CN112540149A - Gas generating device and method - Google Patents
Gas generating device and method Download PDFInfo
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- CN112540149A CN112540149A CN201910894283.1A CN201910894283A CN112540149A CN 112540149 A CN112540149 A CN 112540149A CN 201910894283 A CN201910894283 A CN 201910894283A CN 112540149 A CN112540149 A CN 112540149A
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- 239000002994 raw material Substances 0.000 claims abstract description 93
- 239000007789 gas Substances 0.000 claims description 642
- 238000009826 distribution Methods 0.000 claims description 82
- 239000007788 liquid Substances 0.000 claims description 51
- 238000002156 mixing Methods 0.000 claims description 38
- 230000008016 vaporization Effects 0.000 claims description 32
- 230000001276 controlling effect Effects 0.000 claims description 31
- 238000009834 vaporization Methods 0.000 claims description 26
- 239000003085 diluting agent Substances 0.000 claims description 15
- 238000002474 experimental method Methods 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000007865 diluting Methods 0.000 claims description 5
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 18
- 238000002360 preparation method Methods 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 13
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 7
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 7
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J7/00—Apparatus for generating gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0006—Calibrating gas analysers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
- G01N33/0072—Arrangements to check the analyser by generating a test gas
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- Medicinal Chemistry (AREA)
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- Combustion & Propulsion (AREA)
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Abstract
The invention relates to the technical field of petrochemical industry, and discloses a gas generating device and a method, wherein the gas generating device comprises: a control system, a gas configuration system and a feedback system; the control system is used for: acquiring target data of a target gas to be configured, wherein the target data comprises gas components of the target gas to be configured and gas concentrations of the gas components; controlling a gas configuration system to configure raw material gas corresponding to the gas components into gas to be measured at least according to the gas components; acquiring feedback data obtained by a feedback system detecting the gas to be detected, wherein the feedback data comprises the gas components of the gas to be detected and the gas concentrations of the gas components; and controlling the gas configuration system to adjust the gas flow of each raw material gas according to the adjustment data obtained by the feedback data and the target data until the feedback data of the gas to be measured is consistent with the target data. The invention can solve the technical problems that the gas components and the concentration can not be continuously adjusted and the precision is difficult to ensure.
Description
Technical Field
The invention relates to the technical field of petrochemical industry, in particular to a gas generating device and a gas generating method.
Background
The petrochemical industry is a high-risk industry, relates to high material risk, and particularly faces a plurality of risk factors in the processes of production device processes, equipment operation and field operation, and the leakage of some hydrocarbon gases or toxic and harmful gases is often an important reason for causing explosion, ignition and personal injury accidents. Typical petrochemical environments are usually mixtures of various gases, generally contain toxic and harmful gases such as hydrocarbons, benzene series, sulfides and the like, and are the root of problems such as field malodor, environmental pollution and the like.
In recent years, with the rapid development of science and technology, particularly the appearance of composite materials such as nano materials and graphene, more and more intelligent detection technologies and monitoring instruments and equipment for trace gases are widely used in the petrochemical industry, and in order to ensure the stable performance and accurate and reliable monitoring results of the instruments and equipment, the performance of the instruments and equipment is tested and periodically calibrated, but the difficulty is how to constantly generate multi-component trace gases with multiple components, low concentration and high precision in real time. At present, the commonly used method is to use a standard substance purchased from a steel cylinder to generate standard gas with stable concentration, but the method has the defects that the gas components and the concentration are constant values and cannot be continuously adjusted, and the cost is high by adopting other equipment or the precision of the gas components and the concentration is difficult to ensure.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a gas generating device and a method, which can solve the technical problems that the gas components and the concentration in the prior art can not be continuously adjusted and the precision is difficult to guarantee.
In a first aspect the present invention provides a gas generating apparatus comprising: a control system, a gas configuration system and a feedback system;
the control system is configured to:
acquiring target data of a target gas to be configured, wherein the target data comprises gas components of the target gas to be configured and gas concentrations of the gas components;
controlling the gas configuration system to configure the raw material gas corresponding to the gas component into a gas to be tested at least according to the gas component;
acquiring feedback data obtained by the feedback system detecting the gas to be detected, wherein the feedback data comprises the gas components of the gas to be detected and the gas concentrations of the gas components;
and controlling the gas configuration system to adjust the gas flow of each raw material gas according to adjustment data obtained by the feedback data and the target data until the feedback data of the gas to be detected is consistent with the target data.
Optionally, the apparatus further comprises an experimental box for containing the gas to be tested output by the gas distribution system; the feedback system is arranged in the experimental box, and the control system controls the feedback system to detect the gas to be detected in the experimental box.
Optionally, in a case where the control system controls the gas configuration system to configure at least two kinds of the raw material gases into the gas to be measured according to the target data, one of the raw material gases at least includes a diluent gas, and the diluent gas is used for diluting at least another one of the raw material gases.
Optionally, the gas distribution system includes a multi-component dynamic gas distribution system, the multi-component dynamic gas distribution system includes at least two mass flow controllers, a gas inlet of each mass flow controller is used for introducing the raw material gas, and gas outlet ends of the mass flow controllers are communicated with each other and then communicated with a gas outlet, and are used for outputting the gas to be detected formed after mixing multiple raw material gases.
Optionally, the multi-component dynamic gas distribution system further includes a flow meter, disposed between the gas outlet end of each mass flow controller and the gas outlet, and configured to meter and send the gas flow of the gas to be measured; the multi-component dynamic gas distribution system further comprises regulating valves arranged between the gas outlet ends of the mass flow controllers and the evacuation ports and used for controlling the gas flow of the gas to be detected at the gas outlet by the control system according to flow control data obtained by obtaining the gas flow of the flow meter.
Optionally, the gas distribution system comprises a liquid organic gas distribution system, and the liquid organic gas distribution system comprises a mixing tank, at least one vaporization tank, and at least two mass flow controllers;
a liquid inlet of the vaporization tank is used for injecting raw material liquid, the vaporization tank is used for vaporizing the raw material liquid into the raw material gas, and a gas outlet of the vaporization tank is communicated with a first gas inlet of the mass flow controller through an electromagnetic valve and is used for introducing the vaporized raw material liquid into the first gas inlet;
the second gas inlet of each mass flow controller is used for introducing the raw material gas, each gas outlet end is communicated with the mixing tank, the gas outlet of the mixing tank is used for outputting the gas to be detected formed after mixing a plurality of raw material gases, and the evacuation port of the mixing tank is used for controlling the gas flow of the gas to be detected at the gas outlet by the control system.
In a second aspect, the present invention provides a method of generating gas, the method comprising:
acquiring target data of a target gas to be configured, wherein the target data comprises gas components of the target gas to be configured and gas concentrations of the gas components;
controlling the gas configuration system to configure the raw material gas corresponding to the gas component into a gas to be tested at least according to the gas component;
acquiring feedback data obtained by the feedback system detecting the gas to be detected, wherein the feedback data comprises the gas components of the gas to be detected and the gas concentrations of the gas components;
and controlling the gas configuration system to adjust the gas flow of each raw material gas according to adjustment data obtained by the feedback data and the target data until the feedback data of the gas to be detected is consistent with the target data.
Optionally, the method further includes:
and controlling the feedback system to detect the gas to be detected in the experiment box and obtaining feedback data.
Optionally, in a case where the gas configuration system is controlled to configure at least two kinds of the raw material gases into the gas to be measured according to the target data, one of the raw material gases includes at least a diluent gas, and the diluent gas is used to dilute at least another one of the raw material gases.
Optionally, the gas distribution system includes a multi-component dynamic gas distribution system, the multi-component dynamic gas distribution system includes at least two mass flow controllers, a gas inlet of each mass flow controller is used for introducing the raw material gas, and gas outlet ends of the mass flow controllers are communicated with each other and then communicated with a gas outlet, and are used for outputting the gas to be detected formed after mixing multiple raw material gases.
Optionally, the multi-component dynamic gas distribution system further includes a flow meter, disposed between the gas outlet end of each mass flow controller and the gas outlet, and configured to meter and send the gas flow of the gas to be measured; the multi-component dynamic gas distribution system further comprises regulating valves arranged between the gas outlet ends of the mass flow controllers and the evacuation ports and used for controlling the gas flow of the gas to be measured at the gas outlet according to flow control data obtained by obtaining the gas flow of the flow meter.
Optionally, the gas distribution system comprises a liquid organic gas distribution system, and the liquid organic gas distribution system comprises a mixing tank, at least one vaporization tank, and at least two mass flow controllers;
a liquid inlet of the vaporization tank is used for injecting raw material liquid, the vaporization tank is used for vaporizing the raw material liquid into the raw material gas, and a gas outlet of the vaporization tank is communicated with a first gas inlet of the mass flow controller through an electromagnetic valve and is used for introducing the vaporized raw material liquid into the first gas inlet;
the second gas inlet of each mass flow controller is used for introducing the raw material gas, each gas outlet end is communicated with the mixing tank, the gas outlet of the mixing tank is used for outputting the gas to be detected formed after mixing a plurality of raw material gases, and the evacuation port of the mixing tank is used for controlling the gas flow of the gas to be detected at the gas outlet.
According to the gas generating device and method provided by the invention, in the first aspect, the raw material gas is configured into the gas to be detected according to the target data, the raw material gas is adjusted through the feedback data obtained by detecting the gas to be detected through the feedback system, so that the feedback data of the gas to be detected is consistent with the target data, and the gas to be detected becomes the gas to be detected, so that the gas components of the gas to be detected and the gas concentrations of the gas components can be continuously adjusted, and the target gas with higher precision can be obtained. In the second aspect, a mode of combining multi-component dynamic gas distribution and liquid organic gas distribution is adopted, pipelines and corollary equipment are subjected to anti-adsorption treatment, and a multi-component trace gas generating device is designed through an optical feedback automatic adjusting system, so that real-time accurate preparation of multi-component and low-concentration mixed gas can be realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical inventions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts.
Fig. 1 is a schematic structural diagram of a gas generator according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a gas generator according to a second embodiment of the present invention;
fig. 3 is a schematic structural diagram of the multi-component dynamic gas distribution system in fig. 2 according to a third embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a liquid organic gas distribution system in FIG. 2 according to a fourth embodiment of the present invention;
fig. 5 is a schematic flow chart of a gas generation method according to a fifth embodiment of the present invention.
Detailed Description
In order to make the objects, features and advantages of the present invention more apparent and understandable, the technical invention in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making creative efforts based on the embodiments of the present invention, belong to the protection scope of the present invention.
Implementation mode one
Referring to fig. 1, fig. 1 is a schematic structural diagram of a gas generating device according to an embodiment of the present invention.
As shown in fig. 1, a first aspect of the present invention provides a gas generating apparatus comprising: a control system 1, a gas distribution system 2 and a feedback system 3.
The control system 1 is used for:
target data of the target gas to be configured is acquired, and the target data includes gas components of the target gas to be configured and gas concentrations of the respective gas components. Preferably, the target data may further include a gas flow rate of the target gas. It is to be noted that the gas component of the target gas includes one or more species, and when the gas component of the target gas is one species, the gas concentration thereof is 1. When the target gas has a plurality of gas components, the gas concentration is usually expressed by a gas percentage concentration or a gas mass number concentration, the gas percentage concentration refers to a volume percentage concentration of a certain gas component in the target gas, and the gas mass number concentration refers to a mass number percentage concentration of a certain gas component in the target gas, that is, the gas concentration of the gas component in the target gas can be expressed by the above two gas concentration calculation methods.
The gas distribution system 2 is controlled to distribute the source gas corresponding to the gas composition into the gas to be measured, at least in accordance with the gas composition.
Preferably, the raw material gas includes various elemental gases and mixed gases, wherein the elemental gases include diluent gases. For example, the feed gas may include at least one or a combination of hydrogen sulfide, methane, carbon monoxide, oxygen, and nitrogen.
Since a part of the source gas is physically adsorbed when passing through the gas distribution system 2, the gas concentration of the gas to be measured obtained by controlling the gas distribution system 2 based on the target data differs from the gas concentration of the target gas, and the source gas is distributed as the target gas only when the difference is eliminated. The gas component includes one or more, and the gas distribution system 2 can distribute the simple gas and the mixed gas.
And feedback data obtained by detecting the gas to be detected by the feedback system 3 is obtained, wherein the feedback data comprises the gas components of the gas to be detected and the gas concentrations of the gas components.
The feedback system 3 in the embodiment of the present invention is a negative feedback system, that is, the gas concentration of the gas component of the gas to be measured is made to approach the gas concentration of the gas component of the target gas by negative feedback. The feedback system 3 may include various gas sensors, and the feedback system 3 may employ an optical feedback automatic adjustment system due to performance errors of the sensors. In general, the gas component of the gas to be measured is the same as that of the target gas, except that the gas concentrations of the respective gas components are different.
The gas distribution system 2 adjusts the gas components of the gas to be measured and the gas concentrations of the gas components by adjusting the gas flow rates of the respective raw material gases, and therefore the gas distribution system 2 is controlled to adjust the gas flow rates of the respective raw material gases according to the adjustment data obtained from the feedback data and the target data until the feedback data of the gas to be measured coincides with the target data.
In general, the gas concentration of each gas component of the gas to be measured and the gas concentration of each gas component of the target gas are made to be the same, so that the gas components of the gas to be measured and the gas concentrations of the gas components can be continuously adjusted, and the target gas with high accuracy can be obtained.
Second embodiment
Referring to fig. 2 based on the first embodiment, fig. 2 is a schematic structural diagram of a gas generating device according to a second embodiment of the present invention.
Further, as shown in fig. 2, the apparatus further comprises a laboratory box 4 for containing the gas to be tested output by the gas distribution system 2. The feedback system 3 is arranged in the experiment box 4, and the control system 1 controls the feedback system 3 to detect the gas to be detected in the experiment box 4. The gas to be tested, which is configured by the gas configuration system 2, is introduced into the experiment box 4 through the gas inlet, and is preferably discharged to the gas processing equipment or the gas storage container through the gas outlet of the experiment box 4.
Further, in the case where the control system 1 controls the gas arrangement system 2 to arrange at least two kinds of source gases, one of which includes at least a diluent gas for diluting at least another one of the source gases, into the gas to be measured according to the target data.
The diluent gas does not contain a component that changes the gas to be measured with time, nor a component that affects the measurement by the instrument. The diluent gas is usually an inert gas such as high-purity nitrogen or clean air.
Third embodiment
Referring to fig. 3 based on the first or second embodiment, fig. 3 is a schematic structural diagram of the multi-component dynamic air distribution system in fig. 2 according to a third embodiment of the present invention.
Further, as shown in fig. 3, the gas distribution system 2 includes a multi-component dynamic gas distribution system 21, the multi-component dynamic gas distribution system 21 includes at least two mass flow controllers 200, a gas inlet of each mass flow controller 200 is used for introducing a raw material gas, and gas outlet ends of the mass flow controllers 200 are communicated with each other and then communicated with a gas outlet, and are used for outputting a gas to be measured formed after mixing a plurality of raw material gases.
The mass flow controller 200 is generally composed of components such as circuit boards, sensors, inlet and outlet pipe joints, splitter pipes, housings, and regulating valves, and is used for precisely measuring and controlling the mass flow of gas or liquid. Each raw material gas is introduced into each mass flow controller 200, and the mass flow controllers 200 can mix a plurality of raw material gases together in different or same volumes by controlling the gas flow rate of the raw material gas during gas outlet, so as to output the gas to be detected with the gas concentrations of different gas components.
In order to avoid the influence of the gas residue, the mass flow controller 200 should be fixed for different source gases, or the residual gas in the flow controller should be cleaned by introducing a diluent gas or the like so that various source gases can be introduced again.
Further, as shown in fig. 3, the multi-component dynamic gas distribution system 21 further includes a flow meter 211, which is disposed between the gas outlet end and the gas outlet of each mass flow controller 200, and is used for metering and sending the gas flow of the gas to be measured. The multi-component dynamic gas distribution system 21 further includes a regulating valve 212, which is disposed between the gas outlet end and the evacuation port of each mass flow controller 200, and is used for controlling the gas flow of the gas to be measured at the gas outlet by the control system 1 according to the flow control data obtained by obtaining the gas flow of the flow meter 211.
Embodiment IV
Referring to fig. 4, fig. 4 is a schematic structural diagram of a liquid organic gas distribution system in fig. 2 according to a fourth embodiment of the present invention.
Further, as shown in FIG. 4, the gas distribution system 2 includes a liquid organic gas distribution system 22 that includes a mixing cell 221, at least one vaporization cell 222, and at least two mass flow controllers 200.
A liquid inlet of the vaporization tank 222 is used for injecting raw material liquid, the vaporization tank 222 is used for vaporizing the raw material liquid into raw material gas, and a gas outlet of the vaporization tank 222 is communicated with a first gas inlet 224 of the mass flow controller 200 through an electromagnetic valve 223 and is used for introducing the vaporized raw material liquid into the first gas inlet 224.
For the raw material gas that is liquid at normal temperature and pressure, it is necessary to vaporize the raw material liquid into a raw material gas by the vaporization tank 222 and introduce the raw material gas into the mass flow controller 200. For example, the feed liquid includes benzene.
The second gas inlet 225 of each mass flow controller 200 is used for introducing raw material gas, each gas outlet end is communicated with the mixing tank 221, the gas outlet of the mixing tank 221 is used for outputting gas to be detected formed after mixing multiple raw material gases, and the evacuation port of the mixing tank 221 is used for controlling the gas flow of the gas to be detected at the gas outlet by the control system 1.
The gas composition supplied to the mass flow controller 200 can be controlled by opening and closing the valve of the first gas inlet 224 or the second gas inlet 225, and the vaporized raw material liquid is supplied through the first gas inlet 224 alone, or the vaporized raw material gas is supplied through the second gas inlet 225 alone, or both the vaporized raw material liquid and the raw material gas are supplied to form another raw material gas.
Preferably, the gas may also be configured by combining the multi-component dynamic gas distribution system 21 and the liquid organic gas distribution system 22, for example, the gas outlet of the multi-component dynamic gas distribution system 21 is communicated with a certain gas inlet of the liquid organic gas distribution system 22.
Preferably, 316 stainless steel or monel is adopted at least at the part of the device contacted with the raw material gas, namely, the physical adsorption of gas molecules can be greatly reduced through passivation treatment, the accurate preparation of low-concentration mixed gas can be realized, and the concentration can be accurate to ppb (parts per million) level.
In the gas generating apparatus according to the first aspect of the present invention, the control system configures the raw material gas into the gas to be measured according to the target data, and adjusts the raw material gas according to the feedback data obtained by detecting the gas to be measured by the feedback system so that the feedback data of the gas to be measured is consistent with the target data, thereby making the gas to be measured become the gas to be measured, and thus the gas components of the gas to be measured and the gas concentrations of the gas components can be continuously adjusted, thereby obtaining the target gas with higher accuracy. In the second aspect, a mode of combining multi-component dynamic gas distribution and liquid organic gas distribution is adopted, pipelines and corollary equipment are subjected to anti-adsorption treatment, and a multi-component trace gas generating device is designed through an optical feedback automatic adjusting system, so that real-time accurate preparation of multi-component and low-concentration mixed gas can be realized.
Fifth embodiment
Referring to fig. 5, fig. 5 is a schematic flow chart of a gas generation method according to a fifth embodiment of the present invention.
As shown in fig. 5, a second aspect of the present invention provides a gas generating method comprising:
s100, acquiring target data of the target gas to be configured, wherein the target data comprises gas components of the target gas to be configured and gas concentrations of the gas components.
And S200, controlling the gas configuration system 2 to configure the raw material gas corresponding to the gas component into the gas to be measured at least according to the gas component.
S300, feedback data obtained by detecting the gas to be detected by the feedback system 3 are obtained, and the feedback data comprise the gas components of the gas to be detected and the gas concentrations of the gas components.
And S400, controlling the gas configuration system 2 to adjust the gas flow of each raw material gas according to the adjustment data obtained by the feedback data and the target data until the feedback data of the gas to be detected is consistent with the target data.
Further, the method further comprises:
s500, controlling the feedback system 3 to detect the gas to be detected in the experiment box 4 and obtaining feedback data.
Further, in the case where the gas distributing system 2 is controlled to distribute at least two kinds of source gases, one of which includes at least a diluent gas for diluting at least another one of the source gases, into the gas to be measured according to the target data.
Further, the gas distribution system 2 comprises a multi-component dynamic gas distribution system 21, the multi-component dynamic gas distribution system 21 comprises at least two mass flow controllers 200, gas inlets of the mass flow controllers 200 are used for introducing raw material gas, and gas outlet ends are communicated with each other and then communicated with a gas outlet, and are used for outputting gas to be tested formed after mixing multiple raw material gases.
Further, the multi-component dynamic gas distribution system 21 further includes a flow meter 211, which is disposed between the gas outlet end and the gas outlet of each mass flow controller 200, and is used for metering and sending the gas flow of the gas to be measured. The multi-component dynamic gas distribution system 21 further includes a regulating valve 212, which is disposed between the gas outlet end and the evacuation port of each mass flow controller 200, and is configured to control the gas flow rate of the gas to be measured at the gas outlet according to the flow rate control data obtained by obtaining the gas flow rate of the flow meter 211.
Further, the gas distribution system 2 includes a liquid organic gas distribution system 22 that includes a mixing cell 221, at least one vaporization cell 222, and at least two mass flow controllers 200.
A liquid inlet of the vaporization tank 222 is used for injecting raw material liquid, the vaporization tank 222 is used for vaporizing the raw material liquid into raw material gas, and a gas outlet of the vaporization tank 222 is communicated with a first gas inlet 224 of the mass flow controller 200 through an electromagnetic valve 223 and is used for introducing the vaporized raw material liquid into the first gas inlet 224.
The second gas inlet 225 of each mass flow controller 200 is used for introducing raw material gas, each gas outlet end is communicated with the mixing tank 221, the gas outlet of the mixing tank 221 is used for outputting gas to be detected formed after mixing multiple raw material gases, and the evacuation port of the mixing tank 221 is used for controlling the gas flow of the gas to be detected at the gas outlet.
The working principle and the beneficial effects of the gas generating method provided by the second aspect of the invention are completely the same as those of the gas generating device, and are not repeated herein.
Sixth embodiment
Based on the first, second, third, fourth or fifth embodiment, the invention firstly adopts the mode of combining multi-component dynamic gas distribution and liquid organic gas distribution to design a standard gas generating device. The working principle of the dynamic gas distribution technology is a mass flow mixing method. The high-precision mass flow controller 200 is adopted to prepare the standard gas by strictly controlling the flow of the gas components and the diluent gas in a certain proportion and mixing the gas components and the diluent gas. The air distribution system is provided with eight groups of mass flow controllers 200 which can be diluted by more than 1000 times. The liquid organic gas is distributed by firstly preparing organic solvent into organic gas in a static gas distribution mode, filling the organic gas into an air bag, and then preparing the gas with required concentration by using the organic gas in the air bag as a gas source for dynamic gas distribution.
The gas circuit and the corollary equipment of the device are made of 316 stainless steel or Monel alloy with excellent corrosion resistance, and the corrosion of gases such as sulfur dioxide, hydrogen sulfide, ammonia gas and the like can be effectively prevented. The surface of the material is treated, so that the surface quality is improved, and the physical adsorption of gas molecules is greatly reduced.
The feedback system 3 adopts an optical feedback automatic adjusting system, the optical feedback automatic adjusting system adopts technologies such as TDLAS (Tunable Diode Laser Absorption Spectroscopy), GC-MS (Gas Chromatography-Mass Spectrometry) and the like to monitor various parameters such as components and concentration of the Gas to be detected in real time, and the parameters are uploaded to the signal acquisition system, the feedback data are analyzed by the intelligent control and information management system, and the multi-component dynamic Gas distribution system 21 is controlled and adjusted by the control system 1, so that the Gas concentration meets the required requirements.
Compared with the prior art, the invention has the advantages that: (1) the real-time preparation of the multi-component mixed gas can be realized, and the gas components with the quantity more than that of the mass flow controller 200 can be obtained. (2) The gas circuit and the matched equipment of the device are passivated, so that the physical adsorption of gas molecules is greatly reduced, the accurate preparation of low-concentration mixed gas can be realized, and the concentration can be accurate to ppb level. (3) And an optical feedback automatic regulating system is adopted, so that accurate monitoring and automatic compensation of gas components and concentration can be realized.
The technical solutions of the present invention will be described in detail below in order to clearly understand the technical features, objects, and advantages of the present invention, but the present invention is not limited to the practical scope of the present invention. The following detailed description of embodiments of the invention is provided in connection with the accompanying drawings.
The device mainly comprises a gas preparation system (comprising a multi-component dynamic gas distribution system 21 and a liquid organic gas distribution system 22), a feedback system 3 and a control system 1.
Connecting gas pipelines, setting the components and concentration of the gas to be tested according to the experiment requirements (a multi-component dynamic gas distribution system 21 or a liquid organic gas distribution system 22 can be selected according to the gas types), automatically controlling the proportion of each gas component and the flow of diluent gas by a control system 1 through input information, introducing raw material gas into a gas preparation system, and preparing the gas to be tested into an experiment box 4. The feedback system 3 monitors feedback data such as concentration information of each component in the experiment box 4 in real time. The control system 1 analyzes the feedback data, and automatically controls the gas preparation system through the control system 1, so that parameters such as gas components, concentration and the like in the experiment box 4 meet the requirements of experiments.
Seventh embodiment
The invention is further described below with reference to the drawings and examples, based on the first, second, third, fourth, fifth or sixth embodiment:
taking the preparation of a mixed gas of 6 components of hydrogen sulfide, methane, carbon monoxide, oxygen, gaseous benzene and nitrogen as an example, wherein the nitrogen is a balance gas, and the target concentrations of other gas components are respectively as follows: 5 mu mol/mol of hydrogen sulfide, 1% mol/mol of methane, 500 mu mol/mol of carbon monoxide, 10% mol/mol of oxygen and 10 mu mol/mol of benzene. The output flow is 1L/min.
(1) The preparation of 5 gas components of hydrogen sulfide, methane, carbon monoxide, oxygen and nitrogen is realized by a multi-component dynamic gas distribution system 21, and the preparation of a benzene gas component is realized by a liquid organic gas distribution system 22.
(2) Firstly, the type and concentration of raw material gas are selected, and gas pipelines are connected, such as: the 1 st path of air inlet is connected with hydrogen sulfide/nitrogen gas standard substance with the concentration of 100 mu mol/mol, the 2 nd path of air inlet is connected with high-purity methane gas with the concentration of 99.9% mol/mol, the 3 rd path of air inlet is connected with carbon monoxide/nitrogen gas standard substance with the concentration of 10000 mu mol/mol, the 4 th path of air inlet is connected with high-purity oxygen gas with the concentration of 99.9% mol/mol, and the 9 th path of air inlet is connected with high-purity nitrogen gas with the concentration of 99.9% mol/mol.
(3) A volume of benzene standard solution is injected into the inlet of the liquid organic gas distribution system 22 according to the target value of the benzene component and is fully vaporized in the vaporization cell 222.
(4) The information such as the types and concentrations of the raw gas and the target gas is input into the control system 1, the control system 1 automatically calculates the gas ratio of each gas inlet and the gas inlet flow rate of the raw gas according to the target concentration of each gas component, and the preparation of the gas to be measured is completed by automatically controlling the mass flow controllers 200 of each channel.
(5) In the gas preparation process, the actual output concentration of gases such as hydrogen sulfide and the like may be lower than the theoretical target value under the influence of temperature and humidity and pipeline adsorption, real-time monitoring can be performed through the feedback system 3, and the control system 1 automatically compensates by adjusting the mass flow controllers 200 of all channels so as to achieve the target concentration of all gas components.
(6) In the experiment process, the concentration of the gas to be detected can be changed at any time according to the experiment requirement, and the control system 1 can rapidly complete the dynamic generation of the multi-component trace gas by controlling the mass flow controller 200.
According to the gas generating device and method provided by the invention, in the first aspect, the raw material gas is configured into the gas to be detected according to the target data, the raw material gas is adjusted through the feedback data obtained by detecting the gas to be detected through the feedback system, so that the feedback data of the gas to be detected is consistent with the target data, and the gas to be detected becomes the gas to be detected, so that the gas components of the gas to be detected and the gas concentrations of the gas components can be continuously adjusted, and the target gas with higher precision can be obtained. In the second aspect, a mode of combining multi-component dynamic gas distribution and liquid organic gas distribution is adopted, pipelines and corollary equipment are subjected to anti-adsorption treatment, and a multi-component trace gas generating device is designed through an optical feedback automatic adjusting system, so that real-time accurate preparation of multi-component and low-concentration mixed gas can be realized.
In the above embodiments, the description of each embodiment has its own emphasis, and for parts not described in detail in a certain embodiment, reference may be made to the description of other embodiments. In view of the above description of the gas generating apparatus and method provided by the present invention, it will be apparent to those skilled in the art that various changes in the embodiments and applications of the invention can be made without departing from the spirit and scope of the invention.
Claims (12)
1. A gas-generating apparatus, the apparatus comprising: a control system, a gas configuration system and a feedback system;
the control system is configured to:
acquiring target data of a target gas to be configured, wherein the target data comprises gas components of the target gas to be configured and gas concentrations of the gas components;
controlling the gas configuration system to configure the raw material gas corresponding to the gas component into a gas to be tested at least according to the gas component;
acquiring feedback data obtained by the feedback system detecting the gas to be detected, wherein the feedback data comprises the gas components of the gas to be detected and the gas concentrations of the gas components;
and controlling the gas configuration system to adjust the gas flow of each raw material gas according to adjustment data obtained by the feedback data and the target data until the feedback data of the gas to be detected is consistent with the target data.
2. The apparatus of claim 1, further comprising a laboratory box for containing the gas to be tested output by the gas distribution system; the feedback system is arranged in the experimental box, and the control system controls the feedback system to detect the gas to be detected in the experimental box.
3. The apparatus according to claim 1, wherein in a case where the control system controls the gas configuration system to configure at least two of the raw material gases into the gas to be tested according to the target data, one of the raw material gases includes at least a diluent gas for diluting at least another one of the raw material gases.
4. The apparatus according to claim 1, wherein the gas distribution system comprises a multi-component dynamic gas distribution system, the multi-component dynamic gas distribution system comprises at least two mass flow controllers, a gas inlet of each mass flow controller is used for introducing the raw material gas, and gas outlet ends of each mass flow controller are communicated with a gas outlet after being communicated with each other, and are used for outputting the gas to be measured formed after mixing a plurality of raw material gases.
5. The apparatus of claim 4, wherein the multi-component dynamic gas distribution system further comprises a flow meter disposed between the gas outlet end and the gas outlet of each of the mass flow controllers for metering and sending the gas flow of the gas to be measured; the multi-component dynamic gas distribution system further comprises regulating valves arranged between the gas outlet ends of the mass flow controllers and the evacuation ports and used for controlling the gas flow of the gas to be detected at the gas outlet by the control system according to flow control data obtained by obtaining the gas flow of the flow meter.
6. The apparatus of claim 1, wherein the gas distribution system comprises a liquid organic gas distribution system comprising a mixing cell, at least one vaporization cell, and at least two mass flow controllers;
a liquid inlet of the vaporization tank is used for injecting raw material liquid, the vaporization tank is used for vaporizing the raw material liquid into the raw material gas, and a gas outlet of the vaporization tank is communicated with a first gas inlet of the mass flow controller through an electromagnetic valve and is used for introducing the vaporized raw material liquid into the first gas inlet;
the second gas inlet of each mass flow controller is used for introducing the raw material gas, each gas outlet end is communicated with the mixing tank, the gas outlet of the mixing tank is used for outputting the gas to be detected formed after mixing a plurality of raw material gases, and the evacuation port of the mixing tank is used for controlling the gas flow of the gas to be detected at the gas outlet by the control system.
7. A method of generating gas, the method comprising:
acquiring target data of a target gas to be configured, wherein the target data comprises gas components of the target gas to be configured and gas concentrations of the gas components;
controlling the gas configuration system to configure the raw material gas corresponding to the gas component into a gas to be tested at least according to the gas component;
acquiring feedback data obtained by the feedback system detecting the gas to be detected, wherein the feedback data comprises the gas components of the gas to be detected and the gas concentrations of the gas components;
and controlling the gas configuration system to adjust the gas flow of each raw material gas according to adjustment data obtained by the feedback data and the target data until the feedback data of the gas to be detected is consistent with the target data.
8. The method of claim 7, further comprising:
and controlling the feedback system to detect the gas to be detected in the experiment box and obtaining feedback data.
9. The method according to claim 7, wherein in a case where the gas configuration system is controlled to configure at least two of the source gases into the gas to be tested according to the target data, one of the source gases includes at least a diluent gas for diluting at least another of the source gases.
10. The method according to claim 7, wherein the gas distribution system comprises a multi-component dynamic gas distribution system, the multi-component dynamic gas distribution system comprises at least two mass flow controllers, a gas inlet of each mass flow controller is used for introducing the raw material gas, and gas outlet ends of the mass flow controllers are communicated with a gas outlet after being communicated with each other and used for outputting the gas to be measured formed after mixing a plurality of raw material gases.
11. The method of claim 10, wherein the multi-component dynamic gas distribution system further comprises a flow meter disposed between the gas outlet end and the gas outlet of each of the mass flow controllers for metering and sending the gas flow of the gas to be measured; the multi-component dynamic gas distribution system further comprises regulating valves arranged between the gas outlet ends of the mass flow controllers and the evacuation ports and used for controlling the gas flow of the gas to be measured at the gas outlet according to flow control data obtained by obtaining the gas flow of the flow meter.
12. The method of claim 7, wherein the gas distribution system comprises a liquid organic gas distribution system comprising a mixing cell, at least one vaporization cell, and at least two mass flow controllers;
a liquid inlet of the vaporization tank is used for injecting raw material liquid, the vaporization tank is used for vaporizing the raw material liquid into the raw material gas, and a gas outlet of the vaporization tank is communicated with a first gas inlet of the mass flow controller through an electromagnetic valve and is used for introducing the vaporized raw material liquid into the first gas inlet;
the second gas inlet of each mass flow controller is used for introducing the raw material gas, each gas outlet end is communicated with the mixing tank, the gas outlet of the mixing tank is used for outputting the gas to be detected formed after mixing a plurality of raw material gases, and the evacuation port of the mixing tank is used for controlling the gas flow of the gas to be detected at the gas outlet.
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