CN112548450A - Ultrathin sheet fixing device and method - Google Patents
Ultrathin sheet fixing device and method Download PDFInfo
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- CN112548450A CN112548450A CN202011388324.9A CN202011388324A CN112548450A CN 112548450 A CN112548450 A CN 112548450A CN 202011388324 A CN202011388324 A CN 202011388324A CN 112548450 A CN112548450 A CN 112548450A
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- ultrathin sheet
- positioning
- positioning substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The invention relates to the technical field of ultrathin sheet fixing, in particular to an ultrathin sheet fixing device and method. The ultrathin sheet fixing device comprises a fixing base and a positioning substrate, wherein the upper surface of the fixing base is provided with a positioning groove matched with the positioning substrate in shape, and the positioning substrate is arranged inside the positioning groove; the upper surface of the positioning substrate is provided with a liquid film for fixing the ultrathin sheet. The ultrathin film cutting and coating device is simple in structure and convenient to operate, and can fix the ultrathin film on the positioning substrate by means of the surface tension of the liquid film, so that the problem that the ultrathin film is very easy to bend and deform in the cutting and coating processes is effectively solved, and the flatness of the ultrathin film in the processing process are ensured.
Description
Technical Field
The invention relates to the technical field of ultrathin sheet fixing, in particular to an ultrathin sheet fixing device and method.
Background
At present, for an ultra-thin quartz glass sheet with a thickness of less than 0.2mm, when the size (diameter or length and width) is more than 100mm, a certain flexibility is shown, namely, the ultra-thin quartz glass sheet is stressed into a curved surface. When the ultrathin sheet is subjected to laser cutting processing, under the condition that fixing needs to be guaranteed, the prior art generally adopts fixing modes such as mechanical clamping, mechanical drawing, gluing, negative pressure adsorption and the like.
Since the thickness of the ultra-thin quartz glass sheet can be as thin as tens of micrometers, the fixing method of the prior art has the following defects when laser cutting is performed: 1. if a mechanical clamping and fixing mode is adopted, the glass sheet is easy to bend and deform, so that the laser focus cannot fall on the surface of the glass sheet completely, and the cutting is incomplete; 2. if a mechanical drawing and fixing mode is adopted, the glass sheet is easy to break due to uneven stress, and the requirement on the adjustment precision of the mechanical drawing and fixing device is high; 3. if the mode of adhesive fixation is adopted, the surface cleaning difficulty is increased after cutting, and the breakage rate is higher during disassembly; 4. if a negative pressure adsorption fixing mode is adopted, the failure is easy to occur along with air blowing in the laser cutting process.
Disclosure of Invention
The invention provides an ultrathin sheet fixing device which can effectively solve the problem that an ultrathin sheet is very easy to bend and deform in the processes of cutting and coating.
The invention provides an ultrathin sheet fixing device which comprises a fixing base and a positioning substrate, wherein the upper surface of the fixing base is provided with a positioning groove matched with the positioning substrate in shape, and the positioning substrate is arranged in the positioning groove; the upper surface of the positioning substrate is provided with a liquid film for fixing the ultrathin sheet.
According to the ultrathin sheet fixing device provided by the invention, the upper surface of the positioning substrate is a polishing plane; the lower surface of the positioning substrate is a polishing plane.
According to the ultrathin sheet fixing device provided by the invention, the liquid film is prepared by using a mixed solution of deionized water and ethanol; or the liquid membrane is prepared by adopting a mixed solution of deionized water and methanol; or the liquid membrane is prepared by adopting a mixed solution of deionized water and isopropanol.
According to the ultrathin sheet fixing device provided by the invention, the surface tension of the liquid film is 22 mN/m-73 mN/m.
According to the ultrathin sheet fixing device provided by the invention, the positioning substrate is a rectangular plate; the positioning groove is a rectangular groove matched with the positioning substrate in shape, and the bottom surface of the rectangular groove is a polishing plane.
According to the ultrathin sheet fixing device provided by the invention, the four side walls of the rectangular groove are respectively provided with the liquid injection holes, and the liquid injection holes are respectively arranged in a manner of extending along the horizontal direction; one end of each liquid injection hole is communicated with the positioning groove, and the other end of each liquid injection hole penetrates through the outer side wall of the fixed base.
According to the ultrathin sheet fixing device provided by the invention, the setting height of the liquid injection hole relative to the bottom surface of the positioning groove is larger than the sum of the thicknesses of the positioning substrate and the liquid film.
The ultrathin sheet fixing device further comprises a three-axis displacement adjusting platform, and the fixing base is mounted on the three-axis displacement adjusting platform.
According to the ultrathin sheet fixing device provided by the invention, the thickness of the positioning substrate is 1-20 mm; the thickness of the liquid film is 50 nm-200 nm.
The invention also provides an ultrathin sheet fixing method, which adopts the ultrathin sheet fixing device and specifically comprises the following steps:
the positioning substrate is arranged in a positioning groove of the fixed base;
preparing mixed liquor with the surface tension of 22 mN/m-73 mN/m; the mixed solution is formed by mixing deionized water and ethanol, or the mixed solution is formed by mixing deionized water and methanol, or the mixed solution is formed by mixing deionized water and isopropanol;
forming a predetermined amount of the mixed liquid drop on an upper surface of the positioning substrate;
slightly placing an ultrathin sheet on the liquid drop, so that the liquid drop is expanded into a liquid film to be uniformly distributed between the positioning substrate and the ultrathin sheet under the action of surface tension, and fixing the ultrathin sheet; wherein the thickness of the liquid film is 50 nm-200 nm.
According to the ultrathin sheet fixing device provided by the invention, the positioning groove matched with the positioning substrate in shape is arranged on the upper surface of the fixing base, so that the positioning substrate is arranged in the positioning groove, the positioning substrate is fixedly arranged on the fixing base, and the ultrathin sheet can be fixed under the action of the surface tension of the liquid film by arranging the liquid film on the upper surface of the positioning substrate. Therefore, the ultrathin slice fixing device provided by the invention is simple in structure and convenient to operate, and can fix the ultrathin slice on the positioning substrate by depending on the surface tension of the liquid film, so that the problem that the ultrathin slice is very easy to bend and deform in the cutting and coating processes is effectively solved, the flatness and flatness of the ultrathin slice in the processing process are ensured, no mechanical external force is applied in the ultrathin slice fixing process, the fragmentation of the ultrathin slice in the cutting process is effectively prevented, the liquid film has the function of containing micro powder, so that dust generated by laser cutting is effectively reduced, the cutting and coating effects of the ultrathin slice are further ensured, the cut ultrathin slice is convenient to detach, the surface is easy to clean, and the ultrathin slice processing efficiency is improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
FIG. 1 is a schematic view of the structure of an ultrathin sheet holding device provided by the present invention;
FIG. 2 is a schematic structural view of a fixing base according to the present invention;
FIG. 3 is a schematic view of the assembly of the alignment substrate and the ultra-thin sheet of the present invention;
FIG. 4 is a schematic structural diagram of a three-axis displacement adjustment platform according to the present invention;
fig. 5 is a schematic structural view of the Z-axis adjusting mechanism of the present invention.
Reference numerals:
1: a fixed base; 2: positioning the substrate; 3: an ultrathin sheet;
4: a liquid film; 5: a three-axis displacement adjustment platform; 101: positioning a groove;
102: a liquid injection hole; 501: a mobile platform; 502: an X-axis base;
503: an X-axis adjusting bolt; 504: a Y-axis base; 505: a Y-axis adjusting bolt;
506: a Z-axis supporting seat; 507: a Z-axis adjusting bolt; 508: a Z-axis chute;
509: a Z-axis slide block; 510: the block is driven.
Detailed Description
The embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.
In embodiments of the invention, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of an embodiment of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Referring to fig. 1 to 3, an embodiment of the present invention provides an ultrathin sheet fixing device, in the present invention, a brittle material sheet with a thickness less than 0.2mm is defined as an ultrathin sheet.
The ultrathin sheet fixing device comprises a fixing base 1 and a positioning substrate 2, wherein the upper surface of the fixing base 1 is provided with a positioning groove 101 matched with the positioning substrate 2 in shape, and the positioning substrate 2 is arranged inside the positioning groove 101. On the upper surface of the positioning substrate 2, a liquid film 4 for fixing the ultrathin sheet 3 is provided.
That is, in the ultrathin sheet fixing device according to the embodiment of the present invention, the positioning groove 101 adapted to the shape of the positioning substrate 2 is disposed on the upper surface of the fixing base 1, so that the positioning substrate 2 is installed inside the positioning groove 101, and the installation and fixation of the positioning substrate 2 on the fixing base 1 are realized. By providing the liquid film 4 on the upper surface of the positioning substrate 2, the ultrathin sheet 3 can be fixed to the positioning substrate 2 by the surface tension of the liquid film 4.
Therefore, the ultrathin sheet fixing device provided by the embodiment of the invention is simple in structure and convenient to operate, and can fix the ultrathin sheet 3 on the positioning substrate 2 by means of the surface tension of the liquid film 4, so that the problem that the ultrathin sheet 3 is extremely easy to bend and deform in the cutting and coating processes is effectively solved, the flatness and the flatness of the ultrathin sheet 3 in the processing process are ensured, the surface of the ultrathin sheet 3 is flat and free of bending, and the cutting size precision of the ultrathin sheet 3 is higher. The ultrathin sheet 3 has no mechanical external force action in the fixing process, and the situation that the ultrathin sheet 3 is cracked in the cutting process can be effectively prevented. Moreover, the liquid film 3 has the function of containing the micro powder, thereby effectively reducing the dust generated by cutting the ultrathin sheet 3 by laser and further ensuring the cutting and coating effects of the ultrathin sheet 3. In addition, the ultrathin sheet 3 after cutting is convenient to detach, the surface is easy to clean, and the processing efficiency of the ultrathin sheet 3 is further improved.
The ultrathin sheet fixing device provided by the embodiment of the invention can be used for cutting and fixing various ultrathin fragile materials, and is particularly suitable for cutting and fixing ultrathin quartz glass sheets.
In the embodiment of the present invention, the upper surface of the positioning substrate 2 is a polishing plane. The lower surface of the positioning substrate 2 is a polishing plane. That is, by setting the upper and lower surfaces of the positioning substrate 2 as polished planes, respectively, the flatness of the ultra-thin sheet 3 after being fixed on the positioning substrate 2 is further improved.
The positioning substrate 2 can be made of glass or metal material with a thickness of 1 mm-20 mm, so that the upper and lower surfaces of the positioning substrate 2 can be polished conveniently.
Wherein, the surface roughness Ra of 2 upper surfaces of positioning substrate and lower surface is less than 0.8um, and the plane degree is less than 1um, has further ensured the plane degree of ultrathin slice 3 after fixed on positioning substrate 2, and then has improved ultrathin slice 3's cutting accuracy.
In a further embodiment of the invention, the surface tension of the liquid film 4 is between 22 and 73mN/m, so that an optimal effect of immobilizing the ultrathin sheet 3 can be achieved.
Specifically, the liquid film 4 may be a mixed solution prepared by deionized water and ethanol according to a certain ratio. Or, the liquid membrane 4 can also be a mixed solution prepared by deionized water and methanol according to a certain proportion. Alternatively, the liquid membrane 4 may also be a mixed solution prepared by deionized water and isopropanol according to a certain ratio. The ratio of the different components in the mixed solution may be determined according to the actual use, and may be set so long as the surface tension of the liquid film 4 is 22mN/m to 73 mN/m.
Of course, the liquid film 4 may also be a mixed solution of deionized water and other volatile solvents in a certain ratio according to actual use requirements, as long as the surface tension of the liquid film 4 is 22mN/m to 73 mN/m.
The invention adopts the mixed solution of deionized water and volatile solvent to prepare the liquid film 4, can achieve the surface tension required by fixing the ultrathin sheet 3, has simple and convenient configuration and lower cost of the liquid film 4, and is easier to clean after the ultrathin sheet 3 is cut.
Wherein, the thickness of the liquid film 4 can be set to 50 nm-200 nm according to the actual use requirement, thereby ensuring the best fixing effect of the ultrathin sheet 3.
In some embodiments of the present invention, the positioning substrate 2 may be a rectangular plate, and the positioning groove 101 is configured as a rectangular groove adapted to the shape of the positioning substrate 2, that is, the rectangular groove has a bottom surface and four side walls. The bottom surface of the rectangular groove is a polishing plane, so that the positioning substrate 2 can be smoothly fixed in the rectangular groove, and the flatness of the ultrathin sheet 3 after fixation is ensured.
Of course, the positioning substrate 2 may also adopt other structural forms according to the actual use requirement, such as a circle, an ellipse or other polygons, and accordingly, the positioning groove 101 is configured to have a groove shape matching the shape of the positioning substrate 2.
In a further embodiment of the present invention, the four side walls of the rectangular recess are provided with pour holes 102, respectively, and each pour hole 102 is extended in the horizontal direction. One end of each injection hole 102 is communicated with the positioning groove 101, and the other end of each injection hole 102 penetrates through the outer side wall of the fixed base 1. By providing the liquid injection holes 102 communicating with the positioning groove 101 on the side wall of the rectangular recess, it is convenient to inject the separated liquid into the inside of the positioning groove 101 through each of the liquid injection holes 102. That is, when the ultrathin sheet 3 is cut, and the ultrathin sheet 3 and the positioning substrate 2 need to be detached, only the excessive deionized water or other liquid needs to be injected into the positioning groove 101 through each liquid injection hole 102, so that the ultrathin sheet 3 can be separated from the positioning substrate 2 under the action of buoyancy, and the ultrathin sheet 3 can be taken out conveniently.
Specifically, the height of the liquid inlet 102 relative to the bottom surface of the positioning groove 101 is greater than the sum of the thicknesses of the positioning substrate 2 and the liquid film 4. This configuration ensures that the liquid film 4 provided on the positioning substrate 2 does not flow out of the liquid injection hole 102 when the ultrathin sheet 3 is fixed in the positioning groove 101, thereby ensuring the stability and reliability of fixing the ultrathin sheet 3.
In some embodiments of the present invention, as shown in FIGS. 1, 4 and 5, the ultrathin sheet fixture further comprises a three-axis displacement adjustment platform 5, wherein the fixture base 1 is mounted on the three-axis displacement adjustment platform 5. That is, adjust platform 5 through three-axis displacement and can realize carrying out the three-dimensional regulation of X axle, Y axle and Z axle to unable adjustment base 1's position, and then be convenient for carry out cutting operation to ultrathin sheet 3.
Specifically, the three-axis displacement adjusting platform 5 comprises a moving platform 501, an X-axis adjusting mechanism, a Y-axis adjusting mechanism and a Z-axis adjusting mechanism, wherein the Y-axis adjusting mechanism is movably mounted on the X-axis adjusting mechanism, the Z-axis adjusting mechanism is movably mounted on the Y-axis adjusting mechanism, the moving platform 501 is movably mounted on the Z-axis adjusting mechanism, and the fixed base 1 is fixedly mounted on the moving platform 501.
Wherein, X axle adjustment mechanism includes X axle base 502 and X axle adjusting bolt 503, and X axle base 502 includes X axle bottom plate and the X axle backup pad of being connected perpendicularly with X axle bottom plate, is equipped with X axle regulation hole on the X axle backup pad, X axle adjusting bolt 503 and X axle regulation hole threaded connection. The upper surface of the X-axis bottom plate is provided with an X-axis sliding rail.
The Y-axis adjusting mechanism comprises a Y-axis base 504 and a Y-axis adjusting bolt 505, the Y-axis base 504 comprises a Y-axis bottom plate and a Y-axis supporting plate vertically connected with the Y-axis bottom plate, a Y-axis adjusting hole is formed in the Y-axis supporting plate, and the Y-axis adjusting bolt 505 is in threaded connection with the Y-axis adjusting hole. The upper surface of the Y-axis bottom plate is provided with a Y-axis slide rail. The lower surface of the Y-axis bottom plate is provided with an X-axis sliding block matched with the X-axis sliding rail, and the X-axis sliding block is in sliding fit with the X-axis sliding rail, so that the Y-axis adjusting mechanism can move in the X-axis direction on the X-axis adjusting mechanism. The tail end of the X-axis adjusting bolt 503 is abutted against the outer side wall of the Y-axis bottom plate, and the Y-axis bottom plate can be pushed to move along the X-axis direction by rotating the X-axis adjusting bolt 503.
Wherein, Z axle adjustment mechanism includes Z axle supporting seat 506 and Z axle adjusting bolt 507, and the lower surface of Z axle supporting seat 506 is equipped with the Y axle slider with Y axle slide rail looks adaptation, Y axle slider and Y axle slide rail sliding fit to make Z axle adjustment mechanism can carry out the removal of Y axle direction on Y axle adjustment mechanism. The tip of the Y-axis adjusting bolt 505 abuts against the outer wall of the Z-axis support base 506, and the Z-axis support base 506 can be pushed to move in the Y-axis direction by rotating the Y-axis adjusting bolt 505.
The inside of the Z-axis support base 506 is provided with a Z-axis slide groove 508 and a Z-axis slide block 509, and the Z-axis slide block 509 is in sliding fit with the Z-axis slide groove 508 along the Z-axis direction. A driving block 510 is arranged at the bottom of the Z-axis slider 509, a first inclined surface is arranged on the upper surface of the driving block 510, a second inclined surface matched with the first inclined surface is arranged on the lower surface of the Z-axis slider 508, and the first inclined surface and the second inclined surface are in sliding fit. A Z-axis adjusting hole is formed in the Z-axis support base 506, a Z-axis adjusting bolt 507 is in threaded fit with the Z-axis adjusting hole, and the tail end of the Z-axis adjusting bolt 507 is in driving connection with a driving block 510. The upper end of the Z-axis slider 509 is fixedly connected to the moving platform 501. That is, by rotating the Z-axis adjusting bolt 507, the driving block 510 can be pushed to move left and right, and the left and right movement of the driving block 510 can drive the Z-axis slider 509 to move up and down along the Z-axis chute 508, so as to drive the moving platform 501 to move up and down.
Of course, it should be noted that the form of the three-axis displacement adjusting platform 5 is not limited to the type described above, as long as the three-way adjustment of the X-axis, the Y-axis and the Z-axis of the position of the fixed base 1 can be realized.
On the other hand, the embodiment of the invention also provides an ultrathin sheet fixing method, which adopts the ultrathin sheet fixing device of the embodiment, and specifically comprises the following steps:
the positioning substrate 2 is loaded into the positioning groove 101 of the stationary base 1.
A mixed solution having a surface tension of 22 to 73mN/m is prepared. The mixed solution can be prepared by mixing deionized water and ethanol, can also be prepared by mixing deionized water and methanol, and can also be prepared by mixing deionized water and isopropanol.
A predetermined amount of the mixed liquid is dropped to form a liquid droplet on the upper surface of the positioning substrate 2.
And slightly placing the ultrathin sheet 3 on the liquid drop, so that the liquid drop is expanded into a liquid film 4 which is uniformly distributed between the positioning substrate 2 and the ultrathin sheet 3 under the action of surface tension, and fixing the ultrathin sheet 3. Wherein the thickness of the liquid film 4 is set to 50nm to 200 nm.
According to the ultrathin sheet fixing method provided by the embodiment of the invention, the positioning substrate 2 is arranged in the positioning groove 101, so that the positioning substrate 2 is fixedly arranged on the fixing base 1, and the ultrathin sheet 3 can be fixed on the positioning substrate 2 by virtue of the surface tension of the liquid film 4, so that the problem that the ultrathin sheet 3 is extremely easy to bend and deform in the cutting and coating processes is effectively solved, the flatness and the flatness of the ultrathin sheet 3 in the processing process are ensured, the surface of the ultrathin sheet 3 is flat and has no bend, and the cutting size precision of the ultrathin sheet 3 is higher.
The ultrathin sheet fixing method also comprises a method for disassembling the ultrathin sheet 3, wherein the method for disassembling the ultrathin sheet 3 comprises the following two methods.
The first disassembling method comprises the following steps: after the ultrathin sheet 3 is cut, waiting for the liquid film 4 to naturally volatilize, and after the liquid film 4 completely volatilizes, automatically separating the ultrathin sheet 3 from the positioning substrate 2 can be realized, and at the moment, the ultrathin sheet 3 can be detached from the positioning substrate 2.
The second disassembling method comprises the following steps: excessive deionized water is injected into the positioning groove 101 through the liquid injection hole 102 on the fixing base 1, so that the ultrathin sheet 3 is separated from the positioning substrate 2 under the action of buoyancy, and then the ultrathin sheet 3 is detached from the positioning substrate 2.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. An ultra-thin slice fixing device which is characterized in that: the positioning device comprises a fixed base and a positioning substrate, wherein a positioning groove matched with the positioning substrate in shape is formed in the upper surface of the fixed base, and the positioning substrate is arranged inside the positioning groove; the upper surface of the positioning substrate is provided with a liquid film for fixing the ultrathin sheet.
2. The ultrathin sheet fixture of claim 1, wherein: the upper surface of the positioning substrate is a polishing plane; the lower surface of the positioning substrate is a polishing plane.
3. The ultrathin sheet fixture of claim 1, wherein: the liquid membrane is prepared by adopting a mixed solution of deionized water and ethanol; or the liquid membrane is prepared by adopting a mixed solution of deionized water and methanol; or the liquid membrane is prepared by adopting a mixed solution of deionized water and isopropanol.
4. The ultrathin sheet fixture of claim 1, wherein: the surface tension of the liquid film is 22 mN/m-73 mN/m.
5. The ultrathin sheet fixture of claim 1, wherein: the positioning substrate is a rectangular plate; the positioning groove is a rectangular groove matched with the positioning substrate in shape, and the bottom surface of the rectangular groove is a polishing plane.
6. The ultrathin sheet fixture of claim 5, wherein: liquid injection holes are respectively formed in four side walls of the rectangular groove, and the liquid injection holes are respectively arranged in an extending mode along the horizontal direction; one end of each liquid injection hole is communicated with the positioning groove, and the other end of each liquid injection hole penetrates through the outer side wall of the fixed base.
7. The ultrathin sheet fixture of claim 6, wherein: the setting height of the liquid injection hole relative to the bottom surface of the positioning groove is larger than the sum of the thicknesses of the positioning substrate and the liquid film.
8. An ultrathin sheet holding device as claimed in any one of claims 1 to 7 wherein: still include the triaxial displacement and adjust the platform, unable adjustment base installs on the triaxial displacement adjusts the platform.
9. An ultrathin sheet holding device as claimed in any one of claims 1 to 7 wherein: the thickness of the positioning substrate is 1 mm-20 mm; the thickness of the liquid film is 50 nm-200 nm.
10. An ultrathin sheet fixing method is characterized in that: use of the ultrathin sheet fixture of any of claims 1 to 9, comprising in particular the steps of:
the positioning substrate is arranged in a positioning groove of the fixed base;
preparing mixed liquor with the surface tension of 22 mN/m-73 mN/m; the mixed solution is formed by mixing deionized water and ethanol, or the mixed solution is formed by mixing deionized water and methanol, or the mixed solution is formed by mixing deionized water and isopropanol;
forming a predetermined amount of the mixed liquid drop on an upper surface of the positioning substrate;
slightly placing an ultrathin sheet on the liquid drop, so that the liquid drop is expanded into a liquid film to be uniformly distributed between the positioning substrate and the ultrathin sheet under the action of surface tension, and fixing the ultrathin sheet; wherein the thickness of the liquid film is 50 nm-200 nm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114952035A (en) * | 2022-06-23 | 2022-08-30 | 安徽英发睿能科技股份有限公司 | Laser processing equipment capable of preventing thin solar silicon wafer from cracking |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6043990A (en) * | 1997-06-09 | 2000-03-28 | Prototype Solutions Corporation | Multiple board package employing solder balis and fabrication method and apparatus |
| CN101989560A (en) * | 2009-08-03 | 2011-03-23 | 中芯国际集成电路制造(上海)有限公司 | Method and device for transmitting wafer in manufacturing process |
| TW201222710A (en) * | 2010-11-29 | 2012-06-01 | Ind Tech Res Inst | Substrate holding apparatus and the method thereof |
| JP2013184269A (en) * | 2012-03-09 | 2013-09-19 | Disco Corp | Holding release method and machining device for plate-shaped workpiece |
| CN105313008A (en) * | 2014-07-01 | 2016-02-10 | 株式会社迪思科 | Method for carrying out plate-shaped work |
| CN106926131A (en) * | 2017-03-29 | 2017-07-07 | 山东科技大学 | A kind of petrographic thin section clamping device |
| CN108000243A (en) * | 2017-11-20 | 2018-05-08 | 杭州智谷精工有限公司 | A kind of biplane Polishing machining method |
| CN108015666A (en) * | 2017-11-20 | 2018-05-11 | 杭州智谷精工有限公司 | A kind of monoplane Polishing machining method |
-
2020
- 2020-12-01 CN CN202011388324.9A patent/CN112548450A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6043990A (en) * | 1997-06-09 | 2000-03-28 | Prototype Solutions Corporation | Multiple board package employing solder balis and fabrication method and apparatus |
| CN101989560A (en) * | 2009-08-03 | 2011-03-23 | 中芯国际集成电路制造(上海)有限公司 | Method and device for transmitting wafer in manufacturing process |
| TW201222710A (en) * | 2010-11-29 | 2012-06-01 | Ind Tech Res Inst | Substrate holding apparatus and the method thereof |
| JP2013184269A (en) * | 2012-03-09 | 2013-09-19 | Disco Corp | Holding release method and machining device for plate-shaped workpiece |
| CN105313008A (en) * | 2014-07-01 | 2016-02-10 | 株式会社迪思科 | Method for carrying out plate-shaped work |
| CN106926131A (en) * | 2017-03-29 | 2017-07-07 | 山东科技大学 | A kind of petrographic thin section clamping device |
| CN108000243A (en) * | 2017-11-20 | 2018-05-08 | 杭州智谷精工有限公司 | A kind of biplane Polishing machining method |
| CN108015666A (en) * | 2017-11-20 | 2018-05-11 | 杭州智谷精工有限公司 | A kind of monoplane Polishing machining method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114952035A (en) * | 2022-06-23 | 2022-08-30 | 安徽英发睿能科技股份有限公司 | Laser processing equipment capable of preventing thin solar silicon wafer from cracking |
| CN114952035B (en) * | 2022-06-23 | 2023-10-24 | 安徽英发睿能科技股份有限公司 | Laser processing equipment capable of preventing sheet solar silicon wafer from cracking |
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