CN112530864B - Preparation method of stretchable display panel, stretchable display panel and display device - Google Patents

Preparation method of stretchable display panel, stretchable display panel and display device Download PDF

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CN112530864B
CN112530864B CN202011380823.3A CN202011380823A CN112530864B CN 112530864 B CN112530864 B CN 112530864B CN 202011380823 A CN202011380823 A CN 202011380823A CN 112530864 B CN112530864 B CN 112530864B
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flexible substrate
groove
pixel
display panel
edge
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CN112530864A (en
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盛晨航
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Xiamen Tianma Microelectronics Co Ltd
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Xiamen Tianma Microelectronics Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
    • H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

Abstract

The embodiment of the invention discloses a preparation method of a stretchable display panel, the stretchable display panel and a display device. The preparation method of the stretchable display panel comprises the following steps: providing a bearing substrate; forming a flexible substrate on one side of a bearing substrate, wherein the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array manner, at least one sub-pixel is arranged on each pixel island, every two adjacent pixel islands are connected through the bridge, and the bridge is provided with a wiring for electrically connecting the sub-pixels; forming a groove penetrating through the flexible substrate on the flexible substrate; the groove divides the flexible substrate into an effective area and a redundant area, and the effective area is provided with a pixel island and a bridge. The embodiment of the invention solves the problem of difficult production in the existing stretchable display panel manufacturing process, improves the reliability of the manufacturing process, and the prepared stretchable display panel has better stretching reliability and stretching upper limit.

Description

Preparation method of stretchable display panel, stretchable display panel and display device
Technical Field
The embodiment of the invention relates to a display technology, in particular to a stretchable display panel, a preparation method thereof and a display device.
Background
With the development of display technologies, various forms of display panels are continuously appearing, for example, curved display panels, foldable display panels, stretchable display panels and the like are gradually applied to the fields of wearable equipment, internet of things equipment, artificial intelligence and the like, and brand new viewing and use experiences are brought to users.
The stretchable display panel comprises pixel islands and bridges for connecting the pixel islands, the two adjacent pixel islands are connected through the bridges, the pixel islands are used for bearing display function devices, and the bridges are used for bearing signal wiring for providing signals for the display function devices. The pixel islands and the bridges are both disposed on the flexible substrate, and in order to achieve the stretchable effect, the flexible substrate needs to be removed from the pixel islands and the bridges. In the prior art, in order to ensure a stretching space, because the occupation area of the pixel islands and the bridges is small, the flexible substrate in most areas of the whole panel needs to be patterned to form a hollow area, the patterning is generally formed by dry etching, the thickness of the flexible substrate is 3-5 times of that of a normal dry etching film, the whole etching area and the etching amount are large, and the process output is difficult.
Disclosure of Invention
The embodiment of the invention provides a preparation method of a stretchable display panel, the stretchable display panel and a display device.
In a first aspect, an embodiment of the present invention provides a method for manufacturing a stretchable display panel, including:
providing a bearing substrate;
forming a flexible substrate on one side of the bearing substrate, wherein the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array manner, at least one sub-pixel is arranged on each pixel island, two adjacent pixel islands are connected through the bridge, and the bridge is provided with a wiring electrically connected with the sub-pixels;
forming a groove penetrating through the flexible substrate on the flexible substrate;
the groove divides the flexible substrate into an effective area and a redundant area, and the effective area is provided with the pixel island and the bridge.
In a second aspect, an embodiment of the present invention further provides a stretchable display panel, including:
the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array mode, at least one sub-pixel is arranged on each pixel island, every two adjacent pixel islands are connected through the bridge, and a wiring electrically connected with the sub-pixels is arranged on the bridge;
the flexible substrate is provided with a groove penetrating through the flexible substrate, the flexible substrate is divided into an effective area and a redundant area by the groove, and the effective area is provided with the pixel island and the bridge.
In a third aspect, an embodiment of the present invention further provides a stretchable display device, including the stretchable display panel described above.
The preparation method of the stretchable display panel provided by the embodiment of the invention comprises the following steps: providing a bearing substrate; forming a flexible substrate on one side of a bearing substrate, wherein the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array manner, at least one sub-pixel is arranged on each pixel island, every two adjacent pixel islands are connected through the bridge, and the bridge is provided with a wiring for electrically connecting the sub-pixels; forming a groove penetrating through the flexible substrate on the flexible substrate; the groove divides the flexible substrate into an effective area and a redundant area, and the effective area is provided with a pixel island and a bridge. The flexible substrate is provided with the pixel island and the bridge, the pixel island is provided with the sub-pixels for display, and the bridge is provided with the connecting wires of the sub-pixels and bears deformation during stretching; the groove penetrating through the flexible substrate is formed in the flexible substrate, and the groove provides a space required by deformation in stretching, so that the problem of difficulty in manufacturing process caused by large-area removal of the flexible substrate is avoided, and the reliability of the manufacturing process is improved.
Drawings
FIG. 1 is a schematic diagram illustrating a top view of a stretchable display panel in the prior art;
FIG. 2 is a cross-sectional view taken along line AA' of FIG. 1;
FIG. 3 is a schematic flow chart illustrating a method for manufacturing a stretchable display panel according to an embodiment of the present invention;
fig. 4 is a schematic top view of the structure after step S120 according to the embodiment of the present invention;
FIG. 5 is a schematic cross-sectional view taken along line BB' of FIG. 4;
FIG. 6 is a schematic top view illustrating the structure after step S130 according to the embodiment of the present invention;
FIG. 7 is a cross-sectional view taken along line CC' of FIG. 6;
FIG. 8 is a schematic diagram illustrating a partial top view of a stretchable display panel according to an embodiment of the present invention;
FIG. 9 is another cross-sectional view taken along line CC' of FIG. 6;
FIG. 10 is a schematic flow chart illustrating a method for manufacturing a stretchable display panel according to another embodiment of the present invention;
FIG. 11 is a schematic flowchart illustrating a method for manufacturing a stretchable display panel according to an embodiment of the present invention;
fig. 12 is a schematic diagram of a process for forming a groove in a flexible substrate according to an embodiment of the present invention;
FIG. 13 is a schematic diagram illustrating a top view of a stretchable display panel according to an embodiment of the present invention;
FIG. 14 is a schematic cross-sectional view taken along line DD' of FIG. 13;
FIG. 15 is a schematic view of another cross-sectional configuration taken along line DD' of FIG. 13;
FIG. 16 is a schematic diagram illustrating a partial top view of another stretchable display panel according to an embodiment of the present invention;
fig. 17 and 18 are schematic partial top views illustrating a stretchable display panel according to an embodiment of the present invention;
FIG. 19 is a schematic diagram illustrating a top view of a stretchable display panel according to an embodiment of the present invention;
fig. 20 is a schematic structural diagram of a stretchable display device according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. It should be noted that the terms "upper", "lower", "left", "right", and the like used in the description of the embodiments of the present invention are used in the angle shown in the drawings, and should not be construed as limiting the embodiments of the present invention. In addition, in this context, it is also to be understood that when an element is referred to as being "on" or "under" another element, it can be directly formed on "or" under "the other element or be indirectly formed on" or "under" the other element through an intermediate element. The terms "first," "second," and the like, are used for descriptive purposes only and not for purposes of limitation, and do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In recent years, as the application scenes of display panels are becoming more abundant, flexible stretchable display panels are gradually attracting attention. Fig. 1 is a schematic top view of a stretchable display panel in the prior art, and fig. 2 is a schematic cross-sectional view along a cross-sectional line AA' in fig. 1. Referring to fig. 1 and 2, the stretchable display panel includes a flexible substrate 1, a plurality of pixel islands 2 on the flexible substrate 1, the plurality of pixel islands 2 being arranged in an array, and two adjacent pixel islands 2 being connected by a bridge 3. A hollow area 4 is arranged between the pixel island 2 and the bridge 3 connecting the pixel islands 2, and the flexible substrate at the hollow area 4 is removed, thereby providing a stretching space. Display cells 201 are formed on the pixel islands 2, and inter-island connecting lines 301 are formed on the bridges 3, so that the display cells 201 on the pixel islands 2 are electrically connected by the inter-island connecting lines 301 on the bridges 3.
In the prior art, a flexible substrate is usually formed by Polyimide (PI), the flexible substrate at the position of the hollow-out area 4 can be removed in a patterning mode through dry etching, but the area of the pixel island 2 and the bridge 3 is smaller, so that the etching area reaches 50% -60%; and the thickness of the general flexible substrate is thicker and is 3-5 times of the thickness of the normal dry etching film layer, so that the integral etching amount and the etching area are larger, and the manufacturing difficulty of the stretchable flexible display panel is very high.
In view of this, embodiments of the present invention provide a method for manufacturing a stretchable display panel, which can reduce the etching amount and the etching area of a flexible substrate and improve the reliability of the manufacturing process.
Fig. 3 is a schematic flow chart illustrating a method for manufacturing a stretchable display panel according to an embodiment of the present invention, and referring to fig. 3, the method for manufacturing a stretchable display panel includes:
step S110, a carrier substrate is provided.
It is understood that the carrier substrate is used for carrying the display panel structure prepared in the embodiment of the present invention, for example, a glass substrate may be used as the carrier substrate.
Step S120, forming a flexible substrate on one side of the carrier substrate, where the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array, at least one sub-pixel is arranged on each pixel island, two adjacent pixel islands are connected through a bridge, and a routing electrically connected to the sub-pixels is arranged on the bridge.
The flexible substrate is a base of the display panel, and is generally made of an organic material, and may be made of a polymer material such as Polyimide (PI), polycarbonate (PC), polyethersulfone (PES), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyarylate (PAR), or glass Fiber Reinforced Plastic (FRP), for example, and the flexible substrate may be transparent, translucent, or opaque, which is not limited in the embodiment of the present invention. The flexible substrate is provided with pixel islands arranged in an array, each pixel island is provided with at least one sub-pixel, each sub-pixel may include a driving circuit formed by a plurality of Thin Film Transistors (TFTs) and a Light Emitting unit, the type of the Light Emitting unit may be a Quantum Dot Light Emitting Diode (QLED) Light Emitting unit, a Micro LED, a Mini LED (Mini LED), or an Organic Light Emitting Diode (OLED).
For example, fig. 4 is a schematic top view illustrating the structure after step S120 in the embodiment of the present invention, and fig. 5 is a schematic cross-sectional structure along the section line BB' in fig. 4. Referring to fig. 4 and 5, a flexible substrate 20 is disposed on one side of the carrier substrate 10, the flexible substrate 20 is disposed with a plurality of pixel islands 21 and bridges 22, the pixel islands 21 are arranged in an array, sub-pixels 210 are disposed on the pixel islands 21 (fig. 4 schematically illustrates that 1 sub-pixel is disposed on each pixel island), two adjacent pixel islands 21 are connected through a bridge 22, and a trace 220 electrically connected to the sub-pixels 210 is disposed on the bridge 22. The sub-pixel 210 includes a driving circuit 211 and a light emitting unit 212, and is used for implementing image display.
Step S130, forming a groove penetrating the flexible substrate on the flexible substrate.
The groove divides the flexible substrate into an effective area and a redundant area, and the effective area is provided with a pixel island and a bridge.
Fig. 6 is a schematic top view illustrating the structure after step S130 according to the embodiment of the present invention, and fig. 7 is a schematic cross-sectional structure along a section line CC' in fig. 6. Referring to fig. 6 and 7, a groove 23 is formed on the flexible substrate 20 to penetrate the flexible substrate 20, and the groove 23 extends around the pixel island 21 and the bridge 22, thereby dividing the flexible substrate 20 into an active area 20a and a redundant area 20b. Wherein the active area 20a is provided with pixel islands 21 and bridges 22 and the redundant area 20b has no display structure, and the grooves 23 provide a deformation space required for stretching when the display panel is stretched. It is to be understood that 9 pixel islands 21 are schematically illustrated in fig. 6, and the grooves in the periphery of the outer pixel islands 21 are not illustrated in fig. 6.
Optionally, at least one groove is annular and surrounds a redundant area, and the groove includes a first edge and a second edge which are opposite; the first edge forms a partial edge of the active area and the second edge forms an edge of the redundant area.
With continued reference to fig. 6 and 7, the redundant area 20b surrounded by the four pixel islands 21 is an annular groove, and the groove 23 includes a first edge 23a and a second edge 23b opposite to each other, where the first edge 23a forms a partial edge of the active area 20a, and the second edge 23b forms an edge of the redundant area 20b, that is, the groove 23 structurally divides the active areas 20a and 20b into structures separated from each other, so as to avoid mutual influence during tensile deformation.
According to the technical scheme of the embodiment of the invention, the pixel island and the bridge are arranged on the flexible substrate, the pixel island is provided with the sub-pixels for display, and the bridge is provided with the connecting wires of the sub-pixels and bears the deformation during stretching; the groove penetrating through the flexible substrate is formed in the flexible substrate, and the groove provides a space required by deformation during stretching, so that the problem of difficulty in manufacturing process caused by the fact that the flexible substrate needs to be removed in a large area is solved, and the reliability of the manufacturing process is improved.
Fig. 8 is a schematic partial top view illustrating a stretchable display panel according to an embodiment of the invention, and referring to fig. 8, optionally, the distance d between the groove 23 and the first trace 221 on the adjacent bridge 22 in the first direction x 1 Greater than or equal to 20 μm and less than or equal to 50 μm, the first trace 221 is the trace closest to the groove 23 on the bridge 22; and/or the distance d in the first direction x between the first edge 23a of the groove 23 and the first edge of the first sub-pixel 213 on the adjacent pixel island 21 2 Greater than or equal to 20 μm and less than or equal to 50 μm, the first sub-pixel 213 is a sub-pixel on the pixel island 21 closest to the first edge 23a of the groove 23, the first edge of the first sub-pixel 213 is adjacent to and parallel to the first edge 23a of the groove 23, and the first direction x is perpendicular to the extending direction of the groove 23 and parallel to the plane of the flexible substrate.
It will be appreciated that in practice, multiple traces may be provided on the bridge 22, only one of which is shown in fig. 8, d 1 Represents the closest distance between the edge of the groove 23 and the edge of the trace; a plurality of sub-pixels may be disposed on the pixel island 21, only one sub-pixel is shown in fig. 8, the area of the driving circuit is generally larger than that of the light emitting unit, and the edge of the first sub-pixel 213 is the edge of the driving circuit. That is, when the groove 23 is designed, the remaining amount of 20 μm to 50 μm width is designed on the periphery of the pixel island 21 and the bridge 22, which can prevent the damage to the trace or the driving circuit during the stretching.
Alternatively, with continued reference to FIG. 7, the width d of the groove 23 in a direction perpendicular to the direction of extension of the groove 23 3 20 μm or more and 50 μm or less.
Wherein, the extending direction of the groove 23 refers to the extending direction along the plane direction of the flexible substrate, and the design d 3 The width of the flexible substrate is 20-50 microns, deformation amount required by stretching can be met, the existing etching process can be achieved, large-area etching of the flexible substrate can be avoided, and process difficulty is reduced.
Fig. 9 is a schematic diagram of another cross-sectional structure along the section line CC' in fig. 6, and referring to fig. 8, alternatively, the cross-sectional shape of the groove 23 in the direction perpendicular to the extending direction of the groove 23 is a trapezoid, and the upper bottom of the trapezoid is located on the surface of the flexible substrate 20 on the side facing away from the pixel island 21.
It can be understood that in the actual etching process, as the etching depth becomes deeper, the width becomes narrower, so that the groove 23 forms an inverted trapezoid shape, and optionally, the upper bottom of the trapezoid is greater than or equal to 5 μm, so as to meet the process precision requirement and separate the active region and the redundant region.
On the basis of the foregoing embodiment, fig. 10 is a schematic flow chart of a manufacturing method of another stretchable display panel according to an embodiment of the present invention, and referring to fig. 10, the manufacturing method of the stretchable display panel includes:
step S210, a carrier substrate is provided.
Step S220, forming a flexible substrate on one side of the bearing substrate, wherein the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array manner, at least one sub-pixel is arranged on each pixel island, two adjacent pixel islands are connected through the bridge, and the bridge is provided with a wiring electrically connected with the sub-pixels.
Step S230, forming a groove penetrating the flexible substrate on the flexible substrate.
Step S240, forming a stretchable first protection layer on a side of the flexible substrate facing away from the carrier substrate.
Wherein the first protective layer covers the flexible substrate.
In specific implementation, the first protective layer may be coated, in which case the first protective layer may fill the groove of the flexible substrate; the first protective layer can be attached to one side, away from the bearing substrate, of the flexible substrate in a film attaching mode. According to the preparation method provided by the embodiment, the groove is designed in the flexible substrate instead of removing the flexible substrate in a large area, so that the first protective layer can be prevented from being in large-area contact with the bearing substrate, the contact area with the bearing substrate is reduced, the separating force can be reduced when the laser is taken down, and the separation of the bearing substrate is facilitated.
Optionally, before forming the stretchable first protective layer on the side of the flexible substrate facing away from the carrier substrate, the method further includes:
at least a portion of the flexible substrate of the redundant region is removed.
By removing at least part of the substrate of part of the redundant area, more areas can be filled with the stretchable first protective layer, thereby improving the stretching performance of the stretchable display panel. In addition, in the embodiment, the effective area and the redundant area of the flexible substrate are separated by the groove, so that the redundant area can be removed in a non-etching manner, and the process difficulty is reduced; in addition, the side wall of the groove designed by the embodiment is smoother than the side wall of the flexible substrate which is directly etched, the side wall roughness Ra of the etching method without the grooving scheme is more than 1 mu m, and the side wall roughness Ra of the grooving scheme is less than or equal to 1 mu m.
Fig. 11 is a schematic flow chart illustrating a method for manufacturing a stretchable display panel according to another embodiment of the present invention, and referring to fig. 11, the method for manufacturing a stretchable display panel includes:
step S310, a carrier substrate is provided.
Step S320, forming a flexible substrate on one side of the carrier substrate, where the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array, at least one sub-pixel is arranged on each pixel island, two adjacent pixel islands are connected with each other through a bridge, and a wiring electrically connected to the sub-pixels is arranged on the bridge.
Step S330, forming a groove penetrating the flexible substrate on the flexible substrate.
Step S340, forming a stretchable first protective layer on a side of the flexible substrate facing away from the carrier substrate.
And step S350, peeling the flexible substrate and the first protective layer from the bearing substrate.
In specific implementation, the flexible substrate and the bearing substrate can be irradiated by laser to realize the separation of the flexible substrate and the bearing substrate.
And step S360, forming a stretchable second protective layer on the side, away from the first protective layer, of the flexible substrate.
The stretchable second protection layer is formed on the side, away from the first protection layer, of the flexible substrate, the seven first protection layers and the seven second protection layers can be made of the same material, the panel structure is arranged between the stretchable first protection layers and the stretchable second protection layers, and the stretchable performance of the display panel can be improved.
Optionally, forming the groove penetrating through the flexible substrate on the flexible substrate includes:
step S131, forming a third protective layer on the pixel island and the bridge;
step S132, forming photoresist on the third protective layer;
step S133, removing the photoresist at the corresponding position of the groove by exposure and development;
s134, removing the third protective layer at the position corresponding to the groove;
step S135, etching the flexible substrate to form a groove penetrating through the flexible substrate;
and step S136, removing all the third protective layers.
In an exemplary embodiment, fig. 12 is a schematic diagram of a process of forming a groove on a flexible substrate according to an embodiment of the present invention, and a specific structure of the pixel island and the bridge is not shown in the diagram. Referring to fig. 12, a third protective layer 24 is first formed on the pixel islands 21 and the bridges 22 (S131); then forming a photoresist 25 on the third protective layer 24 (S132); removing the photoresist at the corresponding position of the groove by exposure and development (S133); removing the third protective layer at the position corresponding to the groove (S134); etching the flexible substrate 20 to form a groove 23 penetrating the flexible substrate 20 (S135); finally, all the third protective layer is removed (S136).
Optionally, etching the flexible substrate to form a groove penetrating through the flexible substrate includes:
etching the flexible substrate by utilizing a primary etching step to form a groove on the flexible substrate;
and etching the groove in the step again to form a groove penetrating through the flexible substrate.
It is understood that one etching may not penetrate the flexible substrate due to the thick thickness of the flexible substrate, and thus the groove penetrating the flexible substrate is formed by at least two etching.
Optionally, forming a groove through the flexible substrate on the flexible substrate includes:
the flexible substrate is patterned using laser etching to form a groove through the flexible substrate.
In other embodiments, the flexible substrate may be patterned with a picosecond laser to directly form the grooves through the flexible substrate.
Embodiments of the present invention further provide a stretchable display panel formed by any one of the stretchable display panels provided in the above embodiments. Fig. 13 is a schematic top view illustrating a stretchable display panel according to an embodiment of the present invention, and fig. 14 is a schematic cross-sectional view taken along a section line DD' in fig. 13. Referring to fig. 13 and 14, the present embodiment provides a stretchable display panel including: the display device comprises a flexible substrate 20, wherein the flexible substrate 20 is provided with a plurality of pixel islands 21 and bridges 22, the pixel islands 21 are arranged in an array, at least one sub-pixel 210 is arranged on each pixel island 21 (fig. 13 schematically shows that 1 sub-pixel is arranged on each pixel island), two adjacent pixel islands 21 are connected through the bridge 22, and a routing 220 electrically connected with the sub-pixels 210 is arranged on the bridge 22; the flexible substrate 20 is provided with a groove 23 penetrating the flexible substrate 20, the groove 23 dividing the flexible substrate 20 into an active area 20a and a redundant area 20b, the active area 20a being provided with pixel islands 21 and bridges 22.
Wherein the groove 23 extends around the pixel island 21 and the bridge 22, thereby dividing the flexible substrate 20 into the active area 20a and the redundant area 20b. The active area 20a is provided with pixel islands 21 and bridges 22, and the redundant area 20b has no display structure, and the grooves 23 provide a deformation space required for stretching when the display panel is stretched.
Optionally, at least one groove is annular and surrounds a redundant area, and the groove includes a first edge and a second edge which are opposite; the first edge forms part of the edge of the active area and the second edge forms the edge of the redundant area.
With continued reference to fig. 13, the outer side of the redundant area enclosed by the four pixel islands 21 is an annular groove, and the groove includes a first edge 23a and a second edge 23b opposite to each other, where the first edge 23a forms a partial edge of the active area 20a, and the second edge 23b forms an edge of the redundant area 20b, that is, the groove 23 structurally divides the active areas 20a and 20b into structures separated from each other, so as to avoid mutual influence during tensile deformation.
According to the technical scheme of the embodiment of the invention, the pixel island and the bridge are arranged on the flexible substrate, the pixel island is provided with the sub-pixels for display, and the bridge is provided with the connecting wires of the sub-pixels and the deformation during bearing and stretching; the groove penetrating through the flexible substrate is formed in the flexible substrate, and the groove provides a space required by deformation in stretching, so that the problem of difficulty in manufacturing process caused by large-area removal of the flexible substrate is avoided, and the reliability of the manufacturing process is improved.
Fig. 15 is a schematic cross-sectional view taken along a section line DD' in fig. 13, and referring to fig. 15, the stretchable display panel provided in this embodiment optionally further includes a stretchable first protective layer 30 covering the pixel islands 21 and the bridges 22, the first protective layer 30 covering the flexible substrate. By providing the stretchable first protective layer 30, the stretching performance of the stretchable display panel can be improved.
With continued reference to fig. 15, optionally, the stretchable display panel further comprises a stretchable second protective layer 40, the second protective layer 40 being located on a side of the flexible substrate 20 facing away from the first protective layer 30.
By forming the stretchable second protective layer 40 on the side of the flexible substrate 20 facing away from the first protective layer 30, the panel structure is provided between the stretchable first protective layer 30 and the second protective layer 40, the stretching performance of the display panel can be improved.
Fig. 16 is a schematic top view illustrating another stretchable display panel according to an embodiment of the present invention, and referring to fig. 16, at least a partial region of the bridge 22 may optionally have a curved shape. Alternatively, the bridge 22 is formed by splicing a plurality of arcs with different bending directions, and the extending direction of the groove 23 surrounding the bridge 22 is the same as the extending direction of the bridge 22. This allows the bridge 22 to withstand greater deformation and improves the tensile properties of the panel.
Optionally, the groove 23 around the pixel island 21 extends in a straight line or a curved line, and the projection of the groove 23 corresponding to the corner position of the pixel island 21 on the flexible substrate is a straight line corner or an arc corner.
For example, fig. 17 and fig. 18 are schematic partial top view structural diagrams of another stretchable display panel according to an embodiment of the present invention, where the groove 23 around the pixel island 21 shown in fig. 17 is a straight corner, and the groove 23 around the pixel island 21 shown in fig. 18 is an arc corner.
Alternatively, the projection of the pixel island 21 on the flexible substrate is polygonal, and the extending direction of the groove 23 surrounding the pixel island 21 is parallel to the edge of the pixel island 21.
With continued reference to fig. 17 or fig. 18, taking the pixel island 21 as a rectangle as an example, the extending direction of the groove 23 disposed at the edge of the pixel island 21 is parallel to the edge of the pixel island 21, so that the substrate of the pixel island 21 and the sub-pixel can be made to have similar shapes, better carrying the sub-pixel, and the stress is uniform when stretching.
Fig. 19 is a schematic diagram illustrating a partial top view structure of another stretchable display panel according to an embodiment of the present invention, and referring to fig. 19, optionally, the groove 23 includes a plurality of sub-grooves 231, and the plurality of sub-grooves 231 surrounds partial areas of the pixel island 21 and the bridge 22.
In some embodiments, the groove 23 is formed by at least two times of etching, in a specific implementation, a continuous groove 23 that does not penetrate through the flexible substrate 20 and then an intermittent groove 23 that penetrates through the flexible substrate 20 may be formed by one time of etching, or an intermittent groove 23 that does not penetrate through the flexible substrate 20 and then an intermittent groove 23 that penetrates through the flexible substrate 20 may be formed by one time of etching, which may be selected according to an actual process in a specific implementation, and is not limited in this embodiment of the present invention.
Fig. 20 is a schematic structural diagram of a stretchable display device according to an embodiment of the invention. Referring to fig. 20, the stretchable display device 100 includes any one of the stretchable display panels 200 provided in the embodiments of the present invention. The display device 100 may be a mobile phone, a computer, an intelligent wearable device, and the like.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in some detail by the above embodiments, the invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the invention, and the scope of the invention is determined by the scope of the appended claims.

Claims (20)

1. A method for preparing a stretchable display panel, comprising:
providing a bearing substrate;
forming a flexible substrate on one side of the bearing substrate, wherein the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array manner, at least one sub-pixel is arranged on each pixel island, two adjacent pixel islands are connected through the bridge, and the bridge is provided with a wiring electrically connected with the sub-pixels;
forming a groove penetrating through the flexible substrate on the flexible substrate;
the groove divides the flexible substrate into an effective area and a redundant area, and the effective area is provided with the pixel island and the bridge;
at least one of the grooves is annular and surrounds one of the redundant areas, and the groove comprises a first edge and a second edge which are opposite; the first edge forms a partial edge of the active area, and the second edge forms an edge of the redundant area;
the distance between the groove and a first wire on an adjacent bridge in a first direction is greater than or equal to 20 micrometers and less than or equal to 50 micrometers, and the first wire is the wire closest to the groove on the bridge; and/or the presence of a gas in the gas,
the distance between the first edge of the groove and the first edge of a first sub-pixel on an adjacent pixel island in the first direction is greater than or equal to 20 μm and less than or equal to 50 μm, the first sub-pixel is the sub-pixel on the pixel island closest to the first edge of the groove, the first edge of the first sub-pixel is adjacent to and parallel to the first edge of the groove, and the first direction is perpendicular to the extending direction of the groove and parallel to the plane of the flexible substrate.
2. The method for manufacturing a stretchable display panel according to claim 1, further comprising, after forming a groove through the flexible substrate on the flexible substrate:
forming a stretchable first protective layer on one side of the flexible substrate, which faces away from the bearing substrate;
wherein the first protective layer covers the flexible substrate.
3. The method for manufacturing a stretchable display panel according to claim 2, further comprising, before forming a stretchable first protective layer on a side of the flexible substrate facing away from the carrier substrate:
removing at least part of the flexible substrate of the redundant region.
4. The method for manufacturing a stretchable display panel according to claim 2, further comprising, after forming a stretchable first protective layer on a side of the flexible substrate facing away from the carrier substrate:
peeling the flexible substrate and the first protective layer from the carrier substrate;
a stretchable second protective layer is formed on a side of the flexible substrate facing away from the first protective layer.
5. The method of manufacturing a stretchable display panel according to claim 1, wherein forming a groove through the flexible substrate on the flexible substrate comprises:
forming a third protective layer on the pixel islands and the bridges;
forming a photoresist on the third protective layer;
removing the photoresist at the corresponding position of the groove by exposure and development;
removing the third protective layer at the position corresponding to the groove;
etching the flexible substrate to form the groove through the flexible substrate;
and removing all the third protective layer.
6. The method of claim 5, wherein etching the flexible substrate to form the recess through the flexible substrate comprises:
etching the flexible substrate by utilizing a primary etching step to form a groove on the flexible substrate;
and etching the groove in the previous step again to form the groove penetrating through the flexible substrate.
7. The method of manufacturing a stretchable display panel according to claim 1, wherein forming a groove through the flexible substrate on the flexible substrate comprises:
and patterning the flexible substrate by utilizing laser etching to form the groove penetrating through the flexible substrate.
8. The method of claim 1, wherein the width of the groove in a direction perpendicular to the groove extension direction is greater than or equal to 20 μm and less than or equal to 50 μm.
9. The method for manufacturing a stretchable display panel according to claim 1, wherein the cross-sectional shape of the groove in a direction perpendicular to the extending direction of the groove is a trapezoid, and an upper bottom of the trapezoid is located on a surface of the flexible substrate on a side facing away from the pixel island.
10. The method of manufacturing a stretchable display panel according to claim 9, wherein an upper bottom of the trapezoid is greater than or equal to 5 μm.
11. A stretchable display panel, comprising:
the flexible substrate is provided with a plurality of pixel islands and bridges, the pixel islands are arranged in an array mode, at least one sub-pixel is arranged on each pixel island, every two adjacent pixel islands are connected through the bridge, and a wiring electrically connected with the sub-pixels is arranged on the bridge;
the flexible substrate is provided with a groove penetrating through the flexible substrate, the groove divides the flexible substrate into an effective area and a redundant area, and the effective area is provided with the pixel island and the bridge;
at least one of the grooves is annular and surrounds one of the redundant areas, and the groove comprises a first edge and a second edge which are opposite; the first edge forms a partial edge of the active area, and the second edge forms an edge of the redundant area;
the distance between the groove and a first wire on an adjacent bridge in a first direction is greater than or equal to 20 micrometers and less than or equal to 50 micrometers, and the first wire is the wire closest to the groove on the bridge; and/or the presence of a gas in the atmosphere,
the distance between the first edge of the groove and the first edge of a first sub-pixel on an adjacent pixel island in the first direction is greater than or equal to 20 μm and less than or equal to 50 μm, the first sub-pixel is the sub-pixel on the pixel island closest to the first edge of the groove, the first edge of the first sub-pixel is adjacent to and parallel to the first edge of the groove, and the first direction is perpendicular to the extending direction of the groove and parallel to the plane of the flexible substrate.
12. A stretchable display panel according to claim 11, wherein at least one of the grooves is annular and surrounds one of the redundant regions, the groove including opposing first and second edges; the first edge forms a partial edge of the active area, and the second edge forms an edge of the redundant area.
13. The stretchable display panel of claim 11, further comprising a stretchable first protective layer covering the pixel islands and the bridges, the first protective layer covering the flexible substrate.
14. A stretchable display panel according to claim 13, further comprising a stretchable second protective layer on a side of the flexible substrate facing away from the first protective layer.
15. A stretchable display panel according to claim 11, wherein at least a partial area of the bridge has a curved shape.
16. The stretchable display panel according to claim 15, wherein the bridge comprises a plurality of circular arcs formed by splicing and having different bending directions, and the grooves around the bridge extend in the same direction as the bridge.
17. The stretchable display panel of claim 11, wherein the grooves around the pixel islands extend in a straight line or a curved line, and the grooves corresponding to the corner positions of the pixel islands have a straight line corner or an arc-shaped corner in the projection of the flexible substrate.
18. The stretchable display panel of claim 17, wherein the projection of the pixel islands on the flexible substrate is polygonal, and the grooves surrounding the pixel islands extend parallel to the edges of the pixel islands.
19. The stretchable display panel according to claim 11, wherein the groove comprises a plurality of sub-grooves surrounding the pixel islands and a partial region of the bridge.
20. A stretchable display device comprising the stretchable display panel defined in any one of claims 11 to 19.
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CN113451538A (en) * 2021-06-29 2021-09-28 云谷（固安）科技有限公司 Flexible stretchable display panel and manufacturing method thereof
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