CN112591479B - Article conveying equipment - Google Patents

Article conveying equipment Download PDF

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Publication number
CN112591479B
CN112591479B CN202010887668.8A CN202010887668A CN112591479B CN 112591479 B CN112591479 B CN 112591479B CN 202010887668 A CN202010887668 A CN 202010887668A CN 112591479 B CN112591479 B CN 112591479B
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CN
China
Prior art keywords
guide rail
conveyor
conveying device
floors
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010887668.8A
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Chinese (zh)
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CN112591479A (en
Inventor
吉冈秀郎
濑边高弘
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Daifuku Co Ltd
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Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Publication of CN112591479A publication Critical patent/CN112591479A/en
Application granted granted Critical
Publication of CN112591479B publication Critical patent/CN112591479B/en
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G63/00—Transferring or trans-shipping at storage areas, railway yards or harbours or in opening mining cuts; Marshalling yard installations
    • B65G63/002—Transferring or trans-shipping at storage areas, railway yards or harbours or in opening mining cuts; Marshalling yard installations for articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B50/00—Energy efficient technologies in elevators, escalators and moving walkways, e.g. energy saving or recuperation technologies

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)

Abstract

The invention provides an article conveying device. When a plurality of conveying devices are arranged in parallel, maintenance easiness is ensured, and the safety of operators is ensured while the reduction of conveying efficiency during maintenance is suppressed to be small. The 1 st guide rail (11) and the 2 nd guide rail (21) are fixed to the floor part (4) on the 2 nd side (Y2) in the orthogonal direction, a1 st power supply part (12) for supplying power to the 1 st lifting body (13) is arranged along the side surface of the 1 st guide rail (11) opposite to the side opposite to the partition wall (5), and a2 nd power supply part (22) for supplying power to the 2 nd lifting body (23) is arranged along the side surface of the 2 nd guide rail (21) opposite to the side opposite to the partition wall (5).

Description

Article conveying equipment
Technical Field
The present invention relates to an article conveying apparatus.
Background
For example, japanese patent application laid-open No. 2018-052659 (patent document 1) discloses an article conveying apparatus including a conveying device that conveys articles across a plurality of floors. In the following description of the related art, reference numerals attached in parentheses are those of patent document 1.
In the apparatus disclosed in patent document 1, a plurality of holding portions (R) capable of holding an article (a) are provided inside cylindrical walls (90) provided on each of a plurality of floors. Further, a conveying device (20) is provided inside the cylindrical wall (90), and the conveying device (20) is provided with 1 guide rail (14) arranged across a plurality of floors, a lifting body (21) lifting along the guide rail (14), and a transfer part (31) supported by the lifting body (21) and transferring the article (A) between the holding part (R).
The conveying device (20) configured in this way can convey articles (A) across multiple floors between multiple holding parts (R). The power supply unit for supplying power to such a conveyor (20) is generally provided along the guide rail (14), and maintenance is performed periodically.
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open No. 2018-052659.
Disclosure of Invention
Problems to be solved by the invention
In the apparatus disclosed in patent document 1, the 1-stage conveying device (20) conveys the article (a) in the vertical direction, but in order to increase the conveying amount of the article, it is conceivable to arrange a plurality of conveying devices (20) in parallel. However, when a plurality of conveying devices (20) are arranged in parallel in a limited space, the interval between adjacent conveying devices (20) is narrowed, and therefore, a means for properly performing maintenance of each conveying device (20) is required. In addition, when all the conveying devices (20) are stopped at the same time during maintenance of the conveying devices (20), the conveying efficiency of the articles is greatly reduced. Therefore, it is desirable to individually stop the plurality of conveying devices (20) for maintenance. However, in order to perform maintenance of the remaining conveyor (20) while operating a part of the conveyor (20), a means for ensuring safety for the operator of the conveyor (20) in operation is required.
In view of the above-described circumstances, it is desirable to realize an article conveying apparatus that can ensure ease of maintenance and ensure safety of an operator while suppressing a decrease in conveying efficiency at the time of maintenance to a small extent when a plurality of conveying devices are arranged in parallel.
Means for solving the problems
An article conveying apparatus according to the present disclosure includes: a1 st conveying device which is arranged on a building having a floor part of a plurality of floors and conveys articles across the plurality of floors in an up-down direction; and a 2 nd conveyor arranged in parallel with the 1 st conveyor and conveying articles across the plurality of floors in the up-down direction; the 1 st conveying device comprises a1 st guide rail arranged across the plurality of floors along the up-down direction, a1 st lifting body lifting along the 1 st guide rail, and a1 st transfer part supported by the 1 st lifting body and used for holding and transferring articles; the 2 nd conveyor includes a 2 nd guide rail arranged to cross the plurality of floors in the up-down direction, a 2 nd lifting body lifted along the 2 nd guide rail, and a 2 nd transfer unit supported by the 2 nd lifting body and configured to hold and transfer articles; the 1 st guide rail and the 2 nd guide rail are disposed so as to penetrate an opening formed in a passing floor portion through which the 1 st lifting body and the 2 nd lifting body pass when conveying articles across the plurality of floors; a partition wall that partitions the 1 st conveyor and the 2 nd conveyor across the plurality of floors is provided between the 1 st conveyor and the 2 nd conveyor in the vertical direction, the direction in which the 1 st conveyor and the 2 nd conveyor are arranged as viewed in the vertical direction being a parallel direction, the direction in which the 1 st conveyor and the 2 nd conveyor are viewed in the vertical direction being an orthogonal direction, and the direction being orthogonal to the parallel direction; the 1 st lifting body is arranged to lift on the 1 st side of the 1 st guide rail in the orthogonal direction which is one side of the orthogonal direction; the 2 nd lifting body is arranged to lift on the 1 st side of the orthogonal direction relative to the 2 nd guide rail; the 1 st guide rail and the 2 nd guide rail are fixed to the floor portion on the 2 nd side in the orthogonal direction, which is the other side in the orthogonal direction; a1 st power supply part for supplying power to the 1 st lifting body is arranged along the side surface of the 1 st guide rail opposite to the side of the partition wall; along the side surface of the 2 nd guide rail opposite to the side of the partition wall, a 2 nd power supply part for supplying power to the 2 nd lifting body is arranged.
According to this configuration, since the articles are conveyed by both the 1 st conveying device and the 2 nd conveying device, a larger number of articles can be conveyed than in the case where there are only 1 conveying devices. Further, according to this configuration, since the 1 st conveyor and the 2 nd conveyor are separated by the partition wall, even if one of the 1 st conveyor and the 2 nd conveyor is stopped and maintenance is performed while the other is continued, it is possible to avoid contact between an operator who performs maintenance work and the conveyor in the process of performing maintenance work. That is, since the 1 st conveying device and the 2 nd conveying device can be individually stopped for maintenance, the safety of the operator can be ensured while suppressing the decrease in conveying efficiency during maintenance to a small extent. Further, according to the present structure, the 1 st power feeding portion is disposed along a side surface of the 1 st guide rail opposite to a side opposite to the partition wall, and the 2 nd power feeding portion is disposed along a side surface of the 2 nd guide rail opposite to the side opposite to the partition wall. Therefore, when maintenance is performed on the 1 st power supply unit and the 2 nd power supply unit, the partition wall is less likely to interfere with the maintenance. Thus, ease of maintenance is ensured. As described above, according to the present configuration, when two conveying apparatuses are arranged in parallel, it is possible to ensure ease of maintenance, and to ensure safety of operators while suppressing a decrease in conveying efficiency during maintenance to a small extent.
Further features and advantages of the technology of the present disclosure will become more apparent from the following description of illustrative and non-limiting embodiments, which is described with reference to the accompanying drawings.
Drawings
Fig. 1 is a perspective view of an article transport apparatus.
Fig. 2 is a perspective view showing a structure around the opening.
Fig. 3 is a main section view of the article conveying apparatus in plan view.
Fig. 4 is a main section view of the article conveying apparatus as seen in an orthogonal direction.
Fig. 5 is a main section view of the article conveying apparatus as seen in the parallel direction.
Fig. 6 is a block diagram showing a part of a control structure of the article conveying apparatus.
Fig. 7 is a view showing a case where the 1 st working table is in the protruding state and the 2 nd working table is in the retracted state.
Fig. 8 is a diagram showing a case where the 1 st working table is in a retracted state and the 2 nd working table is in a protruding state.
Fig. 9 is a view showing a case where the fire door is closed.
Detailed Description
The article transport facility is a facility for transporting and storing a raw material, an intermediate product, a finished product, or the like, for example. Hereinafter, an example will be described in which the article transport facility is installed in a clean room where processing of raw materials and the like are performed in a clean environment.
As shown in fig. 1 and 2, the article conveying apparatus 100 includes a ceiling conveying device 99, a floor surface conveying device 98, a 1 st conveying device 1, and a2 nd conveying device 2, which are provided in a building including a floor portion 4 having a plurality of floors. The ceiling transport device 99 travels near the ceiling on each floor to transport the articles W. The floor conveyance device 98 travels on the floor surface of each floor to convey the article W. The 1 st conveying device 1 conveys the articles W across a plurality of floors in the up-down direction. The 2 nd conveyor 2 is disposed in parallel with the 1 st conveyor 1 and conveys the articles W across a plurality of floors in the up-down direction. Examples of the article W include a container (FOUP (Front Opening Unified Pod; front opening unified pod), reticle pod, and the like) for accommodating a semiconductor substrate, a reticle substrate, and the like.
In the present embodiment, the article conveying apparatus 100 further includes a cylindrical wall 3 covering both the 1 st conveying device 1 and the 2 nd conveying device 2 in each of the plurality of floors. In other words, the 1 st conveying device 1 and the 2 nd conveying device 2 are provided inside the cylindrical wall 3. On the other hand, the ceiling conveyor 99 and the floor conveyor 98 are provided outside the cylindrical wall 3.
Here, if the direction in which the 1 st conveyor 1 and the 2 nd conveyor 2 are arranged as viewed in the up-down direction along the up-down direction is set to the parallel direction X, a partition wall 5 that partitions the 1 st conveyor 1 and the 2 nd conveyor 2 across a plurality of floors is provided between the 1 st conveyor 1 and the 2 nd conveyor 2 in the parallel direction X. The interior of the cylindrical wall 3 is partitioned by a partition wall 5 into A1 st area A1 in which the 1 st conveying device 1 is disposed and A2 nd area A2 in which the 2 nd conveying device 2 is disposed. The 1 st conveying device 1 is configured to convey the article W in the up-down direction in the 1 st area A1. The 2 nd conveyor 2 is configured to convey the articles W in the up-down direction in the 2 nd zone A2.
As shown in fig. 1, the article conveying apparatus 100 includes an in-out conveying device 97 provided on each floor to convey the article W into the interior of the cylindrical wall 3 or convey the article W out from the interior of the cylindrical wall 3. The in-out conveying device 97 is provided so as to extend across the inside and outside of the cylindrical wall 3 in a state where the cylindrical wall 3 is penetrated in the horizontal direction. The in-out conveying device 97 conveys the article W between an end portion (outer side end portion 97 a) located on the outer side of the cylindrical wall 3 and an end portion (inner side end portion 97 b) located on the inner side of the cylindrical wall 3. The in-out conveyor 97 is configured using a conveyor such as a belt conveyor or a roller conveyor.
A plurality of holding portions 8 (see fig. 3 to 5) for holding the article W are provided inside the cylindrical wall 3. In the illustrated example, the holding portion 8 includes a support 80 that can support the article W from below. The holding portion 8 is configured to hold the article W by supporting the article W by the supporting body 80.
If the article W is placed on the outer end 97a of the entrance/exit conveyor 97 by the ceiling conveyor 99, the floor conveyor 98, the operator, or the like, the article W is conveyed by the entrance/exit conveyor 97 toward the inner end 97b of the interior of the tubular wall 3. Then, the article W is conveyed from the inner side end 97b to the holding portion 8 located on the same floor or another floor by the 1 st conveying device 1 or the 2 nd conveying device 2, and is held by the holding portion 8. The article W held by the holding portion 8 is conveyed from the holding portion 8 to the inner side end 97b of the entrance/exit conveyor 97 on the same floor or another floor by the 1 st conveyor 1 or the 2 nd conveyor 2, and is then conveyed to the outer side end 97a by the entrance/exit conveyor 97. The article W conveyed to the outer end 97a is conveyed from the outer end 97a to another place by the ceiling conveyor 99, the floor conveyor 98, the operator, or the like. Further, the 1 st conveying device 1 or the 2 nd conveying device 2 may convey the article W from the inner side end 97b to the inner side end 97b of the other in-out conveying device 97 or convey the article W from the holding portion 8 to the other holding portion 8. The inner end 97b of the in-out conveyor 97 also functions as the holding portion 8 since it holds the article W in this position in a state where the article W is not conveyed.
The configuration of the 1 st conveying device 1 and the 2 nd conveying device 2 and the peripheral structures of these devices will be described in detail below with reference to fig. 2 to 5. In fig. 2, a part of the cylindrical wall 3 and a part of the partition wall 5 are shown as being cut away, and the holding portion 8 is omitted. Fig. 5 shows only the structure of the 1 st area A1, and the structure of the 2 nd area A2, which is not shown in fig. 5, is the same as the structure of the 1 st area A1, and therefore is not shown.
As described above, the direction in which the 1 st conveyor 1 and the 2 nd conveyor 2 are aligned when viewed in the vertical direction is referred to as the parallel direction X. One side in the parallel direction X is referred to as a parallel direction 1 st side X1, and the other side is referred to as a parallel direction 2 nd side X2. The direction perpendicular to the parallel direction X as viewed in the vertical direction is referred to as the perpendicular direction Y. One side in the orthogonal direction Y is the orthogonal direction 1 st side Y1, and the other side is the orthogonal direction 2 nd side Y2.
As described above, the cylindrical wall 3 covers both the 1 st conveyor 1 and the 2 nd conveyor 2 in each of the plurality of floors. In the present embodiment, the tubular wall 3 is formed in a tubular shape having a rectangular cross section, and includes a front wall portion 31 disposed on the 1 st side Y1 in the orthogonal direction, a rear wall portion 32 disposed on the 2 nd side Y2 in the orthogonal direction, a1 st side wall portion 33 disposed on the 1 st side X1 in the parallel direction, and a2 nd side wall portion 34 disposed on the 2 nd side X2 in the parallel direction with respect to the 1 st conveying device 1 and the 2 nd conveying device 2.
The 1 st conveying apparatus 1 includes a1 st guide rail 11 arranged to vertically cross a plurality of floors, a1 st lifting body 13 lifted along the 1 st guide rail 11, and a1 st transfer unit 14 supported by the 1 st lifting body 13 and configured to hold and transfer the article W. In the present embodiment, the 1 st transfer unit 14 includes a1 st transfer holding unit 141 capable of holding the article W, a mechanism unit for advancing and retreating the 1 st transfer holding unit 141 in the horizontal direction, and a mechanism unit for rotating the 1 st transfer holding unit 141 around an axis in the vertical direction. For example, the 1 st transfer unit 14 is configured using a horizontal multi-joint arm (so-called SCARA; SELECTIVE COMPLIANCE ASSEMBLY ROBOT ARM; selectively compliant mounting robot). In the illustrated example, a pair of 1 st transfer units 14 are arranged in the vertical direction and supported by the same 1 st lifting/lowering body 13.
The 2 nd conveyor 2 includes a 2 nd guide rail 21 arranged to vertically cross a plurality of floors, a 2 nd lifting/lowering body 23 lifted and lowered along the 2 nd guide rail 21, and a 2 nd transfer unit 24 supported by the 2 nd lifting/lowering body 23 and configured to hold and transfer the article W. In the present embodiment, the 2 nd transfer unit 24 includes a 2 nd transfer holding unit 241 capable of holding the article W, a mechanism unit for advancing and retreating the 2 nd transfer holding unit 241 in the horizontal direction, and a mechanism unit for rotating the 2 nd transfer holding unit 241 around an axis along the vertical direction. For example, the 2 nd transfer unit 24 is configured using a horizontal multi-joint arm. In the illustrated example, a pair of 2 nd transfer units 24 are arranged in the vertical direction and supported by the same 2 nd lifting/lowering body 23. As described above, in the present embodiment, the 1 st conveying device 1 and the 2 nd conveying device 2 have the same structure.
In the present embodiment, the 1 st guide rail 11 has a1 st facing surface 11a as a side surface arranged on the 2 nd side X2 in the parallel direction with respect to the center axis of the rail. In this example, the 1 st opposing surface 11a opposes the partition wall 5 in the parallel direction X. The 2 nd guide rail 21 has a2 nd facing surface 21a as a side surface disposed on the 1 st side X1 in the parallel direction with respect to the central axis of the rail. In this example, the 2 nd facing surface 21a faces the partition wall 5 in the parallel direction X. The 1 st facing surface 11a and the 2 nd facing surface 21a are not limited to the case where the entire surfaces are formed of flat surfaces, and may be formed by partially including the uneven surfaces.
The 1 st guide rail 11 and the 2 nd guide rail 21 are disposed so as to penetrate the opening 40 formed in the passing floor portion 4T, the passing floor portion 4T being the floor portion 4 through which the 1 st lifting body 13 and the 2 nd lifting body 23 pass when the article W is conveyed across a plurality of floors. For example, the floor portions 4 other than the floor portion 4 of the lowermost floor are formed as passing floor portions 4T, and openings 40 penetrating in the up-down direction are formed in the passing floor portions 4T. Hereinafter, the floor portion 4 and the passing floor portion 4T will be collectively referred to as the floor portion 4 without particularly distinguishing them.
The 1 st conveying path P1 of the 1 st conveying device 1 for conveying the article W and the 2 nd conveying path P2 of the 2 nd conveying device 2 for conveying the article W are set in the up-down direction so as to pass through the opening 40 formed in the floor portion 4. The 1 st conveying path P1 extends along the 1 st guide rail 11, and the 2 nd conveying path P2 extends along the 2 nd guide rail 21.
The 1st guide rail 11 and the 2 nd guide rail 21 are fixed to the floor portion 4 on the 2 nd side Y2 in the orthogonal direction. In the present embodiment, the 1st guide rail 11 and the 2 nd guide rail 21 are fixed to a door support frame 60 that supports the fire door 6 as will be described later. The door support frame 60 is fixed to the floor portion 4. Thus, in the present embodiment, the 1st guide rail 11 and the 2 nd guide rail 21 are fixed to the floor portion 4 via the door support frame 60 of the fire door 6. In this example, the 1st guide rail 11 and the 2 nd guide rail 21 are fixed to the floor portion 4 of a plurality of floors. Thereby, the 1st guide rail 11 and the 2 nd guide rail 21 can be firmly fixed to the building.
In the present embodiment, the 1 st guide rail 11 has a 1 st fixing surface 11d as a side surface arranged on the 2 nd side Y2 in the orthogonal direction with respect to the center axis of the rail. In this example, the 1 st fixing surface 11d is fixed to the floor portion 4 via the door support frame 60. The 2 nd guide rail 21 has a 2 nd fixing surface 21d as a side surface arranged on the 2 nd side Y2 in the orthogonal direction with respect to the center axis of the rail. In this example, the 2 nd fixing surface 21d is fixed to the floor portion 4 via the door support frame 60. The 1 st fixing surface 11d and the 2 nd fixing surface 21d are not limited to the case where the entire surfaces are formed of flat surfaces, and may be formed by partially including the uneven surfaces.
In the present embodiment, the cylindrical wall 3 is fixed to the 1 st guide rail 11 and the 2 nd guide rail 21. The partition wall 5 is fixed to the cylindrical wall 3. With such a configuration, the cylindrical wall 3 and the partition wall 5 can be appropriately supported by the 1 st guide rail 11 and the 2 nd guide rail 21. The above-described fixing of the respective members is performed using a fastening tool, not shown, such as a bolt.
As shown in fig. 3, a1 st power supply unit 12 for supplying power to the 1 st lifting body 13 is disposed along a side surface of the 1 st guide rail 11 opposite to the side (1 st facing surface 11 a) facing the partition wall 5. In the present embodiment, the 1 st guide rail 11 has a1 st arrangement surface 11b as a side surface arranged on the 1 st side X1 in the parallel direction with respect to the center axis of the rail. In this example, the 1 st power feeding portion 12 is arranged along the 1 st arrangement surface 11b. The 1 st arrangement surface 11b is not limited to the case where the entire surface is formed of a flat surface, and may be formed to include a concave-convex surface in a part.
In the present embodiment, the 1 st power feeding unit 12 includes a power feeding line 121 and a power feeding line holding unit 122 that holds the power feeding line 121. The feeder line holding portion 122 is provided so as to extend in the vertical direction along the 1 st arrangement surface 11b of the 1 st guide rail 11, and is provided so as to protrude from the 1 st arrangement surface 11b to the 1 st side X1 in the parallel direction. The feeder line holding unit 122 holds the feeder line 121 at a position away from the 1 st arrangement surface 11b toward the 1 st side X1 in the parallel direction. The feeder line 121 is disposed so as to extend in the up-down direction along the 1 st disposition surface 11 b. The power supply line 121 includes a pair of power lines arranged apart from each other in the orthogonal direction Y. Between the pair of power lines in the orthogonal direction Y, the 1 st power receiving unit 131 provided in the 1 st lifting/lowering body 13 is disposed. In this example, the power supply line 121 is configured to supply electric power to the 1 st power receiving unit 131 in a noncontact state.
Along a side surface of the 2 nd guide rail 21 opposite to a side (2 nd facing surface 21 a) facing the partition wall 5, a2 nd power feeding portion 22 for feeding power to the 2 nd elevating body 23 is arranged. In the present embodiment, the 2 nd guide rail 21 has a2 nd arrangement surface 21b as a side surface arranged on the 2 nd side X2 in the parallel direction with respect to the center axis of the rail. In this example, the 2 nd power feeding portion 22 is arranged along the 2 nd arrangement surface 21b. The 2 nd arrangement surface 21b is not limited to the case where the entire surface is formed of a flat surface, and may be formed to include a concave-convex surface in a part.
In the present embodiment, the 2 nd power feeding unit 22 includes a power feeding line 221 and a power feeding line holding unit 222 that holds the power feeding line 221. The feeder line holding portion 222 is provided so as to extend in the up-down direction along the 2 nd arrangement surface 21b of the 2 nd guide rail 21, and is provided so as to protrude from the 2 nd arrangement surface 21b to the 2 nd side X2 in the parallel direction. The feeder line holding portion 222 holds the feeder line 221 at a position away from the 2 nd arrangement surface 21b toward the 2 nd side X2 in the parallel direction. The power feeding line 221 is disposed so as to extend in the up-down direction along the 2 nd disposition surface 21 b. The power supply line 221 includes a pair of power lines disposed apart from each other in the orthogonal direction Y. Between the pair of power lines in the orthogonal direction Y, the 2 nd power receiving unit 231 provided in the 2 nd lifting/lowering body 23 is disposed. In this example, the power supply line 221 is configured to supply electric power to the 2 nd power receiving unit 231 in a non-contact state.
The 1 st lifting body 13 is provided to lift and lower the 1 st guide rail 11 in the 1 st side Y1 in the orthogonal direction. In the present embodiment, the 1 st guide rail 11 has a1 st support surface 11c as a side surface arranged on the 1 st side Y1 in the orthogonal direction with respect to the center axis of the rail. In this example, the 1 st lifting body 13 is supported so as to face the 1 st support surface 11c. The 1 st lifting body 13 is provided to lift along the 1 st support surface 11c. The 1 st support surface 11c is not limited to the case of being entirely formed of a flat surface, and may be formed to include a concave-convex surface in a part thereof. In this example, the 1 st support surface 11c is formed with a1 st groove 111 (see fig. 2 and 3) for supporting and guiding the 1 st lifting body 13 in the vertical direction. The 1 st groove 111 is formed to extend in the vertical direction.
In the present embodiment, the 1 st lifting body 13 includes a1 st main body portion 130 supported so as to be movable in the vertical direction relative to the 1 st guide rail 11, a1 st power receiving portion 131 for receiving supply of electric power from the 1 st power supply portion 12, and a1 st connecting member 132 (see fig. 3) connecting the 1 st main body portion 130 and the 1 st power receiving portion 131. In this example, the 1 st coupling member 132 is coupled to the 1 st main body 130 at the base end portion, protrudes from the 1 st main body 130 toward the 1 st side X1 in the parallel direction, and is bent and extended toward the 2 nd side Y2 in the orthogonal direction. The 1 st power receiving unit 131 is connected to the distal end portion of the 1 st connecting member 132, and the 1 st power receiving unit 131 is disposed at a position where it can receive supply of electric power from the power supply line 121 of the 1 st power supply unit 12. In the illustrated example, the 1 st power receiving unit 131 is disposed between the pair of power lines provided in the 1 st power feeding unit 12 in the orthogonal direction Y.
The 2 nd elevating body 23 is provided to elevate in the 1 st side Y1 in the orthogonal direction with respect to the 2 nd guide rail 21. In the present embodiment, the 2 nd guide rail 21 has a2 nd support surface 21c as a side surface arranged on the 1 st side Y1 in the orthogonal direction with respect to the center axis of the rail. In this example, the 2 nd lifting body 23 is supported so as to face the 2 nd support surface 21c. The 2 nd lifting body 23 is provided to lift along the 2 nd support surface 21c. The 2 nd support surface 21c is not limited to the case of being entirely formed of a flat surface, and may be formed to include a concave-convex surface in a part thereof. In this example, the 2 nd support surface 21c is formed with a2 nd groove 211 (see fig. 2 and 3) for supporting and guiding the 2 nd lifting body 23 in the vertical direction. The 2 nd groove 211 is formed to extend in the up-down direction.
In the present embodiment, the 2 nd elevating body 23 includes a2 nd main body portion 230 supported so as to be movable relative to the 2 nd guide rail 21 in the up-down direction, a2 nd power receiving portion 231 for receiving power from the 2 nd power supplying portion 22, and a2 nd coupling member 232 (see fig. 3) coupling the 2 nd main body portion 230 and the 2 nd power receiving portion 231. In this example, the 2 nd coupling member 232 is coupled to the 2 nd main body portion 230 at a base end portion, protrudes from the 2 nd main body portion 230 toward the parallel direction 2 nd side X2, and is bent and extended toward the orthogonal direction 2 nd side Y2. The 2 nd power receiving unit 231 is connected to the distal end portion of the 2 nd connecting member 232, and the 2 nd power receiving unit 231 is disposed at a position where it can receive supply of electric power from the power supply line 221 of the 2 nd power supply unit 22. In the illustrated example, the 2 nd power receiving unit 231 is disposed between the orthogonal directions Y of the pair of power lines provided in the 2 nd power feeding unit 22.
As described above, according to the arrangement position of the power feeding parts (12, 22) of the present structure, the power feeding parts (12, 22) are less likely to be an obstacle for fixing the guide rails (11, 21) and less likely to be an obstacle for moving the lifting bodies (13, 23). Furthermore, the power supply units (12, 22) can be configured to appropriately supply electric power to the lifting bodies (13, 23).
In the present embodiment, the article conveying apparatus 100 further includes: the 1 st ladder L1 is disposed in the up-down direction so as not to overlap with the movement track of the 1 st lifting body 13 and the 1 st transfer unit 14; and a2 nd ladder L2 arranged in the up-down direction so as not to overlap with the movement track of the 2 nd lifting/lowering body 23 and the 2 nd transfer unit 24. Thus, for example, when the operator performs maintenance of the 1 st conveyor 1, the 1 st ladder L1 can be used for the maintenance. In addition, when the operator performs maintenance of the 2 nd conveyor 2, the maintenance can be performed by the 2 nd ladder L2. Furthermore, as described above, the ladders (L1, L2) are disposed so as not to overlap with the movement tracks of the lifting bodies (13, 23) and the transfer units (14, 24). That is, the 1 st ladder L1 and the 2 nd ladder L2 are disposed at appropriate positions that do not interfere with the conveyance of the articles W by the 1 st conveyor 1 and the 2 nd conveyor 2. The movement track of the lifting bodies (13, 23) for the lifting operation is a space extending in the up-down direction on the 1 st side Y1 in the orthogonal direction to the guide rails (11, 21). The movement track of the transfer units (14, 24) for advancing and retreating operations is a space extending from the movement track of the lifting bodies (13, 23) in the horizontal direction toward the respective heights of the plurality of holding units 8.
As shown in fig. 3, in the present embodiment, the 1 st ladder L1 is fixed to the 1 st surface 51 of the partition wall 5, which is the surface on the side where the 1 st guide rail 11 is disposed. In other words, the 1 st ladder L1 is fixed to the partition wall 5 in the 1 st zone A1. The 2 nd ladder L2 is fixed to the 2 nd surface 52 of the partition wall 5, which is the surface on the side where the 2 nd guide rail 21 is disposed. In other words, the 2 nd ladder L2 is fixed to the partition wall 5 in the 2 nd zone A2. By using the partition wall 5 that separates the 1 st conveyor 1 from the 2 nd conveyor 2 in this way, the 1 st ladder L1 and the 2 nd ladder L2 that can be used for maintenance can be arranged with a relatively simple structure. In the present embodiment, the 1 st ladder L1 and the 2 nd ladder L2 are provided in the article transport facility 100. The 1 st ladder L1 and the 2 nd ladder L2 may be configured to be detachable from the partition wall 5, and may be installed for maintenance or the like.
As described above, the floor portion 4 (through the floor portion 4T) has the opening 40 through which the 1 st guide rail 11 and the 2 nd guide rail 21 pass. Further, the opening 40 is provided with a movable fire door 6, and the fire door 6 opens an opening area 40R of the opening 40 in an open state and closes the opening area 40R in a closed state. The fire door 6 closes the opening area 40R in the event of a fire, thereby suppressing a spread to an adjacent floor (see fig. 9). For example, the fire door 6 is configured to be automatically closed when a fire in the facility is detected by a fire detection sensor SeF (see fig. 6) provided in the article transport facility 100. When the fire door 6 is in the closed state, both the 1 st conveying device 1 and the 2 nd conveying device 2 are stopped at positions that do not interfere with the fire door 6.
In the present embodiment, the fire door 6 is configured to change the state of the open state and the closed state by moving in a direction intersecting the vertical direction. In this example, the fire door 6 is configured to move in a horizontal direction, which is a direction orthogonal to the vertical direction. The fire door 6 of this example is configured to slide in the orthogonal direction Y.
In the present embodiment, the fire door 6 is supported by a door support frame 60 fixed to the floor portion 4. As described above, the door support frame 60 fixes the 1 st guide rail 11 and the 2 nd guide rail 21 to the floor portion 4. A door guide groove 61 for guiding the fire door 6 in the horizontal direction is formed in the door support frame 60. In this example, the door guide groove 61 is formed along the orthogonal direction Y. Thereby, the fire door 6 can slide in the orthogonal direction Y.
In addition, the opening 40 is provided with: the movable 1 st table 71 is disposed so as not to overlap the 1 st conveying path P1 and the 2 nd conveying path P2 in the retracted state, and is disposed so as not to overlap the 1 st conveying path P1 and the 2 nd conveying path P2 in the protruding state; and a movable 2 nd table 72 disposed so as not to overlap the 1 st conveying path P1 and the 2 nd conveying path P2 in the retracted state, and disposed so as not to overlap the 2 nd conveying path P2 but to overlap the 1 st conveying path P1 in the protruding state. Accordingly, when the operator performs maintenance of the 1 st conveying apparatus 1, the 1 st table 71 can be placed in the protruding state, and the 1 st table can be placed so as not to overlap with the 2 nd conveying path P2 while overlapping with the 1 st conveying path P1. Further, the operator can easily perform maintenance of the 1 st conveying device 1 by using the 1 st working table 71. In this case, since the 1 st work table 71 does not overlap the 2 nd conveying path P2, the conveyance of the article W along the 2 nd conveying path P2 can be continued by the 2 nd conveying device 2. Similarly, when the operator performs maintenance of the 2 nd conveyor 2, the 2 nd table 72 can be used.
In the present embodiment, the 1 st work table 71 is disposed so as to overlap with the movement track of the 1 st lifting body 13 and the 1 st transfer unit 14 in the protruding state. In this example, if the 1 st region 41R is the portion of the opening region 40R on the 1 st conveyor 1 side with respect to the partition wall 5, the 1 st table 71 in the protruding state is disposed so as to overlap the entire 1 st region 41R when viewed in the vertical direction. More specifically, the 1 st work table 71 in the protruding state is disposed above the 1 st region 41R, whereby the 1 st conveying path P1 is closed (see the left view of fig. 7). Further, the operator can carry out maintenance of the 1 st conveyor 1 by riding the 1 st work table 71 on the 1 st region 41R which is a part of the opening region 40R. The 1 st work table 71 in the retracted state is disposed so as not to overlap with the 1 st region 41R when viewed in the vertical direction. That is, the 1 st work table 71 in the retracted state is disposed outside the 1 st region 41R. Accordingly, in the state where the 1 st table 71 is retracted, the 1 st conveying path P1 is opened, and the 1 st conveying device 1 can convey the article W (see the left view of fig. 8).
In the present embodiment, the 2 nd table 72 is disposed so as to overlap with the movement path of the 2 nd lifting/lowering body 23 and the 2 nd transfer unit 24 in the protruding state. In this example, if the portion of the opening area 40R on the side of the 2 nd conveyor 2 with respect to the partition wall 5 is the 2 nd area 42R, the 2 nd table 72 in the protruding state is disposed so as to overlap with the entire 2 nd area 42R as viewed in the vertical direction. More specifically, the 2 nd table 72 in the protruding state is disposed above the 2 nd region 42R, whereby the 2 nd conveying path P2 is closed (see right view of fig. 8). Thus, the operator can carry out maintenance of the 2 nd conveyor 2 by riding the 2 nd table 72 on the 2 nd region 42R which is a part of the opening region 40R. The 2 nd table 72 in the retracted state is disposed so as not to overlap the 2 nd region 42R when viewed in the vertical direction. That is, the 2 nd work table 72 in the retracted state is disposed outside the 2 nd region 42R. Accordingly, in the state where the 2 nd table 72 is retracted, the 2 nd conveying path P2 is opened, and the 2 nd conveying device 2 can convey the article W (see right view of fig. 7).
In the present embodiment, the 1 st working table 71 and the 2 nd working table 72 are configured to be moved parallel to the fire door 6 to change the state of the retracted state and the protruding state. This makes it possible to dispose the structure of the fire door 6 and the structures of the 1 st and 2 nd work tables 71 and 72 in relatively small spaces in the vertical direction. In this example, the movement direction of the fire door 6 is the same as that of the 1 st stage 71 and the 2 nd stage 72 when the state is changed. That is, the fireproof door 6, the 1 st stage 71, and the 2 nd stage 72 are all configured to slide in the orthogonal direction Y.
In the present embodiment, the 1 st work table 71 is supported by the 1 st support frame 710 fixed to the floor portion 4. In this example, the 1 st support frame 710 is fixed to the floor portion 4 via the door support frame 60 on the 1 st conveyor 1 side, that is, in the 1 st area A1, with respect to the partition wall 5. In the illustrated example, the 1 st support frame 710 is secured to the upper surface of the door support frame 60. The 1 st support frame 710 has a1 st guide groove 711 for guiding the 1 st table 71 in the horizontal direction. In this example, the 1 st guide groove 711 is formed along the orthogonal direction Y. Thus, the 1 st working table 71 can slide in the orthogonal direction Y. Further, since the 1 st support frame 710 is fixed to the upper surface of the door support frame 60 as described above, the 1 st working table 71 is configured to move in parallel with the fire door 6 above the fire door 6.
In the present embodiment, the 2 nd work table 72 is supported by the 2 nd support frame 720 fixed to the floor portion 4. In this example, the 2 nd support frame 720 is fixed to the floor portion 4 via the door support frame 60 on the 2 nd conveyor 2 side with respect to the partition wall, that is, in the 2 nd region A2. In the illustrated example, the 2 nd support frame 720 is fixed to the upper surface of the door support frame 60. A2 nd guide groove 721 for guiding the 2 nd table 72 in the horizontal direction is formed in the 2 nd support frame 720. In this example, the 2 nd guide groove 721 is formed along the orthogonal direction Y. Thus, the 2 nd working table 72 can slide in the orthogonal direction Y. Further, since the 2 nd support frame 720 is fixed to the upper surface of the door support frame 60 as described above, the 2 nd work table 72 is configured to move in parallel with the fire door 6 above the fire door 6.
In the present embodiment, the door support frame 60, the 1 st support frame 710, and the 2 nd support frame 720 are arranged so as to penetrate the front wall portion 31 of the cylindrical wall 3 in the orthogonal direction Y. The door support frame 60, the 1 st support frame 710, and the 2 nd support frame 720 penetrate the front wall 31 and are disposed outside the front wall 31, and are covered with the cover member C.
As shown in fig. 4, in the present embodiment, the partition wall 5 includes a plate-like partition body 50, and the partition body 50 is disposed so as to partition the 1 st conveyor 1 and the 2 nd conveyor 2 in each of the plurality of floors. In this example, a monitor window 50a (see fig. 2) is formed in the separator 50. This allows the operator to monitor the area opposite to the area where the operator performs the work by interposing the partition 50 (partition wall 5). For example, when the operator performs work in the 1 st area A1, the operator can monitor the 2 nd area A2 through the monitor window 50 a. When the work is performed in the 2 nd area A2, the 1 st area A1 can be monitored through the same monitoring window 50 a.
In the present embodiment, the lower end portion of the partition 50 of each floor is disposed above the fireproof door 6. The upper end portion of the partition 50 disposed at a lower floor adjacent to the floor where the partition 50 is disposed below the fireproof door 6. That is, the fireproof door 6, here, the door support frame 60 is disposed between the pair of separators 50 disposed in the vertical direction of each of the adjacent floors. Therefore, the partition 50 (partition wall 5) does not interfere with the movement of the fire door 6, and the fire door 6 can be properly closed.
In the present embodiment, an object detection sensor SeO (see fig. 6) for detecting an object existing between a pair of separators 50 is provided between the vertical directions of the pair of separators 50 disposed on each of the adjacent floors. The object detection sensor SeO is configured as, for example, a light curtain (light curtain), and a light projecting portion is disposed at a lower end portion of the upper separator 50 of the pair of separators 50, and a light receiving portion is disposed at an upper end portion of the lower separator 50. The arrangement relation of the light projecting section and the light receiving section may be reversed. Examples of the object detected by the object detection sensor SeO include an operator, a tool used by the operator, and the like, and the fire door 6. In this example, when an object is detected by the object detection sensor SeO, both the 1 st conveying device 1 and the 2 nd conveying device 2 are stopped in an emergency.
As shown in fig. 3 and 4, in the present embodiment, a1 st emergency stop switch S1 for emergency stopping at least the 1 st conveyor 1 is disposed on a1 st surface 51 of the partition wall 5, which is a surface on which the 1 st guide rail 11 is disposed. Further, a 2 nd emergency stop switch S2 for emergency stopping at least the 2 nd conveyor 2 is disposed on a 2 nd surface 52 of the partition wall 5, which is a surface on which the 2 nd guide rail 21 is disposed. In the present embodiment, the 1 st emergency stop switch S1 and the 2 nd emergency stop switch S2 are switches for emergency stopping both of the 1 st conveying device 1 and the 2 nd conveying device 2, respectively. In this example, the 1 st emergency stop switch S1 and the 2 nd emergency stop switch S2 are disposed on the respective separators 50 disposed on the respective floors.
In the present embodiment, a 3 rd emergency stop switch S3 for emergency stopping at least the 1 st conveying device 1 is disposed on the inner wall surface of the cylindrical wall 3 in the 1 st zone A1. In this example, the 3 rd emergency stop switch S3 is disposed on the 1 st inner wall surface 33a of the 1 st side wall portion 33 as an inward facing surface. Here, the 3 rd emergency stop switch S3 is a switch for emergency-stopping only the 1 st conveying device 1. However, the 3 rd emergency stop switch S3 is not limited to this, and may be a switch for emergency stopping both the 1 st conveying device 1 and the 2 nd conveying device 2.
Further, in the present embodiment, a 4 th emergency stop switch S4 for emergency stopping at least the 2 nd conveyor 2 is disposed on the inner wall surface of the cylindrical wall 3 in the 2 nd zone A2. In this example, the 4 th emergency stop switch S4 is disposed on the 2 nd inner wall surface 34a of the 2 nd side wall portion 34, which is an inward facing surface. Here, the 4 th emergency stop switch S4 is a switch for emergency-stopping only the 2 nd conveying device 2. However, the 4 th emergency stop switch S4 is not limited to this, and may be a switch for emergency stopping both the 1 st conveying device 1 and the 2 nd conveying device 2.
In the present embodiment, a 5 th emergency stop switch S5 for emergency stopping at least the 1 st conveying device 1 is disposed on the outer wall surface of the cylindrical wall 3 in the 1 st zone A1. In this example, the 5 th emergency stop switch S5 is disposed on the 1 st outer wall surface 33b of the 1 st side wall portion 33, which is an outward facing surface. Here, the 5 th emergency stop switch S5 is a switch for emergency-stopping only the 1 st conveying device 1. However, the 5 th emergency stop switch S5 is not limited to this, and may be a switch for emergency stopping both the 1 st conveying device 1 and the 2 nd conveying device 2.
In the present embodiment, a 6 th emergency stop switch S6 for emergency stopping at least the 2 nd conveyor 2 is disposed on the outer wall surface of the cylindrical wall 3 in the 2 nd zone A2. In this example, the 6 th emergency stop switch S6 is disposed on the 2 nd outer wall surface 34b of the 2 nd side wall portion 34, which is an outward facing surface. Here, the 6 th emergency stop switch S6 is a switch for emergency-stopping only the 2 nd conveying device 2. However, the 6 th emergency stop switch S6 is not limited to this, and may be a switch for emergency stopping both the 1 st conveying device 1 and the 2 nd conveying device 2.
Next, a control structure of the article transport apparatus 100 will be described with reference to fig. 6. Fig. 6 is a block diagram showing a part of the control structure of the article conveying apparatus 100.
As shown in fig. 6, the article transport apparatus 100 includes a general control device Ht that generally manages storage, movement, and the like of a plurality of articles W in the apparatus. The integrated control device Ht is configured to be capable of communicating with the 1 st conveyance control unit H1 that controls the operation of the 1 st conveyance device 1, the 2 nd conveyance control unit H2 that controls the operation of the 2 nd conveyance device 2, and the door control unit H6 that controls the operation of the fire door 6 via a wire or wirelessly. The general control device Ht performs a conveyance command for conveying the article W to a predetermined location, a stop command for stopping each operation, and the like, with respect to the 1 st conveyance control unit H1 and the 2 nd conveyance control unit H2. The integrated control device Ht, the 1 st conveyance control unit H1, the 2 nd conveyance control unit H2, and the gate control unit H6 include, for example, a processor such as a microcomputer, a peripheral circuit such as a memory, and the like. The respective functions are realized by cooperation of these hardware and a program executed on a processor such as a computer.
In the present embodiment, the 1 st conveyance control unit H1 is configured to be able to obtain detection results from the 1 st sensor Se1 that detects the protruding state and the retracted state of the 1 st work table 71. As described above, the 1 st conveyance path P1 is closed when the 1 st table 71 is in the protruding state, and is opened when the 1 st table 71 is in the retracted state. Therefore, in this example, when the 1 st work table 71 is in the protruding state, the conveyance of the article W by the 1 st conveyor 1 is prohibited, and when the 1 st work table 71 is in the retracted state, the conveyance of the article W by the 1 st conveyor 1 is permitted. The 1 st conveyance control unit H1 prohibits and permits the conveyance.
In the present embodiment, the 1 st conveyance control unit H1 is configured to be able to acquire information on whether or not the 1 st emergency stop switch S1 and the 2 nd emergency stop switch S2 are pressed. When at least one of the 1 st emergency stop switch S1 and the 2 nd emergency stop switch S2 is pressed, the 1 st conveying device 1 is emergency stopped. Further, in this example, the 1 st conveyance control unit H1 is configured to be able to acquire information on whether or not the 3 rd and 5 th emergency stop switches S3 and S5 are pressed. When the 3 rd emergency stop switch S3 or the 5 th emergency stop switch S5 is pressed, the 1 st conveying device 1 is emergency stopped. The 1 st conveyance control unit H1 performs the emergency stop.
In the present embodiment, the 2 nd conveyance control unit H2 is configured to be able to obtain detection results from the 2 nd sensor Se2 that detects the protruding state and the retracted state of the 2 nd table 72. As described above, the 2 nd conveyance path P2 is closed when the 2 nd table 72 is in the protruding state, and is opened when the 2 nd table 72 is in the retracted state. Therefore, in this example, when the 2 nd working table 72 is in the protruding state, the conveyance of the article W by the 2 nd conveyor 2 is prohibited, and when the 2 nd working table 72 is in the retracted state, the conveyance of the article W by the 2 nd conveyor 2 is permitted. The prohibition and permission of the conveyance are performed by the conveyance control unit H2 of the 2 nd.
In the present embodiment, the 2 nd conveyance control unit H2 is configured to be able to acquire information on whether or not the 1 st emergency stop switch S1 and the 2 nd emergency stop switch S2 are pressed. When at least one of the 1 st emergency stop switch S1 and the 2 nd emergency stop switch S2 is pressed, the 2 nd conveyor 2 is emergency stopped. Further, in this example, the 2 nd conveyance control unit H2 is configured to be able to acquire information on whether or not the 4 th and 6 th emergency stop switches S4 and S6 are pressed. When the 4 th or 6 th emergency stop switch S4 or S6 is pressed, the 2 nd conveyor 2 is emergency stopped. The emergency stop is performed by the 2 nd conveyance control unit H2.
In the present embodiment, the integrated control device Ht is configured to be able to acquire a detection result from the object detection sensor SeO. When an object is detected between the pair of separators 50 disposed on each of the adjacent floors by the object detection sensor SeO, the integrated control device Ht instructs the 1 st conveyance control unit H1 and the 2 nd conveyance control unit H2 to stop the operation of each of the conveyance devices (1, 2). That is, when an object is detected by the object detection sensor SeO, both the conveyance of the article W by the 1 st conveyance device 1 and the conveyance of the article W by the 2 nd conveyance device 2 are prohibited. However, the present invention is not limited to such a configuration, and the 1 st conveyance control unit H1 and the 2 nd conveyance control unit H2 may be configured to obtain the detection result from the object detection sensor SeO and stop the operation of the 1 st conveyance device 1 or the 2 nd conveyance device 2 based on the obtained detection result.
In the present embodiment, the integrated control device Ht is configured to be able to obtain the detection result from the fire detection sensor SeF. When a fire is detected by the fire detection sensor SeF, the integrated control device Ht executes a stop command for stopping the operation of each of the conveying devices (1, 2) with respect to the 1 st conveying control unit H1 and the 2 nd conveying control unit H2. When a fire is detected by the fire detection sensor SeF, the integrated control device Ht instructs the door control unit H6 to set the fire door 6 to the closed state. The door control unit H6 that receives the instruction moves the fire door 6 to a closed state. As described above, when the fire door 6 is in the closed state, the opening area 40R including the 1 st area 41R and the 2 nd area 42R is closed, and thereby both the 1 st conveying path P1 and the 2 nd conveying path P2 are closed. Therefore, in this example, when the fire door 6 is in the closed state, both the conveyance of the article W by the 1 st conveyance device 1 and the conveyance of the article W by the 2 nd conveyance device 2 are prohibited. However, when the 1 st lifting/lowering body 13 or the 2 nd lifting/lowering body 23 stops at a position interfering with the fire door 6, the fire door 6 can no longer be closed. Therefore, when the fire door 6 is in the closed state, the 1 st and 2 nd conveyors 1 and 2 nd conveyor 2 are stopped in a state where the 1 st and 2 nd lifters 13 and 23 are retracted to positions not interfering with the fire door 6. In the above description, the door control unit H6 receives a command from the integral control device Ht that obtains the detection result from the fire detection sensor SeF, and the configuration of setting the fire door 6 to the closed state is described. However, the door control unit H6 is not limited to this configuration, and may be configured to be able to acquire the detection result from the fire detection sensor SeF, and to set the fire door 6 to the closed state based on the acquired detection result.
In the article transport facility 100 configured as described above, the 1 st transport device 1 and the 2 nd transport device 2 can be maintained separately, and the fire door 6 can be properly closed in the event of a fire. Here, fig. 7 to 9 schematically show the operations of the 1 st working table 71, the 2 nd working table 72, and the fire door 6, and elements unnecessary for the description are omitted. The left-hand diagrams of fig. 7 to 9 show the 1 st area A1 seen from the 1 st side X1 in the parallel direction, and the right-hand diagrams of fig. 7 to 9 show the 2 nd area A2 seen from the 2 nd side X2 in the parallel direction.
For example, when the operator performs maintenance of the 1 st conveyor 1 in the 1 st area A1, as shown in the left view of fig. 7, the 1 st work table 71 is set in a protruding state, and the 1 st work table 71 is disposed above the 1 st area 41R which is a part of the opening area 40R. The operator can perform maintenance of the 1 st conveying device 1 by using the 1 st working table 71. The 1 st table 71 is disposed above the 1 st region 41R, and the 1 st conveying path P1, which is the conveying path of the 1 st conveying device 1, is closed, but the conveying of the article W by the 1 st conveying device 1 is prohibited when the 1 st table 71 is in the protruding state, so that the operator can perform maintenance safely. On the other hand, the 2 nd working table 72 and the 1 st working table 71 can be operated separately, and for example, can be set in a retracted state in advance as shown in the right drawing of fig. 7. When the 2 nd table 72 is in the retracted state, the 2 nd table 72 is disposed outside the 2 nd region 42R which is a part of the opening region 40R. Therefore, the 2 nd conveying path P2, which is the conveying path of the 2 nd conveying device 2, is opened. Accordingly, when the 2 nd working table 72 is in the retracted state, the conveyance of the article W by the 2 nd conveyor 2 is permitted, and the conveyance of the article W in the 2 nd zone A2 is enabled.
In addition, for example, when the operator performs maintenance of the 2 nd conveyor 2 in the 2 nd area A2, as shown in the right view of fig. 8, the 2 nd table 72 is set to a protruding state, and the 2 nd table 72 is disposed above the 2 nd area 42R. The operator can perform maintenance of the 2 nd conveyor 2 using the 2 nd table 72. The 2 nd table 72 is disposed above the 2 nd region 42R, and the 2 nd conveying path P2 is closed, but the conveyance of the article W by the 2 nd conveying device 2 is prohibited when the 2 nd table 72 is in the protruding state, so that the operator can perform maintenance safely. On the other hand, the 1 st working table 71 and the 2 nd working table 72 can be operated separately, and for example, can be set in a retracted state in advance as shown in the left view of fig. 8. When the 1 st work table 71 is in the retracted state, the 1 st work table 71 is disposed outside the 1 st region 41R. Therefore, the 1 st conveyance path P1 is opened. Accordingly, when the 1 st work table 71 is in the retracted state, the conveyance of the article W by the 1 st conveyor 1 is permitted, and the conveyance of the article W in the 1 st area A1 is enabled.
A partition wall 5 is provided between the 1 st conveyor 1 and the 2 nd conveyor 2 in the parallel direction X. Therefore, even when the operator operates the 2 nd conveyor 2 in the 2 nd zone A2 (see fig. 7) during, for example, the maintenance of the 1 st conveyor 1 in the 1 st zone A1, the operator can be prevented from coming into contact with the 2 nd conveyor 2. In contrast, when the 1 st conveyor 1 is operated in the 1 st zone A1 while the operator is performing maintenance of the 2 nd conveyor 2 in the 2 nd zone A2 (see fig. 8), the operator can be prevented from coming into contact with the 1 st conveyor 1. Thus, according to the article conveying apparatus 100 of the present disclosure, in the case where the 1 st conveying device 1 and the 2 nd conveying device 2 are arranged in parallel, it is possible to ensure ease of maintenance and to ensure safety of an operator while suppressing a decrease in conveying efficiency at the time of maintenance to be small.
In the case of a fire, as shown in fig. 9, the fire door 6 is closed, and the fire door 6 is disposed above the opening area 40R. As described above, when the fire door 6 is in the closed state, both the conveyance of the article W by the 1 st conveyance device 1 and the conveyance of the article W by the 2 nd conveyance device 2 are prohibited. In the example shown in fig. 9, both the 1 st working table 71 and the 2 nd working table 72 are set to the retracted state, and the fire door 6 is set to the closed state. However, the present invention is not limited to this, and at least one of the 1 st working table 71 and the 2 nd working table 72 may be in a protruding state, and the fire door 6 may be in a closed state.
[ Other embodiments ]
Next, another embodiment of the article conveying apparatus will be described.
(1) In the above-described embodiment, the description has been made of an example in which the 1 st ladder L1 is fixed to the 1 st surface 51 of the partition wall 5, which is the surface on the side where the 1 st guide rail 11 is disposed, and the 2 nd ladder L2 is fixed to the 2 nd surface 52 of the partition wall 5, which is the surface on the side where the 2 nd guide rail 21 is disposed. However, the present invention is not limited to this example, and at least one of the 1 st ladder L1 and the 2 nd ladder L2 may be fixed to the inner surface of the cylindrical wall 3, for example. The 1 st ladder L1 and the 2 nd ladder L2 are not necessarily required, and the article transport facility 100 may not include at least one of the 1 st ladder L1 and the 2 nd ladder L2.
(2) In the above-described embodiment, the description has been made of an example in which the article conveying apparatus 100 includes the cylindrical wall 3 covering both the 1 st conveying device 1 and the 2 nd conveying device 2. However, the cylindrical wall 3 is not necessarily required, and the article conveying apparatus 100 may not include such a cylindrical wall 3.
(3) In the above-described embodiment, the description has been made of an example in which the 1 st to 6 th emergency stop switches (S1 to S6) for emergently stopping the 1 st conveying device 1 or the 2 nd conveying device 2 are provided in the article conveying apparatus 100, but these 1 st to 6 th emergency stop switches (S1 to S6) are not necessarily configured. Accordingly, the article transport apparatus 100 may not include at least a part of the 1 st to 6 th emergency stop switches (S1 to S6).
(4) In the above-described embodiment, an example in which the fireproof door 6, the 1 st working table 71, and the 2 nd working table 72 are configured to change the state by sliding movement is described. However, the present invention is not limited to such an example, and at least 1 of the fireproof door 6, the 1 st stage 71, and the 2 nd stage 72 may be configured to change the state by a rotation operation about an axis extending in a specific direction (for example, a horizontal direction).
(5) In the above-described embodiment, the explanation was given of an example in which the fireproof door 6, the 1 st working table 71, and the 2 nd working table 72 are provided in the opening 40 formed in the floor portion 4 (passing through the floor portion 4T). However, these fireproof doors 6,1 st stage 71 and 2 nd stage 72 are not necessarily configured. For example, the fireproof door 6, the 1 st stage 71, and the 2 nd stage 72 may be partially provided, or all of them may not be provided.
(6) The configurations disclosed in the above embodiments may be applied in combination with the configurations disclosed in other embodiments, as long as no contradiction occurs. Other configurations are merely examples of the embodiments disclosed in the present specification in all respects. Accordingly, various modifications may be made without departing from the spirit of the disclosure.
[ Summary of the above embodiment ]
Hereinafter, the article conveying apparatus described above will be described.
The article conveying device is provided with: a1 st conveying device which is arranged on a building having a floor part of a plurality of floors and conveys articles across the plurality of floors in an up-down direction; and a 2 nd conveyor arranged in parallel with the 1 st conveyor and conveying articles across the plurality of floors in the up-down direction; the 1 st conveying device comprises a1 st guide rail arranged across the plurality of floors along the up-down direction, a1 st lifting body lifting along the 1 st guide rail, and a1 st transfer part supported by the 1 st lifting body and used for holding and transferring articles; the 2 nd conveyor includes a 2 nd guide rail arranged to cross the plurality of floors in the up-down direction, a 2 nd lifting body lifted along the 2 nd guide rail, and a 2 nd transfer unit supported by the 2 nd lifting body and configured to hold and transfer articles; the 1 st guide rail and the 2 nd guide rail are disposed so as to penetrate an opening formed in a passing floor portion through which the 1 st lifting body and the 2 nd lifting body pass when conveying articles across the plurality of floors; a partition wall that partitions the 1 st conveyor and the 2 nd conveyor across the plurality of floors is provided between the 1 st conveyor and the 2 nd conveyor in the vertical direction, the direction in which the 1 st conveyor and the 2 nd conveyor are arranged as viewed in the vertical direction being a parallel direction, the direction in which the 1 st conveyor and the 2 nd conveyor are viewed in the vertical direction being an orthogonal direction, and the direction being orthogonal to the parallel direction; the 1 st lifting body is arranged to lift on the 1 st side of the 1 st guide rail in the orthogonal direction which is one side of the orthogonal direction; the 2 nd lifting body is arranged to lift on the 1 st side of the orthogonal direction relative to the 2 nd guide rail; the 1 st guide rail and the 2 nd guide rail are fixed to the floor portion on the 2 nd side in the orthogonal direction, which is the other side in the orthogonal direction; a1 st power supply part for supplying power to the 1 st lifting body is arranged along the side surface of the 1 st guide rail opposite to the side of the partition wall; along the side surface of the 2 nd guide rail opposite to the side of the partition wall, a 2 nd power supply part for supplying power to the 2 nd lifting body is arranged.
According to this configuration, since the articles are conveyed by both the 1 st conveying device and the 2 nd conveying device, a larger number of articles can be conveyed than in the case where there are only 1 conveying devices. Further, according to this configuration, since the 1 st conveyor and the 2 nd conveyor are separated by the partition wall, even if one of the 1 st conveyor and the 2 nd conveyor is stopped and maintenance is performed while the other is continued, it is possible to avoid contact between an operator who performs maintenance work and the conveyor in the process of performing maintenance work. That is, since the 1 st conveying device and the 2 nd conveying device can be individually stopped for maintenance, the safety of the operator can be ensured while suppressing the decrease in conveying efficiency during maintenance to a small extent. Further, according to the present structure, the 1 st power feeding portion is disposed along a side surface of the 1 st guide rail opposite to a side opposite to the partition wall, and the 2 nd power feeding portion is disposed along a side surface of the 2 nd guide rail opposite to the side opposite to the partition wall. Therefore, when maintenance is performed on the 1 st power supply unit and the 2 nd power supply unit, the partition wall is less likely to interfere with the maintenance. Thus, ease of maintenance is ensured. As described above, according to the present configuration, when two conveying apparatuses are arranged in parallel, it is possible to ensure ease of maintenance, and to ensure safety of operators while suppressing a decrease in conveying efficiency during maintenance to a small extent.
Here, it is preferable that the device further comprises: a1 st ladder disposed along the up-down direction so as not to overlap with the movement locus of the 1 st lifting body and the 1 st transfer unit; and a 2 nd ladder disposed along the up-down direction so as not to overlap with the movement track of the 2 nd lifting body and the 2 nd transfer unit; the 1 st ladder is fixed to the 1 st surface of the partition wall, which is a surface on the side where the 1 st guide rail is arranged; the 2 nd ladder is fixed to a 2 nd surface of the partition wall, which is a surface on a side where the 2 nd guide rail is disposed.
According to this configuration, the ladder used by the operator at the time of maintenance can be set to an appropriate position where the ladder does not interfere with the conveyance of the articles by the 1 st conveyor and the 2 nd conveyor. Further, by using the partition wall that separates the 1 st conveyor from the 2 nd conveyor, the above-described installation of the ladder can be realized with a relatively simple structure.
Preferably, the system further comprises a cylindrical wall covering both of the 1 st conveyor and the 2 nd conveyor in each of the plurality of floors; the 1 st guide rail and the 2 nd guide rail are fixed to the floor parts of the plurality of floors; the cylindrical wall is fixed to the 1 st guide rail and the 2 nd guide rail; the partition wall is fixed to the cylindrical wall.
According to this configuration, the guide rail can be appropriately supported with respect to the building, and the cylindrical wall and the partition wall can be appropriately supported by the guide rail.
Further, it is preferable that a 1 st emergency stop switch for emergency stopping at least the 1 st conveying device is disposed on a 1 st surface of the partition wall, which is a surface on which the 1 st guide rail is disposed; a2 nd emergency stop switch for emergency stopping at least the 2 nd conveyor is disposed on a2 nd surface of the partition wall, which is a surface on which the 2 nd guide rail is disposed.
According to this configuration, even when the 1 st conveyor and the 2 nd conveyor are individually stopped and maintenance is performed and when the worker performs maintenance work at a position close to the operating conveyor via the partition wall, the worker can promptly stop the operating conveyor as needed. This ensures further safety for the operator.
Industrial applicability
The technology related to the present disclosure can be used in an article conveying apparatus.
Description of the reference numerals
100: Article conveying equipment
1: 1 St conveying device
11: 1 St guide rail
12: 1 St power supply unit
13: 1 St lifting body
14: 1 St transfer unit
2: No. 2 conveying device
21: 2 Nd guide rail
22: 2 Nd power supply unit
23: 2 Nd lifting body
24: The 2 nd transfer unit
3: Cylindrical wall
4: Floor part
4T: through the floor part
40: An opening part
5: Partition wall
51: Plane 1
52: 2 Nd surface
L1: ladder 1
L2: ladder 2
S1: no. 1 emergency stop switch
S2: no. 2 emergency stop switch
W: article and method for manufacturing the same
X: parallel direction
Y: orthogonal direction
Y1: the 1 st side of the orthogonal direction
Y2: the 2 nd side of the orthogonal direction.

Claims (6)

1. An article conveying device, comprising a conveying device,
The device is provided with:
A1 st conveying device which is arranged on a building having a floor part of a plurality of floors and conveys articles across the plurality of floors in an up-down direction; and
A2 nd conveyor arranged in parallel with the 1 st conveyor and conveying articles across the plurality of floors in the up-down direction;
it is characterized in that the method comprises the steps of,
The 1 st conveying device comprises a1 st guide rail arranged across the plurality of floors along the up-down direction, a1 st lifting body lifting along the 1 st guide rail, and a1 st transfer part supported by the 1 st lifting body and used for holding and transferring articles;
the 2 nd conveyor includes a2 nd guide rail arranged to cross the plurality of floors in the up-down direction, a2 nd lifting body lifted along the 2 nd guide rail, and a2 nd transfer unit supported by the 2 nd lifting body and configured to hold and transfer articles;
the 1 st guide rail and the 2 nd guide rail are arranged to penetrate a common opening formed in a passing floor portion through which the 1 st lifting body and the 2 nd lifting body pass when conveying articles across the plurality of floors;
the direction in which the 1 st conveying device and the 2 nd conveying device are arranged as viewed in the up-down direction is defined as a parallel direction, the direction in which the 1 st conveying device and the 2 nd conveying device are viewed in the up-down direction is defined as an orthogonal direction,
A partition wall is provided between the 1 st conveyor and the 2 nd conveyor in the parallel direction, the partition wall partitioning the 1 st conveyor and the 2 nd conveyor across the plurality of floors;
The 1 st lifting body is arranged to lift on the 1 st side of the 1 st guide rail in the orthogonal direction which is one side of the orthogonal direction;
the 2 nd lifting body is arranged to lift on the 1 st side of the orthogonal direction relative to the 2 nd guide rail;
The 1 st guide rail and the 2 nd guide rail are fixed to the floor portion on the 2 nd side in the orthogonal direction, which is the other side in the orthogonal direction;
a1 st power supply part for supplying power to the 1 st lifting body is arranged along the side surface of the 1 st guide rail opposite to the side of the partition wall;
Along the side surface of the 2 nd guide rail opposite to the side of the partition wall, a2 nd power supply part for supplying power to the 2 nd lifting body is arranged.
2. The article transport apparatus of claim 1,
The device further comprises:
a1 st ladder disposed along the up-down direction so as not to overlap with the movement locus of the 1 st lifting body and the 1 st transfer unit; and
A 2 nd ladder disposed along the up-down direction so as not to overlap with the movement locus of the 2 nd lifting body and the 2 nd transfer unit;
The 1 st ladder is fixed to the 1 st surface of the partition wall, which is a surface on the side where the 1 st guide rail is arranged;
the 2 nd ladder is fixed to a 2 nd surface of the partition wall, which is a surface on a side where the 2 nd guide rail is disposed.
3. The article transport apparatus of claim 1,
Further comprising a cylindrical wall covering both the 1 st conveyor and the 2 nd conveyor in each of the plurality of floors;
The cylindrical wall is fixed to the 1 st guide rail and the 2 nd guide rail;
The partition wall is disposed so as to overlap the opening portion when viewed in the vertical direction, and is fixed to the cylindrical wall.
4. The article transport apparatus of claim 1,
Further comprising a cylindrical wall covering both the 1 st conveyor and the 2 nd conveyor in each of the plurality of floors;
The 1 st guide rail and the 2 nd guide rail are fixed to the floor parts of the plurality of floors;
The cylindrical wall is fixed to the 1 st guide rail and the 2 nd guide rail;
The partition wall is fixed to the cylindrical wall.
5. The article transport apparatus of claim 2,
Further comprising a cylindrical wall covering both the 1 st conveyor and the 2 nd conveyor in each of the plurality of floors;
The 1 st guide rail and the 2 nd guide rail are fixed to the floor parts of the plurality of floors;
The cylindrical wall is fixed to the 1 st guide rail and the 2 nd guide rail;
The partition wall is fixed to the cylindrical wall.
6. The article transport apparatus according to claim 1 to 5, wherein,
A1 st emergency stop switch for emergency stopping at least the 1 st conveying device is arranged on a1 st surface of the partition wall, which is a surface on which the 1 st guide rail is arranged;
A 2 nd emergency stop switch for emergency stopping at least the 2 nd conveyor is disposed on a 2 nd surface of the partition wall, which is a surface on which the 2 nd guide rail is disposed.
CN202010887668.8A 2019-09-17 2020-08-28 Article conveying equipment Active CN112591479B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6215897B1 (en) * 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Automated substrate processing system
CN105314312A (en) * 2014-07-14 2016-02-10 株式会社大福 Inter-floor transport facility
CN105819136A (en) * 2015-01-27 2016-08-03 株式会社大福 Article Transport Facility
CN106865085A (en) * 2015-11-17 2017-06-20 株式会社大福 Article carrying apparatus
JP2018039664A (en) * 2016-09-09 2018-03-15 株式会社ダイフク Article conveyance device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017208437A (en) 2016-05-18 2017-11-24 株式会社ダイフク Article carrier facility
JP6747217B2 (en) 2016-09-27 2020-08-26 株式会社ダイフク Goods transport facility

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6215897B1 (en) * 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Automated substrate processing system
CN105314312A (en) * 2014-07-14 2016-02-10 株式会社大福 Inter-floor transport facility
CN105819136A (en) * 2015-01-27 2016-08-03 株式会社大福 Article Transport Facility
CN106865085A (en) * 2015-11-17 2017-06-20 株式会社大福 Article carrying apparatus
JP2018039664A (en) * 2016-09-09 2018-03-15 株式会社ダイフク Article conveyance device

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TW202112630A (en) 2021-04-01

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