CN112593187A - PVD coating treatment process for increasing hardness of trimming die - Google Patents

PVD coating treatment process for increasing hardness of trimming die Download PDF

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Publication number
CN112593187A
CN112593187A CN202011422914.9A CN202011422914A CN112593187A CN 112593187 A CN112593187 A CN 112593187A CN 202011422914 A CN202011422914 A CN 202011422914A CN 112593187 A CN112593187 A CN 112593187A
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die
coating
deposition
hardness
cleaning
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朱皓哲
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Abstract

The invention discloses a PVD coating treatment process for increasing the hardness of a trimming die, which comprises the following steps: A. inspecting before film coating; B. polishing the die; C. cleaning a mould; D. drying and charging; E. coating in a vacuum chamber; F. and (6) cooling and discharging. The invention provides a coating method for improving the surface hardness of a cold cutting die and prolonging the service life of the cold cutting die by a Physical Vapor Deposition (PVD).

Description

PVD coating treatment process for increasing hardness of trimming die
Technical Field
The invention relates to the field of mold hardness treatment, in particular to a PVD coating treatment process for increasing the hardness of a trimming mold.
Background
Physical Vapor Deposition (PVD) is a rapidly developing and widely used surface film-forming technique, which refers to a process of depositing atoms or molecules generated by various physical methods on a substrate under vacuum to form a thin film or coating. The preparation method not only can be used for preparing various special coatings and improving the mechanical properties (such as high hardness, high corrosion resistance, heat resistance, oxidation resistance and the like) of the base material, but also can be used for preparing various functional thin film coatings, decorative thin film coatings and the like.
The material of the trimming die mainly comprises high-speed steel, alloy steel, hot-work die steel, hard alloy and the like, and the trimming die, the cold-punching die and the like bear complex stress and particularly bear larger impact load when in work, so that the die steel is directly used after quenching, grinding and polishing to cause material abrasion, the service life of the die is reduced, and the production cost is greatly increased.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a PVD coating treatment process for increasing the hardness of an edge cutting die.
In order to solve the technical problems, the invention provides the following technical scheme:
the invention relates to a PVD coating treatment process for increasing the hardness of a trimming die, which comprises the following steps:
A. inspecting before coating, inspecting a hexagonal side die and an inner hexagonal punch of a fastening standard firmware, and cleaning and inspecting the surface of the die;
B. grinding the mold, namely grinding and polishing the surface of the mold step by using water abrasive paper;
C. cleaning the die, namely fully cleaning the die by adopting a multifunctional full-automatic ultrasonic cleaning machine, and respectively performing acetone ultrasonic cleaning and absolute ethyl alcohol ultrasonic cleaning to remove oil stains on the surface of the die and keep the die clean;
D. c, drying and charging, namely drying the surface of the mold in the step C in a drying furnace and keeping the surface dry;
E. coating in a vacuum chamber, namely putting the dried mould into the vacuum chamber, then coating, introducing nitrogen or argon as protective gas before coating to prevent the mould from being oxidized, wherein the adopted coating is about 3-5 mu m thick and comprises the superposition of TiN, ZrN, CrN, TiAlN, TiCrN, TiZrAlN and TiCrAlN;
F. and (6) cooling and discharging.
As a preferable technical scheme of the invention, the mesh number of the abrasive paper in the step B is 100-800 meshes.
As a preferable technical scheme of the present invention, the acetone ultrasonic cleaning and the absolute ethyl alcohol ultrasonic cleaning in step C are performed twice, and the number of times of cleaning is the same.
As a preferred technical scheme of the invention, the vacuum chamber internal coating process in the step E mainly adopts a double-arc source combined mode for deposition, and one arc source is selected as a pure zirconium target with the purity of 99.95 percent; another arc source is Qinzi aluminum alloy target and adopts Ti50Al50Or Al60Ti40Before deposition, the coating chamber was pre-pumped and heated to a pressure of 7x10-3Pa, when the temperature reaches 200 ℃, carrying out arc discharge on the high-speed steel substrate in a pure argon environment, wherein the current of two arc sources is 55A, carrying out bombardment cleaning for 10min, and the bombardment negative bias is 350-400V; then, reducing the negative bias voltage of the substrate to 120V, simultaneously keeping the current of the two arc sources unchanged, and carrying out 5min alloy transition layer deposition; at this time, N is introduced2Closing Ar gas, and making the pressure of the chamber to be coated reach 2.6x10-1Pa. During the deposition, a (ZrTiAlCr) N film layer is deposited, the negative bias voltage of a substrate is set to be 120V, the deposition time is selected to be 45min, and the final deposition temperature is 220-225 ℃.
Compared with the prior art, the invention has the following beneficial effects:
1: the invention provides a coating method for improving the surface hardness of a cold cutting die and prolonging the service life of the cold cutting die by a Physical Vapor Deposition (PVD).
2: the coating structure has the advantages that the toughness of the matrix is effectively improved, the deformation resistance of the matrix is improved, and the hardness of the surface of the material can be increased after the coating is plated, so that the strength support of the matrix is improved.
Detailed Description
The following description of the preferred embodiments of the present invention is provided for the purpose of illustration and description, and is in no way intended to limit the invention.
Example 1
The invention provides a PVD coating treatment process for increasing the hardness of a trimming die, which comprises the following steps:
A. inspecting before coating, inspecting a hexagonal side die and an inner hexagonal punch of a fastening standard firmware, and cleaning and inspecting the surface of the die;
B. grinding the mold, namely grinding and polishing the surface of the mold step by using water abrasive paper;
C. cleaning the die, namely fully cleaning the die by adopting a multifunctional full-automatic ultrasonic cleaning machine, and respectively performing acetone ultrasonic cleaning and absolute ethyl alcohol ultrasonic cleaning to remove oil stains on the surface of the die and keep the die clean;
D. c, drying and charging, namely drying the surface of the mold in the step C in a drying furnace and keeping the surface dry;
E. coating in a vacuum chamber, namely putting the dried mould into the vacuum chamber, then coating, introducing nitrogen or argon as protective gas before coating to prevent the mould from being oxidized, wherein the adopted coating is about 3-5 mu m thick and comprises the superposition of TiN, ZrN, CrN, TiAlN, TiCrN, TiZrAlN and TiCrAlN;
F. and (6) cooling and discharging.
And the mesh number of the abrasive paper in the step B is 100-800 meshes.
And C, the ultrasonic cleaning of acetone and the ultrasonic cleaning of absolute ethyl alcohol in the step C are carried out twice, and the ultrasonic cleaning times are the same.
The vacuum chamber internal coating process in the step E mainly adopts a double-arc source combined mode for deposition, and one arc source is selected as a pure zirconium target with the purity of 99.95 percent; another arc source is Qinzi aluminum alloy target and adopts Ti50Al50Or Al60Ti40Before deposition, the coating chamber was pre-pumped and heated to a pressure of 7x10-3Pa, when the temperature reaches 200 ℃, carrying out arc discharge on the high-speed steel substrate in a pure argon environment, wherein the current of two arc sources is 55A, carrying out bombardment cleaning for 10min, and the bombardment negative bias is 350-400V; then, reducing the negative bias voltage of the substrate to 120V, simultaneously keeping the current of the two arc sources unchanged, and carrying out 5min alloy transition layer deposition; at this time, N is introduced2Gas, closing Ar gas, and pressure of film-coating chamberUp to 2.6x10-1Pa. During the deposition, a (ZrTiAlCr) N film layer is deposited, the negative bias voltage of a substrate is set to be 120V, the deposition time is selected to be 45min, and the final deposition temperature is 220-225 ℃.
Specifically, the invention compares the working conditions and the service lives of a hexagonal trimming die and an inner hexagonal cold punching die which are subjected to surface coating treatment by a Physical Vapor Deposition (PVD) technology, wherein the service life of the PVD coating die is prolonged by more than three times compared with that of an uncoated die, the binding force between a coating and a substrate is improved, and the failure mechanism of the coating die under impact load is analyzed.
Mainly adopts a double-arc source combination mode to carry out deposition, wherein one arc source is selected as a pure zirconium target, and the purity is 99.95 percent; another arc source is Qinzhou aluminum alloy target (Ti)50Al50Or Al60Ti40) Before deposition, the coating chamber was pre-pumped and heated to a pressure of 7x10-3Pa, the temperature reaches 200 ℃. Arc discharge is carried out on the high-speed steel substrate in a pure argon environment, the current of two arc sources is 55A, bombardment cleaning is carried out for 10min, and the bombardment negative bias is 350-400V; then, reducing the negative bias voltage of the substrate to 120V, simultaneously keeping the current of the two arc sources unchanged, and carrying out 5min alloy transition layer deposition; at this time, N is introduced2Closing Ar gas, and making the pressure of the chamber to be coated reach 2.6x10-1Pa. During deposition, a (ZrTiAlCr) N film layer is deposited, the negative bias voltage of a substrate is set to be 120V, the deposition time is selected to be 45min, the deposition end temperature is 220-225 ℃, in order to ensure the regular change of the content proportion of Zr, Ti, Al, Cr and other components in the (ZrTiAICr) N film layer, the target currents of two arc sources used in the deposition process of each film layer are also respectively set, and the specific process parameters are shown in the following table:
TABLE 1 Experimental parameters
Figure BDA0002823332880000041
Figure BDA0002823332880000051
Note: t1, T2, T3: a transition layer;
b1, B2, B3: an interface transition layer;
c1, C2, C3: coating;
and finally, selecting a VICKERS 402MVD hardness tester, selecting a 25gf load to perform multi-point testing (selecting 3 points in different areas and avoiding large particles on the surface) and averaging to determine the surface hardness of the film layer. The hardness of the hard coating manufactured by the method is measured to reach more than 3000Hv, WS-2005 acoustic emission scratch is adopted to measure the bonding force of the layer base, the average value of the bonding force of the sample is measured to be more than 200N, and compared with the sample without the coating, the service life of the hard coating can be prolonged by 3-5 times.
The process adopts the (TiZrAl) N-containing multilayer coating, improves the performance defects of a single coating, simultaneously improves the surface hardness of the matrix, enables the hardness of the matrix to reach more than 3000Hv, and improves the binding force of the layer matrix to be more than 200N.
Practice proves that the load borne by the cold punching die is from impact, and under the action of huge impact load, the phenomena of cutting edge breakage, abrasion, brittle failure and the like of the die are easily caused by large brittleness of the matrix material. Similarly, if the surface material of the matrix is soft, the toughness is insufficient, and the failure of plastic deformation is easy to occur, the hardness of the surface of the material can be increased after the coating is plated, and the strength support of the matrix is improved.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (4)

1. A PVD coating treatment process for increasing the hardness of an edge cutting die is characterized by comprising the following steps:
A. inspecting before coating, inspecting a hexagonal side die and an inner hexagonal punch of a fastening standard firmware, and cleaning and inspecting the surface of the die;
B. grinding the mold, namely grinding and polishing the surface of the mold step by using water abrasive paper;
C. cleaning the die, namely fully cleaning the die by adopting a multifunctional full-automatic ultrasonic cleaning machine, and respectively performing acetone ultrasonic cleaning and absolute ethyl alcohol ultrasonic cleaning to remove oil stains on the surface of the die and keep the die clean;
D. c, drying and charging, namely drying the surface of the mold in the step C in a drying furnace and keeping the surface dry;
E. coating in a vacuum chamber, namely putting the dried mould into the vacuum chamber, then coating, introducing nitrogen or argon as protective gas before coating to prevent the mould from being oxidized, wherein the adopted coating is about 3-5 mu m thick and comprises the superposition of TiN, ZrN, CrN, TiAlN, TiCrN, TiZrAlN and TiCrAlN;
F. and (6) cooling and discharging.
2. The PVD coating process for increasing the hardness of the trimming die as recited in claim 1, wherein the mesh number of the abrasive paper in the step B is 100-800 mesh.
3. The PVD coating process for increasing the hardness of the trimming die of claim 1, wherein the acetone ultrasonic cleaning and the absolute ethyl alcohol ultrasonic cleaning of step C are performed twice as many times as each other.
4. The PVD coating process for increasing the hardness of the trim die of claim 1, wherein the vacuum chamber of step EThe coating process mainly adopts a double-arc source combined mode for deposition, and one arc source is selected as a pure zirconium target, wherein the purity is 99.95%; another arc source is Qinzi aluminum alloy target and adopts Ti50Al50Or Al60Ti40Before deposition, the coating chamber was pre-pumped and heated to a pressure of 7x10-3Pa, when the temperature reaches 200 ℃, carrying out arc discharge on the high-speed steel substrate in a pure argon environment, wherein the current of two arc sources is 55A, carrying out bombardment cleaning for 10min, and the bombardment negative bias is 350-400V; then, reducing the negative bias voltage of the substrate to 120V, simultaneously keeping the current of the two arc sources unchanged, and carrying out 5min alloy transition layer deposition; at this time, N is introduced2Closing Ar gas, and making the pressure of the chamber to be coated reach 2.6x10-1Pa. During the deposition, a (ZrTiAlCr) N film layer is deposited, the negative bias voltage of a substrate is set to be 120V, the deposition time is selected to be 45min, and the final deposition temperature is 220-225 ℃.
CN202011422914.9A 2020-12-08 2020-12-08 PVD coating treatment process for increasing hardness of trimming die Pending CN112593187A (en)

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CN102230154A (en) * 2011-06-14 2011-11-02 上海巴耳思新材料科技有限公司 Technological process of physical vapor deposition coating
CN103132019A (en) * 2013-03-20 2013-06-05 洛阳理工学院 A1ZrCrN composite dual-gradient coating cutting tool and preparation method thereof
CN103882386A (en) * 2014-04-16 2014-06-25 上海金顶涂层科技有限公司 Ultrahigh-hardness substrate protection coating and preparation method thereof
CN105586572A (en) * 2016-02-11 2016-05-18 广东工业大学 (Ti, Al, Zr) N multi-component composite coating layer, gradient ultrathin hard alloy cutter with composite coating layer and preparation method thereof
CN106835014A (en) * 2016-12-29 2017-06-13 西安交通大学青岛研究院 A kind of multiple elements design hard coat preparation method
CN107217238A (en) * 2017-04-20 2017-09-29 沈阳大学 A kind of preparation method of titanium-aluminum-zirconium nitride plated film carbide drill
CN108103505A (en) * 2017-12-22 2018-06-01 余姚市震达精工机械有限公司 A kind of PVD/CVD/PCVD Coating Processes for improving cold heading die
CN108950488A (en) * 2018-08-03 2018-12-07 河北工程大学 TiAl/TiAlN/TiZrAlN composite coating and preparation method thereof
CN109023263A (en) * 2018-08-03 2018-12-18 河北工程大学 TiAl/TiAlN/TiCrAlN composite coating and preparation method thereof

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060051618A1 (en) * 2004-08-20 2006-03-09 Gilles Festeau PVD coated ruthenium featured cutting tools
CN101709450A (en) * 2009-11-30 2010-05-19 沈阳大学 Method for preparing zirconium-titanium-aluminum-nitrogen nitride gradient hard reaction film
CN102230154A (en) * 2011-06-14 2011-11-02 上海巴耳思新材料科技有限公司 Technological process of physical vapor deposition coating
CN103132019A (en) * 2013-03-20 2013-06-05 洛阳理工学院 A1ZrCrN composite dual-gradient coating cutting tool and preparation method thereof
CN103882386A (en) * 2014-04-16 2014-06-25 上海金顶涂层科技有限公司 Ultrahigh-hardness substrate protection coating and preparation method thereof
CN105586572A (en) * 2016-02-11 2016-05-18 广东工业大学 (Ti, Al, Zr) N multi-component composite coating layer, gradient ultrathin hard alloy cutter with composite coating layer and preparation method thereof
CN106835014A (en) * 2016-12-29 2017-06-13 西安交通大学青岛研究院 A kind of multiple elements design hard coat preparation method
CN107217238A (en) * 2017-04-20 2017-09-29 沈阳大学 A kind of preparation method of titanium-aluminum-zirconium nitride plated film carbide drill
CN108103505A (en) * 2017-12-22 2018-06-01 余姚市震达精工机械有限公司 A kind of PVD/CVD/PCVD Coating Processes for improving cold heading die
CN108950488A (en) * 2018-08-03 2018-12-07 河北工程大学 TiAl/TiAlN/TiZrAlN composite coating and preparation method thereof
CN109023263A (en) * 2018-08-03 2018-12-18 河北工程大学 TiAl/TiAlN/TiCrAlN composite coating and preparation method thereof

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