CN112595818A - Enhanced gas detection sensor - Google Patents
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- CN112595818A CN112595818A CN202011612553.4A CN202011612553A CN112595818A CN 112595818 A CN112595818 A CN 112595818A CN 202011612553 A CN202011612553 A CN 202011612553A CN 112595818 A CN112595818 A CN 112595818A
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- 238000001514 detection method Methods 0.000 title claims abstract description 47
- 238000001179 sorption measurement Methods 0.000 claims abstract description 36
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 239000013310 covalent-organic framework Substances 0.000 claims description 12
- 239000012621 metal-organic framework Substances 0.000 claims description 12
- 239000012528 membrane Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000003463 adsorbent Substances 0.000 claims description 4
- 238000007084 catalytic combustion reaction Methods 0.000 claims description 3
- 238000004093 laser heating Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000002452 interceptive effect Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 124
- 235000013399 edible fruits Nutrition 0.000 description 16
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 14
- 239000005977 Ethylene Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- BHNHHSOHWZKFOX-UHFFFAOYSA-N 2-methyl-1H-indole Chemical compound C1=CC=C2NC(C)=CC2=C1 BHNHHSOHWZKFOX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000005070 ripening Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 235000021022 fresh fruits Nutrition 0.000 description 1
- 230000004345 fruit ripening Effects 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 208000032839 leukemia Diseases 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002939 oilproofing Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920006346 thermoplastic polyester elastomer Polymers 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
- G01N33/0032—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array using two or more different physical functioning modes
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
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- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
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- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
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- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention discloses an enhanced gas detection sensor, which comprises: the gas concentrator comprises a gas adsorption part with a gas adsorption function and a heating unit for heating the gas adsorption part; and the detection end of the gas sensor is arranged close to the gas adsorption part and can detect the gas to be detected released by the gas adsorption part after being heated by the heating unit. The during operation lets gas enrichment ware be in the low temperature state earlier, gas adsorption portion can adsorb the gas that awaits measuring in the air for a long time, when adsorbing and reaching the certain degree, with the unit extremely fast intensification of heating to appointed high temperature, gas adsorption portion is heated the back, adsorbed gas is whole releases in the extremely short time, and gas enrichment ware is in same less cavity with gas sensor, thereby can improve the concentration of gas several hundred times in the short time, thereby realize gathering earlier the back and detect, it is low to have solved current gas sensor sensitivity, the selectivity is low, can not reach the problem of actual detection demand.
Description
Technical Field
The invention relates to the technical field of gas sensors, in particular to an enhanced gas detection sensor.
Background
The gas sensor has a great amount of demands in various industries, but the concentration of the gas to be measured is extremely low under some scenes, and usually reaches the ppb (parts per billion) level, and for the scenes, the sensitivity and the selectivity of the current various types of sensors can not meet the use demands, so the current performance restricts the development of the gas sensor industry.
Gases required for low concentration testing include ethylene, formaldehyde, methylindole, and the like, which are generally at ppb levels and can have a major impact or hazard, for example, ethylene at 10ppb levels can cause ripening of fruits, formaldehyde at 70ppb can cause leukemia, and methylindole at 10ppb can have a significant odor.
Taking the use of ethylene gas as an example, when fresh fruits are far away from transportation, the transportation and storage time is longer, but the time for storing the fruits is very limited, so the general method is to transport and store the fruits after picking when the fruits are not completely ripe, and fill the ethylene gas for artificially ripening when the fruits need to be sold on shelves. However, the fruits naturally mature to release ethylene gas or are extruded and damaged in transportation, the release of ethylene is accelerated, even if the ethylene concentration is dozens of ppb, the fruits are also ripened, and further more fruits generate ethylene, so that the ethylene concentration in the environment is rapidly increased. If the ethylene concentration in the environment of the fruit suddenly rises during the storage period, the fruit can quickly mature, if the ethylene concentration cannot be found in time, the fruit can be rotted in a large area, the unit price of the fruit is generally high, and the economic loss is large. Therefore, if the ethylene concentration change in the fruit storage environment can be monitored, the fruit ripening time can be mastered in time, and then corresponding measures are taken to avoid or reduce the fruit loss.
Since ethylene gas has an effect on fruits even at a concentration of ppb level, a gas sensor having an extremely high sensitivity and a test limit of ppb level is required. In the environment of storing fruits, other various volatile gases generally exist, the concentration of the volatile gases is high, and the gas sensor is required to have high selectivity. Unfortunately, no commercial sensor currently meets these two demanding requirements.
Disclosure of Invention
The invention aims to overcome the technical defects and provide an enhanced gas detection sensor, which adopts a gas enrichment technology to solve the problems that the current gas sensor has low sensitivity and cannot meet the actual detection requirement.
In order to achieve the above technical object, an aspect of the present invention provides an enhanced gas detection sensor, including:
a gas concentrator including a gas adsorption part having a gas adsorption function and a heating unit for heating the gas adsorption part;
and the detection end of the gas sensor is arranged close to the gas adsorption part and can detect the gas to be detected released by the gas adsorption part after being heated by the heating unit.
Further, the gas enricher and the gas sensor are arranged in the same accommodating cavity, and one side of the accommodating cavity is provided with a gas guide groove communicated with an external environment to be detected.
Furthermore, be provided with the interference gas adsorber in the air guide groove, the interference gas adsorber is used for getting rid of the interference gas.
Further, the adsorbent material of the interfering gas adsorber includes, but is not limited to, activated carbon, modified covalent organic framework material (COF), metal organic framework Material (MOF).
Further, the gas sensor includes, but is not limited to, a semiconductor type gas detection sensor, an electrochemical type gas detection sensor, a catalytic combustion type gas detection sensor, and an optical type gas detection sensor.
Further, the gas concentrator is disposed adjacent to the gas sensor.
Furthermore, the enhanced gas detection sensor further comprises a gas-permeable membrane, and the gas-permeable membrane covers the gas guide groove.
Furthermore, the enhanced gas detection sensor also comprises a silicon chip, and the gas enricher is fixed on the silicon chip.
Further, the adsorbent material of the gas adsorption part includes, but is not limited to, activated carbon, modified covalent organic framework material (COF), metal organic framework Material (MOF).
Further, the heating unit includes, but is not limited to, laser heating, and heating wire heating.
Compared with the prior art, the invention has the beneficial effects that: this gaseous detection sensor during operation of enhancement mode lets gas enrichment ware be in the low temperature state earlier, gas adsorption portion can adsorb the gas that awaits measuring in the air for a long time, when adsorbing and reaching the certain degree, with the extremely fast intensification of heating unit to appointed high temperature, gas adsorption portion is heated the back, adsorbed gas is whole releases in the extremely short time, and gas enrichment ware is in same less cavity with gas sensor, thereby can improve several hundred times with gaseous concentration in the short time, thereby realize earlier the enrichment after detect, current gas sensor sensitivity is low has been solved, can not reach the problem of actual detection demand.
Drawings
FIG. 1 is a schematic diagram of a side cross-sectional configuration of one embodiment of a gas concentrator in an enhanced gas detection sensor provided by the present invention;
FIG. 2 is a schematic top view of an enhanced gas detection sensor according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 and 2, the present embodiment provides an enhanced gas detection sensor, including: gas enricher 10, gas sensor 20.
The gas enricher 10 comprises a gas adsorption part 1 with a gas adsorption function and a heating unit 2 for heating the gas adsorption part 1; the detection end of the gas sensor is arranged close to the gas adsorption part, and can detect the gas to be detected released after the gas adsorption part 1 is heated by the heating unit 2.
This gaseous detection sensor during operation of enhancement mode lets gas enrichment ware 10 be in the low temperature state earlier, gas adsorption portion 1 can adsorb the gas that awaits measuring in the air for a long time, when adsorbing and reaching the certain degree, with the extremely fast intensification of heating element 2 (the little hot plate of second) to appointed high temperature, gas adsorption portion 1 is heated the back, adsorbed gas is whole releases in the extremely short time, and gas enrichment ware is in same less cavity with gas sensor, thereby can improve several hundred times with gaseous concentration in the short time, thereby realize gathering earlier the postdetection, current gas sensor sensitivity is low has been solved, can not reach the problem of actual detection demand.
In this embodiment, the gas enricher and the gas sensor are disposed in the same accommodating chamber, for example: the volume of the containing cavity is less than 1 cubic centimeter, and the gas concentrator is arranged adjacent to the gas sensor, so that gas released by the gas concentrator is rapidly detected by the gas sensor.
One side of holding the chamber is provided with the gas guide groove that is linked together with the outside environment of waiting to detect, be provided with the interference gas adsorber in the gas guide groove, the interference gas adsorber is used for getting rid of the interference gas, the interference gas adsorber is made by any kind of material in active carbon, the organic frame material metal of covalence, organic frame material and the porous silica, when the interference gas is less, perhaps when the difficult gas adsorption portion that is adsorbed of interference gas, also can not set up the interference gas adsorber.
Specifically, the gas sensor includes, but is not limited to, a semiconductor type gas detection sensor, an electrochemical type gas detection sensor, a catalytic combustion type gas detection sensor, and an optical type gas detection sensor, and the working principle of the gas sensor (not shown in the figure) is that a sensitive material is coated on the surface of an interdigital electrode, a first micro hot plate provides a working high temperature for the sensitive material, and when the sensitive material is in a suitable high-temperature environment, the sensitive material has high activity and can generate a reversible chemical reaction in the air at any time to perform electronic exchange, so that the resistance of the sensitive material changes, and the resistance change amplitude is normally positively correlated with the gas concentration, so that the concentration of the corresponding gas in the environment can be calculated by testing the resistance change of the sensitive material.
The gas adsorption part 1 includes, but is not limited to, activated carbon, modified covalent organic framework material (COF), metal organic framework Material (MOF), the heating unit 2 includes, but is not limited to, laser heating, and heating wire heating, in this embodiment, the heating unit 2 is specifically heated by a second micro-heating disk (heating wire), the second micro-heating disk is fixed on a silicon wafer 3, a supporting film 4 is arranged between the second micro-heating disk and the silicon wafer 3, an insulating film 5 is arranged between the second micro-heating disk and the gas adsorption part 1, the gas adsorption part 1 is specifically coated with nano-scale porous modified material on the side of the insulating film 5 away from the second micro-heating disk, including, but not limited to, activated carbon, modified covalent organic framework material (COF), and metal organic framework Material (MOF), and the material is characterized by having highly regular porous morphology, maximum specific surface area (>1000m2And/g) and can achieve the effect of adsorbing specific gas, such as only ethylene gas, by loading different organic functional groups. At the same time, when the material is treatedThe gas enrichment device and the gas sensor which are most core are manufactured based on the MEMS micro hot plate, and the detection limit and the selectivity of the sensor are greatly improved on the technical level of the existing sensor.
A hollow-out groove 3a is formed in the position, opposite to the second micro-hot plate, of the silicon wafer 3, so that heat generated by the second micro-hot plate is more concentrated, and the release rate of heated gas is improved.
This technical scheme still provides the sensor base, mainly is used for placing gas enrichment ware chip and gas sensor chip, provides circuit connection simultaneously, provides less cavity, strengthens the effect of gas enrichment.
The multifunctional gas filter has the advantages that the functional adsorption material shell is arranged, the built-in functional adsorption material can help to filter gas with large interference, such as ethanol, and meanwhile, the filter membrane on the shell can provide the functions of water resistance, oil resistance and dust prevention.
In this embodiment, gaseous detection sensor of enhancement mode still include the ventilated membrane, the ventilated membrane cover in on the air guide groove, it is specific, the ventilated membrane is made by any kind of material in polytetrafluoroethylene, polyethylene, polypropylene, polyurethane and the thermoplastic polyester elastomer, and the ventilated membrane can water and oil proofing.
In this embodiment, the gas enricher 10 and the gas sensor 20 are fixed in the same protective casing, the length and width of the protective casing are both 3.8mm, the thickness is 1.1mm, six conductive contacts are arranged on the protective casing, two of the conductive contacts are electrically connected with the second micro-hotplate, the other two second conductive contacts are electrically connected with the first micro-hotplate, and the last two conductive contacts are electrically connected with the interdigital electrode.
The working principle is as follows: this gaseous detection sensor during operation of enhancement mode lets gas enrichment ware be in the low temperature state earlier, gas adsorption portion can adsorb the gas that awaits measuring in the air for a long time, when adsorbing and reaching the certain degree, with little hot plate rapid heating up to appointed high temperature, gas adsorption portion is heated the back, adsorbed gas is whole releases in the utmost point short time, and gas enrichment ware is in same less cavity with gas sensor, thereby can improve several hundred times with gaseous concentration in the short time, thereby realize gathering earlier the postdetection, current gas sensor sensitivity is low has been solved, can not reach the problem of actual detection demand.
The above-described embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. An enhanced gas detection sensor, comprising:
a gas concentrator including a gas adsorption part having a gas adsorption function and a heating unit for heating the gas adsorption part;
and the detection end of the gas sensor is arranged close to the gas adsorption part and can detect the gas to be detected released by the gas adsorption part after being heated by the heating unit.
2. The enhanced gas detection sensor according to claim 1, wherein the gas concentrator and the gas sensor are embedded in a same accommodating cavity, and a gas guide groove communicated with an external environment to be detected is arranged on one side of the accommodating cavity.
3. The enhanced gas detection sensor according to claim 2, wherein an interference gas adsorber is disposed in the gas guide groove, and the interference gas adsorber is configured to remove interference gas.
4. The enhanced gas detection sensor according to claim 1, wherein the adsorbent material of the interfering gas adsorber includes, but is not limited to, activated carbon, modified covalent organic framework material (COF), metal organic framework Material (MOF).
5. The enhanced gas detection sensor according to claim 1, wherein the gas sensor includes, but is not limited to, a semiconductor type gas detection sensor, an electrochemical type gas detection sensor, a catalytic combustion type gas detection sensor, an optical type gas detection sensor.
6. The enhanced gas detection sensor of claim 1, wherein the gas concentrator is disposed adjacent to the gas sensor.
7. The enhanced gas detection sensor according to claim 1, further comprising a gas permeable membrane covering said gas-conducting channel.
8. The enhanced gas detection sensor of claim 1, further comprising a silicon wafer, said gas concentrator being affixed to said silicon wafer.
9. The enhanced gas detection sensor according to claim 1, wherein the adsorbent material of the gas adsorption section includes, but is not limited to, activated carbon, modified covalent organic framework material (COF), metal organic framework Material (MOF).
10. The enhanced gas detection sensor according to claim 1, wherein the heating unit includes, but is not limited to, laser heating, heating wire heating.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011612553.4A CN112595818A (en) | 2020-12-30 | 2020-12-30 | Enhanced gas detection sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011612553.4A CN112595818A (en) | 2020-12-30 | 2020-12-30 | Enhanced gas detection sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113740388A (en) * | 2021-07-22 | 2021-12-03 | 西安交通大学 | Gas-sensitive sensing material based on in-situ enrichment amplification strategy and preparation method and application thereof |
| CN114487036A (en) * | 2022-01-10 | 2022-05-13 | 海宁微纳芯传感技术有限公司 | MEMS gas sensor with gas enrichment function and working method thereof |
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