according to a focus motor control signal output by the first FPGA controller so as to adjust the focus of the optical part of the exposure equipment.
Preferably, the data processing board further comprises
And the peripheral control circuit driving module is connected between the peripheral control circuit module and the first FPGA controller and used for converting the control signal output by the first FPGA controller into a level signal and inputting the level signal to the peripheral control circuit module.
Preferably, the peripheral control circuit driving module includes
The voltage conversion module is connected with the first FPGA controller and used for converting a control signal into a level signal;
and the peripheral control circuit interface module is connected between the voltage conversion module and the peripheral control circuit module and is used for outputting the level signal to the peripheral control circuit module.
Preferably, the motion control panel comprises
The microprocessor is connected with the first FPGA controller and used for receiving equipment motion signals;
and the second FPGA controller is connected with the microprocessor and is used for controlling the action of the exposure equipment to execute work according to the equipment motion signal.
The invention also discloses an exposure control method of the exposure equipment, which comprises the following steps
The transmitting and arranging card receives data information and instruction information sent by an upper computer;
the data processing board processes the received data information and instruction information and outputs a laser signal and an equipment motion signal;
the laser driving and controlling board controls the laser to generate laser beams according to the laser signals;
and the motion control board controls the exposure equipment to execute corresponding actions according to the equipment motion signal.
The invention has the beneficial effects that:
(1) According to the invention, the embedded processor is embedded in the FPGA controller, so that the circuit structure is simple, the board level structure is small, the occupied space is small, and planning and wiring are convenient.
(2) The invention integrates the bus card and the data processing board, thus reducing the board card types and lowering the production cost.
(3) The invention separates the data processing and the motion control of the exposure equipment, namely, a data processing board special for data processing and a motion control board special for motion control are arranged, so that the functions of the board cards are independent, and the fault positioning is convenient when the fault occurs.
Drawings
FIG. 1 is a block diagram of the system architecture of the present invention;
FIG. 2 is a block diagram of the first FPGA controller and embedded processor of FIG. 1;
fig. 3 is a schematic diagram of a laser control loop of the present invention.
Detailed Description
The technical solution of the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention.
The objects of processing and the motion states of the respective types of exposure apparatuses differ, but the exposure control systems are relatively similar. The present invention describes the exposure control system in detail by taking the CTP device as a preferred embodiment, and the exposure control systems of other exposure devices can be seen in detail as the exposure control system of the CTP device.
Referring to fig. 1 and fig. 2, an exposure control system disclosed in the present invention can control an exposure process of a CTP device, so that the CTP device completes a corresponding plate-making printing process. The CTP device includes an optical portion for generating a corresponding exposure beam, including but not limited to a laser, an optical assembly, and a mechanical portion; the mechanical part is used for controlling the exposure medium to perform corresponding actions and the like, and includes but is not limited to a servo motor and a stepping motor.
The exposure control system comprises an emission card, a data processing board, a laser driving and control board and a motion control board, wherein the emission card is connected with the upper computer and also connected with the data processing board at the same time, namely the emission card is connected between the upper computer and the data processing board and is used for receiving data information and instruction information sent by the upper computer and transmitting the data information and the instruction information to the data processing board; the data processing board comprises a first FPGA controller and an embedded processor embedded in the first FPGA controller, the first FPGA controller is in communication connection with the embedded processor, the embedded processor is in communication connection with the bus card through the first FPGA controller, the embedded processor processes received data information and instruction information and outputs a laser signal and an equipment motion signal through the first FPGA controller, the laser signal comprises a laser data signal (exposure image data) and a laser control signal, the laser data signal is a differential signal, the laser control signal is a serial signal, and the equipment motion signal comprises an action execution parameter data signal and an action execution control signal; the laser driving and controlling board is connected with the data processing board and is used for controlling the laser to generate laser beams according to laser signals; the motion control board is connected with the data processing board and is used for controlling the CTP equipment to execute corresponding actions according to the equipment motion signal, such as controlling the CTP equipment to execute plate loading actions, executing exposure actions, executing plate unloading actions and the like.
In this embodiment, the hairpin card and the data processing board are integrated into a whole, that is, the hairpin card is integrated on the data processing board, and the hairpin card is connected to the first FPGA controller. The bus card and the data processing board are integrated into a whole, so that the types of the board cards can be reduced, and the production cost is reduced. Meanwhile, the data processing and the motion control of the CTP equipment are separated, namely a data processing board special for data processing and a motion control board special for motion control are arranged, so that the functions of the board cards are independent, and the fault positioning is facilitated when the fault occurs.
As shown in fig. 1, the bus card includes a network interface module and an ethernet PHY (Physical Layer) module. The network interface module is connected with the upper computer and is also connected with the first FPGA controller through an Ethernet PHY module, and the Ethernet PHY module is used for realizing connection of an Ethernet physical layer. During implementation, the upper computer sends data information and instruction information to the Ethernet PHY module through the network interface module, the data information and the instruction information are processed by the Ethernet PHY module and then output to the first FPGA controller, and meanwhile, the first FPGA controller can also upload corresponding data, such as data monitored by the sensor, into the upper computer through the Ethernet PHY module. The data processing board analyzes the data message after receiving the data message, stores the analyzed effective data, such as exposure image data, action execution parameter data and the like, in a corresponding storage medium, acquires corresponding exposure image data from the corresponding storage medium during exposure for processing, and acquires corresponding action execution parameter data from the corresponding storage medium during motion control for processing. The data processing board analyzes the instruction message after receiving the instruction message, and finally can generate corresponding control signals, such as a laser control signal, a laser power supply control signal, a focus motor control signal, an action execution control signal and the like.
As shown in fig. 1, the laser driver and control board is used to process the laser signal so that the laser generates the corresponding laser beam. The laser driving and control board comprises a laser driving board and a laser control board, wherein the laser driving board is used for receiving a differential signal (laser data signal) used by the laser and controlling the laser according to the differential signal; the laser control board is used for receiving a serial signal (laser control signal) used by the laser and controlling the laser according to the serial signal, and the laser generates light beams with corresponding wavelength and energy under the action of the serial signal and the laser control signal.
Furthermore, the data processing board further comprises an exposure data interface module and a laser control interface module, wherein the laser driving board is connected with the first FPGA controller through the exposure data interface module, and the laser control board is connected with the first FPGA controller through the laser control interface module. When the system is implemented, the embedded processor processes data information (exposure image data) related to the laser and inputs the processed data information into the exposure data interface module through the first FPGA controller, and the exposure data interface module further converts the processed data information into differential signals (laser data signals) and outputs the differential signals into the laser driving board; the embedded processor processes instruction information related to the laser and inputs the processed instruction information into the laser control interface module through the first FPGA controller, and the laser control interface module further converts the processed instruction information into a serial signal (a laser control signal) and outputs the serial signal to the laser control panel.
As shown in fig. 3, a working principle diagram of a data processing board for controlling a laser is as follows: the upper computer sends data information and instruction information to the data processing board through the bus card, an embedded processor in the data processing board processes data information (exposure image data) related to the laser and then inputs the processed data information into an exposure data interface module through the first FPGA controller, and the exposure data interface module further converts the processed data information into differential signals (laser data signals) and outputs the differential signals to a laser driving board; the embedded processor processes instruction information related to the laser and inputs the processed instruction information into the laser control interface module through the first FPGA controller, and the laser control interface module further converts the processed instruction information into a serial signal (a laser control signal) and outputs the serial signal to the laser control panel. The laser control board further transmits a laser control signal to the laser drive board through the laser interface board, and the laser drive board further drives the laser to generate a laser beam with corresponding wavelength and energy according to the laser data signal and the laser control signal.
Further, photocell gathers laser beam information and carries to the laser instrument control panel after handling through preamplification circuit module, and the laser instrument control panel feeds back laser beam information to the data processing board through the serial ports, and the data processing board is handled and is fed back to the host computer to supply operating personnel to adjust the laser instrument.
As shown in fig. 1, the exposure control system further includes a peripheral control circuit module including a focus motor control circuit module, and the focus motor control circuit module is connected to the first FPGA controller for controlling the focus operation. When the CTP equipment is implemented, the embedded processor processes data information and instruction information of the focus motor and outputs a focus motor control signal through the first FPGA controller, and the focus motor control module controls the focus motor to work according to the focus motor control signal so as to adjust the focus of the optical part of the CTP equipment.
Furthermore, the peripheral control circuit module also comprises a linear motor control circuit module which is connected with the first FPGA controller and is used for controlling the linear motor to work, such as controlling the speed, distance and the like of the linear motor. When the linear motor exposure device is used, the embedded processor processes data information and instruction information related to the linear motor and outputs a linear motor control signal through the first FPGA controller, and the linear motor control module controls the linear motor to work according to the linear motor control signal, for example, controls the linear motor to drive an optical part of CTP equipment to move so as to expose an exposed object.
Furthermore, the peripheral control circuit module further comprises a laser power supply control circuit module which is connected with the first FPGA controller and used for controlling the laser to be powered on. When the system is implemented, the embedded processor processes data information and instruction information related to a laser power supply and outputs a laser power supply control signal through the first FPGA controller, and the laser power supply control module controls the laser to be connected to a corresponding power supply according to the laser power supply control signal, so that the laser can maintain normal work.
As shown in fig. 1, the data processing board further includes a peripheral control circuit driving module, which is connected between the peripheral control circuit module and the first FPGA controller, and is configured to drive the peripheral control circuit module to operate according to a control signal output by the first FPGA controller, and the peripheral control circuit driving module may control the peripheral control circuit module to operate by converting a corresponding control signal into a corresponding level signal. In this embodiment, the focus motor control circuit module, the linear motor control circuit module, and the laser power supply control circuit module are all connected to the first FPGA controller through the peripheral control circuit driving module, and certainly, in other embodiments, a corresponding control circuit driving module may be separately provided for each control circuit module. When the system is implemented, the first FPGA controller transmits a control signal of the corresponding peripheral control circuit module to the corresponding peripheral control circuit module through the peripheral control circuit driving module so that the corresponding peripheral control circuit module works, if the peripheral control circuit driving module converts a laser power supply control signal into a level signal and inputs the level signal into the laser control circuit module so that the laser control circuit module controls the laser to be powered on, and if the peripheral control circuit driving module inputs a focus motor control signal into the focus motor control circuit module so that the focus motor control circuit module controls the focus motor to work and adjusts the focus of an optical part of the CTP device.
Further, as shown in fig. 1, the peripheral control circuit driving module includes a voltage conversion module and a peripheral control circuit interface module, where the peripheral control circuit interface module is connected to the first FPGA controller through the voltage conversion module, and the voltage conversion module is configured to convert a control signal into a corresponding level signal, for example, convert a laser power control signal into a corresponding level signal, and input the level signal into the laser power control module through the peripheral control circuit interface module, so that the laser power control module controls the laser to be powered on and the like. In this embodiment, the voltage conversion module is preferably a 74ALVC164245 voltage conversion module, and the peripheral control circuit interface module is a JPF module.
As shown in fig. 1, the data processing board further includes a memory module, and the memory module includes a first memory for storing the first FPGA controller operating program, a second memory for storing the exposure image data, and a third memory for storing the motion execution parameter data, and of course, includes other memories, such as a fourth memory for storing the embedded processor operating program, and so on. When the system is implemented, the embedded processor stores the exposure image data analyzed by the data information in the second memory, and the first FPGA controller reads the corresponding exposure image data from the second memory and sends the corresponding exposure image data to the laser driving board through the exposure data interface module when needed; the data processing board also stores the action execution parameter data analyzed from the data information into a third memory, and the first FPGA controller reads the corresponding action execution parameter data from the third memory and forwards the action execution parameter data to the motion control board when needed.
As shown in fig. 2, the first FPGA controller is used to implement functions of receiving and sending ethernet data, ethernet data packet, parsing instruction packet, storage control, differential signal output of exposure image data, kernel generation of embedded processor, power control signal output of laser, control signal output of focus motor, control signal output of linear motor, and the like. The first FPGA controller comprises a laser logic circuit module and a focal length adjusting logic circuit module, wherein the laser logic circuit module and the focal length adjusting logic circuit module are both connected with an embedded processor, the laser logic circuit module is used for outputting laser data signals, during implementation, the embedded processor sends laser working mode parameters and a single-path laser energy setting state to the laser logic circuit module through a bus interface, and the laser logic circuit module forms and outputs laser data signals according to the laser working mode parameters and the single-path laser energy setting state; the focal length adjusting logic circuit module is used for outputting a focal length motor control signal, when the focal length adjusting logic circuit module is implemented, the embedded processor processes data information and instruction information related to a focal length motor and then inputs the data information and the instruction information into the focal length adjusting logic circuit module, the focal length adjusting logic circuit module outputs a focal length motor control signal, and the focal length motor control module controls the focal length motor to work according to the focal length motor control signal so as to adjust the focal length of an optical part of the CTP equipment.
Furthermore, the first FPGA controller further includes a linear motor logic circuit module, which is connected to the embedded processor and is used for outputting a linear motor control signal. When the linear motor control device is implemented, the embedded processor sends a linear motor starting signal, a stopping signal, a speed parameter, a distance parameter and the like to the linear motor logic circuit module through the bus interface, and the linear logic circuit module generates and outputs a linear motor control signal according to the linear motor starting signal, the stopping signal, the speed parameter, the distance parameter and the like.
Furthermore, the first FPGA controller also comprises an equipment state logic circuit module and an initialization logic circuit module which are connected with the embedded processor, wherein the equipment state logic circuit module is used for outputting equipment state data; the initialization logic circuit module is used for device initialization control.
As shown in fig. 2, the embedded processor includes an embedded kernel, and a laser parameter setting module, a laser parameter analyzing module, a motion control board communication module, and a focal length setting module connected to the embedded kernel. The embedded kernel realizes parameter calculation and flow control of the laser parameter setting module, the laser parameter analysis module, the motion control panel communication module and the focal length control module through a bus protocol; the laser parameter setting module is used for realizing the output of a manual laser energy setting control process interface, and outputting laser working mode parameters and a single-path laser energy setting state outwards through a bus interface; the laser parameter analysis module is used for analyzing the laser setting parameters, is connected with the laser control panel through the laser control interface module, and transmits the analyzed laser setting parameters to the laser control panel; the motion control panel communication module is used for realizing the function of communicating with the motion control panel and sending the analyzed effective control instruction and the analyzed action execution parameter to the motion control panel; the focus setting module is used for realizing the control flow of the focus motor and the output of the control signal of the focus motor.
Furthermore, the embedded processor also comprises an equipment state acquisition module, a linear motor setting module, an equipment initialization module, a clock module and a timing module. The device state module is used for packaging a device state information data message and outputting the device state information data to the device state logic circuit module of the first FPGA controller through the bus interface; the linear motor setting module is used for realizing the motion flow control of the linear motor and outputting a start signal, a stop signal, a speed parameter and a distance parameter of the linear motor to a linear motor logic circuit module of the first FPGA controller through a bus interface; the equipment initialization module is used for realizing the flow control of the initialization state of the CTP equipment; the clock module is used for generating a clock signal; the timing module is used for realizing the function of a timer.
In this embodiment, the embedded processor is an NIOS soft core processor, and the bus protocol is an Avalon bus protocol.
As shown in fig. 1, the motion control board includes a microprocessor and a second FPGA controller connected to the microprocessor, the microprocessor is connected to the second FPGA controller through a communication interface, and the communication interface is a serial communication interface. The microprocessor is used for realizing serial port communication work with the data processing board, receiving effective action execution parameter data signals and action execution control signals, and further completing flow control of CTP equipment initialization, plate loading, exposure, plate unloading, plate material switching, counterweight and the like and storing action execution parameter data. The second FPGA controller is used for controlling the action execution work of the CTP equipment according to the action execution control signal, such as controlling the state processing and feedback of a servo motor, a stepping motor and a sensor, and the like.
The invention separates the data processing and the motion control of the exposure equipment, namely, a data processing board special for data processing and a motion control board special for motion control are arranged, so that the functions of the board cards are independent, the fault location in the fault is convenient, meanwhile, in the data processing board, on one hand, an embedded processor is embedded in the FPGA controller, so that the data processing board has the advantages of simple circuit structure, small board level structure, small occupied space and convenience for planning and wiring of each part, on the other hand, the issuing and arranging card and the data processing board are integrated into a whole, so that the types of the board cards are effectively reduced, the production cost of the data processing board is reduced, and the cost of an exposure control system of the exposure equipment is further reduced.
Therefore, the scope of the invention should not be limited to the disclosure of the embodiments, but includes various alternatives and modifications that do not depart from the spirit of the invention and are intended to be covered by the claims of this patent application.

Claims (11)

1. An exposure control system of an exposure apparatus, characterized in that the system comprises
The issuing card is connected with the upper computer and used for receiving the data information and the instruction information sent by the upper computer;
the data processing board is integrated with the bus card into a whole and comprises a first FPGA controller and an embedded processor embedded in the first FPGA controller, the embedded processor processes received data information and instruction information and outputs laser signals and equipment motion signals through the first FPGA controller, and the laser signals comprise laser data signals and laser control signals;
the laser driving and control panel is connected with the data processing panel and is used for controlling the laser to generate laser beams according to the laser signals;
the motion control board is connected with the data processing board and used for controlling exposure equipment to execute corresponding actions according to the equipment motion signals, wherein the laser driving and control board comprises a laser driving board and a laser control board, and the laser driving board receives the laser data signals; the laser control panel receives a laser control signal and transmits the laser control signal to the laser drive panel, the laser drive panel drives the laser to generate laser beams with corresponding wavelengths and energy according to the laser data signal and the laser control signal, the photocell collects laser beam information and feeds the laser beam information back to the upper computer through the laser control panel and the data processing panel, and the upper computer determines whether the laser signals for adjusting the laser are generated through the data processing panel according to the laser beam information.
2. The exposure control system of the exposure apparatus according to claim 1, wherein the hairpin card includes
The network interface module is connected with the upper computer;
and the Ethernet PHY module is connected between the network interface module and the first FPGA controller and is used for realizing connection of an Ethernet physical layer.
3. The exposure control system of an exposure apparatus according to claim 1,
the laser driving board is connected with the first FPGA controller and used for receiving the laser data signals and controlling the laser according to the laser data signals;
the laser control panel is connected with the first FPGA controller and used for receiving the laser control signal and controlling the laser through the laser drive panel by utilizing the laser control signal.
4. The exposure control system of the exposure apparatus according to claim 3, wherein the data processing board further comprises
The exposure data interface module is connected between the laser drive board and the first FPGA controller and used for processing the laser data signals output by the first FPGA controller and outputting the laser data signals to the laser drive board; and/or
And the laser control interface module is connected between the laser control panel and the first FPGA controller and used for processing the laser control signal output by the first FPGA controller and then outputting the processed laser control signal to the laser control panel.
5. The exposure control system of the exposure apparatus according to claim 1, wherein the first FPGA controller includes
The laser logic circuit module is connected with the embedded processor and is used for outputting laser signals;
and the focal length adjusting logic circuit module is connected with the embedded processor and is used for outputting a focal length motor control signal.
6. The exposure control system of the exposure apparatus according to claim 1, wherein the embedded processor includes
An embedded kernel;
the laser parameter setting module is connected with the embedded kernel and used for realizing the manual setting of the laser energy and controlling the output of the process interface;
the laser parameter analysis module is connected with the embedded kernel and used for analyzing laser setting parameters;
the motion control panel communication module is connected with the embedded kernel and is used for realizing the communication function with the motion control panel;
and the focal length setting module is connected with the embedded kernel and used for realizing the control flow of the focal length motor and the output of the control signal of the focal length motor.
7. The exposure control system of the exposure apparatus according to claim 1, characterized in that the exposure control system of the exposure apparatus further comprises
And the peripheral control circuit module comprises a focus motor control circuit module connected with the first FPGA controller module, and the focus motor control circuit module is used for controlling a focus motor to work according to a focus motor control signal output by the first FPGA controller so as to adjust the focus of the optical part of the exposure equipment.
8. The exposure control system of the exposure apparatus according to claim 7, wherein the data processing board further comprises
And the peripheral control circuit driving module is connected between the peripheral control circuit module and the first FPGA controller and used for converting the control signal output by the first FPGA controller into a level signal and inputting the level signal to the peripheral control circuit module.
9. The exposure control system of the exposure apparatus according to claim 8, wherein the peripheral control circuit driving module includes
The voltage conversion module is connected with the first FPGA controller and used for converting the control signal into a level signal;
and the peripheral control circuit interface module is connected between the voltage conversion module and the peripheral control circuit module and is used for outputting the level signal to the peripheral control circuit module.
10. The exposure control system of the exposure apparatus according to claim 1, wherein the motion control board includes
The microprocessor is connected with the first FPGA controller and used for receiving equipment motion signals;
and the second FPGA controller is connected with the microprocessor and is used for controlling the action of the exposure equipment to execute work according to the equipment motion signal.
11. An exposure control method based on the exposure control system of the exposure apparatus according to claim 1, characterized in that the method comprises
The transmitting and arranging card receives data information and instruction information sent by an upper computer;
the data processing board processes the received data information and instruction information and outputs a laser signal and an equipment motion signal;
the laser driving and controlling board controls the laser to generate laser beams according to the laser signals;
and the motion control board controls the exposure equipment to execute corresponding actions according to the equipment motion signal.
CN202011341287.6A 2020-11-25 2020-11-25 Exposure control system and method of exposure equipment Active CN112596344B (en)

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US4835704A (en) * 1986-12-29 1989-05-30 General Electric Company Adaptive lithography system to provide high density interconnect
CA2545686C (en) * 2003-11-03 2011-07-19 Punch Graphix Prepress Germany Gmbh A device and method for digital exposure
CN108073046A (en) * 2016-11-07 2018-05-25 俞庆平 The write-through screen printing system and method for platemaking of a kind of big stroke
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