JP2018039655A - Article conveyance facility - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an article conveyance facility which can properly secure workability and safety at the maintenance work to a first conveyance device and a second conveyance device while suppressing increase in the length of each cable body and reduction in the operation efficiency of the facility.SOLUTION: An article conveyance facility includes: a first holding tool 61 which holds a first connection part 13 in a state of being detached from a first attachment part; and a second holding tool 62 which holds a second connection part 23 in a state of being detached from a second attachment part. The first holding tool 61 holds the first connection part 13 so that a first cable body 10 is arranged in such a posture as not to interfere with a second conveyance device 2 and a second cable body 20 when the second conveyance device 2 moves in the entire region of a second movement range R2. The holding tool 62 holds the second connection part 23 so that the second cable body 20 is arranged in such a posture as not to interfere with a first conveyance device 1 and the first cable body 10 when the first conveyance device 1 moves in the entire region of a first movement range R1.SELECTED DRAWING: Figure 3

Description

  The present invention includes a first transport device and a second transport device that move in front of a storage shelf along a first direction, and a first power supply or communication device that is connected to the first transport device and extends in the first direction. The present invention relates to an article transport facility including one cable body and a second cable body for power supply or communication that is connected to a second transport device and extends in a first direction.

  As such an article conveyance facility, an article conveyance facility described in International Publication No. 2014/125727 (Patent Document 1) is known. Specifically, the article transport facility described in Patent Document 1 includes a first transport cart (4) and a second transport cart (5) traveling on a travel rail (10), and a first transport cart ( 4) Attached to the first carriage guide (8) for supplying power to the transport carriage (4) and attached to the second carriage (5) and feeding power to the carriage (5) A second cable guide (9). The first cable guide (8) is deformed along with the movement of the first transport carriage (4) along the travel rail (10), so that the first cable guide (8) is the first in the common area (14) and the dedicated area (15). The transport cart (4) is allowed to move. In addition, the second cable guide (9) is deformed along with the movement of the second transport carriage (5) along the travel rail (10), so that the second cable guide (9) is deformed in the shared area (14) and the dedicated area (16). The second transport carriage (5) is allowed to move.

International Publication No. 2014/125727 (paragraph 0017, FIG. 1, FIG. 2, etc.)

  By the way, in order to suppress a decrease in the operating efficiency of the equipment when performing maintenance work on either the first transport device or the second transport device, the maintenance work is performed on the transport device to be maintained, and is not a maintenance target. It is conceivable to continue the work of transporting articles by the transport device. In this case, from the viewpoint of appropriately ensuring the workability and safety of the maintenance work, a retreat area is provided outside the range in the first direction in which the first transport device or the second transport device moves during article transport, When performing maintenance work on one transport device or the second transport device, it is conceivable to move the transport device to be maintained to the retreat area. In this regard, in a configuration in which the cable body is allowed to move along the first direction of the transport device, the movable range along the first direction of the transport device depends on the length of the cable body and the like. It is limited to the range that is determined. Therefore, in order to make it possible to move the transport device to be maintained to the retreat area as described above, it is necessary to use a cable body that is long enough to allow the transport device to move to the retreat area. The length of the body and the second cable body may increase the size of the equipment and increase the cost. In order to avoid this problem, it is conceivable that the cable body is configured to be detachable from the transport apparatus, and the cable body is detached from the transport apparatus when the transport apparatus to be maintained is moved to the retreat area. However, in this case, the cable body that is detached from the maintenance target transport device hinders the movement of the transport device that is not the maintenance target, and the article is transported not only by the maintenance target transport device but also by the transport device that is not the maintenance target. If the work cannot be continued, the operating efficiency of the equipment may be reduced. However, Patent Document 1 does not particularly recognize these points.

  Therefore, it is possible to appropriately ensure the workability and safety at the time of maintenance work for the first transport device and the second transport device while suppressing the increase in the length of each cable body and the decrease in the operation efficiency of the equipment. Realization of an article transport facility is desired.

  In view of the above, a storage shelf in which a plurality of storage units that store articles are arranged in a first direction along a horizontal direction, and the storage unit moves in front of the storage shelf along the first direction, and the storage unit Or a first transport device and a second transport device for transporting articles from the storage section, a first cable body for power supply or communication connected to the first transport device and extending in the first direction, A second cable body for power supply or communication that is connected to the second transport device and extends in the first direction, and the first transport device is the first transport device with respect to the second transport device. The characteristic configuration of the article conveying facility arranged on the first side which is one side of the direction is that the first cable body is deformed along with the movement along the first direction of the first conveying device, The first transport device moves in a first movement range that is a range along the first direction. The second cable body is deformed along with the movement of the second transport device along the first direction, and is a range along the first direction and the first movement range. And the second connection device is allowed to move in a second movement range that overlaps at least partly, and the first connection portion that is a connection portion with the first transfer device in the first cable body is the first connection portion, The first attachment portion fixed to one transport device is configured to be removable, and the first attachment portion is disposed on the first side with respect to the first movement range and the second movement range. A first evacuation area is provided in which the first transport device can be moved in a state where the first transport device is detached from the second portion, and a second connection portion that is a connection portion with the second transport device in the second cable body is Second mounting part fixed to the second transport device The second connection part is detached from the second attachment part on the second side opposite to the first side with respect to the first movement range and the second movement range. A second retraction area capable of moving the second transport device in a state in which the first transfer device is moved, and a first holding tool for holding the first connection portion in a state of being removed from the first attachment portion; A second holding tool for holding the second connection part in a state of being removed from the two attachment parts, and the first holding tool is used when the second transport device moves in the entire second movement range. The first connection part is held so that the first cable body is arranged in a posture that does not interfere with the second transfer device and the second cable body, and the second holding tool is provided with the first transfer device. In the case where the first moving range moves over the entire first moving range. And it is in the point which hold | maintains said 2nd connection part so that said 2nd cable body may be arrange | positioned with the attitude | position which does not interfere with said 1st cable body.

According to said characteristic structure, when performing the maintenance operation | work of a 1st conveying apparatus, a 1st conveying apparatus is set to the 1st evacuation area provided in the 1st side with respect to a 1st movement range and a 2nd movement range. By moving it, it is possible to appropriately ensure the workability and safety of the maintenance work for the first transport device. Here, since the movement of the first transport device to the first evacuation area is performed with the first connection portion removed from the first attachment portion, the first cable device is used as the first evacuation area of the first transport device. It is not necessary to use a cable body long enough to allow movement to That is, it is possible to realize a configuration in which the first transport device can move to the first retreat area while suppressing an increase in the length of the first cable body. In addition, according to the above-described characteristic configuration, the second transport device moves in the entire second movement range by holding the first connection portion removed from the first attachment portion by the first holding tool. When it does, a 1st cable body can be arrange | positioned with the attitude | position which does not interfere with a 2nd conveying apparatus and a 2nd cable body. Therefore, it can be avoided that the first cable body detached from the first transport device obstructs the movement of the second transport device in the second movement range. While performing the maintenance work of the transport device, it is possible to continue the work of transporting articles by the second transport device.
Moreover, according to said characteristic structure, when performing the maintenance operation | work of a 2nd conveying apparatus, the 2nd retreat provided in the 2nd side with respect to a 1st moving range and a 2nd moving range is carried out. By moving to the area, it is possible to appropriately ensure the workability and safety of the maintenance work for the second transport device. Here, since the movement of the second transport device to the second retreat area is performed with the second connection portion removed from the second attachment portion, the second retraction area of the second transport device is used as the second cable body. It is not necessary to use a cable body long enough to allow movement to That is, it is possible to realize a configuration in which the second transport device can move to the second retreat area while suppressing an increase in the length of the second cable body. In addition, according to the above-described characteristic configuration, the first transport device moves the entire range of the first movement range by holding the second connection portion in a state of being removed from the second attachment portion by the second holder. In this case, the second cable body can be arranged in a posture that does not interfere with the first transport device and the first cable body. Therefore, it can be avoided that the second cable body detached from the second transport device obstructs the movement of the first transport device in the first movement range. While performing the maintenance work of the transport apparatus, it is possible to continue the work of transporting articles by the first transport apparatus.
As described above, according to the above-described characteristic configuration, while suppressing an increase in the length of each cable body and a decrease in the operating efficiency of equipment, workability during maintenance work for the first transport device and the second transport device can be reduced. It is possible to realize an article transport facility capable of appropriately ensuring safety.

  Here, a first pin for positioning the first connection portion relative to the first attachment portion and a second pin for positioning the second connection portion relative to the second attachment portion are provided, The first pin is configured to be detachable with respect to an insertion hole provided in at least one of the first attachment portion and the first connection portion, and the second pin includes the second attachment portion and the first attachment portion. It is preferable that the insertion hole is configured to be detachable with respect to the insertion hole provided in at least one of the two connection portions.

According to this configuration, since the first connecting portion can be positioned with respect to the first mounting portion by utilizing the fitting between the first pin and the insertion hole, the fitting portion is a fastening portion using a fastening bolt. Compared to the above, it is possible to ensure a relatively high positioning accuracy in accordance with the degree of fitting between the first pin and the insertion hole. If the mounting position of the first connecting portion relative to the first mounting portion is not appropriate, an excessive load may be applied to each portion of the first cable body and the first mounting portion when the first transport device is moved. According to the above configuration, the first connecting portion is configured to be detachable from the first mounting portion, and the above-described excessive load is ensured by appropriately ensuring the reproduction accuracy of the mounting position of the first connecting portion. Can be suppressed. In addition, according to said structure, compared with the case where the fitting part of a 1st pin and an insertion hole is used as the fastening part by a fastening bolt, it aims at the improvement of workability | operativity at the time of removal and attachment of a 1st connection part. There is also an advantage of being able to.
Moreover, according to said structure, since the positioning of the 2nd connection part with respect to a 2nd attachment part can be performed using fitting with a 2nd pin and an insertion hole, the said fitting part is a fastening part by a fastening bolt. Compared to the case, the relatively high positioning accuracy according to the degree of fitting between the second pin and the insertion hole can be ensured. If the mounting position of the second connecting portion with respect to the second mounting portion is not appropriate, an excessive load may be applied to each part of the second cable body and the second mounting portion when the second transport device moves. According to the above configuration, the second connecting portion is configured to be detachable from the second mounting portion, and the above-described excessive load is ensured by appropriately ensuring the reproduction accuracy of the mounting position of the second connecting portion. Can be suppressed. In addition, according to said structure, compared with the case where the fitting part of a 2nd pin and an insertion hole is used as the fastening part by a fastening bolt, it aims at the improvement of workability | operativity at the time of removal and attachment of a 2nd connection part. There is also an advantage of being able to.

  Further, the first insertion / removal pin, which is the first pin that is detachable with respect to the insertion holes provided in the first attachment portion and the first connection portion, the second attachment portion, and the second connection, respectively. A second insertion / removal pin, which is the second pin that is detachable with respect to the insertion hole provided in each of the parts, and the first holding tool is configured to allow the first insertion / removal pin to be removably inserted. One insertion hole, holding the first connection part in a state where the first insertion / removal pin is inserted into both the insertion hole provided in the first connection part and the first insertion hole, and the second The holder includes a second insertion hole through which the second insertion / removal pin can be inserted / removed, and the second insertion / removal pin is inserted into both the insertion hole provided in the second connection portion and the second insertion hole. It is preferable to hold the second connection portion in a state where it is applied.

  According to this structure, the 1st insertion / removal pin for positioning a 1st connection part with respect to a 1st attachment part is also used in order to hold a 1st connection part in a 1st holder. Therefore, it becomes difficult to lose the first insertion / removal pin necessary for reattaching the first connection portion to the first attachment portion when the first connection portion is removed from the first attachment portion. Moreover, according to said structure, the 2nd insertion / removal pin for positioning a 2nd connection part with respect to a 2nd attachment part is also used in order to hold a 2nd connection part in a 2nd holder. Therefore, it becomes difficult to lose the second insertion / removal pin necessary for reattaching the second connection portion to the second attachment portion when the second connection portion is removed from the second attachment portion.

  A third cable body connecting the first transport device located in the first retraction area and the first connection portion held by the first holder; and located in the second retraction area. It is preferable that a fourth cable body for connecting the second transport device and the second connection portion held by the second holder is provided.

  According to this configuration, when the maintenance work of the first transport device is performed in the first evacuation area, the first transport device and the first connection portion are connected using the third cable body. When performing maintenance work, the first cable body can be effectively used to supply power to the first transport device, or communication between the control device and the first transport device can be performed. It becomes possible. Moreover, according to said structure, when performing the maintenance operation | work of a 2nd conveying apparatus in a 2nd evacuation area, a 2nd conveying apparatus and a 2nd connection part are connected using a 4th cable body, When carrying out the maintenance work of the transport device, it is possible to supply power to the second transport device by effectively using the second cable body, or to communicate between the control device and the second transport device. Can be done.

  The apparatus further includes a control device that controls operations of the first transfer device and the second transfer device, wherein the control device executes first transfer control, second transfer control, and third transfer control, and The one transport control uses the position in the overlapping region of the first movement range and the second movement range as a reference position, and the first transfer control is within the first side range from the reference position in the first movement range. A state in which the movement range of the second conveyance device is limited to a range on the second side opposite to the first side with respect to the reference position in the second movement range while limiting the movement range of the conveyance device. The second transport control is a control for transporting the article to both the first transport device and the second transport device, and the second transport control is performed when the second transport device is positioned in the second retreat area. The first carrying in the entire movement range The third transport control is a control for transporting an article to the first transport device in a state in which the movement of the device is allowed, and the third transport control is performed when the first transport device is positioned in the first retreat area It is preferable that the control is to cause the second transport device to transport the article in a state in which the second transport device is allowed to move in the entire movement range.

  According to this configuration, since the control device can execute the first transfer control, the second transfer control, and the third transfer control, it selects and executes an appropriate transfer control according to the situation at that time. Can do. For example, by executing the first conveyance control, the article can be efficiently conveyed using both the first conveyance device and the second conveyance device. At this time, since the movement range of the first conveyance device and the movement range of the second conveyance device are set so as not to overlap each other, interference between the first conveyance device and the second conveyance device can be easily avoided. . Also, for example, when performing maintenance work on the second transport device, the second transport control is executed so that the article is transported by the first transport device while performing maintenance work on the second transport device in the second retreat area. can do. At this time, in the state where the second transport device is located in the second retreat area, the movement of the first transport device is allowed throughout the first movement range, so that interference between the first transport device and the second transport device is prevented. While appropriately avoiding, it is possible to cause the first transport device to perform a transport operation in which the storage unit existing in the overlapping region of the first travel range with the second travel range is the transport source or transport destination. Also, for example, when performing maintenance work on the first transport device, the third transport control is executed, so that the article is transported by the second transport device while performing maintenance work on the first transport device in the first retreat area. can do. At this time, in the state where the first transport device is located in the first retreat area, the second transport device is allowed to move throughout the second movement range, so that interference between the first transport device and the second transport device is prevented. While appropriately avoiding, it is possible to cause the second transport device to perform a transport operation using the storage unit present in the overlapping region of the second travel range with the first travel range as the transport source or transport destination.

Top view of the goods transport facility Front view of goods transport equipment The figure which shows the arrangement configuration of a 1st support part, a 2nd support part, and a 3rd support part. The perspective view of a 1st support part, a 2nd support part, and a 3rd support part Front view of third support Front view of the first support Side view showing the mounting structure of the first connecting portion relative to the first mounting portion Front view of a part of the first transport device The side view which shows the attachment structure of the 1st connection part with respect to a 1st holder The front view which shows the 1st connection part of the state hold | maintained at the 1st holder Side view of a part of the article transport facility during maintenance work on the first transport device Side view showing the mounting structure of the second connecting portion relative to the second mounting portion Side view showing the mounting structure of the second connecting portion to the second holder Side view of a part of the article transport facility during maintenance work on the second transport device Control block diagram

  An embodiment of an article transport facility will be described with reference to the drawings. As shown in FIGS. 1 and 2, the article transport facility 9 includes a storage shelf 6, a first transport device 1, a second transport device 2, a first cable body 10, and a second cable body 20. ing. The storage shelf 6 is provided with a plurality of storage portions 6 a for storing articles W arranged in the first direction X along the horizontal direction. Each of the first transport device 1 and the second transport device 2 is provided on the storage shelf 6. The article W is moved forward along the first direction X, and the article W is conveyed to or from the storage unit 6a. A rail 7 is installed along the first direction X on the floor F where the article conveyance facility 9 is installed, and each of the first conveyance device 1 and the second conveyance device 2 is guided by the rail 7. It moves along the first direction X. When a space in which at least one of the first transfer device 1 and the second transfer device 2 moves is referred to as a “movement path”, the rail 7 is installed along the movement path (longitudinal direction of the movement path).

  The storage shelf 6 is installed in such a direction that the front side (side where the article W is put in and out of the storage unit 6a) is the moving path side. As shown in FIG. 2, in the present embodiment, the storage shelf 6 is provided with a plurality of storage portions 6 a arranged in the vertical direction Z in addition to the first direction X. Each of the storage portions 6a is provided with a support portion that supports the article W. In the present embodiment, the article W is a container (specifically, FOUP (Front Opening Unified Pod)) that houses a semiconductor substrate, and the article W is placed and supported as a support portion in each of the storage sections 6a. A mounting body is provided. Moreover, as shown in FIG.1 and FIG.2, in this embodiment, the storage shelf 6 is provided in each of the both sides of the 2nd direction Y with respect to a movement path | route. Specifically, two sets of storage shelves 6 are provided side by side in the first direction X, with a pair of storage shelves 6 arranged as opposed to the second direction Y across the movement path. The second direction Y is a direction orthogonal to both the first direction X and the vertical direction Z (vertical direction). Hereinafter, one side in the second direction Y is referred to as a third side Y1, and the side opposite to the third side Y1 (the other side in the second direction Y) is referred to as a fourth side Y2. In the present embodiment, an inert gas such as nitrogen gas is not supplied to the storage shelf 6 installed on the fourth side Y2 with respect to the movement path to the article W (inside the container) stored in the storage unit 6a. An active gas supply device N (see FIG. 2) is provided.

  As shown in FIG. 1, the first transport device 1 is disposed on the first side X <b> 1 that is one side in the first direction X with respect to the second transport device 2. Hereinafter, the side opposite to the first side X1 (the other side in the first direction X) is defined as the second side X2. The first transport device 1 and the second transport device 2 are configured to move along the first direction X at the same position in the second direction Y. Specifically, the first transport device 1 and the second transport device 2 are configured to move along the first direction X at the same position in the second direction Y by being guided by the common rail 7. ing. Therefore, the positional relationship in the first direction X between the first transport device 1 and the second transport device 2 is not switched, and the first transport device 1 is always on the first side X1 with respect to the second transport device 2. To position. As shown in FIG.1 and FIG.2, in this embodiment, a pair of rail 7 is provided so that it may space apart in the 2nd direction Y, and each of the 1st conveying apparatus 1 and the 2nd conveying apparatus 2 It is guided by the pair of rails 7 and moves along the first direction X.

  In the present embodiment, the first transport device 1 and the second transport device 2 are stacker cranes. Specifically, as shown in FIGS. 1 and 2, each of the first transport device 1 and the second transport device 2 is a traveling carriage that is guided by rails 7 (a pair of rails 7 in the present embodiment) and travels. 80, a mast 81 erected on the traveling carriage 80, an elevating body 82 that moves up and down along the mast 81, and a transfer device 83 supported by the elevating body 82. The transfer device 83 is a device that transfers the article W between the transfer target portion such as the storage unit 6a and itself. Although details are omitted, the transfer device 83 is configured to transfer the article W to the storage portion 6a of the storage shelf 6 disposed on either side of the second direction Y with respect to the movement path. Has been. In the present embodiment, the transfer target location of the transfer device 83 includes an internal transfer location of a conveyor 88 (see FIG. 2) described later. As shown in FIG. 1, in the present embodiment, the first transport device 1 is located at a position that is biased to the second side X2 with respect to the central portion in the first direction X of the first transport device 1 and the transfer body 82 and the transfer body. The second transport device 2 includes a lifting and lowering body 82 and a transfer device 83 at a position that is biased toward the first side X1 with respect to the central portion of the second transport device 2 in the first direction X. Therefore, the position at which the first transport device 1 stops when the article W is transferred to the storage unit 6a (the position of the central portion in the first direction X of the first transport device 1) is the storage unit 6a or the The position at which the second transport device 2 stops when the article W is transferred to the storage portion 6a disposed at the same position in the first direction X as the storage portion 6a (in the first direction X of the second transport device 2). It is located on the first side X1 from the center position).

  In this embodiment, the article conveyance facility 9 is installed in a downflow type clean room in which clean air flows downward from the ceiling side to the floor side. As shown in FIG. 2, the floor F of the clean room is composed of a lower floor F2 and an upper floor F1 disposed on the upper side of the lower floor F2. The upper floor F1 is a grating floor, and a plurality of ventilation holes penetrating in the vertical direction Z are formed. The lower floor F2 is a floor that does not have a vent hole, and in the present embodiment, the lower floor F2 is made of non-porous concrete. The air that has flowed from the ceiling side to the floor portion F is discharged into the underfloor space formed between the upper floor F1 and the lower floor F2 through the vent holes of the upper floor F1. As shown in FIG. 2, the rail 7 is installed on the lower floor F2.

  As shown in FIGS. 1 and 2, in the present embodiment, the article transport facility 9 includes a wall body K, a first door 71, a second door 72, a third door 73, a fourth door 74, and a fifth door 75. It has. The wall body K is provided so as to surround the side periphery (periphery when viewed in the vertical direction) of the transfer area 84 where the storage shelves 6 are installed. Each of the first conveyance device 1 and the second conveyance device 2 moves in the conveyance area 84 along the first direction X to convey the article W. The wall body K is formed of a non-porous member. In the present embodiment, a porous member is provided in the opening formed in the upper end portion of the wall body K, and the clean air supplied from the ceiling side via the porous member is conveyed to the transfer area 84. It is comprised so that it may flow into. The clean air that has flowed into the transfer area 84 is provided in a portion below the upper floor F1 in the wall body K together with the inert gas discharged from the article W (inside the container) stored in the storage portion 6a. The gas is discharged from the gas discharge unit 85 to the underfloor space.

  An opening through which the first transfer device 1 can pass is formed in a portion of the wall body K that divides the end of the first side X1 of the transfer area 84, and the first door 71 is provided in the opening. Thus, the opening can be freely opened and closed. A first retreat area A1 for performing maintenance work on the first transport device 1 is provided on the first side X1 with respect to the transport area 84, and the rail 7 exceeds the installation position of the first door 71. It is installed to extend to the first side X1 up to the first retreat area A1. By switching the first door 71 to the open state, the first transport device 1 can move between the transport area 84 and the first retreat area A1. Further, by switching the first door 71 to the closed state, the transfer area 84 and the first evacuation area A1 can be divided, and the air flow between the transfer area 84 and the first evacuation area A1 is suppressed. it can.

  An opening portion through which the second transfer device 2 can pass is formed in a portion of the wall body K that defines the end portion of the second side X2 of the transfer area 84, and the second door 72 is provided in the opening portion. Thus, the opening can be freely opened and closed. On the second side X2 with respect to the transfer area 84, a second retreat area A2 for performing maintenance work of the second transfer device 2 is provided, and the rail 7 extends beyond the installation position of the second door 72. It is installed so as to extend to the second side X2 up to the second retreat area A2. By switching the second door 72 to the open state, the second transport device 2 can move between the transport area 84 and the second retreat area A2. Further, by switching the second door 72 to the closed state, the transfer area 84 and the second evacuation area A2 can be divided, and air circulation between the transfer area 84 and the second evacuation area A2 is suppressed. it can.

  An opening through which the first transport device 1 and the second transport device 2 can pass is formed in an intermediate portion (in the present embodiment, a central portion) in the first direction X in the transport area 84, and the third door 73. Is provided in the opening and is configured to be able to open and close the opening. Here, the portion of the first side X1 from the installation position of the third door 73 in the conveyance area 84 is defined as the first conveyance area 84a, and the portion of the second side X2 from the installation position of the third door 73 in the conveyance area 84 is defined. Let it be the second transfer area 84b. By switching the third door 73 to the open state, the first transfer device 1 and the second transfer device 2 can move between the first transfer area 84a and the second transfer area 84b. Moreover, the 1st conveyance area 84a and the 2nd conveyance area 84b can be divided by switching the 3rd door 73 to a closed state, The air between the 1st conveyance area 84a and the 2nd conveyance area 84b Can be suppressed. In addition, the rail 7 is continuously formed over the whole area of the 1st direction X in the conveyance area 84, and is continuously formed also in the boundary part of the 1st conveyance area 84a and the 2nd conveyance area 84b. In the present embodiment, the rail 7 is also formed continuously at the boundary between the first transport area 84a and the first retreat area A1, and between the second transport area 84b and the second retreat area A2. The boundary portion is also formed continuously. As shown in FIG. 1, in the present embodiment, a pair of storage shelves 6 facing the second direction Y across the movement path are installed in each of the first transport area 84a and the second transport area 84b.

  In a portion of the wall body K that divides the third side Y1 of the transfer area 84 (first transfer area 84a), an entrance for the operator to enter and exit the first transfer area 84a is formed. Is provided at the entrance and is configured to be openable and closable. By switching the fourth door 74 to the open state, an operator can enter and exit the first transfer area 84a, and by switching the fourth door 74 to the closed state, the first transfer area 84a and the outside of the transfer area 84 can be It is possible to suppress the air flow between them. Moreover, the part which divides the 3rd side Y1 of the conveyance area 84 (2nd conveyance area 84b) in the wall body K is formed with the entrance and exit for an operator to enter / exit the 2nd conveyance area 84b, and 5th. The door 75 is provided at the doorway and is configured to be able to open and close the doorway. By switching the fifth door 75 to the open state, the operator can enter and exit the second transfer area 84b, and by switching the fifth door 75 to the closed state, the second transfer area 84b and the outside of the transfer area 84 can be It is possible to suppress the air flow between them.

  As shown in FIG. 2, in the present embodiment, the article transporting facility 9 includes a conveyor 88 that is provided so as to penetrate the wall body K and places and transports the article W. The conveyor 88 is used for at least one of the receipt of the article W into the storage shelf 6 and the delivery of the article W from the storage shelf 6. The conveyor 88 is an article between an external transfer location located outside the wall body K (outside the transfer area 84) and an internal transfer location located inside the wall body K (inside the transfer area 84). It is configured to transport W. The overhead conveyance vehicle 89 loads and unloads the article W on the external transfer location of the conveyor 88 shown in FIG. A conveyor 88 on which an operator loads and unloads the article W with respect to the external transfer location may be provided. The article W stored in the storage shelf 6 is placed on the external transfer location of the conveyor 88 by the ceiling transport vehicle 89 or the operator, and then conveyed to the internal transfer location by the conveyor 88, and then the first transport device 1 Or it is conveyed by the 2nd conveyance apparatus 2 from the said internal transfer location to the accommodating part 6a. In addition, the article W delivered from the storage shelf 6 is conveyed from the storage unit 6 a to the internal transfer location of the conveyor 88 by the first transfer device 1 or the second transfer device 2, and then to the external transfer location by the conveyor 88. Then, it is lowered from the external transfer location by the ceiling transport vehicle 89 or the operator.

  As described above, the article transport facility 9 includes the first cable body 10 and the second cable body 20. As shown in FIG. 1, the first cable body 10 is a power supply or communication cable body that is connected to the first transport device 1 and extends in the first direction X, and the second cable body 20 This is a power supply or communication cable body connected to the second transport device 2 and extending in the first direction X. In the present embodiment, both the first cable body 10 and the second cable body 20 are power supply and communication cable bodies (cable bodies for both power supply and communication). The first cable body 10 extends in the first direction X as a whole by being arranged so that both a first upper portion 11 and a first lower portion 12 described later extend in the first direction X. Are arranged as follows. Further, the second cable body 20 is arranged so that both a second upper portion 21 and a second lower portion 22 described later extend in the first direction X, so that the second cable body 20 extends in the first direction X as a whole. It is arranged to exist.

  Each of the first cable body 10 and the second cable body 20 includes a cable body and a cable carrier that accommodates the cable body and regulates the extending direction of the cable body. Note that the cable body may be a single cable or an aggregate of a plurality of cables (for example, a plurality of signal lines bundled in a bundle). Specifically, as shown in FIGS. 5 and 6, the first cable body 10 accommodates the first cable body 16 and the first cable body 16 and regulates the extending direction of the first cable body 16. The second cable body 20 includes a first cable carrier 17, and the second cable body 20 accommodates the second cable body 26 and the second cable carrier 27 that accommodates the second cable body 26 and restricts the extending direction of the second cable body 26. It has. That is, each of the first cable body 16 and the second cable body 26 corresponds to a “cable body”, and each of the first cable carrier 17 and the second cable carrier 27 corresponds to a “cable carrier”. Although details are omitted, the cable carrier is configured by connecting a plurality of link bodies in a linear shape, and the extending direction (longitudinal direction) of the cable carrier defined by the arrangement direction (connection direction) of the plurality of link bodies. ), A housing space for housing the cable body is formed. The link bodies are swingably connected to each other, and when the cable carrier is bent, the link bodies adjacent in the extending direction come into contact with each other, so that the bending radius at the curved portion does not become less than the set radius. It is configured as follows. Thereby, when the first cable body 10 or the second cable body 20 is deformed, the first cable body 16 accommodated in the first cable carrier 17 or the second cable body 26 accommodated in the second cable carrier 27 is used. It is possible to avoid the formation of a curved portion having a bending radius less than the allowable bending radius. In FIGS. 5 and 6, the first cable body 16 and the second cable body 26 are shown in a simplified manner, and the number and cross-sectional shape of each cable body are not accurately represented.

  In the present embodiment, the first cable body 10 is provided between the first cable body 16 for power feeding for feeding power to the first transport device 1, the control device 8 (see FIG. 15), and the first transport device 1. The first cable body 16 includes a plurality of first cable bodies 16 for communication (communication such as control signals and sensor detection signals), and the first cable carrier 17 includes the plurality of first cable bodies 16. The first cable body 16 is accommodated. A power supply (not shown) and the first transport device 1 are connected to each other by a power supply first cable body 16 so as to be able to transfer power. One transfer device 1 is connected to be able to exchange information. In the present embodiment, the second cable body 20 communicates (controls) between the power supply second cable body 26 for supplying power to the second transport device 2, and the control device 8 and the second transport device 2. A plurality of second cable bodies 26 for communication with a second cable body 26 for communication (communication of signals, sensor detection signals, etc.), and the second cable carrier 27 includes the plurality of second cables. The main body 26 is accommodated. The power supply (not shown) and the second transport device 2 are connected to each other by the second cable body 26 for power supply so that power can be transferred. The two conveying devices 2 are connected so as to be able to exchange information.

  As shown in FIG. 3, the first cable body 10 is deformed with the movement of the first transport device 1 along the first direction X, so that the first movement range R <b> 1 that is a range along the first direction X is obtained. The first transfer device 1 is allowed to move. Further, the second cable body 20 is deformed as the second transport device 2 moves along the first direction X, thereby being a range along the first direction X and at least a part of the first movement range R1. The second transport device 2 is allowed to move in the overlapping second movement range R2. In the present embodiment, only a part of the second movement range R2 overlaps with the first movement range R1. Specifically, the portion on the first side X1 of the second movement range R2 (in this embodiment, the majority of the first side X1) is the portion on the second side X2 of the first movement range R1 (in this embodiment). , Most of the second side X2). In addition, in FIG. 3, about the 1st conveying apparatus 1 and the 2nd conveying apparatus 2, it simplified and mainly showed only the traveling cart 80 (refer FIG. 1, FIG. 2).

  In the diagram of the central portion in the vertical direction in FIG. 3, the first transport device 1 in a state positioned at the end of the first side X1 of the first movement range R1 is indicated by a one-dot chain line, and the second side of the first movement range R1 The first transport device 1 in a state located at the end of X2 is indicated by a two-dot chain line. As shown in this figure, the first movement range R1 is defined so as to include the entire first direction X of the first transfer device 1 (or the traveling carriage 80 of the first transfer device 1). In the lower part of FIG. 3, the second transport device 2 in a state positioned at the end of the second side X2 of the second movement range R2 is indicated by a one-dot chain line, and the first side X1 of the second movement range R2 is shown. The 2nd conveying apparatus 2 of the state located in the edge part is shown with the dashed-two dotted line. As shown in this drawing, the second movement range R2 is defined so as to include the whole of the second transport device 2 (or the traveling carriage 80 of the second transport device 2) in the first direction X.

  In the present embodiment, the first movement range R1 and the second movement range R2 are set so that the article W can be transferred to any of the plurality of storage units 6a (see FIG. 1) arranged in the first direction X. ing. Specifically, the end of the first side X1 of the first movement range R1 is stopped by the first transport device 1 when the article W is transferred to the storage unit 6a disposed on the first side X1. Position (the position of the end portion of the first side X1 in the first transport device 1 or the traveling carriage 80), the end portion of the second side X2 of the first movement range R1 is disposed on the second side X2 most. When the article W is transferred to the storage unit 6a, the first conveyance device 1 is set to a position where the first conveyance device 1 stops (the position of the end of the second side X2 in the first conveyance device 1 or the traveling carriage 80). . In addition, the end of the second movement range R2 on the second side X2 is a position where the second transport device 2 stops when the article W is transferred to the storage portion 6a disposed on the second side X2 ( The second transfer device 2 or the position of the end of the second side X2 in the traveling carriage 80), and the end of the first side X1 of the second movement range R2 is the storage unit disposed on the most first side X1. It is set to a position where the second transport device 2 stops when the article W is transferred to 6a (the position of the end of the first side X1 in the second transport device 2 or the traveling carriage 80). Therefore, in the present embodiment, the first movement range R1 and the second movement range R2 are set to have the same size. Further, as described above, in the present embodiment, the position at which the first transport device 1 stops when the article W is transferred to the storage unit 6a is the storage unit 6a or the storage unit 6a and the first direction. Since the second conveyance device 2 is located on the first side X1 rather than the position where the second transport device 2 stops when the article W is transferred to the storage unit 6a arranged at the same position of X, the first of these stop positions The second movement range R2 is set so as to be shifted to the second side X2 with respect to the first movement range R1 by the amount of deviation in the direction X.

  Here, as shown in FIG. 3, the position within the overlapping region of the first movement range R1 and the second movement range R2 (the position of the one-dot chain line extending in the vertical direction in FIG. 3) is used as the reference position. The range of the first side X1 from the reference position in R1 is the third movement range R3, and the range of the second side X2 from the reference position in the second movement range R2 is the fourth movement range R4. In the present embodiment, this reference position is set to the installation position of the third door 73 (see FIG. 1) that divides the transport area 84 into a first transport area 84a and a second transport area 84b. Therefore, in the present embodiment, the movable range of the first transport device 1 when the movement of the first transport device 1 is allowed in the entire transport area 84 becomes the first travel range R1, and the first transport device 1 moves. Is restricted within the first transport area 84a, the movable range of the first transport device 1 is the third travel range R3. In addition, the movable range of the second conveyance device 2 when the movement of the second conveyance device 2 is allowed in the entire conveyance area 84 is the second movement range R2, and the movement of the second conveyance device 2 is the second conveyance area. The movable range of the second transport apparatus 2 when restricted within 84b is the fourth movement range R4.

  As shown in FIG. 3, the connection portion of the first cable body 10 with the first conveyance device 1 is a first connection portion 13, and the end portion of the first cable body 10 opposite to the first connection portion 13 is the first connection portion 13. One end 14 is assumed. In this embodiment, the 1st connection part 13 is a connection part with the 1st conveying apparatus 1 in the 1st cable carrier 17, and the edge part on the opposite side to the 1st connection part 13 in the 1st cable body 10 is This is the end of the first cable carrier 17 opposite to the first connection portion 13. And the 1st cable body 10 is the 1st side X1 with respect to the 1st end part 14 and the 1st connection part 13, from the 1st end part 14 of the said 1st cable body 10 (1st cable carrier 17). It has the 1st folding | turning part 15 which reverses the extending direction which goes to the one connection part 13. As shown in FIG. That is, the extending direction from the first end portion 14 toward the first folded portion 15 is a direction toward the first side X1, and the extending direction from the first folded portion 15 toward the first connection portion 13 is toward the second side X2. It becomes the direction to go. As shown in FIG. 3, a portion between the first folded portion 15 and the first connecting portion 13 in the first cable body 10 is a first upper portion 11, and the first folded portion 15 and the first folded portion in the first cable body 10 are Assuming that the portion between the one end portion 14 is the first lower portion 12, the first upper portion 11 is arranged on the upper side with respect to the first lower portion 12 in the present embodiment. Specifically, as shown in FIG. 1 to FIG. 3 and FIG. 8, the first upper portion 11 is on the upper side with respect to the first lower portion 12, and the first lower portion 12 and the second direction Y In the same position (position overlapping the first lower portion 12 when viewed in the vertical direction Z).

  Moreover, as shown in FIG. 3, the connection part with the 2nd conveying apparatus 2 in the 2nd cable body 20 is made into the 2nd connection part 23, and the edge part on the opposite side to the 2nd connection part 23 in the 2nd cable body 20 is shown. Is the second end 24. In this embodiment, the 2nd connection part 23 is a connection part with the 2nd conveying apparatus 2 in the 2nd cable carrier 27, and the edge part on the opposite side to the 2nd connection part 23 in the 2nd cable body 20 is This is the end of the second cable carrier 27 opposite to the second connection portion 23. The second cable body 20 extends from the second end portion 24 of the second cable body 20 toward the second connection portion 23 on the second side X2 with respect to the second end portion 24 and the second connection portion 23. It has the 2nd folding | turning part 25 which reverses a direction. That is, the extending direction from the second end portion 24 toward the second folded portion 25 is a direction toward the second side X2, and the extending direction from the second folded portion 25 toward the second connection portion 23 is toward the first side X1. It becomes the direction to go. As shown in FIG. 3, a portion between the second folded portion 25 and the second connecting portion 23 in the second cable body 20 is a second upper portion 21, and the second folded portion 25 and the second folded portion 25 in the second cable body 20 are Assuming that the portion between the two end portions 24 is the second lower portion 22, the second upper portion 21 is disposed on the upper side with respect to the second lower portion 22 in the present embodiment. Specifically, as shown in FIGS. 1 and 3, the second upper portion 21 is on the upper side with respect to the second lower portion 22, and the same position in the second direction Y as the second lower portion 22. (Position overlapping the second lower portion 22 when viewed in the vertical direction Z).

  As shown in FIG. 1, both the first end portion 14 of the first cable body 10 and the second end portion 24 of the second cable body 20 are on the floor portion F (the lower floor F2 in this embodiment). It is fixed. Therefore, as shown in FIG. 3, as the first transport device 1 moves to the second side X2, the first cable body 10 is deformed so that the formation position of the first folded portion 15 moves to the second side X2. . Along with this, the length along the extending direction of the first upper portion 11 becomes longer, and the length along the extending direction of the first lower portion 12 becomes shorter. As shown in FIGS. 3 to 6 and 8, a receiving member 40 is provided along the first direction X on the floor F (the lower floor F <b> 2 in this embodiment). The receiving member 40 includes a support portion that supports the first lower portion 12 from below, and a pair of wall portions that are erected upward from both ends of the support portion in the second direction Y. The first lower portion 12 is supported from below by the receiving member 40 in a state where movement in the second direction Y is restricted. Further, as shown in FIG. 3, as the second transport device 2 moves to the first side X1, the second cable body 20 is deformed so that the formation position of the second folded portion 25 moves to the first side X1. . Along with this, the length along the extending direction of the second upper portion 21 becomes longer, and the length along the extending direction of the second lower portion 22 becomes shorter. Similar to the first lower portion 12, the second lower portion 22 is also supported from below by the receiving member 40 in a state where movement in the second direction Y is restricted. In addition, the 1st end part 14 is fixed to the floor part F in the 1st side X1 rather than the reference | standard position mentioned above (this embodiment installation position of the 3rd door 73), and the 2nd end part 24 is the said reference | standard. It is being fixed to the floor part F in the 2nd side X2 rather than a position.

  As shown in FIG. 1, the first cable body 10 and the second cable body 20 are arranged on the same side in the second direction Y with respect to the rail 7 (in this embodiment, a pair of rails 7). The arrangement areas in the direction Y are arranged so as to overlap each other at least partially. In the present embodiment, both the first cable body 10 and the second cable body 20 are disposed on the third side Y1 with respect to the rail 7 (in this embodiment, the pair of rails 7). The first cable body 10 and the second cable body 20 are arranged at the same position in the second direction Y. That is, in the present embodiment, the arrangement area of the first cable body 10 in the second direction Y matches the arrangement area of the second cable body 20 in the second direction Y. In the present embodiment, the length along the extending direction from the first end portion 14 of the first cable body 10 to the first connection portion 13 is from the second end portion 24 of the second cable body 20 to the second length. It is equal to the length along the extending direction to the connecting portion 23. That is, in this embodiment, cable carriers having the same length along the extending direction are used as the first cable carrier 17 and the second cable carrier 27.

  As shown in FIG. 2, in the present embodiment, a lower space 86 (a space between the lowermost storage portion 6a and the floor F (lower floor F2) formed below the lowermost storage portion 6a. ), The first cable body 10 and the second cable body 20 are arranged. As described above, in the present embodiment, both the first cable body 10 and the second cable body 20 are connected to the rail 7 (the pair of rails 7 in the present embodiment, the same shall apply hereinafter) on the third side Y1. By arranging in this way, neither the first cable body 10 nor the second cable body 20 is arranged in the lower space 86 formed on the fourth side Y2 with respect to the rail 7. Thereby, it is possible to arrange other members in a simple arrangement form in the lower space 86 formed on the fourth side Y <b> 2 with respect to the rail 7. As shown in FIG. 2, in this embodiment, a duct 87 is arranged along the first direction X in a lower space 86 formed on the fourth side Y <b> 2 with respect to the rail 7. In the example shown in FIG. 2, the duct 87 is fixed to the floor F (lower floor F2). In the inside of the duct 87, for example, a communication cable for performing communication between the control device 8 and the inert gas supply device N, the conveyor 88, and the like, and for supplying the inert gas to the inert gas supply device N A power supply cable and the like for supplying operating power to the gas supply pipe, the inert gas supply device N, the conveyor 88, and the like are accommodated.

  By the way, as the 1st conveyance apparatus 1 moves to the 2nd side X2, the length along the extension direction of the 1st upper side part 11 becomes long, and the intermediate part in the extension direction of the 1st upper side part 11 is dead weight. It tends to sag. Further, as the second transport device 2 moves to the first side X1, the length along the extending direction of the second upper portion 21 becomes longer, and the intermediate portion in the extending direction of the second upper portion 21 is deadweight. It tends to sag. In view of this point, in the present embodiment, as illustrated in FIG. 3, the article transporting facility 9 is placed at a third position P3 that is a position between the first position P1 and the second position P2. When 1 is located on the second side X2 from the third position P3, the first upper portion 11 is supported from below, and the second transport device 2 is located on the first side X1 from the third position P3. Are provided with a first support portion 41 for supporting the second upper portion 21 from below. Here, the first position P1 is a position in the first direction X of the first folded portion 15 when the first transport device 1 is located at the end of the second side X2 of the first movement range R1 (FIG. 3). The second position P2 is the first direction X of the second folded portion 25 when the second transport device 2 is located at the end of the first side X1 of the second movement range R2. (See the lower figure in FIG. 3). The first position P1 is a position closer to the first side X1 than the second position P2. By providing such a first support portion 41, when the first transport device 1 is located on the second side X2 with respect to the third position P3, the first support portion 41 provided at the third position P3 The first upper portion 11 can be supported from below, and when the second transport device 2 is located on the first side X1 from the third position P3, the first support portion provided at the third position P3. 41 can support the second upper portion 21 from below. As a result, it is possible to avoid contact between the first upper portion 11 and the second upper portion 21 with the floor F or other members arranged on the floor F.

  FIG. 6 shows that in the state where the second transport device 2 is located on the first side X1 from the third position P3, the first support part 41 is located below the second upper part 21 and the second upper part 21 is located. Is shown in a state that can be supported from below. In FIG. 6, the first support portion 41 and the second upper portion 21 are separated from each other, but the portion of the second upper portion 21 that is located at the third position P3 is the height of the first support portion 41. The second upper portion 21 is supported from below by the first support portion 41 when lowered. The first support portion 41 includes a support portion that supports the first upper portion 11 and the second upper portion 21 from below, and a pair that is erected upward from both ends of the support portion in the second direction Y. The first upper portion 11 and the second upper portion 21 are supported from below by the first support portion 41 in a state where movement in the second direction Y is restricted.

  As shown in FIG. 3, in the present embodiment, the reference position described above (the position of the alternate long and short dash line extending in the vertical direction in FIG. 3 and the installation position of the third door 73 in the present embodiment) is the first position P <b> 1. And a position between the second position P2. In this embodiment, the third position P3 is a position between the first position P1 and the second position P2, and is a position shifted in the first direction X with respect to the reference position (in this embodiment, , A position shifted to the second side X2), the interference between the first support portion 41 installed at the third position P3 and the third door 73 is avoided. As a result, as shown in FIGS. 4 and 6, it is possible to use a first support portion 41 whose posture and installation position are fixed with respect to the fixing member 44. The fixing member 44 is a member for supporting the first support portion 41 and a second support portion 42 and a third support portion 43 described later. In the present embodiment, the fixing member 44 is fixed to a frame body that constitutes the storage shelf 6.

  In the present embodiment, as shown in FIGS. 3 and 4, the article transport facility 9 is configured so that the first transport device 1 is positioned at the second side X2 from the second lower portion 22 when the first transport device 1 is positioned at the second side X2. 2nd support part 42 which supports the 1st upper part 11 from the lower part and the 2nd conveyance device 2 are located in the 1st side X1 rather than the 1st position P1 than the 1st lower part 12 A third support portion 43 that supports the second upper portion 21 from below is provided above. In the present embodiment, the first cable body 10 and the second cable body 20 are arranged at the same position in the second direction Y. Therefore, as shown in the diagram of the central portion in the vertical direction in FIG. 3, when the first transport device 1 is located on the second side X2 from the second position P2, the first upper portion 11 is the second lower side. Although it arrange | positions so that it may overlap with the 2nd lower part 22 seeing in the up-down direction Z above the part 22, by supporting the 1st upper part 11 from the downward direction by said 2nd support part 42, it is. The contact between the first upper portion 11 and the second lower portion 22 can be avoided. 3, when the second transport device 2 is located on the first side X1 with respect to the first position P1, the second upper portion 21 is more than the first lower portion 12. Are arranged so as to overlap the first lower portion 12 when viewed in the vertical direction Z, but the second upper portion 21 is supported from below by the third support portion 43, so that the second Contact between the upper portion 21 and the first lower portion 12 can be avoided.

  As shown in FIG. 3, the second support portion 42 is disposed on the second side X2 with respect to the second position P2, and the third support portion 43 is disposed on the first side X1 with respect to the first position P1. ing. In the present embodiment, the first cable body 10 and the second cable body 20 are arranged at the same position in the second direction Y. Therefore, when the first upper portion 11 is supported from below, the second support portion 42 is a space in which the second folding portion 25 moves when the second transport device 2 moves in the second movement range R2. Located inside the second moving space. Moreover, when supporting the 2nd upper part 21 from the downward direction, the 3rd support part 43 is the space where the 1st folding | turning part 15 moves, when the 1st conveying apparatus 1 moves 1st movement range R1. Located inside the first moving space. In view of this point, in the present embodiment, the second support portion 42 is located inside the second movement space and supports the first upper portion 11 from below, and the second movement space 42a. It is configured such that at least one of the posture and the installation position can be switched between the second retraction position 42b located outside. Moreover, in this embodiment, the 3rd support part 43 is located inside the 1st movement space, the 3rd support position 43a which supports the 2nd upper part 21 from the downward direction, and is located outside the 1st movement space. It is configured such that at least one of the posture and the installation position can be switched with the third retreat position 43b. Thereby, when the 2nd conveying apparatus 2 moves in 2nd movement range R2, the position of the 2nd support part 42 is switched to the 2nd retraction position 42b, and the 2nd support part 42, the 2nd cable body 20, Interference can be avoided. Moreover, when the 1st conveying apparatus 1 moves 1st movement range R1, the position of the 3rd support part 43 and the 1st cable body 10 is switched by switching the position of the 3rd support part 43 to the 3rd retraction position 43b. Interference can be avoided.

  In the present embodiment, the installation position of the second support part 42 is fixed, and the second support part 42 is switched between the second support position 42a and the second retracted position 42b by switching the attitude of the second support part 42. It is comprised so that the position of may be switched. Moreover, in this embodiment, the installation position of the 3rd support part 43 is fixed, and the 3rd support position 43a and the 3rd support position 43b are switched between the 3rd support positions 43b by switching the attitude | position of the 3rd support part 43. The position of the part 43 is configured to be switched. Specifically, as shown in FIG. 5, the third support portion 43 is supported by the fixing member 44 so as to be swingable around the swing axis along the first direction X. By swinging around the swing axis, the position of the third support portion 43 is switched between the third support position 43a and the third retracted position 43b. Note that FIG. 5 shows that the third support portion 43 located at the third support position 43a is more than the first lower portion 12 when the second transport device 2 is located on the first side X1 from the first position P1. Also shows a situation where the second upper portion 21 is arranged so as to be supported from below at the top. FIG. 5 shows a situation where the third support portion 43 located at the third support position 43a and the second upper portion 21 are separated from each other. When the positioned portion is lowered to the height of the third support portion 43, the second upper portion 21 is supported from below by the third support portion 43.

  The second support portion 42 is configured in the same manner as the third support portion 43 except for the installation position in the first direction X. Specifically, the second support portion 42 is supported by the fixing member 44 so as to be swingable around the swing axis along the first direction X, and the second support portion 42 is rotated around the swing axis. By swinging, the position of the second support portion 42 is switched between the second support position 42a and the second retracted position 42b. Note that the swinging of the second support part 42 and the swinging of the third support part 43 are performed manually by an operator or automatically under the control of the control device 8.

  In the present embodiment, the article conveyance facility 9 includes the second support portions 42 at each of the plurality of positions on the second side X2 from the second position P2, and the plurality of positions on the first side X1 from the first position P1. A third support 43 is provided at each position. Specifically, although not shown, the second support portion 42 is provided at each of the three positions on the second side X2 from the second position P2, and the three on the first side X1 from the first position P1. A third support 43 is provided at each position. The second support positions 42a of the plurality of second support parts 42 are set to the same position except for the installation position in the first direction X, and the second retraction positions 42b of the plurality of second support parts 42 are , Except for the installation position in the first direction X. Further, the third support positions 43a of the plurality of third support portions 43 are set to the same position except for the installation position in the first direction X, and the third retraction positions of the plurality of third support portions 43 are set. 43b is set to the same position except for the installation position in the first direction X.

  And in this embodiment, as shown in FIG. 15, the article conveyance equipment 9 projects detection light in the 1st direction X, and at least any one 2nd support part 42 is located in the 2nd support position 42a. And a second sensor 92 that detects that at least one of the third support portions 43 is located at the third support position 43a by projecting detection light in the first direction X. Yes. Furthermore, in this embodiment, as shown in FIG. 15, the article conveying facility 9 projects detection light in the first direction X, and at least one of the second support portions 42 is positioned at the second retraction position 42 b. And a fourth sensor 94 for projecting detection light in the first direction X and detecting that at least one of the third support portions 43 is located at the third retracted position 43b. Yes. The detection information of each of the first sensor 91, the second sensor 92, the third sensor 93, and the fourth sensor 94 is configured to be input to the control device 8.

  The first sensor 91 and the third sensor 93 are both second support part sensors S2 that detect the position of the second support part 42. In FIG. 3, the first sensor 91 and the third sensor 93 are distinguished. Without being shown as a second support sensor S2. Each of the second sensor 92 and the fourth sensor 94 is a third support portion sensor S3 that detects the position of the third support portion 43. In FIG. 3, the second sensor 92 and the fourth sensor 94 are connected to each other. Without distinguishing, it is shown as the third support portion sensor S3. As shown in FIG. 3, in the present embodiment, the second support portion sensor S <b> 2 (each of the first sensor 91 and the third sensor 93) faces the first direction X across all the second support portions 42. One of the pair of elements is a light projecting element that projects detection light in the first direction X, and the other of the pair of elements is projected from the light projecting element. It is a light receiving element that receives detection light. In other words, in the present embodiment, the second support unit sensor S2 is a light shielding optical sensor that detects the presence of an object based on the absence of detection light.

  Specifically, the light projecting axis of the light projecting element of the first sensor 91 is integrated with the second support portion 42 or the second support portion 42 when the second support portion 42 is located at the second support position 42a. When the detection light is shielded by the moving member and the second support portion 42 is positioned at the second retracted position 42b, the detection light is set at a position where it reaches the light receiving element. Therefore, when the detection light is not received by the light receiving element of the first sensor 91, it can be determined that at least one of the second support portions 42 is located at the second support position 42a. The light projecting axis of the light projecting element of the third sensor 93 moves integrally with the second support portion 42 or the second support portion 42 when the second support portion 42 is located at the second retracted position 42b. When the detection light is blocked by the member and the second support portion 42 is located at the second support position 42a, the detection light is set at a position where it reaches the light receiving element. Therefore, when the detection light is not received by the light receiving element of the third sensor 93, it can be determined that at least one of the second support portions 42 is located at the second retracted position 42b.

  As shown in FIG. 3, in the present embodiment, the third support portion sensor S <b> 3 (each of the second sensor 92 and the fourth sensor 94) has the first direction X across all the third support portions 43. A pair of elements disposed so as to face each other, one of the pair of elements is a light projecting element that projects detection light in the first direction X, and the other of the pair of elements is projected from the light projecting element. A light receiving element for receiving the detected light. In other words, in the present embodiment, the third support unit sensor S3 is a light shielding optical sensor that detects the presence of an object based on the absence of detection light.

  Specifically, the light projecting axis of the light projecting element of the second sensor 92 is integrated with the third support 43 or the third support 43 when the third support 43 is located at the third support position 43a. When the detection light is shielded by the moving member and the third support portion 43 is located at the third retracted position 43b, the detection light reaches a position where it reaches the light receiving element (a position indicated by “La” in FIG. 5). Is set. Therefore, when the detection light is not received by the light receiving element of the second sensor 92, it can be determined that at least one of the third support portions 43 is located at the third support position 43a. Further, the light projecting axis of the light projecting element of the fourth sensor 94 moves integrally with the third support portion 43 or the third support portion 43 when the third support portion 43 is located at the third retracted position 43b. When the detection light is blocked by the member and the third support portion 43 is positioned at the third support position 43a, the detection light is set to a position (a position indicated by “Lb” in FIG. 5) that reaches the light receiving element. Yes. Therefore, when the detection light is not received by the light receiving element of the fourth sensor 94, it can be determined that at least one of the third support portions 43 is located at the third retracted position 43b.

  As described above, the first retreat area A1 is provided on the first side X1 with respect to the transport area 84, and the second retreat area A2 is provided on the second side X2 with respect to the transport area 84. And since the 1st evacuation area A1 is provided in the 1st side X1 with respect to 1st movement range R1 and 2nd movement range R2, 1st evacuation area A1 is the 1st conveying apparatus 1 This is an area in which the first transport device 1 can be moved in a state where it is removed from the (first mounting portion 51 described later). In other words, the first connection portion 13 of the first cable body 10 is configured to be detachable from the first attachment portion 51 fixed to the first transport device 1, and the first transport device 1 is placed in the first retreat area. When moving to A1, the first connection portion 13 is configured to be removed from the first attachment portion 51. In addition, when removing the 1st connection part 13 from the 1st attachment part 51, the connection part (a connector, a terminal, etc.) with the 1st conveying apparatus 1 in the 1st cable main body 16 is also provided in the 1st conveying apparatus 1. FIG. Removed from the mounting part (connector, terminal block, etc.). As shown in FIG. 8, in the present embodiment, the first attachment portion 51 is fixed to the end portion on the third side Y <b> 1 of the traveling carriage 80 of the first transport device 1.

  Further, since the second evacuation area A2 is provided on the second side X2 with respect to the first movement range R1 and the second movement range R2, the second evacuation area A2 connects the second connection portion 23 to the second transport device 2. This is an area in which the second transport device 2 can be moved in a state of being removed from the (second mounting portion 52 described later). In other words, the second connection portion 23 of the second cable body 20 is configured to be detachable from the second attachment portion 52 fixed to the second transport device 2, and the second transport device 2 is placed in the second retreat area. When moving to A2, the second connection portion 23 is configured to be removed from the second attachment portion 52. In addition, when removing the 2nd connection part 23 from the 2nd attachment part 52, the connection part (a connector, a terminal, etc.) with the 2nd conveying apparatus 2 in the 2nd cable main body 26 is also provided in the 2nd conveying apparatus 2. FIG. Removed from the mounting part (connector, terminal block, etc.). In the present embodiment, the second attachment portion 52 is fixed to the end portion on the third side Y1 of the traveling carriage 80 of the second transport device 2.

  As shown in FIGS. 1 and 3, the article transport facility 9 includes a first holder 61 that holds the first connection portion 13 in a state of being removed from the first attachment portion 51, and a second attachment portion 52. And a second holder 62 for holding the second connection portion 23 in a state of being detached from the second connection portion 23. In the present embodiment, the first holder 61 is provided at the end of the first side X1 in the transport area 84, and the second holder 62 is provided at the end of the second side X2 in the transport area 84. . Moreover, in this embodiment, both the 1st holder 61 and the 2nd holder 62 are arrange | positioned with respect to the rail 7 (this embodiment a pair of rail 7) in the 3rd side Y1. In the present embodiment, the first holder 61 and the second holder 62 are fixed to a frame that constitutes the storage shelf 6.

  In the first holder 61, the first cable body 10 is arranged in a posture that does not interfere with the second transport device 2 and the second cable body 20 when the second transport device 2 moves in the entire second movement range R2. Thus, the 1st connection part 13 is hold | maintained. Thereby, it can avoid that the 1st cable body 10 of the state removed from the 1st conveying apparatus 1 (1st attachment part 51) becomes the obstruction of the movement in 2nd movement range R2 of the 2nd conveying apparatus 2. FIG. In the present embodiment, as shown in the lower diagram in FIG. 3, the posture of the first cable body 10 in the state where the first connection portion 13 is held by the first holding tool 61 is the first folded portion 15 and the first folding portion 15. The one connecting portion 13 is arranged outside the first movement range R2 (first side X1), and the portion arranged in the second movement range R2 in the first lower portion 12 is the floor portion F (lower floor F2). It is the attitude | position arrange | positioned along. In this embodiment, the 1st lower part 12 is arrange | positioned along the floor part F (lower floor F2) in the state supported by the receiving member 40 from the downward direction.

  In the second holder 62, the second cable body 20 is arranged in a posture that does not interfere with the first transport device 1 and the first cable body 10 when the first transport device 1 moves in the entire first movement range R1. In this way, the second connection portion 23 is held. Thereby, it can avoid that the 2nd cable body 20 of the state removed from the 2nd conveying apparatus 2 (2nd attaching part 52) obstructs the movement in the 1st movement range R1 of the 1st conveying apparatus 1. FIG. In the present embodiment, as shown in the drawing of the central portion in the vertical direction in FIG. 3, the posture of the second cable body 20 in the state where the second connection portion 23 is held by the second holding tool 62 is the second folded portion. 25 and the second connecting portion 23 are arranged outside the second movement range R1 (second side X2), and the portion arranged in the first movement range R1 in the second lower portion 22 is the floor portion F (lower portion). The posture is arranged along the floor F2). In the present embodiment, the second lower portion 22 is arranged along the floor F (lower floor F2) while being supported from below by the receiving member 40.

  As will be described later, in this embodiment, the article transporting facility 9 has a first pin for positioning the first connection portion 13 with respect to the first attachment portion 51 and a second connection with respect to the second attachment portion 52. A second pin for positioning the portion 23 is provided. The first pin is configured to be detachable with respect to an insertion hole provided in at least one of the first attachment portion 51 and the first connection portion 13, and the second pin includes the second attachment portion 52 and the second attachment portion 52. It is configured to be detachable with respect to an insertion hole provided in at least one of the connection portions 23.

  Specifically, as shown in FIGS. 7 and 8, the first mounting portion 51 includes a first fixing pin 53a and a first mounting insertion hole 54a. The first mounting portion 51 includes a pin forming portion in which a first fixing pin 53a is formed, and the first fixing pin 53a is formed in a columnar shape protruding upward from a planar upper surface of the pin forming portion. . In the present embodiment, the two first fixing pins 53 a are formed so as to be aligned in the first direction X. The first attachment portion 51 includes a plate-like portion that connects a portion fixed to the first transport device 1 (traveling carriage 80) and the pin forming portion, and the first attachment insertion hole 54a includes: It forms so that the said plate-shaped part may be penetrated. In the present embodiment, the first attachment insertion hole 54a is also formed in the member attached to the portion of the plate-like portion where the first attachment insertion hole 54a is formed. These two first mounting insertion holes 54a are formed so that the positions in the plane along which the plate surface of the plate-like portion is equal are spaced apart from each other in the direction perpendicular to the plate surface of the plate-like portion. In the present embodiment, the pin forming portion has an upper surface arranged in parallel with the horizontal plane, and the plate-like portion is arranged in parallel with a surface whose plate surface is orthogonal to the second direction Y.

  As shown in FIGS. 7 and 8, the first connecting portion 13 includes a first fixing pin insertion hole 32a, a first insertion / removal pin insertion hole 33a, and a first holding insertion hole 34a. The first connecting portion 13 includes a plate-like first portion 13a arranged in parallel with the horizontal plane when the extending direction of the first cable body 10 in the first connecting portion 13 is a horizontal direction, and the first fixing pin is inserted. The hole 32a is formed so as to penetrate the first portion 13a. In the present embodiment, the two first fixing pin insertion holes 32 a are formed so as to be aligned in the first direction X. The separation distance in the first direction X of the two first fixing pin insertion holes 32a coincides with the separation distance in the first direction X of the two first fixing pins 53a. Also. The 1st connection part 13 is equipped with the plate-shaped 2nd part 13b extended below from the 1st part 13a, and the 1st insertion / removal pin insertion hole 33a and the 1st insertion hole 34a are the 2nd part 13b in a mutually different position. It is formed so as to penetrate.

  When attaching the first connection portion 13 to the first attachment portion 51, first, the first connection portion 13 is attached to the first attachment portion 51 so that the first fixing pin 53a is inserted into the first fixing pin insertion hole 32a. Place against. In this embodiment, the 1st connection part 13 is arrange | positioned with respect to the 1st attaching part 51 so that each of the 1st fixing pin 53a may be inserted in the corresponding 1st fixing pin insertion hole 32a. In the present embodiment, since the upper surface of the pin forming portion (the portion where the first fixing pin 53a is formed) of the first attachment portion 51 is disposed in parallel with the horizontal plane, the first portion 13a of the first connection portion 13 is also a horizontal plane. Arranged in parallel. That is, the 1st connection part 13 is arrange | positioned so that the extending direction of the 1st cable body 10 in the 1st connection part 13 may turn into a horizontal direction. And the insertion direction with respect to the 1st fixing pin insertion hole 32a of the 1st fixing pin 53a turns into a direction parallel to the up-down direction Z. Therefore, each of the first fixing pins 53a is fitted into the corresponding first fixing pin insertion hole 32a, so that the first connecting portion 13 is moved horizontally with respect to the first mounting portion 51 and the axis around the vertical direction Z. Rotational movement is restricted. In this state, the first insertion / removal pin 5a is inserted in both the first attachment insertion hole 54a and the first insertion / removal pin insertion hole 33a in the horizontal direction (the direction along the second direction Y), so that the first connection The portion 13 is also restricted from moving up and down relative to the first attachment portion 51, and as a result, the first connection portion 13 is positioned in all directions with respect to the first attachment portion 51. As described above, the first attachment portion 51 is provided with two first attachment insertion holes 54a, and the first insertion / removal pin insertion hole 33a is provided between the two first attachment insertion holes 54a. The first insertion / removal pin 5a is inserted in the horizontal direction with respect to these three holes. Although details are omitted, when the first connection portion 13 is removed from the first attachment portion 51, the first insertion / removal pin 5a is pulled out from the first attachment insertion hole 54a and the first insertion / removal pin insertion hole 33a. The first connecting portion 13 is moved with respect to the first mounting portion 51 so that the first fixing pin 53a is detached from the first fixing pin insertion hole 32a. Naturally, when the first connection portion 13 and the first attachment portion 51 are fastened and fixed by the fastening bolt, when the first connection portion 13 is attached to or removed from the first attachment portion 51, Fastening work and fastening work are also performed.

  As is apparent from a comparison between FIG. 7 and FIG. 12, the first mounting portion 51 and the second mounting portion 52 are formed in a shape that is mirror-symmetric with respect to each other with a plane orthogonal to the first direction X as a symmetry plane. The first connection portion 13 and the second connection portion 23 are both formed in a shape that is mirror-symmetric with respect to a plane that is orthogonal to the first direction X. That is, the second attachment portion 52 has a configuration in which the first attachment portion 51 is inverted in the first direction X, and the second connection portion 23 has a configuration in which the first connection portion 13 is inverted in the first direction X. have. Therefore, although detailed description is omitted, the second mounting portion 52 includes a second fixing pin 53b corresponding to the first fixing pin 53a, and a second mounting insertion hole 54b corresponding to the first mounting insertion hole 54a. It has. The second connecting portion 23 includes a third portion 23a corresponding to the first portion 13a, a fourth portion 23b corresponding to the second portion 13b, and a second fixing pin insertion hole corresponding to the first fixing pin insertion hole 32a. 32b, a second insertion / removal pin insertion hole 33b corresponding to the first insertion / removal pin insertion hole 33a, and a second holding insertion hole 34b corresponding to the first holding insertion hole 34a. And when attaching the 2nd connection part 23 to the 2nd attachment part 52, after inserting each of the 2nd fixing pin 53b in the corresponding 2nd fixing pin insertion hole 32b, the insertion hole 54b for 2nd attachment and The second insertion / removal pin 5b is inserted into the second insertion / removal pin insertion hole 33b. For example, a ball lock pin can be used as the first insertion / removal pin 5a or the second insertion / removal pin 5b.

  When removing the first connection portion 13 from the first attachment portion 51, the first insertion / removal pin 5a is pulled out from the first attachment insertion hole 54a and the first insertion / removal pin insertion hole 33a. Further, when removing the second connection portion 23 from the second attachment portion 52, the second insertion / removal pin 5b is pulled out from the second attachment insertion hole 54b and the second insertion / removal pin insertion hole 33b. In the present embodiment, the first insertion / removal pin 5a is also used to hold the first connection portion 13 on the first holder 61, the second insertion / removal pin 5b is used, and the second connection portion 23 is used as the second holder. 62 is also used for holding.

  Specifically, as shown in FIGS. 9 and 10, the first holder 61 includes a first insertion hole 63 a into which the first insertion / removal pin 5 a can be inserted / removed. The first connection portion 13 is held in a state where the first insertion / removal pin 5a is inserted into both the first holding insertion hole 34a and the first insertion hole 63a provided in the connection portion 13. . In the present embodiment, the first holder 61 includes a first holding pin 64a that can be inserted into and removed from the first fixing pin insertion hole 32a. When the first connection portion 13 is held by the first holder 61, the first connection portion 13 is moved to the first holder 61 so that the first holding pin 64a is inserted into the first fixing pin insertion hole 32a. The first insertion / removal pin 5a is inserted in the horizontal direction with respect to both the first holding insertion hole 34a and the first insertion hole 63a. In the present embodiment, the first connecting portion 13 is formed with two first fixing pin insertion holes 32a, whereas the first holder 61 is provided with one first holding pin 64a. The first holding pin 64a is inserted into any one of the first fixing pin insertion holes 32a (in this embodiment, the first fixing pin insertion holes 32a arranged on the first side X1). The first holding pins 64a may be provided in the same number as the first fixing pin insertion holes 32a. In the present embodiment, the first holding pin 64a is formed so as to protrude upward from an upward surface that is inclined upward toward the second side X2 of the first holder 61. Therefore, in the state where the first connection portion 13 is held by the first holder 61, the extending direction of the first cable body 10 in the first connection portion 13 is a direction (horizontal plane) that goes upward as it goes to the second side X2. In a direction inclined upward with respect to FIG. Although details are omitted, when removing the first connection portion 13 from the first holder 61, the first insertion / removal pin 5a is pulled out from the first holding insertion hole 34a and the first insertion hole 63a, The first connecting portion 13 is moved with respect to the first holder 61 so that the holding pin 64a is detached from the first fixing pin insertion hole 32a.

  As shown in FIG. 13, the second holder 62 includes a second insertion hole 63 b through which the second insertion / removal pin 5 b can be inserted and removed, and the second holder 62 is provided in the second connection portion 23. The second connecting portion 23 is held in a state where the second insertion / removal pin 5b is inserted into both the second holding insertion hole 34b and the second insertion hole 63b. In the present embodiment, the second holder 62 includes a second holding pin 64b that can be inserted into and removed from the second fixing pin insertion hole 32b. When the second connection portion 23 is held by the second holder 62, the second connection portion 23 is moved to the second holder 62 so that the second holding pin 64b is inserted into the second fixing pin insertion hole 32b. The second insertion / removal pin 5b is inserted in the horizontal direction with respect to both the second holding insertion hole 34b and the second insertion hole 63b. In the present embodiment, two second fixing pin insertion holes 32b are formed in the second connection portion 23, whereas the second holding tool 62 is provided with one second holding pin 64b. The second holding pin 64b is inserted into any one of the second fixing pin insertion holes 32b (in this embodiment, the second fixing pin insertion hole 32b disposed on the second side X2). The second holding pins 64b may be provided in the same number as the second fixing pin insertion holes 32b. In the present embodiment, the second holding pin 64b is formed so as to protrude upward from an upward surface that is inclined upward toward the first side X1 of the second holder 62. Therefore, in the state where the second connection portion 23 is held by the second holder 62, the extending direction of the second cable body 20 in the second connection portion 23 is a direction (horizontal plane) that goes upward as it goes to the first side X1. In a direction inclined upward with respect to FIG. Although details are omitted, when removing the second connection portion 23 from the second holder 62, the second insertion / removal pin 5b is pulled out of the second holding insertion hole 34b and the second insertion hole 63b, The second connecting portion 23 is moved relative to the second holder 62 so that the holding pin 64b is detached from the second fixing pin insertion hole 32b.

  As described above, the first fixing pin 53a is a pin for positioning the first connection portion 13 with respect to the first mounting portion 51, and is configured to be detachable with respect to the first fixing pin insertion hole 32a. The In addition, the article transport facility 9 is provided with a first insertion / removal pin 5a for positioning the first connection portion 13 with respect to the first attachment portion 51, and the first insertion / removal pin 5a is inserted for first attachment. Each of the hole 54a, the first insertion / removal pin insertion hole 33a, and the first holding insertion hole 34a is configured to be detachable. That is, the first insertion / removal pin 5a has insertion holes (first insertion / removal pin insertion hole 33a, first holding insertion hole 34a, first attachment) provided in each of the first attachment portion 51 and the first connection portion 13. It is a pin that can be inserted into and removed from the insertion hole 54a). In the present embodiment, each of the first fixing pin 53a and the first insertion / removal pin 5a corresponds to a “first pin”, and includes a first mounting insertion hole 54a, a first fixing pin insertion hole 32a, a first insertion / removal pin. Each of the insertion hole 33a and the first holding insertion hole 34a corresponds to an “insertion hole”.

  The second fixing pin 53b is a pin for positioning the second connecting portion 23 with respect to the second mounting portion 52, and is configured to be detachable with respect to the second fixing pin insertion hole 32b. In addition, the article transport facility 9 is provided with a second insertion / removal pin 5b for positioning the second connection portion 23 with respect to the second attachment portion 52, and the second insertion / removal pin 5b is inserted for second attachment. Each of the hole 54b, the second insertion / removal pin insertion hole 33b, and the second holding insertion hole 34b is configured to be detachable. That is, the second insertion / removal pin 5b has insertion holes (second insertion / removal pin insertion holes 33b, second holding insertion holes 34b, second attachments) provided in the second attachment portion 52 and the second connection portion 23, respectively. This is a pin that can be inserted into and removed from the insertion hole 54b). In the present embodiment, each of the second fixing pin 53b and the second insertion / removal pin 5b corresponds to a “second pin”, and includes a second mounting insertion hole 54b, a second fixing pin insertion hole 32b, and a second insertion / removal pin. Each of the insertion hole 33b and the second holding insertion hole 34b corresponds to an “insertion hole”.

  As shown in FIG. 15, the article transport facility 9 includes a control device 8 that controls the operation of the first transport device 1 and the second transport device 2. The control device 8 includes a processor such as a microcomputer and a peripheral circuit such as a memory, and each of the control devices 8 is provided in cooperation with these hardware and a program executed on the hardware such as the processor. Function is realized. Each of the first transport device 1 and the second transport device 2 includes a travel drive unit (such as an electric motor) that travels the traveling carriage 80, a lift drive unit (such as an electric motor) that moves the lift 82 up and down, and a transfer device 83. The transfer drive part (electric motor etc.) which act | operates is provided. The control device 8 controls the operation of the first transport device 1 by controlling the drive of each drive unit provided in the first transport device 1, and controls the drive of each drive unit provided in the second transport device 2. By controlling, the operation of the second conveying device 2 is controlled. In the present embodiment, power for driving each drive unit of the first transport device 1 is supplied by the first cable body 10, and power for driving each drive unit of the second transport device 2 is the second cable body. 20.

  The control device 8 executes first transport control, second transport control, and third transport control. As shown in the upper diagram of FIG. 3, the first transport control is a state in which the movement range of the first transport device 1 is limited within the third movement range R3, and the first movement control is performed within the fourth movement range R4. In this state, the article W is transported to both the first transport device 1 and the second transport device 2 in a state where the movement range of the second transport device 2 is limited. In the present embodiment, the third door 73 is switched to the closed state when the first transport control is executed. Further, when the first transport control is executed, the positions of all the second support portions 42 are switched to the second retracted position 42b, and the positions of all the third support portions 43 are switched to the third retracted position 43b. Therefore, when it is determined that the second support portion 42 located at the second support position 42a exists based on the detection information of the first sensor 91, or at the third support position 43a based on the detection information of the second sensor 92. When it is determined that the third support portion 43 exists, the control device 8 does not execute the first transport control.

  In the second transport control, only the first transport device 1 out of the first transport device 1 and the second transport device 2 exists in the first movement range R1, as shown in the diagram of the central portion in the vertical direction in FIG. In the state, the first transport device 1 is configured to transport the article W in a state in which the first transport device 1 is allowed to move in the entire first movement range R1. In other words, the second transport control is a state in which the first transport device 1 is allowed to move throughout the first movement range R1 in a state where the second transport device 2 is located in the second retreat area A2. This is control for causing the apparatus 1 to convey the article W. When the second transport control is executed, the third door 73 is switched to the open state. Further, when the second transport control is executed, the positions of all the second support portions 42 are switched to the second support position 42a, and the positions of all the third support portions 43 are switched to the third retraction position 43b. Therefore, when it is determined based on the detection information of the third sensor 93 that the second support portion 42 located at the second retraction position 42b is present, or at the third support position 43a based on the detection information of the second sensor 92. When it is determined that the third support portion 43 exists, the control device 8 does not execute the second transport control.

  At the time of executing the second transport control, as shown in FIG. 14, the second connection portion 23 is detached from the second transport device 2 (second mounting portion 52) and held by the second holder 62. The second transfer device 2 is located in the second evacuation area A2. In the present embodiment, the article transporting facility 9 connects the second transporting device 2 located in the second evacuation area A2 and the second connecting portion 23 held by the second holding tool 62 to the fourth cable body 4. It has. Thereby, when performing the maintenance work of the second transport device 2, the second cable body 20 is effectively used to supply power to the second transport device 2, and the control device 8 and the second transport device 2 It is possible to communicate with each other. In the present embodiment, the fourth cable body 4 includes an end portion (connector, terminal, etc.) of the second cable body 26 extending from the second connection portion 23 and an attachment portion (connector) provided in the second transport device 2. And terminal block).

  As shown in the lower diagram in FIG. 3, the third transport control is performed when only the second transport device 2 out of the first transport device 1 and the second transport device 2 exists in the second movement range R <b> 2. In this state, the second transport device 2 transports the article W in a state in which the second transport device 2 is allowed to move in the entire second movement range R2. In other words, the third transport control is a state in which the second transport device 2 is allowed to move throughout the second movement range R2 in a state where the first transport device 1 is located in the first retreat area A1. This is control for causing the apparatus 2 to convey the article W. When the third transport control is executed, the third door 73 is switched to the open state. Further, when the third transport control is executed, the positions of all the second support portions 42 are switched to the second retracted position 42b, and the positions of all the third support portions 43 are switched to the third support position 43a. Accordingly, when it is determined that the second support portion 42 located at the second support position 42a exists based on the detection information of the first sensor 91, or at the third retraction position 43b based on the detection information of the fourth sensor 94. When it is determined that the third support portion 43 exists, the control device 8 does not execute the third transport control.

  At the time of execution of the third transport control, as shown in FIG. 11, the first connection portion 13 is detached from the first transport device 1 (first mounting portion 51) and is held by the first holder 61. One transport device 1 is located in the first evacuation area A1. In the present embodiment, the article transport facility 9 connects the first transport device 1 located in the first evacuation area A1 and the first connection portion 13 held by the first holder 61 to the third cable body 3. It has. Thereby, when carrying out the maintenance work of the first transport device 1, the first cable body 10 is effectively used to supply power to the first transport device 1, or the control device 8 and the first transport device 1 It is possible to communicate with each other. In the present embodiment, the third cable body 3 includes an end portion (connector, terminal, etc.) of the first cable body 16 extending from the first connection portion 13 and an attachment portion (connector) provided in the first transport device 1. And terminal block).

  As described above, in the present embodiment, when the article W is transferred to the storage unit 6a, the position where the first transport device 1 stops is the storage unit 6a or the storage unit 6a and the first direction X. It is located on the first side X1 from the position where the second transport device 2 stops when the article W is transferred to the storage unit 6a arranged at the same position. Therefore, as shown in FIG. 14, when the second transport control is executed, the position of the second door 72 is set within the range not entering the first movement range R1 (in FIG. 1). Even if it is moved to the first side X1 from the position indicated by the solid line (the position indicated by the two-dot chain line in FIG. 14), interference between the second door 72 and the first transport device 1 does not occur. In view of this point, in the present embodiment, the second door 72 is configured to be movable in the first direction X, and the second door 72 is held by the second holder 62 when the second transport control is executed. The second connecting portion 23 in the state moves to the first side X1 to the position where the second connecting portion 23 is disposed on the second side X2 with respect to the second door 72 (the position indicated by the alternate long and short dash line in FIG. 1, the position indicated by the solid line in FIG. 14). It is configured to let you. And the opening part 72a for letting the 2nd cable body 20 pass in the 2nd door 72 in the closed state of the 2nd door 72 is formed. Thereby, the 2nd connection part 23 of the state hold | maintained at the 2nd holder 62 is arrange | positioned outside the conveyance area 84, suppressing the distribution | circulation of the air between the conveyance area 84 and 2nd evacuation area A2. As a result, it is possible to improve workability at the time of performing the connection work and the removal work on the second connection portion 23 of the fourth cable body 4. When the second cable body 20 is not passed through the opening 72a, the opening 72a can be closed.

  Further, in the present embodiment, the first door 71 is configured to be movable in the first direction X, and the first door 71 is held by the first holder 61 when the third transport control is executed. The connecting portion 13 is configured to move to the second side X2 up to a position (position indicated by a one-dot chain line in FIG. 1 and a position indicated by a solid line in FIG. 11) disposed on the first side X1 with respect to the first door 71. Has been. And the opening part 71a for letting the 1st cable body 10 pass in the closed state of the 1st door 71 is formed in the 1st door 71. As shown in FIG. Thereby, the 1st connection part 13 of the state hold | maintained at the 1st holder 61 is arrange | positioned outside the conveyance area 84, suppressing the distribution | circulation of the air between the conveyance area 84 and 1st evacuation area A1. As a result, it is possible to improve the workability when performing the connection work and the removal work of the third cable body 3 with respect to the first connection portion 13. When the first cable body 10 is not passed through the opening 71a, the opening 71a can be closed.

[Other Embodiments]
Other embodiments of the article transport facility will be described. Note that the configurations disclosed in the following embodiments can be applied in combination with the configurations disclosed in other embodiments as long as no contradiction arises.

(1) In the above-described embodiment, the configuration in which the article transport facility 9 includes one first support portion 41 has been described as an example. However, the present invention is not limited to such a configuration, and the article transporting facility 9 is provided at each of the plurality of third positions P3 set between the first position P1 and the second position P2 in the first support portion 41. It can also be set as the structure provided with. Further, the article transporting facility 9 may be configured not to include the first support portion 41.

(2) In the above embodiment, the article transporting facility 9 has been described as an example in which the plurality of second support portions 42 and the plurality of third support portions 43 are provided. However, the present invention is not limited to such a configuration, and the configuration in which the number of second support portions 42 provided in the article transport facility 9 is one, or the configuration in which the article transport facility 9 does not include the second support portion 42. You can also Further, the configuration in which the number of the third support portions 43 provided in the article transport facility 9 is one, or the configuration in which the article transport facility 9 does not include the third support portion 43 can be adopted.

(3) In the above embodiment, the position of the second support portion 42 is switched between the second support position 42a and the second retracted position 42b by switching the attitude of the second support portion 42, and the third The configuration in which the position of the third support portion 43 is switched between the third support position 43a and the third retracted position 43b by switching the posture of the support portion 43 has been described as an example. However, without being limited to such a configuration, the position of the second support portion 42 is switched between the second support position 42a and the second retracted position 42b by switching the installation position of the second support portion 42. The position of the second support part 42 is switched between the second support position 42a and the second retracted position 42b by switching both the configuration and the posture and the installation position of the second support part 42. You can also. In addition, a configuration in which the position of the third support portion 43 can be switched between the third support position 43a and the third retracted position 43b by switching the installation position of the third support portion 43, and the attitude of the third support portion 43. In addition, the position of the third support portion 43 can be switched between the third support position 43a and the third retracted position 43b by switching both of the installation positions.

(4) In the above embodiment, the article transport facility 9 projects the detection light in the first direction X and detects that at least one of the second support portions 42 is located at the second support position 42a. A sensor 91, a second sensor 92 that projects detection light in the first direction X and detects that at least one of the third support portions 43 is positioned at the third support position 43a, and detection light in the first direction X And a third sensor 93 that detects that at least one of the second support portions 42 is located at the second retracted position 42b, and at least one third support that projects detection light in the first direction X. The configuration including the fourth sensor 94 that detects that the portion 43 is located at the third retraction position 43b has been described as an example. However, the present invention is not limited to such a configuration, and the article transporting facility 9 is configured so that only a part of the first sensor 91, the second sensor 92, the third sensor 93, and the fourth sensor 94 ( For example, only the first sensor 91 and the second sensor 92) may be provided. Further, the configuration in which the article transport facility 9 individually includes a sensor for detecting the position for each of the second support portions 42, and the article transport facility 9 has a sensor for detecting the position in each of the third support portions 43. On the other hand, it can also be set as the structure provided separately.

(5) In the above-described embodiment, the first holding insertion hole 34a is provided separately from the first insertion / removal pin insertion hole 33a, and the first holding tool 61 includes the first holding insertion hole 34a and the first insertion hole. The configuration in which the first connecting portion 13 is held in the state where the first insertion / removal pin 5a is inserted into both of the 63a has been described as an example. However, the first holder 61 is not limited to such a configuration, and the first insertion / removal pin 5a is inserted into both the first insertion / removal pin insertion hole 33a and the first insertion hole 63a. It can also be set as the structure which hold | maintains the 1st connection part 13. FIG. Moreover, in said embodiment, the 2nd holding insertion hole 34b is provided separately from the 2nd insertion / removal pin insertion hole 33b, and the 2nd holding tool 62 is the 2nd holding insertion hole 34b and the 2nd insertion hole 63b. The configuration in which the second connection portion 23 is held in the state where the second insertion / removal pin 5b is inserted into both of them has been described as an example. However, the second holder 62 is not limited to such a configuration, and the second insertion / removal pin 5b is inserted into both the second insertion / removal pin insertion hole 33b and the second insertion hole 63b. It can also be set as the structure which hold | maintains the 2nd connection part 23. FIG.

(6) In said embodiment, the 1st insertion / removal pin 5a is used also to hold the 1st connection part 13 in the 1st holder 61, and the 2nd insertion / removal pin 5b is used for the 2nd connection part 23. The configuration used for holding the second holder 62 has been described as an example. However, the first insertion / removal pin 5a is not limited to such a configuration, and the second insertion / removal pin 5b is not used for holding the first connection portion 13 in the first holding tool 61. The second connection part 23 may be configured not to be used for holding the second holding part 62. Moreover, the holding structure of the 1st connection part 13 by the 1st holder 61 can be changed suitably, for example, the 1st holder 61 hold | maintains the 1st connection part 13 using the fastening fixation by a fastening bolt. You can also. The holding structure of the second connection part 23 by the second holder 62 can also be changed as appropriate. For example, the second holder 62 may hold the second connection part 23 using fastening and fastening with fastening bolts. it can.

(7) In the above embodiment, the fitting between the first fixing pin 53a and the first fixing pin insertion hole 32a, the first insertion / removal pin 5a, the first mounting insertion hole 54a, and the first insertion / removal pin insertion hole. The structure which positions the 1st connection part 13 with respect to the 1st attachment part 51 with respect to the 1st attachment part 51 by fitting with the pin and the insertion hole like the fitting with 33a was demonstrated as an example. In the above embodiment, the fitting between the second fixing pin 53b and the second fixing pin insertion hole 32b, the second insertion / removal pin 5b, the second mounting insertion hole 54b, and the second insertion / removal pin insertion hole 33b are performed. The configuration in which the second connecting portion 23 is positioned in all directions with respect to the second mounting portion 52 by fitting the pin and the insertion hole as in the case of fitting with the pin has been described as an example. However, the present invention is not limited to such a configuration, and it is also possible to adopt a configuration in which positioning in at least a part of the direction is not performed by fitting the pin and the insertion hole. For example, at least a part of the fitting portion between the pin and the insertion hole in the above embodiment can be a fastening portion using a fastening bolt. Moreover, the structure of the pin and insertion hole in each fitting part shown by said embodiment is an example, It is provided in which of two members used as a fitting object a pin, or a pin becomes a fitting object 2 It is possible to appropriately change whether the fixing pin is fixed to one of the two members or the insertion / removal pin not fixed to any one of the members.

(8) In the above embodiment, the configuration in which the article transporting facility 9 includes the third cable body 3 and the fourth cable body 4 has been described as an example. However, the present invention is not limited to such a configuration, and the article transport facility 9 does not include the third cable body 3, and power supply and communication using the first cable body 10 when performing maintenance work on the first transport device 1. And a configuration in which the article transport facility 9 does not include the fourth cable body 4 and power supply or communication using the second cable body 20 is not performed when the maintenance work of the second transport device 2 is performed. You can also

(9) In said embodiment, the 1st cable body 10 is provided with both the 1st cable main body 16 for electric power feeding, and the 1st cable main body 16 for communication, and the 2nd cable body 20 is 1st for electric power feeding. The configuration including both the two cable main body 26 and the second cable main body 26 for communication has been described as an example. However, without being limited to such a configuration, for example, the first cable body 10 includes only the first cable body 16 for power supply, and the second cable body 20 includes only the second cable body 26 for power supply. It can also be configured. In this case, for example, communication between the control device 8 and the first transport device 1 and communication between the control device 8 and the second transport device 2 can be performed by wireless communication. Further, for example, the first cable body 10 may include only the first cable body 16 for communication, and the second cable body 20 may include only the second cable body 26 for communication. In this case, for example, a configuration in which a power supply rail is installed on the floor F along the first direction X, and a current collector that collects power from the power supply rail is provided in the first transport device 1 and the second transport device 2 can do.

(10) In the above embodiment, the portion (first upper portion 11) between the first folded portion 15 and the first connecting portion 13 in the first cable body 10 is the first folded portion in the first cable body 10. 15 and the portion between the first end portion 14 (the first lower portion 12) and the portion between the second folded portion 25 and the second connection portion 23 in the second cable body 20. An example in which the (second upper portion 21) is disposed on the upper side with respect to a portion (second lower portion 22) between the second folded portion 25 and the second end portion 24 in the second cable body 20 is shown. As explained. However, without being limited to such a configuration, the portion between the first folded portion 15 and the first connecting portion 13 in the first cable body 10 is the same as the first folded portion 15 and the first folded portion in the first cable body 10. The second folded portion 25 and the second connecting portion 23 of the second cable body 20 are disposed on one side (for example, the fourth side Y2) in the second direction Y with respect to the portion between the one end portion 14 and the second end portion 14. Is disposed on one side in the second direction Y (for example, the fourth side Y2) with respect to the portion between the second folded portion 25 and the second end portion 24 in the second cable body 20. It can also be set as a structure. That is, in the 1st folding | turning part 15 and the 2nd folding | turning part 25, it can also be set as the structure which the 1st cable body 10 and the 2nd cable body 20 bend in a horizontal surface instead of a vertical surface.

(11) In the above embodiment, the first cable body 10 and the second cable body 20 are on the same side in the second direction Y with respect to the rail 7, and at least a part of the arrangement region in each second direction Y is at least partially. In the above description, the configuration arranged to overlap each other has been described as an example. However, without being limited to such a configuration, the first cable body 10 and the second cable body 20 are arranged on the same side in the second direction Y with respect to the rail 7, and are arranged in the respective second directions Y. And a configuration in which the first cable body 10 and the second cable body 20 are arranged separately on both sides of the second direction Y with respect to the rail 7. You can also

(12) In the above embodiment, the configuration in which the article W is a container that accommodates a substrate such as a semiconductor substrate has been described as an example. However, the present invention is not limited to such a configuration. For example, the article W may be a container that accommodates an object other than a substrate such as an industrial product, food, or pharmaceutical. Further, the article W may be an article other than the container.

(13) Regarding other configurations, it should be understood that the embodiments disclosed herein are merely examples in all respects. Accordingly, those skilled in the art can make various modifications as appropriate without departing from the spirit of the present disclosure.

1: First transport device 2: Second transport device 3: Third cable body 4: Fourth cable body 5a: First insertion / removal pin (first pin)
5b: Second insertion / removal pin (second pin)
6: storage shelf 6a: storage unit 8: control device 9: article conveying facility 10: first cable body 13: first connection part 20: second cable body 23: second connection part 32a: first fixing pin insertion hole ( Insertion hole)
32b: second fixing pin insertion hole (insertion hole)
33a: first insertion / removal pin insertion hole (insertion hole)
33b: second insertion / removal pin insertion hole (insertion hole)
34a: first holding insertion hole (insertion hole)
34b: second holding insertion hole (insertion hole)
51: First mounting portion 52: Second mounting portion 53a: First fixing pin (first pin)
53b: second fixing pin (second pin)
54a: First mounting insertion hole (insertion hole)
54b: second mounting insertion hole (insertion hole)
61: First holder 62: Second holder 63a: First insertion hole 63b: Second insertion hole A1: First retraction area A2: Second retraction area R1: First movement range R2: Second movement range W: Article X: First direction X1: First side X2: Second side

Claims (5)

A storage shelf in which a plurality of storage units for storing articles are arranged side by side in a first direction along a horizontal direction, and the front of the storage shelf moves along the first direction to move to the storage unit or the storage unit A first transport device and a second transport device for transporting articles from the first power supply or communication first cable body connected to the first transport device and extending in the first direction, and the second transport device And a second cable body for power supply or communication that extends in the first direction and is connected to the first conveyance device on one side of the first direction with respect to the second conveyance device An article conveying facility arranged on a certain first side,
The first cable body is deformed as the first transport device moves along the first direction, so that the first transport device moves in a first movement range that is a range along the first direction. Allow to
The second cable body is deformed along with the movement of the second transport device along the first direction, and is a range along the first direction and at least partially overlaps the first movement range. Allowing the second transport device to move in a second movement range
The first connection part which is a connection part with the first conveyance device in the first cable body is configured to be detachable with respect to a first attachment part fixed to the first conveyance device, and the first movement range. A first retreat area is provided on the first side with respect to the second movement range so that the first transport device can be moved in a state where the first connection portion is removed from the first attachment portion. ,
A second connection portion, which is a connection portion with the second transport device in the second cable body, is configured to be detachable with respect to a second attachment portion fixed to the second transport device, and the first movement range. And moving the second transport device to a second side opposite to the first side with respect to the second movement range in a state where the second connection portion is removed from the second attachment portion. A possible second evacuation area is provided,
A first holding tool for holding the first connection part removed from the first attachment part; and a second holding tool for holding the second connection part detached from the second attachment part. Provided,
In the first holder, the first cable body is arranged in a posture that does not interfere with the second transport device and the second cable body when the second transport device moves in the entire second movement range. So as to hold the first connection part,
In the second holder, the second cable body is arranged in a posture that does not interfere with the first transport device and the first cable body when the first transport device moves in the entire range of the first movement range. As described above, the article transporting facility that holds the second connection portion. A first pin for positioning the first connection portion with respect to the first attachment portion and a second pin for positioning the second connection portion with respect to the second attachment portion;
The first pin is configured to be detachable with respect to an insertion hole provided in at least one of the first attachment portion and the first connection portion,
The said 2nd pin is an article conveyance installation of Claim 1 comprised so that insertion / removal is possible with respect to the insertion hole provided in at least one of said 2nd attachment part and said 2nd connection part. A first insertion / removal pin, which is the first pin that is detachable with respect to an insertion hole provided in each of the first attachment portion and the first connection portion, and the second attachment portion and the second connection portion. A second insertion / removal pin, which is the second pin that is detachable with respect to the insertion hole provided in each, is provided,
The first holder includes a first insertion hole through which the first insertion / removal pin can be inserted and removed, and the first insertion / removal is provided in both the insertion hole provided in the first connection portion and the first insertion hole. Hold the first connection part with the pin inserted,
The second holder includes a second insertion hole through which the second insertion / removal pin can be inserted / removed, and the second insertion / removal is provided in both the insertion hole provided in the second connection portion and the second insertion hole. The article conveyance facility according to claim 2, wherein the second connection portion is held in a state where a pin is inserted.   A third cable body for connecting the first transport device located in the first retraction area and the first connection portion held by the first holder; and the second cable body located in the second retraction area. The article conveyance facility according to any one of claims 1 to 3, wherein a fourth cable body that connects the second conveyance device and the second connection portion held by the second holder is provided. . A control device for controlling the operation of the first transport device and the second transport device;
The control device executes a first transport control, a second transport control, and a third transport control,
In the first transport control, the position in the overlapping region of the first movement range and the second movement range is set as a reference position, and the first conveyance control is within the first side range from the reference position in the first movement range. The moving range of the first transport device is limited, and the moving range of the second transport device is limited to a range on the second side opposite to the first side with respect to the reference position in the second moving range. In such a state, it is a control for conveying the article to both the first conveying device and the second conveying device,
The second transport control is a state in which the first transport device is allowed to move throughout the first movement range in a state where the second transport device is located in the second retreat area. Control to convey the article to
In the third transport control, the second transport device is in a state in which the second transport device is allowed to move in the entire second movement range in a state where the first transport device is located in the first retreat area. The article conveyance facility according to any one of claims 1 to 4, wherein the article conveyance control is a control for conveying the article.

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