CN112536928B - Monocrystalline silicon rod squaring clamping device - Google Patents
Monocrystalline silicon rod squaring clamping device Download PDFInfo
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- CN112536928B CN112536928B CN202011410623.8A CN202011410623A CN112536928B CN 112536928 B CN112536928 B CN 112536928B CN 202011410623 A CN202011410623 A CN 202011410623A CN 112536928 B CN112536928 B CN 112536928B
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 71
- 230000007246 mechanism Effects 0.000 claims abstract description 150
- 239000012528 membrane Substances 0.000 claims abstract description 18
- 239000010985 leather Substances 0.000 claims description 24
- 239000003638 chemical reducing agent Substances 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 abstract description 26
- 239000000463 material Substances 0.000 abstract description 4
- 230000033001 locomotion Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000002146 bilateral effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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- 239000005060 rubber Substances 0.000 description 1
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- 229910002027 silica gel Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention relates to the technical field of hard and brittle material cutting, in particular to a monocrystalline silicon rod squaring clamping device, which comprises a front end clamping mechanism, a tail end clamping mechanism and a clamping driving piece, wherein the front end clamping mechanism comprises a front end mounting frame and a rotary clamping assembly, the rotary clamping assembly comprises a rotary motor, a central shaft, a ball seat, an elastic membrane and a jacking pin, the end face of the central shaft, which is far away from the rotary motor, is provided with a spherical convex part, the end face of the ball seat, which faces the central shaft, is provided with a spherical concave part, the other end face of the ball seat is provided with the jacking pin, the spherical convex part of the central shaft is in contact fit with the spherical concave part of the ball seat, and the elastic membrane is arranged between the central shaft and the ball seat; the tail end clamping mechanism comprises a tail end mounting frame and a movable clamping assembly, the movable clamping assembly comprises a rotating shaft and a jacking pin, the rotating shaft is rotatably fixed on the tail end mounting frame, and the jacking pin is arranged at the front end face of the rotating shaft; the clamping driving piece is connected with the tail end clamping mechanism. The scheme has reliable clamping and high cutting precision.
Description
Technical Field
The invention relates to the technical field of cutting of hard and brittle materials, in particular to a single crystal silicon rod squaring and clamping device.
Background
The invention ZL201821888855.2 of Chinese patent discloses a monocrystalline silicon rod squaring machine, which comprises a skip device, a manipulator device, a clamping device and a bilateral wire saw running device, wherein the clamping device comprises a monocrystalline silicon rod clamping mechanism; the monocrystalline silicon rod clamping mechanism comprises a front end clamping mechanism, a tail end clamping mechanism and a monocrystalline silicon rod clamping mechanism driving mechanism; the tail end clamping mechanism and the front end clamping mechanism are arranged opposite to each other, and both the tail end clamping mechanism and the front end clamping mechanism are provided with sensors; the driving mechanism of the monocrystalline silicon rod clamping mechanism is used for driving the tail end clamping mechanism and the front end clamping mechanism to be close to or far away from each other; the bilateral wire saw running device comprises two wire saw cutting mechanisms, a first wire saw cutting mechanism driving mechanism and a second wire saw cutting mechanism driving mechanism; the two wire saw cutting mechanisms are respectively arranged at two sides of the clamping device; the skip device is arranged at one side of the clamping device. The method has the advantage that the crystal lines are kept in an accurate alignment state before and after the monocrystalline silicon rod is cut.
This solution has the following drawbacks in practical use: (1) When the front end clamping mechanism and the rear end clamping mechanism are matched to clamp the monocrystalline silicon rod, when the deviation between the front end surface and the rear end surface of part of monocrystalline rods and the central line is large, the end surface of the ejector pin cannot be in complete contact with the end surface of the monocrystalline rods, the clamping similar to the point or the line cannot clamp the monocrystalline silicon rod reliably, workpiece displacement is easily caused in the cutting process, and the cutting precision is reduced; (2) The front end clamping mechanism and the rear end clamping mechanism are matched with each other to have a rotating function, if the clamping cannot be reliably performed, the asynchronous rotation angles of the front end and the rear end can occur, and the mutually perpendicular precision of the adjacent square cutting surfaces is insufficient; (3) The moving part of the leather clamping mechanism is arranged on the cantilever, the rigidity of the tail end is weaker, and the clamping precision is lower; (4) The moving part of the square feed driving mechanism is arranged below, so that the cutting environment is extremely bad, the protection is difficult to complete, and the service life of the moving part is reduced.
Disclosure of Invention
Therefore, it is necessary to provide a single crystal silicon rod squaring clamping device to solve the problems that when the existing single crystal silicon rod squaring clamping device clamps a single crystal silicon rod, front and rear end faces of the single crystal silicon rod are uneven, when vertical deviation between the end faces and a central line is large, clamping is unreliable, workpiece displacement occurs in a cutting process easily, and cutting accuracy is reduced.
In order to achieve the above object, the present inventors provide a single crystal silicon rod squaring clamping device, which comprises a front end clamping mechanism, a rear end clamping mechanism and a clamping driving member, wherein the front end clamping mechanism and the rear end moving clamping mechanism are arranged opposite to each other and are used for clamping a single crystal silicon rod;
The front end clamping mechanism comprises a front end mounting frame and a rotary clamping assembly assembled on the front end mounting frame, the rotary clamping assembly comprises a rotary motor, a central shaft, a ball seat, an elastic diaphragm and a knock pin, the rotary motor is in transmission connection with the central shaft, the end face of the central shaft, which is far away from the rotary motor, is provided with a spherical convex part, the end face of the ball seat, which faces the central shaft, is provided with a spherical concave part, the other end face of the ball seat is provided with the knock pin, the spherical convex part of the central shaft is in contact fit with the spherical concave part of the ball seat, the elastic diaphragm is arranged between the central shaft and the ball seat, and the elastic diaphragm is used for elastically locking and connecting the central shaft and the ball seat;
The tail end clamping mechanism comprises a tail end mounting frame and a movable clamping assembly assembled on the tail end mounting frame, the movable clamping assembly comprises a rotating shaft and a top pin, the rotating shaft is rotatably fixed on the tail end mounting frame, and the top pin is arranged at the front end face of the rotating shaft;
The clamping driving piece is connected with the tail end clamping mechanism and used for driving the tail end clamping mechanism to be close to or far away from the front end clamping assembly.
As a preferable configuration of the present invention, the trailing end holding mechanism further includes an encoder provided on a rear end face of the rotating shaft.
As a preferable configuration of the present invention, the encoder is connected to the rotary shaft via a coupling.
As a preferable structure of the present invention, the knock pin of the movable clamp assembly is fixed in the rotation shaft by a spring connection.
As a preferable structure of the invention, the elastic membrane is sleeved on the side wall of the central shaft, and the end part of the elastic membrane is connected with the end surface where the spherical concave part of the ball seat is located.
As a preferable structure of the present invention, the rotary clamping assembly further comprises a speed reducer, the speed reducer is connected with the rotary motor, and an output shaft of the speed reducer is connected with the rotary shaft through a coupling.
As a preferable structure of the invention, the clamping driving piece comprises a clamping driving motor, a ball screw and a clamping moving slide rail, wherein the clamping driving motor is in transmission connection with the tail end mounting frame through the ball screw, and the tail end mounting frame is slidably fixed on the clamping moving slide rail.
As a preferable structure of the invention, the clamping device further comprises a leather clamping mechanism, the leather clamping mechanism is arranged on the front end mounting frame and the tail end mounting frame through fastening screws in a locking and adjusting mode, the leather clamping mechanism on the front end mounting frame and the leather clamping mechanism on the tail end mounting frame are oppositely arranged and used for supporting rim charge of a single crystal silicon rod to be cut, and the adjusting and fixing block is provided with a long slot hole.
As a preferable structure of the invention, the leather clamping mechanism comprises two groups of leather clamping components which are arranged side by side, the leather clamping components comprise an air cylinder, an air cylinder fixing seat, an eccentric shaft and a jacking block, the air cylinder is arranged on the air cylinder fixing seat, the eccentric shaft is fixed with an air cylinder telescopic rod, the jacking block is arranged at one end of the eccentric shaft, and the jacking block is of an L-shaped structure.
As a preferable structure of the invention, the clamping device further comprises a bracket, a clamping mechanism fixing seat and a moving driving mechanism;
a feeding moving slide rail is arranged on the top of the bracket;
The clamping mechanism fixing seat can be slidably fixed on the feeding moving slide rail;
The front end clamping mechanism is arranged at the bottom of the clamping mechanism fixing seat, the tail end clamping mechanism passes through the clamping driving piece and the bottom of the clamping mechanism fixing seat, and the tail end clamping mechanism can move relative to the clamping mechanism fixing seat under the driving of the clamping driving piece;
The movable driving mechanism is used for driving the front end clamping mechanism, the tail end clamping mechanism and the clamping driving piece to move in a feeding mode.
Compared with the prior art, the technical scheme has the following advantages: the invention relates to a monocrystalline silicon rod squaring clamping device which comprises a front end clamping mechanism, a tail end clamping mechanism and a clamping driving piece, wherein when a monocrystalline silicon rod to be squared is conveyed between the front end clamping mechanism and the tail end clamping mechanism, the tail end clamping mechanism is driven by the clamping driving piece to approach the front end clamping mechanism until a top pin of the tail end clamping mechanism abuts against the rear end surface of the monocrystalline silicon rod, the top pin on the front end clamping mechanism abuts against the front end surface of the monocrystalline silicon rod, the end surface of a central shaft of a rotary clamping assembly, which is far away from a rotary motor, is provided with a spherical convex part, the end surface of the spherical seat, which faces the central shaft, is provided with a spherical concave part, the other end surface of the spherical seat is provided with a top pin, the spherical convex part of the central shaft is in contact fit with the spherical concave part of the spherical seat, an elastic diaphragm is arranged between the central shaft and the spherical seat, and when the end surface of the monocrystalline silicon rod is uneven, the spherical seat abuts against the spherical seat, the spherical seat can press the elastic diaphragm to deform, so that the spherical seat can be self-adaptively adjusted along the axial direction on the spherical contact surface between the spherical seat and the central shaft, thereby realizing reliable clamping, and ensuring high cutting precision. After the first square cutting is completed, the single crystal silicon rod is driven to rotate through the rotary clamping assembly, and the movable clamping assembly of the single crystal silicon rod and the tail end clamping mechanism is rotated by a preset angle, so that the second square cutting is performed. In this scheme, through the structural change of rotatory clamping assembly for the ball seat can carry out the self-adaptation adjustment along the axial on the spherical contact surface between with the center pin, realizes reliable centre gripping, thereby guarantees that cutting accuracy is high.
Drawings
FIG. 1 is a schematic perspective view of an embodiment of a single crystal silicon rod squaring and clamping device according to the present invention;
FIG. 2 is a schematic diagram of a front end clamping mechanism in the single crystal silicon rod squaring clamping device according to an embodiment;
FIG. 3 is a schematic view of a front end clamping mechanism in a single crystal silicon rod squaring clamping device in a partial cross-sectional structure according to an embodiment;
FIG. 4 is a schematic diagram of a tail end clamping mechanism in the single crystal silicon rod squaring clamping device according to the embodiment;
FIG. 5 is a schematic view of a part of a cross-sectional structure of a tail end clamping mechanism in the single crystal silicon rod opening clamping device in the embodiment;
FIG. 6 is a schematic diagram showing a bevel view of a skin holding mechanism in the single crystal silicon rod squaring holding device according to the embodiment;
FIG. 7 is a schematic perspective view of the sheath holding mechanism of the single crystal silicon rod squaring holding device after removing the sheath;
FIG. 8 is a schematic cross-sectional view of a skin clamping assembly of the single crystal silicon rod squaring clamping device according to the embodiment;
fig. 9 is a schematic perspective view of another example of the single crystal silicon rod squaring holding device according to the embodiment.
Reference numerals illustrate:
100. a front end clamping mechanism;
110. A front end mounting rack;
120. A rotary clamping assembly; 121. a rotating electric machine; 122. a central shaft; 123. a spherical convex portion; 124. a ball seat; 125. an elastic membrane; 126. a knock pin; 127. a speed reducer;
200. A tail end clamping mechanism;
210. A tail end mounting rack;
220. moving the clamping assembly; 221. a rotation shaft; 222. a spring;
230. an encoder;
240. A coupling;
300. clamping the driving member;
310. Clamping a driving motor;
320. A ball screw;
330. Clamping the movable slide rail;
400. a leather clamping mechanism;
410. A sheath holding assembly; 411. a cylinder; 412. a cylinder fixing seat; 413. an eccentric shaft; 414. a top block;
500. adjusting the fixed block;
510. A long slot;
600. A bracket;
610. Feeding a movable slide rail;
700. a clamping mechanism fixing seat;
800. A movement driving mechanism;
900. A single crystal silicon rod.
Detailed Description
In order to describe the technical content, constructional features, achieved objects and effects of the technical solution in detail, the following description is made in connection with the specific embodiments in conjunction with the accompanying drawings.
Referring to fig. 1 to 9 together, the present invention provides a single crystal silicon rod squaring clamping device for stably clamping a single crystal silicon rod 900 when the single crystal silicon rod 900 is square-rod sliced by round rod squaring, so as to facilitate slicing by a wire saw slicing operation mechanism. Specifically, the clamping device comprises a front end clamping mechanism 100, a tail end clamping mechanism 200 and a clamping driving piece 300, wherein the front end clamping mechanism 100 and the tail end moving clamping mechanism are arranged opposite to each other and are used for clamping a monocrystalline silicon rod 900;
The front end clamping mechanism 100 is used for abutting and contacting the front end surface of the single crystal silicon rod 900. Specifically, the front end clamping mechanism 100 includes a front end mounting frame 110 and a rotary clamping assembly 120 assembled on the front end mounting frame 110, the rotary clamping assembly 120 includes a rotary motor 121, a central shaft 122, a ball seat 124, an elastic membrane 125 and a knock pin 126, the rotary motor 121 is in transmission connection with the central shaft 122, the end surface of the central shaft 122 far away from the rotary motor 121 has a spherical protrusion 123, the end surface of the ball seat 124 facing the central shaft 122 has a spherical recess, the other end surface of the ball seat 124 is provided with a knock pin 126, the spherical protrusion 123 of the central shaft 122 is in contact fit with the spherical recess surface of the ball seat 124, an elastic membrane 125 is arranged between the central shaft 122 and the ball seat 124, and the elastic membrane 125 is used for elastically locking and connecting the central shaft 122 and the ball seat 124;
the tail clamping mechanism 200 is used for abutting and contacting the rear end face of the monocrystalline silicon rod 900. The tail clamping mechanism 200 comprises a tail mounting frame 210 and a movable clamping assembly 220 assembled on the tail mounting frame 210, wherein the movable clamping assembly 220 comprises a rotary shaft 221 and a top pin 126, the rotary shaft 221 is rotatably fixed on the tail mounting frame 210, and the top pin 126 is arranged at the front end surface of the rotary shaft 221;
the clamping driving member 300 is connected to the tail clamping mechanism 200, and is used for driving the tail clamping mechanism 200 to approach or depart from the front clamping assembly.
In a specific embodiment, the single crystal silicon rod squaring clamping device comprises a front end clamping mechanism 100, a tail end clamping mechanism 200 and a clamping driving piece 300, when the single crystal silicon rod to be squared is conveyed between the front end clamping mechanism 100 and the tail end clamping mechanism 200, the tail end clamping mechanism 200 is driven by the clamping driving piece 300 to approach the front end clamping mechanism 100 until a top pin 126 of the tail end clamping mechanism 200 abuts against the rear end face of the single crystal silicon rod 900, the top pin 126 on the front end clamping mechanism 100 abuts against the front end face of the single crystal silicon rod 900, the central shaft 122 of the rotary clamping assembly 120 is far away from the rotary motor 121, the end face of the central shaft 122 facing the central shaft 122 is provided with a spherical concave part, the other end face of the spherical head seat 124 is provided with a top pin 126, the spherical convex part 123 of the central shaft 122 is in contact fit with the spherical concave part face of the spherical head seat 124, an elastic membrane 125 is arranged between the central shaft 122 and the spherical head seat 124, when the end face of the single crystal silicon rod 900 is uneven, the single crystal silicon rod 900 abuts against the spherical head seat 124 through the top pin 126, the spherical head seat 124 can press the elastic membrane 125, so that the cutting precision between the central shaft 122 and the spherical seat 122 can be adjusted along the axial direction, and the cutting precision can be adjusted along the axial direction. After the first square cutting of the monocrystalline silicon rod 900 is completed, the rotary clamping assembly 120 rotates, specifically the rotary motor 121 rotates through the central shaft 122 to drive the ball seat 124 to rotate, so that the monocrystalline silicon rod 900 is driven to rotate through the top pin 126 on the ball seat 124, and the corresponding top pin 126 rotation shaft of the tail end clamping device follows the rotation to drive the monocrystalline silicon rod 900 to rotate by a preset angle so as to perform the second square cutting. In this scheme, through the structural modification of the rotary clamping assembly 120, the ball seat 124 can perform self-adaptive adjustment along the axial direction on the spherical contact surface between the ball seat and the central shaft 122, so as to realize reliable clamping, thereby ensuring high cutting precision.
Referring to fig. 1, 4 and 5, as a preferred embodiment of the present invention, the tail end holding mechanism 200 further includes an encoder 230, and the encoder 230 is disposed on a rear end surface of the rotating shaft 221. The encoder 230 is used for detecting the rotation angle of the monocrystalline silicon rod 900, so as to ensure the mutually perpendicular precision between the tangential planes of the monocrystalline silicon rod 900 during the front and back cutting, ensure the squaring precision and improve the processing quality. Typically, the rotation angle of the adjacent twice-opened single crystal silicon rod is 90 °. Preferably, the encoder 230 is connected to the rotation shaft 221 through a coupling 240. The encoder 230 is connected with the rotary shaft 221 through the coupler 240, so that the connection is stable, the butting efficiency is high, and the maintenance, the disassembly and the replacement are convenient.
As shown in fig. 4 and 5, the top pin 126 of the movable clamp assembly 220 is fixedly connected to the rotary shaft 221 by a spring 222 as a preferred embodiment of the present invention. In the present embodiment, a spring 222 is provided between the top pin 126 and the rotation shaft 221 to use the floating top pin 126 on the movable clamping assembly 220, so that only the position adjustment can be adapted in the axial direction by the compression of the spring 222 when the top pin 126 on the movable clamping assembly 220 is pressurized, thereby ensuring the stability of clamping the single crystal silicon rod 900. In addition, the rotary clamping assembly 120 of the front end clamping mechanism 100 can perform self-adaptive adjustment on the monocrystalline silicon rod 900 in the circumferential direction, and the clamping of the monocrystalline silicon rod is more stable due to the cooperation of the rotary clamping assembly 120 and the monocrystalline silicon rod, so that the squaring and cutting precision of the monocrystalline silicon rod is improved, and the quality of a product is improved. Preferably, the knock out pin 126 is a diamond knock out pin 126.
Referring to fig. 3, as a preferred embodiment of the present invention, the elastic membrane 125 is sleeved on the side wall of the central shaft 122, the end of the elastic membrane 125 is connected with the end face of the spherical recess of the ball seat 124, and the structure is compact and the connection position is reasonable. The elastic membrane 125 is provided to elastically lock and connect the central shaft 122 of the rotary clamping assembly 120 with the ball seat 124, and because the ball seat 124 can adaptively elastically deform, when the end surface of the monocrystalline silicon rod is uneven, the ball seat 124 can press the elastic membrane 125 to circumferentially rotate along the spherical contact surface of the elastic membrane and the central shaft 122, so as to realize adaptive adjustment. Specifically, the elastic membrane 125 may be made of foam, elastic rubber, latex, or silica gel.
Referring to fig. 2 and 3, as a preferred embodiment of the present invention, the rotary clamping assembly 120 further includes a speed reducer 127, the speed reducer 127 is connected to the rotary motor 121, and an output shaft of the speed reducer 127 is connected to the rotary shaft 221 through a coupling 240. The speed reducer 127 is used for reducing the high rotation speed of the rotating motor 121, so that the condition of unstable clamping caused by the rotation process of the monocrystalline silicon rod is prevented, and the output shaft of the speed reducer 127 and the rotating shaft 221 can be quickly connected through the coupler 240. In other embodiments, the rotating electrical machine 121 may directly use a gear motor.
Referring to the embodiment shown in fig. 1, the clamping driving member 300 includes a clamping driving motor 310, a ball screw 320 and a clamping moving rail 330, wherein the clamping driving motor 310 is in driving connection with the tail mounting frame 210 through the ball screw 320, and the tail mounting frame is slidably fixed on the clamping moving rail 330 through a sliding block. The grip driving motor 310 provides driving force. The ball screw 320 is driven to rotate, and converts the rotational motion into linear motion, and drives the tail end mounting frame 210 and the movable clamping assembly 220 assembled on the tail end mounting frame 210 to slide, so as to realize the relative motion of the front end clamping mechanism 100 and the tail end clamping mechanism 200. The tail mounting frame is slidably fixed on the clamping moving slide rail 330 through the sliding block, so that the sliding is more stable.
Referring to fig. 1, 6, 7 and 8, as a preferred embodiment of the present invention, the clamping device further includes a skin material clamping mechanism 400, where the skin material clamping mechanism 400 is used for clamping the rim charge to be cut off on the monocrystalline silicon rod, so as to prevent the rim charge from breaking during the cutting process and affecting the normal operation of the cutting. Specifically, the leather clamping mechanism 400 is mounted on the front end mounting frame 110 and the tail end mounting frame 210 by fastening screws to lock the adjusting fixing block 500, the leather clamping mechanism 400 on the front end mounting frame 110 and the tail end mounting frame 210 is relatively arranged and is used for supporting the rim charge of the monocrystalline silicon rod to be cut, and the adjusting fixing block 500 is provided with a long slot 510. The leather clamping mechanism 400 is fixed on the front end mounting frame 110 and the tail end mounting frame 210, so that the leather clamping mechanism is better in structural rigidity and higher in clamping stability. Preferably, the adjusting fixing block 500 is provided with a long slot 510, so that the leather clamping mechanism 400 can be adjusted and set according to the specification of the monocrystalline silicon rod to be cut, and the universality is stronger.
As shown in fig. 6 to 8, in a specific embodiment, the skin clamping mechanism 400 includes two sets of skin clamping assemblies 410 disposed side by side, the skin clamping assemblies 410 include an air cylinder 411, an air cylinder fixing seat 412, an eccentric shaft 413 and a top block 414, the air cylinder 411 is mounted on the air cylinder fixing seat 412, the eccentric shaft 413 is fixed with a telescopic rod of the air cylinder 411, the top block 414 is mounted at one end of the eccentric shaft 413, and the top block 414 has an L-shaped structure, so that a protruding portion of the top block 414 can be just fixed on the rim charge. Two groups of leather clamping components 410 are arranged at one end of the monocrystalline silicon rod, two jacking points are arranged at one end of the leather, and clamping is firmer. The cylinder 411 is fixed through the cylinder fixing seat 412, and the telescopic rod of the cylinder 411 stretches out and draws back to drive the eccentric shaft 413 to move, so that the top block 414 is driven to abut against or be far away from the leather. The eccentric shaft 413 is arranged, so that the top block 414 can be biased to the inner side of the telescopic rod of the air cylinder 411, and is convenient to prop against the middle position of the rim charge, and the rim charge clamping effect is better. Preferably, the skin gripping means 400 further comprises a front shroud and a cylinder 411 shroud.
Referring to fig. 9, as a preferred embodiment of the present invention, the clamping device further includes a bracket 600, a clamping mechanism fixing base 700, and a moving driving mechanism 800;
the bracket 600 is used for the front clamping mechanism 100, the rear clamping mechanism 200 and the clamping driver 300. Specifically, a feed slide rail 610 is disposed on the top of the stand 600;
the clamping mechanism fixing seat 700 is slidably fixed on the feeding moving slide rail 610;
The front end clamping mechanism 100 is mounted at the bottom of the clamping mechanism fixing seat 700, the tail end clamping mechanism 200 is driven by the clamping driving piece 300 to move relative to the clamping mechanism fixing seat 700 via the clamping driving piece 300 and the bottom of the clamping mechanism fixing seat 700;
The moving driving mechanism 800 is used for driving the front end clamping mechanism 100, the rear end clamping mechanism 200 and the clamping driving member 300 to move in a feeding manner.
In this embodiment, the moving driving mechanism 800 and the feeding moving guide rail are both located above the support 600, so that direct influence of corrosion, damage and the like caused by falling of spray water and silicon powder into the spray water and silicon powder can be effectively reduced, a complex protection mechanism is not required, protection is simpler, cost is lower, and service lives of the moving driving mechanism 800 and the feeding moving guide rail can be greatly prolonged.
It should be noted that, although the foregoing embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concepts of the present invention, alterations and modifications to the embodiments described herein, or equivalent structures or equivalent flow transformations made by the present description and drawings, apply the above technical solutions directly or indirectly to other relevant technical fields, all of which are included in the scope of protection of the present patent.
Claims (6)
1. The device is characterized by comprising a front end clamping mechanism, a tail end clamping mechanism and a clamping driving piece, wherein the front end clamping mechanism and the tail end moving clamping mechanism are arranged opposite to each other and used for clamping the monocrystalline silicon rod;
The front end clamping mechanism comprises a front end mounting frame and a rotary clamping assembly assembled on the front end mounting frame, the rotary clamping assembly comprises a rotary motor, a central shaft, a ball seat, an elastic diaphragm and a knock pin, the rotary motor is in transmission connection with the central shaft, the end face of the central shaft, which is far away from the rotary motor, is provided with a spherical convex part, the end face of the ball seat, which faces the central shaft, is provided with a spherical concave part, the other end face of the ball seat is provided with the knock pin, the spherical convex part of the central shaft is in contact fit with the spherical concave part of the ball seat, the elastic diaphragm is arranged between the central shaft and the ball seat, and the elastic diaphragm is used for elastically locking and connecting the central shaft and the ball seat;
The tail end clamping mechanism comprises a tail end mounting frame and a movable clamping assembly assembled on the tail end mounting frame, the movable clamping assembly comprises a rotating shaft and a top pin, the rotating shaft is rotatably fixed on the tail end mounting frame, and the top pin is arranged at the front end face of the rotating shaft;
The clamping driving piece is connected with the tail end clamping mechanism and used for driving the tail end clamping mechanism to be close to or far away from the front end clamping assembly;
The clamping driving piece comprises a clamping driving motor, a ball screw and a clamping moving slide rail, wherein the clamping driving motor is in transmission connection with the tail end mounting frame through the ball screw, and the tail end mounting frame can be slidably fixed on the clamping moving slide rail;
The clamping device further comprises a leather clamping mechanism, the leather clamping mechanism is arranged on the front end mounting frame and the tail end mounting frame through fastening screws in a locking and adjusting mode, the leather clamping mechanism on the front end mounting frame and the leather clamping mechanism on the tail end mounting frame are arranged oppositely and used for supporting rim charge of a monocrystalline silicon rod to be cut, and the adjusting and fixing block is provided with a long slot hole;
the leather clamping mechanism comprises two groups of leather clamping components which are arranged side by side, the leather clamping components comprise an air cylinder, an air cylinder fixing seat, an eccentric shaft and a jacking block, the air cylinder is arranged on the air cylinder fixing seat, the eccentric shaft is fixed with an air cylinder telescopic rod, the jacking block is arranged at one end of the eccentric shaft, and the jacking block is of an L-shaped structure;
the clamping device further comprises a bracket, a clamping mechanism fixing seat and a movable driving mechanism;
a feeding moving slide rail is arranged on the top of the bracket;
The clamping mechanism fixing seat can be slidably fixed on the feeding moving slide rail;
The front end clamping mechanism is arranged at the bottom of the clamping mechanism fixing seat, the tail end clamping mechanism passes through the clamping driving piece and the bottom of the clamping mechanism fixing seat, and the tail end clamping mechanism can move relative to the clamping mechanism fixing seat under the driving of the clamping driving piece;
The movable driving mechanism is used for driving the front end clamping mechanism, the tail end clamping mechanism and the clamping driving piece to move in a feeding mode.
2. The apparatus according to claim 1, wherein the trailing end holding mechanism further comprises an encoder provided on a rear end face of the rotary shaft.
3. The monocrystalline silicon rod squaring clamp apparatus in accordance with claim 2, the encoder being connected to the rotating shaft by a coupling.
4. The monocrystalline silicon rod squaring clamp device in accordance with claim 1, wherein the top pin of the movable clamp assembly is fixed in the rotating shaft by spring connection.
5. The monocrystalline silicon rod squaring and clamping device according to claim 1, wherein the elastic membrane is sleeved on the side wall of the central shaft, and the end part of the elastic membrane is connected with the end face where the spherical concave part of the sphere seat is located.
6. The monocrystalline silicon rod squaring holding device according to claim 1, characterized in that the rotary holding assembly further comprises a speed reducer, the speed reducer is connected with the rotary motor, and an output shaft of the speed reducer is connected with the rotary shaft through a coupling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011410623.8A CN112536928B (en) | 2020-12-04 | 2020-12-04 | Monocrystalline silicon rod squaring clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011410623.8A CN112536928B (en) | 2020-12-04 | 2020-12-04 | Monocrystalline silicon rod squaring clamping device |
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| Publication Number | Publication Date |
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| CN112536928A CN112536928A (en) | 2021-03-23 |
| CN112536928B true CN112536928B (en) | 2024-05-10 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012121082A (en) * | 2010-12-07 | 2012-06-28 | Okamoto Machine Tool Works Ltd | Method for machining cylindrical single-crystal silicon ingot block into square columnar block, and compound chamfering apparatus used for the same |
| CN109648409A (en) * | 2019-01-31 | 2019-04-19 | 青岛高测科技股份有限公司 | It is a kind of for adjusting the grip(per) feed mechanism of semiconductor silicon rod cylindricity |
| CN209737195U (en) * | 2019-03-19 | 2019-12-06 | 青岛高测科技股份有限公司 | Clamping mechanism of semiconductor crystal bar |
| CN111318904A (en) * | 2020-04-14 | 2020-06-23 | 福州天瑞线锯科技有限公司 | Bar clamping tool and cutting and grinding integrated machine |
| CN214163574U (en) * | 2020-12-04 | 2021-09-10 | 福州天瑞线锯科技有限公司 | Single crystal silicon rod evolution clamping device |
-
2020
- 2020-12-04 CN CN202011410623.8A patent/CN112536928B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012121082A (en) * | 2010-12-07 | 2012-06-28 | Okamoto Machine Tool Works Ltd | Method for machining cylindrical single-crystal silicon ingot block into square columnar block, and compound chamfering apparatus used for the same |
| CN109648409A (en) * | 2019-01-31 | 2019-04-19 | 青岛高测科技股份有限公司 | It is a kind of for adjusting the grip(per) feed mechanism of semiconductor silicon rod cylindricity |
| CN209737195U (en) * | 2019-03-19 | 2019-12-06 | 青岛高测科技股份有限公司 | Clamping mechanism of semiconductor crystal bar |
| CN111318904A (en) * | 2020-04-14 | 2020-06-23 | 福州天瑞线锯科技有限公司 | Bar clamping tool and cutting and grinding integrated machine |
| CN214163574U (en) * | 2020-12-04 | 2021-09-10 | 福州天瑞线锯科技有限公司 | Single crystal silicon rod evolution clamping device |
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| CN112536928A (en) | 2021-03-23 |
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